Lamellar ceramic structure

Abstract

To provide a substrate support assembly including a lamella ceramic structure for a wafer processing chamber in a semiconductor manufacturing operation and a method for forming the same.SOLUTION: A substrate support assembly 300 includes a pedestal body 302 that includes or consists of a monolithic ceramic body, a heater element 304 located in the pedestal body, and an RF antenna 306 located in the monolithic ceramic body. One or more power lines 312 supply power to the heater element and RF antenna. A lamella structure 316 is formed or included within the pedestal body, the lamella structure includes two layers 318 and 320 that have a thermal conductivity different from the thermal conductivity of the pedestal body and are vertically arranged above and below in a layered or lamella arrangement.SELECTED DRAWING: Figure 3

Description

[Technical Field]

[0001] [Priority Claim] This patent application claims the benefit of priority to U.S. Provisional Patent Application No. 62 / 818,591 (Attorney Docket No. 4948.042PRV), entitled "Lamellar Ceramic Structure," to Hollingsworth et al., filed March 14, 2019, which is incorporated herein by reference in its entirety.

[0002] The present disclosure relates generally to lamellar ceramic structures, and more particularly to substrate support assemblies including lamellar ceramic structures for wafer processing chambers in semiconductor manufacturing operations. [Background technology]

[0003] The background description provided herein is intended to present the contents of the present disclosure generally. Work by the presently named inventors within the scope of what is described in this Background section, as well as aspects of the description that may not otherwise be considered prior art at the time of filing, are not admitted, expressly or impliedly, as prior art against the present disclosure.

[0004] Ceramic pedestals and electrostatic chucks can have localized hot spots that can shift the thermal dynamics or conditions of wafer processing. Hot spots can cause two effects: insufficient heat spreading capability and inconsistent (or non-repeatable) placement of the heater element within the ceramic body of the chuck. While a thicker ceramic body can spread heat more evenly, the raw material and processing costs to achieve this result are often prohibitive using current technology. The increased thermal mass can also reduce tool throughput. Placement repeatability can be adversely affected by shifting raw material powder during processing.

[0005] Additionally, ceramic pedestals and electrostatic chucks are vulnerable to mechanical failure due to thermal stress. For example, ceramic pedestals and electrostatic chucks formed by hot pressing may be subject to certain limitations inherent to such methods. In some cases, the total power output of a hot pressing operation may be constrained by the mass of a preform configured to fit into an available hot press die. Hot pressing operations may be further constrained by the density of the preform before sintering. Summary of the Invention

[0006] In some examples, the substrate support assembly comprises a monolithic ceramic body, a heater element disposed within the monolithic ceramic body, an RF antenna disposed within the monolithic ceramic body, one or more power lines supplying power to the heater element and the RF antenna, and a lamella structure formed or contained within the monolithic ceramic body, the lamella structure including at least one layer having a thermal conductivity different from that of the monolithic ceramic body.

[0007] In some examples, at least one layer is disposed over the heater element during use.

[0008] In some examples, at least one layer is disposed below the heater element during use.

[0009] In some examples, at least one layer comprises a ceramic material.

[0010] In some examples, at least one layer includes a metallic or intermetallic material.

[0011] In some examples, the lamellar structure includes at least two layers, one of the at least two layers having a different thermal conductivity than at least one of the other layers in the lamellar structure.

[0012] In some examples, the thermal conductivity of at least one layer of the lamellar structure is different from the thermal conductivity of the monolithic ceramic body.

[0013] In some examples, the lamellar structure includes at least two layers, each layer of the at least two layers having a different thermal conductivity than the other layers in the lamellar structure.

[0014] In some examples, at least one layer of the lamellar structure comprises a plate of pressureless sintered aluminum nitride.

[0015] In some examples, the lamellar structure comprises a mesh of silicon nitride (Si3N4) that reacts with the material of the monolithic ceramic body when formed or contained within the monolithic ceramic body.

[0016] Further examples are described in the detailed description below. [Brief explanation of the drawings]

[0017] Several embodiments are illustrated in the figures of the accompanying drawings, which are presented by way of example and not by way of limitation.

[0018] [Figure 1] FIG. 1 illustrates a simplified example of a plasma-based processing chamber that may include a substrate support assembly with an electrostatic chuck (ESC) for supporting a substrate during plasma processing.

[0019] [Figure 2] FIG. 2 illustrates an embodiment of a conventional substrate support assembly without a lamella structure, according to an example.

[0020] [Figure 3] FIG. 3 illustrates an embodiment of an exemplary substrate support assembly according to one example of the present disclosure.

