Electrical measuring equipment for electronic components

Abstract

To enable accurate electrical measurement of electronic components without sacrificing the appearance of the electronic components.SOLUTION: A control unit 30 is configured to control a drive mechanism 15 to cause a pair of first probes 11a, 11b and a pair of second probes 12a, 12b to approach and touch electrodes W1, W2 of an electronic component W, and then press the pair of first probes 11a, 11b and the pair of second probes 12a, 12b against the electrodes W1, W2 while being in contact.SELECTED DRAWING: Figure 1

Description

[Technical Field]

[0001] The present disclosure relates to an electrical measurement device for electronic components. [Background technology]

[0002] As electronic devices become more sophisticated and precise, the electronic components used in them are also required to have high accuracy characteristics. Electrical measurements of such electronic components are carried out by contacting probes with the electrodes of the electronic components.

[0003] In this case, a naturally occurring oxide film may form on the electrodes of the electronic components, which creates contact resistance and adversely affects electrical measurements. To prevent this, methods have been considered, such as sharpening the probe tip, rubbing the probe tip against the electrode to remove the oxide film, or applying a current to the probe tip to destroy the oxide film.

[0004] However, both methods damage the electrodes or leave probe marks, which detract from the appearance of the electronic component. [Prior art documents] [Patent documents]

[0005] [Patent Document 1] Japanese Patent Application Laid-Open No. 2000-275274 [Patent Document 2] Japanese Patent Application Laid-Open No. 2011-69618 Summary of the Invention [Problem to be solved by the invention]

[0006] The present disclosure has been made in consideration of these points, and aims to provide an electrical measurement device for electronic components that can perform accurate electrical measurements of electronic components without damaging the appearance of the electronic components. [Means for solving the problem]

[0007] The present disclosure relates to an electrical measurement device for an electronic component that performs electrical measurement of an electronic component that includes a pair of electrodes, the device comprising: a first measurement terminal that abuts against one electrode and includes at least a pair of first probes; a second measurement terminal that abuts against the other electrode and includes at least a pair of second probes; an electrical measurement device that is connected between the pair of first probes of the first measurement terminal and the pair of second probes of the second measurement terminal and performs electrical measurement between the pair of electrodes; a resistance measurement device that is connected between the pair of first probes of the first measurement terminal and between the pair of second probes of the second measurement terminal and measures a contact resistance value between the pair of first probes of the first measurement terminal and a contact resistance value between the pair of second probes of the second measurement terminal; a drive mechanism that drives each of the first measurement terminal and the second measurement terminal; and a control unit, The control unit controls the drive mechanism to bring the pair of first probes and the pair of second probes of the first measurement terminal close to the electronic component, bring the pair of first probes and the pair of second probes of the first measurement terminal into contact with the electronic component, and while the pair of first probes and the pair of second probes of the first measurement terminal are in contact with the electronic component, measure the contact resistance between the pair of first probes of the first measurement terminal and the contact resistance between the pair of second probes of the second measurement terminal using the resistance measuring instrument, and press the pair of first probes and the pair of second probes of the first measurement terminal against the electronic component until the contact resistance between the pair of first probes becomes equal to or less than a specified value and the contact resistance between the pair of second probes becomes equal to or less than a specified value.

[0008] The present disclosure relates to an electrical measuring device for electronic components, wherein the control unit controls the drive mechanism to gradually press the pair of first probes and the pair of second probes of the first measurement terminal against the electronic component, and determines the pressing force of the pair of first probes and the pair of second probes of the first measurement terminal against the electronic component in the next step based on the difference between the contact resistance value at the previous pressing and the contact resistance value at the current pressing, and a step time, using either the contact resistance value between the pair of first probes or the contact resistance value between the pair of second probes.

[0009] The present disclosure is an electrical measurement device for electronic components, wherein the drive mechanism includes a thrust control motor.

[0010] The present disclosure is an electrical measurement device for an electronic component, wherein the drive mechanism includes a VCM motor.

[0011] The present disclosure relates to an electrical measurement device for electronic components, in which the control unit activates the electrical measuring device to perform electrical measurements between the pair of electrodes when the contact resistance value between the pair of first probes of the first measurement terminal measured by the resistance measuring device is equal to or less than a specified value, and when the contact resistance value between the pair of second probes of the second measurement terminal is equal to or less than a specified value. [Effects of the Invention]

[0012] As described above, according to the present disclosure, it is possible to perform electrical measurements of electronic components with high accuracy without damaging the appearance of the electronic components, and the probe or electronic components are not damaged by heat caused by applying a current when the contact resistance is high. [Brief explanation of the drawings]

