Assembly comprising a chamber

Abstract

The invention relates to an assembly (1) comprising a chamber (2), preferably a vacuum chamber, having a chamber wall (3) and a chamber interior (4) enclosed by the chamber wall (3), and a cryogenic pump (5), in particular a cryogenic vacuum pump, wherein the cryogenic pump (5) has at least one deposit body (6) for depositing substances to be pumped out of the chamber interior (4) on the deposit body (6) and a cooling device (7) for cooling the deposit body (6), wherein in a first operating state of the cryogenic pump (5), the deposit body (6) is freely accessible for the substances to be pumped, and in a second operating state of the cryogenic pump (5) the deposit body is separated from the chamber interior (4) by a closure device which cannot be permeated by the substances to be pumped, wherein at least in the first operating state, the deposit body (6) is arranged at least partially, preferably completely, within the chamber interior (4) enclosed by the chamber wall (3).

Description

[0001]

[0002] Arrangement comprising a chamber

[0003] The present invention relates to an arrangement comprising a chamber, preferably a vacuum chamber, with a chamber wall and a chamber interior surrounded by the chamber wall, and a cryogenic pump, in particular a cryogenic vacuum pump, wherein the cryogenic pump has at least one deposition body for depositing substances to be pumped from the chamber interior onto the deposition body and a cooling device for cooling the deposition body, wherein the deposition body is freely accessible for the substances to be pumped in a first operating state of the cryogenic pump and is separated from the chamber interior by means of a closure device which is impermeable to the substances to be pumped in a second operating state of the cryogenic pump.

[0004] Cryogenic pumps are used in arrangements of this type to capture and collect substances, particularly gases, from the interior of the chamber. This occurs when these substances condense on the surface of the cold or cooled, in other words cryogenic, deposit body. This process of capturing and condensing these substances on the deposit body is also referred to as cryogenic pumping. Generic arrangements are known, for example, from JP 2011-62660 A and JP 2011-33007 A. In both of these documents, a cover serves as the closure device. In the initial operating state of the cryogenic pump, this cover allows the substances to be pumped to be freely accessible to the deposit body so that they can be deposited there.When the lid is closed, the cryogenic pump is in a second operating mode, in which the deposit body is impermeable to the substances to be pumped and separated from the chamber interior by the lid. In this second operating mode, regeneration can take place, during which the substances to be pumped that have deposited on the deposit body are removed from the deposit body by the effects of temperature and / or purge gas.

[0005] The object of the invention is to improve an arrangement of the type mentioned at the outset in such a way that the highest possible efficiency can be achieved in cryogenic pumping.

[0006] For this purpose, the invention proposes an arrangement according to claim 1.

[0007] It is thus provided according to the invention that the deposition body is arranged at least partially, preferably completely, within the chamber interior surrounded by the chamber wall, at least in the first operating state.

[0008] In the invention it is thus the case that the deposition body in the first operating state, in which the deposition of the substances to be pumped takes place on the deposition body cooled by means of the cooling device, is arranged at least partially, preferably completely, within the chamber interior surrounded by the chamber wall. As a result, a relatively large surface area of ​​the deposition body can be made available directly in the chamber interior for the deposition of the substances to be pumped. This increases the effectiveness of the deposition or pumping process and thus the efficiency of the cryogenic pump. In this sense it is preferably also provided that the deposition body protrudes through an opening in the chamber wall into the chamber interior surrounded by the chamber wall, at least in the first operating state.In such preferred embodiments, it is provided that not necessarily the entire cryogenic pump but preferably only its deposit body projects correspondingly far into the chamber interior.

[0009] In arrangements according to the invention, the first operating state is also provided so that the substances to be pumped are deposited on the deposit body, which is cooled accordingly by means of the cooling device, for the actual pumping process. The temperatures required on the surface of the deposit body depend on the substances to be pumped and are known per se, as are suitable cooling devices for cooling the deposit bodies accordingly. In contrast to the first operating state, the second operating state serves to regenerate the deposit body. During regeneration, heating and / or a purge gas ensure that the substances deposited in the first operating state are removed from the deposit body or its surfaces again. Appropriately heated or tempered purge gases are particularly preferably used for this purpose.In this context, it is advantageously provided that in the second operating state the deposit body can be regenerated in a volume separated from the chamber interior by means of the closure device, preferably by means of heating and / or by means of a purge gas.

[0010] In order to provide a large surface area for the deposition of the substances to be pumped, preferred embodiments of the invention provide that the deposition body has a plurality of spaced-apart ribs for the deposition of the substances to be pumped on the ribs. It is particularly preferred that the ribs together form an outwardly cylindrical, preferably circular-cylindrical, structure. In other words, viewed from the outside, the ribs advantageously form a body that basically has the shape of a cylinder, preferably a circular cylinder, but has corresponding openings between the ribs.

