Sheet pasting device and sheet pasting method

Abstract

To provide a sheet sticking device and a sheet sticking method, capable of preventing increase in running cost for protecting a first and a second surface of an adherend.SOLUTION: A sheet sticking device EA comprises supplying means 10 for supplying an adhesive sheet AS deformable by prescribed energy and pressing means 20 for pressing and sticking the adhesive sheet AS supplied by the supplying means 10 to a first surface WK1 of an adherend WK. The pressing means 20 sticks the adhesive sheet AS to the first surface WK1 so as to form a protruding region ASH in which the adhesive sheet AS protrudes from an outer edge WKE of the first surface WK1. The sheet sticking device further includes folding and sticking means 30 for deforming the adhesive sheet by giving prescribed energy to the protruding region ASH, folding the protruding region ASH in a second surface WK2 direction different from the first surface WK1, and sticking the protruding region ASH to the second surface WK2.SELECTED DRAWING: Figure 1

Description

[Technical Field]

[0001] The present invention relates to a sheet sticking device and a sheet sticking method. [Background technology]

[0002] BACKGROUND ART Sheet application devices for applying adhesive sheets to adherends are known (see, for example, Patent Document 1). [Prior art documents] [Patent documents]

[0003] [Patent Document 1] Japanese Patent Application Laid-Open No. 2015-162634 Summary of the Invention [Problem to be solved by the invention]

[0004] The sheet application device 10 (sheet application device) described in Patent Document 1 is configured to protect a first surface of a wafer W (substrate) and a second surface different from the first surface using two materials, protective tape A and protective tape B, which causes the inconvenience of increased running costs for protecting the first surface and the second surface.

[0005] An object of the present invention is to provide a sheet sticking device and a sheet sticking method that can prevent an increase in running costs for protecting the first and second surfaces of an adherend. [Means for solving the problem]

[0006] The present invention employs the configurations described in the claims. [Effects of the Invention]

[0007] According to the present invention, the protruding area of ​​the adhesive sheet attached to the first surface is deformed and then folded toward the second surface, which is different from the first surface, before attachment, so that only one adhesive sheet is required to protect both the first and second surfaces of the adherend, thereby preventing an increase in running costs for protecting the first and second surfaces of the adherend. [Brief explanation of the drawings]

[0008] [Figure 1] 1A and 1B are explanatory diagrams of a sheet sticking device according to an embodiment of the present invention and an operation explanatory diagram of the device. DETAILED DESCRIPTION OF THE INVENTION

[0009] Hereinafter, an embodiment of the present invention will be described with reference to the drawings. In this embodiment, the X-axis, Y-axis, and Z-axis are orthogonal to each other, and the X-axis and Y-axis are axes within a predetermined plane, and the Z-axis is an axis orthogonal to the predetermined plane. Furthermore, in this embodiment, the view from the front in Fig. 1 parallel to the Y-axis is used as the reference, and when directions are indicated without specifying the figure, "up" is the direction of the Z-axis arrow, "down" is the opposite direction, "left" is the direction of the X-axis arrow, "right" is the opposite direction, "front" is the front direction in Fig. 1 parallel to the Y-axis, and "rear" is the opposite direction.

[0010] The sheet application apparatus EA of the present invention comprises supply means 10 which performs a supply step of supplying an adhesive sheet AS that can be deformed by heat as a predetermined energy; pressing means 20 which performs a pressing step of pressing the adhesive sheet AS supplied by the supply means 10 against a first surface WK1 of the adherend WK to adhere it; folding and pasting means 30 which performs a folding and pasting step of applying heat to the protruding region ASH to deform it, folding the protruding region ASH in the direction of a second surface WK2 different from the first surface WK1, and pasting the protruding region ASH to the second surface WK2; guiding means 40 which performs a guiding step of guiding the protruding region ASH in the direction of the second surface WK2; and protruding region pressing means 50 which performs an protruding region pressing step of pressing the protruding region ASH against the second surface WK2, and is arranged near moving means 60 which performs a moving step of moving the pressing means 20 and the adherend WK relative to each other. In this embodiment, the adherend WK has a circular shape centered on the reference position WKR, and the adhesive sheet AS is capable of shrinking and deforming when heated to 80°C.

