Vacuum sample holder, vacuum sample holder driving system and vacuum treatment system

Abstract

A vacuum sample holder (100), a vacuum sample holder driving system (1000), and a vacuum treatment system (10000). The vacuum sample holder (100) comprises a sample carrier (110) and a swing assembly (120). The sample carrier (110) is used for bearing a sample. The swing assembly (120) is connected to the sample carrier (110) and is used for driving the sample carrier (110) to swing. The swing assembly (120) comprises a swing frame (121) and a swing transmission assembly (140), wherein the swing frame (121) is connected to the sample carrier (110), and the swing transmission assembly (140) is used for driving the swing frame (121) to swing around a swing axis.

Description

Vacuum sample holders, vacuum sample holder drive systems, and vacuum handling systems Technical Field

[0001] The present disclosure relates to the technical field of vacuum equipment, and in particular to a vacuum sample holder, a vacuum sample holder driving system, and a vacuum processing system. Background Art

[0002] Vacuum sample holders are commonly used in vacuum processing, such as in vacuum coating. Vacuum coating is widely used in various production and daily life fields, such as the production of high-power laser diodes. The operating principle of high-power laser diodes is to form a laser resonant cavity between the two cleavage planes of a semiconductor crystal, thereby emitting laser light. Obtaining high-quality cleavage planes is a necessary and key technology. Oxides on the cleavage planes can cause catastrophic optical mirror damage (COMD), resulting in a significant reduction in the performance of optical devices.

[0003] Currently, the mainstream processing method for semiconductor laser bars is to apply a passivation film to the fresh cleavage surfaces of the bars after vacuum cleavage using ultra-high vacuum physical vapor deposition. This protects the cleavage surfaces from oxidation due to contact with air. In the existing technology, a substrate sheet approximately 20-32 mm in length, 12-15 mm in width, and 100-150 μm in thickness is transferred to an ultra-high vacuum environment. A cleavage tool is then used to cleave the bars longitudinally into bars approximately 1-5 mm in length (the cavity length). Multiple cleaved bars, such as dozens, are stacked on the cleavage tool and then transferred to a hollow coating tray, where they are held in place by a spring. At this point, the cleavage surfaces of the bars are located on the upper and lower sides of the tray, facilitating subsequent passivation coating.

[0004] A drawback of existing technology is that when cleaved bars are placed on a tray, it's impossible to ensure that the cleavage surfaces of each bar are at the same level; dozens of bars may have varying heights. Consequently, during coating in the passivation chamber, the beam path is blocked by highly protruding bars, preventing it from reaching recessed bars and causing uneven coating on the luminous surface. This problem is most pronounced during thermal furnace coating, as the thermal furnace is typically designed with a flange mounting port below the chamber, but at an angle to the chamber's axis. If the furnace is positioned to the side of a highly protruding bar, beam obstruction to the recessed bars is exacerbated.

[0005] Summary of the Invention

[0006] The present disclosure provides a vacuum sample holder, comprising:

[0007] A sample carrier, used to carry samples; and

[0008] The swing assembly is connected to the sample carrier and is used to drive the sample carrier to swing. The swing assembly includes:

[0009] A swing frame connected to the sample loading rack;

[0010] The swing transmission assembly is used to drive the swing frame to swing around the swing axis.

[0011] The present disclosure provides a vacuum sample holder driving system, comprising:

[0012] driving the vacuum chamber;

[0013] The vacuum sample holder according to any one of the embodiments of the present disclosure; and

[0014] The swing driving device is connected to the driving vacuum chamber and the swing transmission assembly of the swing assembly of the vacuum sample holder, and is used to drive the swing transmission assembly to drive the swing frame of the swing assembly to swing around the swing axis.

[0015] The present disclosure provides a vacuum processing system, comprising:

[0016] Processing vacuum chamber;

[0017] According to the vacuum sample holder driving system of any one of the embodiments of the present disclosure, the vacuum sample holder of the vacuum sample holder driving system is located in the processing vacuum chamber, and the driving vacuum chamber of the vacuum sample holder driving system is vacuum-sealed to the processing vacuum chamber; and

[0018] The beam generating device is vacuum-tightly connected to the processing vacuum chamber and is at least partially located in the processing vacuum chamber to emit a beam into the processing vacuum chamber. BRIEF DESCRIPTION OF THE DRAWINGS

[0019] In order to more clearly illustrate the embodiments of the present disclosure or the technical solutions in the prior art, the following briefly introduces the drawings required for use in the embodiments or the description of the prior art. Obviously, the drawings described below are only one embodiment of the present disclosure. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying any creative work.