[0013] [Figure 1] FIG. 1 is a schematic diagram showing an electrical measurement device for electronic components according to the present disclosure. [Figure 2] FIG. 2 is a wiring diagram showing an electrical measurement device for electronic components according to the present disclosure. [Figure 3A]FIG. 3A is a side view showing an electronic component sucked by a suction nozzle. [Figure 3B] FIG. 3B is a side view taken along line B in FIG. 3A. [Figure 4] FIG. 4 is a perspective view showing an outline of an electrical measuring device for electronic components. [Figure 5] FIG. 5 is a perspective view showing a pair of first probes and a pair of second probes that come into contact with an electronic component. [Figure 6] FIG. 6 is a diagram showing a state in which a pair of first probes and a pair of second probes are connected to an electrical measuring device by a scanner. [Figure 7] FIG. 7 is a diagram showing a state in which a pair of first probes and a pair of second probes are separated from the electrical measuring device by a scanner. [Figure 8] FIG. 8 is a diagram showing a state in which a pair of first probes and a pair of second probes are separated from the electrical measuring device by a scanner. [Figure 9] FIG. 9 is a flowchart showing the overall control of the electrical measuring device for electronic components. [Figure 10A] FIG. 10A is a flowchart showing the measurement of contact resistance values ​​and the operation of pressing a probe. [Figure 10B] FIG. 10B is a flowchart showing the measurement of contact resistance values ​​and the operation of pressing a probe. [Figure 11] FIG. 11 is a diagram showing a state in which a pair of first probes and a pair of second probes held by a drive mechanism main body are pressed against electrodes of an electronic component. [Figure 12] Figure 12 shows the general relationship between contact load and contact resistance value. [Figure 13] FIG. 13 is a diagram showing the relationship between the command current value and the load. [Figure 14] FIG. 14 is a diagram showing an electrical measurement device system incorporating an electrical measurement device. [Figure 15] FIG. 15 is a conceptual diagram showing a pressing operation of a pair of first probes and a pair of second probes. DETAILED DESCRIPTION OF THE INVENTION

[0014] Hereinafter, embodiments of the present invention will be described with reference to the drawings.

[0015] 1 to 14 are diagrams showing an embodiment of an electrical measuring device for electronic components according to the present disclosure.

[0016] First, referring to FIG. 14, an outline of the entire electrical measuring device system 100 incorporating the electrical measuring device 10 for electronic components according to the present disclosure will be described.

[0017] Examples of electronic components W that can be measured by the electrical measuring device 10 for electronic components according to the present disclosure include NTC thermistors, PTC thermistors, fixed resistors, capacitors, inductors, and diodes.

[0018] 14, the electrical measuring device system 100 includes a parts feeder 1 that sequentially supplies electronic components W, a linear feeder 3 connected to the parts feeder 1, and an index table 4 connected to the linear feeder 3. Of these, the parts feeder 1 has a rotating plate 2 that is rotated by a motor, and as the rotating plate 2 rotates, it sequentially supplies a large number of electronic components W placed on the rotating plate 2.

[0019] The linear feeder 3 also includes a conveyor, and conveys the electronic components W supplied by the parts feeder 1 in a straight line.

[0020] Furthermore, the index table 4 is rotated intermittently by a motor. A plurality of suction nozzles 5 for suctioning and holding electronic components W are provided on the outer periphery of the index table 4, and these suction nozzles 5 are fixed to the outer periphery of the index table 4 by a suction nozzle holding mechanism 5A.

[0021] Additionally, an electrical measuring device 10 for electronic components according to the present disclosure is disposed on the outer periphery of index table 4 of electrical measuring device system 100 (see FIGS. 1 and 14).

[0022] Next, an electrical measuring device 10 for an electronic component according to the present disclosure will be described with reference to FIG.

[0023] As described above, the electrical measuring device 10 for electronic components performs electrical measurements on electronic components W such as thermistors, and the electronic component W has an electronic component body W0 and a pair of electrodes W1, W2 provided on both sides of the electronic component body W0 (see Figures 1, 5, and 11).

[0024] The electronic component W is picked up by a suction nozzle 5 provided on the outer periphery of the index table 4, and when the electronic component W reaches an electrical measuring device 10 as the index table 4 rotates, electrical measurements are performed on the electronic component W by the electrical measuring device 10.

[0025] Here, the electrical measuring device 10 for an electronic component includes a first measuring terminal 11 having a pair of first probes 11a, 11b that abut one electrode W1, a second measuring terminal 12 having a pair of second probes 12a, 12b that abut the other electrode W2, and an electrical measuring instrument 20 that is connected to the pair of first probes 11a, 11b of the first measuring terminal 11 and the pair of second probes 12a, 12b of the second measuring terminal 12 and performs electrical measurements between the pair of electrodes W1, W2.

[0026] In this case, the pair of first probes 11a, 11b of the first measuring terminal 11 and the pair of second probes 12a, 12b of the second measuring terminal 12 both extend upward through the opening 14a of the base 14 described later, and are capable of moving in the vertical direction relative to the base 14, so as to be able to abut against the electrodes W1, W2 of the electronic component W adsorbed by the suction nozzle 5.

[0027] The pair of first probes 11a, 11b and the pair of second probes 12a, 12b are all held together in a single drive mechanism main body 15a. This drive mechanism main body 15a is driven by a VCM (voice coil motor) 15b that constitutes a thrust control motor, and the drive mechanism main body 15a is driven in the vertical direction by the VCM 15b, which moves the pair of first probes 11a, 11b and the pair of second probes 12a, 12b in the vertical direction accordingly.

[0028] The drive mechanism main body 15a and the VCM 15b constitute the drive mechanism 15. The thrust control motor is not limited to a VCM, and may be, for example, a solenoid, a linear servo motor, or a piezoelectric motor.

[0029] In this embodiment, the pair of first probes 11a, 11b of the first measurement terminal 11 and the pair of second probes 12a, 12b of the second measurement terminal 12 are moved vertically as a unit by the driving mechanism 15, but the pair of first probes 11a, 11b of the first measurement terminal 11 and the pair of second probes 12a, 12b of the second measurement terminal 12 may also be moved individually by independent driving mechanisms 15.

