Method for designing optical assembly generating light field having flat-top gaussian distribution, and optical assembly

Abstract

A method for designing an optical assembly generating a light field having a flat-top Gaussian distribution, and an optical assembly. The optical assembly comprises a first optical substrate (100), a second optical substrate (200) and a third optical substrate (300). The design method comprises the steps: designing the incident surface and the emergent surface of each of the first optical substrate (100), the second optical substrate (200), and the third optical substrate (300); the incident surface of the first optical substrate (100) reducing the energy density at a focusing position in the second optical substrate (200) (S100); the emergent surface of the first optical substrate (100) and the incident surface of the second optical substrate (200) cooperating to provide a homogenized light field in an X direction (S200); the emergent surface of the second optical substrate (200) and the incident surface of the third optical substrate (300) cooperating to provide a homogenized light field in a Y direction (S300); and the emergent surface of the third optical substrate (300) providing a light field contour having a Gaussian distribution in the Y direction (S400). The designed optical assembly can generate a light field having a flat-top Gaussian distribution, the energy density is reduced, the structure is compact, processing is easy, the distance between two optical substrates is adjustable, processing and adjustment requirements are met, an equivalent focal length can be flexibly adjusted, and the light field size is regulated and controlled.

Description

Optical component design method and optical component for generating flat-top Gaussian distribution light field Technical Field

[0001] The present invention relates to the technical field of optical elements, and in particular to an optical component design method and an optical component for generating a flat-top Gaussian distribution light field. Background Art

[0002] In order to achieve better exposure effects, advanced deep ultraviolet exposure requires the lighting system to output a high-quality light field with a flat-top intensity distribution in the X direction and a Gaussian distribution in the Y direction.

[0003] Traditional microcylindrical arrays can only generate flat-top light fields and do not have the ability to generate Gaussian light fields. If additional random scattering plates are introduced to generate Gaussian light fields, the cost will increase and additional system space will be occupied.

[0004] On the other hand, the high power density at the focusing position inside the traditional microcylindrical mirror may exceed the material damage threshold and cause damage to the optical components.

[0005] In order to obtain a uniform flat-top light field in the X direction, CN102375238B invented the "Micro-cylindrical mirror array with uniform illumination and its design method", which provides a micro-cylindrical mirror array for ultraviolet exposure lighting systems to produce uniform light intensity distribution in the Y and X directions. The invention patent of CN102375238B consists of two double-sided micro-cylindrical mirror arrays with the busbar direction distributed along the X and Y directions. The problem is that the light beam is focused in the second micro-cylindrical mirror array to produce an extremely narrow focal spot in the X direction, where the energy density is extremely high and may damage the lens material. Secondly, in order to achieve better uniform light effect and telecentric performance, this solution needs to place the two micro-mirror arrays close enough, which places extremely high demands on the assembly process in the actual production process. Finally, in this solution, the microstructure surfaces with the same busbar direction are located on the front and back surfaces of the same micro-mirror array element. When they work together in an optical system, their equivalent focal length is determined by the thickness of the element. For the processed elements, there is no room for adjustment of their equivalent focal length.

[0006] To obtain a Gaussian-distributed light field in the Y direction, CN105589300A, an invention titled "A Photolithography Illumination System," proposes using a scattering plate composed of a one-dimensional cylindrical mirror array placed behind a microlens array. This specially designed scattering plate can control the profile of the Gaussian light intensity distribution. The scattering plate structure in this invention exhibits a large sag value, which is not conducive to practical processing. Furthermore, such structures with large sag values ​​are also not conducive to measurement and characterization. Therefore, this invention faces the problem of difficulty in processing and characterizing micro-concave cylindrical structures with large sag values.

[0007] In addition, if the generation of a flat-top Gaussian light field is guaranteed while reducing the internal energy density of the micromirror array, the technical solutions provided by CN102375238B and CN105589300A require at least four optical elements (two scattering plates and two microcylindrical mirror arrays), which will bring spatial redundancy to the system and increase the consumption of lens materials.

[0008] Summary of the Invention

[0009] In order to solve the problems existing in optical elements that generate flat-top Gaussian distribution light fields, the present application provides a method for designing an optical component that generates flat-top Gaussian distribution light fields. The designed optical component only requires three optical substrates, and the light input surface and light output surface of each optical substrate are independently designed. The designed three optical substrates are used in combination to generate low energy density and flat-top Gaussian distribution light fields. The three optical substrates have a compact and stable structure in the entire system and will not generate system spatial redundancy.

[0010] The technical solutions provided by the present invention are as follows:

[0011] The present invention provides a method for designing an optical component that generates a flat-top Gaussian distribution light field. The optical component includes a first optical substrate, a second optical substrate, and a third optical substrate. The method includes the following steps:

[0012] designing a light incident surface of the first optical substrate, wherein the designed light incident surface of the first optical substrate reduces energy density at a focus position in the second optical substrate;

[0013] Designing a light-emitting surface of the first optical substrate and a light-incident surface of the second optical substrate, wherein the designed light-emitting surface of the first optical substrate and the light-incident surface of the second optical substrate cooperate to provide a uniform light field in the X direction;

[0014] Designing the light-emitting surface of the second optical substrate and the light-incident surface of the third optical substrate, wherein the designed light-emitting surface of the second optical substrate and the light-incident surface of the third optical substrate cooperate to provide a uniform light field in the Y direction;

[0015] The light-emitting surface of the third optical substrate is designed to provide a Gaussian distribution light field profile in the Y direction.

[0016] Further preferably, the designing of the light incident surface of the first optical substrate specifically includes: designing a microstructure of the light incident surface of the first optical substrate, and reducing the energy density at the focusing position in the second optical substrate through the microstructure.

[0017] Further preferably, the design of the microstructure of the light incident surface of the first optical substrate specifically includes:

[0018] Design several micro-concave cylindrical lenses;

[0019] Distributing a plurality of micro-concave cylindrical lenses on the light incident surface of the first optical substrate to form a micro-concave cylindrical lens array on the light incident surface of the first optical substrate, wherein the generatrix direction of the micro-concave cylindrical lenses is along the Y direction;

[0020] The curvature radius and working aperture of the micro-concave cylindrical lens are optimized to reduce the energy density at the focusing position in the second optical substrate.

[0021] Further preferably, the light-emitting surface of the first optical substrate and the light-entering surface of the second optical substrate are designed, specifically including: designing the microstructure of the light-emitting surface of the first optical substrate and the microstructure of the light-entering surface of the second optical substrate, and providing a uniform light field in the X direction through the cooperation of the microstructure of the light-emitting surface of the first optical substrate and the microstructure of the light-entering surface of the second optical substrate.