[0020] FIG1 is a schematic diagram showing a partial structure of a vacuum sample holder according to some embodiments of the present disclosure;

[0021] FIG2 is a schematic structural diagram of a swing assembly of a vacuum sample holder according to some embodiments of the present disclosure;

[0022] FIG3 is a schematic structural diagram of a rotary transmission assembly of a vacuum sample holder according to some embodiments of the present disclosure;

[0023] FIG4 is a schematic diagram showing the internal structure of a swing arm according to some embodiments of the present disclosure;

[0024] FIG5 is a schematic structural diagram of a heating assembly according to some embodiments of the present disclosure;

[0025] FIG6 is a schematic structural diagram of a baffle of a vacuum sample holder according to some embodiments of the present disclosure;

[0026] FIG7 shows a schematic structural diagram of a vacuum sample holder driving system according to some embodiments of the present disclosure;

[0027] FIG8 is a schematic structural diagram of a linear drive device according to some embodiments of the present disclosure;

[0028] FIG9 is a schematic structural diagram of a vacuum processing system according to some embodiments of the present disclosure;

[0029] FIG10 is a schematic cross-sectional view of a partial perspective structure of a vacuum processing system according to some embodiments of the present disclosure.

[0030] In the above drawings, the reference numerals represent respectively: 10000 - vacuum processing system 1000 - vacuum sample holder driving system 100 - vacuum sample holder 110 - sample carrier, 111 - sample carrier gear, 112 - proximal frame, 113 - connecting rod, 114 - distal frame 120 - swing assembly, 121 - swing frame, 12101 - swing arm, 121011 - groove, 12102 - base, 121021 - back plate, 121022 - front plate, 12103 - swing arm gear, 12104 - swing arm bearing seat, 122 - swing transmission assembly, 12201 - swing transmission shaft, 12202 - distal swing transmission gear 130 - mounting frame 140 - rotation transmission assembly, 141 - rotation transmission shaft, 142 - distal rotation transmission gear, 143 - Gear transmission mechanism, 14301-first transmission gear, 14302-first transmission shaft, 14303-second transmission gear, 14304-third transmission gear, 14305-second transmission shaft, 14306-fourth transmission gear, 14307-intermediate transmission gear 150-heating component, 151-heating device, 152-heating device fixing part, 153-sleeve, 15301 - Fixed rod 160 - Baffle 170 - Baffle transmission assembly, 171 - Baffle rotation transmission shaft 200 - Driving vacuum chamber, 210 - Bellows 300 - Swing drive device, 310 - Swing drive motor, 320 - Swing drive circuit 400 - Rotation drive shaft device, 410 - Rotation drive motor, 420 - Rotation drive circuit 500 - Baffle drive device, 510 - Baffle drive motor, 520 - Baffle drive circuit 600 - Linear drive device, 610 - Linear drive shaft, 620 - Linear transmission assembly, 621 - Fixed plate, 622 - Slider, 623 - Screw, 630 - Linear drive assembly, 631 - Linear drive motor 2000 - Processing vacuum chamber 3000 - Beam generating device DETAILED DESCRIPTION

[0031] Some embodiments of the present disclosure will be described below in conjunction with the accompanying drawings. Obviously, the described embodiments are only exemplary embodiments of the present disclosure, rather than all embodiments.

[0032] In the description of the present disclosure, it should be noted that the terms "center", "up", "down", "left", "right", "vertical", "horizontal", "inside", "outside", "top", "bottom", etc., indicating orientations or positional relationships, are based on the orientations or positional relationships shown in the accompanying drawings, and are only for the convenience of describing the present disclosure and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as a limitation on the present disclosure. In addition, the terms "first" and "second" are only used for descriptive purposes and cannot be understood as indicating or implying relative importance. In the description of the present disclosure, it should be noted that, unless otherwise clearly specified and limited, the terms "installed", "connected", "connected", and "coupled" should be understood in a broad sense, for example, it can be a fixed connection or a detachable connection; it can be a mechanical connection or an electrical connection; it can be a direct connection or an indirect connection through an intermediate medium; it can be the internal connection of two elements. In the description of this disclosure, the distal end or distal side refers to the end or side that extends into a vacuum environment (e.g., a vacuum chamber), and the proximal end or proximal side refers to the end or side opposite the distal end or distal end (e.g., the end or side away from the vacuum chamber, or the end or side within the vacuum chamber close to the vacuum chamber wall, etc.). Alternatively, the end close to the drive device is the proximal end, and the end away from the drive device is the distal end. For those skilled in the art, the specific meanings of the above terms in this disclosure can be understood according to specific circumstances.

[0033] Fig. 1 is a schematic diagram showing a portion of the structure of a vacuum sample holder 100 according to some embodiments of the present disclosure. Fig. 2 is a schematic diagram showing the structure of a swing assembly 120 of the vacuum sample holder 100 according to some embodiments of the present disclosure.

[0034] As shown in Figure 1, in some embodiments of the present disclosure, the vacuum sample rack 100 may include a sample rack 110 and a swing assembly 120. The sample rack 110 is used to carry samples. The swing assembly 120 is connected to the sample rack 110 and is used to drive the sample rack 110 to swing. As shown in Figure 2, the swing assembly 120 may include a swing frame 121 and a swing transmission assembly 122. The swing frame 121 is connected to the sample rack 110. The swing transmission assembly 122 is used to drive the swing frame 121 to swing around the swing axis. Through the rotation of the swing frame 121, the samples carried on the sample rack 110 can reach different inclination angles, which facilitates more precise processing of the samples.

