Power mosfet with gate-source ESD diode structure

Abstract

An apparatus includes a drain and a source on opposing sides of an epitaxial layer, a plurality of gates formed in the epitaxial layer, a source contact connected to the source, a gate contact connected to the plurality of gates, a gate-source electrostatic discharge (ESD) diode connected between the gate contact and the source contact, and a breakdown voltage enhancement and leakage prevention structure formed underneath the gate-source ESD diode structure.

Description

POWER MOSFET WITH GATE-SOURCE ESD DIODE STRUCTURECROSS-REFERENCE TO RELATED APPLICATIONS

[0001] This patent application claims priority to, and specifically, is a continuation of, U.S. Application No. 18 / 416,776, filed on January 18, 2024 and entitled “Power MOSFET with Gate- Source ESD Diode Structure,” which is hereby incorporated by reference herein as if reproduced in its entirety.TECHNICAL FIELD

[0002] Embodiments of the invention relate to a power Metal-Oxide-Semiconductor Field- Effect Transistor (MOSFET), and, in particular embodiments, to a power MOSFET with a gatesource ESD diode structure and a breakdown voltage enhancement and leakage prevention structure.BACKGROUND

[0003] As semiconductor technologies evolve, power MOSFETs have been widely used in various industry applications. Power MOSFETs are voltage-controlled devices. When a control voltage is applied to the gate a power MOSFET and the control voltage is greater than the threshold of the power MOSFET, a conductive channel is established between the drain and the source of the power MOSFET. As a result, a current flows between the drain and the source of the power MOSFET. On the other hand, when the control voltage is less than the threshold of the power MOSFET, the power MOSFET is turned off accordingly.

[0004] Power MOSFETs may include two major categories. One is n-channel power MOSFETs. The other is p-channel power MOSFETs. According to the structure difference, power MOSFETs can be further divided into three sub-categories, planar power MOSFETs, lateral power MOSFETs and vertical power MOSFETs.

[0005] Vertical power MOSFETs have been widely used in high voltage and high current applications due to their low gate drive power, fast switching speed and lower on resistance. In a vertical power MOSFET, the drain and source are placed on opposite sides of a wafer. There may be a trench structure formed between the drain and the source of the vertical power MOSFET.

[0006] The input / output terminals of the vertical power MOSFET must be protected from electrostatic discharge (ESD) voltages. For example, the gate of a vertical power MOSFET is a crucial element. Excessive voltage at the gate relative to the source can lead to breakdown and damage. To protect the gate of the vertical power MOSFET from ESD, a back-to-back ESD diode structure may be connected between the gate and source terminals of the vertical power MOSFET.The back-to-back ESD diode structure may be implemented as an array of doped p and n-i- regions arranged in an alternating manner. For example, the array may comprise a first p-type region, a first n-i- region, a second p-type region, a second n-i- region and a third p-type region connected in cascade. Alternatively, the array may comprise a first n-i- region, a first p-type region, a second n-i- region, a second p-type region and a third n-i- region connected in cascade. The p-n-i- structure is a common configuration for ESD protection diodes. The p-n-i- structure helps create a structure having a low breakdown voltage, making the ESD diode structure suitable for clamping and diverting the excess voltage during an ESD event, thereby protecting the gate of the vertical power MOSFET from being damaged.SUMMARY

[0007] These and other problems are generally solved or circumvented, and technical advantages are generally achieved, by preferred embodiments of the present disclosure which provide a power MOSFET with a gate-source ESD diode structure and a breakdown voltage enhancement and leakage prevention structure.

[0008] In accordance with an embodiment, an appar atus comprises a drain and a source on opposing sides of an epitaxial layer, a plurality of gates formed in the epitaxial layer, a source contact connected to the source, a gate contact connected to the plurality of gates, a gate-source electrostatic discharge (ESD) diode connected between the gate contact and the source contact, and a breakdown voltage enhancement and leakage prevention structure formed underneath the gate-source ESD diode structure.

[0009] In accordance with another embodiment, a method comprises growing an epitaxial layer over a substrate, forming a plurality of gates in the epitaxial layer, forming a body region and a breakdown voltage enhancement and leakage prevention structure in the epitaxial layer, forming a source in the epitaxial layer and a gate-source ESD diode structure over the epitaxial layer, and forming a source contact connected to the source and a first terminal of the gate-source ESD diode structure, and a gate contact connected to the plurality of gates and a second terminal of the gatesource ESD diode structure.

[0010] In accordance with yet another embodiment, a power MOSFET comprises an epitaxial layer over a substrate, a plurality of gates formed in the epitaxial layer, a body region formed in the epitaxial layer, a source formed in the body region, a gate-source ESD diode structure formed over the epitaxial layer, a body ring structure formed in the epitaxial layer and underneath the gatesource ESD diode structure, an interlayer dielectric layer formed over the epitaxial layer, wherein the gate-source ESD diode structure is in the interlayer dielectric layer, a plurality of source contactplugs, wherein at least one of the plurality of source contact plugs extends through the interlayer dielectric layer, the source and partially through the body region, a gate contact plug extending partially through the interlayer dielectric layer, a gate contact connected to the plurality of gates and a first terminal of the gate-source ESD diode structure through the gate contact plug, and a source contact connected to the source, the body region and a second terminal of the gate-source ESD diode structure through the plurality of source contact plugs.

[0011] The foregoing has outlined rather broadly the features and technical advantages of the present disclosure in order that the detailed description of the disclosure that follows may be better understood. Additional features and advantages of the disclosure will be described hereinafter which form the subject of the claims of the disclosure. It should be appreciated by those skilled in the art that the conception and specific embodiment disclosed may be readily utilized as a basis for modifying or designing other structures or processes for carrying out the same purposes of the present disclosure. It should also be realized by those skilled in the art that such equivalent constructions do not depart from the spirit and scope of the disclosure as set forth in the appended claims.BRIEF DESCRIPTION OF THE DRAWINGS

[0012] For a more complete understanding of the present disclosure, and the advantages thereof, reference is now made to the following descriptions taken in conjunction with the accompanying drawings, in which:

[0013] Figure 1 illustrates a cross sectional view of a power MOSFET having a gate-source ESD diode structure and a breakdown voltage enhancement and leakage prevention structure in accordance with various embodiments of the present disclosure;

[0014] Figure 2 illustrates a cross sectional view of a semiconductor device after an epitaxial layer is grown from a substrate in accordance with various embodiments of the present disclosure;

[0015] Figure 3 illustrates a cross sectional view of the semiconductor device shown in Figure 2 after an etching process is performed on a hard mask layer to define the pattern of the hard mask layer in accordance with various embodiments of the present disclosure;

[0016] Figure 4 illustrates a cross sectional view of the semiconductor device shown in Figure 3 after three trenches are formed in the epitaxial layer in accordance with various embodiments of the present disclosure;

[0017] Figure 5 illustrates a cross sectional view of the semiconductor device shown in Figure 4 after a thin dielectric layer is formed in the trenches and over the epitaxial layer in accordance with various embodiments of the present disclosure;

[0018] Figure 6 illustrates a cross sectional view of the semiconductor device shown in Figure 5 after a gate electrode material is filled in the trenches in accordance with various embodiments of the present disclosure;