[0021] [Figure 4]FIG. 4 is a flowchart of exemplary operations in a method, according to an exemplary embodiment. DETAILED DESCRIPTION OF THE INVENTION

[0022] The following description includes systems, methods, and techniques that embody exemplary embodiments of the present disclosure. In the following description, for purposes of explanation, numerous specific details are set forth in order to provide a thorough understanding of the exemplary embodiments. However, it will be apparent to those skilled in the art that the present subject matter may be practiced without these specific details.

[0023] A portion of the disclosure of this patent document contains material that is subject to copyright protection. The copyright owner has no objection to the patent document or patent disclosure being reproduced by anyone solely as it appears in the Patent and Trademark Office patent file or records, but otherwise reserves all copyright rights. The following notice applies to the software and data described or illustrated below and forming a part of this document: Lam Research Corporation, 2019-2020, All Rights Reserved.

[0024] Referring now to FIG. 1 , an example of a plasma-based processing chamber is shown. While the present subject matter can be used in a variety of semiconductor manufacturing and wafer processing operations, in the illustrated example, the plasma-based processing chamber is described in the context of plasma-enhanced or radical-enhanced chemical vapor deposition (CVD) or atomic layer deposition (ALD) operations. Those skilled in the art will also recognize that other types of ALD processing techniques are known (e.g., thermal-based ALD operations) and may incorporate non-plasma-based processing chambers. An atomic layer deposition (ALD) tool is a special type of chemical vapor deposition (CVD) processing system in which an ALD reaction occurs between two or more chemical species. The two or more chemical species are called precursor gases and are used to form thin film deposits of materials on substrates, such as silicon wafers used in the semiconductor industry. The precursor gases are sequentially introduced into an ALD processing chamber and react with the surface of the substrate to form a deposition layer. Typically, the substrate repeatedly interacts with the precursors, slowly depositing thicker and thicker layers of one or more material films on the substrate. In certain applications, multiple precursor gases can be used to form one or more films of various types during a substrate manufacturing process.

[0025] FIG. 1 is shown to include a plasma-based processing chamber 101 in which a showerhead 103 (which may be a showerhead electrode) and a substrate support assembly 107 are disposed. The substrate support assembly 107 may include a pedestal, as described in more detail below. Typically, the substrate support assembly 107 attempts to provide a substantially isothermal surface and may function as both a heating element and a heat sink for the substrate 105. The substrate support assembly 107 may include an electrostatic chuck (ESC), which includes a heating element to aid in processing of the substrate 105, as described herein. The substrate 105 may include a wafer including an elemental semiconductor (e.g., silicon or germanium), a wafer including a compound element (e.g., gallium arsenide (GaAs) or gallium nitride (GaN)), or a variety of other substrate types, including conductive, semiconductive, and nonconductive substrates.

[0026] During operation, a substrate 105 is loaded onto the substrate support assembly 107 through a load port 109. A gas line 113 can supply one or more process gases (e.g., precursor gases) to the showerhead 103. The showerhead 103 then delivers the one or more process gases to the plasma-based processing chamber 101. A gas source 111 (e.g., one or more precursor gas ampoules) that supplies one or more process gases is coupled to the gas line 113. In some examples, an RF power source 115 is coupled to the showerhead 103. In other examples, a power source is coupled to the substrate support assembly 107 or the ESC.

[0027] Prior to entering the showerhead 103 and downstream of the gas lines 113, a point-of-use (POU) and manifold combination (not shown) controls the flow of one or more process gases into the plasma-based processing chamber 101. For plasma-based processing chambers 101 used to deposit thin films in plasma-enhanced ALD (PEALD) operations, precursor gases can be mixed within the showerhead 103.

[0028] During operation, the plasma-based processing chamber 101 is evacuated by a vacuum pump 117. RF power is capacitively coupled between the showerhead 103 and a lower electrode (not explicitly shown) housed in or on the substrate support assembly 107. The substrate support assembly 107 is typically supplied with two or more RFs. For example, in various embodiments, the RF may be selected from at least one frequency, such as approximately 1 MHz, 2 MHz, 13.56 MHz, 27 MHz, 60 MHz, and other frequencies, as desired. Coils designed to block or partially block specific RFs can be designed as needed. Therefore, the specific frequencies discussed herein are provided solely for ease of understanding. RF power is used to excite one or more process gases into a plasma in the space between the substrate 105 and the showerhead 103. The plasma can assist in depositing various layers (not shown) on the substrate 105. In other applications, the plasma can be used to etch device features in various layers on the substrate 105. RF power is coupled through at least the substrate support assembly 107. The substrate support assembly 107 may have a heater (not shown in FIG. 1) built in. The detailed design of the plasma-based processing chamber 101 may vary.

