Inner Reticle Pod Cover and Baseplate Shipper

Abstract

A shipping container for a reticle pod cover or base plate includes a first shell including a first securing mechanism and a second shell including a second securing mechanism. When the first and second shells are coupled together, the shells define an interior space capable of receiving the reticle pod cover or base plate, and the securing mechanism engages with the cover or base plate to prevent movement of the cover or base plate in an in-plane direction with the first or second shell. The securing mechanism may be such that there are both rigid and resilient securing mechanisms in contact with the cover or base plate. A method of storing a cover or base plate may include placing the cover or base plate between the first and second shells and coupling the first and second shells together.

Description

[Technical Field]

[0001] This disclosure is directed to a shipping container for a cover and / or base plate used as an inner pod for a reticle pod.

[0002] Priority This disclosure claims priority to U.S. Provisional Patent Application No. 63 / 294,463, filed December 29, 2021, and is incorporated by reference herein. [Background technology]

[0003] For example, reticles to be processed through photolithography, such as extreme ultraviolet (EUV), may be stored and transported in a reticle pod that includes an outer pod and an inner pod. The inner pod can include a base plate and a cover. Summary of the Invention

[0004] This disclosure is directed to a shipping container for a cover and / or base plate used as an inner pod for a reticle pod.

[0005] Shipping bins according to embodiments can protect the cover and / or base plate of a reticle inner pod during shipping of the cover and base plate to a user. This can reduce the occurrence of damage to the cover and / or base plate, thus reducing or preventing the loss of available covers and base plates during transport. In embodiments, the shipping bin can increase the number of covers and / or base plates that can be shipped in a given volume of shipping space. The shipping bin can use opposing, firm, rigid retention points to firmly and securely secure both the cover and / or base plate while reducing the effects of impact on the cover and / or base plate. Shipping bins according to embodiments can be configured to interconnect with features already present in the design of the cover and / or base plate so that the cover and / or base plate can be securely secured within the shipping bin without further modification of the cover and / or base plate.

[0006] A reticle pod cover or base plate container includes a first shell having a plurality of first securing mechanisms and a second shell having a plurality of second securing mechanisms. The first and second shells are configured to be coupled together. When coupled together, the first and second shells define an interior space. The interior space is sized to accommodate the cover or base plate of the reticle pod. The first securing mechanisms are configured to mate with the cover or base plate of the reticle pod at a first predetermined position corresponding to a first pod mechanism provided on a first side of the cover or base plate of the reticle pod. The second securing mechanisms are configured to mate with the cover or base plate of the reticle pod at a second predetermined position corresponding to a second pod mechanism provided on a second side of the cover or base plate of the reticle pod. When the first securing mechanism is engaged with the first pod mechanism and the second securing mechanism is engaged with the second pod mechanism, the engagement causes at least one of the first shell and the second shell to be in contact with each other. Same as The movement of the cover or the base plate of the reticle pod within a plane is limited.

[0007] In some embodiments, at least one of the first securing feature or the second securing feature each includes a resilient material, hi some embodiments, the resilient material is a fluoroelastomer.

[0008] In some embodiments, at least one of the first fixation mechanism or the second fixation mechanism each includes a rigid material, which is the same material as the body of the first shell or the second shell.

[0009] In one embodiment, the container is for the cover of the reticle pod, and at least some of the first predetermined positions and the second predetermined positions correspond to through holes in the cover of the reticle pod.

[0010] In one embodiment, the container is for the base plate of the reticle pod, and at least one of the first predetermined position or the second predetermined position corresponds to a kinematic coupling groove of the base plate of the reticle pod.

[0011] In one embodiment, the first predetermined location and the second predetermined location correspond to non-functional locations on the cover or the base plate of the reticle pod.

[0012] In some embodiments, the first shell and the second shell each comprise a polycarbonate or a polyolefin.