[0019] Figure 7 illustrates a cross sectional view of the semiconductor device shown in Figure 6 after an etch-back process is applied to the top surface shown in Figure 6 in accordance with various embodiments of the present disclosure;

[0020] Figure 8 illustrates a cross sectional view of the semiconductor device shown in Figure 7 after body regions and a body ring structure are formed in the epitaxial layer in accordance with various embodiments of the present disclosure;

[0021] Figure 9 illustrates a cross sectional view of the semiconductor device shown in Figure 8 after an BSD bottom dielectric layer and an BSD layer are formed over the epitaxial layer in accordance with various embodiments of the present disclosure;

[0022] Figure 10 illustrates a cross sectional view of the semiconductor device shown in Figure 9 after an anisotropic etching process is applied to the ESD bottom dielectric layer and the ESD layer in accordance with various embodiments of the present disclosure;

[0023] Figure 11 illustrates a cross sectional view of the semiconductor device shown in Figure 10 after source regions are formed over the body regions and n-i- regions are formed in the ESD layer in accordance with various embodiments of the present disclosure;

[0024] Figure 12 illustrates a cross sectional view of the semiconductor device shown in Figure 11 after a dielectric layer is formed over the epitaxial layer in accordance with various embodiments of the present disclosure;

[0025] Figure 13 illustrates a cross sectional view of the semiconductor device shown in Figure 12 after an anisotropic etching process is applied to the dielectric layer to form a plurality of trenches in accordance with various embodiments of the present disclosure;

[0026] Figure 14 illustrates a cross sectional view of the semiconductor device shown in Figure 13 after a P+ region is formed in a bottom of each trench in accordance with various embodiments of the present disclosure;

[0027] Figure 15 illustrates a cross sectional view of the semiconductor device shown in Figure 14 after metal materials are filled in the trenches of the semiconductor device in accordance with various embodiments of the present disclosure;

[0028] Figure 16 illustrates a cross sectional view of the semiconductor device shown in Figure 15 after source and gate contacts are formed in accordance with various embodiments of the present disclosure;

[0029] Figure 17illustrates a cross sectional view of a second implementation of the breakdown voltage enhancement and leakage prevention structure in accordance with various embodiments of the present disclosure;

[0030] Figure 18 illustrates a cross sectional view of a third implementation of the breakdown voltage enhancement and leakage prevention structure in accordance with various embodiments of the present disclosure;

[0031] Figure 19 illustrates a cross sectional view of a fourth implementation of the breakdown voltage enhancement and leakage prevention structure in accordance with various embodiments of the present disclosure;

[0032] Figure 20 illustrates a cross sectional view of a semiconductor device after the gates are covered by a dielectric layer in accordance with various embodiments of the present disclosure;

[0033] Figure 21 illustrates a cross sectional view of the semiconductor device shown in Figure 20 after body regions are formed in the epitaxial layer in accordance with various embodiments of the present disclosure;

[0034] Figure 22 illustrates a cross sectional view of the semiconductor device shown in Figure 21 after a first n-type well is formed in the first p-type well in accordance with various embodiments of the present disclosure;

[0035] Figure 23 illustrates a cross sectional view of the semiconductor device shown in Figure 22 after a second p-type well is formed in the first n-type well in accordance with various embodiments of the present disclosure;

[0036] Figure 24 illustrates a cross sectional view of the semiconductor device shown in Figure 23 after a second n-type well is formed in the p-type well in accordance with various embodiments of the present disclosure;

[0037] Figure 25 illustrates a cross sectional view of a fifth implementation of the breakdown voltage enhancement and leakage prevention structure in accordance with various embodiments of the present disclosure;

[0038] Figure 26 illustrates a cross sectional view of a sixth implementation of the breakdown voltage enhancement and leakage prevention structure in accordance with various embodiments of the present disclosure;

[0039] Figure 27 illustrates a cross sectional view of a seventh implementation of the breakdown voltage enhancement and leakage prevention structure in accordance with various embodiments of the present disclosure;

[0040] Figure 28 illustrates a cross sectional view of an eighth implementation of the breakdown voltage enhancement and leakage prevention structure in accordance with various embodiments of the present disclosure;

[0041] Figure 29 illustrates a cross sectional view of a ninth implementation of the breakdown voltage enhancement and leakage prevention structure in accordance with various embodiments of the present disclosure;

[0042] Figure 30 illustrates a flow chart of a method for fabricating the power MOSFET shown in Figure 1 in accordance with various embodiments of the present disclosure; and

[0043] Figure 31 a cross sectional view of the power MOSFET shown in Figure 16 and a top view of the body ring structure in accordance with various embodiments of the present disclosure.

[0044] Corresponding numerals and symbols in the different figures generally refer to corresponding parts unless otherwise indicated. The figures are drawn to clearly illustrate the relevant aspects of the various embodiments and are not necessarily drawn to scale.DETAILED DESCRIPTION OF ILLUSTRATIVE EMBODIMENTS

[0045] The making and using of the presently preferred embodiments are discussed in detail below. It should be appreciated, however, that the present disclosure provides many applicable inventive concepts that can be embodied in a wide variety of specific contexts. The specific embodiments discussed are merely illustrative of specific ways to make and use the disclosure, and do not limit the scope of the disclosure.

[0046] The present disclosure will be described with respect to preferred embodiments in a specific context, namely a power MOSFET with a gate-source ESD diode structure and a breakdown voltage enhancement and leakage prevention structure. The disclosure may also be applied, however, to a variety of power transistors. Hereinafter, various embodiments will be explained in detail with reference to the accompanying drawings.

[0047] Figure 1 illustrates a cross sectional view of a power MOSFET having a gate-source ESD diode structure and a breakdown voltage enhancement and leakage prevention structure in accordance with various embodiments of the present disclosure. The power MOSFET 100 comprises a substrate 102, an epitaxial layer 104, a plurality of gates 702, 704 and 706, a body comprising a first body region 802 and a second body region 804, a source comprising a first source region 912 and a second source region 914, a body ring structure 820, an interlayer dielectric layer 920, a plurality of source contact plugs 951, 952 and 953, a gate contact plug 954, a gate-source ESD diode structure 929, a source contact 962, a gate contact 964 and a drain contact 966.

[0048] As shown in Figure 1, the epitaxial layer 104 is formed over the substrate 102. The plurality of gates 702, 704 and 706 is formed in the epitaxial layer 104. The first body region 802 is formed in the epitaxial layer 104 and between the gates 702 and 704. The second body region 804 is formed in the epitaxial layer 104 and between the gates 704 and 706. It should be noted that although the body regions 802 and 804 may be two separate regions from the cross-sectional view shown in Figure 1 , the body regions 802 and 804 can also be portions of a continuous body region from a top view.

[0049] As shown in Figure 1, the first source region 912 is formed in the first body region 802 and between the gates 702 and 704. The second source region 914 is formed in the second body region 804 and between the gates 704 and 706. It should be noted that although the source regions 912 and 914 may be two separate regions from the cross-sectional view shown in Figure 1, the source regions 912 and 914 can also be portions of a continuous source region from a top view.