[0022] Further preferably, the design of the microstructure of the light-emitting surface of the first optical substrate and the microstructure of the light-incident surface of the second optical substrate specifically includes:

[0023] Design several micro-convex cylindrical lenses;

[0024] Distributing a plurality of micro-convex cylindrical lenses on the light-emitting surface of the first optical substrate and the light-incident surface of the second optical substrate, respectively, to form a micro-convex cylindrical lens array on the light-emitting surface of the first optical substrate and a micro-convex cylindrical lens array on the light-incident surface of the second optical substrate, wherein the generatrix direction of the micro-convex cylindrical lenses is along the Y direction;

[0025] The curvature radius of the micro-convex cylindrical lens on the light-emitting surface of the first optical substrate, the curvature radius of the micro-convex cylindrical lens on the light-incident surface of the second optical substrate, and the air gap between the micro-convex cylindrical lens on the light-emitting surface of the first optical substrate and the micro-convex cylindrical lens on the light-incident surface of the second optical substrate are jointly optimized so that the micro-convex cylindrical lens on the light-emitting surface of the first optical substrate and the micro-convex cylindrical lens on the light-incident surface of the second optical substrate work together to provide a uniform light field in the X direction.

[0026] Further preferably, the light-emitting surface of the second optical substrate and the light-entering surface of the third optical substrate are designed, specifically including: designing the microstructure of the light-emitting surface of the second optical substrate and the microstructure of the light-entering surface of the third optical substrate, and providing a uniform light field in the Y direction through the cooperation of the microstructure of the light-emitting surface of the second optical substrate and the microstructure of the light-entering surface of the third optical substrate.

[0027] Further preferably, the design of the microstructure of the light-emitting surface of the second optical substrate and the microstructure of the light-incident surface of the third optical substrate specifically includes:

[0028] Design several micro-convex cylindrical lenses;

[0029] Distributing a plurality of micro-convex cylindrical lenses on the light-emitting surface of the second optical substrate and the light-incident surface of the third optical substrate, respectively, to form a micro-convex cylindrical lens array on the light-emitting surface of the second optical substrate and a micro-convex cylindrical lens array on the light-incident surface of the third optical substrate, wherein the generatrix direction of the micro-convex cylindrical lenses is along the X direction;

[0030] The curvature radius of the micro-convex cylindrical lens on the light-emitting surface of the second optical substrate, the curvature radius of the micro-convex cylindrical lens on the light-incident surface of the third optical substrate, and the air gap between the micro-convex cylindrical lens on the light-emitting surface of the second optical substrate and the micro-convex cylindrical lens on the light-incident surface of the third optical substrate are jointly optimized so that the micro-convex cylindrical lens on the light-emitting surface of the third optical substrate and the micro-convex cylindrical lens on the light-incident surface of the second optical substrate work together to provide a uniform light field in the Y direction.

[0031] Further preferably, the design of the light-emitting surface of the third optical substrate specifically includes: designing a microstructure of the light-emitting surface of the third optical substrate, providing a Gaussian distribution light field profile in the Y direction through the microstructure

[0032] Further preferably, the design of the microstructure of the light-emitting surface of the third optical substrate specifically includes:

[0033] Design several micro-concave cylindrical lenses;

[0034] Distributing a plurality of micro-concave cylindrical lenses on the light-emitting surface of the third optical substrate to form a micro-concave cylindrical lens array on the light-emitting surface of the third optical substrate, wherein the generatrix direction of the micro-concave cylindrical lenses is along the X direction;

[0035] According to the target Gaussian distribution light field profile with a step-like distribution in the Y direction, the working aperture, curvature radius, and number of micro-concave cylindrical lenses corresponding to each step target light field are designed, so that the designed micro-concave cylindrical lens array on the light-emitting surface of the third optical substrate provides a Gaussian distribution light field profile in the Y direction, wherein the vector heights of all micro-concave cylindrical lenses in the micro-concave cylindrical lens array on the light-emitting surface of the third optical substrate are equal.

[0036] The present invention also provides an optical component for generating a flat-top Gaussian distribution light field, comprising: a first optical substrate, a second optical substrate, and a third optical substrate;

[0037] The light incident surface and the light exit surface of the first optical substrate, the light incident surface and the light exit surface of the second optical substrate, and the light incident surface and the light exit surface of the third optical substrate are respectively designed by the above-mentioned optical component design method;

[0038] The light incident surface of the first optical substrate reduces the energy density at the focus position in the second optical substrate;

[0039] The light emitting surface of the first optical substrate and the light incident surface of the second optical substrate cooperate to provide a uniform light field in the X direction;

[0040] The light emitting surface of the second optical substrate and the light incident surface of the third optical substrate cooperate to provide a uniform light field in the Y direction;

[0041] The light-emitting surface of the third optical substrate provides a Gaussian distribution light field profile in the Y direction.

[0042] Further preferably, the light incident surface of the first optical substrate is provided with a first microstructure, and the energy density at the focus position in the second optical substrate is reduced by the first microstructure;

[0043] The light-emitting surface of the first optical substrate is provided with a second microstructure, and the light-incident surface of the second optical substrate is provided with a third microstructure, and the cooperation of the second microstructure and the third microstructure provides a uniform light field in the X direction;

[0044] The light-emitting surface of the second optical substrate is provided with a fourth microstructure, and the light-incident surface of the third optical substrate is provided with a fifth microstructure, and the fourth microstructure and the fifth microstructure cooperate to provide a uniform light field in the Y direction;

[0045] The light emitting surface of the third optical substrate is designed with a sixth microstructure, and the sixth microstructure provides a Gaussian distribution light field profile in the Y direction.

[0046] Further preferably, a first micro-concave cylindrical lens array is provided on the light incident surface of the first optical substrate, and the generatrix direction of the micro-concave cylindrical lenses in the first micro-concave cylindrical lens array is along the Y direction;

[0047] A first micro-convex cylindrical lens array is provided on the light-emitting surface of the first optical substrate, and a second micro-convex cylindrical lens array is provided on the light-incident surface of the second optical substrate, wherein the generatrix directions of the micro-convex cylindrical lenses in the first micro-convex cylindrical lens array and the second micro-convex cylindrical lens array are along the Y direction;

[0048] The light-emitting surface of the second optical substrate is provided with a third micro-convex cylindrical lens array, and the light-incident surface of the third optical substrate is designed with a fourth micro-convex cylindrical lens array, and the generatrix direction of the micro-convex cylindrical lenses in the third micro-convex cylindrical lens array and the fourth micro-convex cylindrical lens array is along the X direction;

[0049] A second micro-concave cylindrical lens array is provided on the light-emitting surface of the third optical substrate, and the generatrix direction of the micro-concave cylindrical lenses in the second micro-concave cylindrical lens array is along the X direction.

