Glass ceramic compositions, glass ceramic sintered bodies, and electronic components
A glass-ceramic composition with specific components allows sintering at low temperatures, addressing the miniaturization challenge of electronic components by achieving high permittivity and Qf values, suitable for LC filters.
Patent Information
- Authority / Receiving Office
- JP · JP
- Patent Type
- Patents
- Current Assignee / Owner
- MURATA MFG CO LTD
- Filing Date
- 2023-08-08
- Publication Date
- 2026-07-29
AI Technical Summary
Existing glass-ceramic compositions have low relative permittivity, making it difficult to miniaturize electronic components, particularly filters like LC filters, and they require high firing temperatures.
A glass-ceramic composition containing specific proportions of Li2O, MgO, SrO, B2O3, SiO2, and ZnO, with aggregates like ZrO2 and CaTiO3, allowing sintering at 1000°C or lower and achieving high relative permittivity and Qf values, along with a small capacitance change rate.
The composition enables the production of miniaturized electronic components with low insertion loss, high relative permittivity, and Qf values, and a small capacitance change rate, suitable for LC filters.
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Abstract
Description
Technical Field
[0001] The present invention relates to a glass-ceramic composition, a glass-ceramic sintered body, and an electronic component.
Background Art
[0002] For example, Patent Document 1 discloses a glass-ceramic composition that can be fired at a temperature of 1000° C. or lower, and for the sintered body thereof, the relative permittivity is low, the temperature coefficient of the resonance frequency and the capacitance variation before and after the load test are small, and the Qf value, electrical insulation reliability, and flexural strength are high. The glass-ceramic composition is for a glass-ceramic layer laminated in a multilayer ceramic substrate, and includes a first ceramic powder mainly composed of forsterite, a second ceramic powder mainly composed of SrTiO3 and / or TiO2, a third ceramic powder mainly composed of BaZrO3, a fourth ceramic powder mainly composed of SrZrO3, and a borosilicate glass powder containing at least one additive component selected from Li2O, MgO, B2O3, SiO2, and ZnO, and CaO, BaO, and SrO.
Prior Art Documents
Patent Documents
[0003]
Patent Document 1
Summary of the Invention
Problems to be Solved by the Invention
[0004] However, the glass-ceramic sintered body obtained by firing the glass-ceramic composition described in Patent Document 1 has a low relative permittivity (ε r ). Therefore, it is difficult to miniaturize electronic components using the same material, particularly filters such as LC filters.
[0005] The present invention solves the above problems, and aims to provide a glass-ceramics composition that can be fired at a temperature of 1000°C or lower, and for which the sintered body has a high relative dielectric constant and Qf value and a small capacitance change rate. Another aim is to provide a glass-ceramics sintered body having a high relative dielectric constant and Qf value and a small capacitance change rate. A further aim is to provide an electronic component including a glass-ceramics layer made of the above glass-ceramics sintered body obtained by firing the above glass-ceramics composition, or a glass-ceramics layer made of the above glass-ceramics sintered body.
Means for Solving the Problems
[0006] In a first aspect, the present invention is a glass-ceramics composition including a glass containing Li2O, MgO, SrO, B2O3, SiO2, and ZnO and an aggregate, where the glass is included in an amount of 9 wt% or more and 14 wt% or less with respect to 100 wt% of the glass-ceramics composition, and the aggregate includes 80 wt% or more and 86 wt% or less of ZrO2, 2 wt% or more and 6 wt% or less of CaTiO3, and at least one of 1 wt% or more and 4 wt% or less of BaCO3 and Al2O3.
[0007] In a second aspect, the present invention is a glass-ceramics sintered body containing Zr, Ca, Ti, Ba, Li, Mg, Sr, B, Si, and Zn, where the content of ZrO2 is 80 wt% or more and 86 wt% or less, the content of CaTiO3 is 2 wt% or more and 6 wt% or less, the content of BaO is 0.78 wt% or more and 3.14 wt% or less, the content of Li2O is 0.3 wt% or more and 1.5 wt% or less, the content of MgO is 2 wt% or more and 5 wt% or less, the content of SrO is 0.5 wt% or more and 2.5 wt% or less, the content of B2O3 is 1.5 wt% or more and 3 wt% or less, the content of SiO2 is 1 wt% or more and 3.5 wt% or less, and the content of ZnO is 0.6 wt% or more and 2 wt% or less.
[0008] In a third aspect, the present invention is a glass ceramic sintered body containing Zr, Ca, Ti, Al, Li, Mg, Sr, B, Si, and Zn, wherein the ZrO2 content is 80% by weight or more and 86% by weight or less, the CaTiO3 content is 2% by weight or more and 6% by weight or less, the Al2O3 content is 1% by weight or more and 4% by weight or less, the Li2O content is 0.3% by weight or more and 1.5% by weight or less, the MgO content is 2% by weight or more and 5% by weight or less, the SrO content is 0.5% by weight or more and 2.5% by weight or less, the B2O3 content is 1.5% by weight or more and 3% by weight or less, the SiO2 content is 1% by weight or more and 3.5% by weight or less, and the ZnO content is 0.6% by weight or more and 2% by weight or less.
[0009] In a fourth embodiment, the present invention provides a glass ceramic sintered body containing Zr, Ca, Ti, Ba, Al, Li, Mg, Sr, B, Si, and Zn, wherein the ZrO2 content is 80% by weight or more and 86% by weight or less, the CaTiO3 content is 2% by weight or more and 6% by weight or less, the BaO content is 0.78% by weight or more and 2.35% by weight or less, and the Al2O3 content is 1% by weight or more and 3.01% by weight or less. This is a glass ceramic sintered body having a Li2O content of 0.3% to 1.5% by weight, a MgO content of 2% to 5% by weight, a SrO content of 0.5% to 2.5% by weight, a B2O3 content of 1.5% to 3% by weight, a SiO2 content of 1% to 3.5% by weight, and a ZnO content of 0.6% to 2% by weight.
[0010] In a fifth aspect, the present invention provides an electronic component comprising a glass-ceramic layer made of a glass-ceramic sintered body obtained by firing a glass-ceramic composition according to the first aspect of the present invention.
[0011] In its sixth aspect, the present invention provides an electronic component comprising a glass-ceramic layer made of a glass-ceramic sintered body according to the second to fourth aspects of the present invention. [Effects of the Invention]
[0012] According to the present invention, it is possible to provide a glass ceramic composition that can be fired at a temperature of 1000°C or less, and whose sintered body has a high relative permittivity and Qf value and a small capacitance change rate. Furthermore, it is possible to provide a glass ceramic sintered body with a high relative permittivity and Qf value and a small capacitance change rate. In addition, it is possible to provide a glass ceramic layer made of a glass ceramic sintered body obtained by firing the above glass ceramic composition, or an electronic component comprising a glass ceramic layer made of the above glass ceramic sintered body. [Brief explanation of the drawing]
[0013] [Figure 1] Figure 1 is a perspective view showing the appearance of an LC filter as an example of an electronic component according to the fifth or sixth embodiment of the present invention. [Figure 2] Figure 2 is the equivalent circuit diagram provided by the LC filter shown in Figure 1. [Figure 3] Figure 3 is a perspective view showing a disassembled raw laminate, an intermediate product subjected to the firing process in the manufacturing of the LC filter shown in Figure 1. [Modes for carrying out the invention]
[0014] The following describes the glass-ceramic composition, glass-ceramic sintered body, and electronic component of the present invention. However, the present invention is not limited to the following configurations, and may be modified as appropriate without departing from the spirit of the invention. Furthermore, combinations of several of the preferred configurations described below also constitute the present invention.