[0050] The interlayer dielectric layer 920 is formed over the epitaxial layer 104. The gatesource ESD diode structure 929 is formed over the epitaxial layer 104 and in the interlayer dielectric layer 920. The gate-source ESD diode structure 929 comprises a plurality of n-i- regions and a plurality of p-type regions arranged in an alternating manner. In some embodiments, the gate-source ESD diode structure 929 comprises a first p-type region 921, a first 11+ region 922, a second p-type region 923, a second n-i- region 924 and a third p-type region 925 connected in cascade. The first p- type region 921 is connected to the gate contact 964. The third p-type region 925 is connected to the source contact 962.

[0051] The body ring structure 820 is formed in the epitaxial layer 104 and underneath the gate-source ESD diode structure 929. From the cross-sectional view shown in Figure 1, the body ring structure 820 comprises four columns 822, 824, 826 and 828. In some embodiments, from a top view, the body ring structure 820 is a concentric ring structure formed in the epitaxial layer 104.

[0052] The body ring structure 820 functions as a breakdown voltage enhancement and leakage prevention structure. In operation, the body ring structure 820 is configured to disperse an electric field on the gate-source ESD diode structure 929. The body ring structure 820 provides an electric field gradient that reduces the peak electric field at the edge of the gate-source ESD diode structure 929, thereby spreading the electric field more evenly. As a result, the breakdown voltage of the power MOSFET 100 can be improved, and the leakage of the power MOSFET 100 can be reduced.

[0053] As shown in Figure 1 , the source contact plug 951 extends through the interlayer dielectric layer 920, the first source region 912 and partially through the first body region 802. A firstterminal of the source contact plug 951 is connected to the source contact 962. A second terminal of the source contact plug 951 is connected to a first p+ region 942 formed in the first body region 802.

[0054] The source contact plug 952 extends through the interlayer dielectric layer 920, the second source region 914 and partially through the second body region 804. A first terminal of the source contact plug 952 is connected to the source contact 962. A second terminal of the source contact plug 952 is connected to a second p+ region 944 formed in the second body region 804.

[0055] The source contact plug 953 extends partially through the interlayer dielectric layer 920, and partially through the third p-type region 925. A first terminal of the source contact plug 953 is connected to the source contact 962. A second terminal of the source contact plug 953 is connected to a fourth p+ region 948 formed in the third p-type region 925.

[0056] The gate contact plug 954 extends partially through the interlayer dielectric layer 920, and partially through the first p-type region 921. A first terminal of the gate contact plug 954 is connected to the gate contact 964. A second terminal of the gate contact plug 954 is connected to a third p-i- region 946 formed in the first p-type region 921.

[0057] In some embodiments, the power MOSFET shown in Figure 1 can be implemented as an n-type power MOSFET. The substrate 102 is an n-i- substrate. The epitaxial layer 104 is an n- type layer. The doping concentration of the epitaxial layer 104 is lower than that of the substrate 102. The body region is a p-type region. The source is an n-i- region. The body ring structure 820 is a p- type body ring structure. The n-type regions (e.g., source regions 912 and 914) in Figure 1 are formed by implanting n-type dopants such as phosphorous, arsenic or the like. Alternatively, the n-type regions can be formed by a diffusion process. The p-type regions (e.g., body regions 802 and 804) in Figure 1 are formed by implanting p-type doping materials such as boron, gallium, aluminum, indium, combinations thereof, or the like. Alternatively, the p-type regions can be formed by a diffusion process.

[0058] In alternative embodiments, the power MOSFET shown in Figure 1 can be implemented as a p-type power MOSFET. The substrate 102 is a P+ substrate. The epitaxial layer 104 is a p-type layer. The doping concentration of the epitaxial layer 104 is lower than that of the substrate 102. The body region is an n-type region. The source is a p-t- region. The body ring structure 820 is an n-type body ring structure.

[0059] As shown in Figure 1, the drain contact 966 is formed underneath the substrate 102. In other words, the source contact 962 and the gate contact 964 of the power MOSFET 100 are fabricated on opposite sides of a wafer.

[0060] Figures 2-16 illustrate cross section views of intermediate steps of fabricating the power MOSFET shown in Figure 1 in accordance with various embodiments of the present disclosure.

[0061] Figure 2 illustrates a cross sectional view of a semiconductor device after an epitaxial layer is grown from a substrate in accordance with various embodiments of the present disclosure. In accordance with an embodiment, the substrate 102 may be an n-i- substrate, which is doped with an n- type impurity such as phosphorous, arsenic or the like.

[0062] An n-type epitaxial layer 104 is grown from the substrate 102. The epitaxial growth of the n-type epitaxial layer 104 may be implemented by using suitable semiconductor fabrication processes such as chemical vapor deposition (CVD), ultra-high vacuum chemical vapor deposition (UHV-CVD) and the like.

[0063] Figure 3 illustrates a cross sectional view of the semiconductor device shown in Figure 2 after an etching process is performed on a hard mask layer to define the pattern of the hard mask layer in accordance with various embodiments of the present disclosure. In accordance with an embodiment, a hard mask layer 106 is deposited on top of the epitaxial layer 104 using suitable fabrication techniques such as CVD and the like. The hard mask layer 106 may be formed of suitable materials such as silicon nitride. The hard mask layer 106 functions as an etching mask.

[0064] A photoresist layer 108 is formed over the hard mask layer 106 using a spin on deposition and the like. The photoresist layer 108 is patterned using suitable photolithography techniques. Thereafter, the hard mask layer 106 is patterned in consideration with the location of the plurality of gates 702, 704 and 706 of the power MOSFET 100 shown in Figure 1.

[0065] Figure 4 illustrates a cross sectional view of the semiconductor device shown in Figure 3 after three trenches are formed in the epitaxial layer in accordance with various embodiments of the present disclosure. The remaining photoresist layer 108 shown in Figure 3 may be removed by using suitable photoresist stripping techniques such as chemical solvent cleaning, plasma ashing, dry stripping and the like. The photoresist stripping techniques are well known, and hence are not discussed in further detail herein to avoid repetition. Thereafter, an etching process, such as a reactive ion etch (RIE) or other dry etch, an anisotropic wet etch, or any other suitable anisotropic etch or patterning process, is performed to form three trenches in the epitaxial layer 104, namely a first trench 402, a second trench 404 and a third trench 406 as shown in Figure 4.

[0066] Figure 5 illustrates a cross sectional view of the semiconductor device shown in Figure 4 after a thin dielectric layer is formed in the trenches and over the epitaxial layer in accordance with various embodiments of the present disclosure. As shown in Figure 5, the hard mask layer 106 shown in Figure 4 has been removed through a suitable har d mask layer removal processsuch as a wet etch process. The removal process is applied to the top surface of the semiconductor device until the epitaxial layer 104 is exposed.

[0067] The thin dielectric layer 502 is a gate dielectric layer. As shown in Figure 5, the thin dielectric layer 502 is formed on the bottoms of the trenches 402, 404 and 406 as well as the sidewalls of the trenches. The thin dielectric layer 502 may be formed of commonly used dielectric materials such as oxides, nitrides, oxynitrides, high-k materials, combinations thereof, and multi-layers thereof.

