Table member and method for producing same

Abstract

A table member according to the present disclosure includes a base part having a first surface, which is the table surface side, and a plurality of raised parts which protrude from the first surface and which have a top surface, which is a table surface on which a vacuumed object is placed. An annular groove surrounding each raised part is located at a boundary part between each raised part and the first surface. A low-reflection film is located to continuously cover the top surface of the raised parts, the side surfaces of the raised parts, the wall surface inside the annular groove, and the first surface.

Description

Mounting member and manufacturing method thereof

[0001] The present disclosure relates to a mounting member and a method for manufacturing the same.

[0002] Conventionally, as a device for fixing a semiconductor wafer or other object to be clamped, a substrate chuck (pin chuck) has been used, in which a substrate is placed on a plurality of pins formed on the surface of the substrate-holding side and held by suction, as described in, for example, Patent Document 1. The substrate chuck described in Patent Document 1 has an anti-reflection coating formed on the surface of the chuck body on the substrate-holding side to achieve low reflection. However, corners (R) (curved portions formed at the corners of the recessed portions) formed due to pin processing and anti-reflection coating formation remain at the bases (corners) of the pins, resulting in a large curvature of the anti-reflection coating surface. As a result, in devices that perform exposure or visual inspection of transparent objects, for example, stray light from the corners is likely to cause uneven exposure and inspection defects.

[0003] Japanese Patent Application Publication No. 5-234843

[0004] The mounting member according to the present disclosure includes a base having a first surface that serves as the mounting surface, and a plurality of protrusions that protrude from the first surface and have top surfaces that serve as mounting surfaces for an adsorbed object. An annular groove is located at the boundary between the protrusions and the first surface, surrounding the protrusions. A low-reflection coating is located so as to continuously cover the top surfaces of the protrusions, the side surfaces of the protrusions, the inner wall surface of the annular groove, and the first surface.

[0005] The manufacturing method of the mounting member according to the present disclosure includes the steps of preparing a base having a first surface that is the mounting surface side, forming a plurality of convex portions that protrude from the first surface and have top surfaces that are mounting surfaces for the adsorbed body, forming annular grooves that surround the convex portions at the boundaries between the convex portions and the first surface, and continuously coating the top surfaces of the convex portions, the side surfaces of the convex portions, the inner wall surfaces of the annular grooves, and the first surface with a low-reflection coating.

[0006] Fig. 2 is a plan view showing a mounting member according to an embodiment of the present disclosure. Fig. 3 is an explanatory view showing a cross section taken along line XX shown in Fig. 1. Fig. 4 is an explanatory view showing another form of the cross section taken along line XX shown in Fig. 1. Fig. 5 is a plan view showing a mounting member according to another embodiment of the present disclosure. Fig. 6 is a plan view showing a mounting member according to yet another embodiment of the present disclosure.

[0007] As described above, in conventional substrate chucks such as those described in Patent Document 1, corners (rounded corners) formed at the bases (corners) of the pins due to pin processing and anti-reflection coating formation remain, resulting in a large curvature of the anti-reflection coating surface. Therefore, in devices that perform exposure or visual inspection of transparent substrates, for example, stray light from the rounded corners is likely to cause uneven exposure or inspection defects. Therefore, there is a need for a mounting member that can reduce stray light in the irradiated light and improve the accuracy of exposure and inspection.

[0008] According to the mounting member of the present disclosure, it is possible to reduce stray light of the irradiated light and improve the accuracy of exposure and inspection. Furthermore, according to the manufacturing method of the mounting member of the present disclosure, it is possible to provide a mounting member that reduces stray light of the irradiated light and improves the accuracy of exposure and inspection.

[0009] The mounting member according to the present disclosure will be described with reference to FIGS.

[0010] As shown in Figures 1 and 2, a mounting member 10 according to an embodiment of the present disclosure has a structure in which a protrusion 2 is located on a first surface 11 of a base 1. The first surface 11 is a mounting surface on which an object to be attached is placed. Figure 1 is a plan view showing a mounting member 10 according to an embodiment of the present disclosure. Figure 2 is an explanatory diagram showing a cross section taken along line X-X shown in Figure 1.

