How to divide the workpiece

Abstract

To suppress the deterioration of processing quality when dividing a workpiece from the rear face side with a cutting blade with the reduction of the ratio of a surface region of the workpiece to which a tape is not adhered.SOLUTION: A tape is adhered to the surface of the workpiece such that, when predetermined force is applied to the tape, a direction in which an elongation ratio comes to the smallest becomes not parallel to each of a plurality of division planned lines extending in a grid shape. In this case, each of the plurality of division planned lines does not extend along the perpendicular direction to the above-mentioned direction. This enables reducing the ratio of the surface region of the workpiece on which the tape is not adhered in the vicinity of a boundary between each of the plurality of division planned lines and a region in which a device is formed, so as to enable suppressing the deterioration of processing quality when the workpiece is divided from the rear surface side with a cutting blade.SELECTED DRAWING: Figure 8

Description

[Technical Field]

[0001] The present invention relates to a method for dividing a workpiece, the method comprising: dividing a workpiece that is partitioned into a plurality of regions by a plurality of planned division lines extending in a grid pattern and has devices formed on the front surface side of each of the plurality of regions, using a cutting blade from the back surface side of the workpiece along each of the plurality of planned division lines. [Background technology]

[0002] Chips of devices such as ICs (Integrated Circuits) and LSIs (Large Scale Integration) are essential components in various electronic devices such as mobile phones and personal computers. These chips are manufactured, for example, by dividing a workpiece having a large number of devices formed on its surface along planned division lines.

[0003] To divide such a workpiece, for example, a cutting device is used, which includes a cutting unit having a spindle with an annular cutting blade attached to the tip and a holding table for holding the workpiece. In this cutting device, the workpiece is divided into multiple chips by bringing the rotating cutting blade into contact with the workpiece along multiple planned division lines that extend in a grid pattern.

[0004] However, to divide the workpiece into multiple chips, the rotating cutting blade must cut into the workpiece so that it penetrates the workpiece, which can cause damage to the holding table that holds the workpiece.

[0005] Therefore, when dividing a workpiece into multiple chips in this way, tape is often attached to the workpiece and the workpiece is held on the holding table via the tape. This allows the workpiece to be divided into multiple chips with the outer edge of the cutting blade that penetrates the workpiece positioned inside the tape. As a result, damage to the holding table is prevented.

[0006] In this case, the tape is not divided when the workpiece is divided. That is, the multiple chips are integrated via the tape. Therefore, the likelihood of some chips scattering when the workpiece is divided into multiple chips can be reduced. Furthermore, to facilitate handling of such workpieces before and after division, the workpieces are often divided into work units that are integrated with the annular frame via the tape.

[0007] For example, when a workpiece is divided from the front side by a cutting blade, a work unit is formed in which the workpiece and the annular frame are integrated via a tape adhered to the back side of the workpiece (see, for example, Patent Document 1). Also, when a workpiece is divided from the back side by a cutting blade, a work unit is formed in which the workpiece and the annular frame are integrated via a tape adhered to the front side of the workpiece (see, for example, Patent Document 2). [Prior art documents] [Patent documents]

[0008] [Patent Document 1] Japanese Patent Application Publication No. 11-330008 [Patent Document 2] Japanese Patent Publication No. 2020-178064 Summary of the Invention [Problem to be solved by the invention]

[0009] When devices are formed on the surface side of a workpiece, the surface of the workpiece often has an uneven shape. Specifically, a laminate including various insulating films and conductive films is formed in each of a plurality of regions defined by a plurality of planned dividing lines extending in a grid pattern on the surface of the workpiece to form a device.

[0010] On the other hand, in order to facilitate division of the workpiece along each of the plurality of planned division lines extending in a grid pattern, such laminations are often not formed in the areas of the surface of the workpiece corresponding to the plurality of planned division lines, resulting in an uneven surface of the workpiece (the areas where devices will be formed are convex portions, and the areas corresponding to the plurality of planned division lines are concave portions).

[0011] Therefore, in order to apply tape to the entire surface of such a workpiece, the tape needs to stretch to follow the uneven shape of the surface of the workpiece. However, such tapes generally have anisotropy in the rate of elongation when a certain force is applied.

[0012] For example, when a predetermined force is applied in the pulling direction of the tape (MD (Machine Direction) direction) during manufacturing of the tape, the elongation rate of the tape is lower than the elongation rate of the tape when a predetermined force is applied in other directions, such as a direction perpendicular to the pulling direction (TD (Transverse Direction) direction).

[0013] When the dividing line extends in a direction perpendicular to the direction in which the tape has a low elongation rate (for example, the tensile direction), the tape may not adhere to the surface of the workpiece near the boundary between the dividing line and the area where the device is to be formed. Furthermore, if the workpiece is divided from the surface side with a cutting blade in such a state, the processing quality when dividing the workpiece along the dividing line may deteriorate.

[0014] In view of this, the object of the present invention is to reduce the proportion of the area on the surface of the workpiece to which the tape does not adhere, and to suppress deterioration in processing quality when the workpiece is divided from the back side by a cutting blade. [Means for solving the problem]

[0015] According to one aspect of the present invention, there is provided a method for dividing a workpiece, the method comprising: dividing a workpiece into a plurality of regions by a plurality of first division lines each extending along a first direction and a plurality of second division lines each extending along a second direction intersecting the first direction, the plurality of regions having devices formed on the front surface side thereof, from a back surface side of the workpiece along each of the plurality of first division lines and each of the plurality of second division lines by a cutting blade; a first work unit forming step of forming a first work unit in which the workpiece and the first annular frame are integrated by adhering the first tape to the first annular frame so as to cover the opening and adhering the first tape to the surface of the workpiece; a holding step of holding the first tape side of the first work unit with a holding table to expose the back surface of the workpiece after the first work unit forming step; and dividing the workpiece from the back surface side along each of the plurality of first planned division lines and each of the plurality of second planned division lines by the cutting blade after the holding step. and forming a groove in the first tape. and a dividing step of forming a first work unit by applying a predetermined force to the first tape, wherein in the first work unit forming step, the first tape is adhered to the surface of the workpiece so that a third direction in which the elongation rate is lowest when the predetermined force is applied to the first tape is non-parallel to both the first direction and the second direction.

[0016] Furthermore, in the present invention, the first direction and the second direction are perpendicular to each other, and in the first work unit formation step, it is preferable that the first tape is adhered to the surface of the workpiece so that the angles formed by a straight line along the third direction and each of a straight line along the first direction and a straight line along the second direction are 45 degrees.

[0017] In the present invention, a notch or orientation flat for indicating a crystal orientation is formed on the outer edge of the workpiece, and after the dividing step, a second tape is attached to a second annular frame having a frame notch formed on the outer edge so as to cover an opening of the second annular frame, and after the second tape is attached to the back surface of the workpiece, Workpiece and a second work unit forming step of forming a second work unit in which the workpiece and the second annular frame are integrated by peeling the first tape from the second annular frame. In the second work unit forming step, it is preferable that the second tape attached to the second annular frame is attached to the back surface of the workpiece so that the angle between the direction from the center of the workpiece toward the notch or the orientation flat and the direction indicated by the frame cutout is 0°, 90°, 180°, or 270°. [Effects of the Invention]

[0018] In the present invention, the first tape is attached to the surface of the workpiece so that the direction (third direction) in which the elongation rate is lowest when a predetermined force is applied to the first tape is non-parallel to each of the plurality of division lines extending in a grid pattern, and in this case, each of the plurality of division lines does not extend along a direction perpendicular to the third direction.

[0019] This reduces the proportion of the area on the surface of the workpiece to which the first tape does not adhere near the boundary between each of the multiple planned division lines and the area where the device is formed, and suppresses deterioration in processing quality when the workpiece is divided from the back side by the cutting blade. [Brief explanation of the drawings]

[0020] [Figure 1] FIG. 1 is a flow chart that schematically shows an example of a method for dividing a workpiece. [Figure 2] FIG. 2 is a perspective view schematically showing an example of a tape application device used to perform the work unit forming step. [Figure 3]FIG. 3(A) is a perspective view that schematically shows an example of a workpiece, and FIG. 3(B) is a perspective view that schematically shows an example of an annular frame. [Figure 4] FIG. 4 is a partially enlarged perspective view schematically showing the holding unit and the tape applying unit. [Figure 5] FIG. 5 is a perspective view schematically showing how the workpiece and the annular frame are carried onto the support table. [Figure 6] FIG. 6 is a perspective view schematically showing the workpiece and the annular frame whose positions have been adjusted. [Figure 7] FIG. 7 is a partial cross-sectional side view that schematically shows how tape is applied to the workpiece and the annular frame. [Figure 8] FIG. 8 is a perspective view schematically illustrating an example of a work unit. [Figure 9] FIG. 9 is a perspective view schematically showing an example of a cutting device used to carry out the holding step and the dividing step. [Figure 10] FIG. 10 is a side view schematically showing the table base, the holding table, and the motor. [Figure 11] FIG. 11 is an enlarged, partially cross-sectional side view showing the table base and the holding table. [Figure 12] FIG. 12 is a perspective view schematically showing an example of a work unit after the dividing step. [Figure 13] FIG. 13 is a flowchart schematically showing a modified example of the method for dividing the workpiece. [Figure 14] FIG. 14 is a perspective view schematically showing an example of a tape applying device used to perform the second work unit forming step. [Figure 15] FIG. 15 is a partially enlarged perspective view schematically showing the tape application portion. [Figure 16] FIG. 16 is a partially enlarged perspective view schematically showing the work unit forming section and the like. [Figure 17] FIG. 17 is a partially enlarged perspective view schematically showing the transport unit and the like. [Figure 18]FIG. 18 is a partially enlarged perspective view schematically showing the peeling portion. [Figure 19] FIG. 19 is a perspective view that schematically shows an example of the second work unit. DETAILED DESCRIPTION OF THE INVENTION

[0021] An embodiment of the present invention will be described with reference to the accompanying drawings. Fig. 1 is a flow chart showing a typical example of a method for dividing a workpiece. In this method, first, a workpiece and an annular frame are integrated via a tape attached to the surface of the workpiece so that the direction in which the tape has the lowest elongation rate is not parallel to the planned division line, thereby forming a work unit (work unit forming step: S1).

