Conveyance system

Abstract

A conveyance system (1) includes: a conveyance device (6) that conveys an article (10); a controller (90) that controls the conveyance device (6); an acquisition device (90) that acquires various types of information generated by the operation of the conveyance device (6); a detection device (37) that detects the state of the conveyance device (6); and an analogy device (75) that, with the detection by the detection device (37) as a trigger, estimates a portion requiring maintenance on the basis of the various types of information.

Description

Transport System

[0001] One aspect of the present invention relates to a transport system.

[0002] A known transport system used in semiconductor factories and the like is a traveling vehicle system that transports items such as FOUPs using a transport device such as an overhead traveling vehicle. Other known transport systems include a conveyor system that transports items using a transport device such as a belt conveyor, and a stocker system that temporarily stores and keeps items using a transport device such as a stacker crane. For example, Patent Document 1 discloses a transport system (traveling cart system) that, when an abnormal position on a track is detected by a cart, inspects the abnormal position using an abnormality detection sensor and determines whether the abnormality is caused by the cart or the track.

[0003] JP 2011-221687 A

[0004] However, in the above-described conventional conveying system, when an abnormal position is detected, various inspections using an abnormality detection sensor are required again, and the locations requiring maintenance are limited to those identified through the various inspections.

[0005] Therefore, an object of one aspect of the present invention is to provide a conveyance system that can more accurately and quickly infer locations that require maintenance.

[0006] (1) A conveying system according to one aspect of the present invention includes a conveying device that conveys items, a controller that controls the conveying device, an acquisition device that acquires various information generated by the operation of the conveying device, a detection device that detects the state of the conveying device, and an inference device that uses detection by the detection device as a trigger to infer areas requiring maintenance based on the various information.

[0007] In a conveyance system with this configuration, detection by the detection device serves as a trigger to infer the locations requiring maintenance based on various information without having to perform a new inspection, which allows for more accurate and rapid inference of the locations requiring maintenance.

[0008] (2) In the conveyance system described in (1) above, the conveyance devices may be a plurality of traveling vehicles that travel on a track, and the controller may control the plurality of traveling vehicles. In this configuration, it is possible to more accurately and quickly infer the locations requiring maintenance for each of the plurality of traveling vehicles that travel on the track.

[0009] (3) In the conveyance system described in (2) above, the various information may include management information about the multiple traveling vehicles managed by the controller, inspection results from an inspection device that is provided on the track and inspects each part of the multiple traveling vehicles, and history information about maintenance of the multiple traveling vehicles. In this configuration, it is possible to more accurately infer the parts requiring maintenance for each of the multiple traveling vehicles traveling on the track based on the various information about the traveling vehicles.

[0010] (4) In the conveying system described in (2) or (3) above, each of the multiple traveling vehicles may have a traveling section that travels on a track, a lifting section that is capable of raising and lowering relative to the traveling section by winding and unwinding a suspension member and that suspends and holds the article, and a vibration sensor as a detection device that is provided on the lifting section. With this configuration, it is possible to more accurately infer the parts that require maintenance for each of the multiple overhead traveling vehicles.

[0011] (5) In the conveyance system described in (4) above, the analogy device may be triggered by detection of vibrations by the vibration sensor when the traveling vehicle transfers an article, and when the analogy device infers that teaching of the traveling vehicle is necessary based on various information, cause the traveling vehicle to be re-taught. In this configuration, re-teach can be automatically performed on a traveling vehicle that has a teaching deviation.

[0012] (6) The conveying system described in (4) or (5) above may include a maintenance platform that measures mechanical errors in the traveling vehicles, and the analogy device may use detection by a vibration sensor when the traveling vehicle transfers an article as a trigger to estimate, based on various information, that teaching is required due to a mechanical error in the traveling vehicle, and move the target traveling vehicle to the maintenance platform. With this configuration, it is possible to confirm that a teaching error has occurred due to a mechanical error.

[0013] (7) In the conveying system described in (3) above, each of the plurality of traveling vehicles may have a traveling section having traveling rollers that travel on a track and an LDM provided on the traveling section, the detection device may be an inspection device that images the LDM, and the inference device may infer whether the location requiring maintenance is the roller, the LDM, or the track using the image of the LDM taken by the inspection device as a trigger. In this configuration, the location requiring maintenance can be accurately inferred from the image of the LDM.

[0014] According to one aspect of the present invention, it is possible to more accurately and quickly infer the location requiring maintenance.

[0015] FIG. 1 is a schematic plan view showing a traveling vehicle system according to one embodiment. FIG. 2 is a schematic front view of the overhead traveling vehicle of FIG. 1 as seen from the traveling direction. FIG. 3 is a block diagram showing the functional configuration of a transport system. FIG. 4 is a diagram explaining an example of an inference method in an inference device. FIG. 5 is a diagram explaining another example of an inference method in an inference device. FIG. 6 is a diagram explaining the flow of information in a traveling vehicle system according to one embodiment.