[0050] The optical component design method and optical component provided by the present invention have at least any one of the following effects:

[0051] 1. By designing the microstructures of the light-entry and light-exit surfaces of the three optical substrates, the three optical substrates can be used together to produce a light field with low energy density and a flat-top Gaussian distribution. The three optical substrates are compact and do not cause system spatial redundancy.

[0052] 2. Reduce the energy density at the original focal spot to avoid laser-induced internal damage to microstructure materials;

[0053] 3. The distance between the two optical substrates is adjustable. On the one hand, the spacing will not be too small, so it can adapt to the needs of processing and adjustment; on the other hand, there is air in the middle of the microstructure surface with the same generatrix direction, so the spacing can be fine-tuned to flexibly adjust the equivalent focal length, and thus control the light field size;

[0054] 4. The sagittal heights of all the micro-concave cylindrical lenses in the micro-concave cylindrical lens array on the light-emitting surface of the third optical substrate are equal. Compared with the existing micro-concave cylindrical lens array, in which the sagittal heights are not uniform and the heights of the sagittal heights are large, resulting in difficulties in overall processing and characterization, the sagittal heights of all the micro-concave cylindrical lenses in this application are equal, and the sagittal heights can be adjusted according to actual processing capabilities, making the light-emitting surface of the third optical substrate easy to process. BRIEF DESCRIPTION OF THE DRAWINGS

[0055] Figure 1 is a flow chart of optical component design;

[0056] Figure 2 is a schematic diagram of a Gaussian distribution light field;

[0057] Figure 3 is a schematic diagram of the optical assembly;

[0058] FIG4 is another view of the optical assembly. DETAILED DESCRIPTION

[0059] In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the specific embodiments of the present invention will be described below with reference to the accompanying drawings. Obviously, the drawings described below are only some embodiments of the present invention. For those skilled in the art, other drawings and other embodiments can be obtained based on these drawings without inventive work.

[0060] Example 1:

[0061] The present application provides a method for designing an optical component that generates a flat-top Gaussian distribution light field. The method designs an optical component having three optical substrates: a first optical substrate, a second optical substrate, and a third optical substrate. The light incident surface and the light exit surface of the three optical substrates are microstructured to achieve the functions of low energy density and a flat-top Gaussian distribution light field.

[0062] The flow chart of the optical component design method provided in this application is shown in FIG1 , which specifically includes the following steps.

[0063] S100: Designing a light incident surface of a first optical substrate, wherein the designed light incident surface of the first optical substrate reduces energy density at a focusing position in the second optical substrate.

[0064] S200: Designing a light-emitting surface of a first optical substrate and a light-incident surface of a second optical substrate, wherein the designed light-emitting surface of the first optical substrate and the light-incident surface of the second optical substrate cooperate to provide a uniform light field in the X direction.

[0065] S300: Designing a light-emitting surface of the second optical substrate and a light-incident surface of the third optical substrate. The designed light-emitting surface of the second optical substrate and the light-incident surface of the third optical substrate cooperate to provide a uniform light field in the Y direction.

[0066] S400: Designing a light-emitting surface of the third optical substrate, wherein the designed light-emitting surface of the third optical substrate provides a Gaussian distribution light field profile in the Y direction.

[0067] In step S100, a light-entering surface of the first optical substrate is designed, specifically a microstructure is designed on the light-entering surface of the first optical substrate, and the energy density at the focus position of the second optical substrate is reduced by the microstructure. The microstructure is a scattering microstructure, specifically a micro-concave cylindrical lens array. Furthermore, designing the microstructure of the light-entering surface of the first optical substrate specifically includes the following steps:

[0068] S101: Design several micro-concave cylindrical lenses;

[0069] S102: Distributing a plurality of micro-concave cylindrical lenses on the light incident surface of the first optical substrate to form a micro-concave cylindrical lens array on the light incident surface of the first optical substrate, wherein the generatrix direction of the micro-concave cylindrical lenses is along the Y direction;

[0070] S103: Optimize the curvature radius and working aperture of the micro-concave cylindrical lens so that the divergence angle range of the light beam after being modulated by the incident surface of the first optical substrate is [-4°, 4°], so as to reduce the energy density at the focusing position in the second optical substrate.

[0071] For example, the curvature radius of the optimized micro-concave cylindrical lens is in the range of [0.15mm-0.2mm], and the working aperture of the micro-concave cylindrical lens is 1 / 10 of the working aperture of the micro-convex cylindrical lens on the light-emitting surface of the first optical substrate.

[0072] In step S200, the light-emitting surface of the first optical substrate and the light-incident surface of the second optical substrate are designed, specifically, the microstructure of the light-emitting surface of the first optical substrate and the microstructure of the light-incident surface of the second optical substrate are designed, and a uniform light field in the X direction is provided through the coordination of the microstructure of the light-emitting surface of the first optical substrate and the microstructure of the light-incident surface of the second optical substrate.

[0073] In this application, the microstructure on the light-emitting surface of the first optical substrate and the microstructure on the light-incident surface of the second optical substrate are both micro-convex cylindrical lens arrays. The specific design steps are as follows:

[0074] S201: Design several micro-convex cylindrical lenses;

[0075] S202: Distributing a plurality of micro-convex cylindrical lenses on the light-emitting surface of the first optical substrate and the light-incident surface of the second optical substrate, respectively, to form a micro-convex cylindrical lens array on the light-emitting surface of the first optical substrate and a micro-convex cylindrical lens array on the light-incident surface of the second optical substrate, wherein the generatrix direction of the micro-convex cylindrical lenses is along the Y direction;

[0076] S203: Jointly optimize the curvature radius of the micro-convex cylindrical lens on the light-emitting surface of the first optical substrate, the curvature radius of the micro-convex cylindrical lens on the light-incident surface of the second optical substrate, and the air gap between the micro-convex cylindrical lens on the light-emitting surface of the first optical substrate and the micro-convex cylindrical lens on the light-incident surface of the second optical substrate, so that the micro-convex cylindrical lens on the light-emitting surface of the first optical substrate and the micro-convex cylindrical lens on the light-incident surface of the second optical substrate work together to provide a uniform light field in the X direction.

[0077] The micro-convex cylindrical lens array on the light-emitting surface of the first optical substrate and the micro-convex cylindrical lens array on the light-incident surface of the second optical substrate work together to produce a homogenized light field in the X direction. The working aperture of the micro-convex cylindrical lens on the light-emitting surface of the first optical substrate and the micro-convex cylindrical lens on the light-incident surface of the second optical substrate is usually determined by the processing technology and is generally on the order of hundreds of microns.

