Semiconductor Devices

Abstract

To suppress a temperature rise.SOLUTION: A semiconductor device comprises: a substrate 10; a channel layer provided on the substrate; a semiconductor layer 14 provided on the channel layer; a plurality of gate fingers 20 provided on the semiconductor layer and arranged in an arrangement direction in a plan view from a direction perpendicular to an upper surface of the substrate; a gate connection wiring 21 which is provided on the semiconductor layer and to which the plurality of gate fingers are commonly connected; and insulation films 22a to 22c provided between the semiconductor layer and the plurality of gate fingers. The plurality of gate fingers include a first gate finger and a second gate finger 20a located closer to the center of the plurality of gate fingers in the arrangement direction than a first gate finger 20c. A first distance in a perpendicular direction between a lower surface in contact with the insulation film of the first finger and an upper surface in contact with the semiconductor layer of the channel layer is greater than a second distance in a perpendicular direction between a lower surface in contact with the insulation film of the second gate finger and an upper surface in contact with the semiconductor layer of the channel layer.SELECTED DRAWING: Figure 3

Description

[Technical Field]

[0001] The present disclosure relates to a semiconductor device, for example, a semiconductor device having a field effect transistor to Regarding. [Background technology]

[0002] Field effect transistors (FETs) such as GaN HEMTs (Gallium Nitride High Electron Mobility Transistors) are used in radio frequency power amplifiers for base stations, etc. It is known that the layout of FETs is a multi-finger type (for example, see Patent Documents 1 and 2). [Prior art documents] [Patent documents]

[0003] [Patent Document 1] US Patent Application Publication No. 2020 / 0127627 [Patent Document 2] U.S. Patent No. 10,381,984 Summary of the Invention [Problem to be solved by the invention]

[0004] In a multi-finger FET, increasing the density of gate fingers to reduce chip area increases the temperature near the center of the gate fingers, resulting in a degradation of performance.

[0005] The present disclosure has been made in consideration of the above-mentioned problems, and aims to suppress temperature rise. [Means for solving the problem]

[0006] One embodiment of the present disclosure is a semiconductor device comprising: a substrate; a channel layer provided on the substrate; a semiconductor layer provided on the channel layer; a plurality of gate fingers provided on the semiconductor layer and arranged in an arrangement direction in a planar view from a direction perpendicular to an upper surface of the substrate; a gate connection wiring provided on the semiconductor layer to which the plurality of gate fingers are commonly connected; and an insulating film provided between the semiconductor layer and the plurality of gate fingers, wherein the plurality of gate fingers include a first gate finger and a second gate finger that is closer to a center of the plurality of gate fingers in the arrangement direction than the first gate finger, and a first distance in the vertical direction between a lower surface of the first gate finger that contacts the insulating film and an upper surface of the channel layer that contacts the semiconductor layer is greater than a second distance in the vertical direction between a lower surface of the second gate finger that contacts the insulating film and an upper surface of the channel layer that contacts the semiconductor layer. [Effects of the Invention]

[0007] According to the present disclosure, it is possible to suppress temperature rise. [Brief explanation of the drawings]

[0008] [Figure 1] FIG. 1 is a plan view of a FET according to a first embodiment. [Figure 2] FIG. 2 is a cross-sectional view taken along line AA in FIG. [Figure 3] FIG. 3 is a cross-sectional view of a unit FET in the first embodiment. [Figure 4] FIG. 4 is a diagram showing the thickness do of the insulating film relative to the position in the X direction in Example 1. In FIG. [Figure 5] FIG. 5 is a diagram showing the thickness do of the insulating film relative to the position in the Y direction in Example 1. In FIG. [Figure 6] FIG. 6 is a cross-sectional view of the FET in Comparative Example 1. As shown in FIG. [Figure 7] FIG. 7 is a diagram showing the Id-Vg characteristics of a unit FET. [Figure 8] FIG. 8 is a diagram showing the Id-Vg characteristics of each unit FET in Example 1. [Figure 9] FIG. 9 is a diagram showing the Id-Vd characteristics of the unit FET 30a in the first embodiment. [Figure 10] FIG. 10 is a diagram showing the Id-Vd characteristics of the unit FET 30b in the first embodiment. [Figure 11] FIG. 11 is a diagram showing the Id-Vd characteristics of the unit FET 30c in the first embodiment. [Figure 12] FIG. 12 is a diagram showing Example 1 of the thickness do of the insulating film relative to the position in the X direction in Example 1. In FIG. [Figure 13] FIG. 13 is a diagram showing Example 2 of the thickness do of the insulating film with respect to the position in the X direction in Example 1. In FIG. [Figure 14] FIG. 14 is a diagram showing Example 3 of the thickness do of the insulating film with respect to the position in the X direction in Example 1. In FIG. [Figure 15] FIG. 15 is a diagram showing Example 4 of the thickness do of the insulating film with respect to the position in the X direction in Example 1. In FIG. [Figure 16] FIG. 16 is a diagram showing Example 5 of the thickness do of the insulating film with respect to the position in the X direction in Example 1. In FIG. [Figure 17] FIG. 17 is a diagram showing Example 6 of the thickness do of the insulating film with respect to the position in the X direction in Example 1. In FIG. [Figure 18] FIG. 18 is a cross-sectional view of a semiconductor device according to Comparative Example 2. As shown in FIG. [Figure 19] FIG. 19 is a plan view of the vicinity of the active region 26 of the semiconductor device according to the second embodiment. [Figure 20] FIG. 20 is a cross-sectional view of the unit FET 30d taken along the line AA in FIG. [Figure 21] FIG. 21 is a cross-sectional view of a semiconductor device according to a third embodiment. [Figure 22] FIG. 22 is a cross-sectional view of a semiconductor device according to a fourth embodiment. [Figure 23] FIG. 23 is a cross-sectional view of a semiconductor device according to a fifth embodiment. DETAILED DESCRIPTION OF THE INVENTION

[0009] [Description of the embodiments of the present disclosure] First, the contents of the embodiments of the present disclosure will be listed and described.