[0030] In addition, wiring lines 21a and 21b are connected to the pair of first probes 11a and 11b of the first measurement terminal 11, respectively, and the pair of first probes 11a and 11b are connected to a scanner 16 driven by a scanner driving unit 16a via these wiring lines 21a and 21b.

[0031] Furthermore, wiring lines 22a and 22b are connected to the pair of second probes 12a and 12b of the second measurement terminal 12, respectively, and the pair of second probes 12a and 12b are connected to a scanner 16 driven by a scanner driving unit 16a via these wiring lines 22a and 22b.

[0032] Furthermore, the pair of first probes 11a, 11b of the first measuring terminal 11 can be switched to either the resistance value measuring device 18 or the electrical measuring device 20 by the scanner 16 via wiring lines 21a, 21b, respectively. The pair of second probes 12a, 12b of the second measuring terminal 12 can be switched to either the resistance value measuring device 18 or the electrical measuring device 20 by the scanner 16 via wiring lines 22a, 22b, respectively.

[0033] In this embodiment, the resistance value measuring device 18 measures the contact resistance value between a pair of first probes 11a, 11b of the first measuring terminal 11, and also measures the contact resistance value between a pair of second probes 12a, 12b of the second measuring terminal 12.

[0034] That is, an oxide film may naturally form on the surfaces of the pair of electrodes W1, W2 of the electronic component W. This naturally formed oxide film on the electrode W1 generates contact resistance between the pair of first probes 11a, 11b of the first measurement terminal 11 and the electrode W1, and this contact resistance can be determined on the first measurement terminal 11 side as the contact resistance value generated between the pair of first probes 11a, 11b.

[0035] Similarly, a naturally formed oxide film on electrode W2 generates contact resistance between the pair of second probes 12a, 12b of second measurement terminal 12 and electrode W2, and this contact resistance can be determined on the second measurement terminal 12 side as the contact resistance value generated between the pair of second probes 12a, 12b.

[0036] In the present embodiment, the electrical characteristics between the pair of electrodes W1, W2 that are electrically measured by the electrical measuring device 20 include the following.

[0037] For example, if the electronic component W is a capacitor, the electrical measuring instrument 20 can detect the capacitance (C), loss factor (Df), and quality factor (the inverse of Q·Df). Alternatively, the electrical measuring instrument 20 can detect the leakage current (insulation resistance is calculated from the leakage current and applied voltage), the capacitance of a DC voltage bias (capacitance under AC with DC voltage applied), and the withstand voltage (BDV, breakdown voltage). Alternatively, if the electronic component W is an inductor, the electrical measuring instrument 20 can detect the inductance (L), DC resistance (Rdc), and withstand current.

[0038] Furthermore, the VCM 15b of the drive mechanism 15 is provided with an encoder 15c that measures the movement position of the VCM 15b.

[0039] Furthermore, the resistance value measuring device 18 and the electrical measuring device 20 are both connected to the control unit main body 30a. The VCM 15b and encoder 15c of the drive mechanism 15 are both connected to the VCM control unit 30b, and the control unit 30 is made up of the control unit main body 30a and the VCM control unit 30b. The resistance value measuring device 18 and the electrical measuring device 20 are controlled by the control unit main body 30a, and the VCM 15b is controlled by the VCM control unit 30b.

[0040] Next, the operation of this embodiment having such a configuration will be described.

[0041] First, a plurality of electronic components W are placed on the rotary plate 2 of the parts feeder 1 of the electrical measuring device system 100.

[0042] Next, the parts feeder 1, linear feeder 3, and index table 4 each start operating under the control of the control unit main body 30a of the control unit 30. As a result, the electronic component W is picked up by the suction nozzles 5 provided on the outer periphery of the index table 4, and as the index table 4 rotates intermittently, the electronic component W picked up by the suction nozzles 5 is transported to the electronic component electrical measuring device 10 according to the present disclosure.

[0043] When the electronic component W reaches the electronic component electrical measuring device 10, the VCM control unit 30b of the control unit 30 causes the VCM 15b of the drive mechanism 15 to drive the drive mechanism main body 15a. In this manner, measurement of the electronic component W begins (see FIGS. 1 to 5). In this embodiment, as the index table 4 intermittently rotates, the electronic component W picked up by the suction nozzles 5 provided on the outer periphery of the index table 4 reaches the electronic component electrical measuring device 10, and the pair of first probes 11a, 11b of the first measuring terminal 11 and the pair of second probes 12a, 12b of the second measuring terminal 12 provided on the electronic component electrical measuring device 10 approach the electronic component W from below.

[0044] That is, as shown in Figure 4, when the VCM 15b of the drive mechanism 15 drives the drive mechanism main body 13, the pair of first probes 11a, 11b of the first measurement terminal 11 and the pair of second probes 12a, 12b of the second measurement terminal 12 come into contact with the first electrode W1 and the second electrode W2 of the electronic component W, respectively.

[0045] Next, the control method of the control unit 30 will be further described with reference to the flowcharts shown in FIGS. 9 to 10B.

[0046] First, an outline of the control method by the control unit 30 will be explained using Fig. 9, and then the details of the control method by the control unit 30 will be explained using Fig. 10A and Fig. 10B. First, as shown in the flowchart of Fig. 9, the control unit main body 30a of the control unit 30 controls the scanner driving unit 16a to switch the pair of first probes 11a, 11b and the pair of second probes 12a, 12b to the resistance value measuring instrument 18 side.