[0015] [Glass ceramic composition] The glass ceramic composition according to the first embodiment of the present invention is a low-temperature co-fired ceramic (LTCC) material that can be sintered at a firing temperature of 1000°C or lower.
[0016] Specifically, the glass ceramic composition according to the first embodiment is a glass ceramic composition comprising glass containing Li2O, MgO, SrO, B2O3, SiO2, and ZnO, and aggregate, wherein the glass is 9% to 14% by weight per 100% by weight of the glass ceramic composition, and the aggregate comprises 80% to 86% by weight of ZrO2, 2% to 6% by weight of CaTiO3, and at least one of BaCO3 and Al2O3 in 1% to 4% by weight. This allows firing at temperatures below 1000°C, and the relative permittivity of the sintered body is (hereinafter, ε r This makes it possible to realize a glass-ceramic composition with a high Qf value (abbreviated as ) and a small capacitance change rate (hereinafter abbreviated as TCC). More specifically, it is possible to fire it at a temperature of 1000°C or less, and for the sintered body, ε r It is possible to realize a glass ceramic composition in which the GHz is 15 or higher (for example, 15.2 to 17.9), the Qf value is 10,000 GHz or higher (for example, 10,000 to 22,000 GHz), and the absolute value of TCC in the temperature range of -40°C to 85°C is 75 ppm / °C or lower (for example, -60 to 75 ppm / °C). Using this material makes it possible to fabricate miniaturized electronic components such as LC filters while maintaining low insertion loss.
[0017] Note that TCC and the temperature coefficient τ of the resonant frequency f These all represent temperature characteristics, and the following relationship holds true. TCC = -2(τ f +α) Here, α represents the coefficient of thermal expansion.
[0018] The above glass-ceramic composition contains each of the above compositions as powder. That is, it contains a first ceramic powder mainly composed of ZrO2, a second ceramic powder mainly composed of CaTiO3, a third ceramic powder mainly composed of at least one of BaCO3 and Al2O3, and a glass powder (borosilicate glass powder) containing Li2O, MgO, SrO, B2O3, SiO2, and ZnO.
[0019] Here, the purposes of adding each aggregate (filler) and glass are as follows. ·ZrO2: ε r and improvement of the Qf value ·CaTiO3: ε r improvement, adjustment of TCC (shifting TCC to the negative side) ·BaCO3 and Al2O3: improvement of the acid resistance of the sintered body (suppressing the crystallization of glass and preventing it from becoming ZnO-rich glass with low acid resistance) ·Glass: low-temperature sintering
[0020] If the content of ZrO2 is less than 80% by weight, ε r may decrease. If the content of ZrO2 exceeds 86% by weight, the sinterability of the glass-ceramic composition may deteriorate.
[0021] The content of ZrO2 is 80% by weight or more and 86% by weight or less, and preferably 82% by weight or more and 85% by weight or less. When the content of ZrO2 is 82% by weight or more and 85% by weight or less, a glass-ceramic sintered body having a higher ε r and Qf value (for example, ε r is 16.3 or more and the Qf value is 20000 or more) can be realized.
[0022] If the content of CaTiO3 is less than 2% by weight, the sinterability of the glass-ceramic composition may deteriorate. If the content of CaTiO3 exceeds 6% by weight, the absolute value of TCC may increase (become larger on the negative side).
[0023] The CaTiO3 content is preferably 2% by weight or more and 6% by weight or less, and preferably 4% by weight or more and 6% by weight or less. When the CaTiO3 content is 4% by weight or more and 6% by weight or less, a higher ε r and Qf value (e.g., ε r A glass-ceramic sintered body having a coefficient of 16.3 or higher and a Qf value of 20000 or higher can be realized.
[0024] If the content of at least one of BaCO3 and Al2O3 is less than 1% by weight, the acid resistance of the sintered body may deteriorate. If the content of at least one of BaCO3 and Al2O3 exceeds 4% by weight, the Qf value decreases, the TCC increases, or ε r This may decrease.
[0025] The content of at least one of BaCO3 and Al2O3 is preferably 1% by weight or more and 4% by weight or less, and preferably 1% by weight or more and 2% by weight or less. When the content of at least one of BaCO3 and Al2O3 is 1% by weight or more and 2% by weight or less, a higher ε r and Qf value (e.g., ε r A glass-ceramic sintered body having a coefficient of 16.3 or higher and a Qf value of 20000 or higher can be realized.
[0026] If the glass content is less than 9% by weight, the sinterability may deteriorate. If the glass content exceeds 14% by weight, ε r This may decrease.
[0027] The glass content is preferably 9% by weight or more and 14% by weight or less, and preferably 9% by weight or more and 10% by weight or less. When the glass content is 9% by weight or more and 10% by weight or less, a higher ε r and Qf value (e.g., ε r A glass-ceramic sintered body having a coefficient of 16.3 or higher and a Qf value of 20000 or higher can be realized.
[0028] In the above glass, it is preferable that the Li2O content is 3% by weight or more and 15% by weight or less, the MgO content is 20% by weight or more and 50% by weight or less, the SrO content is 5% by weight or more and 25% by weight or less, the B2O3 content is 15% by weight or more and 30% by weight or less, the SiO2 content is 10% by weight or more and 35% by weight or less, and the ZnO content is 6% by weight or more and 20% by weight or less.
[0029] If the Li2O content is less than 3% by weight, the sinterability of the glass ceramic composition may deteriorate. If the Li2O content exceeds 15% by weight, the acid resistance of the sintered body may deteriorate.
[0030] The Li2O content is preferably 3% by weight or more and 15% by weight or less, more preferably 3% by weight or more and 7% by weight or less, and even more preferably substantially 5% by weight. When the Li2O content is 3% by weight or more and 7% by weight or less, a higher ε r and Qf value (e.g., ε r A glass-ceramic sintered body having a coefficient of 16.1 or higher and a Qf value of 18000 or higher can be realized.
[0031] If the MgO content is less than 20% by weight, the Qf value may decrease. When the MgO content exceeds 50% by weight, a phenomenon called devitrification, where part of the glass crystallizes, may occur.