[0010] [Details of the embodiments of the present disclosure] First, the contents of the embodiments of the present disclosure will be listed and described. (1) One embodiment of the present disclosure is a semiconductor device including: a substrate; a channel layer provided on the substrate; a semiconductor layer provided on the channel layer; a plurality of gate fingers provided on the semiconductor layer and arranged in an arrangement direction in a plan view perpendicular to an upper surface of the substrate; a gate connection wiring provided on the semiconductor layer and commonly connecting the plurality of gate fingers; and an insulating film provided between the semiconductor layer and the plurality of gate fingers, wherein the plurality of gate fingers include a first gate finger and a second gate finger closer to a center of the plurality of gate fingers in the arrangement direction than the first gate finger, and wherein a first distance in the perpendicular direction between a lower surface of the first gate finger in contact with the insulating film and an upper surface of the channel layer in contact with the semiconductor layer is greater than a second distance in the perpendicular direction between a lower surface of the second gate finger in contact with the insulating film and an upper surface of the channel layer in contact with the semiconductor layer, thereby suppressing a temperature rise. (2) The insulating film provided between the first gate finger and the semiconductor layer is preferably thicker than the insulating film provided between the second gate finger and the semiconductor layer. (3) The semiconductor layer provided between the first gate finger and the channel layer is preferably thicker than the semiconductor layer provided between the second gate finger and the channel layer. (4) Preferably, the plurality of gate fingers include a third gate finger provided between the first gate finger and the second gate finger in a planar view from the vertical direction, and a third distance in the vertical direction between a lower surface of the third gate finger in contact with the insulating film and an upper surface of the channel layer in contact with the semiconductor layer is smaller than the first distance and larger than the second distance. (5) For any adjacent gate fingers among the plurality of gate fingers in a plan view from the vertical direction, it is preferable that the distance in the vertical direction between the lower surface in contact with the insulating film of a gate finger closest to the center among the adjacent gate fingers and the upper surface in contact with the semiconductor layer of the channel layer is equal to or less than the distance in the vertical direction between the lower surface in contact with the insulating film of a gate finger farthest from the center among the adjacent gate fingers and the upper surface in contact with the semiconductor layer of the channel layer. (6) In a planar view from the vertical direction, it is preferable that the average value of the distance in the vertical direction between the lower surfaces of the gate fingers in contact with the insulating film and the upper surfaces of the channel layer in contact with the semiconductor layer in a first region between the center and the midpoint between the center and a fourth gate finger that is the outermost of the gate fingers in the arrangement direction, is smaller than the average value of the distance in the vertical direction between the lower surfaces of the gate fingers in contact with the insulating film and the upper surfaces of the channel layer in contact with the semiconductor layer in a second region between the midpoint and the fourth gate finger. (7) It is preferable that the distance in the vertical direction between the lower surfaces of the gate fingers that contact the insulating film and the upper surface of the channel layer that contacts the semiconductor layer has multiple levels, and the level of the distance between the gate fingers and the channel layer in the region between the center and the midpoint between the center and a fourth gate finger that is the outermost of the gate fingers in the arrangement direction is the smallest level among the multiple levels. (8) In a planar view from the vertical direction, it is preferable that the distance in the vertical direction between a lower surface of a central portion of the second gate finger in contact with the insulating film in the extension direction of the multiple gate fingers and an upper surface of the channel layer in contact with the semiconductor layer is smaller than the distance in the vertical direction between a lower surface of a peripheral portion of the second gate finger in contact with the insulating film in the extension direction and an upper surface of the channel layer in contact with the semiconductor layer. (9) The semiconductor device comprises a plurality of source fingers provided on the semiconductor layer and arranged in the arrangement direction, and a plurality of drain fingers provided on the semiconductor layer and arranged alternately with the plurality of source fingers in the arrangement direction, and in a planar view from the perpendicular direction, it is preferable that the plurality of gate fingers are each sandwiched between one of the plurality of source fingers and one of the plurality of drain fingers in the arrangement direction. (10) The channel layer preferably includes a two-dimensional electron gas formed at the interface between a first semiconductor layer and a second semiconductor layer having a band gap larger than that of the first semiconductor layer.

[0011] Specific examples of semiconductor devices according to embodiments of the present disclosure will be described below with reference to the drawings. Note that the present disclosure is not limited to these examples, but is defined by the claims, and is intended to include all modifications within the meaning and scope of the claims.

[0012] [Example 1] Example 1 is an example of a FET used in a radio frequency power amplifier. Fig. 1 is a plan view of the FET in Example 1. Fig. 2 is a cross-sectional view taken along line AA in Fig. 1. The arrangement direction of the gate fingers 20 is defined as the X direction, the extension direction as the Y direction, and the normal direction of the substrate 10 (i.e., the direction perpendicular to the upper surface of the substrate 10) as the Z direction.

[0013] As shown in FIGS. 1 and 2, a semiconductor layer 12 is provided on a substrate 10, and a semiconductor layer 14 is provided on the semiconductor layer 12. In the case of a GaN-HEMT, the substrate 10 is, for example, a SiC substrate, a sapphire substrate, a GaN substrate, or a diamond substrate. The thickness of the substrate 10 is, for example, 1 μm to 100 μm. The semiconductor layers 12 and 14 are GaN-based semiconductor layers with Ga polarity on the upper surface, for example, a GaN layer and an AlGaN layer (with an Al composition ratio of, for example, 0.3), respectively. The semiconductor layer 14 may be an AlGaN layer and a GaN layer provided on the AlGaN layer. The thicknesses of the semiconductor layers 12 and 14 are, for example, 500 nm and 10 nm, respectively. A 2DEG (two-dimensional electron gas) 13 (see FIG. 3) is formed in the semiconductor layer 12 near the interface with the semiconductor layer 14. The 2DEG functions as a channel layer.