[0013] In one embodiment, a method for storing a cover or base plate of a reticle pod includes placing the cover or base plate of the reticle pod into a first shell of a container, the first shell including a plurality of first securing mechanisms. Placing the cover or base plate of the reticle pod into the first shell includes mating a first pod mechanism on a first side of the cover or base plate with the plurality of first securing mechanisms. The method further includes coupling a second shell of the container to the first shell of the container, the second shell including a second mating mechanism. Coupling the second shell of the container to the first shell includes mating a second pod mechanism on a second side of the cover or base plate with the second securing mechanism. The mating of the first securing mechanism with the first pod mechanism and the mating of the second securing mechanism with the second pod mechanism are performed by at least one of the first shell or the second shell. Same asThe movement of the cover or the base plate of the reticle pod within a plane is limited.

[0014] In some embodiments, at least one of the first securing feature or the second securing feature each includes a resilient material, hi some embodiments, the resilient material is a fluoroelastomer.

[0015] In some embodiments, at least one of the first fixation mechanism or the second fixation mechanism each includes a rigid material, which is the same material as the body of the first shell or the second shell.

[0016] In one embodiment, the cover or base plate being stored is the cover of the reticle pod, and at least some of the first fixing mechanism and the second fixing mechanism mate with through holes formed in the cover of the reticle pod.

[0017] In one embodiment, the cover or base plate being stored is the base plate of the reticle pod, and at least some of the first fixing mechanism and the second fixing mechanism engage with kinematic coupling grooves of the base plate of the reticle pod.

[0018] In one embodiment, the first and second securing mechanisms mate with non-functional locations on the cover or base plate of the reticle pod.

[0019] In some embodiments, the first shell and the second shell each comprise a polycarbonate or a polyolefin. [Brief explanation of the drawings]

[0020] [Figure 1] 1 is a diagram of a receptacle for a cover or base plate of a reticle pod according to an embodiment. [Figure 2A] 1 is a view of a first side of a base plate of a reticle pod stored in a container according to an embodiment. [Figure 2B] 2B is a diagram of a first shell configured for use on a first side of the base plate of FIG. 2A. [Figure 2C] FIG. 2B is a view of a second side of the base plate shown in FIG. 2A. [Figure 2D] FIG. 2D is a diagram of a second shell configured for use on a second side of the base plate of FIG. 2C. [Figure 3A] 1 is a view of a first side of a cover of a reticle pod stored in a container according to an embodiment. [Figure 3B] FIG. 3B is a diagram of a first shell configured for use on a first side of the cover of FIG. 3A. [Figure 3C] FIG. 3B is a view of the second side of the cover shown in FIG. 3A. [Figure 3D] FIG. 3D is a diagram of a second shell configured for use on a second side of the cover of FIG. 3C. [Figure 4] 1 is a flowchart of a method according to an embodiment. [Figure 5] 10 is a diagram of the contact interface of the container with the reticle to be stored. [Figure 6] 10 is a diagram of another interface of the container's contact with the reticle to be housed. FIG. [Figure 7] 10 is a diagram of another interface of the container's contact with the reticle to be housed. FIG. [Figure 8] 10 is a diagram of another interface of the container's contact with the reticle to be housed. FIG. [Figure 9] 10 is a diagram of another interface of the container's contact with the reticle to be housed. FIG. DETAILED DESCRIPTION OF THE INVENTION

[0021] This disclosure is directed to a shipping container for a cover and / or base plate used as an inner pod for a reticle pod.

[0022] 1 illustrates a container for a cover or base plate of a reticle pod according to one embodiment. The container 100 includes a first shell 102 with a plurality of first contacts 104 disposed on the first shell 102. The container 100 also includes a second shell 106 with a plurality of second contacts 108 disposed on the second shell 106. The container 100 may be used to house a cover or base plate 110 of a reticle pod.

[0023] The container 100 is configured to house a cover or base plate 110. The container 100 is configured to accommodate the cover or base plate 110 in an interior space defined by the container 100. The container 100 may be used for storing and / or transporting the cover or base plate 110 stored therein. In one embodiment, the cover or base plate 110 to be stored in the container 100 is a cover for a reticle pod inner pod.