[0011] The base 1 is the main body of the mounting member 10 and is required to have the property of preventing deformation of the mounted object. Therefore, the base 1 is preferably made of a material with high rigidity, hardness, and strength. Examples of such materials include ceramics. Examples of ceramics include ceramics whose main components include oxides such as aluminum oxide (alumina), titanium oxide, and zinc oxide, carbides such as silicon carbide, and nitrides such as silicon nitride, boron nitride, and aluminum nitride.

[0012] In this specification, the term "main component" refers to a component that accounts for 50% by mass or more when the total of the components constituting the ceramic is 100% by mass. Each component contained in the ceramic is identified using an X-ray diffractometer using CuKα radiation, and the content of each component can be determined using, for example, an ICP (Inductively Coupled Plasma) emission spectrometer or an X-ray fluorescence analyzer.

[0013] The shape of the base 1 is not limited. When viewed in a plane, the base 1 may have a circular shape, an elliptical shape, or a polygonal shape (such as a triangular, rectangular, pentagonal, or hexagonal shape). In FIG. 1 , the base 1 has a circular shape when viewed in a plane. The size of the base 1 is appropriately set taking into consideration the use of the mounting member 10 and the object to be adsorbed. The size of the base 1 may have a diameter of, for example, 100 mm or more and 500 mm or less when viewed in a plane. When the base 1 is elliptical, both the major axis and the minor axis may be within the above range. When the base 1 is polygonal, the length of one side may be, for example, 100 mm or more and 500 mm or less. The thickness of the base 1 is not limited and may be, for example, a thickness that appears plate-like. The thickness of the base 1 may be, for example, 2 mm or more and 20 mm or less.

[0014] The protrusions 2 are formed on the first surface 11 of the base 1 and adsorb and support the adsorbed object. To prevent the adsorbed object from coming into contact with the base 1, the adsorbed object is supported by the multiple protrusions 2. By adsorbing and supporting the adsorbed object by the protrusions 2, fewer particles are trapped between the adsorbed object and the mounting surface than when the adsorbed object is directly adsorbed and supported by the base 1. As a result, the flatness of the adsorbed object is less likely to deteriorate.

[0015] Like the base 1, the protrusions 2 are preferably made of a material having high rigidity, hardness, and strength. Examples of such materials include ceramics. For example, the base 1 and the protrusions 2 may be made of the same ceramic material or different ceramic materials. The base 1 and the protrusions 2 may be integrally formed, or may be formed separately, with the protrusions 2 bonded to the first surface 11 of the base 1. For example, if the base 1 and the protrusions 2 are made of the same ceramic material, there will be no difference in their thermal expansion coefficients. As a result, deformation when heat is applied will be small.

[0016] The shape of the protrusions 2 is not limited and may be a frustum shape (a truncated cone shape or a truncated pyramid shape) or a columnar shape (a cylindrical shape or a rectangular column shape). The height of the protrusions 2 is appropriately set in consideration of the use of the mounting member 10, the size of the base 1, the adsorbed object, etc., and may be, for example, 0.1 mm or more and 0.5 mm or less. The size of the top surface 21 of the protrusions 2 is also appropriately set in consideration of the use of the mounting member 10, the size of the base 1, the adsorbed object, etc. The size of the top surface 21 of the protrusions 2 may be, for example, a diameter of 0.2 mm or more and 1 mm or less when viewed from above. When the top surface 21 of the protrusions 2 is elliptical, it is sufficient that both the major axis and the minor axis are within the above ranges. When the top surface 21 of the protrusions 2 is polygonal, the length of one side may be, for example, 0.1 mm or more and 0.5 mm or less.

[0017] The mounting member 10 mounts the object by suction from the surface opposite to the first surface 11, which is the mounting surface side. Therefore, the base 1 may have a suction hole that opens to the first surface 11.