[0014] In a plan view from the Z direction, the source fingers 16 and the drain fingers 18 are arranged alternately in the X direction on the semiconductor layer 14. An insulating film 22 is provided on the semiconductor layer 14 between the source fingers 16 and the drain fingers 18. A gate finger 20 is provided on the insulating film 22. The gate finger 20 is sandwiched between the source fingers 16 and the drain fingers 18.

[0015] The source fingers 16 are provided on the underside of the substrate 10 by through electrodes 17 that penetrate the substrate 10, and are electrically connected to and short-circuited with a metal layer (not shown) to which a ground potential is supplied. The drain fingers 18 are commonly connected to a drain connection wiring 19 at their -Y ends (the end in the downward direction of the Y axis in FIG. 1). The gate fingers 20 are commonly connected to a drain connection wiring 19 at their +Y ends (the end in the downward direction of the Y axis in FIG. 1). aboveThe source fingers 16, the drain fingers 18, and the gate fingers 20 are commonly connected to a gate connection wiring 21 at their ends (the ends in the direction of the direction of the gate electrode). The source fingers 16, the drain fingers 18, and the gate fingers 20 are provided on an active region 26. The active region 26 is a region in which the semiconductor layer 14 is activated. Outside the active region 26 is an inactive region 25. In the inactive region 25, ions are implanted into the semiconductor layer 14. The drain connection wiring 19 and the gate connection wiring 21 are provided on the inactive region 25.

[0016] The source finger 16 and the drain finger 18 are metal films, for example, a titanium film and an aluminum film from the semiconductor layer 14 side. The gate finger 20 is metal films, for example, a nickel film and a gold film from the semiconductor layer 14 side. The drain connection wiring 19 and the gate connection wiring 21 are metal layers, for example, a gold layer. The insulating film 22 is, for example, an oxide film, a nitride film, or an oxynitride film of at least one of aluminum, silicon, hafnium, and titanium, for example, an aluminum oxide film.

[0017] A region 35a is provided in the center of the multiple unit FETs in the X direction, and a region 35c is provided on the periphery of the active region 26 in the X direction. A region 35b is provided between the regions 35a and 35c. The source fingers 16, the drain fingers 18, and the gate fingers 20 form unit FETs 30a to 30c. At least one unit FET 30a to 30c is provided in each of the regions 35a to 35c. The unit FET 30a is provided in the region 35a, the unit FET 30b is provided in the region 35b, and the unit FET 30c is provided in the region 35c. The unit FETs 30a to 30c include gate fingers 20a to 20c, respectively. In FIGS. 1 and 2, there are a total of 12 unit FETs 30a to 30c. The total number of unit FETs 30a to 30c can be set as appropriate.

[0018] FIG. 3 is a cross-sectional view of the unit FET in Example 1. In FIG. 3, two unit FETs 30a to 30c are shown respectively. As shown in FIG. 3, in the unit FET 30a, an insulating film 22a is provided between the semiconductor layer 14 and the gate finger 20a. In the unit FET 30b, an insulating film 22b is provided between the semiconductor layer 14 and the gate finger 20b. In the unit FET 30c, an insulating film 22c is provided between the semiconductor layer 14 and the gate finger 20c. The thicknesses of the insulating films 22a to 22c are do1 to do3 respectively, and do1 < do2 < do3. The insulating films 22a to 22c are mainly composed of the same material. The thickness dg of the semiconductor layer 14 is constant regardless of the unit FETs 30a to 30c. A protective film 24 is provided so as to cover the source finger 16 and the drain finger 18. The protective film 24 is an insulating film such as a silicon nitride film. In FIG. 3, in order to increase the drain breakdown voltage, the gate finger 20 is provided closer to the source finger 16 than the drain finger 18. The gate finger 20 may be provided near the midpoint between the drain finger 18 and the source finger 16.

[0019] FIG. 4 is a diagram showing the thickness do of the insulating film with respect to the position in the X direction in Example 1. The horizontal axis represents the unit FETs 30a to 30c in the X direction of showing the position X, and the vertical axis represents the thickness do of the insulating films 22a to 22c. One rectangle extending in the vertical direction corresponds to one unit FET 30a to 30c. Let the positions of the gate fingers of the outermost unit FETs be +X1 and -X1. The position of the midpoint between +X1 and -X1 is indicated by the center X0 in the X direction of the plurality of gate fingers 20. As shown in FIG. 4, four unit FETs 30a are provided in the region 35a, and two unit FETs 30b are provided in each of the two regions 35b on the +X side and the -X side, and a total of four unit FETs 30b are provided in the two regions 35b. Two unit FETs 30c are also provided in each of the two regions 35c on the +X side and the -X side, and a total of four unit FETs 30c are provided in the two regions 35c. The thicknesses of the insulating films 22a to 22c in the regions 35a to 35c are do1 to do3 respectively.

[0020] 5 is a diagram showing the thickness do of the insulating film relative to the position in the Y direction in Example 1. The horizontal axis represents the position Y in the Y direction in one of the unit FETs 30a to 30c, and the vertical axis represents the thickness do of the insulating films 22a to 22c. As shown in FIG. 5, in the unit FET 30a, the thickness of the insulating film 22a is uniform and is do1 regardless of the position Y. In the unit FETs 30b and 30c, the thicknesses of the insulating films 22b and 22c are also uniform and are do2 and do3, respectively.