[0035] As shown in FIG2 , in some embodiments of the present disclosure, a swing frame 121 may include a swing arm 12101 and a base 12102. The swing arm 12101 is connected to a swing transmission assembly 122. The base 12102 is fixedly connected to the swing arm 12101. The swing arm 12101 receives a drive from the swing transmission assembly 122 to swing about a swing axis and drive the base 12102 to swing.

[0036] As shown in FIG2 , in some embodiments of the present disclosure, the swing transmission assembly 122 may include a swing transmission shaft 12201 and a distal swing transmission gear 12202. The swing transmission shaft 12201 is used to receive a rotational drive (for example, for receiving a rotational drive from a swing drive device 300 as shown in FIG7 ). The distal swing transmission gear 12202 is fixedly connected to the distal end of the swing transmission shaft 12201. The swing frame 121 may include a swing arm gear 12103. The swing arm gear 12103 is arranged parallel to the swing arm 12101 and is fixedly connected to the swing arm 12101. The swing arm gear 12103 engages with the distal swing transmission gear 12202 to drive the swing frame 121 to swing around the swing axis.

[0037] Those skilled in the art will appreciate that the swing arm gear 12103 and the swing transmission assembly 122 shown in FIG2 are merely exemplary, and the swing transmission assembly 122 and the swing arm gear 12103 may also adopt other transmission methods, such as magnetic coupling transmission.

[0038] As shown in FIG. 2 , in some embodiments of the present disclosure, the vacuum sample holder 100 may further include a mounting frame 130 , which is rotatably connected to the swing arm 12101 to support the swing frame 121 .

[0039] As shown in Figure 2, in some embodiments, the swing frame 121 may further include a swing arm bearing seat 12104. The swing arm gear 12103 is a ring gear that is sleeved outside the swing arm bearing seat 12104 and fixedly connected to the swing arm bearing seat 12104 to drive the swing arm bearing seat 12104 to rotate. The distal end of the swing arm bearing seat 12104 is fixedly connected to the swing arm 12101, thereby driving the swing arm 12101 to swing. The swing arm bearing seat 12104 can be cylindrical. In some embodiments, the proximal end of the swing arm bearing seat 12104 can be rotatably connected to the mounting frame 130 through, for example, a bearing and an intermediate piece (for example, a sleeve fixedly connected to the mounting frame 130), thereby realizing a rotational connection between the mounting frame 130 and the swing arm 12101, so that the mounting frame 130 is used to support the swing frame 121. In some embodiments, the proximal outer portion of the swing arm bearing seat 12104 can be directly connected to the mounting frame 130 through, for example, a bearing, to achieve a rotational connection between the mounting frame 130 and the swing arm 12101, so that the mounting frame 130 is used to support the swing frame 121.

[0040] FIG3 shows a schematic structural diagram of the rotation transmission assembly 140 of the vacuum sample holder 100 according to some embodiments of the present disclosure.

[0041] As shown in Fig. 3, in some embodiments of the present disclosure, the vacuum sample holder 100 may further include a rotation transmission assembly 140. The rotation transmission assembly 140 is connected to the sample carrier 110 to drive the sample carrier 110 to rotate around a rotation axis.

[0042] As shown in Figure 3, in some embodiments of the present disclosure, the rotation transmission assembly 140 may include a rotation transmission shaft 141, a distal rotation transmission gear 142 and a gear transmission mechanism 143. The rotation transmission shaft 141 is used to receive a rotation drive (for example, for receiving a rotation drive of the rotation drive shaft device 400 as shown in Figure 7). The distal rotation transmission gear 142 is fixedly connected to the distal end of the rotation transmission shaft 141. The gear transmission mechanism 143 is connected to the distal rotation transmission gear 142 to receive a driving force. As shown in Figures 1, 2 and 3, the sample carrier 110 may include a sample carrier gear 111, and the sample carrier gear 111 is connected to the gear transmission mechanism 143, which is used to receive the power of the distal rotation transmission gear 142 through the gear transmission mechanism 143 to drive the sample carrier 110 to rotate.

[0043] As shown in FIG3 , in some embodiments of the present disclosure, the gear transmission mechanism 143 may include a first transmission gear 14301, a first transmission shaft 14302, a second transmission gear 14303, a third transmission gear 14304, a second transmission shaft 14305, and a fourth transmission gear 14306. The first transmission gear 14301 meshes with the distal rotation transmission gear 142. The proximal end of the first transmission shaft 14302 is fixedly connected to the first transmission gear 14301. The second transmission gear 14303 is fixedly connected to the distal end of the first transmission shaft 14302. The third transmission gear 14304 is connected to the second transmission gear 14303, for example, by meshing or via a transmission mechanism. The proximal end of the second transmission shaft 14305 is fixedly connected to the third transmission gear 14304. The fourth transmission gear 14306 is fixedly connected to the distal end of the second transmission shaft 14305 and meshes with the sample carrier gear 111 to drive the sample carrier 110 to rotate about the rotation axis.