[0011] The cryogenic pump could also be referred to simply as a cryopump. Such cryogenic pumps or cryopumps are well known in the art, as are suitable deposition bodies and cooling devices for cooling the deposition body.

[0012] The chambers of arrangements according to the invention can be transfer chambers, but also process chambers or other chambers. They are particularly preferably vacuum chambers. Vacuum technology or vacuum chambers are used in particular when pressure levels of less than or equal to 0.001 mbar (millibar) or 0.1 Pascal are used. However, vacuum technology or vacuum chambers can also be used when pressures below normal pressure, i.e. below 1 bar, are used. Cryogenic pumps used in vacuum technology are also referred to here as cryogenic vacuum pumps.

[0013] Particularly preferred variants of arrangements according to the invention provide that the deposit body is delimited on its side facing the chamber interior by a cover fixed to the deposit body, which forms part of the closure device. Various embodiments in which this is advantageous are explained below.

[0014] A first group of arrangements according to the invention provides that the deposit body is arranged permanently, or in other words in all operating states, in the chamber interior. It can therefore preferably be provided that the deposit body is also arranged at least partially, preferably completely, within the chamber interior surrounded by the chamber wall in the second operating state. It can therefore also be provided that the deposit body protrudes through an opening in the chamber wall into the chamber interior surrounded by the chamber wall in the second operating state.

[0015] The deposit body can therefore be fixed in its position relative to the chamber wall in all operating conditions.

[0016] In order to separate the deposit body from the chamber interior in the second operating state in a manner that is impermeable to the substances to be pumped, it can be provided that the closure device is movable, preferably displaceable, relative to the chamber wall by a preferably motor-driven closure drive. This is to be understood as meaning that at least parts of the closure device are movable, preferably displaceable, relative to the chamber wall by the closure drive. For example, the cover mentioned above can remain stationary in the chamber interior together with the deposit body, while another part of the closure device is moved, preferably displaced, relative to the chamber wall by the closure drive.

[0017] Particularly preferred variants provide that the

[0018] The closure device has a casing wall, preferably a cylindrical casing wall, which is movable, preferably displaceable, relative to the chamber wall by a preferably motorized closure drive. This casing wall can particularly preferably be a circular cylindrical casing wall.

[0019] Any drive known in the state of the art and suitable for the respective application can be used as closure drives. These can be hydraulic or pneumatic drives, or even electric drives, for example. Linear drives are particularly preferred.

[0020] In order to seal the casing wall against the cover of the closure device in the second operating state, it is advantageously provided that the casing wall is sealed against the cover in the second operating state by an end face of the casing wall facing the chamber interior, preferably with the interposition of a seal, in a way that is impermeable to the substances to be pumped. In order to seal the casing wall against the chamber wall in the second operating state, it is advantageously provided that the closure device has a collar protruding radially outwards from the casing wall and is sealed against the chamber wall by the collar in the second operating state, preferably with the interposition of a seal, in a way that is impermeable to the substances to be pumped. In the second operating state, the chamber wall can, if appropriate using the said seal, lie directly against the cover or the chamber wall, but also against components of the arrangement which are connected to the cover or the chamber wall.the chamber wall accordingly, in particular in a manner that is impermeable to the substances to be pumped. In order to ensure reliable sealing of the end face of the casing wall against the cover, preferred variants provide for the casing wall to have a length compensation device. This length compensation device can, for example, be designed as a metal bellows or as a compensation shaft or, in other words, as a wave-shaped region in the casing wall. The length compensation device preferably allows elastic compression of the casing wall in its longitudinal direction when the end face of the casing wall is pressed against the cover.

[0021] As an alternative to the embodiments discussed so far, it can also be provided that the deposit body, in the second operating state, is arranged, preferably completely, outside the chamber interior surrounded by the chamber wall. It is particularly advantageous in this context if the deposit body is mounted so that it can be moved back and forth relative to the chamber wall, preferably displaced back and forth.

[0022] In this context in particular it can also be provided that the closure device has a preferably motorised closure drive for moving the deposit body back and forth, preferably displacing it back and forth. The closure drive can, as with the closure drives already mentioned above, also be designed so as to be manually operable. However, it is preferably a motorised closure drive, i.e. a closure drive driven by a motor. Here too, as already explained above, a wide variety of drive types known from the prior art can be used. Preferred variants provide that in the second operating state the cover is sealed against the chamber wall in a way that is impermeable to the substances to be pumped, preferably with the interposition of a seal. For such a seal against the chamber wall, the cover does not have to lie directly against the chamber wall.In the second operating state, the cover can, if necessary using the said seal, also bear against components of the arrangement which are connected to the chamber wall accordingly, in particular in a manner which is impermeable to the substances to be pumped.

