UV irradiation device

Abstract

To more appropriately cool a lamp.SOLUTION: An ultraviolet irradiation apparatus 10 comprises an irradiation unit 20, and an air cooling unit 40. The irradiation unit 20 has first lamps 21A to fourth lamps 21D emitting ultraviolet light. The air cooling unit 40 has main piping 41, first branched piping 42A, second branched piping 42B, a first air volume regulation mechanism 52A, and a second air volume regulation mechanism 52B. The first branched piping 42A is branched from the main piping 41. The second branched piping 42B is branched from the main piping 41. The first air volume regulation mechanism 52A is mounted to the first branched piping 42A. The second air volume regulation mechanism 52B is mounted to the second branched piping 42B. The first branched piping 42A and the second branched piping 42B can regulate their flow volume individually.SELECTED DRAWING: Figure 3

Description

[Technical field]

[0001] The present invention relates to an ultraviolet irradiation device. [Background technology]

[0002] Patent Document 1 discloses an ultraviolet irradiation device. This ultraviolet irradiation device has a plurality of lamps that irradiate ultraviolet rays, and an air-cooling unit that cools these lamps with gas. The air-cooling unit has a main pipe through which pressurized gas flows, and a plurality of nozzles branching off from the main pipe. There are the same number of nozzles as there are lamps. The downstream opening of each nozzle faces each lamp. Therefore, the gas pressurized into the main pipe is sprayed from the nozzle toward each lamp. The lamps are then cooled by the sprayed gas hitting them. [Prior art documents] [Patent documents]

[0003] [Patent Document 1] JP 2001-135486 A Summary of the Invention [Problem to be solved by the invention]

[0004] In the air-cooling unit of an ultraviolet irradiation device as described in Patent Document 1, if the nozzles have the same shape, the same amount of gas is sprayed from each nozzle. Therefore, the air-cooling unit cools each lamp uniformly. However, when the ultraviolet irradiation device is operated, the temperature of each lamp is not necessarily uniform, and even the same lamp does not necessarily have a uniform temperature at each location. Therefore, in the conventional ultraviolet irradiation device, the lamp cannot be appropriately cooled according to the temperature difference between the lamps, the temperature difference between each location of the lamp, etc. [Means for solving the problem]

[0005] In order to solve the above problems, the present invention provides an ultraviolet irradiation device comprising an irradiation unit having a lamp for irradiating ultraviolet light, and an air-cooling unit for cooling the lamp with gas, the air-cooling unit having a main pipe through which pressurized gas flows, a first branch pipe branching from the main pipe and spraying gas onto the irradiation unit, a second branch pipe branching from the main pipe and spraying gas onto the irradiation unit, a first airflow adjustment mechanism attached to the first branch pipe and capable of adjusting the amount of gas flowing through the first branch pipe, and a second airflow adjustment mechanism attached to the second branch pipe and capable of adjusting the amount of gas flowing through the second branch pipe, the first airflow adjustment mechanism and the second airflow adjustment mechanism being capable of adjusting the amount of gas flowing through the second branch pipe, and the first airflow adjustment mechanism and the second airflow adjustment mechanism being capable of adjusting the flow rate individually.

[0006] According to the above configuration, the amount of gas flowing through the first branch pipe can be adjusted by the first airflow adjustment mechanism. Also, the amount of gas flowing through the second branch pipe can be adjusted by the second airflow adjustment mechanism separately from the amount of gas flowing through the first branch pipe. Therefore, the amount of gas flowing through the first branch pipe and the amount of gas flowing through the second branch pipe can be adjusted separately. As a result, the amount of gas injected from the first branch pipe and the amount of gas injected from the second branch pipe can be adjusted according to the difference in temperature of each lamp. Effect of the Invention

[0007] The lamp of the ultraviolet irradiation device can be appropriately cooled. [Brief description of the drawings]

[0008] [Figure 1] FIG. 1 is an overall perspective view showing an ultraviolet irradiation device. [Diagram 2] FIG. 2 is a side view showing the ultraviolet irradiation device. [Diagram 3] FIG. 3 is a front view showing the ultraviolet irradiation device. [Figure 4] FIG. 4 is a top view showing the ultraviolet irradiation device. DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS

[0009] (One embodiment) Hereinafter, an embodiment of an ultraviolet irradiation device will be described with reference to the drawings. Note that the drawings may show components enlarged for ease of understanding. The dimensional ratios of the components may differ from those in the actual drawings or from those in other drawings.