[0024] The first shell 102 and the second shell 106 each include a respective locking mechanism. The locking mechanism is a mechanism on each shell 102, 106 that is configured to mechanically mate with the cover or base plate 110 when the cover or base plate is inside the container 100. The mechanical engagement of the locking mechanism with the cover or base plate 110 holds the cover or base plate in a particular position within the container 100 and limits or prevents movement of the cover or base plate 110. In some embodiments, the engagement of the locking mechanism is configured to mechanically mate with the first shell 102 and / or second shell 106. Same as1, the first contact portion 104 is a securing feature for the first shell 102, and the second contact portion 108 is a securing feature for the second shell 106. The securing feature may be any suitable feature of the first shell 102 and second shell 106 that can mate with the cover or base plate 110 to limit or prevent movement of the cover or base plate within the container 100. Non-limiting embodiments of the securing features are shown in FIGS. 5-9 and described below.

[0025] The first shell 102 forms a portion of the container 100. The first shell 102 is configured to partially define an interior space such that the cover or base plate 110 may be retained within the interior space. The first shell 102 includes a plurality of first contact portions 104. In one embodiment, the first shell 102 is made of a polymer material. In one embodiment, the first shell 102 is made of polycarbonate, polyolefin, or acrylonitrile butadiene styrene (ABS) polymer. The first shell 102 may include first contact portions 104 formed on a side of the first shell 102 configured to face the cover or base plate 110 when the cover or base plate 110 is stored within the container 100 as a securing mechanism. The first contact portions 104 are provided on the first shell 102 at locations corresponding to locations on the cover or base plate 110 that must be contacted to retain the cover or base plate 110 within the container 100. The first contact portion 104 may be provided at a location corresponding to a non-critical location on the cover or base plate 110. A non-critical location on the cover or base plate 110 is an area where accidental damage during storage or transport will not adversely affect the material functionality of a reticle pod that includes the cover or base plate 110. Critical areas on the cover or base plate 110 may include sealing surfaces, highly polished areas, visible plated areas on the surface, areas within the interior space where the cover or base plate 110 houses a reticle, etc. Non-critical areas on the cover or base plate 110 may include corners and sides of the cover or base plate 110, through holes formed in the cover or base plate 110, safety catch holes, kinematic coupling (KC) grooves, etc.

[0026] The first contact portion 104 can include the material of the first shell 102. In some embodiments, the first contact portion 104 can further include, for example, a resilient element by which the first contact portion 104 interconnects with the cover or base plate 110. In this case, the resilient element can be any suitable resilient material, such as, for example, one or more elastomers. In some embodiments, the resilient element is a thermoplastic elastomer. In some embodiments, the resilient element is a fluoroelastomer. The resilient element can be made of a cross-linked polymer material. Non-limiting examples of materials that can be used for the resilient element include fluororubbers such as FKM or Viton™. In some embodiments, the first contact portion 104 is provided on a surface in contact with the cover or base plate 110 using one of a resilient material or a rigid material, and the second contact portion 108 is provided on a surface in contact with the cover or base plate 110 using the other of a resilient material or a rigid material. In this embodiment, the cover or base plate is contacted on one side by a rigid material and on the other side by a resilient material. The rigid material may be any suitable rigid material. In some embodiments, the rigid material is the same material used as the first shell 102 or the second shell 106. In some embodiments, the rigid material is polycarbonate, a polyolefin such as ultra-high molecular weight polyethylene, or ABS.

[0027] The second shell 106 forms another portion of the container 100. When the second shell 106 and the first shell 102 are coupled together, the container 100 is configured to enclose a cover or base plate 110. The second shell 106 may be made of a rigid material, such as polycarbonate, a polyolefin such as ultra-high molecular weight polyethylene, or ABS. In some embodiments, the second shell 106 is made of the same material as the first shell 102. The second shell 106 and the first shell 102 may be coupled together by any suitable sealing mechanism, such as a latch, a tab, a hinge, a snap-fit ​​mechanism, a magnetic surface, or the like, or a combination thereof. In the embodiment shown in FIG. 1 , the container 100 includes a hinge 112 and a latch 114 to securely fasten the first shell 102 and the second shell 106 together.