[0047] Next, the control unit main body 30a of the control unit 30 activates the resistance measuring device 18 to determine the contact resistance between the pair of first probes 11a, 11b of the first measuring terminal 11, and also the contact resistance between the pair of second probes 12a, 12b of the second measuring terminal 12. At the same time, as described below, the first probes 11a, 11b and the second probes 12a, 12b are pressed against the electronic component W as necessary.

[0048] At this time, the control unit main body 30a of the control unit 30 first determines whether or not the contact resistance value obtained by the resistance value measuring device 18 is equal to or less than a specified value.

[0049] If the contact resistance value found by the resistance measuring device 18 is equal to or less than a specified value, the control unit main body 30a controls the scanner driving unit 16a to switch the pair of first probes 11a, 11b and the pair of second probes 12a, 12b to the electrical measuring device 20 side by the scanner 16. Next, the control unit main body 30a of the control unit 30 subsequently operates the electrical measuring device 20 to perform electrical measurements between the pair of electrodes W1, W2 of the electronic component W.

[0050] During this time, when the contact resistance between the pair of first probes 11a and 11b of the first measurement terminal 11 is determined by the resistance value measuring device 18, a voltage is applied between the pair of first probes 11a and 11b from the resistance value measuring device 18 to cause a current to flow. Then, based on the voltage value and current value at this time, the resistance value measuring device 18 determines the contact resistance between the pair of first probes 11a and 11b.

[0051] Similarly, when the contact resistance between the pair of second probes 12a and 12b of the second measurement terminal 12 is determined by the resistance value measuring device 18, a voltage is applied between the pair of second probes 12a and 12b from the resistance value measuring device 18 to cause a current to flow. Then, based on the voltage value and current value at this time, the contact resistance between the pair of second probes 12a and 12b is determined by the resistance value measuring device 18.

[0052] When both the contact resistance value between the pair of first probes 11a, 11b and the contact resistance value between the pair of second probes 12a, 12b obtained by the resistance value measuring device 18 are equal to or less than a specified value, the control unit main body 30a of the control unit 30 determines that there is no large contact resistance between the pair of first probes 11a, 11b and the electrode W1 of the electronic component W, and that there is no large contact resistance between the pair of second probes 12a, 12b and the electrode W2 of the electronic component W. At this time, the control unit main body 30a of the control unit 30 switches the pair of first probes 11a, 11b and the pair of second probes 12a, 12b to the electrical measuring device 20 side using the scanner 16, and operates the electrical measuring device 20 to perform electrical measurements between the pair of electrodes W1, W2 of the electronic component W (see FIG. 6).

[0053] When performing electrical measurement between a pair of electrodes W1, W2 of electronic component W, for example, electrical measuring device 20 passes a predetermined amount of current between one first probe 11a and one second probe 12a. At the same time, electrical measuring device 20 measures the voltage between the other first probe 11b and the other second probe 12b. This allows the resistance value between the pair of electrodes W1, W2 of electronic component W to be determined with high accuracy.

[0054] On the other hand, if either the contact resistance value between the pair of first probes 11a, 11b or the contact resistance value between the pair of second probes 12a, 12b obtained by the resistance value measuring device 18 exceeds a specified value, the control unit main body 30a of the control unit 30 determines that a large contact resistance is occurring between the pair of first probes 11a, 11b and the electrode W1 of the electronic component W, or that a large contact resistance is occurring between the pair of second probes 12a, 12b and the electrode W2 of the electronic component W.

[0055] At this time, the control unit main body 30a transmits this signal to the VCM control unit 30b, which activates the VCM 15b of the drive mechanism 15 to drive the drive mechanism main body 15a to press the pair of first probes 11a, 11b and the pair of second probes 12a, 12b against the electrodes W1, W2 of the electronic component W, and the VCM 15b repeats the above operation until the contact resistance between the pair of first probes 11a, 11b and the pair of second probes 12a, 12b become equal to or less than a specified value. During this time, the control unit main body 30a does not activate the scanner 16, and the pair of first probes 11a, 11b and the pair of second probes 12a, 12b are disconnected from the electrical measuring device 20 (see FIGS. 7 and 8).

[0056] When the VCM 15b presses the pair of first probes 11a, 11b and the pair of second probes 12a, 12b against the electrodes W1, W2 of the electronic component W, if the contact resistance value between the pair of first probes 11a, 11b and the contact resistance value of the pair of second probes 12a, 12b do not become equal to or less than a specified value within a predetermined time, the electronic component W is determined to be an abnormal electronic component and is ejected to the outside from the defective product ejection section 8 described later.

[0057] 10A and 10B, a control method by the control unit 30 will be described in detail. That is, the following describes in detail the operation of bringing the pair of first probes 11a, 11b and the pair of second probes 12a, 12b into contact with the electrodes W1, W2 of the electronic component W, measuring the contact resistance value between the pair of first probes 11a, 11b and the contact resistance value between the pair of second probes 12a, 12b, and then pressing the pair of first probes 11a, 11b and the pair of second probes 12a, 12b against the electrodes W1, W2 of the electronic component W.

[0058] First, as shown in FIG. 10A, the measurement of the contact resistance value and the pressing action of the probe are started.