[0032] The MgO content is preferably 20% by weight or more and 50% by weight or less, and more preferably 25% by weight or more and 50% by weight or less. When the MgO content is 25% by weight or more and 50% by weight or less, a higher ε r and Qf value (e.g., ε r A glass-ceramic sintered body having a coefficient of 16.1 or higher and a Qf value of 18000 or higher can be realized.
[0033] If the SrO content is less than 5% by weight, devitrification may occur. If the SrO content exceeds 25% by weight, the Qf value may decrease.
[0034] The SrO content is preferably 5% by weight or more and 25% by weight or less, and more preferably 5% by weight or more and 17.5% by weight or less. When the SrO content is 5% by weight or more and 17.5% by weight or less, a higher ε r and Qf value (e.g., ε r A glass-ceramic sintered body having a coefficient of 16.1 or higher and a Qf value of 18000 or higher can be realized.
[0035] If the B2O3 content is less than 15% by weight, devitrification may occur. If the B2O3 content exceeds 30% by weight, the acid resistance of the sintered body may deteriorate.
[0036] The B2O3 content is preferably 15% by weight or more and 30% by weight or less, and more preferably 15% by weight or more and 20% by weight or less. When the B2O3 content is 15% by weight or more and 20% by weight or less, a higher ε r and Qf value (e.g., ε r A glass-ceramic sintered body having a coefficient of 16.1 or higher and a Qf value of 18000 or higher can be realized.
[0037] If the SiO2 content is less than 10% by weight, devitrification may occur. If the SiO2 content exceeds 35% by weight, the sinterability of the glass ceramic composition may deteriorate.
[0038] The SiO2 content is preferably 10% by weight or more and 35% by weight or less, and more preferably 15% by weight or more and 25% by weight or less. When the SiO2 content is 15% by weight or more and 25% by weight or less, a higher ε r and Qf value (e.g., ε r A glass-ceramic sintered body having a coefficient of 16.1 or higher and a Qf value of 18000 or higher can be realized.
[0039] If the ZnO content is less than 6% by weight, the Qf value may decrease. If the ZnO content exceeds 20% by weight, the acid resistance of the sintered body may deteriorate.
[0040] The ZnO content is preferably 6% by weight or more and 20% by weight or less, more preferably 6% by weight or more and 9% by weight or less, and even more preferably substantially 7.5% by weight. When the ZnO content is 6% by weight or more and 9% by weight or less, a higher ε r and Qf value (e.g., ε r A glass-ceramic sintered body having a coefficient of 16.1 or higher and a Qf value of 18000 or higher can be realized.
[0041] [Glass-ceramic sintered body] A glass ceramic sintered body according to a second embodiment of the present invention is a glass ceramic sintered body containing Zr, Ca, Ti, Ba, Li, Mg, Sr, B, Si, and Zn, wherein the ZrO2 content is 80% by weight or more and 86% by weight or less, the CaTiO3 content is 2% by weight or more and 6% by weight or less, the BaO content is 0.78% by weight or more and 3.14% by weight or less, the Li2O content is 0.3% by weight or more and 1.5% by weight or less, the MgO content is 2% by weight or more and 5% by weight or less, the SrO content is 0.5% by weight or more and 2.5% by weight or less, the B2O3 content is 1.5% by weight or more and 3% by weight or less, the SiO2 content is 1% by weight or more and 3.5% by weight or less, and the ZnO content is 0.6% by weight or more and 2% by weight or less.
[0042] A glass ceramic sintered body according to a third embodiment of the present invention is a glass ceramic sintered body containing Zr, Ca, Ti, Al, Li, Mg, Sr, B, Si, and Zn, wherein the ZrO2 content is 80% by weight or more and 86% by weight or less, the CaTiO3 content is 2% by weight or more and 6% by weight or less, the Al2O3 content is 1% by weight or more and 4% by weight or less, the Li2O content is 0.3% by weight or more and 1.5% by weight or less, the MgO content is 2% by weight or more and 5% by weight or less, the SrO content is 0.5% by weight or more and 2.5% by weight or less, the B2O3 content is 1.5% by weight or more and 3% by weight or less, the SiO2 content is 1% by weight or more and 3.5% by weight or less, and the ZnO content is 0.6% by weight or more and 2% by weight or less.
[0043] A glass ceramic sintered body according to the fourth embodiment of the present invention is a glass ceramic sintered body containing Zr, Ca, Ti, Ba, Al, Li, Mg, Sr, B, Si, and Zn, wherein the ZrO2 content is 80% by weight or more and 86% by weight or less, the CaTiO3 content is 2% by weight or more and 6% by weight or less, the BaO content is 0.78% by weight or more and 2.35% by weight or less, and the Al2O3 content is 1% by weight or more. The total content is 3.01% by weight or less, with Li2O content being 0.3% to 1.5% by weight, MgO content being 2% to 5% by weight, SrO content being 0.5% to 2.5% by weight, B2O3 content being 1.5% to 3% by weight, SiO2 content being 1% to 3.5% by weight, and ZnO content being 0.6% to 2% by weight.
[0044] According to the glass-ceramic sintered bodies of the second to fourth embodiments, it is possible to realize glass-ceramic sintered bodies with high relative permittivity and Qf value, and low capacitance change rate. More specifically, ε rIt is possible to create glass-ceramic sintered bodies with a GHz of 15 or higher (for example, 15.2 to 17.9), a Qf value of 10,000 GHz or higher (for example, 10,000 to 22,000 GHz), and an absolute value of TCC of 75 ppm / °C or less in the temperature range of -40°C to 85°C (for example, -60 to 75 ppm / °C). Using this material makes it possible to fabricate miniaturized electronic components such as LC filters while maintaining low insertion loss.
[0045] The glass ceramic sintered bodies according to the second to fourth embodiments can be produced by firing the glass ceramic composition according to the first embodiment at a temperature of 1000°C or lower. Therefore, the purpose of adding each component, the critical significance of the content, and the preferred range in the glass ceramic sintered bodies according to the second to fourth embodiments are the same as those described for the glass ceramic composition according to the first embodiment, and are therefore omitted from this explanation.
[0046] However, since BaCO3 exists as BaO after calcination, its content decreases by the amount of CO2. Therefore, in the glass ceramic sintered body according to the second embodiment of the present invention, the BaO content is preferably 0.78% by weight or more and 3.14% by weight or less, and preferably 0.78% by weight or more and 1.56% by weight or less. When the BaO content is 0.78% by weight or more and 1.56% by weight or less, a higher ε r and Qf value (e.g., ε r A glass-ceramic sintered body having a coefficient of 16.3 or higher and a Qf value of 20000 or higher can be realized.
[0047] In the glass ceramic sintered body according to the third embodiment of the present invention, the Al2O3 content is preferably 1% by weight or more and 4% by weight or less, and preferably 1% by weight or more and 2% by weight or less. When the Al2O3 content is 1% by weight or more and 2% by weight or less, a higher ε r and Qf value (e.g., ε rA glass-ceramic sintered body having a coefficient of 16.3 or higher and a Qf value of 20000 or higher can be realized.