[0068] In accordance with an embodiment, the thin dielectric layer 502 is an oxide layer. The thin dielectric layer 502 may be formed by using suitable thermal treatment techniques, wet treatment techniques or deposition techniques such as Physical Vapor Deposition (PVD), CVD, Atomic Layer Deposition (ALD) and the like.

[0069] Figure 6 illustrates a cross sectional view of the semiconductor device shown in Figure 5 after a gate electrode material is filled in the trenches in accordance with various embodiments of the present disclosure. The gate electrode material is filled in the trenches 402, 404 and 406. The gate electrode material also forms a gate electrode layer 602 over the epitaxial layer 104.

[0070] In some embodiments, the gate electrode material is polysilicon. In accordance with an embodiment, the polysilicon layer is doped with n-type impurity ions to become a gate conductive layer. While phosphorous is used as the n-type impurity ions, other n-type conductive ions may be used if necessary or desired. Doping of the n-type impurity ions in the polysilicon layer preferably is implemented through a separate n-type impurity ion doping process after deposition of the polysilicon layer, or by depositing the polysilicon layer while doping the n-type impurity ions.

[0071] An annealing process is applied to the polysilicon layer. The annealing process is employed to diffuse the n-type impurity ions into the polysilicon layer. The annealing process may be implemented as a rapid thermal process.

[0072] Figure 7 illustrates a cross sectional view of the semiconductor device shown in Figure 6 after an etch-back process is applied to the top surface shown in Figure 6 in accordance with various embodiments of the present disclosure. A planar ization process, such as chemical mechanical polishing (CMP) or etch back step, may be performed to planarize an upper surface of the gate electrode layer 602 until the thin dielectric layer is exposed. Thereafter, a polysilicon oxidation process is carried out to form a dielectric layer 710 to cover the polysilicon material in the trenches. As shown in Figure 7, there may be three gates formed in the epitaxial layer after the CMP process, namely a first gate 702, a second gate 704 and a third gate 706.

[0073] Figure 8 illustrates a cross sectional view of the semiconductor device shown in Figure 7 after body regions and a body ring structure are formed in the epitaxial layer in accordancewith various embodiments of the present disclosure. A photoresist layer 812 is formed over the top surface of the semiconductor device using a spin on deposition and the like. In consideration with the location of the body ring structure of the power MOSFET 100 shown in Figure 1, the photoresist layer 812 is patterned using suitable photolithography techniques. Body regions 802 and 804, and the body ring structure 820 may be formed in the upper portion of the epitaxial layer 104. In accordance with an embodiment, the body regions 802 and 804, and the body ring structure 820 may be formed by implanting appropriate p-type dopants such as boron, gallium, indium and the like.

[0074] In some embodiments, the body ring structure 820 is a concentric ring structure from a top view. As shown in the cross-sectional view, the body ring structure 820 has four columns 822, 824, 826 and 828. In some embodiments, a bottommost surface of the body ring structure 820 is level with a bottommost surface of the body regions 802 and 804 as shown in Figure 8.

[0075] In operation, the body ring structure 820 functions as a breakdown voltage enhancement and leakage prevention structure. The function of the breakdown voltage enhancement and leakage prevention structure will be described below with respect to Figure 11.

[0076] Figure 9 illustrates a cross sectional view of the semiconductor device shown in Figure 8 after an ESD bottom dielectric layer and an ESD layer are formed over the epitaxial layer in accordance with various embodiments of the present disclosure. The remaining photoresist layer 812 shown in Figure 8 may be removed by using suitable photoresist stripping techniques. Thereafter, the ESD bottom dielectric layer 902 is deposited over the top surface of the semiconductor device using suitable deposition techniques such as PVD, CVD, ALD and the like. The ESD bottom dielectric layer 902 may be formed of commonly used dielectric materials such as oxides, nitrides, oxynitrides, high-k materials, combinations thereof, and multi-layers thereof.

[0077] The ESD layer 904 is deposited over the ESD bottom dielectric layer 902. The ESD layer 904 may be formed of polysilicon. In accordance with an embodiment, the ESD layer 904 is doped with p-type impurity ions such as Boron or the like. Doping of the p-type impurity ions in the ESD layer 904 preferably is implemented through a separate p-type impurity ion doping process after deposition of the ESD layer 904, or by depositing the ESD layer 904 while doping the p-type impurity ions.

[0078] Figure 10 illustrates a cross sectional view of the semiconductor device shown in Figure 9 after an anisotropic etching process is applied to the ESD bottom dielectric layer and the ESD layer in accordance with various embodiments of the present disclosure. An etching process is applied to the semiconductor device. As shown in Figure 10, the portions of the ESD bottom dielectric layer and the ESD layer over the gates 702, 704 and 706 have been removed as a result.

[0079] Figure 11 illustrates a cross sectional view of the semiconductor device shown in Figure 10 after source regions are formed over the body regions and n+ regions are formed in the ESD layer in accordance with various embodiments of the present disclosure. As shown in Figure 11 , n+ regions 912 and 914 are formed over the body regions 802 and 804 respectively through suitable fabrication processes such as an ion implantation process. In accordance with an embodiment, the n+ regions 912 and 914 may function as a source region of the power MOSFET 100 shown in Figure 1. At the same time, n+ regions 922 and 924 are formed in the ESD layer 904 shown in Figure 10. The n+ regions are formed by implanting appropriate n-type dopants such as phosphorous, arsenic and the like.

[0080] As described above with respect to Figure 9, the ESD layer 904 is a p-type layer once the ESD layer 904 is doped with p-type impurity ions. Since the n+ regions 922 and 924 are formed in the ESD layer 904, three p-type regions 921, 923 and 925 are formed in the ESD layer 904.

[0081] A shown in Figure 11 , a first p-type region 921 , a first n+ region 922, a second p-type region 923, a second n+ region 924 and a third p-type region 925 are connected in cascade. The first p-type region 921, the first n+ region 922, the second p-type region 923, the second n+ region 924 and the third p-type region 925 form the gate-source ESD diode structure 929.

[0082] As shown in Figure 11 , the 11+ regions and the p-type regions are formed in an alternating manner. The n+ regions and the p-type regions form a back-to-back ESD diode structure. The arrangement of the n+ regions and the p-type regions described above is merely an example, which should not unduly limit the scope of the claims. One of ordinary skill in the art would recognize many variations, alternatives, and modifications. For example, the back-to-back ESD diode structure may comprise a first n+ region, a first p-type region, a second n+ region, a second p-type region and a third 11+ region connected in cascade.

[0083] As shown in Figure 11 , the gate-source ESD diode structure 929 and the body ring structure 820 are separated by the ESD bottom dielectric layer 902. The body ring structure 820 is configured to disperse an electric field on the gate-source ESD diode structure 929. The body ring structure 820 provides an electric field gradient that reduces the peak electric field at the edge of the gate-source ESD diode structure 929, thereby spreading the electric field more evenly. As a result, the body ring structure 820 is able to improve the performance of the power MOSFET 100.