[0023] Particularly in embodiments of the arrangement according to the invention in which the deposit body is mounted so as to be movable back and forth relative to the chamber wall, preferably so as to be displaceable back and forth, preferred variants provide that the deposit body, in the first operating state, is in cold-transmitting contact with the cooling device by means of a detachable and cold-transmitting connecting device. The detachable and cold-transmitting connecting device is preferably released automatically when the deposit body is moved out of the position it assumes in the first operating state. However, it can also be provided that the deposit body, in the second operating state, is in cold-transmitting contact with the cooling device by means of a detachable and cold-transmitting connecting device.This detachable and cold-transferring connecting device is also preferably released automatically when the deposit body is moved out of the position it assumes in the second operating state. In particular with variants of this type, the deposit body does not have to be in permanent cold-transferring contact with the cooling device. It is sufficient if this is the case in the first and, if applicable, also in the second operating state. In the first operating state, the cooling of the deposit body by means of the cooling device serves the actual pumping process, during which the substances to be pumped are deposited on the correspondingly cooled deposit body. Cooling of the deposit body in the position it assumes in the second operating state is advantageously carried out for pre-cooling shortly before the deposit body is brought into the position it assumes in the first operating state.In order not to disrupt the regeneration of the deposit body in the second operating state, the cooling device can preferably be switched on and off. During the regeneration of the deposit body, the cooling device can then be switched off so that the regeneration of the deposit body is not disrupted. The cooling device is then preferably only switched on shortly before the movement of the deposit body into the position it assumes in the first operating state, so that the deposit body can be pre-cooled and then, in the pre-cooled state, brought into the position it assumes in the first operating state. As an alternative to switching off the cooling device during the regeneration of the deposit body, the cooling device can, with a corresponding design, also be used to heat the deposit body during the regeneration process in order to support or accelerate the regeneration.

[0024] Particularly preferred variants of the invention provide that the, preferably both, detachable and cold-transferring connecting device(s) have two cold transfer surfaces that can be separated from one another and placed against one another, preferably flatly. In order to ensure that the cold transfer surfaces lie against one another over as full a surface as possible, particularly preferred variants in this context provide that at least one of the cold transfer surfaces is mounted so that it can be deflected elastically and / or spring-loaded. This allows the cold transfer surfaces to lie against one another as well as possible over their full surface area for good cold transfer and to be pressed against one another by means of elastic or spring preload.Alternatively, it can also be provided that a gas receiving chamber is formed between the cold transfer surfaces, which is sealed to the outside for cold transfer and into which gas can be introduced for convective cold transfer between the cold transfer surfaces. The gas can preferably be supplied to this gas receiving chamber via a gas feed line in the cold transfer surface which is fixedly connected to the cooling device. It is clear here that the term cold transfer surface describes a body which has a certain three-dimensional extent, e.g. in order to be able to lead a corresponding gas feed line through it. In order to keep gas consumption or gas requirements low, it is advantageously provided that the cold transfer surfaces delimiting the gas receiving chamber are spaced apart from one another by a maximum of 0.5 mm, preferably a maximum of 0.2 mm.

[0025] In arrangements according to the invention, it can be provided that the cryogenic pump has only a single deposit body. In arrangements according to the invention, however, it is also possible for the deposit body to be a first deposit body of the cryogenic pump and for the cryogenic pump to have at least a second deposit body. This second deposit body can be arranged in a deposit body interior enclosed by the first deposit body or at least protrude into it. The second deposit body can have the same properties according to the invention as the first deposit body. However, the second deposit body can also be arranged outside the chamber interior in all operating states.

[0026] Further features and details of preferred embodiments of the invention are explained below by way of example. They show:

[0027] Fig. 1 to 10b representations of a first embodiment of an arrangement according to the invention and

[0028] Fig. 11 to 22 representations of a second embodiment of an arrangement according to the invention.

[0029] Figs. 1 and 2 show only the cryogenic pump 5 of the first embodiment of an arrangement 1 according to the invention. In Figs. 1 and 2, the chamber 2 is not visible.

[0030] In Fig. 1, the cryogenic pump is in its first operating state, in which the substances to be pumped can be deposited from the chamber interior 4 onto the deposition body 6. For this purpose, the deposition body 6 is freely accessible for the substances to be pumped.

[0031] In Fig. 1, it is clearly visible that the deposit body 6, 21 protrudes beyond the valve housing 24. In this exemplary embodiment, the deposit body 6, 21 consists of a plurality of spaced-apart ribs 10 on which the substances to be pumped are deposited. The cooling device 7 provided for cooling the deposit body 6 or the ribs 10 is not visible in Figs. 1 and 2.