[0016] A preferred embodiment of one aspect of the present invention will be described in detail below with reference to the drawings. In the description of the drawings, the same elements are designated by the same reference numerals, and duplicated explanations will be omitted. In Fig. 2, directions such as "upper," "lower," "left," "right," "front," and "rear" are defined for the sake of convenience.

[0017] As shown in FIGS. 1 and 2 , the traveling vehicle system (transport system) 1 is a system for transporting articles 10 between mounting sections 9, 9 using an overhead traveling vehicle (transport device) 6 (hereinafter referred to as the traveling vehicle 6) that can move along a traveling track 4. The articles 10 include, for example, a FOUP (Front Opening Unified Pod) that stores multiple semiconductor wafers, a container that stores glass substrates, a container such as a reticle pod, and general parts. The traveling vehicle system 1 includes the traveling track 4, multiple traveling vehicles 6, multiple mounting sections 9, a traveling vehicle controller 35, an area controller (controller / acquisition device) 90, an inspection device (acquisition device) 70, a maintenance platform 80, and a maintenance management server 100.

[0018] The running track 4 is installed, for example, near the ceiling, which is the overhead space for the worker. The running track 4 is suspended, for example, from the ceiling. The running track 4 is a predetermined running path for the running vehicle 6. The running track 4 is supported by supports 40A, 40A. The running track 4 of the running vehicle system 1 has a main line section 4A that circulates in one direction in a predetermined area, and an escape section 4B that allows the running vehicle 6 to enter a working track 41 on which an inspection device 70 that performs various inspections of the running vehicle 6 is installed. Note that even in the escape section 4B, the running vehicle 6 moves in one predetermined direction.

[0019] The running track 4 has a cylindrical rail main body 40 consisting of a pair of lower surface portions 40B, 40B, a pair of side surface portions 40C, 40C, and a top surface portion 40D, a power supply line 40E, and a magnetic plate 40F. The rail main body 40 houses (encloses) the running portion 50 of the running vehicle 6. The lower surface portion 40B extends in the running direction of the running vehicle 6 and constitutes the lower surface of the rail main body 40. The lower surface portion 40B is a plate-shaped member on which the running rollers 51 of the running vehicle 6 roll. The side surface portion 40C extends in the running direction of the running vehicle 6 and constitutes the side surface of the rail main body 40. The top surface portion 40D extends in the running direction of the running vehicle 6 and constitutes the upper surface of the rail main body 40.

[0020] The power feeder 40E supplies power to the power feed core 57 of the traveling vehicle 6 and transmits and receives signals to and from the power feed core 57. The power feeder 40E is fixed to each of the pair of side surface portions 40C, 40C and extends along the traveling direction. The power feeder 40E supplies power to the power feed core 57 in a non-contact state. The magnetic plate 40F generates a magnetic force in an LDM (Linear DC Motor) 59 of the traveling vehicle 6 to cause it to travel or stop. The magnetic plate 40F is fixed to the top surface portion 40D and extends along the traveling direction.

[0021] The traveling vehicle 6 travels on the traveling track 4 and transports the article 10. The traveling vehicle 6 traveling on the traveling track 4 means that the traveling rollers 51 of the traveling vehicle 6 roll on the underside 40B of the traveling track 4. The traveling vehicle 6 is configured to be able to transfer the article 10. The traveling vehicle 6 is an overhead traveling unmanned traveling vehicle. The number of traveling vehicles 6 included in the traveling vehicle system 1 is not particularly limited and may be more than one. The traveling vehicle 6 has a main body unit 7, a traveling unit 50, and a traveling vehicle controller 35. The main body unit 7 has a main body frame 22, a lateral feed unit 24, a θ drive 26, an elevation drive unit 28, an elevation unit 30, and a cover 33.

[0022] The main frame 22 is connected to the travel unit 50 and supports the lateral feed unit 24, the θ drive 26, the lift drive unit 28, the lift unit 30, and a cover 33. The lateral feed unit 24 collectively moves the θ drive 26, the lift drive unit 28, and the lift unit 30 laterally in a direction perpendicular to the travel direction of the travel track 4. The θ drive 26 rotates at least one of the lift drive unit 28 and the lift unit 30 within a predetermined angular range in a horizontal plane. The lift drive unit 28 raises and lowers the lift unit 30 by winding or unwinding a suspension member such as a wire, rope, or belt. The lift unit 30 is provided with a chuck that can freely grasp (hang and hold) or release the article 10. A pair of covers 33 are provided, for example, at the front and rear of the travel direction of the travel vehicle 6. The cover 33 has protruding and retracting claws (not shown) to prevent the article 10 from falling during transport.