[0084] Figure 12 illustrates a cross sectional view of the semiconductor device shown in Figure 11 after a dielectric layer is formed over the epitaxial layer in accordance with various embodiments of the present disclosure. The dielectric layer 920 is deposited over the epitaxial layer 104. The dielectric layer 920 may be alternatively referred to as an inter-layer dielectric (ILD) layer. The dielectric layer 920 may be a low-k dielectric layer having a low dielectric constant, for example,less than about 3.5. The dielectric layer 920 may also comprise a combination of materials, such as silicon nitride, silicon oxy-nitride, high-k dielectrics, low-k dielectrics, CVD poly-silicon or other dielectrics. The dielectric layer 920 may be deposited using suitable deposition techniques such as sputtering, CVD and the like.

[0085] Figure 13 illustrates a cross sectional view of the semiconductor device shown in Figure 12 after an anisotropic etching process is applied to the dielectric layer to form a plurality of trenches in accordance with various embodiments of the present disclosure. A plurality of trenches 932, 934, 936 and 938 are formed by etching the dielectric layer 920 and the regions underneath the dielectric layer 920.

[0086] In some embodiments, trenches 932, 934 and 938 are source contact trenches. As shown in Figure 13, the trench 932 extends through the dielectric layer 920, the source region 912 and partially through the body region 802. Likewise, the trench 934 extends through the dielectric layer 920, the source region 914 and partially through the body region 804. The trench 936 extends partially through the dielectric layer 920 and partially through the first p-type region 921. The trench 938 extends partially through the dielectric layer 920 and partially through the third p-type region 925.

[0087] Figure 14 illustrates a cross sectional view of the semiconductor device shown in Figure 13 after a p+ region is formed in a bottom of each trench in accordance with various embodiments of the present disclosure. A suitable implantation process such as a blanket ion implantation is performed. P-type impurity ions, such as boron ions and the like, are implanted into the body regions 802, 804, the first p-type region 921 and the third p-type region 925. Four p+ regions 942, 944, 946 and 948 are thus formed in the trenches respectively as shown in Figure 14. The p-i- regions 942, 944, 946 and 948 are specifically designed to further reduce the contact resistance.

[0088] Figure 15 illustrates a cross sectional view of the semiconductor device shown in Figure 14 after metal materials are filled in the trenches of the semiconductor device in accordance with various embodiments of the present disclosure. A metallic material, which includes tungsten, titanium, aluminum, copper, any combinations thereof and / or the like, is filled into the trenches 932, 934, 936 and 938, forming contact plugs 951, 952, 953 and 954. The metallic material over the interlayer dielectric layer 920 forms a metal contact layer 950.

[0089] Figure 16 illustrates a cross sectional view of the semiconductor device shown in Figure 15 after source and gate contacts are formed in accordance with various embodiments of the present disclosure. In consideration with the location of the source contact and the gate contract of thepower MOSFET 100 shown in Figure 1, the metal contact layer 950 is patterned using suitable etching techniques.

[0090] As shown in Figure 16, a first source contact plug 951 has a first terminal connected to the source contact 962, and a second terminal connected to the first source region 912, the p+ region 942 and the first body region 802. A second source contact plug 952 has a first terminal connected to the source contact 962, and a second terminal connected to the second source region 914, the p+ region 944 and the second body region 804. A gate contact plug 954 has a first terminal connected to the gate contact 964, and a second terminal connected to the p+ region 946 and a first terminal of the gate-source ESD diode structure 929. A third source contact plug 953 has a first terminal connected to the source contact 962, and a second terminal connected to the P+ region 948 and a second terminal of the gate-source ESD diode structure 929.

[0091] Figure 17 illustrates a cross sectional view of a second implementation of the breakdown voltage enhancement and leakage prevention structure in accordance with various embodiments of the present disclosure. The breakdown voltage enhancement and leakage prevention structure of the power MOSFET 200 is implemented as a body ring structure 820 as shown in Figure17. The body ring structure 820 shown in Figure 17 is similar to that shown in Figure 16 except that the body ring structure 820 shown in Figure 17 has five columns 822, 824, 825, 826 and 828.

[0092] In some embodiments, a sidewall of the column 822 is vertically aligned with a sidewall of the first p-type region 921. A sidewall of the column 824 is vertically aligned with a sidewall of the first n+ region 922. A sidewall of the column 825 is vertically aligned with a sidewall of the second p-type region 923. A sidewall of the column 826 is vertically aligned with a sidewall of the second n+ region 924. A sidewall of the column 828 is vertically aligned with a sidewall of the third p-type region 925.

[0093] It should be recognized that while Figure 17 illustrates the breakdown voltage enhancement and leakage prevention structure with five columns 822, 824, 825, 826 and 828, the breakdown voltage enhancement and leakage prevention structure could accommodate any number of columns.

[0094] Figure 18 illustrates a cross sectional view of a third implementation of the breakdown voltage enhancement and leakage prevention structure in accordance with various embodiments of the present disclosure. The breakdown voltage enhancement and leakage prevention structure of the power MOSFET 300 is implemented as a body ring structure 820 as shown in Figure18. The body ring structure 820 shown in Figure 18 is similar to that shown in Figure 16 except that the four columns 822, 824, 826 and 828 of the body ring structure 820 arc vertically aligned with respective ESD diode regions.

[0095] In some embodiments, a sidewall of the column 822 is vertically aligned with a first sidewall of the first n+ region 922. A sidewall of the column 824 is vertically aligned with a second sidewall of the first n+ region 922. A sidewall of the column 826 is vertically aligned with a first sidewall of the second n+ region 924. A sidewall of the column 828 is vertically aligned with a second sidewall of the second n+ region 924.

[0096] Figure 19 illustrates a cross sectional view of a fourth implementation of the breakdown voltage enhancement and leakage prevention structure in accordance with various embodiments of the present disclosure. The breakdown voltage enhancement and leakage prevention structure of the power MOSFET 400 comprises a plurality of n-type wells 974, 976 and a plurality of p-type wells 973, 975 arranged in an alternating manner. The plurality of n-type wells and the plurality of p-type wells are configured to disperse an electric field on the gate-source ESD diode structure 929. As shown in Figure 19, the plurality of n-type wells and the plurality of p-type wells, and the gate-source ESD diode structure 929 are separated by a dielectric layer.

[0097] The p-n-p-n-p well structure shown in Figure 19 can achieve higher levels of reliability and durability in the power MOSFET 400, thereby improving the ESD protection design.

[0098] The arrangement of the n wells and the wells described above is merely an example, which should not unduly limit the scope of the claims. One of ordinary skill in the art would recognize many variations, alternatives, and modifications. For example, an n-p-n-p-n well structure can be used to replace the well structure shown in Figure 19. The n-p-n-p-n well structure fully covers the area underneath the gate-source ESD diode structure 929. This features multiple p-n diodes that enhance the electric characteristics of the power MOSFET 400, providing stronger protection against ESD events.

[0099] Figures 20-24 illustrate cross sectional views of intermediate steps of fabricating the breakdown voltage enhancement and leakage prevention structure shown in Figure 19 in accordance with various embodiments of the present disclosure.