[0029] Referring now to FIG. 2 , features of a simplified example of a conventional substrate support assembly (or pedestal) 200 are shown. The exemplary substrate support assembly 200 does not include the lamella structure of the present disclosure. This conventional example 200 typically suffers from one or more of the limitations discussed above, including poor heat spreading and the formation of hot spots. The conventional substrate support assembly 200 includes a pedestal body 202 on which a heater element 204 is mounted. The pedestal body 202 also includes an RF / ESC electrode 206. The pedestal body 202 is supported by a mechanical support, such as a stem 208. Lines 212 and 214 (e.g., power leads or conductors) that supply power to the heater element 204 and the RF / ESC electrode 206, respectively, pass through the stem 208. During wafer processing, the substrate support assembly 200 supports a substrate 105, such as a silicon (Si) wafer 210.

[0030] To address at least some of the aforementioned challenges, some examples of the present disclosure include an anisotropic composite structure, such as a lamellar structure, formed within the body of the substrate support assembly 200. In some examples, the body of the substrate support assembly 200 includes a monolithic ceramic material or body. The lamellar structure within the monolithic ceramic body may include one or more layers of material having a relatively high or low thermal conductivity compared to the thermal conductivity of the ceramic material of the body of the substrate support assembly 200. In some examples, a layer of material having a relatively high thermal conductivity can enhance the flow of heat to a designated region of the ceramic body of the substrate support assembly 200 or to other regions of the substrate support assembly 200. In some examples, a layer of material having a relatively low thermal conductivity can retard the flow of heat to a designated region of the ceramic body of the substrate support assembly 200 or to other regions of the substrate support assembly 200. A homogeneous or hybrid combination of layers of materials with different thermal conductivities can be selected and provided within the ceramic body of the substrate support assembly 200. In some examples, the combination of layers of materials allows for enhancing or inhibiting the lateral or vertical diffusion of heat within a given thickness or portion of the ceramic body of the substrate support assembly 200 .

[0031] In some instances, thermal conductivity can be defined as the amount of heat that passes through a unit area of ​​a material of thickness 1 per unit time when the temperatures of the opposite surfaces differ by 1 degree. The SI-derived unit of thermal conductivity is watts per meter Kelvin (Wm -1 .K -1 )

[0032] In some examples, the lamellar structure within the ceramic body of the substrate support assembly 200 includes layered layers or components of relatively high thermal conductivity material extending laterally across the substrate support assembly 200 and layers (lamellae) of relatively low thermal conductivity arranged vertically across the substrate support assembly 200.

[0033] In some examples, the lamellar structure within the ceramic body is formed by sintering and hot-pressing operations. In some examples, one or more plates of a ceramic material with a relatively low thermal conductivity are selected to form the layers of the lamellar structure. The plates can be sintered to a fraction of the theoretical density of the ceramic body in some examples. The density level can be selected to optimize plate adhesion during hot-pressing of the ceramic body of the substrate support assembly 200. In some examples, the plates are machined to a desired geometric shape and, optionally, provided with a surface treatment and / or coating that further improves plate adhesion within the ceramic body. In some examples, the lamellar structure is designed to allow heat to flow more easily or quickly along the length of each lamella rather than in the direction in which the lamellae are stacked.

[0034] In some examples, a preform (or "green structure") is formed that includes a lamellar structure embedded within a ceramic body. In some examples, at least one lamella in the lamellar structure is formed by sintering the powder of the preform. In some examples, the entire lamellar structure is not formed until the entire ceramic body is sintered. The lamellar structure may include one or more layers that are composed of or comprise sintered metal or ceramic plates. The preform may include other internal structures or components of the ceramic pedestal or ESC, such as electrical circuitry for the heater element 204, RF electrode 206, clamping electrodes, etc. The internal structures or components of the preform may be embedded in a compacted powder having a different composition than the ceramic body in which they are embedded. The compacted powder may be selected to enhance or retard the thermal conductivity and / or adhesion of the internal structures or components.

[0035] In some examples, the preform is then hot pressed, and the various powders and plates within bond together as the preform sinters to a value at or near the desired theoretical density. In some examples, one or more layers of the lamellar structure having a selected thermal conductivity profile can be composed of or include another material, such as a metal, or a structure, such as a metal mesh. These exemplary materials or structures can be formed from or include a metal sheet, screen, mesh, or can be formed by screen printing a metal or metal layer onto a layer to form a composite structure.