[0078] It should be noted that the design of the micro-convex cylindrical lens on the light-emitting surface of the first optical substrate and the micro-convex cylindrical lens on the light-incident surface of the second optical substrate is to place the optical component as a whole into the optical system and design them in combination with relevant optical elements in the optical system (such as the condenser located on the light-emitting side of the optical component). For example, the micro-convex cylindrical lens on the light-emitting surface of the first optical substrate and the micro-convex cylindrical lens on the light-incident surface of the second optical substrate are jointly optimized through the following steps:

[0079] S2031: Determine relevant parameters;

[0080] The relevant parameters include: target required light field size D x , condenser focal length F c , the working aperture P of the micro-convex cylindrical lens on the light-emitting surface of the first optical substrate and the micro-convex cylindrical lens on the light-incident surface of the second optical substrate x , equivalent focal length F eflx ;

[0081] According to formula (1), the equivalent focal length F of the micro-convex cylindrical lens on the light-emitting surface of the first optical substrate and the micro-convex cylindrical lens on the light-incident surface of the second optical substrate can be determined:eflx ; F eflx =F c ·P x / D x (1)

[0082] According to F eflx The curvature radius combination of the micro-convex cylindrical lens on the light-emitting surface of the first optical substrate and the micro-convex cylindrical lens on the light-incident surface of the second optical substrate and the air gap between the micro-convex cylindrical lens on the light-emitting surface of the first optical substrate and the micro-convex cylindrical lens on the light-incident surface of the second optical substrate can be adjusted.

[0083] S2032: Based on this, the design parameters of the micro-convex cylindrical lens on the light-emitting surface of the first optical substrate, the micro-convex cylindrical lens on the light-incident surface of the second optical substrate, and the condenser are input into an optical design software such as Zemax for simulation to obtain the size D′ of the output light field. x , then the optimized equivalent focal length is as shown in formula (2); F′ eflx =F eflx ·D x / D′ x (2);

[0084] According to the newly obtained F′ eflx Re-adjust the curvature radius combination of the micro-convex cylindrical lens on the light-emitting surface of the first optical substrate and the micro-convex cylindrical lens on the light-entering surface of the second optical substrate, as well as the air gap between the micro-convex cylindrical lens on the light-emitting surface of the first optical substrate and the micro-convex cylindrical lens on the light-entering surface of the second optical substrate, and repeat the step S2032 until the light field size D′ output by the simulation in Zemax is x and target demand D x At this time, the combination of the curvature radius of the micro-convex cylindrical lens on the light-emitting surface of the first optical substrate and the micro-convex cylindrical lens on the light-incident surface of the second optical substrate and the air gap between the micro-convex cylindrical lens on the light-emitting surface of the first optical substrate and the micro-convex cylindrical lens on the light-incident surface of the second optical substrate are determined, and the determined related parameters can provide a uniform light field in the X direction.

[0085] In step S300, the light-emitting surface of the second optical substrate and the light-incident surface of the third optical substrate are designed, and specifically the microstructure of the light-emitting surface of the second optical substrate and the microstructure of the light-incident surface of the third optical substrate are designed. A uniform light field in the Y direction is provided through the coordination of the microstructure of the light-emitting surface of the second optical substrate and the microstructure of the light-incident surface of the third optical substrate.

[0086] In this application, the microstructure of the light-emitting surface of the second optical substrate and the microstructure of the light-incident surface of the third optical substrate are both micro-convex cylindrical lens arrays. The specific design process is as follows:

[0087] S301: Design several micro-convex cylindrical lenses;

[0088] S302: Distributing a plurality of micro-convex cylindrical lenses on the light-emitting surface of the second optical substrate and the light-incident surface of the third optical substrate, respectively, to form a micro-convex cylindrical lens array on the light-emitting surface of the second optical substrate and a micro-convex cylindrical lens array on the light-incident surface of the third optical substrate, wherein the generatrix direction of the micro-convex cylindrical lenses is along the X direction;

[0089] S303: Jointly optimize the curvature radius of the micro-convex cylindrical lens on the light-emitting surface of the second optical substrate, the curvature radius of the micro-convex cylindrical lens on the light-incident surface of the third optical substrate, and the air gap between the micro-convex cylindrical lens on the light-emitting surface of the second optical substrate and the micro-convex cylindrical lens on the light-incident surface of the third optical substrate, so that the micro-convex cylindrical lens on the light-emitting surface of the third optical substrate and the micro-convex cylindrical lens on the light-incident surface of the second optical substrate work together to provide a uniform light field in the Y direction.

[0090] The micro-convex cylindrical lens array on the light-emitting surface of the second optical substrate and the micro-convex cylindrical lens array on the light-incident surface of the third optical substrate work together to produce a homogenized light field in the Y direction. The working aperture of the micro-convex cylindrical lenses on the light-emitting surface of the second optical substrate and the light-incident surface of the third optical substrate is usually determined by the processing technology and is generally on the order of hundreds of microns.

[0091] Similarly, the design of the micro-convex cylindrical lens on the light-emitting surface of the second optical substrate and the micro-convex cylindrical lens on the light-incident surface of the third optical substrate is to place the optical component as a whole into the optical system and design them in combination with relevant optical elements in the optical system (such as a condenser located on the light-emitting side of the optical component). For example, the micro-convex cylindrical lens on the light-emitting surface of the second optical substrate and the micro-convex cylindrical lens on the light-incident surface of the third optical substrate are jointly optimized through the following steps:

[0092] S3031: Determine relevant parameters;

[0093] Related parameters include: light field size target requirement D y , condenser focal length F c , the working aperture P of the micro-convex cylindrical lens on the light-emitting surface of the second optical base and the micro-convex cylindrical lens on the light-incident surface of the third optical base y , the equivalent focal length F of the micro-convex cylindrical lens on the light-emitting surface of the second optical substrate and the micro-convex cylindrical lens on the light-incident surface of the third optical substrate efly ,

[0094] The equivalent focal length F calculated according to formula (3) efly : F efly =F c ·P y / D y (3);

[0095] According to Fefly The curvature radius combination of the micro-convex cylindrical lens on the light-emitting surface of the second optical substrate and the micro-convex cylindrical lens on the light-incident surface of the third optical substrate and the air gap between the micro-convex cylindrical lens on the light-emitting surface of the second optical substrate and the micro-convex cylindrical lens on the light-incident surface of the third optical substrate can be adjusted.

[0096] On this basis, S3032 inputs the design parameters of the micro-convex cylindrical lens on the light-emitting surface of the second optical substrate, the micro-convex cylindrical lens on the light-incident surface of the third optical substrate, and the condenser into an optical design software such as Zemax for simulation, and obtains the size D′ of the output light field. y , then the optimized equivalent focal length is as shown in formula (4); F′ efly =F efly ·D y / D′ y (4);

[0097] According to the newly obtained F′ efly Re-adjust the curvature radius combination of the micro-convex cylindrical lens on the light-emitting surface of the second optical substrate and the micro-convex cylindrical lens on the light-entering surface of the third optical substrate, as well as the air gap between the micro-convex cylindrical lens on the light-emitting surface of the second optical substrate and the micro-convex cylindrical lens on the light-entering surface of the third optical substrate, and repeat the steps of S3032 until the light field size D′ output by the simulation in Zemax is obtained. y and target demand D y Consistently, the curvature radius combination of the micro-convex cylindrical lens on the light-emitting surface of the second optical substrate and the micro-convex cylindrical lens on the light-incident surface of the third optical substrate and the air gap between the micro-convex cylindrical lens on the light-emitting surface of the second optical substrate and the micro-convex cylindrical lens on the light-incident surface of the third optical substrate are determined, and the determined related parameters can provide a uniform light field in the Y direction.