[0048] In the glass ceramic sintered body according to the fourth embodiment of the present invention, the BaO content is preferably 0.78% by weight or more and 2.35% by weight or less, preferably 0.78% by weight or more and 1.56% by weight or less, more preferably 0.78% by weight or more and 1.5% by weight or less, and even more preferably substantially 0.78% by weight, and the Al2O3 content is preferably 1% by weight or more and 3.01% by weight or less, preferably 1% by weight or more and 2% by weight or less, more preferably 1% by weight or more and 1.5% by weight or less, and even more preferably substantially 1% by weight. When the BaO content is 0.78% by weight or more and 1.56% by weight or less, and the Al2O3 content is 1% by weight or more and 2% by weight or less, a higher ε r and Qf value (e.g., ε r A glass-ceramic sintered body having a coefficient of 16.3 or higher and a Qf value of 20000 or higher can be realized.
[0049] Furthermore, in the glass ceramic sintered bodies according to the second to fourth embodiments of the present invention, the content of each glass component and its preferred range are as follows.
[0050] The Li2O content is preferably 0.3% by weight or more and 1.5% by weight or less, more preferably 0.3% by weight or more and 0.7% by weight or less, and substantially 0.5% by weight. When the Li2O content is 0.3% by weight or more and 0.7% by weight or less, a higher ε r and Qf value (e.g., ε r A glass-ceramic sintered body having a coefficient of 16.1 or higher and a Qf value of 18000 or higher can be realized.
[0051] The MgO content is preferably 2% by weight or more and 5% by weight or less, and preferably 2.5% by weight or more and 5% by weight or less. When the MgO content is 2.5% by weight or more and 5% by weight or less, a higher ε r and Qf value (e.g., ε rA glass-ceramic sintered body having a coefficient of 16.1 or higher and a Qf value of 18000 or higher can be realized.
[0052] The SrO content is preferably 0.5% by weight or more and 2.5% by weight or less, and preferably 0.5% by weight or more and 1.75% by weight or less. When the SrO content is 0.5% by weight or more and 1.75% by weight or less, a higher ε r and Qf value (e.g., ε r A glass-ceramic sintered body having a coefficient of 16.1 or higher and a Qf value of 18000 or higher can be realized.
[0053] The B2O3 content is preferably 1.5% by weight or more and 3% by weight or less, and preferably 1.5% by weight or more and 2% by weight or less. When the B2O3 content is 1.5% by weight or more and 2% by weight or less, a higher ε r and Qf value (e.g., ε r A glass-ceramic sintered body having a coefficient of 16.1 or higher and a Qf value of 18000 or higher can be realized.
[0054] The SiO2 content is preferably 1% by weight or more and 3.5% by weight or less, and preferably 1.5% by weight or more and 2.5% by weight or less. When the SiO2 content is 1.5% by weight or more and 2.5% by weight or less, a higher ε r and Qf value (e.g., ε r A glass-ceramic sintered body having a coefficient of 16.1 or higher and a Qf value of 18000 or higher can be realized.
[0055] The ZnO content is 0.6% by weight or more and 2% by weight or less, preferably 0.6% by weight or more and 0.9% by weight or less, and preferably substantially 0.75% by weight. When the ZnO content is 0.6% by weight or more and 0.9% by weight or less, a higher ε r and Qf value (e.g., ε r A glass-ceramic sintered body having a coefficient of 16.1 or higher and a Qf value of 18000 or higher can be realized.
[0056] In the glass-ceramic sintered bodies according to the second to fourth embodiments, the glass containing Li2O, MgO, SrO, B2O3, SiO2, and ZnO usually exists as an amorphous phase, while ZrO2, CaTiO3, BaO, and Al2O3 usually exist as ceramic powders, i.e., as particulate crystalline phases.
[0057] Furthermore, in the glass-ceramic sintered body of the present invention, the glass and other components (aggregates) can be distinguished or separated by methods such as analyzing the electron diffraction pattern using a scanning electron microscope (SEM) or transmission electron microscope (TEM), or by dissolving the glass portion with hydrogen fluoride or the like. By performing elemental analysis such as wavelength-dispersive X-ray analysis (WDX), energy-dispersive X-ray analysis (EDX), and inductively coupled plasma atomic emission spectroscopy (ICP) on the glass and each of the other components, the composition (content) of the glass and each of the other components can be measured as the oxides described above.
[0058] In other words, the glass ceramic sintered body according to the second embodiment of the present invention is synonymous with a glass ceramic sintered body containing 80% to 86% by weight of Zr (calculated as ZrO2), 2% to 6% by weight of Ca and Ti (calculated as CaTiO3), 0.78% to 3.14% by weight of Ba (calculated as BaO), 0.3% to 1.5% by weight of Li (calculated as Li2O), 2% to 5% by weight of Mg (calculated as MgO), 0.5% to 2.5% by weight of Sr (calculated as SrO), 1.5% to 3% by weight of B (calculated as B2O3), 1% to 3.5% by weight of Si (calculated as SiO2), and 0.6% to 2% by weight of Zn (calculated as ZnO).
[0059] The glass ceramic sintered body according to the third embodiment of the present invention is synonymous with a glass ceramic sintered body containing 80% to 86% by weight of Zr (calculated as ZrO2), 2% to 6% by weight of Ca and Ti (calculated as CaTiO3), 1% to 4% by weight of Al (calculated as Al2O3), 0.3% to 1.5% by weight of Li (calculated as Li2O), 2% to 5% by weight of Mg (calculated as MgO), 0.5% to 2.5% by weight of Sr (calculated as SrO), 1.5% to 3% by weight of B (calculated as B2O3), 1% to 3.5% by weight of Si (calculated as SiO2), and 0.6% to 2% by weight of Zn (calculated as ZnO).
[0060] The glass ceramic sintered body according to the fourth embodiment of the present invention contains 80% to 86% by weight of Zr in terms of ZrO2, 2% to 6% by weight of Ca and Ti in terms of CaTiO3, 0.78% to 2.35% by weight of Ba in terms of BaO, 1% to 3.01% by weight of Al in terms of Al2O3, and 0.3% by weight of Li in terms of Li2O. The above is equivalent to a glass ceramic sintered body containing 1.5% by weight or less of the above, Mg (calculated as MgO) containing 2% to 5% by weight or less, Sr (calculated as SrO) containing 0.5% to 2.5% by weight or less, B (calculated as B2O3) containing 1.5% to 3% by weight or less, Si (calculated as SiO2) containing 1% to 3.5% by weight or less, and Zn (calculated as ZnO) containing 0.6% to 2% by weight or less.
[0061] In the glass-ceramic sintered bodies according to the second to fourth embodiments, a portion of the glass may be crystallized (aggregated), and a portion of the ceramic powder may be melted and incorporated into the amorphous phase of the glass.