[0018] The colors of the base 1 and the protrusions 2 are not limited and may be, for example, black. By making the base 1 and the protrusions 2 black, lower reflection can be achieved, and stray light of the irradiated light can be further reduced. "Black" means that the lightness index L* in the CIE 1976 L*a*b* color space is 50 or less.

[0019] In the mounting member 10 according to one embodiment, an annular groove 3 is located at the boundary between the base 1 and the protrusion 2, surrounding the protrusion 2. The presence of such an annular groove 3 makes it possible to reduce the curvature (curvature of the corner R1) of the low-reflection coating 4, which will be described later, at the boundary between the base 1 and the protrusion 2. As a result, the accuracy of exposure and inspection can be improved.

[0020] The annular groove 3 is not limited as long as it has a structure that can surround the protrusion 2, and may be formed, for example, according to the shape of the protrusion 2. Specifically, when the protrusion 2 has a truncated cone shape, the annular groove 3 may have a shape that surrounds the protrusion 2 in a circular ring shape, and when the protrusion 2 has a truncated pyramid shape, the annular groove 3 may have a shape that surrounds the protrusion 2 in a polygonal ring shape that corresponds to the shape of the base of the truncated pyramid.

[0021] The depth of the annular groove 3 is not limited and may be, for example, greater than the film thickness of the low-reflection coating 4. When the depth of the annular groove 3 is greater than the film thickness of the low-reflection coating 4, the volume of the annular groove 3 increases. Therefore, the film material is more likely to enter the annular groove 3 when forming the low-reflection coating 4. As a result, the curvature of the low-reflection coating 4 can be reduced. Furthermore, the deeper the annular groove 3, the more likely it is that a depression will form on the surface of the low-reflection coating 4 located in the annular groove 3, as shown in FIG. 3 . As a result, stray light of the irradiated light can be further reduced. FIG. 3 is an explanatory diagram showing another form of the cross section taken along line X-X in FIG. 1 . The depth of the annular groove 3 may be two or more times greater than the film thickness of the low-reflection coating 4. The depth of the annular groove 3 may be, for example, 20 μm to 200 μm, or 50 μm to 150 μm.

[0022] The width of the annular groove 3 is not limited and may be, for example, larger than the film thickness of the low-reflection coating 4. When the width of the annular groove 3 is larger than the film thickness of the low-reflection coating 4, the volume of the annular groove 3 increases. Therefore, the curvature of the low-reflection coating 4 can be made smaller. Furthermore, the wider the width of the annular groove 3, the more likely it is that a depression will be formed on the surface of the low-reflection coating 4 located in the annular groove 3. As a result, stray light of the irradiated light can be further reduced. The width of the annular groove 3 may be, for example, 10 μm or more and 100 μm or less, or 20 μm or more and 80 μm or less.

[0023] In one embodiment of the mounting member 10, the low-reflection coating 4 continuously covers the top surface 21 of the protrusion 2, the side surface 22 of the protrusion 2, the inner wall surface of the annular groove 3, and the first surface 11 of the base 1. The low-reflection coating 4 is not limited, and may have a reflectance lower than that of the base 1 for light (ultraviolet, visible, or infrared) irradiated during use of the mounting member 10. The low-reflection coating 4 may also have properties other than optical properties. Examples of the low-reflection coating 4 include conductive films and hard films. Specifically, the low-reflection coating 4 may include non-metallic films (e.g., diamond-like carbon (DLC) films), organic compound films (e.g., black Teflon® coated films), metal films (e.g., black nickel plated films), and inorganic compound films (e.g., chromium oxide thermal spray films). Using a DLC film as the low-reflection coating 4 can impart wear resistance to the resulting mounting member 10.

[0024] The low-reflection coating 4 may have a blackish color. When the low-reflection coating 4 has a blackish color, it is possible to achieve even lower reflection and further reduce stray light of the irradiated light.