[0011] The supply means 10 includes a support roller 11 that supports the raw roll RS on which the adhesive sheet AS has been temporarily attached to a strip-shaped release sheet RL, a guide roller 12 that guides the raw roll RS, a release plate 13 as a release means that folds the release sheet RL at a release edge 13A and releases the adhesive sheet AS from the release sheet RL, a drive roller 14 that is supported by an output shaft (not shown) of a rotary motor 14A that serves as a drive device and that pinches the release sheet RL between itself and a pinch roller 14B, and a recovery roller 15 that is supported by an output shaft (not shown) of the drive device and that constantly applies a predetermined tension to the release sheet RL that is between itself and the pinch roller 14B while the sheet application device EA is operating automatically, and that recovers the release sheet RL.

[0012] The pressing means 20 includes a pressing roller 21, and is configured to stick the adhesive sheet AS to the first surface WK1 so that the adhesive sheet AS forms a protruding area ASH that protrudes beyond the outer edge WKE of the first surface WK1.

[0013] The folding and pasting means 30 includes a hot air blowing means 31 that can heat the protruding area ASH to 80°C by generating hot air AR by heating a gas such as the atmosphere or a gas using a heating device (not shown), such as a coil heater or the heating side of a heat pipe, and blowing the hot air AR through piping 31A, and a blowing head 32 that is arranged in a circular ring shape centered on a center line CL, which is a straight line parallel to the Z axis. The blower head 32 includes an annular nozzle 32A having an annular outlet 32B formed therein for ejecting the hot air AR blown through the piping 31A.

[0014] The guiding means 40 includes a linear motor 41 as a driving device, and an induction head 43 that is supported on an output shaft 41A of the linear motor 41 via a bracket 42 and has a ring shape centered on a center line CL. An inner wall 43A of the induction head 43 is formed with an annular outlet 43C for ejecting the hot air AR sent from the hot air blowing means 31 via a pipe 43B.

[0015] The protruding area pressing means 50 includes a linear motor 51 as a driving device supported on the induction head 43 via a bracket 51A, and a circular pressing member 52 supported on the output shaft 51B of the linear motor 51.

[0016] The moving means 60 includes a support table 62 supported by a slider 61A of a linear motor 61 as a driving device and having a holding surface 62A that can be sucked and held by a pressure reducing means (holding means) (not shown) such as a vacuum pump or a vacuum ejector, a linear motor 63 as a driving device disposed in a recess 62B formed in the holding surface 62A, and a lift table 64 supported by the output shaft 63A of the motor 63 and having an upper surface that forms a holding surface 64A that can be sucked and held by a pressure reducing means (holding means) (not shown) such as a vacuum pump or a vacuum ejector. Note that a non-adhesive material such as a fluororesin or silicone resin is laminated on the holding surface 62A to which the adhesive sheet AS will not adhere, or which will allow the adhesive sheet AS to be peeled off even if it does adhere.

[0017] The operation of the sheet sticking apparatus EA will now be described. First, a user of the sheet application apparatus EA (hereinafter simply referred to as "user") sets the raw web RS in the sheet application apparatus EA, with each component positioned in the initial position shown by the solid lines in Fig. 1(A), and then inputs a signal to start automatic operation via an operation means (not shown), such as an operation panel or a personal computer. The supply means 10 then drives the rotary motor 14A to pay out the raw web RS. When the leading edge of the leading adhesive sheet AS in the payout direction is peeled off a predetermined length by the peeling edge 13A of the peeling plate 13, the rotary motor 14A is stopped. Next, the user or a transport means (not shown), such as an articulated robot or belt conveyor, places the adherend WK on the holding surfaces 62A, 64A so that the reference position WKR coincides with the lift table center 64R, as shown in Fig. 1(A). The moving means 60 then drives the pressure-reducing means (not shown), and the adherend WK begins to be suction-held on the holding surfaces 62A, 64A.

[0018] Thereafter, the moving means 60 drives the linear motor 61 to move the support table 62 to the left, and when the adherend WK reaches a predetermined position relative to the supplying means 10, the supplying means 10 drives the rotary motor 14A to pay out the raw web RS in accordance with the movement speed of the adherend WK. As a result, the adhesive sheet AS is peeled off from the release sheet RL, and the adhesive sheet AS peeled off from the release sheet RL is pressed onto the adherend WK by the pressure roller 21 and attached to the first side WK1 so as to form an overhang area ASH, as shown by the two-dot chain line in Figure 1(A). Next, after the entire leading adhesive sheet AS has been attached to the adherend WK, the leading end of the next adhesive sheet AS in the payout direction following the leading adhesive sheet AS is peeled off by a predetermined length at the peeling edge 13A of the peeling plate 13, and the supplying means 10 stops driving the rotary motor 14A. Then, as shown by the dotted line in Figure 1(A), when the lift table center 64R (reference position WKR) coincides with the center line CL, the moving means 60 stops driving the linear motor 61, stopping the movement of the adherend WK to the left, and then stops driving the pressure reducing means (not shown), releasing the suction holding on the holding surface 62A.