[0022] Fig. 2 is a perspective view showing a schematic example of a tape application device used to perform the work unit forming step (S1). Note that the X1 axis direction (front-back direction) and the Y1 axis direction (left-right direction) shown in Fig. 2 are directions perpendicular to each other on a horizontal plane, and the Z1 axis direction (up-down direction) is a direction (vertical direction) perpendicular to the X1 axis direction and the Y1 axis direction.

[0023] The tape application device 2 shown in Fig. 2 has a rectangular parallelepiped base 4 that supports each of the components. Three cassette mounting tables 6a, 6b, and 6c are provided in the front area of ​​the upper surface of the base 4, aligned along the Y1-axis direction. For example, a cassette 8a that stores a workpiece is placed on the cassette mounting table 6a.

[0024] Further, a cassette 8b capable of accommodating a work unit including a workpiece and an annular frame integrated via tape in the tape application device 2 is placed on the cassette placing table 6b. Further, a cassette 8c accommodating an annular frame is placed on the cassette placing table 6c.

[0025] Fig. 3(A) is a perspective view showing an example of a workpiece housed in the cassette 8a. The workpiece 11 shown in Fig. 3(A) has a disk-shaped substrate 13 made of a single-crystal semiconductor material such as silicon (Si), silicon carbide (SiC), or gallium nitride (GaN).

[0026] A notch 15 is formed on the outer edge of this substrate 13 to indicate a specific crystal orientation of the single crystal semiconductor that constitutes the substrate 13. In addition, an impurity region doped with impurities is provided on a portion of the surface 13a side of the substrate 13.

[0027] Furthermore, the workpiece 11 is divided into a plurality of regions 19 by a plurality of planned division lines (first planned division lines) 17a each extending along the same direction (first direction) and a plurality of planned division lines (second planned division lines) 17b each extending along a second direction intersecting the first direction. The first direction is a direction parallel to the direction from the center of the substrate 13 toward the notch 15, and the second direction is a direction perpendicular to the direction from the center of the substrate 13 toward the notch 15. In other words, the first direction and the second direction are orthogonal to each other.

[0028] A device is formed in each of the plurality of regions 19. This device is composed of a part of the surface 13a side of the substrate 13 (an intrinsic semiconductor region and an impurity region where no impurities exist) and a laminated layer including various insulating films and conductive films formed on the surface 13a of the substrate 13.

[0029] Note that a similar laminate is not formed in areas corresponding to the plurality of planned dividing lines 17a, 17b on the surface of the workpiece 11. Therefore, the surface of the workpiece 11 has an uneven shape (the plurality of areas 19 where devices will be formed become convex portions, and the areas corresponding to the plurality of planned dividing lines 17a, 17b become concave portions).

[0030] There are no limitations on the material, shape, structure, size, etc. of the substrate 13. The substrate 13 may be made of materials such as ceramics, resin, and metal. Furthermore, the substrate 13 may not be provided with an impurity region. Furthermore, the outer edge of the substrate 13 may be formed with a flat portion, a so-called orientation flat (orientation flat), to indicate a specific crystal orientation instead of a notch.

[0031] Fig. 3(B) is a perspective view schematically showing an example of an annular frame (first annular frame) housed in cassette 8c. An annular frame 21 shown in Fig. 3(B) is made of a metal material such as aluminum or stainless steel. A circular opening 21a having a diameter larger than that of workpiece 11 (substrate 13) is formed in the center of this annular frame 21.

[0032] That is, the inner periphery of the annular frame 21 extends in a circular shape, and its diameter (inner diameter) is longer than the diameter of the workpiece 11 (substrate 13). The outer edge of the annular frame 21 includes four arc portions 21b that each extend in an arc shape, and four linear portions 21c that each extend linearly.

[0033] The four arc-shaped portions 21b are arranged so that their diameters are longer than the inner diameter of the annular frame 21 and their centers overlap with a circle that coincides with the center of the opening 21a. The four arc-shaped portions 21b are arranged at approximately equal intervals along the circumferential direction of the annular frame 21.

[0034] The four straight line portions 21c are arranged so as to overlap a square whose center coincides with the center of the opening 21a. Each side of this square is longer than the inner diameter of the annular frame 21 and shorter than the diameter of the circle overlapping with the four arcuate portions 21b. Each of the four straight line portions 21c is arranged between a pair of adjacent arcuate portions 21b along the circumferential direction of the annular frame 21.

[0035] Furthermore, a pair of frame cutouts 23a, 23b are formed between one of the four straight line portions 21c and a pair of arcuate portions 21b adjacent to this straight line portion 21c. Frame cutout 23a is formed so as to cut out the outer edge of annular frame 21 at an acute angle. Frame cutout 23b is formed so as to cut out the outer edge of annular frame 21 at a right angle.

[0036] The pair of frame cutouts 23a, 23b are used to indicate the orientation of the workpiece 11 that is integrated with the annular frame 21 via the tape. For example, the workpiece 11 is integrated with the annular frame 21 so that the first direction is perpendicular to the linear portion 21c that is located between the pair of frame cutouts 23a, 23b, and the second direction is parallel to the linear portion 21c that is located between the pair of frame cutouts 23a, 23b. In this case, it is easy to align the workpiece 11 when processing the workpiece 11.

[0037] Referring again to Figure 2, the remaining components of the tape application device 2 will be described. In Figure 2, the workpiece 11 housed in cassette 8a, the work unit (the workpiece 11 and the annular frame 21 integrated via the tape) housed in cassette 8b, and the annular frame 21 housed in cassette 8c are shown by dashed lines.

[0038] An opening 4a extending along the Y1-axis direction is formed in an area of ​​the top surface of the base 4 located behind the three cassette mounting tables 6a, 6b, and 6c. A first transport unit 10a for transporting the annular frame 21 and the work unit, and a second transport unit 10b for transporting the workpiece 11 are provided in this opening 4a.

[0039] The first conveying unit 10a and the second conveying unit 10b each have movement support parts 12a and 12b that are movable along the Y1-axis direction. These movement support parts 12a and 12b have piston rods that are movable along the Z1-axis direction and incorporate actuators (not shown) such as air cylinders that can rotate around a straight line along the Z1-axis direction as a rotation axis.

[0040] Furthermore, openings through which the piston rods pass are formed in the upper surfaces of the movement support members 12a and 12b. The lower ends of the transfer arms 14a and 14b are connected to the upper ends of the piston rods. The transfer arms 14a and 14b are robot arms with multiple joints that can rotate around a rotation axis that is a straight line along the Z1 axis direction.

[0041] The upper ends of the transfer arms 14a and 14b incorporate motors that rotate spindles that are rotatable around a rotation axis that is a straight line perpendicular to the Z1-axis direction. The spindles pass through openings formed in the side surfaces of the upper ends of the transfer arms 14a and 14b and are connected to the base ends of the robot hands 16a and 16b.

[0042] For example, a plurality of suction holes (not shown) are formed on one surface of the robot hands 16a and 16b, and the suction holes are connected to a suction source (not shown), such as a vacuum pump, via a flow path provided inside the robot hands 16a and 16b and a valve for controlling the flow of gas.

[0043] Then, by opening the valve while this suction source is operating, negative pressure is generated in the space near one surface of the robot hands 16a, 16b. As a result, one surface of the robot hand 16a of the first transport unit 10a functions as a holding surface that suction-holds the annular frame 21. Similarly, one surface of the robot hand 16b of the second transport unit 10b functions as a holding surface that suction-holds the workpiece 11.

[0044] Furthermore, in the first conveying unit 10a, the annular frame 21 can be turned upside down by rotating the spindle built into the upper end of the conveying arm 14a while the annular frame 21 is held by suction by the holding surface of the robot hand 16a.

[0045] Similarly, in the second conveying unit 10b, the workpiece 11 can be turned upside down by rotating the spindle built into the upper end of the conveying arm 14b while the workpiece 11 is held by suction by the holding surface of the robot hand 16b.

[0046] An X1-axis direction movement mechanism 18 that moves the support base 20 along the X1-axis direction is provided in an area on the top surface of the base 4 located behind the opening 4a. This X1-axis direction movement mechanism 18 has a pair of guide rails 18a that each extend along the X1-axis direction.

[0047] The lower surface of the support base 20 is slidably connected to the upper surface of the pair of guide rails 18a. A screw shaft 18b extending along the X1 axis direction is disposed between the pair of guide rails 18a.

[0048] A motor 18c for rotating the screw shaft 18b is connected to the front end of the screw shaft 18b. A nut portion (not shown) for accommodating balls that roll on the surface of the rotating screw shaft 18b is provided on the surface of the screw shaft 18b where a spiral groove is formed, thereby forming a ball screw.

[0049] That is, when the screw shaft 18b rotates, the balls circulate inside the nut portion, causing the nut portion to move along the X1 axis direction. In addition, this nut portion is fixed to the underside of the support base 20. Therefore, when the screw shaft 18b is rotated by the motor 18c, the support base 20 moves along the X1 axis direction together with the nut portion.