[0023] The lifting unit 30 is provided with a vibration sensor (detection device) 37. The vibration sensor 37 detects vibrations occurring in the lifting unit 30 (i.e., vibrations occurring in the article 10 gripped by the chuck) and outputs the detection results to the traveling vehicle controller 35, which will be described in detail later. The vibration sensor 37 is, for example, a triaxial acceleration sensor, and detects vibrations in the X-axis, Y-axis, and Z-axis directions. The vibration sensor 37 is provided at the center of gravity of the lifting unit 30 when viewed from above in the Z-axis direction. In this embodiment, it is provided at a position adjacent to the chuck. The vibration sensor 37 continuously detects vibrations in the X-axis, Y-axis, and Z-axis directions at predetermined intervals. The vibration values ​​(detection results) measured by the vibration sensor 37 are output to the traveling vehicle controller 35.

[0024] The traveling unit 50 causes the traveling vehicle 6 to travel along the traveling track 4. The traveling unit 50 has traveling rollers 51, side rollers 52, branching rollers 53, auxiliary rollers, inclined rollers, a power supply core 57, and an LDM 59. The branching rollers, auxiliary rollers, and inclined rollers are not shown in FIG. 2 .

[0025] The running rollers 51 are arranged at the front, rear, left and right ends of the running section 50. The running rollers 51 roll on a pair of lower surface portions 40B, 40B of the running track 4. The side rollers 52 are provided so as to be able to come into contact with the side surface portions 40C of the running track 4.

[0026] The branching rollers 53 are provided at the branching points of the running track 4 to switch the running vehicle 6 (running unit 50) between straight-ahead running and branching running. More specifically, the branching rollers 53 selectively contact (abut) guide members provided at the branching points to guide the running vehicle 6, thereby switching the running direction. The auxiliary rollers are a group of three rollers provided at the front and rear of the running unit 50. The auxiliary rollers are provided to prevent the LDM 59, power supply core 57, etc. from contacting the magnetic plate 40F arranged on the upper surface of the running track 4 when the running unit 50 tilts forward or backward during running due to acceleration or deceleration, etc. The inclined rollers are provided at the four corners of the LDM 59. The inclined rollers are provided to prevent the running unit 50 from tilting due to centrifugal force when running on a curved section.

[0027] The power supply cores 57 are arranged at the front and rear of the traveling unit 50 so as to sandwich the LDM 59 in the left-right direction. They perform contactless power supply and contactless transmission and reception of various signals between them and the power supply line 40E arranged on the traveling track 4. The power supply core 57 exchanges signals with the traveling vehicle controller 35. The LDM 59 is provided at the front and rear of the traveling unit 50. The LDM 59 uses an electromagnet to generate magnetic force for traveling or stopping between it and a magnetic plate 40F arranged on the top surface of the traveling track 4.

[0028] As shown in FIG. 1 , the placement unit 9 is arranged along the travel track 4 and is provided at a position where the article 10 can be transferred to and from the travelling vehicle 6. The placement unit 9 includes a buffer and a delivery port. The buffer is a placement unit where the article 10 is temporarily placed. The buffer is a placement unit where the article 10 is temporarily placed when the article 10 being transported by the travelling vehicle 6 cannot be transferred to the intended delivery port, for example, because another article 10 is placed at the intended delivery port. The delivery port is a placement unit for transferring the article 10 to and from a semiconductor processing device (not shown), such as a cleaning device, a film forming device, a lithography device, an etching device, a heat treatment device, or a planarization device. The processing device is not particularly limited and may be various devices.

[0029] For example, the placement unit 9 is disposed to the side of the running track 4. In this case, the running vehicle 6 transfers the article 10 to and from the placement unit 9 by using the lateral feed unit 24 to laterally feed the lifting drive unit 28 and the like and slightly raising and lowering the lifting unit 30. Although not shown, the placement unit 9 may also be disposed directly below the running track 4. In this case, the running vehicle 6 transfers the article 10 to and from the placement unit 9 by raising and lowering the lifting unit 30.

[0030] The traveling vehicle controller 35 is an electronic control unit including a CPU (Central Processing Unit), a ROM (Read Only Memory), a RAM (Random Access Memory), and the like. The traveling vehicle controller 35 controls various operations of the traveling vehicle 6. Specifically, the traveling vehicle controller 35 controls the traveling unit 50, the traverse unit 24, the θ drive 26, the lifting drive unit 28, and the lifting unit 30. The traveling vehicle controller 35 can be configured as software in which a program stored in a ROM is loaded onto a RAM and executed by the CPU, for example. The traveling vehicle controller 35 may also be configured as hardware including an electronic circuit or the like. The traveling vehicle controller 35 communicates with the area controller 90 using a power supply line 40E, such as a feeder line, provided on the traveling track 4.