[0032] In Fig. 1 it can also be clearly seen that the deposit body 6, 21 is delimited on its side facing the chamber interior 4 by a cover 11 fixed to the deposit body 6, 21. This cover 11 is part of the closure device 8. In this first exemplary embodiment, the position of the deposit body 6 is fixed relative to the chamber wall 3 (not yet shown in Fig. 1) in all operating states. The same therefore also applies to the cover 11 in this exemplary embodiment. On the side of the cryogenic pump 5 facing away from the deposit body 6 are the closure drives 12, with which in this exemplary embodiment a part of the closure device 8, namely here the jacket wall 13, can be moved back and forth, in particular, as here, displaced back and forth. The shutter drives 12 are conventional linear drives as are known in the state of the art.Preferably, as shown here, these are motor drives. Known electric motors, hydraulic, pneumatic, and other linear drives are suitable for this purpose. However, manually operated locking drives 12 could also be used.

[0033] Fig. 2 shows the second operating state of the cryogenic pump 5 of this first embodiment. In this second operating state, the deposit body 8 is separated from the chamber interior 4 by the closure device 8, which is impermeable to the substances to be pumped. In this second operating state, substances to be pumped from the chamber interior 4 cannot reach the deposit body 6. In this embodiment, the closure device 8 comprises, on the one hand, the cover 11, which is fixedly attached to the deposit body 6, and, on the other hand, the casing wall 13, which is displaceably mounted by means of the closure drives 12. Together, these two components of the closure device 8 can separate the deposit body 6 from the chamber interior 4 in a manner that is impermeable to the substances to be pumped. The first, in Fig.The operating state shown in Fig. 1 thus serves for the actual pumping process, during which the substances to be pumped from the chamber interior 4 can be deposited on the deposit body 6 or, in this case, its ribs 10. The second operating state according to Fig. 2 serves for regeneration. In this second operating state, the deposit body 6 is regenerated in a volume separated from the chamber interior 4, namely the internal volume enclosed by the closure device 8, preferably by heating and / or by means of a purge gas. During the regeneration process, the substances previously deposited on the deposit body are detached from it and preferably transported away with the purge gas. For this purpose, the valve housing 24 has the gas inlets and outlets 26, which can be seen in the following figures.

[0034] In Fig. 1 one can also clearly see that the ribs 10 together form an outwardly cylindrical structure, in this embodiment even a circular cylindrical structure.

[0035] Figs. 3 to 5 show the inventive arrangement 1 of the first embodiment with the cryogenic pump 5, as shown in Figs. 1 and 2, in the first operating state. Fig. 4 shows area A from Fig. 3, and Fig. 5 shows area B.

[0036] In Fig. 3, the chamber 2 is only partially shown. Only a part of the chamber wall 3 and the chamber interior 4 are visible. The rest of the chamber wall 3 of the chamber 2 and the chamber interior 4 are not shown here, but can be designed as is known per se in the prior art.

[0037] Fig. 3 clearly shows how the deposit body 6 is arranged in this first operating state within the chamber interior 4 surrounded by the chamber wall 3, as provided for by the invention. For this purpose, the chamber wall 3 has an opening 9 through which the deposit body 6, 21 projects into the chamber interior 4.

[0038] In this first exemplary embodiment, the deposition body 6, 21 is fixed in its position relative to the chamber wall 3 in all operating states. Thus, in the second operating state, it is also arranged within the chamber interior 4 surrounded by the chamber wall 3, by correspondingly protruding through the opening 9 into the chamber interior 4 surrounded by the chamber wall 3. For this second operating state, reference is made to Figs. 6 to 9, in which it is illustrated.

[0039] Returning to Fig. 3, it can be clearly seen that in this exemplary embodiment the deposition body 6, 21 with the ribs 10 is a first deposition body 21. In addition, the cryogenic pump 5 of this exemplary embodiment also has a second deposition body 22. This is located in a deposition body interior 23 of the first deposition body 21. Both deposition bodies 21 and 22 or 6 are cooled by means of the cooling device 7 to the temperature level required for the deposition of the substances to be pumped. Suitable cooling devices 7 are known per se from the prior art and need not be explained further. The jacket wall 13, which in this first exemplary embodiment is displaceably mounted by means of the closure drives 12, is, as already explained, part of the closure device 8 and is shown separately in Fig. 10a. In Fig. 3, the jacket wall 13 is retracted into the valve housing 24 in the first operating state. In Fig.In the enlarged area A of Figure 4, it can be seen that a seal 15 is located in the end face 14 of the casing wall 13 facing the chamber interior 4. As explained in more detail below, this seal serves, in the second operating state, to seal the casing wall 13 against the cover 11. Of course, the seal 15 could alternatively be arranged in the cover 11 instead of in the end face 14.