[0100] Figure 20 illustrates a cross sectional view of a semiconductor device after the gates are covered by a dielectric layer in accordance with various embodiments of the present disclosure. The cross-sectional view shown in Figure 20 is similar to that shown in Figure 7, and hence is not discussed again herein to avoid repetition.

[0101] Figure 21 illustrates a cross sectional view of the semiconductor device shown in Figure 20 after body regions are formed in the epitaxial layer in accordance with various embodiments of the present disclosure. The body regions 971, 972 and 973 are p-type regions. The p- typc regions 971, 972 and 973 arc formed in the epitaxial layer 104 through suitable semiconductor doping techniques such as an ion implantation process. In some embodiments, appropriate p-typedopants such as boron, gallium, indium and / or the like are implanted into the epitaxial layer 104 to form the body regions 971, 972 and 973. The body region 973 is alternatively referred to as a first p- type well.

[0102] Figure 22 illustrates a cross sectional view of the semiconductor device shown in Figure 21 after a first n-type well is formed in the first p-type well in accordance with various embodiments of the present disclosure. A photoresist layer 991 is deposited over the semiconductor device using a spin on deposition and the like. The photoresist layer 991 is exposed and developed such that only the portion over the first n-type well 974 has been removed.

[0103] The first n-type well 974 is formed by implanting n-type dopants such as phosphorous, arsenic and the like. Alternatively, the first n-type well 974 can be formed by a diffusion process. As shown in Figure 22, the first n-type well 974 is surrounded by the first p-type well 973.

[0104] Figure 23 illustrates a cross sectional view of the semiconductor device shown in Figure 22 after a second p-type well is formed in the first n-type well in accordance with various embodiments of the present disclosure. A photoresist layer 992 is deposited over the semiconductor device using a spin on deposition and the like. The photoresist layer 992 is exposed and developed such that only the portion over the second p-type well 975 has been removed.

[0105] The second p-type well 975 is formed by implanting p-type dopants such as boron, gallium, aluminum, indium and the like. Alternatively, the second p-type well 975 can be formed by a diffusion process. As shown in Figure 23, the second p-type well 975 is surrounded by the first n-type well 974.

[0106] Figure 24 illustrates a cross sectional view of the semiconductor device shown in Figure 23 after a second n-type well is formed in the p-type well in accordance with various embodiments of the present disclosure. A photoresist layer 993 is deposited over the semiconductor device using a spin on deposition and the like. The photoresist layer 993 is exposed and developed such that only the portion over the second n-type well 976 has been removed.

[0107] The second n-type well 976 is formed by implanting n-type dopants such as phosphorous, arsenic and the like. Alternatively, the second n-type well 976 can be formed by a diffusion process. As shown in Figure 24, the second n-type well 976 is surrounded by the second p- type well 975.

[0108] One skilled in the art will recognize that Figure 24 illustrates an ideal profile. The dimensions of the wells may vary after subsequent fabrication processes.

[0109] Figure 25 illustrates a cross sectional view of a fifth implementation of the breakdown voltage enhancement and leakage prevention structure in accordance with variousembodiments of the present disclosure. The breakdown voltage enhancement and leakage prevention structure of the power MOSFET 500 comprises two n-type wells 981 , 983 and one p-type well 982 arranged in an alternating manner. The n-type wells and the p-type well are configured to disperse an electric field on the gate-source ESD diode structure 929. The n-type wells and the p-type well, and the gate-source ESD diode structure 929 are separated by a dielectric layer.

[0110] As shown in Figure 25, a first n-type well 981 is formed in the epitaxial layer 104. A first p-type well 982 is formed in the first n-type well 981. A width of the first p-type well 982 is equal to a width of the first n-type well 981. A second n-type well 983 is formed in the first p-type well 982. A width of the second n-type well 983 is equal to the width of the first p-type well 982.

[0111] It should be recognized that while Figure 25 illustrates the breakdown voltage enhancement and leakage prevention structure with three wells 981, 982 and 983, the breakdown voltage enhancement and leakage prevention structure could accommodate any number of wells arranged in an alternating manner.

[0112] Figure 26 illustrates a cross sectional view of a sixth implementation of the breakdown voltage enhancement and leakage prevention structure in accordance with various embodiments of the present disclosure. The breakdown voltage enhancement and leakage prevention structure of the power MOSFET 600 is a reduced surface field (RESURF) structure 990. The RESURF structure is a well-known mechanism to improve the breakdown voltage of high voltage MOSFETs.

[0113] As shown in Figure 26, the RESURF structure 990 is placed beneath the gate-source ESD diode structure 929. The RESURF structure 990 and the gate-source ESD diode structure 929 are separated by a dielectric layer. This RESURF structure 990 helps to disperse the electric field on the gate-source ESD diode structure 929, thereby reducing the risk of electrical breakdown and leakage.

[0114] Figure 27 illustrates a cross sectional view of a seventh implementation of the breakdown voltage enhancement and leakage prevention structure in accordance with various embodiments of the present disclosure. The breakdown voltage enhancement and leakage prevention structure of the power MOSFET 700 comprises a RESURF structure 990 and a body ring structure 820.

[0115] The RESURF structure 990 and the body ring structure 820 are configured to disperse an electric field on the gate-source ESD diode structure 929. The body ring structure 820 is a concentric ring structure formed in the epitaxial layer 104. The RESURF structure 990 and the gatesource ESD diode structure 929 arc separated by a dielectric layer. As shown in Figure 27, theRESURF structure 990 is between the gate-source ESD diode structure 929 and the body ring structure 820.

[0116] Figure 28 illustrates a cross sectional view of an eighth implementation of the breakdown voltage enhancement and leakage prevention structure in accordance with various embodiments of the present disclosure. The breakdown voltage enhancement and leakage prevention structure of the power MOSFET 800 comprises a plurality of n-type wells, a plurality of p-type wells and a body ring structure 820. The plurality of n-type wells and the plurality of p-type wells shown in Figure 28 are similar to those shown in Figure 19, and hence are not discussed again herein.

[0117] The plurality of n-type wells and the plurality of p-type wells are arranged in an alternating manner. The plurality of n-type wells, the plurality of p-type wells and the body ring structure 820 are configured to disperse an electric field on the gate-source ESD diode structure 929. The body ring structure 820 is a concentric ring structure formed in the epitaxial layer 104. The plurality of n-type wells and the plurality of p-type wells, and the gate-source ESD diode structure 929 are separated by a dielectric layer. The plurality of n-type wells and the plurality of p-type wells are between the gate-source ESD diode structure 929 and the body ring structure 820.

[0118] Figure 29 illustrates a cross sectional view of a ninth implementation of the breakdown voltage enhancement and leakage prevention structure in accordance with various embodiments of the present disclosure. The breakdown voltage enhancement and leakage prevention structure of the power MOSFET 900 comprises a plurality of n-type wells, a plurality of p-type wells and a body ring structure 820. The plurality of n-type wells and the plurality of p-type wells shown in Figure 29 are similar to those shown in Figure 25, and hence are not discussed again herein.