[0025] The thickness of the low-reflection coating 4 is not limited. The low-reflection coating 4 may have a thickness of, for example, 10 μm or more and 40 μm or less. The thickness of the low-reflection coating 4 does not include the thickness of the portion filling the annular groove 3. In other words, it is the thickness of the portion covering the first surface 11 of the base 1 and the top surface 21 and side surface 22 of the protrusion 2.

[0026] The low-reflection coating 4 is formed on the base 1 having the annular groove 3, and continuously covers the top surface 21 of the protrusion 2, the side surface 22 of the protrusion 2, the inner wall surface of the annular groove 3, and the first surface 11. This reduces the curvature of the low-reflection coating 4 (the curvature of the corner R1) at the base of the protrusion 2. Therefore, as described above, stray light of the irradiated light can be reduced. As a result, the accuracy of exposure and inspection can be improved.

[0027] The curvature of the low-reflective coating 4 (curvature of the corner R1), i.e., the radius of curvature (first radius of curvature) of the boundary (corner R1) between the surface of the portion of the low-reflective coating 4 covering the side surface 22 of the convex portion 2 and the surface of the portion covering the base 1, may be 50 μm or less. The radius of curvature (first radius of curvature) of the corner R1 of the low-reflective coating 4 may be smaller than the radius of curvature (second radius of curvature) of the boundary R2 between the inner wall surface on the convex portion 2 side and the bottom surface of the annular groove 3. With this configuration, stray light of the irradiated light can be further reduced, and peeling of the low-reflective coating 4 can be reduced.

[0028] The radius of curvature of corner R1 can be determined by observing the connecting portion of the two surfaces that form corner R1 (the surface covering side surface 22 of protrusion 2 and the surface covering base 1) with a laser microscope, dividing the area into multiple regions with a width of 1 μm, and finding the minimum radius of a circle found by circle fitting each region. Boundary R2 can also be determined in the same manner as above by observing the connecting portion of the two surfaces that form boundary R2 (the inner surface and bottom surface of annular groove 3).

[0029] The low-reflection coating 4 has a substantially uniform thickness on the side surface 22 of the convex portion 2 from the top surface 21 of the convex portion 2 to the annular groove 3. This means that the curvature of the low-reflection coating 4 (the curvature of the corner R1) is small at the base of the convex portion 2. With this configuration, stray light of the irradiated light can be reduced, as described above.

[0030] The base 1 has an air vent (not shown) opening to the first surface 11. The space formed between the mounting member 10 (first surface 11 and protrusion 2) and the object to be attracted is reduced in pressure through the air vent, thereby adsorbing the object. As shown in FIG. 1 , a seal portion 12 may be located on the periphery of the first surface 11 of the base 1. The presence of the seal portion 12 allows for greater pressure reduction in the space surrounded by the first surface 11, seal portion 12, and object to be attracted when the object to be attracted is placed on the mounting member 10 and attracted. As a result, the adsorption force is stronger, allowing the object to be placed more stably. To achieve this effect, the height of the seal portion 12 may be the same as that of the protrusion 2, for example. Furthermore, a low-reflection coating 4 may also be located on the top surface of the seal portion 12.

[0031] A second groove may be formed along the inner side surface of the seal portion 12 at the boundary between the seal portion 12 and the first surface 11. In this case, the curvature of the low-reflection coating 4 (the curvature of the corner R1) can be reduced even at the boundary between the base 1 and the seal portion 12. As a result, the accuracy of exposure and inspection can be improved.

[0032] As shown in Figures 4 and 5, the mounting member according to the present disclosure may further include mesh grooves 5 located on the first surface 11 of the base 1. The low-reflection coating 4 is divided by the mesh grooves 5. Figure 4 is a plan view showing a mounting member according to another embodiment of the present disclosure. Figure 5 is a plan view showing a mounting member according to yet another embodiment of the present disclosure.