[0044] As shown in FIG3 , in some embodiments of the present disclosure, the gear transmission mechanism 143 may further include at least one intermediate transmission gear 14307. The at least one intermediate transmission gear 14307 is disposed between the second transmission gear 14303 and the third transmission gear 14304 to connect the second transmission gear 14303 and the third transmission gear 14304. Those skilled in the art will appreciate that, although FIG3 shows only one intermediate transmission gear 14307, this is merely exemplary, and the gear transmission mechanism 143 may also include two or more intermediate transmission gears 14307. The gear transmission mechanism 143 shown in FIG3 is merely exemplary. The gear transmission mechanism 143 may also include other numbers of transmission gears and / or transmission shafts, and may achieve different combinations of transmission gears and / or transmission shafts to receive power from the distal rotation transmission gear 142 and drive the sample carrier 110 to rotate.

[0045] FIG4 shows a schematic diagram of the internal structure of the swing arm 12101 according to some embodiments of the present disclosure.

[0046] As shown in Figure 4, in some embodiments of the present disclosure, the swing arm 12101 may include a groove 121011 for accommodating the second transmission gear 14303 and the third transmission gear 14304, or for accommodating the second transmission gear 14303, the third transmission gear 14304 and at least one intermediate transmission gear 14307. In some embodiments, the swing arm 12101 can be configured to have a groove 121011 that matches the shape of the gears to be accommodated, based on the number of gears to be accommodated, for placing the gears. In this way, not only can space be saved, but also it can be ensured that the gears can be more firmly embedded in the swing arm 12101, making the transmission more accurate and reliable, and improving the operating efficiency of the entire device. In some embodiments, a cover plate can be provided on the exposed portion of the gear on the other side of the groove to better protect the gear and make maintenance easier.

[0047] As shown in FIG3 , in some embodiments of the present disclosure, the swing arm gear 12103 is a ring gear that is mounted outside the first transmission shaft 14302 and is rotationally connected to the first transmission shaft 14302. In some embodiments, the first transmission shaft 14302 can be mounted within the swing arm bearing seat 12104 shown in FIG2 and is rotationally connected to the swing arm bearing seat 12104. The swing arm gear 12103 is mounted outside the swing arm bearing seat 12104, thereby achieving a rotational connection between the swing arm gear 12103 and the first transmission shaft 14302. In some embodiments, the first transmission shaft 14302 can be rotationally connected to the interior of the swing arm bearing seat 12104 and an intermediate member (e.g., a sleeve fixedly connected to the mounting bracket 130). The intermediate member can be mounted outside the first transmission shaft 14302 and is rotationally connected to the first transmission shaft 14302 (e.g., via a bearing), thereby achieving a rotational connection between the swing arm gear 12103 and the first transmission shaft 14302.

[0048] In some embodiments, the distal end of the first transmission shaft 14302 extends sequentially through the mounting frame 130 and the swing arm bearing seat 12104 before being fixedly connected to the second transmission gear 14303. The first transmission shaft 14302 can be rotationally connected to the mounting plate 130 via, for example, a bearing, or can be rotationally connected to an intermediate member or the swing arm bearing seat 12104. The first transmission shaft 14302 can drive the rotation of the second transmission gear 14303 while not interfering with the swinging motion of the swing arm 12101.

[0049] As shown in FIG3 , in some embodiments, the swing arm 12101 is rotatably connected to the second transmission shaft 14305. For example, the swing arm 12101 may be rotatably connected to the second transmission shaft 14305 via a bearing. In some embodiments, the third transmission gear 14304 is a ring gear that is sleeved outside the proximal end (the right side as shown in FIG3 ) of the second transmission shaft 14305 and is fixedly connected to the second transmission shaft 14305.

[0050] As shown in FIG1 , in some embodiments of the present disclosure, a sample carrier 110 may include a proximal carrier body 112, a connecting rod 113, and a distal carrier body 114. The proximal carrier body 112 is fixedly connected to the sample carrier gear 111. The proximal end of the connecting rod 113 is fixedly connected to the proximal carrier body 112. The distal carrier body 114 is fixedly connected to the distal end of the connecting rod 113 and is used to carry samples.

[0051] As shown in FIG3 , in some embodiments of the present disclosure, the vacuum sample holder 100 may further include a heating assembly 150. As shown in FIG1 and FIG2 , the heating assembly 150 is connected to the base 12102 and is disposed between the proximal frame 112 and the distal frame 114, and is used to heat the sample carried on the sample carrier 110. When the sample carrier 110 can swing, the distance between the heating assembly 150 and the sample carried by the sample carrier 110 can be ensured to be consistent, thereby improving the process control accuracy and the uniformity of heating. Moreover, when performing process operations such as coating, the sample carried on the sample carrier 110 can be rotated in-plane by the drive of the rotary transmission assembly 140, thereby further reducing the heat distribution difference caused by the heater.

[0052] FIG5 shows a schematic structural diagram of a heating assembly 150 according to some embodiments of the present disclosure.