[0062] Furthermore, in the glass ceramic sintered body of the present invention, MgO and SiO2 may partially react during firing and exist in the form of Mg2SiO4 (forsterite) (see reaction formula (1) below). In that case, the Mg2SiO4 content measured by the above method is converted to the MgO and SiO2 content, respectively, and the body is considered to contain the converted MgO and SiO2 amounts. 2MgO + SiO2 ⇔ Mg2SiO4 (1)
[0063] [Electronic components] An electronic component according to the fifth embodiment of the present invention comprises a glass ceramic layer made of a glass ceramic sintered body obtained by firing the glass ceramic composition according to the first embodiment. An electronic component according to the sixth embodiment of the present invention comprises a glass-ceramic layer made of a glass-ceramic sintered body according to the second to fourth embodiments. Therefore, it becomes possible to realize miniaturized electronic components.
[0064] Furthermore, the electronic component according to the sixth embodiment may include a glass-ceramic layer made of a glass-ceramic sintered body according to at least one embodiment among the second to fourth embodiments. For example, it may include only a glass-ceramic layer (which may be a single layer or multiple layers) made of a glass-ceramic sintered body according to any one embodiment among the second to fourth embodiments. Alternatively, it may include multiple glass-ceramic layers made of glass-ceramic sintered bodies according to two or more different embodiments among the second to fourth embodiments.
[0065] While not particularly limited, specific examples of electronic components include filters such as bandpass filters, and LC filters are particularly preferred.
[0066] Figure 1 is a perspective view showing the appearance of an LC filter as an example of an electronic component according to the fifth or sixth embodiment of the present invention. Figure 2 is an equivalent circuit diagram provided by the LC filter shown in Figure 1. Figure 3 is a perspective view showing a disassembled raw laminate as an intermediate product subjected to the firing process in the manufacturing of the LC filter shown in Figure 1.
[0067] As shown in Figure 1, the LC filter 21 includes a component body 23 which is a laminated structure composed of multiple stacked glass-ceramic layers. Terminal electrodes 24 and 25 are provided at each end of the outer surface of this component body 23, and terminal electrodes 26 and 27 are provided in the middle of each side.
[0068] As shown in Figure 2, the LC filter 21 consists of two inductors L1 and L2 connected in series between terminal electrodes 24 and 25, and a capacitance C is formed between the connection point of inductors L1 and L2 and terminal electrodes 26 and 27.
[0069] Referring to Figure 3, the raw laminate 22 is intended to become the component body 23 after firing, and comprises multiple laminated ceramic green sheets 28-40. Note that the number of laminated ceramic green sheets is not limited to those shown.
[0070] Each of the ceramic green sheets 28 to 40 is obtained by adding an organic vehicle consisting of a binder resin and a solvent to a glass ceramic composition according to the first embodiment of the present invention, mixing these together to obtain a ceramic slurry, forming it into a sheet using a doctor blade method, drying it, and then punching it out to a predetermined size.
[0071] Furthermore, in order to provide inductances L1 and L2 and capacitance C as shown in Figure 2, wiring conductors are provided in the following manner in relation to specific ceramic green sheets 28 to 40.
[0072] A coil pattern 41 constituting part of the inductance L1 is formed on the ceramic green sheet 30, and a lead pattern 42 extending from one end of the coil pattern 41 is formed thereon, while a via hole conductor 43 is provided at the other end of the coil pattern 41.
[0073] A coil pattern 44, which constitutes part of the inductance L1, is formed on the ceramic green sheet 31, and a via-hole conductor 45 is provided at one end thereof. The other end of the coil pattern 44 is connected to the aforementioned via-hole conductor 43.
[0074] The ceramic green sheet 32 is provided with a via hole conductor 46 that is connected to the via hole conductor 45 described above.
[0075] The ceramic green sheet 33 has a capacitor pattern 47 that constitutes part of the capacitance C, and lead patterns 48 and 49 extending from the capacitor pattern 47. The ceramic green sheet 33 is also provided with a via hole conductor 50 that is connected to the via hole conductor 46 mentioned above.
[0076] A capacitor pattern 51, which constitutes part of the capacitance C, is formed on the ceramic green sheet 34, and via hole conductors 52 connected to the capacitor pattern 51 are provided. The capacitor pattern 51 is connected to the aforementioned via hole conductors 50.
[0077] The ceramic green sheet 35 has a capacitor pattern 53 that constitutes part of the capacitance C, and lead patterns 54 and 55 extending from this capacitor pattern 53. The ceramic green sheet 35 is also provided with a via hole conductor 56 that is connected to the via hole conductor 52 mentioned above.
[0078] The ceramic green sheet 36 is provided with via hole conductors 57 that are connected to the via hole conductors 56 described above.
[0079] A coil pattern 58, which constitutes part of the inductance L2, is formed on the ceramic green sheet 37, and a via-hole conductor 59 is provided at one end thereof. The other end of the coil pattern 58 is connected to the aforementioned via-hole conductor 57.
[0080] A coil pattern 60, which constitutes part of the inductance L2, is formed on the ceramic green sheet 38, and a lead pattern 61 is formed extending from one end of the coil pattern 60. The other end of the coil pattern 60 is connected to the via-hole conductor 59 mentioned above.
[0081] In forming the coil patterns 41, 44, 58 and 60, lead patterns 42, 48, 49, 54, 55 and 61, via-hole conductors 43, 45, 46, 50, 52, 56, 57 and 59, and capacitor patterns 47, 51 and 53 as wiring conductors as described above, a conductive paste mainly composed of copper or silver is used, and screen printing, for example, is applied to apply this conductive paste.
[0082] To obtain the raw laminate 22, ceramic green sheets 28-40 are stacked in the order shown in Figure 3 and then pressed in the thickness direction.
[0083] Subsequently, the raw laminate 22 can be fired at a temperature of 1000°C or lower, for example, 800-1000°C, to obtain the component body 23 shown in Figure 1. Here, if the wiring conductor is mainly composed of copper, the firing is carried out in a non-oxidizing atmosphere such as a nitrogen atmosphere or a low-oxygen atmosphere, and if it is mainly composed of silver, it is carried out in an oxidizing atmosphere such as air. Alternatively, the firing atmosphere may be a reducing atmosphere.
[0084] Next, terminal electrodes 24 to 27 are formed on the outer surface of the component body 23. For the formation of these terminal electrodes 24 to 27, for example, a conductive paste mainly composed of copper or silver is applied and baked, or a thin film formation method such as vapor deposition, plating or sputtering is applied.
[0085] As described above, the LC filter 21 can be obtained. With this LC filter 21, each of the ceramic green sheets 28 to 40 is made using the glass ceramic composition according to the first embodiment of the present invention, that is, each of the ceramic green sheets 28 to 40 is made of the glass ceramic sintered body according to the second to fourth embodiments of the present invention, so in the component body 23, ε r Furthermore, it is possible to achieve a high Qf value and a low TCC.