[0036] In some examples, one or more layers of the lamellar structure may comprise a ceramic material, for example, arranged as described above, and may further comprise a coating. Exemplary coatings may include additives or have properties enhanced or modified, for example, by chemical surface treatments that locally alter the thermal conductivity of the coating or of the material to which the coating is applied. In some examples, a plate comprising a high thermal conductivity material is coated with a substance or mixture of substances selected to reduce the thermal conductivity of its upper and lower surfaces during subsequent heat treatment of the ceramic body. In some examples, the lamellar structures within the ceramic body each comprise three layers, or in combination, and have thicknesses ranging from 0.1 mm to 5 mm.

[0037] In some instances, a layer within a lamellar structure includes multiple sublayers. The total thickness of the multiple sublayers is equal to or close to the thickness of the layer. The upper and lower sublayers in a sublayer arrangement can have thicknesses that can be controlled by the diffusion distance (if a solid solution is formed with the middle sublayer) or the amount of coating added to the middle sublayer. The middle unreacted layer can have a thickness determined by the depth of reaction that forms the upper and lower sublayers.

[0038] In some examples, one or more layers of the lamellar structure may include plates of a homogeneous or solid material selected to react with or dissolve in the surrounding ceramic material of the ceramic body during sintering, thereby locally modifying the thermal conductivity of itself or the ceramic body and achieving a desired heat transfer profile for the lamellar structure within the ceramic body. Traditionally, hot pressing eliminates voids and channels. In some examples, the preform structure or ceramic body is specifically formed by other methods to form or include internal voids or channels therein. Intentional voids or channels may be provided on or adjacent to specific layers of the lamellar structure and configured to provide a desired heat transfer (thermal conductivity) profile. In some examples, the ceramic body may include a sintered to sacrificial layer that can be chemically etched away after all high-temperature processing is complete.

[0039] Some examples can address thermal conductivity issues associated with non-repeatable component placement. Some examples employ a datum or base structure, for example, by including a rigid sheet or platform of suitable material within the ceramic body of the substrate support assembly 200 (e.g., pedestal) to constrain the relative position of other pedestal components during fabrication of the ceramic body. The ceramic body may include one or more types of lamella structures described above as the constrained component.

[0040] In some examples, a pre-sintering plate or platform configured as a datum structure is located within the ceramic body preform adjacent to the plane of the heater circuit to reduce the effect of initial density variations within the ceramic body during sintering on the final location of the heating elements of the heater circuit.

[0041] In some examples, the datum structure includes a ceramic plate configured to receive the heater element 204 in only a desired or fixed configuration. The heater element 204 can be attached to the ceramic plate using fasteners and / or a suitable adhesive. In some examples, the sinterable preform can be attached to the ceramic plate before being placed in the die, and can be further configured to constrain the location of the heater element during sintering.

[0042] Some examples herein can address the vulnerability of a substrate support assembly 200 or ceramic body including a lamellar structure to thermal stress. Here, in some examples, one or more structural elements (such as plates, hoops, beams, or other suitable elements) having desired structural properties are placed within the preform, lamellar structure, or ceramic body to resist anticipated thermal stresses that may occur at the surface or within the associated preform, lamellar structure, or body. In some examples, one or more structural members within the preform, lamellar structure, or ceramic body have a coefficient of thermal expansion (CTE) greater than the bulk of the ceramic material in which they are provided. The difference between the fabrication temperature at which the structural members assume their final shape and the operating temperature of the ceramic body, or the base or ESC in which the structural members are used, can cause tensile stresses in the structural members.

[0043] In some examples, the preform, lamellar structure, or ceramic body is heat treated after sintering at a temperature at which the embedded high-CTE structural members deform (e.g., by creep) at a faster rate than the surrounding material in which they rest. The faster deformation rate can relieve thermal stresses within the lamellar structure or ceramic body preform, and in some examples, the relaxation is provided at a specific, controlled, or desired level.

[0044] In some examples, one or more different portions or components of the preform, lamellar structure, or ceramic body can be designed to experience different creep rates, such as by using selective heat treatment, alloying, doping, or other methods to control or generate the final stress profile. Some examples can include ceramic structural elements that are coated with additives or modified via chemical surface treatments that locally modify the thermal expansion coefficient of the material surrounding the structural element, as described above. The material of the structural element can be selected and added to the preform to react with or dissolve into the surrounding ceramic material in a specific manner during sintering. The reaction or dissolution can modify the thermal expansion coefficient, and in some examples, the added material can actually constitute or be included in a structural member or layer of the lamellar structure within the surrounding bulk ceramic material.