[0019] Next, as shown by the two-dot chain line in Fig. 1(A), the moving means 60 drives the linear motor 63 to raise the lift table 64, and then, as shown in Fig. 1(B), the folding and pasting means 30 drives the hot air blowing means 31 to blow hot air AR from the outlet 32B onto the protruding area ASH. This causes the protruding area ASH to shrink and deform, and as shown by the solid line in Fig. 1(B), the protruding area ASH deforms so as to bend toward the second surface WK2 and adhere to the second surface WK2, forming an integrated object UP. Thereafter, the moving means 60 drives the linear motor 63 to lower the lift table 64 and return it to its initial position.

[0020] Depending on various conditions, such as the characteristics, properties, properties, material, composition, configuration, shape, dimensions, and weight of the adhesive sheet AS, atmospheric conditions, and other factors (hereinafter referred to as "characteristics, etc."), the protruding region ASH may not deform in the desired direction. In other words, in this embodiment, if the protruding region ASH bends upward without bending downward, a guiding step may be performed in which the guiding means 40 guides the protruding region ASH toward the second surface WK2. As shown in FIG. 1(C), this guiding step involves, when the protruding region ASH begins to deform due to the hot air AR, the guiding means 40 drives the linear motor 41 to lower the guiding head 43, causing the protruding region ASH to enter its inner circumferential surface 43A, thereby preventing the protruding region ASH from bending upward. Once the protruding region ASH enters the inner circumferential surface 43A of the guiding head 43, the folding and adhering means 30 drives the hot air blowing means 31 to blow hot air AR onto the protruding region ASH from the outlet 43C. As a result, the protruding region ASH is further deformed with shrinkage, and as shown by the two-dot chain line in Figure 1(C), it is deformed so as to bend in the direction of the second surface WK2 and adhere to the second surface WK2 (this is the ``guiding process'').

[0021] Here, depending on the characteristics of the adhesive sheet AS, if the protruding region ASH does not bend until it contacts the second surface WK2, if the pressing force is insufficient to obtain the required adhesive strength even if the protruding region ASH bends until it contacts the second surface WK2, or if it is desired to press the protruding region ASH against the second surface WK2 just to be safe, the protruding region pressing means 50 may perform the following protruding region pressing step in which the protruding region ASH is pressed against the second surface WK2. In this protruding region pressing step, after the lift table 64 is lowered, the protruding region pressing means 50 drives the linear motor 51 to lower the pressing member 52, and as shown in FIG. 1(D), the pressing member 52 and the holding surface 62A press the protruding region ASH against the second surface WK2. This ensures that the protruding region ASH is securely attached to the second surface WK2 of the adherend WK (this is the "protruding region pressing step").

[0022] Next, the folding and pasting means 30 stops driving the hot air blowing means 31, and the guiding means 40 and the protruding area pressing means 50 respectively drive the linear motors 41 and 51 to return the guiding head 43 and the pressing member 52 to their initial positions. Then, the moving means 60 stops driving the pressure reducing means (not shown) and releases the suction and holding on the holding surface 64A. After that, when the user or the transport means (not shown) transports the integrated object UP to the next process, the linear motor 61 is driven to return the support table 62 to its initial position, and the same operations as those described above are repeated thereafter.

[0023] According to the above-described embodiment, the protruding area ASH of the adhesive sheet AS attached to the first surface WK1 is deformed and then folded in the direction of the second surface WK2, which is different from the first surface WK1, before attachment, so that only one adhesive sheet AS is required to protect the first surface WK1 and the second surface WK2 of the adherend WK. This prevents an increase in running costs for protecting the first surface WK1 and the second surface WK2 of the adherend WK.