[0010] As shown in Fig. 1, the ultraviolet irradiation device 10 includes an irradiation unit 20, a water-cooling unit 30, an air-cooling unit 40, a control unit 60, and an irradiation table 70. Note that the control unit 60 is omitted in Figs. 1 and 2.

[0011] <Irradiation unit> The irradiation unit 20 includes a plurality of lamps 21. The lamps 21 are lamps that irradiate ultraviolet light. Specifically, the lamps 21 are mercury lamps. The lamps 21 are generally cylindrical. The plurality of lamps 21 are supported by a casing (not shown).

[0012] As shown in Fig. 2, the lamp 21 has an arc tube 22 and two electrodes 23. The arc tube 22 emits ultraviolet light. The arc tube 22 has a circular tubular shape. The arc tube 22 is bent 180 degrees in the center. Except for the portion bent 180 degrees, the arc tube 22 extends linearly. In other words, the arc tube 22 is U-shaped.

[0013] The electrodes 23 supply power from a power source (not shown) to the inside of the arc tube body 22. Each electrode 23 is connected to both ends of the arc tube body 22. As described above, since the arc tube body 22 is U-shaped, the two electrodes 23 are adjacent to each other.

[0014] In the following description, as shown in Fig. 1, an axis parallel to the linearly extending portion of the light emitting tube body 22 is defined as the first axis X, and one of the axes perpendicular to the first axis X is defined as the second axis Y. In this example, an axis parallel to the direction in which two linearly extending portions of one lamp 21 are adjacent to each other is defined as the second axis Y. An axis perpendicular to both the first axis X and the second axis Y is defined as the third axis Z.

[0015] Furthermore, one of the directions along the first axis X is designated as a first positive direction X1, and the direction along the first axis X opposite to the first positive direction X1 is designated as a first negative direction X2. Furthermore, one of the directions along the second axis Y is designated as a second positive direction Y1, and the direction along the second axis Y opposite to the second positive direction Y1 is designated as a second negative direction Y2. One of the directions along the third axis Z is designated as a third positive direction Z1, and the direction along the third axis Z opposite to the third positive direction Z1 is designated as a third negative direction Z2.

[0016] The number of lamps 21 in this embodiment is four. The lamps 21 are arranged so that the linearly extending portions are parallel to each other. In this embodiment, four lamps 21 are arranged along the second axis Y. When distinguishing between the four lamps 21, the lamp 21 located closest to the second positive direction Y1 is referred to as the first lamp 21A. Then, in the order from the first lamp 21A toward the second negative direction Y2, the lamps are referred to as the second lamp 21B, the third lamp 21C, and the fourth lamp 21D.

[0017] The irradiation unit 20 includes a reflector 24. The reflector 24 reflects the light emitted by the lamp 21. As shown in Fig. 2, the reflector 24 is located on the third positive direction Z1 side with respect to the lamp 21. The irradiation unit 20 is supported by a casing (not shown).

[0018] 4, when viewed in the third negative direction Z2, the reflector 24 has a rectangular shape. Also, when viewed in the third negative direction Z2, the reflector 24 covers all of the arc tube bodies 22 of the four lamps 21 from the third positive direction Z1 side.

[0019] As shown in Fig. 2, a part of the irradiation table 70 is located on the third negative direction Z2 side as viewed from the irradiation unit 20. A main surface of the irradiation table 70 faces the third positive direction Z1. That is, the main surface of the irradiation table 70 faces each lamp 21 in the irradiation unit 20. Note that Fig. 2 illustrates only a portion of the irradiation table 70 on the third negative direction Z2 side as viewed from the irradiation unit 20, and the illustration of the other portions is omitted.

[0020] 2, an irradiation object 90 is placed on the main surface of the irradiation table 70. The irradiation object 90 is placed on the main surface of the irradiation table 70 by an arm-type industrial robot (not shown) or the like. In addition, a plurality of ultraviolet sensors 80 are installed on the main surface of the irradiation table 70. The ultraviolet sensors 80 detect the irradiation intensity of the ultraviolet light irradiated from the irradiation unit 20.

[0021] As shown in Fig. 2, the irradiation unit 20 has a lamp cover 25 and an exhaust duct 26. The lamp cover 25 is supported by a casing (not shown). The lamp cover 25 has a dome shape with a convex surface on the third positive direction Z1 side. When viewed in the third negative direction Z2, the lamp cover 25 covers the entire lamp 21 and the reflector 24.