[0098] In step S400, the light emitting surface of the third optical substrate is designed, specifically the microstructure of the light emitting surface of the third optical substrate is designed to provide a Gaussian distribution light field profile in the Y direction through the microstructure.

[0099] In this application, the microstructure of the light-emitting surface of the third optical substrate is a micro-concave cylindrical lens array. The design process of the micro-concave cylindrical lens array is as follows:

[0100] S401: Design several micro-concave cylindrical lenses;

[0101] S402: Distributing a plurality of micro-concave cylindrical lenses on the light-emitting surface of the third optical substrate to form a micro-concave cylindrical lens array on the light-emitting surface of the third optical substrate, wherein the generatrix direction of the micro-concave cylindrical lenses is along the X direction;

[0102] S403: Design the working aperture, curvature radius, and number of the micro-concave cylindrical lenses corresponding to each step target light field according to the target Gaussian distribution light field profile in a stepped manner in the Y direction, so that the designed micro-concave cylindrical lens array on the light-emitting surface of the third optical substrate provides a Gaussian distribution light field profile in the Y direction, wherein the vector heights of all the micro-concave cylindrical lenses in the micro-concave cylindrical lens array on the light-emitting surface of the third optical substrate are equal.

[0103] The design of the micro-concave cylindrical lens array on the light-emitting surface of the third optical substrate mainly considers the fixed sagittal height of different micro-concave cylindrical lenses, the variable working aperture and curvature radius, and generates multiple different sizes D in the Y direction by matching different working apertures and curvature radii. g , and finally form a stepped Gaussian intensity distribution, as shown in Figure 2.

[0104] According to formula (5), the focal length of the micro-concave cylindrical lens can be calculated: F g =F c ·P g / D g (5)

[0105] Among them, F g is the focal length of the concave cylindrical lens, P g For its working diameter, D g is the spot size of the focusing mirror surface.

[0106] The focal length of the micro-concave cylindrical lens can also be calculated according to formula (6):

[0107] Among them, R g is the radius of curvature of the micro-concave cylindrical lens, and n is the refractive index of the micro-concave cylindrical lens material.

[0108] According to the geometric relationship (7), the curvature radius of the micro-concave cylindrical lens is calculated:

[0109] Where h is the sag of the micro-concave cylindrical lens.

[0110] Combining the above three equations, we can get formula (8), which can be used to calculate the working aperture of the micro-concave cylindrical lens:

[0111] According to the above formula (7) and formula (8), the curvature radius and working aperture of a single sub-lens of the micro-concave cylindrical lens array can be calculated.

[0112] Since the working apertures of the micro-concave cylindrical lens are different, it can be understood that the sampling range of the incident light beam is different, so the light intensity distribution corresponding to the focusing mirror surface is proportional to the working aperture. That is: D g ·h g∝P g

[0113] It can be deduced that h g ∝R g

[0114] Therefore, for a smaller curvature radius R g , its height h g Often smaller, so we need to add multiple curvature radii of R g sub-lenses to obtain the same height.

[0115] As shown in Figure 2, in order to construct a g The light field requires the superposition of the intensity of m layers of light fields, which are generated by m micro-concave cylindrical lenses. m=R1 / R g

[0116] Wherein, R1 is the curvature radius of the slightly concave cylindrical lens that produces D1.

[0117] When designing the micro-concave cylindrical lens array on the light-emitting surface of the third optical substrate, the sagittal heights of all the micro-concave cylindrical lenses are designed to be equal, and a target Gaussian distribution light field profile is constructed. The target Gaussian distribution light field profile is composed of several rectangles with the same width but different bottom lengths. The width of the rectangle represents the height of the light intensity distribution formed on the back focal plane of the condenser, and the length of the rectangle represents the length of the light intensity distribution formed on the back focal plane of the condenser. The working aperture, curvature radius and number of the corresponding micro-concave cylindrical lenses are determined according to the width of rectangles of different lengths, so that micro-concave cylindrical lenses with different curvature radii can form a highly equivalent light intensity distribution on the back focal plane of the condenser through different combinations of numbers.

[0118] The designed multiple micro-concave cylindrical lenses can be arranged in an orderly manner or in a disordered manner on the light-emitting surface of the third optical substrate.

[0119] Through the above steps S100-S400, the design of an optical component that generates a flat-top Gaussian distribution light field can be achieved, and the designed optical component has the following effects:

[0120] 1. By designing the microstructures of the light-entry and light-exit surfaces of the three optical substrates, the three optical substrates can be used together to produce a light field with low energy density and a flat-top Gaussian distribution. The three optical substrates are compact and do not cause system spatial redundancy.

[0121] 2. Reduce the energy density at the original focal spot to avoid laser-induced internal damage to microstructure materials;

[0122] 3. The distance between the two optical substrates is adjustable. On the one hand, the spacing will not be too small, so it can adapt to the needs of processing and adjustment; on the other hand, there is air in the middle of the microstructure surface with the same generatrix direction, so the spacing can be fine-tuned to flexibly adjust the equivalent focal length, and thus control the light field size;

[0123] 4. The sagittal heights of all the micro-concave cylindrical lenses in the micro-concave cylindrical lens array on the light-emitting surface of the third optical substrate are equal. Compared with the existing micro-concave cylindrical lens array, in which the sagittal heights are not uniform and the heights of the sagittal heights are large, resulting in difficulties in overall processing and characterization, the sagittal heights of all the micro-concave cylindrical lenses in this application are equal, and the sagittal heights can be adjusted according to actual processing capabilities, making the light-emitting surface of the third optical substrate easy to process.

[0124] Example 2:

[0125] This embodiment provides an optical component for generating a flat-top Gaussian distribution light field. The schematic diagram is shown in Figures 3 and 4, and includes a first optical base 100, a second optical base 200, and a third optical base 300. The first optical base 100, the second optical base 200, and the third optical base 300 are arranged in sequence along the propagation direction of the light beam and perpendicular to the optical axis, and the center lines of the first optical base 100, the second optical base 200, and the third optical base 300 are located on the optical axis. When the optical component is used as a whole in an optical system, the optical component is located on the light incident side of the condenser 400 in the optical system. All sub-beams emitted from the optical component are superimposed on the image-side focal plane of the condenser 400 through the converging effect of the condenser 400, thereby forming a uniform light field distribution. The light field distribution is a flat-top distribution in the X direction and a Gaussian distribution in the Y direction.