[0040] In Fig. 5, which shows an enlarged view of area B from Fig. 3, one can see, at least in part, the collar 16 protruding from the casing wall 13, which in this exemplary embodiment also contains a seal 17. By means of this seal 17, the casing wall 13 can, as explained in more detail below, seal the closure device against the chamber wall 3 in the second operating state.

[0041] In the first operating state according to Fig. 3, a large area of ​​the deposition body 6 or 21 is thus available in the chamber interior 4 for the pumping process, i.e. for the deposition of the substances to be deposited on the deposition body 6 or its ribs 10, so that according to the invention an arrangement 1 with a cryogenic pump 5 with a high efficiency is provided.

[0042] 6 to 9 now show the second operating state of the arrangement 1 according to the invention of the first exemplary embodiment, in which the cryogenic pump 5 is separated from the chamber interior 4 by means of the closure device 8 which is impermeable to the substances to be pumped. For this purpose, in this exemplary embodiment the casing wall 13 is moved so far upwards by the closure drives 12, i.e. into the chamber interior 4, that together with the cover 11 it encloses a self-contained volume which is separated from the chamber interior 4. The deposit body 6, 21 is located in this volume enclosed by the casing wall 13 and the cover 11. In this exemplary embodiment, specifically both deposit bodies 21 and 22, so that the already described regeneration process can take place, in which the deposited substances are removed again from the deposit body 6. For this purpose, e.g. It can be provided that both deposit bodies 21 and 22 e.g.can also be heated by an appropriately designed cooling device 7. Alternatively and / or additionally, the volume enclosed by the valve housing 24, the jacket wall 13 and the cover 11 can also be flowed through by purge gas. The purge gas can be introduced into this volume through the gas inlets and outlets 26 and removed from it again. Particularly preferred variants provide for this to be appropriately warm or heated purge gas, which ensures both appropriate heating of the deposit bodies 6 or 21 and 22 and also the removal of the substances detached from the deposit bodies 6 or 21 and 22.

[0043] Fig. 7 shows an enlarged view of area C from Fig. 6. Here, one can see how the casing wall 13, with its seal 15 arranged on the end face 14, seals against the cover 11.

[0044] Fig. 8 shows the area D from Fig. 6 enlarged. Here you can see how the collar 16 with its seal 17 is sealingly in contact with an annular body 25. This annular body 25 is connected to the chamber wall 3 in such a sealed manner that

[0045] When the collar 16 abuts the annular body 25, the jacket wall 13, together with the cover 11 and thus the closure device 8, creates a corresponding seal against the chamber interior 4. Of course, in an alternative embodiment, the collar 16 with its seal 17 could also seal directly against the chamber wall 3 to create a corresponding seal. The seal 17 does not necessarily have to be present in the collar 16. It can just as easily be arranged in the annular body 25 or, with a corresponding design, directly in the chamber wall 3.

[0046] 10a, only the casing wall 13 of this exemplary embodiment is shown. It can be seen that this is a circular-cylindrical casing wall 13. The seal 15 is located in the end face 14. Fig. 10 also clearly shows the collar 16 which projects radially beyond the casing wall 13 and in this exemplary embodiment contains the seal 17. In order to ensure reliable sealing of the end face 14 of the casing wall 13 against the cover 11, it can optionally be provided, as shown in Fig. 10a, that the casing wall 13 has a length compensation device 27. This length compensation device 27 can, for example, be designed as a metal bellows or as a compensation shaft or, in other words, as a shaft-shaped region in the casing wall 13. Fig. 10b shows a section through the jacket wall 13 in the region of the length compensation device 27, which is designed here as a compensation shaft.The length compensation device 27 preferably allows an elastic compression of the casing wall 13 in its longitudinal direction when the end face 14 of the casing wall is pressed against the cover 11. The elasticity thus integrated into the casing wall 13 can ensure a secure and tight closure of the casing wall 13 against the cover 11. Figs. 11 to 19 show illustrations of a second exemplary embodiment according to the invention of an arrangement 1 with a cryogenic pump 5, although Figs. 11 and 12 again only show the cryogenic pump 5 of this second exemplary embodiment. Fig. 11 shows the cryogenic pump of this second exemplary embodiment in the first operating state. Fig. 12 shows the second operating state.

[0047] In this exemplary embodiment, the deposition body 6 or 21 also has a sequence of spaced-apart ribs 10 for depositing the substances to be pumped. The cover 8 of the closure device 11 is again fixedly attached to the deposition body 6. The cryogenic pump 5 further comprises a valve housing 24. The closure drives 12 are located at the end of the valve housing 24 facing away from the deposition body 6. Here, too, the ribs 10 together form an outwardly cylindrical structure, again circular-cylindrical in this exemplary embodiment.