[0022] The exhaust duct 26 is cylindrical. The exhaust duct 26 is connected to a portion of the lamp cover 25 that is closest to the third positive direction Z1. The exhaust duct 26 extends from the lamp cover 25 in the third positive direction Z1. The exhaust duct 26 penetrates the lamp cover 25. The exhaust duct 26 exhausts air from inside the lamp cover 25 to the outside of the lamp cover 25 by a fan (not shown). When viewed in the third negative direction Z2, the exhaust duct 26 is located approximately in the center of the lamp cover 25.

[0023] <Water cooling unit> 1, the water-cooling unit 30 is located on the third positive direction Z1 side with respect to the multiple lamps 21. The water-cooling unit 30 is supported by a casing (not shown). The water-cooling unit 30 is a block body in which a cooling water passage through which cooling water flows is defined. Cooling water is made to flow through the cooling water passage of the water-cooling unit 30 from a pump (not shown).

[0024] The water-cooling unit 30 has a larger dimension along the second axis Y than the dimension along the first axis X and the dimension along the third axis Z. That is, the water-cooling unit 30 has an elongated shape along the second axis Y. When viewed in the third negative direction Z2, the water-cooling unit 30 covers the electrodes 23 of all the lamps 21. The water-cooling unit 30 is located on the opposite side of the lamps 21 to the side where the air-cooling unit 40, which will be described later, is located. The water-cooling unit 30 is in contact with each electrode 23.

[0025] <Air cooling unit> The air-cooling unit 40 is a unit that uses gas to cool the multiple lamps 21. The air-cooling unit 40 is supported by a casing (not shown). The air-cooling unit 40 includes a main pipe 41, two intermediate pipes 42, and four branch pipes 43.

[0026] The main pipe 41 is a pipe through which gas pressure-fed from a pressure source (not shown) flows. In this embodiment, the gas is air. The two intermediate pipes 42 are connected to the downstream end of the main pipe 41. Therefore, the two intermediate pipes 42 are branched off from the main pipe 41.

[0027] 3, the main pipe 41 extends substantially parallel to the third axis Z. The two intermediate pipes 42 extend from the downstream end of the main pipe 41 in the second positive direction Y1 and the second negative direction Y2, respectively. Of the two intermediate pipes 42, the pipe extending in the second positive direction Y1 is referred to as a first intermediate pipe 42A. Moreover, of the two intermediate pipes 42, the pipe extending in the second negative direction Y2 is referred to as a second intermediate pipe 42B.

[0028] The four branch pipes 43 are branched off from the main pipe 41 via the first intermediate pipe 42A or the second intermediate pipe 42B. The branch pipes 43 are pipes that inject gas into the irradiation units 20.

[0029] Specifically, among the four branch pipes 43, the first branch pipe 43A and the second branch pipe 43B are connected to the downstream end of the first intermediate pipe 42A. The first branch pipe 43A extends toward the electrode 23 of the first lamp 21A. Therefore, when the downstream opening of the first branch pipe 43A is the first discharge port 44A, the first discharge port 44A faces the electrode 23 of the first lamp 21A. In addition, the first discharge port 44A is located on the opposite side of the first lamp 21A to the side where the water cooling unit 30 exists. Furthermore, the first discharge port 44A is located on the opposite side of the first lamp 21A to the side where the reflector 24 exists. That is, the gas ejected from the first discharge port 44A is ejected from the lower side to the upper side of the first lamp 21A in the direction opposite to the direction of gravity.

[0030] The first outlet 44A faces the electrode 23 of the first lamp 21A when the downstream end of the first branch pipe 43A is virtually extended, so that the first branch pipe 43A and the electrode 23 of the first lamp 21A overlap with each other. The same applies to the other pipes.

[0031] The second branch pipe 43B extends toward the electrode 23 of the second lamp 21B. When the downstream opening of the second branch pipe 43B is defined as a second outlet 44B, the second outlet 44B faces the electrode 23 of the second lamp 21B.

[0032] Among the four branch pipes 43, the third branch pipe 43C and the fourth branch pipe 43D are connected to the downstream end of the second intermediate pipe 42B. The third branch pipe 43C extends toward the electrode 23 of the third lamp 21C. When the downstream opening of the third branch pipe 43C is defined as a third outlet 44C, the third outlet 44C faces the electrode 23 of the third lamp 21C.