[0024] The means and steps of the present invention are not limited in any way as long as they can perform the operations, functions, or steps described for those means and steps, and are in no way limited to the components and steps of a single embodiment shown in the above embodiment. For example, the supplying means may be any means capable of supplying an adhesive sheet that can be deformed by a predetermined energy, and is not limited in any way as long as it is within the scope of the common general technical knowledge at the time of filing (the same applies to other means and steps).

[0025] The supply means 10 may form a closed-loop slit or a slit extending over the entire short width direction in a strip-shaped adhesive sheet base material temporarily attached to a strip-shaped release sheet RL, and then unwind the raw sheet RS in which the predetermined area partitioned by the slit has become the adhesive sheet AS, and then peel off and supply the adhesive sheet AS, or may employ a strip-shaped adhesive sheet base material in which a strip-shaped adhesive sheet base material is temporarily attached to a strip-shaped release sheet RL, and while unwinding the strip-shaped adhesive sheet base material, form a closed-loop slit or a slit extending over the entire short width direction in the adhesive sheet base material with a cutting blade as cutting means, and then unwind the raw sheet RS in which the predetermined area partitioned by the slit has become the adhesive sheet AS. The adhesive sheet AS may be peeled off and supplied, or the strip-shaped adhesive sheet AS may be peeled off and supplied from a raw roll RS to which a strip-shaped adhesive sheet AS has been temporarily attached to a strip-shaped release sheet RL, or the adhesive sheet AS may be peeled off and supplied from a raw roll RS that has been fanfolded, for example, without being rolled up, or a recovery means may be used to recover the release sheet RL by, for example, fanfolding it, shredding it with a shredder, or piling it up randomly, or no recovery means may be used, or the adhesive sheet AS that is not temporarily attached to the release sheet RL may be unwound and supplied.

[0026] The pressing means 20 may attach the adhesive sheet AS to the first surface WK1 so that the entire outer edge of the adhesive sheet AS becomes the protruding area ASH, or may attach the adhesive sheet AS to the first surface WK1 so that only a portion of the outer edge of the adhesive sheet AS becomes the protruding area ASH.

[0027] The bending and adhering means 30 may have an air blowing head 32 that is not circular, but may be polygonal such as a square or octagon, or an elliptical ring, or may be provided with a plurality of nozzles instead of the annular nozzle 32A, a plurality of air outlets 32B may be provided, for example, in the vertical direction, according to the position of the protruding area ASH to be deformed, or the air outlet 32B may be configured to move, for example, in the vertical direction, according to the position of the protruding area ASH to be deformed, the air outlet 32B may not be annular, but may be a plurality of or a single hole, the temperature of the hot air AR blown from the air outlets 32B, 43C may be a temperature at which the protruding area ASH can be deformed (80°C in the above embodiment), or may be a temperature higher than the temperature at which the protruding area ASH can be deformed (85°C, 100°C, etc. in the above embodiment), or an annular member heated to a temperature at which the protruding area ASH can be deformed (80°C or higher in the above embodiment) may be blown into the protruding area ASH. The configuration may be such that the protruding area ASH is brought into contact with the adhesive sheet AS, deforming the protruding area ASH and adhering it to the second surface WK2, or a configuration may be such that an annular member heated to a temperature at which the protruding area ASH can be deformed (80°C or higher in the above embodiment) is brought into contact with the protruding area ASH and lowered, with the annular member functioning as the guiding means, or the hot air blowing means 31 does not have to be shared with the guiding means 40, or the heat applied to the adhesive sheet AS may be a fluid such as heated water, oil, gel, etc., and the temperature of the hot air AR or fluid can be determined as desired taking into consideration the characteristics, properties, nature, material, composition, and configuration of the adhesive sheet AS, or the specified energy applied to the adhesive sheet AS may be electromagnetic waves such as ultraviolet rays, infrared rays, visible light, sound waves, X-rays, or gamma rays, or heat such as hot water or hot air, and can be determined as desired taking into consideration the characteristics, properties, nature, material, composition, and configuration of the adhesive sheet AS.