[0048] Figs. 13 and 14 now show the entire arrangement 1 in the first operating state, in which the deposit body 6 or, in this case, the first deposit body 21 is arranged within the chamber interior 4 surrounded by the chamber wall 3. Here, too, the deposit body 6 or 21 protrudes through the opening 9 into the chamber interior 4 in the first operating state.

[0049] Fig. 13 also shows well that here too a second

[0050] Deposit body 22 is present, which is in

[0051] Deposit body interior 23 is arranged. This deposit body interior 23 is from the first

[0052] Deposit body 21 surrounds .

[0053] By arranging the deposition body 6 or 21 in the chamber interior 4, a particularly effective pumping process can be achieved in the first operating state, as in the first embodiment, as well as in the second embodiment, in that the deposition body 6 or 21, with its ribs 10, offers a large surface area arranged within the chamber interior 4 for the deposition of the substances to be pumped. A cooling device 7, known per se, ensures sufficient cooling of the first deposition body 21 as well as the second deposition body 22, which is additionally present in this embodiment.

[0054] In contrast to the first exemplary embodiment, however, in this second exemplary embodiment it is provided that the deposit body 6, or specifically here the first deposit body 21, is mounted so as to be movable back and forth relative to the chamber wall 3, and in this exemplary embodiment so as to be displaceable back and forth. In this exemplary embodiment, the shutter drives 12, which in turn are correspondingly designed linear drives, are used to displace the first deposit body 21 and thus the deposit body 6 back and forth between the position in the first operating state according to FIGS. 11 and 13 and the position in the second operating state according to FIGS. 12 and 15. These preferably motorized shutter drives 12 are, as already mentioned, sufficiently known in the prior art and need not be discussed further. Of course, a manually operated shutter drive 12 could also be provided.

[0055] In this exemplary embodiment, a detachable, cold-transmitting connecting device 18, as shown enlarged in Fig. 14, ensures the cold-transmitting connection of the deposit body 6 or 21 to the cooling device 7 in the first operating state according to Figs. 11 and 13. Fig. 14 shows the area F from Fig. 13. The functioning of the cold-transmitting connecting device 18 will be explained in more detail below. In any case, it ensures that the deposit body 6 or, in this case, the first deposit body 21, is in cold-transmitting contact with the cooling device 7 in the first operating state.

[0056] 12 and 15, the deposit body 6 or 21 is arranged outside the chamber interior 4 surrounded by the chamber wall 3. In this second operating state, the closure device 8, which here only consists of the cover 11, ensures a volume separated from the chamber interior 5, in which volume the deposit bodies 6, i.e. here the first deposit body 21 and also the second deposit body 22, can be regenerated. This regeneration process can take place as in the first embodiment, i.e. e.g. by heating and / or by means of a purge gas, which in turn can be introduced into this volume through the gas inlets and outlets 26 and can also be withdrawn from this volume again. Fig. 16 shows an enlarged view of area G from Fig. 15.Here, one can see how, in the second operating state, the cover 11 is sealed against the chamber wall 3 by interposing a seal 15, making it impermeable to the substances to be pumped. In this exemplary embodiment, this is achieved by the cover 11, with the seal 15 interposing, again sealingly abutting an annular body 25, which in turn is sealed and attached to the chamber wall 3. Here, too, it would of course be possible to have the cover 11 rest directly against the chamber wall 3 with a corresponding seal.

[0057] In Figs. 13 and 15 one can also see a second cold transfer surface 31 which can be cooled by the cooling device 7 and is fixedly connected thereto and thus arranged in a fixed position in the valve housing 24. In this exemplary embodiment, this cold transfer surface 31, together with the cold transfer surface 19 of the deposit body 6, forms a second detachable, cold-transferring connecting device 18, as shown enlarged in Fig. 21. Fig. 21 shows the area H from Fig. 15 enlarged.

[0058] The functioning of the detachable and cold-transferring connecting device 18, implemented here as an example, between the cold transfer surface 19 of the deposit body 6 and the cold transfer surface 20 of the cooling device 7 is explained below with reference to Fig. 14 and Figs. 17 to 19. This detachable and cold-transferring connecting device 18 has two cold transfer surfaces 19 and 20 which can be separated from one another and placed flat against one another. In this exemplary embodiment, the cold transfer surface 19 is formed at a lower end of the deposit body 6 or, in this case, the first deposit body 21. It is therefore also moved back and forth when this deposit body 6 or 21 is moved back and forth. The second cold transfer surface 20 is fixedly connected to the cooling device 7. It is arranged in a fixed position in the valve housing 24.For good cold transfer in the initial operating state, it is important that the cold transfer surfaces 19 and 20 are in flat contact with one another. To ensure this, it is advantageous if at least one of the two cold transfer surfaces 19 or 20 is mounted so that it can be deflected elastically and / or spring-loaded. The cold transfer surfaces 19 and 20 can be elastically deflectable for this purpose. However, they can also be elastically spring-loaded by means of a suitable spring. Fig.