[0028] The second shell 106 includes a second contact portion 108 as a securing mechanism. The second contact portion 108 is located on the shell 106 at a position configured to correspond to a predetermined contact point on the second side of the cover or base plate 110, opposite the first side contacted by the first contact portion 104. The second contact portion 108 may be located to correspond to a non-critical position on the second side of the cover or base plate 110. The second contact portion 108 may include a rigid material. The second contact portion 108 may include the material of the second shell 106. The second contact portion 108 may include a resilient component, such as any of the resilient components described above with respect to the first contact portion 104. In one embodiment, the first contact portion 104 and the second contact portion 108 are coupled to contact the reticle or base plate 110 with the rigid material on one side and the resilient material on the other side. In one embodiment, the first contact portion 104 and the second contact portion 108 are coupled on opposite sides to provide contact between a rigid material and the reticle or base plate 110. In one embodiment, the first contact portion 104 and the second contact portion 108 are coupled on opposite sides to provide contact between a resilient material and the reticle or base plate.

[0029] In some embodiments, some or all of the second contact portions 108 and some or all of the first contact portions 104 can interconnect with common features formed on the cover or base plate 110, such as through holes, a periphery of the cover or base plate 110, etc. In some embodiments, the second contact portions 108 are opposite the first contact portions 104 when the container 100 is closed. In some embodiments, the first contact portions 104 and the second contact portions 108 can contact each other when the cover or base plate 110 is installed in the container 100. In some embodiments, some or all of the first contact portions 104 are contact portions of one set of features on a first side of the cover or base plate 110, and some or all of the second contact portions are configured to contact a different, second set of features on a second side of the cover or base plate 110.

[0030] Contact between the first contact portion 104, the cover or base plate 110, and the second contact portion 108 occurs when the cover or base plate 110 is in contact with one or both of the first shell 102 and the second shell 106. Same The cover or base plate 110 is held securely within the container 100 so as to prevent significant in-plane movement. Small temporary movements may occur depending on the use of resilient materials in the first contact portion 104 and / or second contact portion 108, or due to wear or variations in manufacturing tolerances of parts on one or both of the container 100 and the cover or base plate 110.

[0031] FIG. 2A illustrates a first side of a base plate of a reticle pod stored in a container according to one embodiment. The first side of base plate 200 may be the side that faces outward when a reticle pod including base plate 200 is assembled. The first side of base plate 200 includes safety catch holes 202, weight-saving pockets 204, and kinematic coupling features 206, such as kinematic coupling grooves. Any, some, or all of safety catch holes 202, weight-saving pockets 204, and kinematic coupling features 206 may be used as points on the first side of the base plate that are contacted by first shell contact portions 214, as discussed below and shown in FIG. 2B. A reflector zone 208 may be provided on the first side of base plate 200. The reflector zone 208 may be used to orient the base plate during reticle handling.

[0032] FIG. 2B shows a first shell 210 configured for use with the first side of the base plate of FIG. 2A. The first shell 210 includes a shell body 212 and a plurality of first shell contacts 214. The shell body 212 defines a portion of an interior space to house the base plate 200. The plurality of first shell contacts 214 are distributed on a surface of the shell body 210 configured to face the first side of the base plate 200 when the container including the first shell 210 and the second shell 230 is assembled. The first shell contacts 214 may be any suitable configuration of contacts for contacting the base plate 200, such as any of contacts 502, 602, 702, 802, or 902 shown in FIGS. 5-9 and discussed below. The first shell contact portion 214 may be positioned to correspond to the safety catch hole 202, the weight reduction pocket 204, or the kinematic coupling mechanism 206 on the first side of the base plate 200. The first shell contact portion may be positioned to avoid contact with the reflector zone 208 on the first side of the base plate 200.

[0033] FIG. 2C illustrates the second side of the base plate 200 shown in FIG. 2A. The second side of the base plate 200 is configured to face a reticle when a reticle pod including the base plate 200 is used to store the reticle. The second side of the base plate 200 includes a gripper pocket 220. The second side of the base plate also includes a baseplate sealing area 222. The baseplate sealing area 222 is located where a cover, such as the cover 300 discussed below and shown in FIGS. 3A-3D, contacts the base plate 200 when the base plate 200 and a reticle pod including the cover 300 are assembled. The second side also includes an under-reticle space 224 located between the reticle contact portions 226 on the second side of the base plate 200.