[0086] In the above description, it was stated that each of the ceramic green sheets 28 to 40 is made using the glass ceramic composition according to the first embodiment of the present invention. However, among the ceramic green sheets 28 to 40, it is preferable that ceramic green sheets 33 and 34, which directly contribute to the composition of capacitance C, be made using the glass ceramic composition according to the first embodiment of the present invention. That is, it is preferable that ceramic green sheets 33 and 34 are made from glass ceramic sintered bodies according to the second to fourth embodiments of the present invention.
[0087] The electronic components for which the glass ceramic composition and glass ceramic sintered body according to the present invention can be used are not limited to the LC filter 21 shown in the figure. For example, the glass ceramic composition and glass ceramic sintered body according to the present invention can also be applied to various multilayer ceramic substrates such as multilayer ceramic substrates for multi-chip modules and multilayer ceramic substrates for hybrid ICs, or various composite electronic components on which electronic components are mounted, and even to various chip-type multilayer electronic components such as chip-type multilayer capacitors and chip-type multilayer dielectric antennas.
[0088] This specification discloses the following:
[0089] <1> A glass-ceramic composition comprising glass containing Li2O, MgO, SrO, B2O3, SiO2, and ZnO, and aggregate, A glass ceramic composition comprising 9% to 14% by weight of the glass, based on 100% by weight of the glass ceramic composition, and comprising, as aggregate, 80% to 86% by weight of ZrO2, 2% to 6% by weight of CaTiO3, and at least one of BaCO3 and Al2O3, based on 1% to 4% by weight.
[0090] <2> The glass has a Li2O content of 3% by weight or more and 15% by weight or less. The MgO content is 20% by weight or more and 50% by weight or less. The SrO content is 5% by weight or more and 25% by weight or less. The B2O3 content is 15% by weight or more and 30% by weight or less. The SiO2 content is 10% by weight or more and 35% by weight or less. The ZnO content is 6% by weight or more and 20% by weight or less. <1> The glass ceramic composition described above.
[0091] <3> <1> or <2> An electronic component comprising a glass-ceramic layer made of a glass-ceramic sintered body obtained by firing the glass-ceramic composition described above.
[0092] <4> The aforementioned electronic component is an LC filter. <3> The electronic components listed.
[0093] <5> A glass ceramic sintered body containing Zr, Ca, Ti, Ba, Li, Mg, Sr, B, Si and Zn, The ZrO2 content is 80% by weight or more and 86% by weight or less. The CaTiO3 content is 2% by weight or more and 6% by weight or less. The BaO content is 0.78% by weight or more and 3.14% by weight or less. The Li2O content is 0.3% by weight or more and 1.5% by weight or less. The MgO content is 2% by weight or more and 5% by weight or less. The SrO content is 0.5% by weight or more and 2.5% by weight or less. The B2O3 content is 1.5% by weight or more and 3% by weight or less. The SiO2 content is 1% by weight or more and 3.5% by weight or less. A glass ceramic sintered body having a ZnO content of 0.6% by weight or more and 2% by weight or less.
[0094] <6> A glass ceramic sintered body containing Zr, Ca, Ti, Al, Li, Mg, Sr, B, Si and Zn, The ZrO2 content is 80% by weight or more and 86% by weight or less. The CaTiO3 content is 2% by weight or more and 6% by weight or less. The Al2O3 content is 1% by weight or more and 4% by weight or less. The Li2O content is 0.3% by weight or more and 1.5% by weight or less. The MgO content is 2% by weight or more and 5% by weight or less. The SrO content is 0.5% by weight or more and 2.5% by weight or less. The B2O3 content is 1.5% by weight or more and 3% by weight or less. The SiO2 content is 1% by weight or more and 3.5% by weight or less. A glass ceramic sintered body having a ZnO content of 0.6% by weight or more and 2% by weight or less.
[0095] <7> A glass ceramic sintered body containing Zr, Ca, Ti, Ba, Al, Li, Mg, Sr, B, Si and Zn, The ZrO2 content is 80% by weight or more and 86% by weight or less. The CaTiO3 content is 2% by weight or more and 6% by weight or less. The BaO content is 0.78% by weight or more and 2.35% by weight or less. The Al2O3 content is 1% by weight or more and 3.01% by weight or less. The Li2O content is 0.3% by weight or more and 1.5% by weight or less. The MgO content is 2% by weight or more and 5% by weight or less. The SrO content is 0.5% by weight or more and 2.5% by weight or less. The B2O3 content is 1.5% by weight or more and 3% by weight or less. The SiO2 content is 1% by weight or more and 3.5% by weight or less. A glass ceramic sintered body having a ZnO content of 0.6% by weight or more and 2% by weight or less.
[0096] <8> <5> from <7> An electronic component comprising a glass-ceramic layer made of a glass-ceramic sintered body as described in any one of the above.
[0097] <9> The aforementioned electronic component is an LC filter. <8> The electronic components listed. [Examples]
[0098] The following are examples that more specifically disclose the glass-ceramic composition and glass-ceramic sintered body of the present invention. However, the present invention is not limited to these examples.
[0099] (A) Preparation of glass powder As borosilicate glass powder to be included in the glass ceramic composition, glass with the composition shown in Table 1 below was prepared by the following method. First, the glass raw material powders were mixed and placed in a Pt-Rh crucible, where they were melted in an air atmosphere at 1650°C for more than 6 hours. Then, the resulting molten material was rapidly cooled to produce cullet. After coarsely grinding the cullet, it was placed in a container with an organic solvent and PSZ balls (diameter: 5 mm) and mixed in a ball mill. By adjusting the grinding time during mixing in the ball mill, glass powder with a median particle size of 1 to 2 μm was obtained. Here, "median particle size" refers to the median particle size D50 measured by laser diffraction and scattering. Note that in Table 1, those marked with an asterisk (*) next to the "glass symbol" are glass powders whose composition is outside the range of the glass ceramic sintered body of the present invention when using that glass powder.
[0100] (B) Preparation of the green sheet As an aggregate (filler) component, with a specific surface area of 30 m² 2 / g ZrO2 powder, also 4m 2 CaTiO3 powder / g, also 2m 2 BaCO3 powder / g, also 7m 2 Al2O3 powder was prepared in quantities of / g. Here, "specific surface area" refers to the value measured by the BET method. Next, aggregate component powder, glass powder, and dispersant were placed in a toluene / ethanol mixed solvent in the ratios shown in Table 2 below, and mixed with PSZ balls (diameter: 5 mm) in a ball mill. A butyral-based binder solution and plasticizer dissolved in the toluene / ethanol mixed solvent were then added and mixed further to obtain the desired slurry. The slurry was formed onto a carrier film using a doctor blade and dried to obtain two types of green sheets with thicknesses of 15 μm and 50 μm.
[0101] (C) Preparation and evaluation of evaluation samples The following methods were used to prepare and evaluate the samples for evaluation.