[0059] 14 and 17 show the cold-transferring connection device

[0060] 18 in the first operating state, in which it ensures a corresponding cold-transferring contact between the cooling device 7 and the deposit body 6 or 21. If the deposit body 6 or 21 is now brought into the second operating position according to Figs. 15 and 12 by means of the closure drives 12, the cold transfer surface 19 which is fixedly connected to the deposit body 6 or 21 is moved downwards, as shown in Fig. 18, so that, according to Figs. 18 and 19, there is an interruption in the cold-transferring contact between the cold transfer surfaces 19 and 20 and thus between the deposit body 6 or 21 and the cooling device 7 as soon as the deposit body 6 or 21 is moved out of the position it occupies in the first operating state. In the second operating state according to Figs. 12 and 15, the two cold transfer surfaces 19 and 20 are no longer in contact with each other, as shown in Fig. 19, so that the deposit body 6 or21 is then no longer cooled via these two cold transfer surfaces 19 and 20. The deposit body 6, in this case the deposit bodies 21 and 22, can then be regenerated, for example, by means of purge gas, preferably heated accordingly, introduced and discharged through the gas inlets and outlets 26.

[0061] In the second operating state, the cold transfer surface

[0062] 19 of the deposit body 6, here the deposit body 21, in contact with the cold transfer surface 31 of the cooling device 7. During the regeneration process by means of the purge gas, the cooling device 7 remains switched off in a first variant, so that the regeneration process is not disrupted by cooling of the deposit body 6 or 21 and 22. Alternatively, however, in a second variant, it can also be provided to use a correspondingly designed cooling device 7 in the second operating state during regeneration in addition to heating the deposit body 6 or 21 and 22, by transferring heat from the cooling device 7 via the cold transfer surfaces 31 and 19.

[0063] Once the regeneration process is completed, the cooling device 7 can be switched in such a way that it pre-cools the deposit body(s) 6 or 21 and 22 via the still closed contact between the cold transfer surfaces 31 and 19, before the deposit body(s) 6 or 21 and 22 are brought back into their position according to Fig. 11 and 13, which they assume(s) in the first operating state for the pumping process.

[0064] In the embodiments explained so far with reference to Figs. 14, 17 to 19 and 21, it is provided that the cold transfer surfaces 19 and 20 or 19 and 31 lie against one another as closely as possible over their entire surface for good cold transfer and are pressed against one another by means of elastic or spring preload. Alternatively, however, it can also be provided that a gas receiving chamber 30 is formed between the cold transfer surfaces 19 and 20 or 19 and 31, which is sealed to the outside for cold transfer and into which gas can be introduced for convective cold transfer between the cold transfer surfaces 19 and 20 or 19 and 31. This is shown as an example in Figs. 20 and 22. The gas can preferably be supplied to this gas receiving space 30 via a gas supply line 28 in the cold transfer surface 20 or 31 which is fixedly connected to the cooling device 7.It is clear here that the term "cold transfer surface 19, 20, and 31" each describes a body that has a certain three-dimensional extension, e.g., to allow a corresponding gas supply line 28 to be passed through it. The gas supply line 28 can, for example, be passed through the cooling device 7, although this is not explicitly shown here. In order to keep gas consumption or gas requirements low, it is advantageously provided that the cold transfer surfaces 19 and 20, or 19 and 31, that delimit the gas receiving space 30 are spaced apart from one another by a maximum of 0.5 mm, preferably a maximum of 0.2 mm.

[0065] Key to the reference numbers:

[0066] Arrangement 27 Length compensation device

[0067] Chamber direction

[0068] Chamber wall 28 gas supply line

[0069] Chamber inner wall 29 Seal cryogenic pump 30 Gas chamber

[0070] Storage body 31 Cold transfer surface Cooling device Closure device Opening

[0071] rib

[0072] Lid

[0073] Shutter drive

[0074] shell wall

[0075] frontal surface

[0076] seal

[0077] collar

[0078] seal

[0079] Connecting device Cold transfer surface Cold transfer surface first

[0080] Ab elongation body second

[0081] Deposit body Deposit body interior

[0082] Valve housing ring body

[0083] Gas inlet and outlet

Claims

Patent claims 1. Arrangement (1) comprising a chamber (2), preferably a vacuum chamber, with a chamber wall (3) and a chamber interior (4) surrounded by the chamber wall (3), and a cryogenic pump (5), in particular a cryogenic vacuum pump, wherein the cryogenic pump (5) has at least one deposit body (6) for depositing substances to be pumped from the chamber interior (4) on the deposit body (6) and a cooling device (7) for cooling the deposit body (6), wherein the deposit body (6) is freely accessible for the substances to be pumped in a first operating state of the cryogenic pump (5) and is separated from the chamber interior (4) by means of a closure device impermeable to the substances to be pumped in a second operating state of the cryogenic pump (5), characterized in that the deposit body (6) at least in the first operating state at least partially, preferably completely,is arranged within the chamber interior (4) surrounded by the chamber wall (3).