[0034] FIG. 2D shows a second shell configured to be used on the second side of the base plate of FIG. 2C. The second shell 230 includes a second shell body 232 and a second shell contact portion 234. The second shell body defines another portion of the interior space for receiving the base plate 200. The second shell contact portion 234 may be any suitable configuration of contact portion for contacting the base plate 200, such as any of contact portions 502, 602, 702, 802, or 902 shown in FIGS. 5-9 and discussed below. The second shell contact portion 234 may be positioned to preferably correspond to the gripper pocket 220 on the second side of the base plate 200. The second shell contact portion 234 may be positioned such that the second shell contact portion does not contact the sealing area 222 or the under-reticle space 224 on the second side of the base plate 200. Sealed area 222 and under-reticle space 224 may be considered critical regions of base plate 200. The importance of these regions may be due, for example, to particles generated within such areas having a high potential to adversely affect the reticle, or the visibility of the finish of surfaces within sealed area 222 and under-reticle space 224.

[0035] FIG. 3A illustrates a first side of a cover of a reticle pod stored in a container according to one embodiment. The first side of cover 300 is the side of cover 300 that faces a reticle when cover 300 is assembled with a base plate, such as base plate 200, to form a reticle pod. The first side of cover 300 includes flange 302. The first side of cover 300 further includes reticle relief 304 that defines a portion of the interior space of a reticle pod containing cover 300. Flange 302 also includes reflector region 306. The first side of cover 300 further includes sealing area 308. Cover sealing area 308 is an area configured to contact a base plate, such as base plate 200, when a reticle pod containing cover 300 is assembled. Cover sealing area 308 of cover 300 may correspond to base plate sealing area 222 shown in FIG. 2C and described above.

[0036] FIG. 3B shows a first shell 310 configured to be used with the first side of the cover of FIG. 3A. The first shell 310 includes a first shell body 312 and a first shell contact portion 314. The first shell body 312 defines a portion of an interior space for receiving the cover 300. A plurality of first shell contact portions 314 are distributed on a surface of the shell body 310 configured to face the first side of the cover 300 when a container including the first shell 310 and the second shell 330 is assembled. The first shell contact portions 314 may be positioned to correspond to locations on the first side of the cover 300, such as components of the flange 302 outside the reflector region 306. The first shell contact portions 314 may be positioned so that the first shell contact portions do not contact the reticle relief 304, the reflector region 306, or the cover sealing area 308 when the cover 300 is placed into the first shell 310.

[0037] 3C shows the second side of the cover shown in FIG. 3A. The second side of cover 300 faces outward when cover 300 is assembled into a reticle pod, for example, when coupled with base plate 200. The second side of cover 300 includes through holes 320. Through holes 320 may be insertion holes for mechanisms that are subsequently installed within cover 300. The second side of cover 300 further includes weight-saving cutouts 322.

[0038] 3D shows a second shell 330 configured to be used with the second side of the cover of FIG. 3C. The second shell 330 includes a second shell body 332 and a second shell contact portion 334. The second shell body 332 defines another portion of the interior space for receiving the cover 300. The second shell contact portion 334 is provided on a side of the shell body 332 configured to face the second side of the cover 300 when the cover 300 is installed within the enclosure formed by the first shell 310 and the second shell 330. The second shell contact portion 334 may be located on the second side cover 300, for example, at a position corresponding to the position of the through-hole 320 and / or the weight-reducing cutout 322.

[0039] 4 shows a flowchart of a method according to one embodiment. Method 400 includes placing 402 a cover or base plate of a reticle pod into a first shell of a container. Method 400 further includes coupling 404 a second shell of the container to the first shell. Method 400 also includes engaging 406 a locking mechanism of the first and second shells to limit movement of the cover or base plate.

[0040] A cover or base plate of the reticle pod is placed 402 into the first shell of the container. The cover or base plate may be any cover or base plate selected to correspond to the container containing the first shell. The cover or base plate may be placed 402 into the first shell of the container such that the side of the cover or base plate that corresponds to the first shell faces the interior of the first shell and such that a securing feature on the first shell, such as first contact 104 described above and shown in FIG. 1 , interconnects with a corresponding feature on the cover or base plate.