[0126] When the optical component is in use, the light incident surface of the first optical base 100 reduces the energy density at the focusing position in the second optical base 200, and the light emitting surface of the first optical base 100 and the light incident surface of the second optical base 200 cooperate to provide a uniform light field in the X direction; the light emitting surface of the second optical base 200 and the light incident surface of the third optical base 300 cooperate to provide a uniform light field in the Y direction; and the light emitting surface of the third optical base 300 provides a Gaussian distribution light field profile in the Y direction.

[0127] The light incident surface of the first optical substrate 100 is provided with a first microstructure, and the energy density at the focus position in the second optical substrate 200 is reduced by the first microstructure;

[0128] The light-emitting surface of the first optical substrate 100 is provided with a second microstructure, and the light-incident surface of the second optical substrate 200 is provided with a third microstructure. The cooperation of the second microstructure and the third microstructure provides a uniform light field in the X direction.

[0129] The light-emitting surface of the second optical substrate 200 is provided with a fourth microstructure, and the light-incident surface of the third optical substrate 300 is provided with a fifth microstructure. The fourth and fifth microstructures cooperate to provide a uniform light field in the Y direction.

[0130] The light emitting surface of the third optical substrate 300 is designed with a sixth microstructure, which provides a Gaussian distribution light field profile in the Y direction.

[0131] In this example, for the specific design of the light incident surface and light exit surface of the first optical base 100, the light incident surface and light exit surface of the second optical base 200, and the light incident surface and light exit surface of the third optical base 300, please refer to the optical component design method provided in Example 1, and this example will not go into details.

[0132] As shown in FIG4 , a first micro-concave cylindrical lens array 101 is provided on the light incident surface of the first optical substrate 100 . The first micro-concave cylindrical lens array 101 is used to reduce the energy density at the focusing position of the second optical substrate 200 .

[0133] As shown in FIG4 , the first micro-concave cylindrical lens array 101 includes a plurality of first micro-concave cylindrical lenses, which are arranged in an orderly manner. The generatrix direction of the first micro-concave cylindrical lenses is along the Y direction, so that the focal spot generated by focusing in the second optical substrate 200 is stretched in the X direction, thereby reducing the energy density at the original focal spot position and preventing the laser from causing internal damage to the lens material.

[0134] The curvature radius range of the first micro-concave cylindrical lens is [0.15mm-0.2mm]. Within this range, the divergence angle range of the light beam after modulating the incident surface of the first optical base 100 is [-4°, 4°]. It can effectively reduce the energy density at the focusing position in the second optical base 200 to less than one tenth of the original value, thereby achieving the effect of reducing the energy density at the focusing position of the second optical base.

[0135] A first micro-convex cylindrical lens array 102 is provided on the light-emitting surface of the first optical substrate 100, and a second micro-convex cylindrical lens array 201 is provided on the light-incident surface of the second optical substrate 200. The first micro-convex cylindrical lens array 102 and the second micro-convex cylindrical lens array 201 cooperate to provide a uniform light field in the X direction.

[0136] As shown in FIG4 , the first micro-convex cylindrical lens array 102 includes a plurality of first micro-convex cylindrical lenses, and the second micro-convex cylindrical lens array 201 includes a plurality of second micro-convex cylindrical lenses;

[0137] The first micro-convex cylindrical lens and the second micro-convex cylindrical lens correspond to each other one by one, and the generatrix direction is along the Y direction, so as to provide a uniform light field in the X direction.

[0138] The first and second micro-convex cylindrical lenses also have the same working aperture, typically on the order of hundreds of microns. To ensure that the first and second micro-convex cylindrical lenses work together to provide a uniform light field in the X direction, it is necessary to optimize and adjust the combination of the curvature radii of the first and second micro-convex cylindrical lenses, as well as the air gap between the first and second micro-convex cylindrical lenses, until a light field consistent with the target light field size in the X direction is achieved. For the specific optimization process, please refer to steps S2031-S2032 in Example 1, which will not be described in detail in this example.

[0139] That is, the lens curvature radius combination and the air gap between the first micro-convex cylindrical lens array 102 and the second micro-convex cylindrical lens array 201 in the present application can be adjusted. On the one hand, the air gap will not be too small, so it can adapt to the needs of processing and adjustment; on the other hand, the air gap can be fine-tuned to flexibly adjust the equivalent focal length, thereby regulating the light field size.

[0140] Furthermore, the working aperture of the first micro-concave cylindrical lens is designed to be one tenth of the working aperture of the first micro-convex cylindrical lens, so that a more uniform beam divergence effect can be obtained, thereby reducing the energy density at the focus position.

[0141] A third micro-convex cylindrical lens array 202 is provided on the light-emitting surface of the second optical base 200, and a fourth micro-convex cylindrical lens array 301 is provided on the light-incident surface of the third optical base 300. The third micro-convex cylindrical lens array 202 and the fourth micro-convex cylindrical lens array 301 cooperate to provide a uniform light field in the Y direction.

[0142] As shown in FIG3 , the third micro-convex cylindrical lens array 202 includes a plurality of third micro-convex cylindrical lenses, and the fourth micro-convex cylindrical lens array 301 includes a plurality of fourth micro-convex cylindrical lenses;

[0143] The third micro-convex cylindrical lens and the fourth micro-convex cylindrical lens correspond to each other one by one, and the generatrix direction is along the X direction, so as to provide a uniform light field in the Y direction.

[0144] The working apertures of the third and fourth micro-convex cylindrical lenses are also the same, generally on the order of hundreds of microns. In order to make the third and fourth micro-convex cylindrical lenses work together to provide a uniform light field in the Y direction, it is necessary to optimize and adjust the combination of the curvature radii of the third and fourth micro-convex cylindrical lenses and the air gap between the third and fourth micro-convex cylindrical lenses until a light field consistent with the target light field size in the Y direction is obtained. Please refer to steps S3031-S3032 of Example 1 for the specific optimization process, which will not be repeated in this example.

[0145] That is, the lens curvature radius combination and the air gap between the third micro-convex cylindrical lens array 202 and the fourth micro-convex cylindrical lens array 301 in the present application can be adjusted. On the one hand, the air gap will not be too small, so it can adapt to the needs of processing and adjustment; on the other hand, the air gap can be fine-tuned to flexibly adjust the equivalent focal length, thereby regulating the light field size.

[0146] A second micro-concave cylindrical lens array 302 is provided on the light-emitting surface of the third optical substrate 300 . The second micro-concave cylindrical lens array 302 is used to provide a Gaussian distribution light field profile in the Y direction.