[0033] The mesh grooves 5 are not limited as long as the grooves are arranged in a mesh pattern. For example, in the mounting member 20 shown in FIG. 4 , grid-like grooves 5a are arranged as the mesh grooves 5, and in the mounting member 30 shown in FIG. 5 , spider web-like grooves 5b are arranged as the mesh grooves 5. The mesh grooves 5 may have a regular or irregular mesh pattern when viewed from above. When mesh grooves 5 are arranged, it is sufficient that at least one protrusion 2 is arranged in one mesh when viewed from above, as shown in FIGS. 4 and 5 .

[0034] The presence of such mesh grooves 5 reduces distortion caused by the formation of the low-reflection coating 4. Therefore, after the formation of the low-reflection coating 4, the flatness of the mounting surface for placing an object to be attracted can be further improved without the need for precision machining. The depth of the mesh grooves 5 may be, for example, greater than the film thickness of the low-reflection coating 4. Specifically, the depth of the mesh grooves 5 may be 50 μm or more and 150 μm or less. The width of the mesh grooves 5 may be, for example, 1 / 3 or more and 3 times or less the film thickness of the low-reflection coating 4. Specifically, the width of the mesh grooves 5 may be 20 μm or more and 60 μm or less.

[0035] A second low-reflection coating separate from the low-reflection coating 4 may be further positioned at the bottom of the mesh grooves 5. When the second low-reflection coating is positioned at the bottom of the mesh grooves 5, stray light of the irradiated light can be further reduced. As a result, the accuracy of exposure and inspection can be improved. Like the low-reflection coating 4, the second low-reflection coating may be a conductive film or a hard film, and may have a black or similar color.

[0036] When the reticulated groove 5 is viewed in cross section in the width direction, the wall surfaces of the reticulated groove 5 may be vertical or inversely tapered. In this specification, "inversely tapered" refers to a structure in which the width gradually increases from the opening to the bottom of the reticulated groove 5, and is also called a "dovetail groove." When the wall surfaces of the reticulated groove 5 have an inversely tapered shape, the width of the narrowest part of the reticulated groove 5 corresponds to the width of the reticulated groove 5. A reticulated groove 5 having such vertical or inversely tapered wall surfaces can be produced, for example, by adjusting the angle of the laser during laser processing.

[0037] Next, a method for manufacturing the mounting member of the present disclosure will be described. The manufacturing method of the mounting member 10 according to one embodiment of the present disclosure includes the following steps (a) to (d): (a) preparing a sintered body that will serve as the base 1 and has a first surface 11 that is the mounting surface side; (b) forming a plurality of protrusions 2 that protrude from the first surface 11 and have top surfaces 21 that are mounting surfaces for an adsorbed object; (c) forming annular grooves 3 that surround the protrusions 2 at the boundaries between the protrusions 2 and the first surface 11; and (d) continuously coating the top surfaces 21 of the protrusions 2, the side surfaces 22 of the protrusions 2, the inner wall surfaces of the annular grooves 3, and the first surface 11 with a low-reflection coating 4.

[0038] Step (a) is a step of preparing a base 1 having a first surface 11, which is the mounting surface side. As described above, the base 1 is formed of, for example, ceramics. An example of a method for manufacturing the base 1 containing alumina as a main component will be described below.

[0039] First, aluminum oxide (Al ２ O ３ ) powder and cobalt oxide (Co) as a coloring component ３ O ４ ) powder, iron oxide (Fe２ O ３ ) powder, nickel oxide (NiO) powder and titanium oxide (TiO ２ ) powder is prepared. Calcium carbonate (CaCO ３ ) powder, magnesium hydroxide (Mg(OH) ２ ) powder and silicon oxide (SiO ２ ) Prepare the powder.