[0119] The plurality of n-type wells and the plurality of p-type wells are arranged in an alternating manner. The plurality of n-type wells, the plurality of p-type wells and the body ring structure 820 are configured to disperse an electric field on the gate-source ESD diode structure 929. The body ring structure 820 is a concentric ring structure formed in the epitaxial layer 104. The plurality of n-type wells and the plurality of p-type wells, and the gate-source ESD diode structure are separated by a dielectric layer. As shown in Figure 29, the plurality of n-type wells and the plurality of p-type wells are between the gate-source ESD diode structure 929 and the body ring structure 820.

[0120] Figure 30 illustrates a flow chart of a method for fabricating the power MOSFET shown in Figure 1 in accordance with various embodiments of the present disclosure. This flowchart shown in Figure 30 is merely an example, which should not unduly limit the scope of the claims. One of ordinary skill in the art would recognize many variations, alternatives, and modifications. For example, various steps illustrated in Figure 30 may be added, removed, replaced, rearranged and repeated.

[0121] At step 3002, an epitaxial layer is grown over a substrate.

[0122] At step 3004, a plurality of gates is formed in the epitaxial layer.

[0123] At step 3006, a body region and a breakdown voltage enhancement and leakage prevention structure are formed in the epitaxial layer.

[0124] At step 3008, a source is formed in the epitaxial layer and a gate-source ESD diode structure is formed over the epitaxial layer.

[0125] At step 3010, a source contact is formed to be connected to the source and a first terminal of the gate-source ESD diode structure, and a gate contact is formed to be connected to the plurality of gates and a second terminal of the gate-source ESD diode structure.

[0126] The step of forming the breakdown voltage enhancement and leakage prevention structure in the epitaxial layer comprises forming a RESURF structure through an implantation process, wherein the RESURF structure is in an upper portion of the epitaxial layer, and the RESURF structure and the gate-source ESD diode structure are separated by a dielectric layer.

[0127] The step of forming the breakdown voltage enhancement and leakage prevention structure in the epitaxial layer comprises forming a body ring structure through an implantation process, wherein the body ring structure is a concentric ring structure, and the body ring structure and the gate-source ESD diode structure are separated by a dielectric layer.

[0128] The step of forming the breakdown voltage enhancement and leakage prevention structure in the epitaxial layer comprises forming a first p-type well in the epitaxial layer, forming a first n-type well in the first p-type well, and wherein the first n-type well is surrounded by the first p- type well, forming a second p-type well in the first n-type well, and wherein the second p-type well is surrounded by the first n-type well, and forming a second n-type well in the second p-type well, and wherein the second n-type well is surrounded by the second p-type well.

[0129] The step of forming the breakdown voltage enhancement and leakage prevention structure in the epitaxial layer comprises forming a first n-type well in the epitaxial layer, forming a first p-type well in the first n-type well, and wherein a width of the first p-type well is equal to a width of the first n-type well, and forming a second n-type well in the first p-type well, and wherein a width of the second n-type well is equal to the width of the first p-type well.

[0130] The step of forming the gate-source ESD diode structure over the epitaxial layer comprises forming a plurality of n-type regions and a plurality of p-type regions in an alternating manner in an interlayer dielectric layer over the epitaxial layer.

[0131] The method further comprises forming an interlayer dielectric layer over the epitaxial layer, forming a plurality of trenches in the interlayer dielectric layer, forming a plurality of P+ regions at bottoms of respective trenches, performing a metal deposition process to fill the plurality oftrenches to form a plurality of source contact plugs and a gate contact plug, and forming the source contact and the gate contact through an etching process.

[0132] Figure 31 a cross sectional view of the power MOSFET shown in Figure 16 and a top view of the body ring structure in accordance with various embodiments of the present disclosure. The cross sectional view is taken along line A-A’. The cross-sectional view of the power MOSFET has been described above with respect to Figures and 16, and hence is not discussed again herein. As shown in the top view in Figure 31 , the source contact 962 is surrounded by an ESD polysilicon region (e.g., the gate-source ESD diode structure 929). The body ring structure 820 is a concentric ring structure. As shown in Figure 31, the body ring structure 820 comprises a first rectangle having rounded corners, a second rectangle having rounded corners, a third rectangle having rounded corners and a fourth rectangle having rounded corners. In the cross-sectional view, the first rectangle is represented by the column 822. The second rectangle is represented by the column 824. The third rectangle is represented by the column 826. The fourth rectangle is represented by the column 828.

[0133] As shown in Figure 31 , the body ring structure 820 comprises a plurality of rectangles having rounded corners. It is within the scope and spirit of the invention for the body ring structure 820 to comprise other shapes, such as, but not limited to oval, rectangle, square, or circular.

[0134] Although embodiments of the present disclosure and its advantages have been described in detail, it should be understood that various changes, substitutions and alterations can be made herein without departing from the spirit and scope of the disclosure as defined by the appended claims.

[0135] Moreover, the scope of the present application is not intended to be limited to the particular embodiments of the process, machine, manufacture, composition of matter, means, methods and steps described in the specification. As one of ordinary skill in the art will readily appreciate from the disclosure of the present disclosure, processes, machines, manufacture, compositions of matter, means, methods, or steps, presently existing or later to be developed, that perform substantially the same function or achieve substantially the same result as the corresponding embodiments described herein may be utilized according to the present disclosure. Accordingly, the appended claims are intended to include within their scope such processes, machines, manufacture, compositions of matter, means, methods, or steps.

Claims

WHAT IS CLAIMED IS:

1. An apparatus comprising: a drain and a source on opposing sides of an epitaxial layer; a plurality of gates formed in the epitaxial layer; a source contact connected to the source; a gate contact connected to the plurality of gates; a gate-source electrostatic discharge (ESD) diode structure connected between the gate contact and the source contact; and a breakdown voltage enhancement and leakage prevention structure formed underneath the gate-source ESD diode structure.

2. The apparatus of claim 1, wherein: the breakdown voltage enhancement and leakage prevention structure is a reduced surface field (RESURF) structure, and wherein: the RESURF structure is configured to disperse an electric field on the gate-source ESD diode structure; and the RESURF structure and the gate-source ESD diode structure are separated by a dielectric layer.

3. The apparatus of claim 1, wherein: the breakdown voltage enhancement and leakage prevention structure is a body ring structure, and wherein: the body ring structure is a concentric ring structure formed in the epitaxial layer; the body ring structure is configured to disperse an electric field on the gate-source ESD diode structure; and the body ring structure and the gate-source ESD diode structure are separated by a dielectric layer.

4. The apparatus of any one of claims 1-3, wherein: the breakdown voltage enhancement and leakage prevention structure comprises a plurality of n-type wells and a plurality of p-type wells arranged in an alternating manner, and wherein: the plurality of n-type wells and the plurality of p-type wells are configured to disperse an electric field on the gate-source ESD diode structure; andthe plurality of n-type wells and the plurality of p-type wells, and the gate-source ESD diode structure are separated by a dielectric layer.

5. The apparatus of claim 4, wherein: a first p-type well of the plurality of p-type wells is formed in the epitaxial layer; a first n-type well of the plurality of n-type wells is formed in the first p-type well, and wherein the first n-type well is surrounded by the first p-type well; a second p-type well of the plurality of p-type wells is formed in the first n-type well, and wherein the second p-type well is surrounded by the first n-type well; and a second n-type well of the plurality of n-type wells is formed in the second p-type well, and wherein the second n-type well is surrounded by the second p-type well.