[0033] The fourth branch pipe 43D extends toward the electrode 23 of the fourth lamp 21D. When the downstream opening of the fourth branch pipe 43D is defined as a fourth outlet 44D, the fourth outlet 44D faces the electrode 23 of the fourth lamp 21D.

[0034] The length of the piping from the downstream end of the main pipe 41 to the first outlet 44A is equal to the length of the piping from the downstream end of the main pipe 41 to the fourth outlet 44D. In addition, the length of the piping from the downstream end of the main pipe 41 to the second outlet 44B is equal to the length of the piping from the downstream end of the main pipe 41 to the third outlet 44C.

[0035] The air-cooling unit 40 includes a regulator 51 and a plurality of air volume adjustment mechanisms 52. The regulator 51 adjusts the pressure of the gas being pumped. The regulator 51 is attached to the main pipe 41.

[0036] The air volume adjustment mechanism 52 is a mechanism capable of adjusting the amount of gas flowing through the pipe to which it is attached. Specifically, in this embodiment, the air volume adjustment mechanism 52 is an electromagnetic valve capable of adjusting pressure. The air volume adjustment mechanism 52 can adjust the gas pressure of the branch pipe 43 downstream from the air volume adjustment mechanism 52 in units of 1 kPa or less.

[0037] In this embodiment, the number of air volume adjustment mechanisms 52 is four, which is the same as the number of branch pipes 43. An air volume adjustment mechanism 52 is attached to each branch pipe 43. Each air volume adjustment mechanism 52 is capable of adjusting the flow rate individually. In other words, the air volume adjustment mechanisms 52 are not linked to each other, and are capable of adjusting the flow rate independently of the control state of the other air volume adjustment mechanisms 52.

[0038] When distinguishing between the air volume adjustment mechanisms 52, the air volume adjustment mechanism 52 attached to the first branch pipe 43A is referred to as the first air volume adjustment mechanism 52A. The air volume adjustment mechanism 52 attached to the second branch pipe 43B is referred to as the second air volume adjustment mechanism 52B. The air volume adjustment mechanism 52 attached to the third branch pipe 43C is referred to as the third air volume adjustment mechanism 52C. The air volume adjustment mechanism 52 attached to the fourth branch pipe 43D is referred to as the fourth air volume adjustment mechanism 52D.

[0039] 2, the air-cooling unit 40 has a light shielding plate 55. The light shielding plate 55 is interposed between the airflow adjustment mechanism 52 and the lamp 21. However, the downstream portion of each branch pipe 43 as viewed from the airflow adjustment mechanism 52 penetrates the light shielding plate 55. In other words, a part of each branch pipe 43 including the downstream end is located on the lamp 21 side as viewed from the light shielding plate 55. The light shielding plate 55 blocks ultraviolet rays from being irradiated onto the airflow adjustment mechanism 52, the regulator 51, the main pipe 41, etc.

[0040] <Control unit> As shown in FIG. 3, the control unit 60 controls the regulator 51 and each air volume adjustment mechanism 52. Although not shown, the control unit 60 has a CPU and a ROM. In particular, the ROM stores a program for controlling each air volume adjustment mechanism 52. The CPU of the control unit 60 is capable of executing the above program. When the CPU of the control unit 60 executes the program, the control unit 60 adjusts the degree of air cooling of each lamp 21 through the control of each air volume adjustment mechanism 52. When the CPU of the control unit 60 executes the program, it performs the following adjustment control. Note that the following adjustment control is performed when the irradiation object 90 is not placed on the irradiation table 70, that is, when the ultraviolet light to the ultraviolet light sensor 80 is not blocked.

[0041] In the adjustment control, the control unit 60 adjusts the opening degree of each air volume adjustment mechanism 52 so that the irradiation intensities of the lamps 21 are all the same. Specifically, the control unit 60 adjusts the opening degree of each air volume adjustment mechanism 52 so that the irradiation intensities detected by the ultraviolet sensors 80 are the same. Note that Fig. 3 shows the operation signals MS1 to MS4 of each air volume adjustment mechanism 52.

[0042] The irradiation intensity of the lamp 21 varies depending on the temperature of the lamp 21. The irradiation intensity of the lamp 21 tends to be high and stable when the temperature is within a specific range. Therefore, by adjusting the opening of the air volume adjustment mechanism 52, the force of the gas ejected from each branch pipe 43 is adjusted, and as a result, the temperature of the lamp 21 is adjusted.