[0045] Some examples herein can address issues related to limited die space in hot presses, or more generally, the configuration of "fixtures" (e.g., including dies, boats, crucibles, etc.) in high-temperature processing. Some examples include increasing the amount of ceramic material in the die before sintering and / or reducing the ceramic thickness required to achieve a given thermal uniformity specification. In some examples, one or more plates of ceramic material (e.g., forming one or more layers of a lamellar structure) are sintered without pressure and then added to one or more preforms. The conventional height of each preform can be reduced to minimize the final volume of die material, thereby allowing more preforms to fit within a given die.

[0046] In some examples, the design of the substrate support assembly 200 (pedestal) is configured to take advantage of improved heat dissipation. For example, the wafer 210 can be placed closer to the heating element than before without sacrificing thermal uniformity, while allowing a thinner ceramic body to achieve the same or similar wafer processing performance. This approach can save raw materials and hot pressing capacity.

[0047] Thus, in some examples, incorporating one or more plates or layers of separate thermally conductive material into the substrate support structure (such as a ceramic pedestal or a monolithic ceramic body) can impart anisotropic thermal properties to the substrate support assembly 200 and enable improved heat spreading performance. The incorporation of such plates or layers can be performed prior to sintering of the ceramic body material on which they are mounted. This approach can also enable the construction of prestressed ceramic bodies for the pedestals with improved resistance to fracture. Examples herein can be used to achieve greater control of the internal structure within the ceramic body and increase the throughput of systems manufacturing these pedestals.

[0048] Referring now to FIG. 3 , an embodiment of an exemplary substrate support assembly 300 according to the present disclosure is shown. The exemplary substrate support assembly 300 includes an exemplary lamella structure 316 of the present disclosure. The exemplary substrate support assembly 300 seeks to address one or more of the limitations discussed further above, including poor heat spreading and the formation of hot spots. The substrate support assembly 300 includes a pedestal body 302 on which a heater element 304 is provided. The pedestal body 302 may include or be composed of a monolithic ceramic body. The pedestal body 302 also includes an RF / ESC electrode 306. The pedestal body 302 is supported by a mechanical support, such as a stem 308. Power lines 312 and 314 supply power to the heater element 304 and the RF / ESC electrode 206. In some examples, the lines 312 and 314 pass through the stem 208 as shown. During substrate processing, the substrate support assembly 300 supports a substrate 105, such as a silicon (Si) wafer 310.

[0049] In the illustrated example, the lamellar structure 316 includes two layers 318 and 320 arranged vertically above and below in a layered or lamellar arrangement. In some examples, the surrounding or adjacent ceramic material of the substrate support assembly 300 can be considered to comprise three additional layers arranged below, between, and above the layers 318 and 320, respectively. Thus, the lamellar structure 316 in this example includes five layers. Many other configurations of the lamellar structure 316 are possible.

[0050] In some examples, each layer of the lamellar structure 316 can enhance or retard thermal conductivity in a direction along its length (i.e., laterally or horizontally in the figures) of the assembly 300. In some examples, each vertically positioned layer of the lamellar structure 316 can have a different thermal conductivity relative to at least one other layer in the structure 316, such that a variable heat transfer profile is formed in the vertical direction of the substrate support assembly 300, as well as (or alternatively) in the lateral direction of the substrate support assembly 300.

[0051] In some examples, the upper layer 318 of the lamella structure 316 includes a material with a lower thermal conductivity than the surrounding ceramic material of the pedestal body 302. The reduced thermal conductivity can slow heat emitted from the heater elements 304 from flowing directly upward to the substrate 310. In some examples, this arrangement facilitates the emitted heat flowing laterally, toward cooler regions of the pedestal body 302 that support the periphery of the substrate, for example. Heat from the heater elements 304 traveling on its path to the substrate 310 is slowed so that it can diffuse laterally. In some examples, the lower layer 320 of the lamella structure 316 can slow, for example, heat from the heater elements 304 from flowing downward to the stem 308 and being lost as waste heat. In some examples, potentially wasted heat is retained and allowed to diffuse relatively quickly laterally within the support assembly 300 and then upward, for example, to support substrate processing operations.