[0028] The guiding means 40 may be configured to guide the protruding area ASH in the direction of the second surface WK2 by blowing a gas such as air or gas or hot air AR instead of or in combination with the guiding head 43, or to press a brush or plate-like member supported by the output part of the driving device against the protruding area ASH and guide the protruding area ASH in the direction of the second surface WK2, or to have its own hot air blowing means without sharing the hot air blowing means 31 with the folding and pasting means 30, or the guiding head 43 may not be circular in shape but may have a polygonal ring shape such as a square or octagon, or an elliptical ring shape, or to employ a blowing means other than the hot air blowing means 31 that blows out cold air, hot air, or room temperature gas without blowing out the hot air AR from the outlet 43C, and to guide the protruding area ASH in the direction of the second surface WK2 with the gas blown out by the blowing means, or There may be no configuration for spraying R or cold air, or instead of or in addition to a configuration for spraying hot air AR or another blowing means, a configuration may be adopted in which a brush or plate-shaped member supported by the output part of the driving equipment is pressed against the protruding area ASH and the protruding area ASH is guided in the direction of the second surface WK2, or instead of the guide head 43, an guide head having holes or gaps through which the hot air AR sprayed from the blower head 32 passes may be used to guide the protruding area ASH in the direction of the second surface WK2 without blocking the hot air AR from the blower head 32 that is blown onto the protruding area ASH, or the outlet 43C may not be annular but may have multiple or single holes, or the guiding operation may be performed even if the protruding area ASH is deformed in the desired direction due to deformation, and may or may not be provided in the sheet application device EA of the present invention.

[0029] The protrusion area pressing means 50 may not employ the linear motor 51 and pressing member 52, but may share the linear motor 63 and lift table 64 with the moving means 60, and may perform a protrusion area pressing step in which the protrusion area ASH is pressed against the adherend WK by the force with which the lift table 64 returns to its initial position. Even if the adhesive strength of the protrusion area ASH to the second surface WK2 reaches a predetermined adhesive strength simply by bending it with the folding and pasting means 30, the protrusion area pressing step may or may not be performed, and may or may not be provided in the sheet pasting apparatus EA of the present invention.

[0030] The moving means 60 may move the supplying means 10 and the pressing means 20 without or while moving the support table 62, and may adhere the adhesive sheet AS to the adherend WK, or may arrange an energy applying means that applies a predetermined energy equivalent to the predetermined energy applied by the folding and adhering means 30 to the holding surface 62A that the protruding region ASH contacts when the protruding region ASH is sandwiched between the adherend WK and the support table 62 (see FIG. 1(D)). A configuration may be adopted in which a support table 64 having 64A is employed, and the folding and pasting means 30 can paste the protruding area ASH on the second surface WK2 without lifting the adherend WK with the lift table 64, or a configuration may be adopted in which the adherend WK is lifted by another driving device without using the lift table 64, and the folding and pasting means 30 can paste the protruding area ASH on the second surface WK2, and this may or may not be provided in the sheet pasting apparatus EA of the present invention.

[0031] The sheet sticking apparatus EA may stick a plurality of adhesive sheets AS to the adherend WK, or may stick the adhesive sheets AS to the adherend WK by arranging them upside down or sideways.

[0032] The adhesive sheet AS may be deformed by a predetermined energy such as electromagnetic waves such as ultraviolet rays, infrared rays, visible light, sound waves, X-rays or gamma rays, or a predetermined energy other than heat such as hot water or hot air, or may be deformed by a predetermined energy with shrinkage, expansion or neither shrinkage nor expansion. The sheet application device EA may employ an adhesive sheet AS that is annular in shape with a hole formed in the center, and apply the adhesive sheet AS to the outer edge of the first surface WK1 and the outer edge of the second surface WK2 of the adherend WK. The adherend WK may have a second surface WK2 that is a back surface located on the back side of the first surface WK1, or a side surface located between the first surface WK1 and the back surface, or any other surface different from the first surface WK1.

[0033] The adhesive sheet AS and adherend WK of the present invention are not particularly limited in terms of material, type, shape, etc. For example, the adhesive sheet AS and adherend WK may be circular, oval, polygonal (e.g., triangular, rectangular), or other shapes. The adhesive sheet AS may be pressure-sensitive, heat-sensitive, or other adhesive. If a heat-sensitive adhesive sheet AS is used, the adhesive sheet AS may be adhered by an appropriate method, such as providing a heating means such as a coil heater or the heated side of a heat pipe. Furthermore, such adhesive sheets AS may be of any type, such as a single-layer adhesive sheet; a two-layer structure consisting of a substrate and an adhesive layer; a three-layer structure consisting of a substrate and an adhesive layer with one or more intermediate layers between them; a three-layer structure consisting of a substrate with one or more cover layers laminated on top; a structure in which the substrate, intermediate layer, or cover layer are releasably provided; a double-sided adhesive sheet consisting of a single layer consisting of an adhesive layer; or a double-sided adhesive sheet with adhesive layers laminated on both outermost surfaces of one or more intermediate layers. Furthermore, the adherend WK may be, for example, a single object such as food, a resin container, a semiconductor wafer such as a silicon semiconductor wafer or a compound semiconductor wafer, a circuit board, an information recording substrate such as an optical disk, a glass plate, a steel plate, a ceramic plate, a wooden board, or a resin, or may be a composite formed from two or more of these, and may also be any type of member or article. The adhesive sheet AS may be interpreted in terms of its function or use, and may also be any sheet, film, tape, etc., such as an information label, a decorative label, a protective sheet, a dicing tape, a die attach film, a die bonding tape, or a recording layer-forming resin sheet.