[0050] This allows the support table 20 to be positioned in either the carry-in / out area located above the front side of the pair of guide rails 18a or the tape application area located above the rear side. The carry-in / out area is an area of ​​the support table 20 where the workpiece 11 and the annular frame 21 can be carried into the support table 20 and the work unit can be carried out from the support table 20.

[0051] The tape application area is an area of ​​the support table 20 where a work unit can be formed (integrating the workpiece 11 and the annular frame 21 via the tape). FIG. 2 shows the support table 20 arranged in the tape application area.

[0052] The work unit is formed by a tape application unit 36 ​​provided above the tape application area of ​​the support table 20. Figure 4 is a partially enlarged perspective view schematically showing the support table 20 and the tape application unit 36. The support table 20 has a rectangular parallelepiped frame support table 22 that supports an annular frame 21.

[0053] The frame support base 22 has a circular opening 24 formed in the center and a square-shaped upper surface 26 including a pair of sides 26a, 26b extending along the X1-axis direction and a pair of sides 26c, 26d extending along the Y1-axis direction. A spindle (not shown) extending along the Z1-axis direction and a motor (not shown) that rotates the spindle around a rotation axis that is a straight line along the Z1-axis direction are provided inside the opening 24.

[0054] The upper part of this spindle is connected to the lower part of a cylindrical workpiece support table 28 that holds the workpiece 11. When the motor built into the frame support table 22 is operated, the workpiece support table 28 rotates together with the spindle around a rotation axis that passes through the center of the upper surface of the workpiece support table 28 and is aligned with the Z1-axis direction.

[0055] Furthermore, an elevation mechanism (not shown) that moves (lifts and lowers) the workpiece support table 28 along the Z1-axis direction is provided inside the opening 24. This elevation mechanism adjusts the height of the workpiece support table 28 so that the height of the upper surface of the annular frame 21 supported by the frame support table 22 and the height of the upper surface of the workpiece 11 supported by the workpiece support table 28 are aligned, for example.

[0056] Furthermore, a pair of fixed protrusions 30a, 30b, the height of which is shorter than the thickness of the annular frame 21, are provided on the upper surface 26 of the frame support base 22. The fixed protrusion 30a is disposed on the side 26a of the upper surface 26 of the frame support base 22 when viewed from the top surface of the workpiece support base 28, and extends along the X1-axis direction. Similarly, the fixed protrusion 30b is disposed on the side 26c of the upper surface 26 of the frame support base 22 when viewed from the top surface of the workpiece support base 28, and extends along the Y1-axis direction.

[0057] Furthermore, a pair of openings 32a, 32b extending along the Y1-axis direction and a pair of openings 32c, 32d extending along the X1-axis direction are formed in the upper surface 26 of the frame support base 22. The pair of openings 32a, 32b are arranged on the side 26b of the upper surface 26 of the frame support base 22 when viewed from the top surface of the workpiece support base 28. Similarly, the pair of openings 32c, 32d are arranged on the side 26d of the upper surface 26 of the frame support base 22 when viewed from the top surface of the workpiece support base 28.

[0058] Furthermore, a movable protrusion 34a that is movable along the Y1-axis direction is inserted through each of the pair of openings 32a, 32b. Similarly, a movable protrusion 34b that is movable along the X1-axis direction is inserted through each of the pair of openings 32c, 32d. The frame support base 22 has two built-in actuators that move the movable protrusions 34a, 34b.

[0059] Specifically, the frame support base 22 incorporates a first actuator (not shown), such as an air cylinder, having a first piston rod that is movable along the Y1-axis direction. The lower portion of the movable protrusion 34a is connected to the tip of this first piston rod via a connecting member (not shown).

[0060] Similarly, the frame support base 22 incorporates a second actuator (not shown), such as an air cylinder, having a second piston rod that is movable along the X1 axis direction. The lower part of the movable protrusion 34b is connected to the tip of this second piston rod via a connecting member (not shown).

[0061] The tape application unit 36, which is provided above the tape application area of ​​the support base 20, has a supply roller 38. A plurality of circular tapes (first tapes) 27, which are adhered to the release substrate 25, are wound around the supply roller 38.

[0062] The diameter of each of the multiple tapes 27 is longer than the inner diameter of the annular frame 21 (the diameter of the opening 21a) and shorter than the side of the square that overlaps with the linear portion 21c of the outer edge of the annular frame 21 (see FIG. 3(B)).

[0063] Each of the plurality of tapes 27 has, for example, a flexible film-like tape substrate and an adhesive layer (glue layer) provided on one surface of the tape substrate (the surface on the release substrate 25 side). Each of the tape substrate and the adhesive layer is made of a material that transmits visible light.

[0064] Specifically, the tape substrate is made of polyolefin (PO), polyethylene terephthalate (PET), polyvinyl chloride (PVC), polystyrene (PS), etc. The adhesive layer is made of ultraviolet-curing silicone rubber, acrylic material, epoxy material, etc.

[0065] Furthermore, the elongation rate when a predetermined force is applied is anisotropic in each of the plurality of tapes 27. For example, the elongation rate of each of the plurality of tapes 27 is lowest when a predetermined force is applied along the tensile direction (MD direction) of the tape 27 when the tape 27 is manufactured.

[0066] The plurality of tapes 27 are then pulled out obliquely downward together with the release substrate 25 by the guide roller 40. Here, each of the plurality of tapes 27 is attached to the release substrate 25 so that the direction in which it is pulled out by the guide roller 40 is parallel to the pulling direction (MD direction).

[0067] Furthermore, the direction in which the tapes 27 are pulled out by the guide roller 40 is parallel to the X1 axis direction. Therefore, the elongation rate of each of the tapes 27 becomes the lowest when a predetermined force is applied along the X1 axis direction.

[0068] Furthermore, each of the multiple tapes 27 pulled out by the guide roller 40 is peeled off from the peeling substrate 25 by a peeling member 42 that comes into line contact with the peeling substrate 25. Specifically, the peeling substrate 25 is pulled by a guide roller 44 provided behind the peeling member 42.

[0069] Therefore, the traveling direction of the release substrate 25 changes significantly before and after contact with the release member 42. On the other hand, each of the multiple tapes 27 is not pulled by the guide roller 44. As a result, contact between the release member 42 and the release substrate 25 triggers each of the multiple tapes 27 to be released from the release substrate 25.

[0070] In addition, a pressure roller 46 is provided at a position opposite the peeling member 42 via the peeling substrate 25, and is used to attach the multiple tapes 27 peeled off from the peeling substrate 25 to the workpiece 11 and the annular frame 21.

[0071] Furthermore, the peeling substrate 25 pulled by the guide roller 44 is taken up and collected by a collection roller 48 provided above the guide roller 44. Furthermore, the tape application unit 36 ​​is connected to an elevation mechanism (not shown).

[0072] The lifting mechanism adjusts the height of the tape application unit 36 ​​so that the pressure roller 46 is positioned at a height that allows the pressure roller 46 to come into contact with the annular frame 21 and / or the workpiece 11 placed on the support table 20 positioned in the tape application area. This allows the tape 27 to be pressed against the annular frame 21 and / or the workpiece 11 by the pressure roller 46.

[0073] 2, the work unit formation step (S1) is performed, for example, in the following order: First, the X1-axis direction moving mechanism 18 is operated to position the support table 20 in the carry-in / out area. Next, the workpiece 11 and the annular frame 21 are carried into the support table 20.

[0074] 5 is a perspective view showing a schematic view of the workpiece 11 and the annular frame 21 being loaded onto the support table 20. Specifically, the second transport unit 10b is operated to load the workpiece 11 stored in the cassette 8a onto the upper surface of the workpiece support table 28 of the support table 20.

[0075] At this time, the second conveying unit 10b transports the workpiece 11 onto the upper surface of the workpiece support table 28 so that the surface of the workpiece 11 (surface 13a of the substrate 13) faces upward and the notch 15 is positioned on the side 26d of the upper surface 26 of the frame support table 22 when viewed from the upper surface of the workpiece support table 28.

[0076] That is, the workpiece 11 is loaded onto the upper surface of the workpiece support table 28 so that each of the multiple planned division lines 17a is parallel to the X1 axis direction and each of the multiple planned division lines 17b is parallel to the Y1 axis direction.

[0077] Furthermore, the first transport unit 10a is operated so as to carry the annular frame 21 housed in the cassette 8c out of the cassette 8c and onto the upper surface 26 of the frame support base 22 of the support base 20.

[0078] At this time, the first conveying unit 10a transports the annular frame 21 onto the upper surface 26 of the frame support table 22 so that, when viewed from the top surface of the workpiece support table 28, the straight portion 21c located between the pair of frame cutouts 23a, 23b is positioned on the side 26d of the upper surface 26 of the frame support table 22.

[0079] That is, the annular frame 21 is loaded onto the upper surface of the frame support base 22 so that a pair of straight portions 21c including this straight portion 21c are parallel to the Y1 axis direction, and the remaining pair of straight portions 21c are parallel to the X1 axis direction.

[0080] Before the annular frame 21 is carried into the frame support base 22, the movable protrusions 34a and 34b are positioned at the farthest position from the workpiece support base 28. Then, the annular frame 21 is carried into an area inside the fixed protrusions 30a and 30b and the movable protrusions 34a and 34b.

[0081] Next, the positions of the workpiece 11 and the annular frame 21 are adjusted by rotating the workpiece 11 and moving the annular frame 21 horizontally. Fig. 6 is a perspective view showing the workpiece 11 and the annular frame 21 whose positions have been adjusted.

[0082] Specifically, the workpiece 11 is rotated by a predetermined angle (for example, 45°). As a result, each of the plurality of planned dividing lines 17a, 17b of the workpiece 11 becomes non-parallel to the X1-axis direction. That is, each of the plurality of planned dividing lines 17a, 17b becomes non-parallel to the direction in which the elongation rate is lowest when a predetermined force is applied to the tape 27 described above.