[0031] The area controller 90 is an electronic control unit including a CPU, a ROM, a RAM, etc. The area controller 90 can be configured as software in which a program stored in the ROM is loaded onto the RAM and executed by the CPU, for example. The area controller 90 may also be configured as hardware including electronic circuits, etc. The area controller 90 controls a plurality of traveling vehicles 6. For example, the area controller 90 transmits a transport command to the traveling vehicles 6 to transport the article 10.

[0032] The area controller 90 acquires various types of information generated by the operation of the multiple traveling vehicles 6. The area controller 90 communicates with the traveling vehicle controllers 35 of the traveling vehicles 6 to acquire various types of information generated by the operation of the multiple traveling vehicles 6. The various types of information include, for example, vibrations when each of the multiple traveling vehicles 6 grasps an article 10, vibrations when placing an article 10, E84 communication errors, and inventory errors.

[0033] An E84 communication error is an error that is issued when an abnormality occurs during a transfer sequence in communication based on the SEMI E84 standard (for example, when the traveling vehicle 6 does not properly place an item 10 such as a FOUP on the placement unit 9, and the traveling vehicle 6 outputs a signal to the placement unit 9 indicating that the transfer has been completed, but the placement unit 9 does not output a signal indicating that the item has been placed).A cargo presence error is an error that is issued when an abnormality is detected by a cargo presence sensor provided in the lifting unit 30 (for example, when the FOUP cannot be properly gripped for some reason during transfer).

[0034] The area controller 90 also stores teaching data for each mounting unit 9 in each of the plurality of traveling vehicles 6. The area controller 90 is provided so as to be able to communicate with the data server 60. The information managed by the area controller 90 (hereinafter referred to as "management information") is acquired by the data server 60.

[0035] 1 , the inspection device 70 is provided in a part of the evacuation section 4B. The inspection device 70 acquires various information generated by the operation of the multiple traveling vehicles 6. The inspection device 70 inspects the traveling rollers 51, power supply cores 57, LDMs 59, etc. of the traveling sections 50 included in the traveling vehicles 6. The inspection device 70 includes a working track 41, a moving unit 71, a distance measurement sensor 72, an imaging device 73, an inspection controller 74, and an inference device 75.

[0036] The working track 41 extends in one direction (hereinafter referred to as the "extension direction") so that both ends thereof are continuous with the traveling tracks 4, 4, and forms an open section that exposes at least a portion of the traveling section 50 (e.g., the power supply core 57). In other words, the working track 41 does not have the side surface 40C and top surface 40D that are provided on the traveling track 4, nor does it have the magnetic plate 40F that is provided on the top surface 40D. Therefore, the traveling vehicle 6 cannot travel on its own on the working track 41. The movement unit 71 is a device that moves the traveling vehicle 6 along the extension direction of the working track 41, which is such a non-self-propelled section.

[0037] The distance measurement sensor 72 measures the diameter of the traveling roller 51 of the traveling section 50, the height position of the auxiliary roller, the height position of the LDM 59, etc. The imaging device 73 captures images of the outer circumferential surface of the traveling roller 51, the auxiliary roller, the power supply core 57, the LDM 59, etc. The inspection results obtained by the distance measurement sensor 72 and the imaging device 73 are acquired by the inspection controller 74.

[0038] The inspection controller 74 is an electronic control unit including a CPU, a ROM, a RAM, etc. The inspection controller 74 can be configured as software in which a program stored in the ROM is loaded onto the RAM and executed by the CPU, for example. The inspection controller 74 may also be configured as hardware including electronic circuits, etc. The inspection controller 74 controls various operations of the inspection device 70. For example, the inspection controller 74 controls the moving unit 71, the distance measuring sensor 72, and the imaging device 73 during various inspections performed by the inspection device 70.

[0039] The inspection controller 74 manages the results of various inspections performed by the inspection device 70. More specifically, the inspection controller 74 manages the component status, adjustment status, dust generation status, damage status, etc. based on the various inspection results. The inspection controller 74 is provided so as to be able to communicate with the data server 60. This information managed by the inspection controller 74 (hereinafter also referred to as "inspection information") is acquired by the data server 60.

[0040] The analogy device 75 is triggered by detection by the vibration sensor 37 in the traveling vehicle 6 and infers locations requiring maintenance based on various information (management information, inspection information, and history information described later). The analogy device 75 of this embodiment is provided in the inspection device 70. The analogy device 75 is an electronic control unit including a CPU, ROM, RAM, etc. The inspection controller 74 can be configured as software in which a program stored in the ROM is loaded onto the RAM and executed by the CPU, for example. The inspection controller 74 may also be configured as hardware including electronic circuits, etc.