[0147] As shown in Figure 3, the second micro-concave cylindrical lens array 302 includes a plurality of second micro-concave cylindrical lenses, and the generatrix direction of the second micro-concave cylindrical lenses is along the X direction. The plurality of second micro-concave cylindrical lenses are arranged in an orderly or disorderly manner on the light-emitting surface of the third optical substrate 300.

[0148] All second concave cylindrical lenses in the second concave cylindrical lens array 302 have equal sag heights. The working apertures, radii of curvature, and the number of second concave cylindrical lenses corresponding to the working apertures and radii of curvature are determined based on the design of the target Gaussian distribution light field profile in the Y direction. This allows the designed second concave cylindrical lens array 302 to generate a stepped Gaussian distribution light field profile in the Y direction. This target Gaussian distribution light field profile is composed of a number of rectangles of equal width and varying lengths, where the length of a rectangle represents the length of the light intensity distribution of its corresponding target sub-light field, and the width of a rectangle represents the height of the light intensity distribution of its corresponding target sub-light field.

[0149] In this embodiment, the design of the second concave cylindrical lens array 302 on the light-emitting surface of the third optical substrate 300 primarily considers the fixed sag height of the various concave cylindrical lenses, while varying the working aperture and curvature radius. By combining these different working apertures and curvature radii, multiple different sizes Dg in the Y direction are generated, ultimately forming a stepped Gaussian intensity distribution. As shown in Figure 2, the target Gaussian distribution light field profile is constructed from a number of rectangles of equal width and varying lengths. The length of each rectangle represents the size of the corresponding target sub-light field, while the width of each rectangle represents the height of the corresponding target sub-light field's light intensity distribution.

[0150] The working apertures, curvature radii, and the number of second micro-concave cylindrical lenses corresponding to the working apertures and curvature radii of the plurality of second micro-concave cylindrical lenses are obtained based on the design of the target Gaussian distribution light field profile in the Y direction, so that the designed second micro-concave cylindrical lens array generates a stepped Gaussian distribution light field profile in the Y direction.

[0151] Since the working aperture of the second micro-concave cylindrical lens is different, it can be understood that the sampling range of the incident light beam is different, so the light intensity distribution corresponding to the focusing mirror surface is proportional to the working aperture. That is: Dg ·h g ∝P g

[0152] It can be deduced that h g ∝R g

[0153] Therefore, for a smaller curvature radius R g , its height h g Often smaller, so we need to add multiple curvature radii of R g sub-lenses to obtain the same height.

[0154] As shown in Figure 2, in order to construct a g The light field requires the intensity superposition of m layers of light fields, which are generated by m second micro-concave cylindrical lenses, m = R1 / R g

[0155] Wherein, R1 is the curvature radius of the slightly concave cylindrical lens that produces D1.

[0156] When designing the second micro-concave cylindrical lens array 302, the sag heights of all second micro-concave cylindrical lenses are designed to be equal, and a target Gaussian distribution light field profile is constructed. The working aperture, curvature radius, and number of the corresponding micro-concave cylindrical lenses are determined according to the width of rectangles of different lengths, so that second micro-concave cylindrical lenses with different curvature radii can be combined in different numbers to form a highly equivalent light intensity distribution on the back focal plane of the condenser.

[0157] The optical component provided in this embodiment can generate a flat-top Gaussian distribution light field, and the optical component has the following effects:

[0158] 1. By designing the microstructures of the light-entry and light-exit surfaces of the three optical substrates, the three optical substrates can be used together to produce a light field with low energy density and a flat-top Gaussian distribution. The three optical substrates are compact and do not cause system spatial redundancy.

[0159] 2. Reduce the energy density at the original focal spot to avoid laser-induced internal damage to microstructure materials;

[0160] 3. The distance between the two optical substrates is adjustable. On the one hand, the spacing will not be too small, so it can adapt to the needs of processing and adjustment; on the other hand, there is air in the middle of the microstructure surface with the same generatrix direction, so the spacing can be fine-tuned to flexibly adjust the equivalent focal length, and thus control the light field size;

[0161] 4. The sagittal heights of all the micro-concave cylindrical lenses in the micro-concave cylindrical lens array on the light-emitting surface of the third optical substrate are equal. Compared with the existing micro-concave cylindrical lens array, in which the sagittal heights are not uniform and the heights of the sagittal heights are large, resulting in difficulties in overall processing and characterization, the sagittal heights of all the micro-concave cylindrical lenses in this application are equal, and the sagittal heights can be adjusted according to actual processing capabilities, making the light-emitting surface of the third optical substrate easy to process.

[0162] The above examples are used to illustrate the present invention, which are only used to help understand the present invention and are not intended to limit the present invention. Those skilled in the art can make several simple deductions, modifications or substitutions based on the concept of the present invention.

Claims

1. A method for designing an optical component for generating a flat-top Gaussian distribution light field, characterized in that: The optical component includes a first optical substrate, a second optical substrate and a third optical substrate, and the optical component design method includes the steps of: designing a light incident surface of the first optical substrate, wherein the designed light incident surface of the first optical substrate reduces energy density at a focus position in the second optical substrate; Designing a light-emitting surface of the first optical substrate and a light-incident surface of the second optical substrate, wherein the designed light-emitting surface of the first optical substrate and the light-incident surface of the second optical substrate cooperate to provide a uniform light field in the X direction; Designing the light-emitting surface of the second optical substrate and the light-incident surface of the third optical substrate, wherein the designed light-emitting surface of the second optical substrate and the light-incident surface of the third optical substrate cooperate to provide a uniform light field in the Y direction; The light-emitting surface of the third optical substrate is designed to provide a Gaussian distribution light field profile in the Y direction.

2. The optical component design method according to claim 1, wherein: The designing of the light incident surface of the first optical substrate specifically includes: designing a microstructure of the light incident surface of the first optical substrate, and reducing the energy density at the focusing position in the second optical substrate through the microstructure.

3. The optical component design method according to claim 2, wherein: The design of the microstructure of the light incident surface of the first optical substrate specifically includes: Design several micro-concave cylindrical lenses; Distributing a plurality of micro-concave cylindrical lenses on the light incident surface of the first optical substrate to form a micro-concave cylindrical lens array on the light incident surface of the first optical substrate, wherein the generatrix direction of the micro-concave cylindrical lenses is along the Y direction; The curvature radius and working aperture of the micro-concave cylindrical lens are optimized to reduce the energy density at the focusing position in the second optical substrate.

4. The optical component design method according to claim 1, wherein: Designing the light-emitting surface of the first optical substrate and the light-incident surface of the second optical substrate specifically includes: designing the microstructure of the light-emitting surface of the first optical substrate and the microstructure of the light-incident surface of the second optical substrate, and providing a uniform light field in the X direction through the cooperation of the microstructure of the light-emitting surface of the first optical substrate and the microstructure of the light-incident surface of the second optical substrate.