[0041] Coupling the second shell of the container to the first shell 404. The second shell may be coupled to the first shell at 404 by any suitable connection, for example, by latching the second shell to the first shell using latch 114 as described above and shown in FIG. 1. In some embodiments, the second shell may be pivoted about one or more hinges, such as hinge 112 as described above and shown in FIG. 1, to which the second shell is coupled to the first shell by a latch or other closure. Coupling the second shell to the first shell at 404 results in the first and second shells forming an interior space housing the cover or base plate placed into the first shell at 402. The placement of the cover or base plate into the first shell at 402 followed by coupling of the second shell to the first shell at 404 causes a second securing feature on the second shell, such as the second contact portion 108 described above and shown in FIG. 1, to mate with the second side of the reticle or base plate.

[0042] The engagement of the fastening features of the first and second shells restricts movement of the cover or base plate 406. The movement restricted at 406 is movement that is flush with at least one of the first or second shells. The movement is restricted by contact of the cover or base plate with the fastening features at a predetermined location on the cover or base plate. Resistance to movement by the engagement at 406 can limit movement due to impact, bump, etc., for example, if a container containing the cover or base plate is dropped. Restriction of movement at 406 can reduce vibration of the cover or base plate within the container. Restriction of movement can prevent or reduce movement. In some embodiments, movement of the cover or base plate can be restricted to the extent permitted by the flexibility of the material used in the fastening features and the manufacturing tolerances of the cover or base plate and their respective fastening features. The fastening features may engage the cover or base plate at predetermined locations, such as those identified above and shown in FIGS. 2A, 2C, 3A, and 3C.

[0043] FIG. 5 illustrates the interface of a container with a receiving cover or base plate. In the embodiment of FIG. 5, shell 500 includes protrusion 502. Resilient tip 504 is provided over protrusion 502. Resilient tip 504 provides a surface for contact with contact feature 506 formed in cover or base plate 508. Resilient tip 504 may be connected to protrusion 502 by any suitable method, such as, for example, a press fit over protrusion 502, an interface of a retention feature formed on resilient tip 504 and / or protrusion 502, overmolding, adhesive, a combination thereof, or the like. Resilient tip 504 may be molded to correspond to the shape of contact feature 506, for example, to mate with a particular area of ​​contact feature 506.

[0044] FIG. 6 illustrates another interface of the container with a receiving cover or base plate. In the embodiment of FIG. 6, a shell 600 includes a protrusion 602 that extends to a rigid tip 604, with a shoulder 606 attached to the protrusion 602. In some embodiments, the protrusion 602 and rigid tip 604 are integrally formed with the shell 600 and are constructed from the same material as the shell 600. The rigid tip 604 provides a surface that contacts a contact feature 608 on a cover or base plate 610. The shoulder 606 can have a shape selected to correspond to the shape of the contact feature 608, for example, to mate with a particular area of ​​the contact feature 608.

[0045] Figure 7 illustrates another interface of a container with a contained cover or base plate. In the embodiment illustrated in Figure 7, a first shell 700 includes a first protrusion 702 covered by a first resilient tip 704. The resilient tip 704 extends into a through-hole 706 formed in a cover or base plate 708. A second shell 710 includes a second protrusion 712 covered by a second resilient tip 714. The second resilient tip 714 also extends into the through-hole 706. The first resilient tip 704 and the second resilient tip 714 can contact each other within the through-hole 706.

[0046] FIG. 8 illustrates another interface of the container with a received cover or base plate. In the embodiment illustrated in FIG. 8 , a shell 800 includes a protrusion 802. The protrusion 802 includes a recess 804 formed therein. The recess 804 can have any suitable shape. In some embodiments, the recess 804 may be cylindrical. In some embodiments, the recess 804 is conical or frusto-conical in shape. A resilient insert 806 may be retained within the recess 804. In some embodiments, the resilient insert 806 may be press-fit into the recess 804. In some embodiments, the resilient insert 806 may be coupled to the protrusion 802 by any suitable mechanism, such as a mating mechanism, adhesive, or the like. The resilient insert 806 comprises a resilient material. The resilient insert 806 is configured to contact a contact feature 808 of a cover or base plate 810. In some embodiments, a portion of the protrusion 802 may also contact the contact feature 808 of the cover or base plate 810.