[0041] The inference device 75 acquires, for example, detection by the vibration sensor 37 via the area controller 90 and the data server 60. Similarly, the inference device 75 acquires, for example, an image of the LDM 59 captured by the inspection device 70 via the area controller 90 and the data server 60. The method for inferring the locations requiring maintenance will be described in detail later.

[0042] The maintenance platform 80 has a first mounting table, a second mounting table, and a pair of third mounting tables. The maintenance platform 80 acquires the status of the traveling vehicle 6 for each of the first mounting table, the second mounting table, and the pair of third mounting tables. That is, the maintenance platform 80 can use the first mounting table to acquire the status of the traveling vehicle 6 when the belt payout amount is relatively large, the second mounting table to acquire the status of the traveling vehicle 6 when the belt payout amount is relatively small, and the pair of third mounting tables to acquire the status of the traveling vehicle 6 when the lateral feed unit 24 is operated to pay out the belt. This makes it possible to acquire the individual differences in the behavior of the traveling vehicle 6 during transfer. The configuration of the maintenance platform 80 is known and is described, for example, in International Publication WO2022 / 107448 and International Publication WO2022 / 107449.

[0043] The maintenance management server 100 is configured as a computer system including a CPU, main storage units such as RAM and ROM, and auxiliary storage units such as a hard disk and flash memory. The maintenance management server 100 can be configured as software in which a program stored in ROM is loaded onto RAM and executed by the CPU. The maintenance management server 100 may also be configured as hardware such as electronic circuits.

[0044] The maintenance management server 100 manages the specifications of the multiple traveling vehicles 6 (for example, specifications related to the traveling vehicles 6, such as performance, properties, form, shape, size, material, and quality of the traveling vehicles 6) and maintenance history. More specifically, the maintenance management server 100 manages basic equipment information, installation and adjustment records, shipping data, part replacement history, and the like, of the multiple traveling vehicles 6. The maintenance management server 100 is communicatively connected to an input terminal 110. The input terminal 110 is used by a worker in charge of maintenance. The worker uses the input terminal 110 to input the history of maintenance performed on the traveling vehicles 6. The maintenance management server 100 acquires the maintenance history of the multiple traveling vehicles 6 from the input terminal 110. Examples of the input terminal 110 include a tablet terminal, a smartphone, a dedicated communication terminal, and the like.

[0045] The maintenance management server 100 is provided so as to be able to communicate with the data server 60. The information managed by the maintenance management server 100 (hereinafter also referred to as "history information") is acquired by the data server 60.

[0046] The data server 60 is configured as a computer system including a CPU, a main memory such as a RAM and a ROM, and an auxiliary memory such as a hard disk, a flash memory, etc. The data server 60 centrally manages the management information managed by the area controller 90, the inspection information managed by the inspection device 70, the history information managed by the maintenance management server 100, etc.

[0047] Next, an example of a method by which the inference device 75 infers locations requiring maintenance will be described primarily with reference to FIG. 4 . As shown in FIG. 4 , the inference device 75 is triggered by the detection of vibrations by the vibration sensor 37 when the traveling vehicle 6 transfers the item 10 (step S1), and infers locations requiring maintenance based on various information (management information, inspection information, history information, etc.). The inference device 75 determines whether the vibrations during transfer are greater than or equal to 2G or less than 2G. If the inference device 75 determines that the vibrations during transfer are greater than or equal to 2G, it determines that an irregular collision has occurred. In this case, the inference device 75 determines that no countermeasures are necessary and does not take any action. Note that if such an event is detected, the traveling vehicle system 1 may separately perform processing such as stopping the travel of all traveling vehicles 6.

[0048] If the analogy device 75 confirms that the vibration during transfer is, for example, less than 2 G, it checks for abnormal trends in other vehicles other than the traveling vehicle 6 whose vibration was detected by the vibration sensor 37 (step S2). The abnormal trends in other vehicles other than the traveling vehicle 6 can be acquired from the management information of the area controller 90 stored in the data server 60. Here, if the analogy device 75 confirms that similar trends are also present in other vehicles based on the management information, it determines that there is a possibility of a teaching error. In this case, the analogy device 75 may notify the operator that re-teaching of the target traveling vehicle 6 is necessary. The notification here includes displaying on a display device, sending to the operator's terminal, etc. (the same applies to the following description). The operator can re-teach the target traveling vehicle 6 based on this notification. Furthermore, the analogy device 75 may cause the target traveling vehicle 6 to execute re-teaching via the area controller 90.