[0052] Other layer configurations and materials may be selected for the lamella structure 316 to provide a desired heat transfer or thermal conductivity profile within the pedestal body 302. For example, only one of the top layer 318 or bottom layer 320 may be provided. Some layers within the lamella structure 316 may be disposed on one or both sides of the heater element 304. In some examples, the thermal conductivities and / or materials of the ceramic material of the top layer 318, bottom layer 320, side layers (not shown), and pedestal body 302 may each be different and selected to provide a given conductivity profile. The dimensions and specific placement of the layers may be different and / or selected to provide a desired heat transfer or thermal conductivity profile for the pedestal body 302. For example, the lamella structure 316 may include one or more plates of low thermal conductivity pressureless sintered aluminum nitride (AlN) placed on a ceramic preform and then sintered to form the ceramic pedestal body 302, with one or more plates embedded therein to define the lamella structure 316. Another exemplary lamellar structure 316 or ceramic pedestal body 302 may include an embedded mesh of silicon nitride (Si3N4) that reacts with the surrounding material, for example, aluminum nitride, to provide a layer of reduced thermal conductivity within the ceramic pedestal body 302.

[0053] In some examples, the heater element 304 may be provided within a heater zone. In some examples, one or more heater zones may be provided within the pedestal body 302. Each heater zone may include multiple heater elements 304. In some examples, the RF antenna 306 (such as a grid or mesh) is provided within the pedestal body 302, as opposed to outside the pedestal body 302, for example, in the external showerhead 103. The internal mounting of the RF antenna 306 as a heat conducting element itself can help control the flow of heat within the pedestal body 302 or to the silicon wafer 310.

[0054] In some examples, the one or more layers forming the lamellar structure 316 within the pedestal body 302 may each comprise a homogenous (solid) or composite material or component. The one or more layers may be provided, for example, in a continuous or discontinuous grid formation at various heights within the pedestal body 302. The grid formation may (or may not) laterally or vertically surround the heater element 304 within the pedestal body 302. The offset dimension, or in other words, the distance between the grid-forming element or layer 318 or 320 (for example) within the lamellar structure 316 and the heater element 304, may be selected to provide a desired heat transfer or thermal conductivity profile. The offset dimension may similarly be established with respect to the perimeter or surface of the pedestal body 302.

[0055] In some examples, the thermal conductivity of the layers within the lamella structure 316 can be in the range of 5 to 200 W / m·K. In some examples, the thermal conductivity of the lamellae 316 within the pedestal body 302 can be in the range of 75 to 00 W / m·K. In some examples, the thermal conductivity of the monolithic ceramic pedestal body 302 can be in the range of 150 to 190 W / m·K.

[0056] In some examples, the material of stem 308 comprises the same material as the material contained in layer 318 or 320 in base body 302. In some examples, layer 318 or 320 (or a portion thereof) is disposed at the junction between the layer and stem 308.

[0057] The outer dimensions of the solid or composite layers 318 or 320 within the lamellar structure 316 can be selected to suit a given configuration or desired heat transfer characteristics of the pedestal or ceramic body. The contour shape or profile of the layers 318 or 320 within the lamellar structure 316 can include square, rectangular, or circular formations, or combinations thereof.

[0058] Specific layer materials may include metallic or intermetallic materials. Layer materials may include aluminum nitride, aluminum silicon nitride, aluminum oxynitride, yttrium aluminate, magnesium aluminate, tungsten, molybdenum, copper, carbon, boron nitride, and composite structures composed of the above materials. Specific base body materials may include aluminum nitride, aluminum oxynitride, aluminum oxide, aluminum silicon nitride, aluminum silicon oxynitride, yttrium aluminate, magnesium aluminate, and composite structures composed of the above materials.

[0059] 4, a method 400 of forming a substrate support assembly 300 can include: forming a monolithic ceramic body by molding a preform in operation 402, the preform including a ceramic material; including a heater element 304 within the preform in operation 404; including an RF antenna 306 within the preform in operation 406; providing one or more power lines 312, 314 within the preform to supply power to the heater element 304 and the RF antenna 306 in operation 408; including or forming a lamellar structure 316 within the preform in operation 410, the lamellar structure 316 including at least one layer having a thermal conductivity different from that of the monolithic ceramic body when formed; and sintering the preform in operation 412.

[0060] In some examples, the method 400 may further include providing at least one layer over the heater element 304 within the monolithic ceramic body.

[0061] In some examples, the method 400 may further include providing at least one layer below the heater element 304 within the monolithic ceramic body.

[0062] In some examples, the method 400 may further include embedding or including a ceramic material in at least one layer.