[0021] FIG. 6 is a cross-sectional view of a FET in Comparative Example 1. In Comparative Example 1, the thickness of the insulating film 22 is uniform in all unit FETs 30. When the FET is operated, heat is generated by current flowing through the semiconductor layer 14 below the gate fingers 20. Heat diffusion from each unit FET 30 approximately occurs within a range at an angle of 45° with respect to the −Z direction, as indicated by arrows 34. Note that in FIG. 6, arrows are drawn for every other gate finger 20 for ease of viewing. In reality, heat diffusion occurs from all gate fingers 20, as indicated by arrows 34. In the center of the active region 26 in the X direction, the diffusion of heat radiated from each unit FET 30 overlaps, resulting in a high temperature in the center of the active region 26. On the other hand, the overlap of heat diffusion is smaller in the periphery of the active region 26 in the X direction than in the center, and the periphery of the active region 26 does not reach as high a temperature as the center. When the temperature in the center of the active region 26 becomes high, the resistance of the 2DEG 13 in the center increases, resulting in a decrease in output power. Furthermore, electrons are released from the electron capture level near the 2DEG 13, causing changes in the electrical characteristics. On the other hand, if the current density of each unit FET 30 is reduced to suppress the temperature in the center of the active region 26, the chip area must be increased to achieve the desired output power across the entire chip, resulting in a larger semiconductor device.

[0022] The drain current of the unit FET was calculated with respect to the gate voltage Vg when the thickness do of the insulating film 22 was changed. Gradual approximation was used for the calculation. The drain current Id is calculated by Equation 1. Id=(εμW / Lg)((Vg´-Vth)Vd´-Vd´ 2 / 2) (Equation 1) Here, ε is the dielectric constant of the semiconductor layer 12, μ is the electron mobility of the 2DEG 13, W is the gate width (the width of the active region 26 in the Y direction), Lg is the gate length of the gate finger 20 (the length in the X direction), Vg' is the effective gate voltage, Vd' is the effective drain voltage, and Vth is the threshold voltage.

[0023] The effective gate voltage Vg' is expressed by Equation 2. Vg´=Vg-Id×(Rs+Rc) (Equation 2) The effective drain voltage Vd' is expressed by Equation 3. Vd´=Vd-Id×(Rs+Rd+2Rc) (Formula 3) Here, Vg is the gate voltage, Vd is the drain voltage, Rs is the source resistance, Rd is the drain resistance, and Rc is the contact resistance.

[0024] The threshold voltage Vth is expressed by Equation 4. Vth=(Q / C) (Equation 4) Here, Q is the stored charge and C is the combined capacitance. Q is a constant value, and the combined capacitance value is expressed by Equation 5. 1 / C=1 / Co+1 / Cg (Equation 5) Here, Co is the capacitance value of the insulating film 22, and Cg is the capacitance value of the semiconductor layer 14. Co and Cg are expressed by Equation 6. Co=εo / do, Cg=εg / dg (Equation 6) Here, εo is the dielectric constant of the insulating film 22, and εg is the dielectric constant of the semiconductor layer 14.

[0025] The Id-Vg characteristics were calculated using the semiconductor layer 12 as a GaN layer, the semiconductor layer 14 as an AlGaN layer, and the insulating film 22 as an aluminum oxide film. of7. The horizontal axis represents gate voltage Vg, and the vertical axis represents drain current Id. As shown in FIG. 7, when the thickness d0 of the insulating film 22 is 5 nm, the threshold voltage Vth is −1.2 V. When the thickness d0 of the insulating film 22 is 10 nm, the threshold voltage Vth is −2.4 V. As such, as the thickness d0 of the insulating film 22 increases, the threshold voltage Vth deepens, and the drain current Id increases at the same gate voltage Vg.

[0026] As another example, the semiconductor layer 14 may be an AlGaN layer having an Al composition ratio of 0.3 and a thickness of 1000 nm. dg If the thickness of the insulating film 22 is 10 nm and the insulating film 22 is an aluminum oxide film with a dielectric constant of 9, the threshold voltages Vth are −3 V, −3.4 V, and −4 V when the thickness of the insulating film 22 is 5 nm, 7 nm, and 10 nm. If the thickness do is too thick, the FET may not be able to pinch off when the gate length is small. From this perspective, the thickness do of the insulating film 22 is preferably 10 nm or less. If the thickness do is too thin, the gate leakage current increases. From this perspective, the thickness do is preferably 5 nm or more. If do3-do1 is too small, the difference in current density between the unit FETs 30c and 30a is too small. Therefore, the difference between the maximum thickness do3 and the minimum thickness do1 of the thickness do is preferably 5 nm or more. If do3-do1 is large, the unit FET 30c may not be able to pinch off. Therefore, do3-do1 is preferably 8 nm or less.

[0027] Fig. 8 is a diagram showing the Id-Vg characteristics of each unit FET in Example 1. Figs. 9 to 11 are diagrams showing the Id-Vd characteristics of the unit FETs 30a to 30c in Example 1, respectively.

[0028] 8, the thickness do2 of the insulating film 22b in the unit FET 30b is thicker than the thickness do1 of the insulating film 22a in the unit FET 30a. Therefore, the threshold voltage Vth2 of the unit FET 30b is deeper (i.e., negatively larger) than the threshold voltage Vth1 of the unit FET 30a. Similarly, the thickness do3 of the insulating film 22c in the unit FET 30c is thicker than the thickness do2 of the insulating film 22b in the unit FET 30b. Therefore, the threshold voltage Vth3 of the unit FET 30c is deeper than the threshold voltage Vth2 of the unit FET 30b. If the gate voltage Vg at the operating point is Vgo, the drain current Id at Vgo is larger for the unit FET 30b than for the unit FET 30a, and larger for the unit FET 30c than for the unit FET 30b.

[0029] 9, Vd=Vdo when Vg=Vgo is the operating point 32a. When a large amount of high frequency power is applied to the gate of the unit FET 30a, the load curve 31a is centered around the operating point 32a.

[0030] As shown in Fig. 10, in unit FET 30b, the drain current Id at operating point 32b is larger than that of unit FET 30a in Fig. 9. A load curve 31b of unit FET 30b is centered at operating point 32b, and has a larger drain current Id than the load curve 31a of unit FET 30a.