[0043] (Operation of the embodiment) According to the above embodiment, the lamp 21 generates heat as ultraviolet light is emitted from the light emitting tube body 22. In particular, the electrode 23 of the lamp 21 is likely to become hot due to electrical resistance when power is supplied to the electrode 23. In addition, gas is exhausted through the exhaust duct 26 during use of the irradiation unit 20. At this time, each lamp 21 is cooled by the gas flowing toward the exhaust duct 26. On the other hand, since the positional relationship between the exhaust duct 26 and each lamp 21 is not the same for all the lamps 21, a difference in temperature may occur for each lamp 21. In addition, among the four lamps 21, the second lamp 21B and the third lamp 21C are sandwiched between the other lamps 21. Therefore, the second lamp 21B and the third lamp 21C are likely to become hot due to the heat generated by the other lamps 21.

[0044] (Effects of the embodiment) In the following, regarding the effects common to the first lamp 21A to the fourth lamp 21D, the effects of the first lamp 21A will be described as a representative.

[0045] (1) According to the above embodiment, the first airflow adjustment mechanism 52A can adjust the amount of gas flowing through the first branch pipe 43A. Furthermore, the second airflow adjustment mechanism 52B can adjust the amount of gas flowing through the second branch pipe 43B separately from the amount of gas flowing through the first branch pipe 43A. Therefore, the amount of gas flowing through the first branch pipe 43A and the amount of gas flowing through the second branch pipe 43B can be adjusted separately. As a result, the amount of gas injected from the first branch pipe 43A and the amount of gas injected from the second branch pipe 43B can be adjusted in accordance with the difference in temperature between the first lamp 21A and the second lamp 21B.

[0046] (2) According to the above embodiment, the first outlet 44A faces the first lamp 21A, and the second outlet 44B faces the second lamp 21B. This makes it possible to adjust the degree of cooling for each of the first lamp 21A and the second lamp 21B individually by separately adjusting the amount of gas flowing through the first branch pipe 43A and the amount of gas flowing through the second branch pipe 43B.

[0047] (3) For example, the first air volume adjustment mechanism 52A and the fourth air volume adjustment mechanism 52D may be controlled so that the amount of gas injected from the fourth outlet 44D is equal to the amount of gas injected from the first outlet 44A. According to the above embodiment, the length of the piping from the downstream end of the main piping 41 to the first outlet 44A is equal to the length of the piping from the downstream end of the main piping 41 to the fourth outlet 44D. Therefore, if the fourth air volume adjustment mechanism 52D is controlled in the same manner as the first air volume adjustment mechanism 52A, the amount of gas injected from the fourth outlet 44D can be made equal to the amount of gas injected from the first outlet 44A. In other words, the control of the fourth air volume adjustment mechanism 52D can be simplified in adjusting the amount of gas injected from the fourth outlet 44D to be equal to the amount of gas injected from the first outlet 44A. In this regard, according to the above embodiment, the length of the piping from the downstream end of the main piping 41 to the second outlet 44B is equal to the length of the piping from the downstream end of the main piping 41 to the third outlet 44C. Therefore, in order to adjust the amount of gas injected from the third outlet 44C to be equal to the amount of gas injected from the second outlet 44B, the third air volume adjustment mechanism 52C may perform the same control as the second air volume adjustment mechanism 52B. Therefore, in order to adjust the amount of gas injected from the third outlet 44C to be equal to the amount of gas injected from the second outlet 44B, the control of the third air volume adjustment mechanism 52C can be simplified.

[0048] (4) According to the above embodiment, the air-cooling unit 40 further includes the regulator 51. By adjusting the gas pressure in the main pipe 41 with the regulator 51, fluctuations in the pressure of the gas flowing through each branch pipe 43 can be suppressed.

[0049] (5) According to the above embodiment, the first outlet 44A faces the electrode 23 of the first lamp 21A. As described above, the electrode 23 of the first lamp 21A is the part that is most likely to generate heat. Therefore, by causing the gas ejected from the first outlet 44A to collide with the electrode 23, the air-cooling unit 40 can efficiently cool the electrode 23.

[0050] (6) According to the above embodiment, the gas injected from the first outlet 44A is injected from the lower side to the upper side of the first lamp 21A. Therefore, the gas injected into the first lamp 21A and heated to a high temperature can be efficiently exhausted from the exhaust duct 26.