[0063] In some examples, the method 400 may further include including a metallic material in at least one layer.

[0064] In some examples, the method 400 may further include including at least two layers within the lamellar structure 316, where one of the at least two layers has a different thermal conductivity than at least one of the other layers within the lamellar structure 316.

[0065] In some examples, the method 400 may further include including at least two layers within the lamellar structure 316, each layer of the at least two layers having a different thermal conductivity than the other layers within the lamellar structure 316.

[0066] In some examples, the method 400 may further include including at least two layers within the lamellar structure 316, wherein the thermal conductivity of at least one layer of the lamellar structure 316 is different from the thermal conductivity of the monolithic ceramic body.

[0067] In some examples, the method 400 further includes including a plate of pressureless sintered aluminum nitride within at least one layer of the lamellar structure 316 .

[0068] In some examples, the method 400 further includes including a mesh of silicon nitride (Si3N4) within the lamellar structure 316, which reacts with the material of the monolithic ceramic body when the preform is sintered.

[0069] While the embodiments have been described with reference to specific examples, it will be apparent that various modifications and changes can be made to these embodiments without departing from the broader scope of the present disclosure. Accordingly, the specification and drawings are to be considered in an illustrative and not a restrictive sense. The accompanying drawings, which form a part of this specification, show, by way of example, and not by way of limitation, specific embodiments in which the subject matter may be practiced. The illustrated embodiments are described in sufficient detail to enable those skilled in the art to practice the teachings disclosed herein. Other embodiments may be utilized, and other embodiments may be derived from the teachings disclosed herein, such that structural and logical substitutions and changes can be made without departing from the scope of the present disclosure. Therefore, this detailed description is not to be construed in a limiting sense, and the scope of various embodiments is defined only by the appended claims, along with the full range of equivalents to which such claims are entitled.

[0070] Although such embodiments of the inventive subject matter may be individually and / or collectively referred to herein by the term "invention," this is merely a matter of convenience and is not intended to voluntarily limit the scope of this application to any single invention or inventive concept (if in fact multiple are disclosed). Accordingly, although specific embodiments have been illustrated and described herein, it should be understood that any configurations calculated to achieve the same purpose may be substituted for the specific embodiment shown. The present disclosure is intended to cover any and all adaptations or modifications of the various embodiments. Combinations of the above embodiments with other embodiments not specifically described herein will be apparent to those of skill in the art upon reviewing the above description. The present disclosure includes the following application examples: [Application example 1] a monolithic ceramic body; a heater element disposed within the monolithic ceramic body; an RF antenna disposed within the monolithic ceramic body; one or more power lines supplying power to the heater element and the RF antenna; a lamellar structure formed or contained within the monolithic ceramic body, the lamellar structure including at least one layer therein having a thermal conductivity different from that of the monolithic ceramic body; A substrate support assembly comprising: [Application example 2] The substrate support assembly according to Application Example 1, A substrate support assembly wherein the at least one layer is positioned over the heater element during use. [Application example 3] The substrate support assembly according to Application Example 1, A substrate support assembly wherein the at least one layer is positioned below the heater element during use. [Application example 4] The substrate support assembly according to Application Example 1, A substrate support assembly, wherein the at least one layer comprises a ceramic material. [Application example 5] The substrate support assembly according to Application Example 1, A substrate support assembly, wherein the at least one layer comprises a metallic or intermetallic material. [Application Example 6] The substrate support assembly according to Application Example 1, A substrate support assembly, wherein the lamellar structure includes at least two layers, one of the at least two layers having a thermal conductivity different from at least one of the other layers in the lamellar structure. [Application Example 7] The substrate support assembly according to Application Example 6, A substrate support assembly, wherein the thermal conductivity of at least one layer of the lamellar structure is different from the thermal conductivity of the monolithic ceramic body. [Application Example 8] The substrate support assembly according to Application Example 1, A substrate support assembly, wherein the lamellar structure includes at least two layers, each layer of the at least two layers having a thermal conductivity different from other layers in the lamellar structure. [Application Example 9] The substrate support assembly according to Application Example 1, A substrate support assembly, wherein the at least one layer of the lamellar structure comprises a plate of pressureless sintered aluminum nitride. [Application Example 10] The substrate support assembly according to Application Example 1, The lamellar structure, when formed or contained within the monolithic ceramic body, is a silicon nitride (Si ) that reacts with the material of the monolithic ceramic body. 3 N 4 ) a substrate support assembly comprising a mesh of [Application Example 11] 1. A method of forming a substrate support assembly, comprising: forming a monolithic ceramic body by molding a preform, the preform comprising a ceramic material; including a heater element within the preform; Including an RF antenna within the preform; providing one or more power lines within the preform to supply power to the heater element and the RF antenna when in use; including or forming a lamellar structure within the preform, the lamellar structure, when formed, including at least one layer having a thermal conductivity different from a thermal conductivity of the monolithic ceramic body; sintering the preform; A method comprising: [Application Example 12] The method according to Application Example 11, The method further comprising providing the at least one layer over the heater element within the monolithic ceramic body. [Application Example 13] The method according to Application Example 11, The method further comprising providing the at least one layer below the heater element within the monolithic ceramic body. [Application Example 14] The method according to Application Example 11, The method further comprising embedding or including a ceramic material within said at least one layer. [Application Example 15] The method according to Application Example 11, The method further comprising including a metallic material in the at least one layer. [Application Example 16] The method according to Application Example 11, The method further comprising including at least two layers within the lamellar structure, one of the at least two layers having a different thermal conductivity than at least one of the other layers within the lamellar structure. [Application Example 17] The method according to Application Example 11, The method further comprising including at least two layers within the lamellar structure, each layer of the at least two layers having a different thermal conductivity than the other layers within the lamellar structure. [Application Example 18] The method according to Application Example 11, The method, further comprising including at least two layers within the lamellar structure, wherein the thermal conductivity of at least one layer of the lamellar structure is different from the thermal conductivity of the monolithic ceramic body. [Application Example 19] The method according to Application Example 11, The method further comprising including a plate of pressureless sintered aluminum nitride within said at least one layer of said lamellar structure. [Application Example 20] The method according to Application Example 11, Silicon nitride (Si) is deposited in the lamellar structure. 3 N 4 ), wherein the silicon nitride (Si 3 N 4 ) reacts with the material of the monolithic ceramic body when the preform is sintered.