[0053] As shown in Figures 2 and 5, in some embodiments of the present disclosure, the base 12102 may include a back plate 121021 and a front plate 121022 fixedly connected to the back plate 121021. The front plate 121022 includes a front plate through hole (not shown in the figure). As shown in Figure 5, the heating assembly 150 may include a heating device 151 and a heating device fixing member 152. The heating device 151 is arranged on the proximal side of the distal frame 114. The proximal end of the heating device fixing member 152 is fixedly connected to the back plate 121021 of the base 12102, and the distal end extends through the front plate through hole and is fixedly connected to the heating device 151. The sample rack gear 111 may include a central through hole (not shown in the figure) for allowing the heating device fixing member 152 to pass through and be rotatably connected to the heating device fixing member 152.

[0054] As shown in Figure 5, in some embodiments, the central portion of the front plate through hole in the front plate 121022 includes an annular sinking area, and the heating component 150 may further include a sleeve 153, and the sleeve 153 includes a sleeve end cover (not shown in the figure). The end cover of the sleeve 153 may include a flange, and the flange can be placed in the annular sinking area of ​​the front plate through hole. The portion of the sleeve 153 located at the distal end surface of the flange passes through the front plate through hole. The cooperation between the flange and the sinking area ensures that the sleeve 153 will not fall off from the front plate through hole. The sleeve end cover may also include an end cover through hole, and the end cover through hole can be used as a passage for some components. For example, after the heating device fixing member 152 extends through the end cover through hole, it is fixedly connected to the heating device 151. For example, in some embodiments, the sleeve 153 may include at least one fixing rod 15301, the proximal end of the at least one fixing rod 15301 being fixedly connected to the sleeve end cap, and the distal end extending through the end cap through-hole and then fixedly connected to the heating device 151, thereby further providing support and positioning for the heating device 151 and ensuring the overall stability and functionality of the heating assembly 150. As shown in Figure 5, in some embodiments, the heating device fixing member 152 includes two fixing shafts. Those skilled in the art will understand that this is merely exemplary and that the heating device fixing member 152 may also include other numbers of fixing shafts.

[0055] As shown in Figure 5, in some embodiments, the heating component 150 may also include a sleeve bearing (not shown in the figure), the outer ring of the sleeve 153 is fixedly connected to the inner ring of the sleeve bearing, and the outer ring of the sleeve bearing is fixedly connected to the center through hole of the sample carrier gear 111, thereby realizing the rotational connection between the sample carrier gear 111 and the heating device fixing part 152.

[0056] In some embodiments of the present disclosure, the heating device 151 and the sample carrier 110 can both swing simultaneously with the swinging of the swing frame 121, thereby achieving synchronized swinging of the sample and the heating device, thereby avoiding temperature differences caused by different distances between the sample (e.g., substrate) on the sample carrier 110 and the heating device 151. In some embodiments, the rotating transmission assembly 140 shown in Figure 3 can also be combined to achieve continuous rotation of the sample relative to the heating device 151 during the coating process, thereby reducing film thickness non-uniformity caused by heating non-uniformity.

[0057] FIG6 is a schematic structural diagram of a baffle of a vacuum sample holder 100 according to some embodiments of the present disclosure.

[0058] As shown in FIG6 , in some embodiments of the present disclosure, the vacuum sample holder 100 may further include a baffle 160 and a baffle drive assembly 170. The baffle 160 is disposed distally to the sample carrier 110. The baffle drive assembly 170 is connected to the baffle 160 and is configured to drive the baffle 160 to rotate. The baffle drive assembly 170 includes a baffle rotation drive shaft 171 configured to receive a rotational drive. The distal end of the baffle rotation drive shaft 171 is fixedly connected to the baffle 160, driving the baffle 160 to rotate to shield or expose the sample.

[0059] FIG7 shows a schematic structural diagram of a vacuum sample holder driving system 1000 according to some embodiments of the present disclosure.

[0060] As shown in FIG7 , in some embodiments of the present disclosure, a vacuum sample holder drive system 1000 may include a drive vacuum chamber 200, a vacuum sample holder 100 according to any embodiment of the present disclosure, and a swing drive device 300. The swing drive device 300 is connected to the drive vacuum chamber 200 and to the swing transmission assembly 122 of the swing assembly 120 of the vacuum sample holder 100, and is configured to drive the swing transmission assembly 122 to cause the swing frame 121 of the swing assembly 120 to swing about a swing axis.

[0061] As shown in FIG7 , in some embodiments of the present disclosure, a swing drive device 300 may include a swing drive motor 310 and a swing drive circuit 320. The proximal end of the swing drive circuit 320 is connected to the output end of the swing drive motor 310, and the distal end is connected to the proximal end of the swing drive shaft 12201 via a gear transmission. In some embodiments, the distal end of the swing drive circuit 320 extends through the drive vacuum chamber 200 and is connected to the proximal end of the swing drive shaft 12201 as shown in FIG2 . The drive shafts in the swing drive circuit 320 may be connected in stages using at least one universal joint to ensure that power can be effectively transmitted at different angles and directions.