[0083] Furthermore, the movable protrusion 34a is moved along the Y1-axis direction so as to approach the workpiece support base 28. As a result, the movable protrusion 34a comes into contact with one of the pair of straight portions 21c parallel to the X1-axis direction. Then, the movable protrusion 34a is moved along the Y1-axis direction until the other of the pair of straight portions 21c parallel to the X1-axis direction comes into contact with the fixed protrusion 30a.

[0084] Similarly, the movable protrusion 34b is moved along the X1-axis direction so as to approach the workpiece support base 28. As a result, the movable protrusion 34b comes into contact with one of the pair of straight portions 21c parallel to the Y1-axis direction. Then, the movable protrusion 34b is moved along the X1-axis direction until the other of the pair of straight portions 21c parallel to the Y1-axis direction comes into contact with the fixed protrusion 30b.

[0085] Next, if necessary, the lifting mechanism provided inside the opening 24 is operated to raise and lower the workpiece support table 28. That is, if there is a large difference in height between the upper surface of the annular frame 21 supported by the frame support table 22 and the upper surface (surface) of the workpiece 11 (surface 13a of the substrate 13) supported by the workpiece support table 28, the height of the workpiece support table 28 is adjusted so that the two heights are the same.

[0086] Next, the tape 27 is applied to the workpiece 11 and the annular frame 21. Figure 7 is a partial cross-sectional side view that schematically shows how the tape 27 is applied to the workpiece 11 and the annular frame 21. Specifically, first, the X1-axis direction moving mechanism 18 is operated so that the support base 20 that supports the workpiece 11 and the annular frame 21 is positioned in the tape application area. At this time, the movable protrusion 34b is positioned approximately directly below the pressure roller 46 of the tape application unit 36.

[0087] Next, the movable protrusion 34b is moved to the position farthest from the workpiece support base 28. Next, the tape application unit 36 ​​is lowered to a height where the pressure roller 46 can contact the workpiece 11 and the annular frame 21. Next, the guide rollers 40, 44, the pressure roller 46, and the recovery roller 48 (pressure roller 46, etc.) are rotated so that the tape 27 is peeled off from the peeling substrate 25 and faces the upper surface of the annular frame 21.

[0088] Next, while continuing to rotate the pressure roller 46 etc., the support table 20 is moved forward. As a result, the tape 27 is pressed downward by the pressure roller 46. As a result, the tape 27 is gradually adhered to the upper surface of the annular frame 21 and the upper surface (surface) of the workpiece 11 (surface 13a of the substrate 13).

[0089] Here, the surface of the workpiece 11 has an uneven shape including protrusions (plural regions 19 where devices will be formed) and recesses (regions corresponding to the plural planned division lines 17a, 17b). In order to apply the tape 27 to the entire surface of the workpiece 11, it is necessary that the regions of the tape 27 to be applied extend near the boundaries between each of the plural planned division lines 17a, 17b and the regions 19 where devices will be formed.

[0090] In this regard, as described above, the tape 27 is arranged so that the direction in which the elongation rate is lowest when a predetermined force is applied is non-parallel to each of the plurality of planned dividing lines 17 a, 17 b, thereby making it possible to reduce the proportion of the area on the surface of the workpiece 11 where the tape 27 is not attached, near the boundaries between each of the plurality of planned dividing lines 17 a, 17 b and the region 19 in which devices are to be formed.

[0091] Furthermore, it is preferable that the angle formed by the line extending in the direction in which the elongation rate of the tape 27 is lowest (the line extending in the third direction) and the line extending in each of the plurality of planned division lines 17a (the line extending in the first direction) is 45°. In other words, it is preferable that the angle formed by the line extending in the third direction and the line extending in each of the plurality of planned division lines 17b (the line extending in the second direction) is 45°.

[0092] In this case, the gradients of the directions in which the elongation rate of the tape 27 is lowest for each of the plurality of division lines 17a, 17b are equal, so that the proportions of the areas on the surface of the workpiece 11 where the tape 27 is not attached can be equalized near the boundaries between each of the plurality of division lines 17a, 17b and the area 19 where devices are to be formed.

[0093] In this way, the tape 27 is adhered to the workpiece 11 and the annular frame 21. As a result, a work unit (first work unit) is formed in which the workpiece 11 and the annular frame 21 are integrated via the tape 27. Fig. 8 is a perspective view showing a schematic view of this work unit 29. Note that Fig. 8 shows the back surface of the workpiece 11 (the back surface 13b of the substrate 13).

[0094] Next, this work unit 29 is loaded into cassette 8b. Specifically, first, the X1 axis direction movement mechanism 18 is operated so as to position the support table 20 in the loading / unloading area. Then, the first transport unit 10a is operated so as to load the work unit 29 supported by the support table 20 from the support table 20 and load it into cassette 8b.

[0095] 1, after the work unit forming step (S1), the tape 27 side of the work unit 29 is held to expose the back surface of the workpiece (back surface 13b of substrate 13) (holding step: S2). After this holding step (S2), the workpiece 11 is divided from the back surface side of the workpiece 11 along each of the multiple planned division lines 17a, 17b with a cutting blade (dividing step: S3).

[0096] Fig. 9 is a perspective view schematically showing an example of a cutting device used to perform the holding step (S2) and the dividing step (S3). Note that the X2 axis direction (front-back direction) and the Y2 axis direction (left-right direction) shown in Fig. 9 are directions perpendicular to each other on a horizontal plane, and the Z2 axis direction (up-down direction) is a direction (vertical direction) perpendicular to the X2 axis direction and the Y2 axis direction.

[0097] 9 has a base 52 that supports the various components. A pair of guide rails 54, each extending along the Y2-axis direction, is provided on the front side of the upper surface of the base 52. A rectangular parallelepiped moving table 56, extending along the X2-axis direction, is slidably connected to the upper surfaces of the pair of guide rails 54.

[0098] A screw shaft 58 extending along the Y2-axis direction is disposed between the pair of guide rails 54. A motor 60 for rotating the screw shaft 58 is connected to one end of the screw shaft 58. A nut portion (not shown) for accommodating balls that roll on the surface of the rotating screw shaft 58 is provided on the surface of the screw shaft 58 on which a spiral groove is formed, thereby constituting a ball screw.

[0099] That is, when the screw shaft 58 rotates, the balls circulate inside the nut portion, causing the nut portion to move along the Y2-axis direction. The nut portion is fixed to the underside of the moving table 56. Therefore, when the screw shaft 58 is rotated by the motor 60, the moving table 56 moves along the Y2-axis direction together with the nut portion.

[0100] Furthermore, a Y2-axis scale 62 is provided in an area close to the guide rail 54 on the top surface of the base 52. This Y2-axis scale 62 is used to measure the position of the moving table 56 in the Y2-axis direction.

[0101] A pair of guide rails 64, each extending along the X2 axis direction, is provided on the upper surface of the movable table 56. A table base 66 is slidably connected to the upper surfaces of the pair of guide rails 64. The detailed structure of the table base 66 will be described later.

[0102] A screw shaft 68 extending along the X2 axis direction is disposed between the pair of guide rails 64. A motor 70 for rotating the screw shaft 68 is connected to the front end (one end) of this screw shaft 68. A nut portion (not shown) for accommodating balls that roll on the surface of the rotating screw shaft 68 is provided on the surface of the screw shaft 68 on which a spiral groove is formed, thereby constituting a ball screw.

[0103] That is, when the screw shaft 68 rotates, the balls circulate inside the nut portion, causing the nut portion to move along the X2 axis direction. In addition, this nut portion is fixed to the underside of the table base 66. Therefore, when the screw shaft 68 is rotated by the motor 70, the table base 66 moves along the X2 axis direction together with the nut portion.

[0104] Furthermore, an X2-axis scale 72 is provided on the top surface of the moving table 56 in an area close to the guide rail 64. This X2-axis scale 72 is used to measure the position of the table base 66 in the X2-axis direction.

[0105] A holding table 74 is provided on the upper surface of the table base 66. A motor 84 is provided on the side surface of the table base 66 for rotating the holding table 74 around a rotation axis that passes through the center of the holding table 74 and is aligned along the Z2-axis direction. Figure 10 is a side view schematically showing the table base 66, holding table 74, and motor 84.

[0106] The table base 66 has a rectangular parallelepiped bottom plate portion 66a. The lower surface side of this bottom plate portion 66a (the lower surface side of the table base 66) is connected to the pair of guide rails 64. In addition, a rectangular parallelepiped standing portion 66b extending upward is provided on the upper front end of the bottom plate portion 66a.

[0107] Furthermore, a rectangular parallelepiped top plate portion 66c extending rearward is provided at the rear of the upper end of this standing portion 66b. A cylindrical through-hole (not shown) is formed in the center of this top plate portion 66c, penetrating the top plate portion 66c in the vertical direction. In addition, in the table base 66, an open space 66d exists between the upper surface of the bottom plate portion 66a and the lower surface of the top plate portion 66c.

[0108] A holding table 74 is provided on the upper surface of the table base 66 (the upper surface of the top plate portion 66c) so as to cover a through-hole formed in the top plate portion 66c. The holding table 74 is supported by the table base 66 in a manner such that it can rotate about a rotation axis that passes through the center of the holding table 74 and is a straight line along the Z2-axis direction. Figure 11 is a partially cross-sectional side view showing an enlarged portion of the table base 66 and the holding table 74.

[0109] The holding table 74 has a disk-shaped holding member 74a located above a through-hole formed in the top plate portion 66c. The holding member 74a is made of a material that transmits visible light, such as soda glass, borosilicate glass, or quartz glass. Furthermore, a cylindrical fitting portion 74b is provided around the holding member 74a and extends downward from the holding member 74a.