[0059] At this time, the control unit main body 30a of the control unit 30 sets target positions relative to the electronic component W for the pair of first probes 11a, 11b and the pair of second probes 12a, 12b.

[0060] In this embodiment, the target positions of the pair of first probes 11a, 11b and the pair of second probes 12a, 12b are set to be positions immediately before contacting the electrodes W1, W2 of the electronic component W.

[0061] Next, the control unit main body 30a communicates the target positions of the pair of first probes 11a, 11b and the pair of second probes 12a, 12b to the VCM control unit 30b, and the VCM control unit 30b drives and controls the VCM 15b to drive the drive mechanism main body 15a, thereby moving the pair of first probes 11a, 11b and the pair of second probes 12a, 12b to the target positions.

[0062] In this embodiment, the VCM 15b moves the pair of first probes 11a, 11b and the pair of second probes 12a, 12b at a constant speed until they are just before the electrodes W1, W2 of the electronic component W, and stops the pair of first probes 11a, 11b and the pair of second probes 12a, 12b at this position just before the electrodes W1, W2 (see FIG. 11).

[0063] Specifically, the control unit main body 30a inputs to the VCM control unit 30b the optimum current value, optimum position, and optimum speed for driving the pair of first probes 11a, 11b and the pair of second probes 12a, 12b. The VCM control unit 30b controls the VCM 15b based on the optimum current value, optimum position, and optimum speed input from the control unit main body 30a.

[0064] In this embodiment, the VCM control unit 30b uses feedback control to amplify the optimum current with a built-in VCM drive amplifier, and performs PWM conversion to drive the VCM 15b.

[0065] At this time, the VCM control unit 30b first performs current feedback control. Specifically, the VCM control unit 30b reads the output current to the VCM 15b and corrects the command value using the following equation (1).

number

[0066] Next, the VCM control unit 30b performs velocity feedback control. Specifically, the VCM control unit 30b calculates (reads) the velocity values ​​of the pair of first probes 11a and 11b and the pair of second probes 12a and 12b based on the signal from the encoder 15c, and corrects the command value using the following equation (2).

number

[0067] Next, the VCM control unit 30b performs position feedback control. Specifically, the VCM control unit 30b calculates the positions of the pair of first probes 11a and 11b and the pair of second probes 12a and 12b based on the signal from the encoder 15c, and corrects the command values ​​using the following equation (3).

number

[0068] Next, the VCM control unit 30b performs a comparison calculation using the following equation (4) based on the above-mentioned manipulated variables MVi, MVs, and MVp.

number

[0069] Thereafter, the VCM control unit 30b amplifies the obtained manipulated variable MV using a built-in VCM drive amplifier, performs PWM conversion, and drives the VCM 15b.

[0070] In this way, the VCM 15b drives the drive mechanism main body 15a at a constant speed, and can accurately and quickly bring the pair of first probes 11a, 11b and the pair of second probes 12a, 12b to a position immediately before they come into contact with the electrodes W1, W2 of the electronic component W. Thereafter, the pair of probes 11a, 11b and the pair of second probes 12a, 12b reliably stop at the position immediately before they come into contact with the electrodes W1, W2 of the electronic component W.

[0071] The VCM 15b drives the driving mechanism main body 15a at a constant speed until the pair of first probes 11a, 11b and the pair of second probes 12a, 12b come into contact with the electrodes W1, W2 of the electronic component W.

[0072] When the pair of first probes 11a, 11b and the pair of second probes 12a, 12b are about to come into contact with the electrodes W1, W2 of the electronic component W, the VCM 15b drives the drive mechanism main body 15a to start the operation of pressing the pair of first probes 11a, 11b and the pair of second probes 12a, 12b against the electrodes W1, W2 of the electronic component W, as shown below.

[0073] In this case, the control unit main body 30a pre-sets specified values ​​that the contact resistance value between the pair of first probes 11a, 11b and the contact resistance value between the pair of second probes 12a, 12b must satisfy, and presses the pair of first probes 11a, 11b and the pair of second probes 12a, 12b against the electrodes W1, W2 of the electronic component W until both the contact resistance value between the pair of first probes 11a, 11b and the contact resistance value between the pair of second probes 12a, 12b become equal to or less than the specified values.

[0074] 10B, control unit main body 30a outputs a control signal to VCM control unit 30b, which in turn drives and controls VCM 15b to drive drive mechanism main body 15a, causing the pair of first probes 11a, 11b and the pair of second probes 12a, 12b to abut against electrodes W1, W2 of electronic component W, and then stopping the pair of first probes 11a, 11b and the pair of second probes 12a, 12b while maintaining the pair of first probes 11a, 11b and the pair of second probes 12a, 12b in abutment against electrodes W1, W2 of electronic component W. The abutment states of the pair of first probes 11a, 11b and the pair of second probes 12a, 12b can be determined from the current command current value to VCM 15b.

[0075] Next, as described above, the control unit main body 30a operates the resistance measuring device 18 to determine the contact resistance value between the pair of first probes 11a, 11b of the first measuring terminal 11, and also determines the contact resistance value between the pair of second probes 12a, 12b of the second measuring terminal 12.

[0076] When the contact resistance value between the pair of first probes 11a, 11b and the contact resistance value between the pair of second probes 12a, 12b obtained by the resistance value measuring instrument 18 are below a specified value, the control unit main body 30a of the control unit 30 operates the electrical measuring instrument 20 as described above to perform electrical measurements between the pair of electrodes W1, W2 of the electronic component W.