[0062] As shown in FIG7 , in some embodiments of the present disclosure, the vacuum sample holder drive system 1000 may further include a rotation drive device 400 for driving the sample carrier 110 to rotate around a rotation axis. The rotation drive device 400 may include a rotation drive motor 410 and a rotation drive circuit 420. The proximal end of the rotation drive circuit 420 is connected to the output end of the rotation drive motor 410, and the distal end is connected to the proximal end of the rotation drive shaft 141 as shown in FIG3 through a gear transmission. In some embodiments, the distal end of the rotation drive circuit 420 extends through the drive vacuum chamber 200 and is connected to the proximal end of the rotation drive shaft 141. The drive shaft in the rotation drive circuit 420 can be connected in stages using at least one universal joint to ensure that power can be effectively transmitted at different angles and directions.

[0063] As shown in FIG7 , in some embodiments of the present disclosure, the vacuum sample holder drive system 1000 may further include a baffle drive device 500 for driving the baffle 160 of the vacuum sample holder 100 to rotate. The baffle drive device 500 may include a baffle drive motor 510 and a baffle drive circuit 520 . The proximal end of the baffle drive circuit 520 is connected to the output end of the baffle drive motor 510 , and the distal end is connected to the proximal end of the baffle rotation drive shaft 171 shown in FIG6 via a gear transmission. In some embodiments, the distal end of the baffle drive circuit 520 extends through the drive vacuum chamber 200 and is connected to the proximal end of the baffle rotation drive shaft 171 . The drive shafts in the baffle drive circuit 520 may be connected in stages using at least one universal joint to ensure efficient power transmission at various angles and directions.

[0064] As shown in Figure 7, in some embodiments of the present disclosure, the vacuum sample holder driving system 1000 may further include a linear driving device 600. The linear driving device 600 is fixedly connected to the mounting frame 130 of the vacuum sample holder 100 and is used to drive the vacuum sample holder 100 to move linearly.

[0065] FIG8 shows a schematic structural diagram of a linear drive device 600 according to some embodiments of the present disclosure.

[0066] As shown in Figures 7 and 8, in some embodiments of the present disclosure, the linear drive device 600 may include a linear drive shaft 610, a linear transmission assembly 620, and a linear drive assembly 630. The proximal end of the linear drive shaft 610 is disposed within the drive vacuum chamber 200, and the distal end is fixedly connected to the mounting bracket 130. The linear transmission assembly 620 is connected to the proximal end of the linear drive shaft 610 and is capable of driving the linear drive shaft 610 to move linearly. The linear drive assembly 630 is disposed outside the drive vacuum chamber 200 and is coupled to the linear transmission assembly 620 to drive the linear transmission assembly 620 to drive the linear drive shaft 610 to move linearly, thereby driving the vacuum sample holder 100 to move linearly.

[0067] As shown in FIG8 , in some embodiments of the present disclosure, the drive vacuum chamber 200 may include a bellows 210. The proximal end of the linear drive shaft 610 is fixedly connected to the proximal flange of the drive vacuum chamber 200 or to the proximal flange of the bellows 210. The linear drive assembly 630 may include a linear drive motor 631. The linear transmission assembly 620 may include a slider 622 and a screw 623. The screw 623 is coupled to the output end of the linear drive motor 631. The linear transmission assembly 620 may also include a fixed plate 621, along which the slider 622 is capable of linear movement. The proximal end of the slider 622 (on the right side of FIG8 ) is threadedly connected to the screw 623, and the distal end (on the left side of FIG8 ) is fixedly connected to the proximal flange of the bellows 210. The linear drive assembly 630 drives the screw 623 to cause the slider 622 to move linearly, thereby driving the linear drive shaft 610 and further driving the linear movement of the vacuum sample holder 110. During the linear movement of the driving vacuum chamber 200 , the bellows 210 stretches or contracts to provide a linear movement distance and maintain the vacuum environment in the driving vacuum chamber 200 .

[0068] As shown in FIG8 , in some embodiments, the linear drive assembly 630 transmits power to the linear transmission assembly 620 through magnetic coupling. The linear transmission assembly 620 includes a transmission magnetic assembly (not shown) disposed within the drive vacuum chamber 200, and the linear drive assembly 630 includes a driving magnetic assembly (not shown) magnetically coupled to the transmission magnetic assembly.

[0069] Those skilled in the art will understand that the above embodiments of the linear drive device 600 are merely exemplary, and the linear drive assembly 630 can also transmit power to the linear transmission assembly 620 by means of gear meshing, for example, by transmitting power to the linear transmission assembly 620 by means of a worm gear transmission, and a lead screw nut can be connected to the inner ring of the worm gear to drive the linear movement of the slider 622.

[0070] As shown in FIG. 7 , in some embodiments, the mounting frame 130 may include a longitudinal mounting plate and a transverse mounting plate. The distal end of the linear drive shaft 610 extends through the drive vacuum chamber 200 and is fixedly connected to the transverse mounting plate of the mounting frame 130 .