[0051] (7) According to the embodiment described above, the first outlet 44A is located on the opposite side of the first lamp 21A from the side on which the reflector 24 is located. Therefore, when the reflector 24 is viewed in the third positive direction Z1, the size of the reflector 24 can be set large without interfering with the first outlet 44A. By setting the size of the reflector 24 large, the reflected light from the reflector 24 can be strengthened.

[0052] (8) According to the above embodiment, the water-cooling unit 30 is located on the opposite side of the first lamp 21A to the side where the first outlet 44A is located. Therefore, the first lamp 21A can be cooled from both sides by the water-cooling unit 30 and the air-cooling unit 40.

[0053] (9) In the above embodiment, the lamp 21 is a mercury lamp. Since a mercury lamp generates heat relatively easily, it is easy to obtain the cooling effect of the water-cooling unit 30 and the air-cooling unit 40.

[0054] (10) According to the above embodiment, the control unit 60 controls each airflow adjustment mechanism 52 so that the irradiation intensities of the lamps 21 are all the same. Therefore, unevenness in the intensity of ultraviolet light is unlikely to occur from place to place on the main surface of the irradiation table 70.

[0055] (Other embodiments) The above embodiment and the following modified examples can be implemented in combination with each other to the extent that no technical contradiction occurs.

[0056] The configuration of the lamp 21 is not limited to the example of the above embodiment. The lamp 21 may extend linearly as a whole. The lamp 21 is not limited to a mercury lamp. The lamp 21 may be an LED lamp or other lamp that can irradiate ultraviolet light. The lamps 21 may be of different types.

[0057] The location where the water-cooling unit 30 is installed is not limited to the side opposite the first outlet 44A across the first lamp 21A. For example, the water-cooling unit 30 may be located on the third negative direction Z2 side with respect to the four lamps 21. Also, the water-cooling unit 30 may be omitted from the ultraviolet irradiation device 10.

[0058] The regulator 51 may be omitted from the air cooling unit 40. The intermediate pipe 42 may be omitted from the air cooling unit 40. The branch pipe 43 may be directly branched off from the main pipe 41.

[0059] The number of branch pipes 43 may be three or may be five or more. At least two is sufficient. The number of air volume adjustment mechanisms 52 may be changed according to the number of branch pipes 43. Note that, when the number of branch pipes 43 is three or more, there may be a branch pipe 43 to which no air volume adjustment mechanism 52 is attached.

[0060] The number of branch pipes 43 connected to the first intermediate pipe 42A and the number of branch pipes 43 connected to the second intermediate pipe 42B may be different. The first outlet 44A does not have to face the electrode 23 of the first lamp 21A. For example, the first outlet 44A may face the light-emitting tube body 22 of the first lamp 21A. If there is a location that is prone to localized heat generation due to the overall structure of the irradiation unit 20, the first outlet 44A may face that location. An example of a location that is prone to localized heat generation is a location that is a certain distance away from the exhaust duct 26. The same applies to the second outlet 44B, the third outlet 44C, and the fourth outlet 44D.

[0061] The first outlet 44A and the second outlet 44B may face the same lamp 21. Even if the lamps 21 are the same, if the distance between adjacent lamps 21 is different or the distance from the exhaust duct 26 is different, a temperature difference may occur at each location.

[0062] The first discharge port 44A may face between adjacent electrodes 23. In this way, when the distance between adjacent electrodes 23 is small, all of the adjacent electrodes 23 can be efficiently cooled by the gas ejected from the first discharge port 44A.

[0063] It is preferable that the distance from the regulator 51 to each of the air volume adjustment mechanisms 52 is the same. By adjusting the length of each pipe in this manner, the pressure of the gas injected from each of the branch pipes 43 tends to become uniform.

[0064] The configuration of the air volume adjustment mechanism 52 is not limited to an electromagnetic valve. For example, the air volume adjustment mechanism 52 may be a mechanical valve that can adjust the flow rate by a user's operation. Furthermore, the air volume adjustment mechanism 52 is not limited to a valve. For example, the air volume adjustment mechanism 52 may have a fan that can blow gas. Even in this case, the air volume flowing through each branch pipe 43 can be adjusted by adjusting the rotation speed of the fan.

[0065] In the adjustment control, the control unit 60 may adjust each air volume adjustment mechanism 52 so that the temperatures of each lamp 21 are the same. In this case, the temperature of each lamp 21 may be detected by a temperature sensor.