6. The apparatus of claim 4, wherein: a first n-type well of the plurality of n-type wells is formed in the epitaxial layer; a first p-type well of the plurality of p-type wells is formed in the first n-type well, and wherein a width of the first p-type well is equal to a width of the first n-type well; and a second n-type well of the plurality of n-type wells is formed in the first p-type well, and wherein a width of the second n-type well is equal to the width of the first p-type well.

7. The apparatus of claim 1, wherein: the breakdown voltage enhancement and leakage prevention structure comprises a RESURF structure and a body ring structure, and wherein: the RESURF structure and the body ring structure are configured to disperse an electric field on the gate-source ESD diode structure; the body ring structure is a concentric ring structure formed in the epitaxial layer; the RESURF structure and the gate-source ESD diode structure are separated by a dielectric layer; and the RESURF structure is between the gate-source ESD diode structure and the body ring structure.

8. The apparatus of claim 1 or 7, wherein: the breakdown voltage enhancement and leakage prevention structure comprises a plurality of n-typc wells, a plurality of p-typc wells and a body ring structure, and wherein: the plurality of n-type wells and the plurality of p-type wells are arranged in an alternatingmanner; the plurality of n-type wells, the plurality of p-type wells and the body ring structure are configured to disperse an electric field on the gate-source ESD diode structure; the body ring structure is a concentric ring structure formed in the epitaxial layer; the plurality of n-type wells and the plurality of p-type wells, and the gate-source ESD diode structure are separated by a dielectric layer; and the plurality of n-type wells and the plurality of p-type wells are between the gate-source ESD diode structure and the body ring structure.

9. The apparatus of any one of claims 1-81, wherein: the gate-source ESD diode structure comprises a first p-type region, a first n-i- region, a second p-type region, a second n-i- region and a third p-type region connected in cascade, and wherein: the first p-type region is connected to the gate contact; and the third p-type region is connected to the source contact.

10. The apparatus of any one of claims 1-9, wherein: the plurality of gates comprises a first gate trench, a second gate trench and a third gate trench; and the source comprises a first source region and a second source region, and wherein: the first source region is between the first gate trench and the second gate trench; and the second source region is between the second gate trench and the third gate trench.

11. The apparatus of claim 10, further comprising: a first body region and a second body region, wherein the first body region is between the first gate trench and the second gate trench, and the second body region is between the second gate trench and the third gate trench; a first source contact plug having a first terminal connected to the source contact, and a second terminal connected to the first source region and the first body region; a second source contact plug having a first terminal connected to the source contact, and a second terminal connected to the second source region and the second body region; a gate contact plug having a first terminal connected to the gate contact, and a second terminal connected to a fir st terminal of the gate-source ESD diode structure; a third source contact plug having a first terminal connected to the source contact, and asecond terminal connected to a second terminal of the gate-source ESD diode structure; and an interlayer dielectric layer formed over the epitaxial layer, wherein the gate-source ESD diode structure is in the interlayer dielectric layer.

12. A method comprising: growing an epitaxial layer over a substrate; forming a plurality of gates in the epitaxial layer; forming a body region and a breakdown voltage enhancement and leakage prevention structure in the epitaxial layer; forming a source in the epitaxial layer and a gate-source ESD diode structure over the epitaxial layer; and forming a source contact connected to the source and a first terminal of the gate-source ESD diode structure, and a gate contact connected to the plurality of gates and a second terminal of the gate-source ESD diode structure.

13. The method of claim 12, wherein the step of forming the breakdown voltage enhancement and leakage prevention structure in the epitaxial layer comprises: forming a RESURF structure through an implantation process, wherein the RESURE structure is in an upper portion of the epitaxial layer, and the RESURF structure and the gate-source ESD diode structure are separated by a dielectric layer.

14. The method of claim 12 or 13, wherein the step of forming the breakdown voltage enhancement and leakage prevention structure in the epitaxial layer comprises: forming a body ring structure through an implantation process, wherein the body ring structure is a concentric ring structure, and the body ring structure and the gate-source ESD diode structure are separated by a dielectric layer.

15. The method of any one of claims 12-14, wherein the step of forming the breakdown voltage enhancement and leakage prevention structure in the epitaxial layer comprises: forming a first p-type well in the epitaxial layer; forming a first n-type well in the first p-type well, and wherein the first n-type well is surrounded by the first p-type well; forming a second p-type well in the first n-type well, and wherein the second p-type well is surrounded by the fir st n-type well; andforming a second n-type well in the second p-type well, and wherein the second n-type well is surrounded by the second p-type well.

16. The method of any one of claims 12-14, wherein the step of forming the breakdown voltage enhancement and leakage prevention structure in the epitaxial layer comprises: forming a first n-type well in the epitaxial layer; forming a first p-type well in the first n-type well, and wherein a width of the first p-type well is equal to a width of the first n-type well; and forming a second n-type well in the first p-type well, and wherein a width of the second n- type well is equal to the width of the first p-type well.

17. The method of any one of claims 12-16, wherein the step of forming the gate-source ESD diode structure over the epitaxial layer comprises: forming a plurality of n-type regions and a plurality of p-type regions in an alternating manner in an interlayer dielectric layer over the epitaxial layer.18 The method of any one of claims 12-17, further comprising: forming an interlayer dielectric layer over the epitaxial layer; forming a plurality of trenches in the interlayer dielectric layer; forming a plurality of p-i- regions at bottoms of respective trenches; performing a metal deposition process to fill the plurality of trenches to form a plurality of source contact plugs and a gate contact plug; and forming the source contact and the gate contact through an etching process.

19. A power MOSFET comprising: an epitaxial layer over a substrate; a plurality of gates formed in the epitaxial layer; a body region formed in the epitaxial layer; a source formed in the body region; a gate-source ESD diode structure formed over the epitaxial layer; a body ring structure formed in the epitaxial layer and underneath the gate-source ESD diode structure; an interlayer dielectric layer formed over the epitaxial layer, wherein the gate-source ESD diode structure is in the interlayer dielectric layer;a plurality of source contact plugs, wherein at least one of the plurality of source contact plugs extends through the interlayer dielectric layer, the source and partially through the body region; a gate contact plug extending partially through the interlayer dielectric layer; a gate contact connected to the plurality of gates and a first terminal of the gate-source ESD diode structure through the gate contact plug; and a source contact connected to the source, the body region and a second terminal of the gatesource ESD diode structure through the plurality of source contact plugs.

20. The power MOSFET of claim 19, wherein: the substrate is an n-type substrate; the epitaxial layer is an n-type layer; the body region is a p-type region; the source is an n-type region; the body ring structure is a p-type body ring structure; the body ring structure is a concentric ring structure formed in the epitaxial layer; and the gate-source ESD diode structure comprises a first p-type region, a first 11+ region, a second p-type region, a second n-i- region and a third p-type region connected in cascade, and wherein the first p-type region is connected to the gate contact, and the third p-type region is connected to the source contact.

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