[0047] FIG. 9 illustrates another interface of the container with a receiving cover or base plate. In the embodiment illustrated in FIG. 9, a shell 900 provides multiple contact portions 902. All of the multiple contact portions 902 interconnect with a single contact feature 904 on a cover or base plate 906. Some or all of the contact portions 902 may include a resilient material at an end 908 of each of the contact portions 902. The resilient material at the end 908 may be applied over a protrusion 902. The protrusion 902 may be integrally formed with the shell 900. In some embodiments, some or all of the protrusions 902 may extend to the end 908 without the resilient material, thus providing a rigid material at the surface that interconnects with the contact feature 904 on the cover or base plate 906.

[0048] Aspects It is understood that any of the embodiments 1-9 may be combined with any of the embodiments 10-18.

[0049] Aspect 1. A container for a cover or base plate of a reticle pod, comprising: a first shell having a plurality of first fastening features; a second shell having a plurality of second fastening mechanisms; Equipped with the first shell and the second shell are configured to be coupled together; when the first shell and the second shell are coupled together, the first shell and the second shell define an interior space, the interior space being sized to accommodate the cover or the base plate of the reticle pod; the first securing mechanism is configured to mate with the cover or the base plate of the reticle pod at a first predetermined position corresponding to a first pod mechanism provided on a first side of the cover or the base plate of the reticle pod; the second securing mechanism is configured to mate with the cover or the base plate of the reticle pod at a second predetermined position corresponding to a second pod mechanism provided on a second side of the cover or the base plate of the reticle pod; When the first securing mechanism is engaged with the first pod mechanism and the second securing mechanism is engaged with the second pod mechanism, the engagement causes at least one of the first shell and the second shell to be in contact with each other. Same as limiting movement of the cover or the base plate of the reticle pod within a plane; container.

[0050] Aspect 2. The container of Aspect 1, wherein at least one of the first fastening feature or the second fastening feature each comprises an elastic material.

[0051] Aspect 3. The container of Aspect 2, wherein the elastic material is a fluoroelastomer.

[0052] Aspect 4. The container of any one of Aspects 1 to 3, wherein at least one of the first securing feature or the second securing feature each comprises a rigid material.

[0053] Aspect 5. The container of Aspect 4, wherein the rigid material is the same material as the body of the first shell or the second shell.

[0054] Aspect 6. A container described in any one of aspects 1 to 5, wherein the container is for the cover of the reticle pod, and at least some of the first predetermined positions and the second predetermined positions correspond to through holes in the cover of the reticle pod.

[0055] Aspect 7. A container described in any one of aspects 1 to 6, wherein the container is for the base plate of the reticle pod, and at least one of the first predetermined position or the second predetermined position corresponds to a kinematic coupling groove of the base plate of the reticle pod.

[0056] Aspect 8. A container described in any one of aspects 1 to 7, wherein the first predetermined position and the second predetermined position correspond to non-functional locations on the cover or base plate of the reticle pod.

[0057] Embodiment 9. The container of any one of embodiments 1 to 8, wherein the first shell and the second shell each comprise a polycarbonate or a polyolefin.

[0058] Embodiment 10. A method of storing a cover or base plate of a reticle pod, comprising: placing the cover or the base plate of the reticle pod into a first shell of a container, the first shell including a plurality of first securing mechanisms, and placing the cover or the base plate of the reticle pod into the first shell includes mating a first pod mechanism on a first side of the cover or the base plate with the plurality of first securing mechanisms; coupling a second shell of the container to the first shell of the container, the second shell including a second mating mechanism, and coupling the second shell of the container to the first shell includes mating a second pod mechanism on a second side of the cover or the base plate with the second securing mechanism; Including, The engagement of the first securing mechanism with the first pod mechanism and the engagement of the second securing mechanism with the second pod mechanism are performed by at least one of the first shell or the second shell. Same as limiting movement of the cover or the base plate of the reticle pod within a plane; method.