[0066] The control unit 60 may execute the adjustment control in parallel with irradiating the irradiation object 90 with ultraviolet rays. As long as the ultraviolet rays to each ultraviolet sensor 80 are not blocked by the irradiation object 90, there is no problem in executing the adjustment control.

[0067] The control unit 60 may execute the adjustment control with only the first lamp 21A and the second lamp 21B as the control targets. Similarly, the control unit 60 may execute the adjustment control with only the second lamp 21B and the third lamp 21C as the control targets, or may execute the adjustment control with only three of the four lamps 21 as the control targets. In addition, the control unit 60 may not execute the adjustment control. Note that if the air volume adjustment mechanism 52 is not electrically controlled, the control unit 60 may be omitted from the ultraviolet irradiation device 10.

[0068] The control unit 60 is not limited to a unit equipped with a CPU and a ROM and executing software processing. For example, the control unit 60 may be equipped with a dedicated hardware circuit (such as an ASIC) that performs hardware processing of at least a part of what has been processed by software in each of the above embodiments. That is, the control unit 60 may have any of the following configurations (a) to (c). (a) A processing device that executes all of the above processing according to a program, and a program storage device such as a ROM that stores the program. (b) A processing device and a program storage device that execute a part of the above processing according to a program, and a dedicated hardware circuit that executes the remaining processing. (c) A dedicated hardware circuit that executes all of the above processing. Here, there may be a plurality of software execution devices equipped with a processing device and a program storage device, and a plurality of dedicated hardware circuits.

[0069] In the above embodiment, the casing supporting each unit may be made up of a plurality of members, or may be made up of a single member. The technical ideas that can be understood from the above-described embodiment and modified examples will be described.

[0070] <1> an irradiation unit having a lamp for irradiating ultraviolet light; an air-cooling unit for cooling the lamp with gas; It is equipped with The air cooling unit comprises: The main pipe through which the pressurized gas flows; A first branch pipe that branches off from the main pipe and injects gas into the irradiation unit; A second branch pipe that branches off from the main pipe and injects gas into the irradiation unit; a first air volume adjustment mechanism attached to the first branch pipe and capable of adjusting the amount of gas flowing through the first branch pipe; a second air volume adjustment mechanism attached to the second branch pipe and capable of adjusting the amount of gas flowing through the second branch pipe; It has The first air flow rate adjusting mechanism and the second air flow rate adjusting mechanism are capable of adjusting the flow rate individually. Ultraviolet irradiation device.

[0071] <2> When the lamp is a first lamp, the irradiation unit further includes a second lamp that irradiates ultraviolet light, When the downstream opening of the first branch pipe is defined as a first discharge port and the downstream opening of the second branch pipe is defined as a second discharge port, the first discharge port faces a direction in which the first branch pipe and the first lamp overlap when a downstream end of the first branch pipe is virtually extended, The second discharge port faces a direction in which the second branch pipe and the second lamp overlap when a downstream end of the second branch pipe is virtually extended. <1> 2. The ultraviolet irradiation device according to claim 1 .

[0072] <3> The air cooling unit further includes a regulator for adjusting the pressure of the gas being pumped. The regulator is attached to the main pipe. <1> or <2> 2. The ultraviolet irradiation device according to claim 1 .

[0073] <4> The lamp has an arc tube that emits light and electrodes for supplying power to the inside of the arc tube, When the downstream opening of the first branch pipe is defined as a first discharge port, The first discharge port faces a direction in which the first branch pipe and the electrode overlap when a downstream end of the first branch pipe is virtually extended. <1> from <3> 13. An ultraviolet irradiation device according to claim 12,

[0074] <5> The lamp further includes a water cooling unit for cooling the lamp with cooling water. <1> from <4> 13. An ultraviolet irradiation device according to claim 12,

[0075] <6> When the downstream opening of the first branch pipe is defined as a first discharge port, The water cooling unit is located on the opposite side of the lamp from the side on which the first outlet is located. <5> 2. The ultraviolet irradiation device according to claim 1 .