[0049] If the analogy device 75 determines based on the management information that the occurrence of this problem with other vehicles is rare, it checks whether the relative angle between the lifting unit 30 and the port (mounting unit, transfer port) is, for example, 0.5° or greater (step S3). The relative angle between the lifting unit 30 and the port can be acquired from the management information of the area controller 90. That is, the relative angle between the lifting unit 30 and the port can be acquired from the management information stored in the data server 60. If the analogy device 75 determines based on the management information that the relative angle between the lifting unit 30 and the port is 0.5° or greater, it determines that there is a possibility that the lifting unit 30 is abnormally tilted. In this case, the analogy device 75 may notify an operator that there is a possibility that the lifting unit 30 of the target traveling vehicle 6 has an abnormal tilt. Based on this notification, the operator can perform level adjustment on the target traveling vehicle 6. Furthermore, if the traveling vehicle 6 has a level adjustment function, the analogy device 75 may cause the target traveling vehicle 6 to perform level adjustment via the area controller 90.

[0050] If the analogy device 75 determines based on the management information that the relative angle between the lifting unit 30 and the port is less than 0.5°, it checks when the last vehicle offset was performed (step S4). The date of the last vehicle offset can be obtained from the management information (teach data) of the area controller 90. That is, the date of the last vehicle offset can be obtained from the management information stored in the data server 60. If the analogy device 75 determines based on the management information that the last vehicle offset was performed more than one month ago, it determines that there is a possibility of a vehicle offset. In this case, the analogy device 75 may notify an operator that there is a vehicle offset in the target traveling vehicle 6. Based on this notification, the operator can perform a vehicle offset on the target traveling vehicle 6. Furthermore, the analogy device 75 may move the target traveling vehicle 6 to the maintenance platform 80 via the area controller 90.

[0051] If the analogy device 75 confirms based on the management information that the last time the vehicle 6 was last adjusted is less than one month ago, it compares the maintenance date of the transfer equipment of the target vehicle 6 with the date on which the adjustment was performed (step S5). The maintenance date of the transfer equipment can be obtained from the history information managed by the maintenance management server 100. That is, the maintenance date of the transfer equipment can be obtained from the history information stored in the data server 60. If the analogy device 75 confirms that the maintenance date of the transfer equipment is after the date on which the adjustment was performed, it determines that there is a possibility of a vehicle misalignment. In this case, the analogy device 75 may notify the worker that there is a vehicle misalignment in the target vehicle 6. Based on this notification, the worker can perform a vehicle misalignment on the target vehicle 6. Furthermore, if the vehicle 6 has a leveling function, the analogy device 75 may move the target vehicle 6 to the maintenance platform 80 via the area controller 90.

[0052] When the analogy device 75 confirms that the maintenance date of the transfer equipment is before the date on which the machine difference was removed, it determines that there is a possibility that the cause is something other than a machine difference. In this case, the analogy device 75 may notify the worker that there is a possibility that the target traveling vehicle 6 has a cause other than a machine difference. The worker who receives this notification can individually investigate the target traveling vehicle 6 and take action as necessary. Note that when the maintenance date of the transfer equipment and the date on which the machine difference was removed are the same day, it determines that there is a possibility that the cause is something other than a machine difference.

[0053] The following describes the effects of the traveling vehicle system 1 of the above embodiment. In the traveling vehicle system 1 of the above embodiment, as shown in Fig. 6, for example, detection of vibration by the vibration sensor 37 is used as a trigger to infer locations requiring maintenance based on various information (management information, inspection information, history information, etc.) stored in the data server 60, without the need to perform a new inspection. This makes it possible to more accurately and quickly infer locations requiring maintenance.

[0054] In the travelling vehicle system 1 of the above embodiment, the analogy device 75 infers locations requiring maintenance based on management information relating to the plurality of travelling vehicles 6 managed by the area controller 90, inspection results from an inspection device 70 that is provided on the work track 41 and inspects each part of the plurality of travelling vehicles 6, and history information relating to the plurality of travelling vehicles 6. This makes it possible to more accurately infer locations requiring maintenance for each of the plurality of travelling vehicles 6 traveling on the travelling track 4, based on various types of information relating to the travelling vehicles 6.

[0055] In the traveling vehicle system 1 of the above embodiment, when the analogy device 75 infers that teaching of the traveling vehicle 6 is necessary (there is a possibility of a teaching deviation), it is possible to re-teach the target traveling vehicle 6. In this case, it is possible to automatically re-teach the traveling vehicle 6 that has a teaching deviation. Furthermore, when the analogy device 75 infers that teaching is necessary due to an instrumental difference deviation of the traveling vehicle 6, it is possible to move the target traveling vehicle 6 to the maintenance stand 80. With this configuration, it is possible to confirm that a teaching deviation has occurred due to an instrumental difference.