[0077] On the other hand, when either the contact resistance between the pair of first probes 11a, 11b or the contact resistance between the pair of second probes 12a, 12b measured by resistance measuring instrument 18 exceeds a specified value, control unit main body 30a of control unit 30 transmits this signal to VCM control unit 30b as described above. In this case, VCM control unit 30b operates VCM 15b of drive mechanism 15 while the pair of first probes 11a, 11b and the pair of second probes 12a, 12b are in contact with electrodes W1, W2 of electronic component W. Then, drive mechanism main body 15a is driven to press the pair of first probes 11a, 11b and the pair of second probes 12a, 12b against electrodes W1, W2 of electronic component W (see FIG. 11). Then, VCM 15b repeats the operation of pressing the pair of first probes 11a, 11b and the pair of second probes 12a, 12b against the electrodes W1, W2 of electronic component W while keeping the pair of first probes 11a, 11b and the pair of second probes 12a, 12b in contact with the electrodes W1, W2 of electronic component W until the contact resistance value between the pair of first probes 11a, 11b and the contact resistance value between the pair of second probes 12a, 12b become equal to or less than a specified value.

[0078] A specific pressing operation of the pair of first probes 11a and 11b and the pair of second probes 12a and 12b is as follows.

[0079] First, the control unit main body 30a adopts the larger contact resistance value, for example, the contact resistance value between the pair of first probes 11a and 11b, of the contact resistance value between the pair of first probes 11a and 11b and the contact resistance value between the pair of second probes 12a and 12b obtained by the resistance value measuring instrument 18, and performs an operation of pressing the pair of first probes 11a and 11b and the pair of second probes 12a and 12b against the electrodes W1 and W2 of the electronic component W based on this contact resistance value between the pair of first probes 11a and 11b.

[0080] FIG. 12 shows the relationship between a general contact load and contact resistance value between a pair of probes and an electrode, and FIG. 13 shows the relationship between the command current value (PWM-Duty) and the load when using VCM 15b according to this embodiment.

[0081] Based on the relationship between the contact load and contact resistance between the pair of probes and the electrode as shown in Fig. 12, it is known that when the pair of probes are pressed against the electrode, the contact resistance generally decreases as the pressing force (contact load) increases. Also, as shown in Fig. 13, the thrust (load) of VCM 15b increases as the command current value increases.

[0082] In this embodiment, a pressing operation is repeated in which the pair of first probes 11a, 11b and the pair of second probes 12a, 12b are pressed against the electrodes W1, W2 of the electronic component W in stages multiple times (e.g., 5 to 10 times) at regular intervals t (e.g., every 10 ms to 100 ms) until the contact resistance value between the pair of first probes 11a, 11b and the contact resistance value between the pair of second probes 12a, 12b become equal to or less than a specified value (see FIG. 15).

[0083] Here, Figure 15 shows a state in which a pair of first probes 11a, 11b and a pair of second probes 12a, 12b are abutted against electrodes W1, W2 of an electronic component W, and then a state in which the pair of first probes 11a, 11b and the pair of second probes 12a, 12b are pressed against the electrodes W1, W2.

[0084] Then, when the contact resistance between the pair of first probes 11a, 11b, which has a larger contact resistance than the pair of second probes 12a, 12b, becomes equal to or less than a specified value, for example, when point A in Figure 12 is reached, the above-mentioned pressing operation is stopped.

[0085] However, the relationship between the contact resistance value between the pair of first probes 11a, 11b and the contact load between the pair of first probes 11a, 11b and the pair of second probes 12a, 12b and the electrodes W1, W2 of the electronic component W is determined for each specific electrode W1, W2, pair of first probes 11a, 11b, and pair of second probes 12a, 12b of the electronic component W. Therefore, the general relationship between the contact load and the contact resistance value between the pair of probes and the electrodes shown in Figure 12 cannot be directly applied to determine the pressing force (contact load) of the pair of first probes 11a, 11b and the pair of second probes 12a, 12b against the electrodes W1, W2 of the electronic component W.

[0086] Therefore, in this embodiment, the pressing operations are performed using the following method.

[0087] That is, the control unit main body 30a provides an operation signal for thrust control (torque control) to the VCM control unit 30b, and the VCM control unit 30b amplifies the operation signal using a VCM drive amplifier based on the thrust (torque) sent from the control unit main body 30a, and PWM-converts this operation signal to drive and control the VCM 15b (see Figure 1).

[0088] During this time, the control unit main body 30a uses the relationship between the command current value (PWM-Duty) and the load shown in Figure 13 to grasp the relationship between the current command current value and the thrust force of the VCM 15b, i.e., the command current value and the current contact load between the pair of first probes 11a, 11b and the pair of second probes 12a, 12b and the electrodes W1, W2 of the electronic component W.

[0089] Then, the control unit main body 30a calculates the pressing force of the pair of first probes 11a, 11b and the pair of second probes 12a, 12b against the electrodes W1, W2 of the electronic component W during the next pressing operation, i.e., the thrust force of VCM 15b, based on the difference between the contact resistance value between the pair of first probes 11a, 11b during the previous pressing (pressing operation) and the contact resistance value during the current pressing operation, and the interval time.