[0076] <7> The lamp is a mercury lamp. <1> from <6> 13. An ultraviolet irradiation device according to claim 12,

[0077] <8> Further comprising a control unit for controlling the first air volume adjustment mechanism and the second air volume adjustment mechanism, When the lamp is a first lamp, the irradiation unit further includes a second lamp that irradiates ultraviolet light, The control unit The first airflow adjustment mechanism and the second airflow adjustment mechanism are controlled so that the irradiation intensity of the first lamp and the irradiation intensity of the second lamp are the same intensity. <1> from <7> 13. An ultraviolet irradiation device according to claim 12, [Explanation of symbols]

[0078] 10...UV irradiation device 20…Irradiation unit 21...Lamp 21A…First lamp 21B…2nd lamp 21C…3rd ramp 21D…4th ramp 22...Light emitting tube 23...Electrode 24...Reflector 25…Lamp cover 26…Exhaust duct 30…Water cooling unit 40…Air-cooled unit 41…Main piping 42...Intermediate piping 42A…First intermediate pipe 42B…Second intermediate piping 43...Branch piping 43A…First branch pipe 43B…Second branch piping 43C…Third branch piping 43D…4th branch pipe 44A…1st discharge port 44B…Second discharge port 44C…Third discharge port 44D…4th discharge port 51…Regulator 52…Air volume adjustment mechanism 52A…1st air volume adjustment mechanism 52B…Second air volume adjustment mechanism 52C…Third air volume adjustment mechanism 52D…4th air volume adjustment mechanism 55…Shade plate 60…Control unit 70…Irradiation table 80...UV sensor 90…Irradiation target

Claims

1. an irradiation unit having a lamp for irradiating ultraviolet light; an air-cooling unit for cooling the lamp with gas; Equipped with The air cooling unit comprises: The main pipe through which the pressurized gas flows; a first branch pipe branching from the main pipe and injecting gas into the irradiation unit; A second branch pipe that branches off from the main pipe and injects gas into the irradiation unit; a first air volume adjustment mechanism attached to the first branch pipe and capable of adjusting the amount of gas flowing through the first branch pipe; a second air volume adjustment mechanism attached to the second branch pipe and capable of adjusting the amount of gas flowing through the second branch pipe; It has The first air volume adjustment mechanism and the second air volume adjustment mechanism are capable of individually adjusting the flow rate, The lamp has an arc tube that emits light and electrodes for supplying power to the inside of the arc tube, When the opening on the downstream side of the first branch pipe is defined as a first discharge port, The first discharge port faces a direction in which the first branch pipe and the electrode overlap when a downstream end of the first branch pipe is virtually extended. Ultraviolet irradiation device.

2. an irradiation unit having a lamp for irradiating ultraviolet light; an air-cooling unit for cooling the lamp with gas; Equipped with The air cooling unit comprises: The main pipe through which the pressurized gas flows; a first branch pipe branching from the main pipe and injecting gas into the irradiation unit; A second branch pipe that branches off from the main pipe and injects gas into the irradiation unit; a first air volume adjustment mechanism attached to the first branch pipe and capable of adjusting the amount of gas flowing through the first branch pipe; a second air volume adjustment mechanism attached to the second branch pipe and capable of adjusting the amount of gas flowing through the second branch pipe; It has The first air volume adjustment mechanism and the second air volume adjustment mechanism are capable of individually adjusting the flow rate, The lamp further includes a water cooling unit that cools the lamp with cooling water. When the opening on the downstream side of the first branch pipe is defined as a first discharge port, The water cooling unit is located on the opposite side of the lamp from the side on which the first outlet is located. Ultraviolet irradiation device.

3. When the lamp is a first lamp, the irradiation unit further includes a second lamp that irradiates ultraviolet light, When the downstream opening of the first branch pipe is defined as a first discharge port and the downstream opening of the second branch pipe is defined as a second discharge port, the first discharge port faces a direction in which the first branch pipe and the first lamp overlap when a downstream end of the first branch pipe is virtually extended, The second discharge port faces a direction in which the second branch pipe and the second lamp overlap when a downstream end of the second branch pipe is virtually extended.

3. The ultraviolet irradiation device according to claim 1 or 2.

4. The air cooling unit further includes a regulator for adjusting the pressure of the gas being pumped. The regulator is attached to the main pipe.

3. The ultraviolet irradiation device according to claim 1 or 2.

5. The lamp is a mercury lamp.

3. The ultraviolet irradiation device according to claim 1 or 2.

6. The air conditioner further includes a control unit for controlling the first air flow rate adjustment mechanism and the second air flow rate adjustment mechanism, When the lamp is a first lamp, the irradiation unit further includes a second lamp that irradiates ultraviolet light, The control unit The first air flow rate adjusting mechanism and the second air flow rate adjusting mechanism are controlled so that the irradiation intensity of the first lamp and the irradiation intensity of the second lamp are the same intensity.

3. The ultraviolet irradiation device according to claim 1 or 2.

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