[0031] As shown in Fig. 11, in the unit FET 30c, the drain current Id at the operating point 32c is larger than that of the unit FET 30b in Fig. 10. The load curve 31c of the unit FET 30c is centered at the operating point 32c, and the drain current Id is larger than that of the load curve 31b of the unit FET 30b.

[0032] As described above, when the same amount of high-frequency power is applied to each gate, the current density of the current flowing through each increases in the order from unit FET 30a to 30c. Therefore, when high-frequency power is applied, the self-heating increases in the order from unit FET 30a to 30c. As indicated by arrow 34a in FIG. 2, which is shorter than the others, the diffusion of heat radiated from unit FET 30a in region 35a is smaller. As indicated by arrow 34b, which is longer, the diffusion of heat radiated from unit FET 30b in region 35b is greater than that of unit FET 30a. As indicated by arrow 34c, which is the longest, the diffusion of heat radiated from unit FET 30c in region 35c is even greater than that of unit FET 30b. In this way, the diffusion of heat radiated from the unit FET 30a is kept small in the region 35a near the center of the active region 26 of the plurality of unit FETs 30a to 30c, and the diffusion of heat radiated from the unit FET 30c is made larger in the region 35c near the periphery of the active region 26 of the plurality of unit FETs 30a to 30c. This makes it possible to suppress a temperature rise near the center of the active region 26 of the unit FET 30. In other words, since the current density of the unit FET 30a can be suppressed while the current density of the unit FETs 30c and 30b can be increased, it is possible to suppress a temperature rise near the centers of the plurality of gate fingers while ensuring the desired output power required for the chip without increasing the chip area.

[0033] The unit FETs 30a to 30c are connected in parallel between the gate connection wiring 21 and the drain connection wiring 19. If the unit FETs 30a to 30c operate in both class B and class A modes, it becomes difficult to design distortion. Therefore, it is preferable that the unit FETs 30a to 30c operate in class A or class AB. In other words, it is preferable that Vgo of the operating points 32a to 32c be larger than the threshold voltages Vth1 to Vth3.

[0034] 12 to 17 are diagrams showing other examples, Examples 1 to 6, of the thickness do of the insulating film with respect to the position in the X direction in Example 1. As shown in FIGS. 12 to 15, the thickness do of the insulating film 22 may have two levels, do1 and do2. The level here refers to the thickness conditions when the structurally identical layer or film includes portions with different thicknesses. The same layer or film here includes not only a single layer or film, but also multiple films, multiple layers, and combinations of layers and films that are considered structurally identical. Varying the thickness do of the insulating film 22 increases the number of manufacturing steps. From this perspective, it is preferable that the thickness do of the insulating film 22 has two levels.

[0035] As shown in Fig. 12, the outermost unit FET 30b among the unit FETs may have a thickness do2, while the other unit FETs 30a may have a thickness do1. As shown in Fig. 13, the outer two unit FETs 30b among the unit FETs may have a thickness do2, while the other unit FETs 30a may have a thickness do1. As shown in Fig. 14, the unit FET 30a near the center X0 among the unit FETs may have a thickness do1, while the other unit FETs 30b may have a thickness do2.

[0036] In Comparative Example 1 of FIG. 6, the arrows 34 indicate the diffusion of heat. Because the thickness of the insulating film 22 in all unit FETs 30 is constant, it is shown that heat diffusion occurs equally from all unit FETs 30, even in the central part of the active region 26, just as in the peripheral part. Therefore, heat dissipation paths overlap over a wide range in the active region 26. This causes the temperature to rise over a wide range in the central part of the active region 26. For this reason, as shown in FIGS. 12 and 13, it is preferable that the thickness do of the unit FETs in the region between +X2, the midpoint between +X1 and X0 in the X direction, and -X2, the midpoint between -X1 and X0, is thinner than do of the outermost unit FET 30b.

[0037] As shown in Figure 15, when the region between -X2 and +X2 is designated as 35d, and the regions between -X1 and -X2 and between +X2 and +X1 are designated as 35e, both the region 35d and the region 35e may contain a mixture of unit FETs 30a and 30b. It is preferable that the average thickness d0 of the unit FETs in the region 35e is greater than the average thickness d0 of the unit FETs in the region 35d. This makes it possible to suppress the temperature rise in the region 35d.

[0038] 16, the region 35d may be provided with a unit FET 30a1 having a thickness thinner than the thickness do1 of the unit FET 30a and a unit FET 30a2 having a thickness thicker than do1. The region 35e may be provided with a unit FET 30b1 having a thickness thinner than the thickness do2 of the unit FET 30b and a unit FET 30b2 having a thickness thicker than do2. The thickness do of the insulating film 22 of the unit FET 30b1 having the thinnest thickness do in the region 35e is 1 / 2 the thickness of the insulating film 22 of the unit FET 30b2 having the thickest thickness do in the region 35d. 30a2 It is preferable that the thickness is greater than the thickness do.

[0039] 17, the thickness do of the insulating film 22 of the unit FET 30 may increase from the center X0 toward the periphery. This allows for more precise control of the temperature rise caused by the diffusion of heat radiated from each unit FET 30. This makes it possible to suppress the heat rise in the central part of the chip without increasing the size of the semiconductor device.

[0040] Comparative Example 2 FIG. 18 is a cross-sectional view of a semiconductor device according to Comparative Example 2. As shown in FIG. 18, the dielectric constant of the insulating film 22a of the unit FET 30a in the region 35a is set smaller than the dielectric constant of the insulating film 22b of the unit FET 30b in the region 35b. This makes the threshold voltage Vth of the unit FET 30a shallower than the threshold voltage Vth of the unit FET 30b. Therefore, as in Example 1, the temperature rise due to the diffusion of heat radiated from the unit FET 30a can be made smaller than the temperature rise due to the diffusion of heat radiated from the unit FET 30b. However, it is difficult in the manufacturing process to provide different types of insulating films 22a and 22b as gate insulating films. Therefore, as in Example 1, it is preferable to vary the threshold voltage of the unit FET depending on the thickness of the insulating film 22.