[0110] A suction passage 74c is formed inside the holding member 74a and the fitting portion 74b, and this suction passage 74c is connected to a suction source (not shown) such as a vacuum pump via a pipe 76 or the like connected to the outer surface of the fitting portion 74b. Furthermore, an annular fitting hole is formed in the top plate portion 66c, and the lower part of the fitting portion 74b is inserted into this fitting hole in a slidable manner.

[0111] A cylindrical driven pulley 78 is provided on the outer surface of the fitting portion 74b. A belt 80 is looped around this driven pulley 78. As shown in Fig. 10, the belt 80 is also looped around the upper part of a transmission pulley 82 that extends along the Z2-axis direction. The lower part of the transmission pulley 82 is connected to a motor 84 that is provided on the front surface of the standing portion 66b.

[0112] When the motor 84 operates, the transmission pulley 82 rotates around a rotation axis that is a straight line along the Z2-axis direction, and the force that rotates the transmission pulley 82 is also transmitted to the driven pulley 78 via the belt 80. As a result, the holding table 74 together with the driven pulley 78 passes through the center of the holding table 74 and rotates around a rotation axis that is a straight line along the Z2-axis direction.

[0113] Furthermore, a columnar frame support portion 86 is provided at each of the four corners of the upper surface (upper surface of the top plate portion 66c) of the table base 66. The frame support portions 86 support the annular frame 21 via the tape 27 when the work unit 29 is placed on the holding table 74.

[0114] The frame support portion 86 is configured so that its upper surface is lower than the upper surface of the holding table 74 so that when the work unit 29 is placed on the holding table 74, the upper surface of the annular frame 21 is positioned lower than the upper surface of the holding table 74 (the upper surface of the holding member 74a).

[0115] 9, the remaining components of the cutting device 50 will be described. A rectangular parallelepiped support structure 88 is provided on the rear side of the upper surface of the base 52. A pair of guide rails 90 are provided on the side surfaces of this support structure 88, each extending along the Z2 axis direction.

[0116] A rectangular parallelepiped spindle housing 92 extending along the X2 axis direction is slidably connected to the front surfaces of the pair of guide rails 90. A screw shaft 94 extending along the Z2 axis direction is disposed between the pair of guide rails 90.

[0117] A motor 96 for rotating the screw shaft 94 is connected to the upper end (one end) of the screw shaft 94. A nut portion (not shown) for accommodating balls that roll on the surface of the rotating screw shaft 94 is provided on the surface of the screw shaft 94 on which a spiral groove is formed, thereby forming a ball screw.

[0118] That is, when the screw shaft 94 rotates, the balls circulate inside the nut portion, causing the nut portion to move along the Z2 axis direction. The nut portion is fixed to the side of the spindle housing 92 that faces the support structure 88. Therefore, when the screw shaft 94 is rotated by the motor 96, the spindle housing 92 moves along the Z2 axis direction together with the nut portion.

[0119] The spindle housing 92 accommodates a spindle (not shown) extending along the X2 axis direction and a motor (not shown) that rotates the spindle around a rotation axis that is a straight line along the X2 axis direction. The tip (front end) of the spindle is exposed from an opening formed in the front surface of the spindle housing 92.

[0120] An annular cutting blade 98 is attached to the tip of the spindle exposed from the spindle housing 92. Therefore, when the spindle rotates, the cutting blade 98 rotates together with the spindle around a straight line along the X2 axis direction as its axis of rotation. Furthermore, an upper imaging unit 100 is provided on the side of the spindle housing 92 farther from the support structure 88.

[0121] The upper imaging unit 100 uses visible light to capture images of structures present below it. A lower imaging unit 102 is provided at a position facing the upper imaging unit 100 in the vertical direction. The lower imaging unit 102 uses visible light to capture images of structures present above it.

[0122] The lower imaging unit 102 is connected to an elevation support mechanism 106 extending along the Z2 direction via a connecting portion 104 extending along the X2 axis direction. The elevation support mechanism 106 is provided on the upper surface of the base 52, and supports the lower imaging unit 102 so that it can be raised and lowered.

[0123] In the cutting device 50, for example, the holding step (S2) and the dividing step (S3) are performed in the following order: Specifically, first, the work unit 29 is placed on the holding table 74 so that the back surface of the workpiece 11 (back surface 13b of the substrate 13) faces upward. That is, the workpiece 11 is placed on the holding member 74a via the tape 27, and the annular frame 21 is placed on the frame support part 86 via the tape 27.

[0124] Next, the suction source is operated, which is connected to the suction path 74c formed inside the holding member 74a and the fitting portion 74b of the holding table 74 via the piping 76. This causes the workpiece 11 to be held by suction via the tape 27 placed on the holding member 74a. This completes the holding step (S2).

[0125] Next, the movable table 56 and the table base 66 are moved so that the through-hole formed in the holding member 74a is positioned between the upper imaging unit 100 and the lower imaging unit 102. In other words, the lower imaging unit 102 is positioned in the open space 66d between the bottom plate portion 66a and the top plate portion 66c of the table base 66.

[0126] Next, the lower imaging unit 102 captures an image of the surface of the workpiece 11 through the through-hole, the transparent holding member 74a, and the tape 27. Next, based on the image formed by the imaging by the lower imaging unit 102, the holding table 74 is rotated so that the plurality of planned dividing lines 17a or the plurality of planned dividing lines 17b become parallel to the Y2-axis direction.

[0127] Next, the moving table 56 and the table base 66 are moved so that one of the plurality of intended division lines 17a, 17b is positioned in the Y2-axis direction when viewed from the cutting blade 98. Next, the spindle housing 92 is moved so that the lower end of the cutting blade 98 is positioned higher than the lower surface of the tape 27 and lower than the upper surface thereof.

[0128] Next, the cutting blade 98 is rotated. Next, while the cutting blade 98 is still rotating, the moving table 56 is moved so that the workpiece 11 passes over the cutting blade 98 from one end to the other in the Y2-axis direction. As a result, the workpiece 11 is divided by the cutting blade 98 from the back side along any one of the plurality of planned dividing lines 17a, 17b.

[0129] By repeating the same operation, the workpiece 11 is divided from the back side along each of the plurality of division lines 17a, 17b by the cutting blade 98. This completes the dividing step (S3). Figure 12 is a perspective view schematically showing the work unit 29 after the dividing step (S3).

[0130] In the dividing step (S3), the cutting blade 98 cuts into the tape 27, forming grooves 27a in the tape 27, but the tape 27 is not divided. Therefore, the divided workpiece 11 and the annular frame 21 are integrated together via the tape 27 to form a work unit 29.

[0131] 1, the tape 27 is attached to the surface of the workpiece 11 so that the direction in which the elongation rate is lowest when a predetermined force is applied to the tape 27 is non-parallel to each of the plurality of intended dividing lines 17a, 17b. In this case, each of the plurality of intended dividing lines 17a, 17b does not extend along a direction perpendicular to the direction in which the elongation rate is lowest.

[0132] This reduces the proportion of the area on the surface of the workpiece 11 where the tape 27 does not adhere near the boundary between each of the multiple planned division lines 17a, 17b and the area 19 where the device is formed, and suppresses deterioration in processing quality when the workpiece 11 is divided from the back side by the cutting blade 98.

[0133] Furthermore, the workpiece dividing method of the present invention may include a step of aligning the direction indicating a specific crystal orientation of the workpiece 11 with the direction indicated by the frame notch of the annular frame (making the angle between the two directions 0°) after the dividing step (S3). Figure 13 is a flowchart schematically showing an example of such a workpiece dividing method. In this method, first, the above-mentioned work unit forming step (S1), holding step (S2), and dividing step (S3) are performed in order.

[0134] Then, a second work unit is formed by integrating the workpiece 11 and the second annular frame via a second tape attached to the back surface of the workpiece 11 so that the direction indicating a specific crystal orientation of the workpiece 11 (for example, the direction from the center of the workpiece 11 toward the notch 15) coincides with the direction indicated by the frame notch of the second annular frame (second work unit formation step: S4).

[0135] Fig. 14 is a perspective view schematically showing an example of a tape application device used to perform the second work unit forming step (S4). Note that the X3 axis direction (front-back direction) and the Y3 axis direction (left-right direction) shown in Fig. 14 are directions perpendicular to each other on a horizontal plane, and the Z3 axis direction (up-down direction) is a direction (vertical direction) perpendicular to the X3 axis direction and the Y3 axis direction.

[0136] 14 has a rectangular parallelepiped base 110 that supports each of the components. Two cassette mounting tables 112a and 112b are provided at a pair of front corners on the top surface of the base 110.

[0137] Then, a cassette 114a is placed on the cassette placing table 112a, and the cassette 114a accommodates a work unit 29 including the divided workpiece 11. Also, a cassette 114b that can accommodate a second work unit formed in the tape application device 108 is placed on the cassette placing table 112b.

[0138] An opening 110a extending along the Y3-axis direction is formed in the upper surface of the base 110 behind the two cassette mounting stages 112a, 112b. A transport unit 116 for transporting work units is provided in this opening 110a. This transport unit 116 has a structure similar to that of the first transport unit 10a shown in FIG. 2.

[0139] Furthermore, a tape attachment portion 110b is provided at one of a pair of corners located on the rear side of the upper surface of the base 110. Figure 15 is a partially enlarged perspective view showing the tape attachment portion 110b. A support base 118 is provided on this tape attachment portion 110b, and the second annular frame 31 is placed on this support base 118.