Claims

1. a monolithic ceramic body; a heater element disposed within the monolithic ceramic body; an RF antenna disposed within the monolithic ceramic body; one or more power lines supplying power to the heater element and the RF antenna; a lamella structure formed or contained within the monolithic ceramic body, the lamella structure including at least two completely embedded layers, the at least two layers including an upper layer disposed above the heater element and a lower layer disposed below the heater element, the lamella structure having a thermal conductivity different from that of the monolithic ceramic body, and the RF antenna disposed on the upper layer; a substrate support assembly, wherein the upper and lower layers partially contain the heater element and extend continuously beyond the heater element, the upper and lower layers being configured to spread heat emitted from the heater element in a lateral heat transfer profile laterally of the substrate support assembly.

2. The substrate support assembly of claim 1, The substrate support assembly, wherein the at least two layers comprise a ceramic material.

3. The substrate support assembly of claim 1, The substrate support assembly, wherein the at least two layers comprise a metallic or intermetallic material.

4. The substrate support assembly of claim 1, a substrate support assembly, wherein one of the at least two layers has a thermal conductivity different from at least one of the other layers in the lamellar structure, the difference in thermal conductivity of the at least two layers facilitating vertical diffusion of heat emitted from the heater element in the substrate support assembly to form a vertical heat transfer profile.

5. The substrate support assembly of claim 1, A substrate support assembly, wherein each layer of the at least two layers has a different thermal conductivity than other layers within the lamellar structure.

6. The substrate support assembly of claim 1, A substrate support assembly, wherein the at least two layers of the lamellar structure comprise a plurality of plates of pressureless sintered aluminum nitride.

7. The substrate support assembly of claim 1, A substrate support assembly, wherein the lamella structure comprises a mesh of silicon nitride (Si 3 N 4 ) that reacts with the material of the monolithic ceramic body when formed or contained within the monolithic ceramic body.

8. 1. A method of forming a substrate support assembly, comprising: forming a monolithic ceramic body by molding a preform, the preform comprising a ceramic material; including a heater element within the preform; Including an RF antenna within the preform; providing one or more power lines within the preform to supply power to the heater element and the RF antenna in use; including or forming a lamellar structure within the preform, the lamellar structure including at least two fully embedded layers, the at least two layers including an upper layer disposed above the heater element and a lower layer disposed below the heater element, and when formed, having a thermal conductivity different from that of the monolithic ceramic body, the RF antenna being disposed on the upper layer; sintering the preform; and the upper and lower layers partially contain the heater element and extend continuously beyond the heater element to spread heat emitted from the heater element in a lateral heat transfer profile laterally of the substrate support assembly; A method comprising:

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