[0056] Furthermore, in the travelling vehicle system 1 of the above embodiment, if the analogy device 75 infers that the inclination of the travelling track 4 is causing shaking in the lifting section 30, it can notify the worker to correct the inclination of the travelling track 4. The worker who received the notification can inspect the travelling track 4 and store information such as whether or not there is an abnormality and what action to take in the maintenance management server. Furthermore, if the analogy device 75 infers that there is an individual abnormality caused by a part, it can notify the worker that there is an individual abnormality. The worker who received the notification can inspect the travelling vehicle 6 and store information such as whether or not there is an abnormality and information on the replaced part in the maintenance management server.

[0057] Although one embodiment has been described above, one aspect of the present invention is not limited to the above embodiment, and various modifications are possible without departing from the spirit of the invention.

[0058] Next, another example of a method by which the inference device 75 infers a location requiring maintenance will be described mainly with reference to FIG. 5 . As shown in FIG. 5 , the inference device 75 is triggered by the image of the LDM 59 being captured by the imaging device 73 of the inspection device 70 (step S11), and infers a location requiring maintenance based on various information (management information, inspection information, history information, etc.). If the inference device 75 determines that the LDM 59 is clearly free of scratches based on the image of the LDM 59 captured by the imaging device 73 of the inspection device 70, it determines that no countermeasure is necessary and does not perform any action. The method for determining the presence or absence of scratches from the image of the LDM 59 can be a known method, such as pattern matching or determination using a learning model.

[0059] If the analogy device 75 determines that the LDM 59 has a scratch based on the image of the LDM 59 captured by the imaging device 73 of the inspection device 70, it checks the height position of the auxiliary roller (step S12). The height position of the auxiliary roller can be obtained from the inspection results stored by the inspection device 70. That is, the height position of the auxiliary roller can be obtained from the inspection results stored in the data server 60. Here, if the analogy device 75 determines based on the inspection results that the height position of the auxiliary roller is outside of a reference value (which includes not only a reference value but also a reference range; the same applies hereinafter), it determines that there is a possibility of an abnormality in the auxiliary roller. In this case, the analogy device 75 may notify an operator that there is an abnormality in the height position of the auxiliary roller. Based on this notification, the operator can inspect and adjust the auxiliary roller.

[0060] If the analogy device 75 determines based on the inspection results that the height position of the auxiliary roller is within the reference value, it checks the height position of the LDM 59 (step S13). The height position of the LDM 59 can be acquired from the inspection results stored in the inspection device 70. That is, the height position of the LDM 59 can be acquired from the inspection results stored in the data server 60. Here, if the analogy device 75 determines based on the inspection results that the height position of the LDM 59 is within the reference value, it determines that there is a possibility of an abnormality in the running track 4. In this case, the analogy device 75 may notify an operator that there is an abnormality in the running track 4. The operator may investigate the running track 4 based on this notification.

[0061] If the analogy device 75 determines based on the inspection results that the height position of the LDM 59 is outside the reference value, it checks the diameter of the traveling roller 51 (step S14). The diameter of the traveling roller 51 can be obtained from the inspection results stored in the inspection device 70. That is, the diameter of the traveling roller 51 can be obtained from the inspection results stored in the data server 60. Here, if the analogy device 75 determines based on the inspection results that the diameter of the traveling roller 51 is within the reference value, it determines that there is a possibility of an abnormality in the LDM 59. In this case, the analogy device 75 may notify an operator that there is an abnormality in the LDM 59. Based on this notification, the operator can inspect and adjust the LDM 59.

[0062] If the analogy device 75 determines based on the inspection results that the diameter of the running roller 51 is smaller than the reference value, it determines that the running roller 51 may be worn. In this case, the analogy device 75 may notify an operator that the running roller 51 may be worn. Based on this notification, the operator can inspect the running roller 51 and replace the running roller 51. If the analogy device 75 determines based on the inspection results that the diameter of the running roller 51 is larger than the reference value, it determines that the running roller 51 may be peeling. In this case, the analogy device 75 may notify an operator that the running roller 51 may be peeling. Based on this notification, the operator can inspect and adjust the running roller 51.

[0063] In the judgment by the analogy device 75, the image of the LDM 59 taken by the inspection device 70 is used as a trigger to analogize whether the part requiring maintenance is the traveling roller 51, the auxiliary roller, the LDM 59, or the traveling track 4. This makes it possible to accurately analogize the part requiring maintenance from the image of the LDM 59.