[0140] 3(B) and the like. The second annular frame 31 has a structure similar to that of the annular frame 21. The second annular frame 31 is placed on the support base 118 so that the direction indicated by the pair of frame cutouts 33a, 33b (the direction from the center of the opening 31a toward the linear portion 31b disposed between the pair of frame cutouts 33a, 33b) is parallel to the X3 axis direction and the linear portion 31b is positioned on the front side.

[0141] A tape application unit 120 is provided above the support base 118. This tape application unit 120 has a structure similar to that of the tape application unit 36 ​​shown in Fig. 4 etc. A supply roller 122 of the tape application unit 120 has a plurality of circular second tapes 37 wound thereon and adhered to the release substrate 35.

[0142] The diameter of each of the plurality of second tapes 37 is longer than the inner diameter of the second annular frame 31 and shorter than the side of the square that overlaps with the linear portion 31b of the outer edge of the second annular frame 31. Each of the plurality of second tapes 37 has a structure similar to that of the tape 27 shown in FIG. 4, for example.

[0143] Furthermore, the support base 118 is connected to an X3 axial movement mechanism (not shown) in the same manner as the support base 20 shown in Fig. 4 etc. Furthermore, the tape application unit 120 is connected to an elevation mechanism (not shown) in the same manner as the tape application unit 36 ​​shown in Fig. 4 etc.

[0144] Furthermore, a work unit forming section 110c is provided in the area in front of the tape application section 110b shown in Fig. 14. Fig. 16 is a partially enlarged perspective view showing the work unit forming section 110c and other components. A cutting table 124 is provided in this work unit forming section 110c, and work units 29 carried out from cassette 114a by a transport unit 116 can be carried into this cutting table 124.

[0145] Moreover, above the cutting table 124, a cutter 126 is provided to cut the tape 27 present between the workpiece 11 of the work unit 29 carried onto the cutting table 124 and the annular frame 21.

[0146] The cutter 126 is connected to a rotary drive source 128 provided above the center of the cutting table 124, and the rotary drive source 128 rotates the cutter 126 at a predetermined rotation radius. The rotary drive source 128 is also connected to an elevator mechanism (not shown).

[0147] Furthermore, an X3-axis movement mechanism housing 130 extending along the X3-axis direction is provided on the side of the cutting table 124. An opening 130a extending from a region on the side of one end of the cutting table 124 in the X3-axis direction to a region on the side of the other end of the cutting table 124 is formed in the side of the X3-axis movement mechanism housing 130, and an adhesive roller support part 132 passes through this opening 130a.

[0148] A base end of the adhesive roller support part 132 is connected to an X3 axis direction movement mechanism (not shown) built into the X3 axis direction movement mechanism housing 130. A bonding roller 134 is provided on a portion of the adhesive roller support part 132 that is exposed from the X3 axis direction movement mechanism housing 130. When the X3 axis direction movement mechanism connected to the base end of the adhesive roller support part 132 operates, the adhesive roller 134 moves along the X3 axis direction so as to come into contact with the upper surface of the cutting table 124.

[0149] An opening is also formed on the side surface opposite to the side surface on which the opening 130a of the X3 axial direction movement mechanism housing 130 is formed, and a transport unit support part 136 passes through this opening. A base end of this transport unit support part 136 is connected to an X3 axial direction movement mechanism (not shown) built into the X3 axial direction movement mechanism housing 130.

[0150] The transport unit support part 136 is bent so as to extend toward the support base 118 and the cutting table 124, and a transport unit 138 is provided below the tip of the transport unit support part 136. The transport unit 138 has a cylindrical connecting part 138a that houses an air cylinder having a piston rod (not shown) that is movable along the Z3 axis direction, and the tip (lower end) of the piston rod is fixed to the upper side of a disk-shaped connecting part 138b.

[0151] A rectangular parallelepiped connecting portion 138c extending along the X3 axis direction is provided on each of the upper sides of both ends of connecting portion 138b in the X3 axis direction. The tip of connecting portion 138c is fixed to the side of the center of rectangular parallelepiped connecting portion 138d extending along the Y3 axis direction.

[0152] Suction pads 138e are provided below both ends of the connecting portion 138d. Furthermore, the suction pads 138e are connected to a suction source (not shown) such as a vacuum pump via a flow path (not shown) formed inside the connecting portion 138d etc. and a pipe connected to the flow path.

[0153] A transport unit 110d is provided in a region to the side of the work unit forming unit 110c shown in Fig. 14. Fig. 17 is a partially enlarged perspective view schematically showing the transport unit 110d, etc. This transport unit 110d is provided with a rectangular parallelepiped Y3-axis direction movement mechanism housing 140 that extends along the Y3-axis direction from a region behind the cutting table 124 to a region behind a peeling table 148, which will be described later.

[0154] An opening is formed in the rear surface of the Y3-axis direction movement mechanism housing 140, and the front sides of the lower ends of a pair of rectangular parallelepiped lifting and rotation mechanism housings 142a, 142b, each extending along the Z3-axis direction, pass through this opening. In addition, the lower ends of the pair of lifting and rotation mechanism housings 142a, 142b are each connected to a Y3-axis direction movement mechanism (not shown) built into the Y3-axis direction movement mechanism housing 140.

[0155] An opening is formed in the front face of each of the pair of lifting and rotating mechanism housings 142a, 142b, and rectangular parallelepiped transport unit support parts 144a, 144b extending along the X3 axis pass through this opening. The base ends of these transport unit support parts 144a, 144b are connected to a lifting mechanism (not shown) and a rotation mechanism (not shown) built into the lifting and rotating mechanism housings 142a, 142b.

[0156] The lifting mechanism raises and lowers the transport unit support parts 144a and 144b along the Z3 axis. The rotation mechanism rotates the transport unit support parts 144a and 144b around a straight line along the X3 axis as the rotation axis. Furthermore, transport units 146a and 146b are provided below the tips of the transport unit support parts 144a and 144b. The transport units 146a and 146b have a structure similar to that of the transport unit 138 shown in FIG. 16.

[0157] Furthermore, a peeling unit 110e is provided in an area opposite the work unit forming unit 110c when viewed from the transport unit 110d shown in Figure 14. Figure 18 is a partially enlarged perspective view schematically showing the peeling unit 110e. This peeling unit 110e is provided with a peeling table 148. This peeling table 148 has a disk-shaped porous plate 148a with an exposed top surface.

[0158] This porous plate 148a is connected to a suction source (not shown) such as a vacuum pump via a suction path (not shown) formed inside the separation table 148. Therefore, when the suction source is operated with a work unit placed on the upper surface of the porous plate 148a, the work unit is held on the separation table 148.

[0159] An X3-axis direction movement mechanism 150 is provided above the separation table 148. This X3-axis direction movement mechanism 150 has a pair of guide rails 150a each extending along the X3-axis direction. The back side of a moving plate 152 is slidably connected to the front side of the pair of guide rails 150a. A screw shaft 150b extending along the X3-axis direction is disposed between the pair of guide rails 150a.

[0160] A motor 150c for rotating the screw shaft 150b is connected to the front end of the screw shaft 150b. A nut portion (not shown) for accommodating balls that roll on the surface of the rotating screw shaft 150b is provided on the surface of the screw shaft 150b where the spiral groove is formed, thereby forming a ball screw.

[0161] That is, when the screw shaft 150b rotates, the balls circulate inside the nut portion, causing the nut portion to move along the X3 axis direction. The nut portion is fixed to the back surface of the moving plate 152. Therefore, when the screw shaft 150b is rotated by the motor 150c, the moving plate 152 moves along the X3 axis direction together with the nut portion.

[0162] A pair of air cylinders 154, 156 are provided in a line at the front and rear on the surface of the movable plate 152. The air cylinder 154, located at the front, has a piston rod 154a that is movable along the Z3 axis direction, and a gripping claw 158 that grips the peeling tape 39, which will be described later, is connected to the lower end of the piston rod 154a.

[0163] The gripping claw 158 has an L-shaped fixed claw 160. The fixed claw 160 has a rectangular parallelepiped standing portion 160a extending along the Z3 axis direction and a rectangular parallelepiped bottom portion 160b extending rearward from the lower end of the standing portion 160a. In addition, a rectangular parallelepiped movable claw 162 that is movable along the Z3 axis direction is provided on the rear surface of the standing portion 160a.

[0164] Furthermore, the air cylinder 156 located behind the air cylinder 154 has a piston rod 156a that is movable along the Z3 axis direction, and a rectangular parallelepiped heating plate 164 that heats the peeling tape 39 (described later) is connected to the lower end of this piston rod 156a. A heating wire is built into this heating plate 164, and by generating an electric current in this heating wire, the heating plate 164 is heated, mainly around the vicinity of its lower surface.

[0165] Furthermore, a Y3-axis direction movement mechanism 166 is provided behind the air cylinder 156. This Y3-axis direction movement mechanism 166 has a pair of guide rails 166a each extending along the Y3-axis direction. The rear side of the air cylinder 168 is slidably connected to the front sides of the pair of guide rails 166a. A screw shaft 166b extending along the Y3-axis direction is disposed between the pair of guide rails 166a.

[0166] A motor 166c for rotating the screw shaft 166b is connected to one end of the screw shaft 166b. A nut portion (not shown) for accommodating balls that roll on the surface of the rotating screw shaft 166b is provided on the surface of the screw shaft 166b where a spiral groove is formed, thereby forming a ball screw.

[0167] That is, when the screw shaft 166b rotates, the balls circulate inside the nut portion, causing the nut portion to move along the Y3 axis direction. The nut portion is fixed to the back surface of the air cylinder 168. Therefore, when the screw shaft 166b is rotated by the motor 166c, the air cylinder 168 moves along the Y3 axis direction together with the nut portion.