[0102] (1) Evaluation of sinterability and acid resistance Samples for evaluating sinterability and acid resistance were prepared using the following procedure. Twenty 50 μm thick green sheets, cut to 78 mm x 58 mm, were laminated and pressed using hydrostatic pressure at 160 MPa to create a compressed body. This compressed body was then cut into 35 mm x 6 mm pieces, and fired at 980 °C for 180 minutes in a reducing atmosphere to obtain the desired sample. Sample numbers marked with an asterisk (*) in Table 2 are samples whose sintered bodies have compositions outside the range of glass ceramic sintered bodies of the present invention.
[0103] After firing, the samples were immersed in Super Check staining penetrant (Marktec) for 1 minute, thoroughly rinsed with running water, dried in a 120°C oven for 120 minutes, and then visually inspected for discoloration. Samples showing discoloration were judged to be insufficiently sintered and were marked with an "X" in Table 2; no further acid resistance evaluation was performed.
[0104] After confirming its sinterability, the weight of the sample was measured using an electronic balance. The sample was then placed in a 5 ml glass bottle filled with an acidic aqueous solution adjusted to pH 4 using sulfuric acid, sealed, and left in a 73°C oven for 24 hours. Afterward, the sample was removed, thoroughly rinsed with running water, dried in a 120°C oven for 120 minutes, and then weighed again. The elution rate into the acidic aqueous solution was calculated according to the following formula. Samples with an elution rate exceeding 0.1% were deemed unsuitable for acid resistance and are indicated with an "X" in Table 2. Dissolution rate (%) = (Weight before dissolution test - Weight after dissolution test) / Weight before dissolution test × 100
[0105] (2) ε r Measurement of relative permittivity and Qf value (reciprocal of dielectric loss × frequency) ε r Samples for evaluating the Qf value were prepared using the following procedure: Six 50 μm thick green sheets, each cut to 78 mm x 58 mm, were stacked and pressed using hydrostatic pressure at 160 MPa to create a compressed body. This compressed body was then cut into 42 mm x 35 mm pieces, and fired at 980 °C for 180 minutes in a reducing atmosphere to obtain the desired sample. Sample numbers that failed the sinterability or acid resistance evaluation were excluded from the evaluation.
[0106] Using the calcined sample, TE was performed in accordance with JIS R 1641. 011 Using the mode cavity resonator method, ε in the millimeter wave band (25 GHz) r The Q-factor (reciprocal of dielectric loss) was measured. Two samples were measured for each level, and the average was used as the measured value. ε r Levels below 15 were excluded from the scope of this invention. The Qf value was calculated according to the following formula, and levels below 10,000 GHz were excluded from the scope of this invention. Qf value (GHz) = Q value × measurement frequency
[0107] (3) Measurement of TCC (Capacitance Change Rate) Samples for evaluating TCC were prepared using the following procedure. A 15 μm thick sheet was cut to 47 mm x 24 mm, and a copper-based electrode paste was screen printed onto both sides of the sheet and dried at 60°C for 30 minutes. The applied shape consisted of a 3 mm x 3 mm counter electrode section with a pull-out electrode section, and 10 identical shapes were formed simultaneously in a single print. The printing position was adjusted so that all counter electrode sections were in the same position on both sides of the sheet.
[0108] Next, a 50 μm thick sheet was cut to 47 mm x 24 mm, and eight sheets were laminated on one main surface side and eight sheets on the other main surface side of the previously printed and dried 15 μm thick sheet. A compressed body was then fabricated by hydrostatic pressing at 160 MPa. Subsequently, the sheets were cut into 7.5 mm x 5 mm pieces so that the lead-out electrode portion was exposed at the end, and a Cu-based end electrode paste was applied to the end of each piece to cover the lead-out electrode portion. Finally, the samples were fired at 980°C for 180 minutes in a reducing atmosphere to obtain the desired samples. Sample numbers that failed due to poor sinterability or acid resistance were excluded from this evaluation.
[0109] TCC measurements were performed using the following procedure: Ten sintered samples for each level were mounted on a jig equipped with terminals inside a constant temperature bath, and capacitance measurements were performed using an LCR meter at 5°C intervals within a temperature range of -50°C to 100°C. The measurement conditions were a frequency of 1 kHz, a voltage of 1 V, and no DC bias.
[0110] Next, the TCC values for the ranges from -40°C to 20°C and from 20°C to 85°C were determined according to the following formulas. Table 2 shows the value with the highest absolute value of TCC among 10 samples at each level, and samples with an absolute value exceeding 75 were excluded from the scope of this invention. • Volume value at 20℃: C0 • Volume value at -40℃: C1 • Volume value at 85℃: C2 TCC (ppm / °C) from -40°C to 20°C = (C1-C0) / C0 / (-40-20) × 1,000,000 • TCC (ppm / °C) from 20°C to 85°C = (C2-C0) / C0 / (85-20) × 1,000,000
[0111] [Table 1]
[0112] [Table 2]
[0113] Table 1 shows the composition ratios of the glass powders. Compositions G8, G11, and G15, marked with an asterisk (*), exhibited a phenomenon called devitrification, where part of the glass crystallized, and were therefore not evaluated further. In addition, other compositions marked with an asterisk (*) did not satisfy the target properties when fired with fillers.
[0114] Table 2 shows a summary of the evaluation results for each sample. As mentioned above, sample numbers marked with an asterisk (*) indicate that their sintered bodies are not subject to the glass-ceramic sintered bodies of the present invention. For the other sample numbers, it was confirmed that the following characteristics were satisfied. • Sintering is possible at temperatures below 1000°C. • Excellent acid resistance ·ε r 15 or more • Qf value is 10000 or higher • The absolute value of TCC at -40°C to 20°C and 20°C to 85°C is 75 ppm / °C or less.
[0115] Sample numbers marked with an asterisk (*) did not meet the above characteristics due to the following factors. • Sample No. 1: Because it used glass G1 with less than 3% by weight of Li2O, the sinterability was low (poor). • Sample No. 4: Because it used glass G4 with a Li2O content exceeding 15% by weight, its acid resistance was low (poor). • Sample No. 5: The Qf value was low because it used glass G5 with less than 20% by weight of MgO. • Sample number 9: The Qf value was low because it used glass G10 with a SrO content exceeding 25% by weight. • Sample No. 12: Because it used glass G14 with a B2O3 content exceeding 30% by weight, its acid resistance was low (poor). • Sample No. 15: Because it used glass G18 with a SiO2 content exceeding 35% by weight, its sinterability was low (poor). • Sample No. 16: The Qf value was low because it used glass G19 with less than 6% by weight of ZnO. • Sample No. 19: Because it uses glass G22 with a ZnO content exceeding 20% by weight, its acid resistance was low (poor). • Sample No. 23: The amount of glass G25 added was less than 9% by weight, resulting in poor sinterability. • Sample No. 27: The amount of glass G25 added exceeds 14% by weight, ε r The result was low. • Sample No. 28: The amount of CaTiO3 added was less than 2% by weight, resulting in poor sinterability. • Sample No. 31: The absolute value of TCC was high (larger on the negative side) because the amount of CaTiO3 added exceeded 6% by weight. • Sample No. 32: Because the amount of at least one of BaCO3 and Al2O3 added was less than 1% by weight, the acid resistance was low (poor). • Sample number 36: Because the amount of BaCO3 added exceeded 4% by weight, the Qf value was low and the TCC was high. • Sample No. 39: Since the amount of Al2O3 added exceeds 4% by weight, ε r The result was low.