2. Arrangement (1) according to claim 1, wherein the deposit body (6) projects, at least in the first operating state, through an opening (9) in the chamber wall (3) into the chamber interior (4) surrounded by the chamber wall (3).

3. Arrangement (1) according to claim 1 or 2, wherein the deposition body (6) has a plurality of spaced-apart ribs (10) for depositing the substances to be pumped on the ribs (10).

4. Arrangement (1) according to claim 3, wherein the ribs (10) together form an outwardly cylindrical, preferably circular-cylindrical, structure.

5. Arrangement (1) according to one of claims 1 to 4, wherein the deposit body (6) is delimited on its side facing the chamber interior (4) by a cover (11) fixed to the deposit body (6), which is part of the closure device (8).

6. Arrangement (1) according to one of claims 1 to 5, wherein the deposition body (6) is also arranged in the second operating state at least partially, preferably completely, within the chamber interior (4) surrounded by the chamber wall (3).

7. Arrangement (1) according to one of claims 1 to 6, wherein the deposit body (6) also projects in the second operating state through an or the opening (9) in the chamber wall (3) into the chamber interior (4) surrounded by the chamber wall (3).

8. Arrangement (1) according to one of claims 1 to 7, wherein the deposition body (6) is fixed in its position relative to the chamber wall (3) in all operating states.

9. Arrangement (1) according to one of claims 1 to 8, characterized in that the closure device (8) is at least partially actuated by a, preferably motorized, The closure drive (12) is movable, preferably displaceable, relative to the chamber wall (3).

10. Arrangement (1) according to one of claims 1 to 9, wherein the closure device (8) has a jacket wall (13), preferably a cylinder jacket wall, which is movable, preferably displaceable, relative to the chamber wall (3) by a or the preferably motorized closure drive (12).

11. Arrangement (1) according to claims 5 and 10, wherein the casing wall (13) in the second operating state is sealed against the cover (11) with an end face (14) of the casing wall (13) facing the chamber interior (4), preferably with the interposition of a seal (15), so as to be impermeable to the substances to be pumped.

12. Arrangement (1) according to claims 5 and 10 or 11, wherein the closure device (8) has a collar (16) projecting radially outwards from the casing wall (13) and is sealed with the collar (16) in the second operating state, preferably with the interposition of a seal (17), against the chamber wall (3) in a manner impermeable to the substances to be pumped.

13. Arrangement (1) according to one of claims 1 to 5, wherein the deposition body (6) in the second operating state is arranged, preferably completely, outside the chamber interior (4) surrounded by the chamber wall (3).

14. Arrangement (1) according to one of claims 1 to 5 or 13, wherein the deposit body (6) relative to the Chamber wall (3) is mounted so as to be movable back and forth, preferably displaceable back and forth.

15. Arrangement (1) according to one of claims 1 to 5 or 13 or 14, wherein the closure device (8) has a, preferably motorized, closure drive (12) for moving back and forth, preferably displacing back and forth, the deposit body (6).

16. Arrangement (1) according to claim 5 and one of claims 13 to 15, wherein the cover (11) in the second operating state is sealed against the chamber wall (3) in a manner impermeable to the substances to be pumped, preferably with the interposition of a seal (15).

17. Arrangement (1) according to one of claims 13 to 16, wherein the deposit body (6) in the first operating state and / or in the second operating state is in cold-transmitting contact with the cooling device (7) by means of a detachable and cold-transmitting connecting device (18).

18. Arrangement (1) according to claim 17, wherein the detachable and cold-transmitting connecting device (18) has two cold-transmitting surfaces (19, 20, 31) which can be separated from one another and placed flat against one another, wherein preferably at least one of the cold-transmitting surfaces (19, 20, 31) is mounted so as to be deflectable in an elastic and / or spring-loaded manner.

19. Arrangement (1) according to one of claims 1 to 18, wherein the deposit body (6) is a first deposit body (21) of the cryogenic pump (5) and the cryogenic pump (5) has at least a second Deposit body (22), wherein preferably the second deposit body (22) is arranged in a deposit body interior (23) encompassed by the first deposit body (21) or at least projects into it.

20. Arrangement (1) according to one of claims 1 to 19, wherein in the second operating state the deposit body (6) can be regenerated in a volume separated from the chamber interior (4) by means of the closure device (8), preferably by means of heating and / or by means of a purge gas.

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