[0168] The air cylinder 168 also has a piston rod 168a that is movable along the Z3 axis direction, and the lower end of this piston rod 168a is connected to a disk-shaped cutter 170. Also, below the cutter 170, there is provided a work table 172 that is used to cut the peeling tape 39, which will be described later.

[0169] A groove 172a extending along the Y3-axis direction is formed in the work table 172. When the peeling tape 39 is placed on the work table 172 and the cutter 170, whose lower end is positioned inside the groove 172a, is moved along the Y3-axis direction, the peeling tape 39 is cut by the cutter 170.

[0170] Furthermore, a peeling tape supply unit 174 is provided behind the work table 172. This peeling tape supply unit 174 has a supply roller 176. The peeling tape 39 is wound around this supply roller 176. This peeling tape 39 has a tape base material and a thermosetting resin layer provided on one surface of this tape base material (the surface on the supply roller 176 side).

[0171] Further, below the supply roller 176, a pair of guide rollers 178 are provided aligned along the Z3 axis direction, and the peeling tape 39 is drawn downward by this pair of guide rollers 178. Furthermore, below the pair of guide rollers 178, a pair of feed rollers 180 are provided aligned along the Z3 axis direction, and the pair of feed rollers 180 feed the peeling tape 39 forward.

[0172] 14, the second work unit forming step (S4) is performed, for example, in the following order: Specifically, first, the second annular frame 31 is carried into the support table 118 of the tape applying section 110b.

[0173] At this time, the second annular frame 31 is placed on the support base 118 so that the direction indicated by the pair of frame cutouts 33a, 33b (the direction from the center of the opening 31a toward the straight portion 31b located between the pair of frame cutouts 33a, 33b) is parallel to the X3 axis direction and the straight portion 31b is positioned at the front.

[0174] Next, the second tape 37 is adhered to the upper surface of the second annular frame 31 in the same manner as the above-described method for adhering the tape 27 to the annular frame 21. Next, the transport unit 116 is operated to transport the work unit 29 housed in the cassette 114a out of the cassette 114a and into the cutting table 124 of the work unit forming section 110c.

[0175] At this time, the transport unit 116 carries the work unit 29 onto the cutting table 124 so that the back surface of the workpiece 11 faces upward and the notch 15 is positioned forward when viewed from the center of the workpiece 11. As a result, the direction from the center of the divided workpiece 11 toward the notch 15 becomes parallel to the X3 axis direction.

[0176] Next, the cutter 126 cuts the tape 27 into a circle along the outer periphery of the workpiece 11 of the work unit 29. As a result, the work unit 29 is separated into the workpiece 11 with the disk-shaped tape 27 attached to its lower surface (surface) and the annular frame 21 with the annular tape 27 attached to its lower surface.

[0177] Next, the transport unit 116 is operated to carry out the annular frame 21 separated from the workpiece 11 from the cutting table 124 and load it into the cassette 114a. Next, the transport unit 138 and the like are operated to carry out the second annular frame 31 with the second tape 37 attached to its upper surface from the support base 118 and load it into the cutting table 124.

[0178] Specifically, first, the X3-axis direction movement mechanism connected to the base end of the transport unit support part 136 is operated so that the suction pad 138e is positioned directly above the second annular frame 31. Next, the air cylinder housed in the connecting part 138a is operated so that the suction pad 138e comes into contact with the upper surface of the second annular frame 31 or the second tape 37 attached thereto.

[0179] Next, the suction source communicating with the suction pad 138e is operated, thereby holding the second annular frame 31 on the suction pad 138e. Next, the air cylinder housed in the connecting portion 138a is operated to lift the second annular frame 31.

[0180] Next, the X3 axial movement mechanism connected to the base end of the conveying unit support portion 136 is operated so that the second tape 37 attached to the second annular frame 31 is positioned directly above the workpiece 11 placed on the cutting table 124.

[0181] Next, the air cylinder housed in the connecting portion 138a is operated so that the second annular frame 31 approaches the cutting table 124. Next, the operation of the suction source connected to the suction pad 138e is stopped. This completes the transport of the second annular frame 31, with the second tape 37 attached to its upper surface, from the support base 118 to the cutting table 124.

[0182] Next, the X3-axis direction movement mechanism connected to the base end of the adhesion roller support part 132 is operated so that the second tape 37 in contact with the upper surface (rear surface) of the workpiece 11 is pressed by the adhesion roller 134. As a result, the second tape 37 is adhered to the upper surface (rear surface) of the workpiece 11, and the workpiece 11 and the second annular frame 31 are integrated together.

[0183] At this time, the direction indicated by the pair of frame cutouts 33a, 33b of the second annular frame 31 (the direction from the center of the opening 31a toward the straight portion 31b located between the pair of frame cutouts 33a, 33b) coincides with the direction from the center of the divided workpiece 11 toward the notch 15. In other words, the angle formed by the direction indicated by the pair of frame cutouts 33a, 33b of the second annular frame 31 and the direction from the center of the divided workpiece 11 toward the notch 15 becomes 0°.

[0184] Next, the transport units 146a, 146b, etc. of the transport section 110d are operated to transport the second annular frame 31 integrated with the workpiece 11 from the cutting table 124 and onto the separation table 148 of the separation section 110e.

[0185] Specifically, first, the Y3-axis direction movement mechanism built in the Y3-axis direction movement mechanism housing 140 is operated so that the suction pad of the transport unit 146a is positioned directly above the second annular frame 31. Next, the lifting mechanism built in the lifting and rotating mechanism housing 142a is operated so that the suction pad of the transport unit 146a contacts the upper surface of the second annular frame 31 or the second tape 37 attached thereto.

[0186] Next, the suction source communicating with the suction pad of the transport unit 146a is operated. As a result, the second annular frame 31 is held by the suction pad of the transport unit 146a. Next, the lifting mechanism built into the lifting and rotation mechanism housing 142a is operated to lift the second annular frame 31. Next, the rotation mechanism built into the lifting and rotation mechanism housing 142a is operated to turn the transport unit support part 144a upside down.

[0187] As a result, the transport unit 146a is positioned above the transport unit support portion 144a. The transport unit 146a also holds the second annular frame 31 integrated with the workpiece 11 in a state in which the front surface of the workpiece 11 to which the tape 27 is attached faces upward and the back surface of the workpiece 11 to which the second tape 37 is attached faces downward.

[0188] Next, the lifting mechanism and / or rotation mechanism built into the lifting and rotation mechanism housing 142b is operated so that the transport unit 146b is positioned at a higher position than the second annular frame 31 held by the transport unit 146a, and the transport unit support part 144b is positioned above this transport unit 146b.

[0189] Next, the Y3-axis direction moving mechanism built into the Y3-axis direction moving mechanism housing 140 is operated so as to bring the lifting and rotation mechanism housing 142a and the lifting and rotation mechanism housing 142b closer to each other. Next, the lifting mechanism built into the lifting and rotation mechanism housing 142a and / or the lifting mechanism built into the lifting and rotation mechanism housing 142b is operated so as to bring the suction pad of the transport unit 146b into contact with the upper surface of the second annular frame 31.

[0190] Next, the operation of the suction source connected to the suction pad of the transport unit 146a is stopped, and the suction source connected to the suction pad of the transport unit 146b is activated, thereby transferring the second annular frame 31 integrated with the workpiece 11 from the transport unit 146a to the transport unit 146b.

[0191] Next, the Y3-axis direction movement mechanism built in the Y3-axis direction movement mechanism housing 140 is operated so that the second annular frame 31 is positioned directly above the peeling table 148. Next, the lifting mechanism built in the lifting and rotating mechanism housing 142b is operated so that the second annular frame 31 approaches the peeling table 148.

[0192] Next, the operation of the suction source communicating with the suction pad of the transport unit 146b is stopped. This completes the transport of the second annular frame 31 integrated with the workpiece 11 from the cutting table 124 to the peeling table 148. As a result, the workpiece 11 with the tape 27 attached to its upper surface (front surface) is placed on the peeling table 148 via the second tape 37 attached to its lower surface (back surface).

[0193] Next, in the peeling section 110e, the tape 27 attached to the surface of the workpiece 11 is peeled off. Specifically, first, a suction source communicating with the porous plate 148a of the peeling table 148 is operated. As a result, the workpiece 11 is held on the peeling table 148 via the second tape 37. Next, the X3-axis direction moving mechanism 150 moves the moving plate 152 so that the gripping claws 158 approach the peeling tape supply unit 174.

[0194] Next, the pair of guide rollers 178 and the pair of feed rollers 180 are operated so that the peeling tape 39 is fed toward the gripping claw 158. As a result, the leading end of the peeling tape 39 is positioned between the bottom 160b of the fixed claw 160 and the movable claw 162.

[0195] Next, the movable claw 162 is brought close to the bottom portion 160b of the fixed claw 160 so that the leading end of the peeling tape 39 is pinched between the bottom portion 160b of the fixed claw 160 and the movable claw 162, i.e., so that the leading end of the peeling tape 39 is gripped by the gripping claw 158. Next, the X3 axial direction moving mechanism 150 moves the moving plate 152 so that the gripping claw 158 is separated from the peeling tape supply unit 174 and positioned above the peeling table 148.

[0196] At this time, the peeling tape 39, the tip of which is gripped by the gripping claws 158, is pulled by the gripping claws 158 and pulled out along the X3 axis direction. The gripping claws 158 are positioned higher than the work table 172. The X3 axis direction moving mechanism 150 also moves the moving plate 152 along the X3 axis direction so that the vicinity of the outer periphery of the tape 27 adhered to the surface of the workpiece 11 is positioned directly below the heating plate 164.