[0090] The method for calculating the pressing forces of the pair of first probes 11a, 11b and the pair of second probes 12a, 12b against the electrodes W1, W2 of the electronic component W during the next pressing operation described above, i.e., the thrust of VCM 15b, is based on the Euler method. Specifically, the thrust (torque) of VCM 15b can be calculated using the Euler method as follows.

number

[0091] The manipulated variable calculated by the Euler method described above is actually an increase in the manipulated variable, so the next thrust (torque) of VCM 15b is calculated by adding the manipulated variable (%) to the current thrust of VCM 15b.

[0092] Thereafter, as described above, the control unit main body 30a provides an operation signal to the VCM control unit 30b, and the VCM control unit 30b amplifies the operation signal using a VCM drive amplifier based on the next thrust (torque) of VCM 15b, and PWM-converts this operation signal to drive and control VCM 15b.

[0093] The pressing operation of the pair of first probes 11a, 11b and the pair of second probes 12a, 12b against the electrodes W1, W2 of the electronic component W is performed in stages, for example, 5 to 10 times at regular intervals of time t. As shown in Fig. 15, the thrust of the VCM 15b gradually increases with each pressing operation. This pressing operation is continued until both the contact resistance values ​​of the pair of first probes 11a, 11b and the pair of second probes 12a, 12b become equal to or less than a specified value.

[0094] Thereafter, when the contact resistance values ​​of both the pair of first probes 11a, 11b and the pair of second probes 12a, 12b become equal to or less than a specified value, the control unit main body 30a controls the scanner driving unit 16a to switch the pair of first probes 11a, 11b and the pair of second probes 12a, 12b to the electrical measuring device 20 side by the scanner 16. Next, the control unit main body 30a operates the electrical measuring device 20 to perform an electrical measurement between the pair of electrodes W1, W2 of the electronic component W.

[0095] If the pressing operation of the pair of first probes 11a, 11b and the pair of second probes 12a, 12b against the electrodes W1, W2 of the above-mentioned electronic component W is repeated for a predetermined time, and the contact resistance value between the pair of first probes 11a, 11b and the contact resistance value between the pair of second probes 12a, 12b do not become equal to or less than a specified value, it is determined that the pressing operation time has expired.

[0096] In this case, the electronic component W is determined to be an abnormal electronic component and is ejected from the defective component ejection section 8 to the outside.

[0097] As described above, according to the present embodiment, when the contact resistance value between the pair of first probes 11a, 11b or the pair of second probes 12a, 12b exceeds a specified value, VCM 15b repeats the pressing operation of pressing the pair of first probes 11a, 11b and the pair of second probes 12a, 12b against the electrodes W1, W2 of the electronic component W in stages at regular intervals of time t until the contact resistance values ​​between the pair of first probes 11a, 11b and the pair of second probes 12a, 12b become equal to or less than the specified value. During this time, the pair of first probes 11a, 11b and the pair of second probes 12a, 12b are in contact with the electrodes W1, W2 of the electronic component W.

[0098] Therefore, in order to excessively reduce the contact resistance value between the pair of first probes 11a, 11b and the pair of second probes 12a, 12b, there is no need to press the pair of first probes 11a, 11b and the pair of second probes 12a, 12b against the electrodes W1, W2 of the electronic component W more than necessary. As a result, the pair of first probes 11a, 11b and the pair of second probes 12a, 12b do not scratch or leave probe marks on the electrodes W1, W2.

[0099] Furthermore, according to this embodiment, of the contact resistance values ​​between the pair of first probes 11a, 11b and the pair of second probes 12a, 12b obtained by resistance value measuring instrument 18, the contact resistance value between the pair of first probes 11a, 11b having the larger contact resistance value is adopted, and based on this contact resistance value, the pair of first probes 11a, 11b and the pair of second probes 12a, 12b are pressed against the electrodes W1, W2 of electronic component W. Therefore, it is possible to reliably suppress both the contact resistance value between the pair of first probes 11a, 11b and the contact resistance value between the pair of second probes 12a, 12b to be equal to or less than a specified value.

[0100] Furthermore, the control unit main body 30a calculates the pressing forces of the pair of first probes 11a, 11b and the pair of second probes 12a, 12b against the electrodes W1, W2 of the electronic component W during the next pressing operation based on the difference between the contact resistance value between the pair of first probes 11a, 11b during the previous pressing operation and the contact resistance value during the current pressing operation, and based on the interval time, and drives and controls the VCM 15b based on this pressing force.

[0101] Therefore, even if the actual relationship between the contact load and contact resistance value between the actual pair of first probes 11a, 11b and the actual pair of second probes 12a, 12b and the electrodes W1, W2 of the electronic component W is not accurately known, it is possible to accurately set the pressing forces of the pair of first probes 11a, 11b and the pair of second probes 12a, 12b against the electrodes W1, W2 of the electronic component W in accordance with the actual contact load and contact resistance value between the pair of first probes 11a, 11b and the pair of second probes 12a, 12b and the electrodes W1, W2 of the electronic component W. This makes it possible to more accurately and quickly set the contact resistance value between the pair of first probes 11a, 11b and the pair of second probes 12a, 12b to be equal to or less than the specified value.

[0102] Furthermore, the pair of first probes 11a, 11b and the pair of second probes 12a, 12b are stopped immediately in front of the electrodes W1, W2 of the electronic component W, and then brought into contact with the electrodes W1, W2 of the electronic component W, so that the pair of first probes 11a, 11b and the pair of second probes 12a, 12b will not unintentionally collide with the electrodes W1, W2 of the electronic component W and damage the electrodes W1, W2.