[0071] Figure 9 is a schematic diagram illustrating the structure of a vacuum processing system 10000 according to some embodiments of the present disclosure. Figure 10 is a schematic diagram illustrating a partial three-dimensional cross-sectional structure of a vacuum processing system 10000 according to some embodiments of the present disclosure.

[0072] As shown in Figures 9 and 10, in some embodiments of the present disclosure, a vacuum processing system 10000 may include a processing vacuum chamber 2000, a vacuum sample holder drive system 1000 according to any embodiment of the present disclosure, and a beam generating device 3000. The vacuum sample holder 100 of the vacuum sample holder drive system 1000 is located within the processing vacuum chamber 2000, and the drive vacuum chamber 200 of the vacuum sample holder drive system 1000 is vacuum-tightly connected to the processing vacuum chamber 2000. The beam generating device 3000 is vacuum-tightly connected to the processing vacuum chamber 2000 and is at least partially located within the processing vacuum chamber 2000 to emit a beam into the processing vacuum chamber 2000.

[0073] In some embodiments of the present disclosure, the sample carrier 110 and the heating device 151 can achieve synchronized oscillation to avoid temperature differences caused by varying distances between the sample and the heating device. The oscillating frame 121 is a non-stationary design. When using heat sources in different positions, the oscillating frame 121 swings to ensure that the beam and the sample plane on the sample carrier 110 maintain a strict 90-degree angle. Even concave bars can be adjusted to the appropriate angle during the coating process through oscillation, preventing beam obstruction and improving coating uniformity.

[0074] It should be pointed out that the above are only exemplary embodiments of the present disclosure and are not intended to limit the present disclosure. Any modifications, equivalent substitutions, improvements, etc. made within the spirit and principles of the present disclosure should be included in the scope of protection of the present disclosure.

Claims

1. A vacuum sample holder, characterized in that: include: A sample rack, used for carrying samples; as well as A swing assembly is connected to the sample carrier and is used to drive the sample carrier to swing. The swing assembly includes: A swing frame connected to the sample loading rack; The swing transmission assembly is used to drive the swing frame to swing around the swing axis.

2. The vacuum sample holder according to claim 1, characterized in that: The swing frame comprises: a swing arm connected to the swing transmission assembly; and The base is fixedly connected to the swing arm, and the swing arm receives drive from the swing transmission assembly to swing around the swing axis and drive the base to swing.

3. The vacuum sample holder according to claim 2, characterized in that: The swing transmission assembly includes: A swing drive shaft for receiving a rotational drive; A distal swing transmission gear, fixedly connected to the distal end of the swing transmission shaft; The swing frame includes a swing arm gear, which is arranged parallel to the swing arm and fixedly connected to the swing arm. The swing arm gear is engaged with the distal swing transmission gear to drive the swing frame to swing around the swing axis.

4. The vacuum sample holder according to claim 2, characterized in that: It also includes a mounting frame, which is rotatably connected to the swing arm and is used to support the swing frame.

5. The vacuum sample holder according to claim 2, characterized in that: It also includes a rotation transmission assembly connected to the sample carrier to drive the sample carrier to rotate around a rotation axis.

6. The vacuum sample holder according to claim 5, characterized in that: The rotary transmission assembly comprises: a rotating transmission shaft for receiving a rotational drive; a distal rotary transmission gear fixedly connected to the distal end of the rotary transmission shaft; and A gear transmission mechanism connected to the distal rotation transmission gear to receive driving force, The sample carrier includes a sample carrier gear, which is connected to a gear transmission mechanism and is used to receive power from the distal rotation transmission gear through the gear transmission mechanism to drive the sample carrier to rotate.

7. The vacuum sample holder according to claim 6, characterized in that: The gear transmission mechanism comprises: a first transmission gear meshing with the distal rotation transmission gear; a first transmission shaft, a proximal end of which is fixedly connected to the first transmission gear; a second transmission gear, fixedly connected to the distal end of the first transmission shaft; a third transmission gear, meshing with the second transmission gear; a second transmission shaft, a proximal end of the second transmission shaft being fixedly connected to the third transmission gear; a fourth transmission gear fixedly connected to the distal end of the second transmission shaft and meshing with the sample carrier gear to drive the sample carrier to rotate around the rotation axis; or The gear transmission mechanism comprises: a first transmission gear meshing with the distal rotation transmission gear; a first transmission shaft, a proximal end of which is fixedly connected to the first transmission gear; a second transmission gear, fixedly connected to the distal end of the first transmission shaft; a third transmission gear connected to the second transmission gear; at least one intermediate transmission gear, disposed between the second transmission gear and the third transmission gear, and configured to connect the second transmission gear and the third transmission gear; a second transmission shaft, a proximal end of the second transmission shaft being fixedly connected to the third transmission gear; The fourth transmission gear is fixedly connected to the distal end of the second transmission shaft and meshes with the sample carrier gear to drive the sample carrier to rotate around the rotation axis.