[0040] Next, these powders are weighed in desired amounts to form primary raw material powder. For example, the sintering aid may be, for example, a mixture of calcium converted to CaO, magnesium converted to MgO, silicon converted to SiO, and the like, out of 100 mass % of all components constituting the ceramic sintered body. ２ The coloring component is determined by weighing out the cobalt in an amount of 0.6 mass % or more and 2 mass % or less, based on 100 mass % of all components constituting the ceramic sintered body. ３ O ４ The content of iron converted to Fe is 8 mass % or more and 12 mass % or less, ２ O ３ The content of nickel converted to NiO is 4% by mass or more and 6% by mass or less, the content of nickel converted to NiO is 3% by mass or more and 4% by mass or less, and the content of titanium converted to TiO ２ The content of aluminum oxide (Al) is 1% by mass or more and 2% by mass or less. ２ O ３ By setting the content of the coloring component within this range, it is possible to obtain a black alumina member (a lightness index L* in the CIE 1976 L*a*b* color space of 50 or less).

[0041] Next, 0.1 to 1 part by mass of a binder such as PEG (polyethylene glycol) and 100 parts by mass of a solvent are weighed out relative to 100 parts by mass of the primary raw material powder, and these are mixed and stirred together to obtain a slurry. The slurry is then spray-granulated using a spray granulation device (spray dryer) to obtain granules, which are then molded into a desired shape by powder press molding or isostatic press molding (rubber press method).

[0042] Next, the obtained molded body is subjected to cutting processing as necessary, and then sintered in an air (oxidizing) atmosphere, for example, at a temperature of 1300°C or higher and 1600°C or lower for a desired period of time, to obtain a plate-shaped sintered body that will become the base 1.

[0043] Next, both sides of the obtained base 1 may be subjected to flattening processing as necessary. Examples of flattening processing include grinding and lapping. Furthermore, air vents are formed through both sides of the base 1. By forming the air vents, the adsorption force can be strengthened, and the object to be adsorbed can be placed more stably.

[0044] Step (b) is a step of forming, on the base 1 obtained in step (a), a plurality of protrusions 2 protruding from the first surface 11 and having top surfaces 21 that serve as mounting surfaces for the adsorbate. The protrusions 2 are formed, for example, by partially removing the first surface 11 of the base 1 by cutting or grinding. Specifically, the first surface 11 of the base 1 may be subjected to laser processing and blasting using a carbon dioxide laser, YAG laser, ArF excimer laser, KrF excimer laser, XeCl excimer laser, or the like, so that the portions other than the laser-irradiated portions remain as the protrusions 2. When providing seal portions 12 as shown in FIG. 1 , the seal portions 12 may be formed simultaneously with the formation of the protrusions 2 in step (b).

[0045] Alternatively, a separately formed protrusion 2 may be adhered to the first surface 11 of the base 1. When the seal portion 12 is provided, the separately formed seal portion 12 may also be adhered to the first surface 11 of the base 1. In this case, the protrusion 2 and the seal portion 12 may be made of the same material (ceramics) as the base 1, or may be made of a different material (ceramics).

[0046] The top surface 21 of the protrusion 2 may be subjected to flattening processing as necessary. Examples of flattening processing include flat grinding and lapping. When the seal portion 12 is provided, the top surface of the seal portion 12 may also be subjected to flattening processing, similar to the top surface 21 of the protrusion 2.

[0047] Step (c) is a step of forming an annular groove 3 surrounding the protrusion 2 at the boundary between the protrusion 2 and the first surface 11. The annular groove 3 is formed by laser processing using, for example, a carbon dioxide laser, a YAG laser, an ArF excimer laser, a KrF excimer laser, or an XeCl excimer laser. The details of the annular groove 3 are as described above, and a detailed description thereof will be omitted. A process-affected layer may exist on the surfaces of the base 1, the protrusion 2, and the annular groove 3 formed in this manner. The process-affected layer is a layer containing many defects formed during processing and causes an increase in reflectivity and particle generation. In such cases, the process-affected layer may be removed by, for example, shot peening using fine polishing powder such as glass beads or ceramic beads.

[0048] Step (d) is a step of continuously coating the top surfaces 21 of the protrusions 2, the side surfaces 22 of the protrusions 2, the inner wall surfaces of the annular groove 3, and the first surface 11 with a low-reflection coating 4. For example, if the low-reflection coating 4 is a black Teflon (registered trademark) coat, it is formed by applying and baking a film material. The material, thickness, and other physical properties of the low-reflection coating 4 are as described above, and a detailed description thereof will be omitted.