5. The optical component design method according to claim 4, wherein: The design of the microstructure of the light-emitting surface of the first optical substrate and the microstructure of the light-incident surface of the second optical substrate specifically includes: Design several micro-convex cylindrical lenses; Distributing a plurality of micro-convex cylindrical lenses on the light-emitting surface of the first optical substrate and the light-incident surface of the second optical substrate, respectively, to form a micro-convex cylindrical lens array on the light-emitting surface of the first optical substrate and a micro-convex cylindrical lens array on the light-incident surface of the second optical substrate, wherein the generatrix direction of the micro-convex cylindrical lenses is along the Y direction; The curvature radius of the micro-convex cylindrical lens on the light-emitting surface of the first optical substrate, the curvature radius of the micro-convex cylindrical lens on the light-incident surface of the second optical substrate, and the air gap between the micro-convex cylindrical lens on the light-emitting surface of the first optical substrate and the micro-convex cylindrical lens on the light-incident surface of the second optical substrate are jointly optimized so that the micro-convex cylindrical lens on the light-emitting surface of the first optical substrate and the micro-convex cylindrical lens on the light-incident surface of the second optical substrate work together to provide a uniform light field in the X direction.

6. The optical component design method according to claim 1, wherein: Designing the light-emitting surface of the second optical substrate and the light-incident surface of the third optical substrate specifically includes: designing the microstructure of the light-emitting surface of the second optical substrate and the microstructure of the light-incident surface of the third optical substrate, and providing a uniform light field in the Y direction through the cooperation of the microstructure of the light-emitting surface of the second optical substrate and the microstructure of the light-incident surface of the third optical substrate.

7. The optical component design method according to claim 6, wherein: The design of the microstructure of the light-emitting surface of the second optical substrate and the microstructure of the light-incident surface of the third optical substrate specifically includes: Design several micro-convex cylindrical lenses; Distributing a plurality of micro-convex cylindrical lenses on the light-emitting surface of the second optical substrate and the light-incident surface of the third optical substrate, respectively, to form a micro-convex cylindrical lens array on the light-emitting surface of the second optical substrate and a micro-convex cylindrical lens array on the light-incident surface of the third optical substrate, wherein the generatrix direction of the micro-convex cylindrical lenses is along the X direction; The curvature radius of the micro-convex cylindrical lens on the light-emitting surface of the second optical substrate, the curvature radius of the micro-convex cylindrical lens on the light-incident surface of the third optical substrate, and the air gap between the micro-convex cylindrical lens on the light-emitting surface of the second optical substrate and the micro-convex cylindrical lens on the light-incident surface of the third optical substrate are jointly optimized so that the micro-convex cylindrical lens on the light-emitting surface of the third optical substrate and the micro-convex cylindrical lens on the light-incident surface of the second optical substrate work together to provide a uniform light field in the Y direction.

8. The optical component design method according to claim 1, wherein: Designing the light-emitting surface of the third optical substrate specifically includes: designing a microstructure of the light-emitting surface of the third optical substrate, and providing a Gaussian distribution light field profile in the Y direction through the microstructure.

9. The optical component design method according to claim 8, wherein: The design of the microstructure of the light-emitting surface of the third optical substrate specifically includes: Design several micro-concave cylindrical lenses; Distributing a plurality of micro-concave cylindrical lenses on the light-emitting surface of the third optical substrate to form a micro-concave cylindrical lens array on the light-emitting surface of the third optical substrate, wherein the generatrix direction of the micro-concave cylindrical lenses is along the X direction; According to the target Gaussian distribution light field profile with a step-like distribution in the Y direction, the working aperture, curvature radius, and number of micro-concave cylindrical lenses corresponding to each step target light field are designed, so that the designed micro-concave cylindrical lens array on the light-emitting surface of the third optical substrate provides a Gaussian distribution light field profile in the Y direction, wherein the vector heights of all micro-concave cylindrical lenses in the micro-concave cylindrical lens array on the light-emitting surface of the third optical substrate are equal.

10. An optical component for generating a flat-top Gaussian distribution light field, characterized in that: include: a first optical substrate, a second optical substrate, and a third optical substrate; The light incident surface and the light exit surface of the first optical substrate, the light incident surface and the light exit surface of the second optical substrate, and the light incident surface and the light exit surface of the third optical substrate are respectively designed by the optical component design method according to any one of claims 1 to 9; The light incident surface of the first optical substrate reduces the energy density at the focus position in the second optical substrate; The light emitting surface of the first optical substrate and the light incident surface of the second optical substrate cooperate to provide a uniform light field in the X direction; The light emitting surface of the second optical substrate and the light incident surface of the third optical substrate cooperate to provide a uniform light field in the Y direction; The light-emitting surface of the third optical substrate provides a Gaussian distribution light field profile in the Y direction.

11. The optical component according to claim 10, wherein The light incident surface of the first optical substrate is provided with a first microstructure, and the energy density at the focus position in the second optical substrate is reduced by the first microstructure; The light-emitting surface of the first optical substrate is provided with a second microstructure, and the light-incident surface of the second optical substrate is provided with a third microstructure, and the cooperation of the second microstructure and the third microstructure provides a uniform light field in the X direction; The light-emitting surface of the second optical substrate is provided with a fourth microstructure, and the light-incident surface of the third optical substrate is provided with a fifth microstructure, and the fourth microstructure and the fifth microstructure cooperate to provide a uniform light field in the Y direction; The light emitting surface of the third optical substrate is designed with a sixth microstructure, which provides Y Gaussian distribution light field profile in the direction.

12. The optical assembly according to claim 11, wherein A first micro-concave cylindrical lens array is provided on the light incident surface of the first optical substrate, wherein the generatrix direction of the micro-concave cylindrical lenses in the first micro-concave cylindrical lens array is along the Y direction; A first micro-convex cylindrical lens array is provided on the light-emitting surface of the first optical substrate, and a second micro-convex cylindrical lens array is provided on the light-incident surface of the second optical substrate, wherein the generatrix directions of the micro-convex cylindrical lenses in the first micro-convex cylindrical lens array and the second micro-convex cylindrical lens array are along the Y direction; The light-emitting surface of the second optical substrate is provided with a third micro-convex cylindrical lens array, and the light-incident surface of the third optical substrate is designed with a fourth micro-convex cylindrical lens array, and the generatrix direction of the micro-convex cylindrical lenses in the third micro-convex cylindrical lens array and the fourth micro-convex cylindrical lens array is along the X direction; A second micro-concave cylindrical lens array is provided on the light-emitting surface of the third optical substrate, and the generatrix direction of the micro-concave cylindrical lenses in the second micro-concave cylindrical lens array is along the X direction.

Images