[0197] Next, the air cylinder 156 lowers the piston rod 156a so that a portion of the peeling tape 39 located directly below the heating plate 164 is pressed against the tape 27. Next, an electric current is generated in the heating wire built into the heating plate 164, heating the vicinity of the lower surface of the heating plate 164. As a result, a portion of the peeling tape 39 hardens while in contact with the tape 27.

[0198] Next, the air cylinder 168 lowers the piston rod 168a so that the portion of the peeling tape 39 located above the groove 172a of the work table 172 is cut by the cutter 170, and the Y3-axis movement mechanism 166 moves the air cylinder 168 along the Y3-axis direction.

[0199] Next, the air cylinder 154 raises the piston rod 154a so as to raise the gripping claws 158. As a result, the tape 27 in contact with a portion of the peeling tape 39 is peeled off from the surface of the workpiece 11. Furthermore, if necessary to completely peel the tape 27 from the surface of the workpiece 11, the X3-axis direction moving mechanism 150 may move the moving plate 152 so that the gripping claws 158 move along the X3-axis direction.

[0200] This completes the peeling of tape 27 adhered to the surface of workpiece 11. As a result, a second work unit is formed in which workpiece 11 and second annular frame 31 are integrated via second tape 37. FIG. 19 is a perspective view schematically showing this second work unit 41. Note that FIG. 19 shows the surface side of workpiece 11 (surface 13a of substrate 13).

[0201] Next, the operation of the suction source communicating with the porous plate 148a of the separation table 148 is stopped. Next, the transport unit 116 is operated to transport the second work unit 41 from the separation table 148 and into the cassette 114b. This completes the second work unit formation step (S4).

[0202] 13, which includes this second work unit forming step (S4), the direction from the center of the divided workpiece 11 toward the notch 15 is made to coincide with the direction indicated by the pair of frame cutouts 33a, 33b of the second annular frame 31 (the direction from the center of the opening 31a toward the straight portion 31b located between the pair of frame cutouts 33a, 33b) (the angle formed by both directions is set to 0°). This makes it easier to align the workpiece 11 when processing the workpiece 11 after the second work unit forming step (S4).

[0203] The above is one aspect of the present invention, and the present invention also includes inventions having features different from those described above. For example, the second annular frame used in the second work unit forming step (S4) may be the same as the annular frame 21 used in the work unit forming step (S1).

[0204] That is, it is not necessary to prepare a ring-shaped frame different from ring-shaped frame 21 as the second ring-shaped frame. Specifically, the second work unit forming step (S4) included in the workpiece dividing method of the present invention may be performed in the following order.

[0205] First, without separating the workpiece 11 and the annular frame 21 via the tape 27 adhered to the front surface of the workpiece 11 and one surface of the annular frame 21, a second tape 37 is adhered to the rear surface of the workpiece 11 and the other surface of the annular frame 21. Then, the tape 27 adhered to the front surface of the workpiece 11 and one surface of the annular frame 21 is peeled off. In this case, the effort required for the second work unit formation step can be reduced.

[0206] On the other hand, if the second annular frame used in the second work unit forming step (S4) is different from the annular frame 21 used in the work unit forming step (S1), as described above, the portions of the tape 27 other than the portion attached to the surface of the workpiece 11 can be removed in advance before peeling the tape 27 from the surface of the workpiece 11. Therefore, the likelihood that the tape 27 will remain on the second work unit 41 formed by peeling the tape 27 from the surface of the workpiece 11 can be reduced.

[0207] Furthermore, in the second work unit forming step (S4), the direction from the center of the divided workpiece 11 toward the notch 15 does not have to coincide with the direction indicated by the pair of frame cutouts 33a, 33b of the second annular frame 31. That is, the angle formed by both directions does not have to be 0°. For example, in the second work unit forming step (S4), the second tape 37 attached to the second annular frame 31 may be attached to the back surface of the workpiece 11 so that the angle formed by both directions is 90°, 180°, or 270°.

[0208] In addition, the structures and methods according to the above-described embodiments can be modified as appropriate without departing from the scope of the present invention. [Explanation of symbols]

[0209] 11: Workpiece 13: Substrate (13a: front surface, 13b: back surface) 15: Notch 17a: Planned division line (first planned division line) 17b: Planned division line (second planned division line) 19: Area 21: Annular frame (first annular frame) (21a: opening, 21b: arc portion, 21c: straight portion) 23a, 23b: Frame cutout 25: Peeling substrate 27: Tape (1st Tape) 29: Work Unit (1st Work Unit) 31: Second annular frame (31a: opening, 31b: straight portion) 33a, 33b: Frame cutout 35: Peeling substrate 37: Second Tape 39: Peeling tape 41: Second Work Unit 2: Tape application device 4: Base 6a, 6b, 6c: cassette mounting table 8a, 8b, 8c: Cassette 10a: First transport unit 10b: Second transport unit 12a, 12b: Moving support part 14a, 14b: Transfer arm 16a, 16b: Robot hand 18:X1 axial movement mechanism (18a: guide rail, 18b: screw shaft, 18c: motor) 20: Support stand 22: Frame support stand 24 :Aperture 26: Top surface (26a, 26b, 26c, 26d: sides) 28: Workpiece support stand 30a, 30b: Fixed protrusion 32a, 32b, 32c, 32d: Opening 34a, 34b: Movable protrusion 36: Tape application unit 38: Supply roller 40: Guide roller 42: Peeling member 44: Guide roller 46: Pressure roller 48: Collection roller 50: Cutting equipment 52: Foundation 54: Guide rail 56: Moving table 58: Screw shaft 60: Motor 62: Y2 axis scale 64: Guide rail 66: table base (66a: bottom plate portion, 66b: standing portion) (66c: Top panel, 66d: Open space) 68: Screw shaft 70: Motor 72: X2 axis scale 74: Holding table (74a: holding member, 74b: fitting portion, 74c: suction path) 76: Piping 78: Driven pulley 80: Belt 82: Transmission pulley 84: Motor 86: Frame support part 88 :Support structure 90: Guide rail 92: Spindle housing 94: Screw shaft 96: Motor 98: Cutting blade 100: Upper imaging unit 102: Lower imaging unit 104:Connection part 106: Lifting support mechanism 108: Tape application device 110: Base 112a, 112b: cassette mounting table 114a, 114b: cassette 116: Transport unit 118: Frame support stand 120: Tape application unit 122: Supply roller 124: Cutting table 126: Cutter 128: Rotation drive source 130: X3 axial direction movement mechanism housing (130a: opening) 132: Adhesion roller support part 134: Adhesive roller 136: Transport unit support part 138: Transport unit (138a, 138b, 138c, 138d: connecting portion) 140: Y3 axis direction movement mechanism housing 142a, 142b: Lifting and rotating mechanism housing 144a, 144b: Transport unit support parts 146a, 146b: Transport unit 148: Peeling table (148a: porous plate) 150:X3 axial movement mechanism (150a: guide rail, 150b: screw shaft, 150c: motor) 152: Moving plate 154: Air cylinder (154a: Piston rod) 156: Air cylinder (156a: Piston rod) 158: Gripping claw 160: Fixed claw (160a: standing part, 160b: bottom part) 162: Movable claw 164: Heating plate 166:Y3 axis movement mechanism (166a: guide rail, 166b: screw shaft, 166c: motor) 168: Air cylinder (168a: Piston rod) 170: Cutter 172: Workbench (172a: Groove) 174: Peeling tape supply unit 176: Supply roller 178: Guide roller 180: Feed roller

Claims

1. A method for dividing a workpiece, the workpiece being partitioned into a plurality of regions by a plurality of first planned division lines each extending along a first direction and a plurality of second planned division lines each extending along a second direction intersecting the first direction, and having devices formed on a front surface side of each of the plurality of regions, the method comprising: dividing the workpiece from a back surface side along each of the plurality of first planned division lines and each of the plurality of second planned division lines with a cutting blade; a first work unit forming step of adhering a first tape, which has an anisotropic elongation rate when a predetermined force is applied, to a first annular frame so as to cover an opening of the first annular frame, and adhering the first tape to the surface of the workpiece, thereby forming a first work unit in which the workpiece and the first annular frame are integrated; a holding step of holding the first tape side of the first work unit by a holding table after the first work unit forming step to expose the back surface of the workpiece; a dividing step of dividing the workpiece from the back surface side along each of the plurality of first dividing lines and each of the plurality of second dividing lines by the cutting blade after the holding step, thereby forming grooves in the first tape, A method for dividing a workpiece, characterized in that in the first work unit formation step, the first tape is adhered to the surface of the workpiece so that the third direction in which the elongation rate is lowest when the predetermined force is applied to the first tape is non-parallel to either the first direction or the second direction.

2. The first direction and the second direction are perpendicular to each other, The method for dividing a workpiece according to claim 1, characterized in that in the first work unit forming step, the first tape is adhered to the surface of the workpiece so that the angles formed by a straight line along the third direction and each of a straight line along the first direction and a straight line along the second direction are 45 degrees.

3. The outer edge of the workpiece is formed with a notch or orientation flat to indicate the crystal orientation, and a second work unit forming step of, after the dividing step, adhering a second tape to the second annular frame so as to cover an opening of the second annular frame having a frame notch formed on an outer edge thereof, and adhering the second tape to the back surface of the workpiece, and then peeling the first tape from the workpiece, thereby forming a second work unit in which the workpiece and the second annular frame are integrated together, A method for dividing a workpiece as described in claim 1 or 2, characterized in that in the second work unit formation step, the second tape attached to the second annular frame is attached to the back surface of the workpiece so that the angle between the direction from the center of the workpiece toward the notch or the orientation flat and the direction indicated by the frame cutout is 0°, 90°, 180°, or 270°.

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