[0041] [Example 2] 19 is a plan view of the vicinity of the active region 26 of the semiconductor device according to the second embodiment. As shown in FIG. 19, of In the unit FET 30d, a region 35c is also provided on the periphery in the Y direction. A region 35b is provided between the regions 35a and 35c in the Y direction.

[0042] Fig. 20 is a cross-sectional view taken along the line AA of unit FET 30d in Fig. 19. As shown in Fig. 20, in unit FET 30d, thickness do2 of insulating film 22b in region 35b is thicker than thickness do1 of insulating film 22a in region 35a. Thickness do3 of insulating film 22c in region 35c is thicker than thickness do2 of insulating film 22b in region 35b. The other configurations are the same as those in Example 1, and therefore description thereof will be omitted.

[0043] As in the second embodiment, the thickness do of the insulating film 22 in the Y direction may be changed in the unit FET. Heat radiated from the unit FET 30d is more likely to diffuse to the outside at the periphery in the Y direction, and the temperature is less likely to rise at the periphery in the Y direction than at the center in the Y direction. Therefore, as in the second embodiment, the thickness do3 of the insulating film 22c at the periphery of the end in the Y direction is made thicker than the thickness do1 of the insulating film 22a at the center in the Y direction. This makes it possible to maintain the current density in the unit FET 30d at a desired value and suppress the temperature rise at the center in the Y direction without increasing the size of the semiconductor device.

[0044] [Example 3] FIG. 21 is a cross-sectional view of a semiconductor device according to a third embodiment. As shown in FIG. 21, the thickness of the semiconductor layer 14 of the unit FET 30a in the central portion in the X direction is dg1, and the thickness of the semiconductor layer 14 of the unit FET 30b in the peripheral portion is dg2. The thickness do of the insulating film 22 is the same for the unit FETs 30a and 30b. The other configurations are the same as those of the first embodiment, and therefore, description thereof will be omitted. As the semiconductor layer 14 becomes thicker, the threshold voltage Vth becomes deeper. Therefore, the threshold voltage Vth of the unit FET 30b becomes deeper than the threshold voltage Vth of the unit FET 30a. This reduces the current density of the unit FET 30a, and the diffusion of heat radiated from the unit FET 30a is reduced. This makes it possible to suppress a temperature rise in the central portion. On the other hand, by increasing the current density of the unit FET 30b and maintaining the amount of current throughout the chip, it is possible to suppress an increase in the size of the semiconductor device.

[0045] [Example 4] FIG. 22 is a cross-sectional view of a semiconductor device according to a fourth embodiment. As shown in FIG. 22, in a unit FET 30d at the center in the X direction, the peripheral portion in the Y direction is defined as region 35b, and the center portion is defined as region 35a. The thickness dg2 of the semiconductor layer 14 in region 35b is made thicker than the thickness dg1 of the semiconductor layer 14 in region 35a. The other configurations are the same as those of the third embodiment, and a description thereof will be omitted. In the fourth embodiment, the current density in region 35b of the unit FET 30d is increased, and the current density in the unit FET 30d can be made higher than that of the first embodiment. Therefore, it is possible to suppress a temperature rise in the center of the chip while maintaining the current amount of the entire chip and without increasing the size of the semiconductor device.

[0046] In Examples 3 and 4, the lower layer of semiconductor layer 14 may be an AlGaN layer and the upper layer may be a GaN layer. In region 35a, by selectively etching the GaN layer relative to the AlGaN layer, a recess can be formed accurately in semiconductor layer 14 in region 35a.

[0047] [Example 5] Fig. 23 is a cross-sectional view of a semiconductor device according to Example 5. As shown in Fig. 23, a semiconductor layer 12a is provided on a substrate 10, and a semiconductor layer 14a is provided on the semiconductor layer 12a. The semiconductor layers 12a and 14a are, for example, GaN-based semiconductor layers with N-polarity upper surfaces, and are, for example, an AlGaN layer and a GaN layer, respectively. The 2DEG 13 is formed in the semiconductor layer 14a near the interface with the semiconductor layer 12a. The other configurations are the same as those of Example 1, and therefore a description thereof will be omitted. In Examples 2 to 4, the semiconductor layers 12a and 14a Top of Alternatively, the layer may be an N-polar GaN-based semiconductor layer.

[0048] 1 to 5, the plurality of gate fingers 20 arranged in the X direction have a gate finger 20c (first gate finger) and a gate finger 20a (second gate finger) closer to the center X0 (the center of the plurality of gate fingers 20) than the gate finger 20c. As shown in FIG. 3, the first distance between the gate finger 20c and the 2DEG 13 is 138, the threshold voltage Vth1 of the unit FET 30a including the gate finger 20a is shallower than the threshold voltage Vth3 of the unit FET 30c including the gate finger 20c. Therefore, as shown in FIGS. 9 and 11, the current density of the unit FET 30a is smaller than the current density of the unit FET 30c. Therefore, as shown by the arrow 34a in FIG. 2, the amount of heat generated by the unit FET 30a is reduced, and the temperature rise in the region 35a can be suppressed. On the other hand, the current density of the unit FET 30c can be increased, so the amount of current flowing through the entire chip can be maintained. As a result, the temperature rise in the central portion of the chip can be suppressed without increasing the chip area.