[0059] Aspect 11. The method of aspect 10, wherein at least one of the first fastening mechanism or the second fastening mechanism each comprises an elastic material.

[0060] Aspect 12. The method of aspect 11, wherein the elastic material is a fluoroelastomer.

[0061] Aspect 13. The method of any one of aspects 10 to 12, wherein at least one of the first fixation feature or the second fixation feature each comprises a rigid material.

[0062] Aspect 14. The method of aspect 13, wherein the rigid material is the same material as the body of the first shell or the second shell.

[0063] Aspect 15. A method according to any one of aspects 10 to 14, wherein the cover or base plate being stored is the cover of the reticle pod, and at least some of the first fixing mechanism and the second fixing mechanism engage with through holes formed in the cover of the reticle pod.

[0064] Aspect 16. A method according to any one of aspects 10 to 15, wherein the cover or base plate being stored is the base plate of the reticle pod, and at least some of the first fixing mechanism and the second fixing mechanism engage with kinematic coupling grooves of the base plate of the reticle pod.

[0065] Aspect 17. The method of any one of aspects 10 to 16, wherein the first fixing mechanism and the second fixing mechanism engage with non-functional locations on the cover or base plate of the reticle pod.

[0066] Embodiment 18 The method of any one of embodiments 10 to 17, wherein the first shell and the second shell each comprise a polycarbonate or a polyolefin.

[0067] The examples disclosed in this application are to be considered in all respects as illustrative and not restrictive. The scope of the invention is indicated by the appended claims rather than by the foregoing description, and all changes that come within the meaning and range of equivalency of the claims are intended to be embraced within their scope.

Claims

1. A container for a cover or base plate of a reticle pod, comprising: a first shell having a plurality of first fastening features; a second shell having a plurality of second fastening mechanisms; Equipped with the first shell and the second shell are configured to be coupled together; when the first shell and the second shell are coupled together, the first shell and the second shell define an interior space, the interior space being sized to accommodate an item selected from a cover or a base plate of the reticle pod; the first securing mechanism is configured to mate with the cover or the base plate of the reticle pod at a first predetermined position corresponding to a first pod mechanism provided on a first side of the cover or the base plate of the reticle pod; the second securing mechanism is configured to mate with the cover or the base plate of the reticle pod at a second predetermined position corresponding to a second pod mechanism provided on a second side of the cover or the base plate of the reticle pod; when the first securing mechanism is mated with the first pod mechanism and the second securing mechanism is mated with the second pod mechanism, the mating restricts movement of the cover or the base plate of the reticle pod to be in the same plane as at least one of the first shell or the second shell; container.

2. 2. The container of claim 1, wherein the container is for the cover of the reticle pod, and at least some of the first predetermined positions and the second predetermined positions correspond to through holes in the cover of the reticle pod.

3. 3. The container of claim 1 or 2, wherein the container is for the base plate of the reticle pod, and at least one of the first predetermined position or the second predetermined position corresponds to a kinematic coupling groove of the base plate of the reticle pod.

4. 3. The container of claim 1, wherein the first predetermined location and the second predetermined location correspond to non-functional locations on the cover or the base plate of the reticle pod.

5. 1. A method of storing a cover or base plate of a reticle pod, comprising: placing the cover or the base plate of the reticle pod into a first shell of a container, the first shell including a plurality of first securing mechanisms, and placing the cover or the base plate of the reticle pod into the first shell includes mating a first pod mechanism on a first side of the cover or the base plate with the plurality of first securing mechanisms; coupling a second shell of the container to the first shell of the container, the second shell including a second securing mechanism, wherein coupling the second shell of the container to the first shell includes mating a second pod mechanism on a second side of the cover or the base plate with the second securing mechanism, wherein coupling the second shell to the first shell defines an interior space, the interior space being sized to accommodate an item selected from the cover or base plate of an inner reticle pod; and coupling the second shell to the first shell. Including, the engagement of the first securing mechanism with the first pod mechanism and the engagement of the second securing mechanism with the second pod mechanism limiting movement of the cover or the base plate of the reticle pod in the same plane as at least one of the first shell or the second shell. method.

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