[0103] In this case, as described above, the VCM 15b performs current feedback control, speed feedback control, and position feedback control to drive the drive mechanism main body 15a at a constant speed, thereby enabling the pair of first probes 11a, 11b and the pair of second probes 12a, 12b to be accurately and quickly brought to just before contacting the electrodes W1, W2 of the electronic component W.

[0104] Generally, increasing the contact load of a probe to improve poor contact with, for example, solder is a well-known technique. In contrast, the present embodiment is characterized by gradually increasing the contact load for impact-sensitive electronic components W, which requires more delicate load changes than the above-described well-known techniques. To meet this requirement for delicate load changes, the present embodiment first lowers the probe to a predetermined contact position that does not cause impact on the electronic component W in the first step. Then, in the second step, current is applied to the electronic component W, which is sensitive to electrical current, to detect contact resistance values ​​between the first probes 11a and 11b and between the second probes 12a and 12b. Based on these contact resistance values, the contact load is gradually increased on the electronic component W using the first probes 11a and 11b and the second probes 12a and 12b. This improves probe contact poorness without leaving probe marks on the electrodes W1 and W2.

[0105] Furthermore, as described above, when both the contact resistance value between the pair of first probes 11a, 11b and the contact resistance value between the pair of second probes 12a, 12b are equal to or less than the specified values, the electrical measurement device 20 performs an electrical measurement on the electronic component W. The measurement results are sent from the electrical measurement device 20 to the control unit main body 30a of the control unit 30. While rotating the index table 4, the control unit 30 can eject defective components from the defective component ejection unit 8 and eject non-defective components from the non-defective component ejection unit 9 based on the measurement results of the electronic component W. [Explanation of symbols]

[0106] 1 parts feeder 3 Linear feeder 4 Index Table 5 suction nozzle 5A Suction nozzle holding mechanism 10 Electrical measuring equipment for electronic components 11 First measurement terminal 11a, 11b First probe 12 Second measurement terminal 12a, 12b Second probe 15 Drive mechanism 15a Drive mechanism body 15b VCM (voice coil motor) 15c encoder 16 Scanner 16a Scanner drive unit 18 Resistance measuring instrument 20 Electrical Measuring Instruments 21a, 21b wiring line 22a, 22b wiring line 30 Control Unit 30a Control unit body 30b VCM control section 100 Electrical Measuring Device System

Claims

1. An electrical measurement device for an electronic component that performs electrical measurement of an electronic component including a pair of electrodes, a first measurement terminal that contacts one of the electrodes and includes at least a pair of first probes; a second measurement terminal that contacts the other electrode and includes at least a pair of second probes; an electrical measuring instrument connected between the pair of first probes of the first measurement terminal and the pair of second probes of the second measurement terminal, for performing electrical measurements between the pair of electrodes; a resistance value measuring device connected between the pair of first probes of the first measurement terminal and between the pair of second probes of the second measurement terminal, for measuring a contact resistance value between the pair of first probes of the first measurement terminal and a contact resistance value between the pair of second probes of the second measurement terminal; a driving mechanism for driving each of the first measurement terminal and the second measurement terminal; a control unit, the control unit controls the drive mechanism to bring the pair of first probes and the pair of second probes of the first measurement terminal close to the electronic component; abutting the pair of first probes and the pair of second probes of the first measurement terminal against the electronic component; With the pair of first probes and the pair of second probes of the first measurement terminal in contact with the electronic component, the resistance measuring device measures a contact resistance value between the pair of first probes of the first measurement terminal and a contact resistance value between the pair of second probes of the second measurement terminal, and presses the pair of first probes and the pair of second probes of the first measurement terminal against the electronic component until the contact resistance value between the pair of first probes becomes equal to or less than a specified value and the contact resistance value between the pair of second probes becomes equal to or less than a specified value; the control unit controls the drive mechanism to press the pair of first probes and the pair of second probes of the first measurement terminal against the electronic component in a stepwise manner; the device for electrical measurement of electronic components uses either the contact resistance value between the pair of first probes or the contact resistance value between the pair of second probes to determine an increase in an operation amount by Euler's method based on a difference between the contact resistance value at the time of the previous pressing and the contact resistance value at the time of the current pressing, and an increment time; adds the increase in the operation amount to the current operation amount to determine a next pressing force of the pair of first probes and the pair of second probes of the first measurement terminal against the electronic component; and gradually increases the pressing force of the pair of first probes and the pair of second probes against the electronic component; and stops pressing the pair of first probes and the pair of second probes of the first measurement terminal against the electronic component when the contact resistance value between the pair of first probes becomes equal to or less than a specified value and when the contact resistance value between the pair of second probes becomes equal to or less than a specified value.

2. 2. The electrical measurement device for an electronic component according to claim 1, wherein the drive mechanism includes a thrust-controlled motor.

3. 3. The electrical measuring device for an electronic component according to claim 2, wherein the drive mechanism includes a voice coil motor.

4. 2. The electrical measuring device for electronic components according to claim 1, wherein the control unit operates the electrical measuring device to perform electrical measurement between the pair of electrodes when the contact resistance value between the pair of first probes of the first measuring terminal measured by the resistance measuring device is equal to or less than a specified value and when the contact resistance value between the pair of second probes of the second measuring terminal is equal to or less than a specified value.

Images