[0064] In the above embodiment and modified example, the analogy device 75 determines locations requiring maintenance and notifies the worker of the locations, as shown in FIGS. 4 and 5 . When such a notification is a recommended action, the worker can execute an action based on the recommended action (an executed action) based on the recommended action. For example, the analogy device 75 may acquire the behavior of the traveling vehicle 6 when an action is executed based on the recommended action. Then, a learning model may be generated using the recommended action, the executed action, and the behavior of the traveling vehicle 6 as teaching data. By applying the learning model thus formed to the analogy method shown in FIGS. 4 and 5 , the branching criteria for the determination shown in FIGS. 4 and 5 can be dynamically changed. This improves the accuracy of the analogy device 75.

[0065] In the above embodiment and modified example, the analogy device 75 is described as being mounted on the inspection device 70, but it may be mounted on, for example, the area controller 90, the data server 60, the maintenance management server 100, etc. Furthermore, the analogy device 75 may be configured as a computer system independent of the inspection device 70, the area controller 90, the data server 60, the maintenance management server 100, etc., and including a CPU, a main memory unit such as a RAM and a ROM, an auxiliary memory unit such as a hard disk, a flash memory, etc.

[0066] The analogy method of the analogy device 75 described in the above embodiment and modified examples may be performed not only based on the examples shown in Figures 4 and 5, but also based on any "abnormal state" such as the results of dimensional measurements of each part in a dimensional inspection device, the state of scratches and other damage to each part detected by an image inspection device, errors that occur frequently, etc. Note that an abnormal state includes not only a single abnormality but also a "state in which the number of abnormalities occurring is rapidly increasing," etc.

[0067] In the above embodiment and modified example, the traveling vehicle system 1 in which multiple overhead traveling vehicles 6 travel has been described as an example. However, the analogy device 75 may also be applied to, for example, a stocker system including a stacker crane (conveying device) or multiple horizontally traveling carriages (conveying devices) and storing multiple items. In this case, for example, the analogy device 75 may infer maintenance-requiring locations on the stacker crane or carriage based on vibrations during travel, abnormalities in transfer operations, and the like. The analogy device 75 may also be applied to, for example, a conveyor system including a belt conveyor (conveying device) or roller conveyor (conveying device) for transporting items. In this case, for example, the analogy device 75 may infer maintenance-requiring locations on the belt conveyor or roller conveyor based on torque abnormalities in the drive motor, and the like. In any of these devices or systems, inference is possible based on abnormality data collected by a controller or data such as the current and voltage of each axis motor.

[0068] 1...Traveling vehicle system (transportation system), 4...Traveling track (track), 6...Traveling vehicle (transportation device), 10...Item, 35...Traveling vehicle controller, 37...Vibration sensor (detection device), 50...Traveling unit, 51...Traveling roller, 57...Power supply core, 59...LDM, 60...Data server, 70...Inspection device (acquisition device), 72...Range measuring sensor, 73...Imaging device, 74...Inspection controller, 75...Inference device, 80...Maintenance stand, 90...Area controller (controller / acquisition device), 100...Maintenance management server, 110...Input terminal.

Claims

1. A conveying system comprising: a conveying device that conveys items; a controller that controls the conveying device; an acquisition device that acquires various information generated by the operation of the conveying device; a detection device that detects the state of the conveying device; and an inference device that uses detection by the detection device as a trigger to infer areas requiring maintenance based on the various information.

2. The conveying system according to claim 1, wherein the conveying device is a plurality of traveling vehicles that travel on a track, and the controller controls the plurality of traveling vehicles.

3. A conveying system as described in claim 2, wherein the various types of information include management information regarding the plurality of traveling vehicles managed by the controller, inspection results from an inspection device installed on the track that inspects each part of the plurality of traveling vehicles, and history information regarding maintenance of the plurality of traveling vehicles.

4. A conveying system as described in claim 3, wherein each of the plurality of traveling vehicles has a traveling section that travels on a track, a lifting section that is capable of raising and lowering relative to the traveling section by winding and unwinding a suspension member and that suspends and holds the article, and a vibration sensor as the detection device that is provided on the lifting section.

5. A conveying system as described in claim 4, wherein the inference device is triggered by the detection of vibrations by the vibration sensor when the traveling vehicle transfers the item, and when it infers that teaching of the traveling vehicle is necessary based on the various information, it causes the target traveling vehicle to re-teach.

6. The conveying system according to claim 4, further comprising a maintenance platform for measuring mechanical errors in the traveling vehicles, and the analogy device is triggered by detection by the vibration sensor when the traveling vehicle transfers the article, and when it infers based on the various information that instruction is required due to mechanical error in the traveling vehicle, it moves the target traveling vehicle to the maintenance platform.

7. A conveying system as described in claim 3, wherein each of the plurality of traveling vehicles has a traveling section having traveling rollers that travel on a track, and an LDM provided on the traveling section, the detection device is the inspection device that takes an image of the LDM, and the inference device uses the image of the LDM by the inspection device as a trigger to infer whether the part requiring maintenance is the roller, the LDM, or the track.

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