[0116] Based on the above results, it can be seen that glass-ceramic compositions having the following compositions result in sintered bodies with high relative permittivity and Qf value, and small capacitance change rate.
[0117] (Composition of formulation) • ZrO2 (80-86 wt%) / CaTiO3 (2-6 wt%) / At least one of BaCO3 and Al2O3 (1-4 wt%) / Glass (9-14 wt%)
[0118] (Glass composition) ·Li2O(3~15wt%) / MgO(20~50wt%) / SrO(5~25wt%) / B2O3(15~30wt%) / SiO2(10~35wt%) / ZnO(6~20wt%)
[0119] As shown in Table 2, the examples of the glass ceramic composition of the present invention are described in terms of the pre-firing composition (preparation composition). However, BaCO3 exists as BaO after firing. Therefore, the ratio of each component after firing was calculated. The composition ratios corresponding to each sample number are shown in Table 3 below.
[0120] Note that MgO and SiO2 may partially react to form Mg2SiO4, but based on the above reaction equation (1), they will be treated as equivalent here.
[0121] Tables 2 and 3 show that glass ceramics (sintered glass ceramics) with the following compositions after firing have high relative permittivity and Qf value, and a small capacitance change rate.
[0122] (Composition of the sintered body) ·ZrO2(80~86wt%) / CaTiO3(2~6wt%) / BaO(0.78~3.14wt%) / Li2O(0.3~1.5wt%) / Mg O(2~5wt%) / SrO(0.5~2.5wt%) / B2O3(1.5~3wt%) / SiO2(1~3.5wt%) / ZnO(0.6~2wt%) ·ZrO2(80~86wt%) / CaTiO3(2~6wt%) / Al2O3(1~4wt%) / Li2O(0.3~1.5wt%) / MgO( 2~5% by weight) / SrO(0.5~2.5% by weight) / B2O3(1.5~3% by weight) / SiO2(1~3.5% by weight) / ZnO(0.6~2% by weight) ·ZrO2(80~86wt%) / CaTiO3(2~6wt%) / BaO(0.78~2.35wt%) / Al2O3(1~3.01wt%) / Li2O(0.3~1. 5% by weight) / MgO(2~5% by weight) / SrO(0.5~2.5% by weight) / B2O3(1.5~3% by weight) / SiO2(1~3.5% by weight) / ZnO(0.6~2% by weight)
[0123] [Table 3] [Explanation of Symbols]
[0124] 43, 45, 46, 50, 52, 56, 57, 59 Via hole conductor 21 LC filter 23. Main body of the component 24~27 Terminal electrode 28-40 Ceramic Green Sheet Coil patterns 41, 44, 58, 60 Drawer patterns 42, 48, 49, 54, 55, 61 Capacitor patterns 47, 51, 53
Claims
1. Li 2 O, MgO, SrO, B 2 O 3 SiO 2 A glass ceramic composition comprising glass containing ZnO and aggregate, Based on 100% by weight of the glass-ceramics composition, the glass is contained in an amount of 9% by weight or more and 14% by weight or less, and as the aggregate, 80% by weight or more and 86% by weight or less of ZrO 2 and 2% by weight or more and 6% by weight or less of CaTiO 3 and 1% by weight or more and 4% by weight or less of BaCO 3 and at least one of Al 2 O 3 is included, The glass has a Li₂O content of 3% by weight or more and 15% by weight or less. The MgO content is 20% by weight or more and 50% by weight or less. The SrO content is 5% by weight or more and 25% by weight or less. The B2O3 content is 15% by weight or more and 30% by weight or less. The SiO₂ content is 10% by weight or more and 35% by weight or less. A glass ceramic composition having a ZnO content of 6% by weight or more and 20% by weight or less.
2. An electronic component comprising a glass-ceramic layer made of a glass-ceramic sintered body obtained by firing the glass-ceramic composition described in claim 1.
3. The electronic component according to claim 2, wherein the electronic component is an LC filter.
4. A glass ceramic sintered body containing Zr, Ca, Ti, Ba, Li, Mg, Sr, B, Si and Zn, ZrO 2 The content is 80% by weight or more and 86% by weight or less. CaTiO 3 The content is 2% by weight or more and 6% by weight or less. The BaO content is 0.78% by weight or more and 3.14% by weight or less. Li 2 The O content is 0.3% by weight or more and 1.5% by weight or less. The MgO content is 2% by weight or more and 5% by weight or less. The SrO content is 0.5% by weight or more and 2.5% by weight or less. B 2 O 3 The content is 1.5% by weight or more and 3% by weight or less. SiO 2 The content is 1% by weight or more and 3.5% by weight or less. A glass ceramic sintered body having a ZnO content of 0.6% by weight or more and 2% by weight or less.
5. A glass ceramic sintered body containing Zr, Ca, Ti, Al, Li, Mg, Sr, B, Si and Zn, ZrO 2 The content is 80% by weight or more and 86% by weight or less. CaTiO 3 The content is 2% by weight or more and 6% by weight or less. Al 2 O 3 The content is 1% by weight or more and 4% by weight or less. Li 2 The O content is 0.3% by weight or more and 1.5% by weight or less. The MgO content is 2% by weight or more and 5% by weight or less. The SrO content is 0.5% by weight or more and 2.5% by weight or less. B 2 O 3 The content is 1.5% by weight or more and 3% by weight or less. SiO 2 The content is 1% by weight or more and 3.5% by weight or less. A glass ceramic sintered body having a ZnO content of 0.6% by weight or more and 2% by weight or less.
6. A glass ceramic sintered body containing Zr, Ca, Ti, Ba, Al, Li, Mg, Sr, B, Si and Zn, ZrO 2 The content is 80% by weight or more and 86% by weight or less. CaTiO 3 The content is 2% by weight or more and 6% by weight or less. The BaO content is 0.78% by weight or more and 2.35% by weight or less. Al 2 O 3 The content is 1% by weight or more and 3.01% by weight or less. Li 2 The O content is 0.3% by weight or more and 1.5% by weight or less. The MgO content is 2% by weight or more and 5% by weight or less. The SrO content is 0.5% by weight or more and 2.5% by weight or less. B 2 O 3 The content is 1.5% by weight or more and 3% by weight or less. SiO 2 The content is 1% by weight or more and 3.5% by weight or less. A glass ceramic sintered body having a ZnO content of 0.6% by weight or more and 2% by weight or less.
7. An electronic component comprising a glass-ceramic layer made of a glass-ceramic sintered body according to any one of claims 4 to 6.
8. The electronic component according to claim 7, wherein the electronic component is an LC filter.