[0049] By carrying out these steps (a) to (d), it is possible to obtain a mounting member 10 that can reduce stray light of the irradiated light and improve the accuracy of exposure and inspection.

[0050] Furthermore, to obtain the mounting members 20, 30 having the mesh grooves 5 as shown in Figures 4 and 5, the mesh grooves 5 may be formed when the annular groove 3 is formed in step (c). Specifically, the method may further include a step of forming the mesh grooves 5 on the first surface 11 to divide the low-reflection coating 4. The mesh grooves 5 may be formed, for example, before the first surface 11 is continuously coated with the low-reflection coating 4. Details of the mesh grooves 5 are as described above, and a detailed description thereof will be omitted. The formation of such mesh grooves 5 can reduce stress and deformation that occur during the formation of the low-reflection coating 4, and can reduce distortion due to the formation of the low-reflection coating 4.

[0051] When the low-reflection coating 4 is formed after the mesh grooves 5 are formed, the low-reflection coating 4 is formed so as to be divided by the mesh grooves 5. In other words, the low-reflection coating 4 located on the first surface 11 does not continue into the mesh grooves 5, and a second low-reflection coating that is separate from the low-reflection coating 4 is formed at the bottom of the mesh grooves 5.

[0052] When the mesh grooves 5 are viewed in cross section in the width direction, if the wall surfaces of the mesh grooves 5 are vertical or inversely tapered, the low-reflection coating 4 is less likely to adhere to the wall surfaces of the mesh grooves 5. As a result, the low-reflection coating 4 (second low-reflection coating) adhered to the bottom of the mesh grooves 5 becomes separated from the low-reflection coating 4 located on the first surface 11.

[0053] As described above, the depth of the mesh grooves 5 may be greater than the film thickness of the low-reflective coating 4, and the width of the mesh grooves 5 may be between ⅓ and 3 times the film thickness of the low-reflective coating 4. When the depth of the mesh grooves 5 is greater than the film thickness of the low-reflective coating 4, the low-reflective coating 4 and the second low-reflective coating are more easily separated from each other when they are formed. When the width of the mesh grooves 5 is between ⅓ and 3 times the film thickness of the low-reflective coating 4, the low-reflective coating 4 and the second low-reflective coating are also more easily separated from each other when they are formed.

[0054] Although the embodiments of the present disclosure have been described above, the invention according to the present disclosure is not limited to the above embodiments, and various modifications and improvements are possible within the scope of the present disclosure as shown in (1) and (9) below.

[0055] (1) A mounting member according to the present disclosure includes a base having a first surface that is the mounting surface side, and a plurality of convex portions that protrude from the first surface and have top surfaces that are mounting surfaces for an adsorbed object. An annular groove that surrounds the convex portions is located at the boundary between the convex portions and the first surface. A low-reflection coating that continuously covers the top surfaces of the convex portions, the side surfaces of the convex portions, the inner wall surface of the annular groove, and the first surface is located. (9) A manufacturing method for a mounting member according to the present disclosure includes the steps of: preparing a base having a first surface that is the mounting surface side; forming a plurality of convex portions that protrude from the first surface and have top surfaces that are mounting surfaces for an adsorbed object; forming annular grooves that surround the convex portions at the boundary between the convex portions and the first surface; and continuously coating the top surfaces of the convex portions, the side surfaces of the convex portions, the inner wall surface of the annular groove, and the first surface with a low-reflection coating.

[0056] The present disclosure further discloses the following embodiments (2) to (8).