[0049] The 2DEG 13 is formed near the interface between the semiconductor layers 12 and 14. Therefore, the distance between the gate finger 20 and the 2DEG 13 is approximately equal to the sum of the thickness do of the insulating film 22 and the thickness dg of the semiconductor layer 14. To effectively differentiate the current densities of the unit FETs 30c and 30a, the first distance is preferably 1.1 times or more, and more preferably 1.2 times or more, the second distance. If the difference between the first distance and the second distance is too large, the characteristics of either the unit FET 30c or 30a will deteriorate. Therefore, the first distance is preferably two times or less the second distance. The insulating film 22 does not necessarily have to be provided, but is preferably provided to suppress leakage current.

[0050] As shown in FIG. 3 of the first embodiment, the insulating film 22c provided between the gate finger 20c and the semiconductor layer 14 is made thicker than the insulating film 22a provided between the gate finger 20a and the semiconductor layer 14. This allows the current density of the unit FET 30a to be smaller than that of the unit FET 30c. For example, by using a film formation technique such as ALD (Atomic Layer Deposion), the thicknesses of the insulating films 22a to 22c can be controlled with accuracy below the measurement limit. Therefore, by making the insulating films 22a to 22c different, the unit FETs 30a to 30c can be made different in a simple manner. To effectively make the current densities of the unit FETs 30c and 30a different, the thickness do3 of the insulating film 22c is preferably 1.2 times or more, more preferably 1.4 times or more, the thickness do1 of the insulating film 22a. If the difference between do3 and do1 is large, the characteristics of either the unit FET 30c or 30a will deteriorate. Therefore, the thickness do3 is preferably three times or less, more preferably two times or less, of the thickness do1.

[0051] As shown in FIG. 21 of the third embodiment, the semiconductor layer 14 provided between the gate finger 20b and the 2DEG 13 is made thicker than the semiconductor layer 14 provided between the gate finger 20a and the 2DEG 13. This makes it possible to make the current density of the unit FET 30a smaller than the current density of the unit FET 30b. 30b The thickness dg2 of the semiconductor layer 14 of the unit FET 30a The difference between dg2 and dg1 is preferably 1.2 times or more, more preferably 1.4 times or more, of the thickness dg1 of the semiconductor layer 14. 30b The characteristics of the unit FETs 30a and 30b deteriorate. dg1 is preferably three times or less, more preferably two times or less, of the thickness dg2.

[0052] 1 to 5, a gate finger 20b (third gate finger) is provided between gate fingers 20a and 20c. A third distance between the gate finger 20b and the 2DEG 13 is smaller than the first distance and larger than the second distance. This allows the current density of the unit FET 30b to be higher than the current density of the unit FET 30a and lower than the current density of the unit FET 30c. This allows the temperature of the unit FET 30 to be controlled more precisely.

[0053] 4, 12 to 14, and 17, for any adjacent gate fingers, the distance between the gate finger closest to the center X0 and the 2DEG 13 is equal to or less than the distance between the gate finger farthest from the center X0 and the 2DEG 13. This makes it possible to make the temperature distribution in the multiple unit FETs 30 more uniform.

[0054] 15 and 16, when the position of the midpoint between the center X0 and the position ±X1 of the outermost fourth gate finger in the X direction is ±X2, the average distance (i.e., the average value of the distance) between the gate fingers 20 and the 2DEG 13 in the first region 35d between X0 and ±X2 is smaller than the average distance between the gate fingers 20 and the 2DEG 13 in the second region 35e between ±X2 and ±X1. As a result, the amount of heat generated by the unit FETs 30 in the region 35d is smaller than the amount of heat generated by the unit FETs 30 in the region 35e. This makes it possible to suppress the rise in temperature in the region 35d. Heat generation between the regions 35e and 35d of To effectively differentiate them, the average distance between the gate fingers 20 and the 2DEG 13 in region 35d is preferably 0.9 times or less, more preferably 0.8 times or less, the average distance between the gate fingers 20 and the 2DEG 13 in region 35e, and is preferably 0.5 times or more the average distance between the gate fingers 20 and the 2DEG 13 in region 35d.

[0055] Increasing the distance between the multiple gate fingers 20 and the 2DEG 13 increases the number of manufacturing steps. From this perspective, two or three levels are preferable. On the other hand, increasing the distance between the multiple gate fingers 20 and the 2DEG 13 allows for more precise control of the current density of the multiple unit FETs 30.

[0056] 12 and 13, the distance between the gate finger 20 and the 2DEG 13 in the region between the center X0 and the ±X1 positions is the smallest of multiple levels. That is, all unit FETs between the center X0 and the ±X1 positions are unit FETs 30a. In the region between the center X0 and the ±X1 positions, heat dissipation paths overlap, making it easy for the temperature to rise. Therefore, it is preferable to set the region between the center X0 and the ±X1 positions to the smallest level.

[0057] As shown in FIG. 20 of the second embodiment and FIG. 22 of the fourth embodiment, the distance between the center of the gate finger 20d and the 2DEG 13 in the Y direction is and This is smaller than the distance to the 2DEG 13. This allows the current density of the unit FETs 30d in the peripheral portion to be increased, and while maintaining a desired current value throughout the chip, it is possible to suppress temperature rise in the central portion of the chip without increasing the size of the semiconductor device.

[0058] As in the first to fourth embodiments, the source fingers 16 and the drain fingers 18 are arranged alternately, and the gate fingers 20 are each sandwiched between one of the source fingers 16 and one of the drain fingers 18 in the X direction, thereby forming a multi-finger FET.