[0034] The driving device in the above-described embodiments may be an electric device such as a rotary motor, a linear motor, a single-axis robot, or an articulated robot with two or more joints, or an actuator such as an air cylinder, a hydraulic cylinder, a rodless cylinder, or a rotary cylinder, or may be a direct or indirect combination of these. In the above-described embodiments, when a rotating member such as a roller is used, a driving device for rotating the rotating member may be provided, the surface of the rotating member or the rotating member itself may be made of a deformable member such as rubber or resin, or the surface of the rotating member or the rotating member itself may be made of a non-deformable member, or other members such as a rotating or non-rotating shaft or blade may be used instead of the roller, and when a pressing means or pressing member such as a pressure roller or a pressure head that presses the object to be pressed is used, rollers, round rods, blade materials, brush-like members, or members that spray air or gas may be used instead of or in combination with those exemplified above, and the pressing means may be made of a deformable member such as rubber, resin, sponge, or may be made of a non-deformable member such as metal or resin, and when a peeling means or peeling member such as a peeling plate or peeling roller that peels the object to be peeled is used, In combination, members such as plate-shaped members, round bars, rollers, etc. may be used, and the peeling element may be made of a deformable material such as rubber or resin, or may be made of a non-deformable material. When a supporting (holding) means or a supporting (holding) member that supports (holds) the supported member (held member) is used, a configuration in which the supported member is supported (held) may be used, such as a gripping means such as a mechanical chuck or chuck cylinder, Coulomb force, adhesive (adhesive sheet, adhesive tape), pressure-sensitive adhesive (adhesive sheet, adhesive tape), magnetic force, Bernoulli adsorption, suction adsorption, driving equipment, etc. When a cutting means or cutting member that cuts the member to be cut or forms an incision or cutting line in the member to be cut is used, cutting elements such as a cutter blade, laser cutter, ion beam, fire, heat, water pressure, an electric heating wire, or spraying of gas or liquid may be used instead of or in combination with the above examples, or a cutting element may be moved and cut using a combination of appropriate driving equipment. [Explanation of symbols]

[0035] EA...Sheet attachment device 10…Supply means 20...Pressing means 30... Folding and pasting means 40...guiding means 50...protruding area pressing means AS...Adhesive sheet ASH...protruding area AR...heat (predetermined energy) WK...Adherend WK1...Page 1 WK2...Side 2 WKE…Outer edge

Claims

1. a supplying means for supplying an adhesive sheet that is deformable by a predetermined energy; a pressing means for pressing the adhesive sheet supplied by the supplying means onto a first surface of an adherend to adhere the sheet to the first surface, the pressing means attaches the adhesive sheet to the first surface so as to form a protruding region in which the adhesive sheet protrudes beyond an outer edge of the first surface; a folding and pasting means for applying the predetermined energy to the protruding region to deform it, folding the protruding region toward a second surface different from the first surface, and pasting the protruding region toward the second surface; a protruding area pressing means for pressing the protruding area against the second surface.

2. a supplying step of supplying an adhesive sheet that is deformable by a predetermined energy; a pressing step of pressing the adhesive sheet supplied in the supplying step against a first surface of an adherend to adhere the sheet to the first surface, In the pressing step, the adhesive sheet is attached to the first surface so as to form a protruding region that protrudes beyond an outer edge of the first surface; a folding and pasting process of applying the predetermined energy to the protruding region to deform it, folding the protruding region toward a second surface different from the first surface, and pasting the protruding region toward the second surface; a protruding area pressing step of pressing the protruding area against the second surface.

Images