[0057] (2) In the mounting member described in (1) above, the first radius of curvature of the boundary between the surface of the portion covering the side surface and the surface of the portion covering the base in the low-reflective coating is 50 μm or less. (3) In the mounting member described in (1) or (2) above, the first radius of curvature of the boundary between the surface of the portion covering the side surface and the surface of the portion covering the base in the low-reflective coating is smaller than the second radius of curvature of the boundary between the inner wall surface on the convex portion side and the bottom surface of the annular groove. (4) In the mounting member described in any of (1) to (3) above, the low-reflective coating has an annular depression on the surface above the annular groove that surrounds the convex portion. (5) In the mounting member described in any of (1) to (4) above, the low-reflective coating has a blackish color. (6) In the mounting member described in any of (1) to (5) above, the depth of the annular groove is greater than the film thickness of the low-reflective coating. (7) In the mounting member according to any one of (1) to (6) above, the width of the annular groove is greater than the thickness of the low-reflection coating. (8) In the mounting member according to any one of (1) to (7) above, mesh-like grooves are further positioned on the first surface, and the low-reflection coating is divided by the mesh-like grooves.

[0058] REFERENCE SIGNS LIST 1 base 11 first surface 12 sealing portion 2 convex portion 21 top surface of convex portion 22 side surface of convex portion 3 annular groove 4 low-reflection coating 5 mesh-like groove 5a lattice-like groove 5b spider web-like groove 10, 20, 30 mounting member

Claims

1. a base having a first surface that is a placement surface side; a plurality of protrusions protruding from the first surface and having top surfaces that are surfaces on which an object to be attached is placed; Including, an annular groove surrounding the protrusion is located at a boundary between the protrusion and the first surface; A mounting member is provided with a low-reflection coating that continuously covers the top surface of the protrusion, the side surface of the protrusion, the inner wall surface of the annular groove, and the first surface.

2. The mounting member according to claim 1 , wherein a first radius of curvature of a boundary between a surface of the portion covering the side surface and a surface of the portion covering the base in the low-reflection coating is 50 μm or less.

3. 3. The mounting member according to claim 1, wherein a first radius of curvature of a boundary between a surface of the portion covering the side surface and a surface of the portion covering the base in the low-reflection coating is smaller than a second radius of curvature of a boundary between an inner wall surface on the convex portion side and a bottom surface in the annular groove.

4. The mounting member according to claim 1 or 2, wherein the low-reflection coating has an annular depression surrounding the protrusion on the surface above the annular groove.

5. The mounting member according to claim 1 or 2, wherein the low-reflection coating has a blackish color.

6. The mounting member according to claim 1 or 2, wherein the depth of the annular groove is greater than the thickness of the low-reflection coating.

7. The mounting member according to claim 1 or 2, wherein the width of the annular groove is greater than the thickness of the low-reflection coating.

8. 3. The mounting member according to claim 1, wherein the first surface further includes a mesh-like groove, and the low-reflection coating is divided by the mesh-like groove.

9. 9. The mounting member according to claim 8, further comprising a second low-reflection coating separate from the low-reflection coating, located at the bottom of the mesh grooves.

10. The mounting member according to claim 8 , wherein, when the reticulated grooves are viewed in cross section in the width direction, wall surfaces of the reticulated grooves are vertical or inversely tapered.

11. The mounting member according to claim 8 , wherein the depth of the mesh grooves is greater than the thickness of the low-reflection coating.

12. 9. The mounting member according to claim 8, wherein the width of the mesh grooves is from 1 / 3 to 3 times the thickness of the low-reflection coating.

13. preparing a base having a first surface that is a mounting surface side; forming a plurality of protrusions protruding from the first surface and having top surfaces that are mounting surfaces for an object to be attached; forming an annular groove surrounding the protrusion at a boundary between the protrusion and the first surface; a step of continuously coating the top surface of the protrusion, the side surface of the protrusion, the inner wall surface of the annular groove, and the first surface with a low-reflection coating; A method for manufacturing a mounting member, comprising:

14. The manufacturing method according to claim 13 , further comprising the step of forming a mesh of grooves on the first surface, the mesh grooves dividing the low-reflection coating.

15. The method of claim 14 , wherein the mesh of grooves is formed before the first surface is continuously coated with the low-reflection coating.