[0059] The channel layer also includes a 2DEG 13 formed at the interface between the semiconductor layer 12 (first semiconductor layer) and a semiconductor layer 14 (second semiconductor layer) having a band gap larger than that of the semiconductor layer 12. In this case, the distance between the gate finger 20 and the 2DEG 13 corresponds to the distance in the Z direction between the lower surface of the gate finger 20 in contact with the insulating film 22 and the upper surface of the semiconductor layer 12 in contact with the semiconductor layer 14. As in Example 5, the channel layer also includes a 2DEG 13 formed at the interface between the semiconductor layer 14a (first semiconductor layer) and a semiconductor layer 12a (second semiconductor layer) having a band gap larger than that of the semiconductor layer 14a. In this case, the distance between the gate finger 20 and the 2DEG 13 corresponds to the distance in the Z direction between the lower surface of the gate finger 20 in contact with the insulating film 22 and the upper surface of the 2DEG 13. Since the 2DEG 13 is formed away from the gate finger 20, the current density can be changed by changing the thickness of the insulating film 22 or the semiconductor layer 14. In the first to fifth embodiments, the semiconductor layers 12 and 14 are made of nitride semiconductors, but the semiconductor layers 12 and 14 may be made of GaAs-based semiconductors.

[0060] The embodiments disclosed herein should be considered to be illustrative and not restrictive in all respects. The scope of the present disclosure is defined by the claims, not by the meaning described above, and is intended to include all modifications within the meaning and scope equivalent to the claims. [Explanation of symbols]

[0061] 10 Substrate 12 Semiconductor layer (first semiconductor layer) 14 Semiconductor layer (second semiconductor layer) 12a, 14a Semiconductor layers 13 2DEG (channel layer) 16 Sauce Fingers 17 Through electrode 18 Drain Finger 19 Drain connection wiring 20, 20d gate finger 20a Gate finger (first 2 Gate finger) 20b Gate finger (third gate finger) 20c Gate finger (first 1 Gate finger) 21 Gate connection wiring 22, 22a to 22c insulating film 24 Protective film 26 Active area 30, 30a to 30c unit FET 31a~31c Load curve 32a~32c operating point 34a~34c Arrows 35a~35e area

Claims

1. A substrate; a channel layer provided on the substrate; a semiconductor layer provided on the channel layer; a plurality of gate fingers provided on the semiconductor layer and arranged in an arrangement direction in a plan view from a direction perpendicular to an upper surface of the substrate; a gate connection wiring provided on the semiconductor layer and connected in common to the plurality of gate fingers; an insulating film provided between the semiconductor layer and the plurality of gate fingers; Equipped with The plurality of gate fingers include: a first gate finger; a second gate finger closer to a center of the plurality of gate fingers in the arrangement direction than the first gate finger; and a first distance in the vertical direction between a lower surface of the first gate finger in contact with the insulating film and an upper surface of the channel layer in contact with the semiconductor layer is greater than a second distance in the vertical direction between a lower surface of the second gate finger in contact with the insulating film and an upper surface of the channel layer in contact with the semiconductor layer; The semiconductor device, wherein the insulating film provided between the first gate finger and the semiconductor layer is thicker than the insulating film provided between the second gate finger and the semiconductor layer.

2. 2. The semiconductor device according to claim 1, wherein the semiconductor layer provided between the first gate finger and the channel layer is thicker than the semiconductor layer provided between the second gate finger and the channel layer.

3. the plurality of gate fingers include a third gate finger provided between the first gate finger and the second gate finger in a plan view from the perpendicular direction; 3. The semiconductor device according to claim 1, wherein a third distance in the perpendicular direction between a lower surface of the third gate finger in contact with the insulating film and an upper surface of the channel layer in contact with the semiconductor layer is smaller than the first distance and larger than the second distance.

4. 4. The semiconductor device according to claim 1, wherein, for any adjacent gate fingers among the plurality of gate fingers in a plan view in the vertical direction, a distance in the vertical direction between a lower surface in contact with the insulating film of a gate finger closest to the center among the adjacent gate fingers and an upper surface in contact with the semiconductor layer of the channel layer is equal to or less than a distance in the vertical direction between a lower surface in contact with the insulating film of a gate finger farthest from the center among the adjacent gate fingers and an upper surface in contact with the semiconductor layer of the channel layer.

5. 5. The semiconductor device according to claim 1, wherein, in a plan view from the vertical direction, an average value of distances in the vertical direction between lower surfaces of the gate fingers in contact with the insulating film and upper surfaces of the channel layer in contact with the semiconductor layer in a first region between the center and a midpoint between a fourth gate finger that is an outermost gate finger in the arrangement direction among the gate fingers and the center is smaller than an average value of distances in the vertical direction between lower surfaces of the gate fingers in contact with the insulating film and upper surfaces of the channel layer in contact with the semiconductor layer in a second region between the midpoint and the fourth gate finger.

6. a distance in the vertical direction between lower surfaces of the plurality of gate fingers in contact with the insulating film and upper surfaces of the channel layer in contact with the semiconductor layer has a plurality of levels; 6. The semiconductor device according to claim 1, wherein the level of the distance between the plurality of gate fingers and the channel layer in a region between the center and a midpoint between the center and a fourth gate finger that is an outermost gate finger among the plurality of gate fingers in the arrangement direction, is the smallest level among the plurality of levels.

7. 7. The semiconductor device according to claim 1, wherein, in a plan view from the vertical direction, a distance in the vertical direction between a lower surface of a central portion of each of the second gate fingers in contact with the insulating film and an upper surface of each of the channel layers in contact with the semiconductor layer is smaller than a distance in the vertical direction between a lower surface of a peripheral portion of each of the second gate fingers in contact with the insulating film and an upper surface of each of the channel layers in contact with the semiconductor layer.

8. a plurality of source fingers provided on the semiconductor layer and arranged in the arrangement direction; a plurality of drain fingers provided on the semiconductor layer and alternately provided with the plurality of source fingers in the arrangement direction; Equipped with 8. The semiconductor device according to claim 1, wherein, in a plan view from the perpendicular direction, the plurality of gate fingers are each sandwiched between one of the plurality of source fingers and one of the plurality of drain fingers in the arrangement direction.

9. 9. The semiconductor device according to claim 1, wherein the channel layer includes a two-dimensional electron gas formed at an interface between a first semiconductor layer and a second semiconductor layer having a band gap larger than that of the first semiconductor layer.

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