8. The vacuum sample holder according to claim 7, characterized in that: The swing arm includes a groove for accommodating the second transmission gear and the third transmission gear, or accommodating the second transmission gear, the third transmission gear and the at least one intermediate transmission gear, The second transmission shaft is rotatably connected to the swing arm; and / or The swing arm gear is a ring gear, which is sleeved outside the first transmission shaft and is rotatably connected to the first transmission shaft. The second transmission shaft is rotatably connected to the swing arm.

9. The vacuum sample holder according to claim 6, characterized in that: The sample loading rack comprises: The proximal frame is fixedly connected to the sample rack gear; a connecting rod, the proximal end of which is fixedly connected to the proximal frame; and The distal frame is fixedly connected to the distal end of the connecting rod and is used for carrying samples.

10. The vacuum sample holder according to claim 9, characterized in that: It also includes a heating component connected to the base and arranged between the proximal frame and the distal frame, for heating the sample carried on the distal frame.

11. The vacuum sample holder according to claim 10, characterized in that: The base includes a back plate and a front plate fixedly connected to the back plate, and the front plate includes a front plate through hole. The heating assembly comprises: a heating device, disposed on the proximal side of the distal frame; a heating device fixing member, the proximal end of which is fixedly connected to the back plate of the base, and the distal end of which is fixedly connected to the heating device; The sample carrier gear includes a central through hole for allowing the heating device fixing part to pass through and be rotatably connected with the heating device fixing part.

12. The vacuum sample holder according to claim 1, characterized in that: Also includes: a baffle, disposed at the distal end of the sample carrier; and A baffle transmission assembly is connected to the baffle and is used to drive the baffle to rotate. The baffle transmission assembly includes a baffle rotation transmission shaft for receiving rotational drive. The distal end of the baffle rotation transmission shaft is fixedly connected to the baffle to drive the baffle to rotate to cover or expose the sample.

13. A vacuum sample holder driving system, characterized in that: include: driving the vacuum chamber; The vacuum sample holder according to any one of claims 1 to 12; as well as A swing driving device is connected to the driving vacuum chamber and is connected to the swing of the vacuum sample holder. The swing transmission assembly of the component is connected to drive the swing transmission assembly to drive the swing frame of the swing assembly to swing around the swing axis.

14. The vacuum sample holder driving system according to claim 13, characterized in that: The swing drive device comprises: Swing drive motor; A swing drive circuit, the proximal end of which is connected to the output end of the swing drive motor, and the distal end of which is connected to the proximal end of the swing drive shaft of the swing drive assembly through a gear transmission; and / or The vacuum sample holder driving system further includes a rotation driving device for driving the sample carrier to rotate around a rotation axis, wherein the rotation driving device includes: Rotary drive motor; A rotation drive circuit, the proximal end of which is connected to the output end of the rotation drive motor, and the distal end of which is connected to the proximal end of the rotation drive shaft of the rotation drive assembly of the vacuum sample holder through gear transmission; and / or The vacuum sample holder driving system further includes a baffle driving device for driving a baffle of the vacuum sample holder to rotate, wherein the baffle driving device includes: Baffle drive motor; The baffle drive circuit has a proximal end connected to the output end of the baffle drive motor, and a distal end connected to the proximal end of the baffle rotation drive shaft of the baffle drive assembly of the vacuum sample holder through gear transmission.

15. The vacuum sample holder driving system according to claim 13, characterized in that: Also includes: A linear drive device is fixedly connected to the mounting frame of the vacuum sample holder and is used to drive the vacuum sample holder to move linearly. The linear drive device includes: The linear drive shaft has a proximal end disposed in the drive vacuum chamber and a distal end fixed to the mounting frame. connect; a linear transmission assembly connected to the proximal end of the linear drive shaft and capable of driving the linear drive shaft to move linearly; and A linear drive assembly is provided outside the driving vacuum chamber and is coupled to the linear transmission assembly to drive the linear transmission assembly to drive the linear drive axis to move linearly, thereby driving the vacuum sample holder to move linearly. in, The driving vacuum chamber includes a bellows, the proximal end of the linear driving shaft is fixedly connected to the proximal flange of the driving vacuum chamber or the proximal flange of the bellows, the linear driving assembly includes a linear driving motor, and the linear transmission assembly includes a slider and a screw, the screw is coupled to the output end of the linear driving motor, the proximal end of the slider is threadedly connected to the screw, and the distal end is fixedly connected to the proximal flange of the bellows; or The linear transmission assembly includes a transmission magnetic assembly disposed in the driving vacuum chamber, and the linear driving assembly includes a driving magnetic assembly magnetically coupled to the transmission magnetic assembly.

16. A vacuum processing system, characterized in that: include: Processing vacuum chamber; The vacuum sample holder driving system according to any one of claims 13 to 15, wherein the vacuum sample holder of the vacuum sample holder driving system is located in the processing vacuum chamber, and the driving vacuum chamber of the vacuum sample holder driving system is vacuum-sealed to the processing vacuum chamber; as well as The beam generating device is vacuum-sealedly connected to the processing vacuum chamber and is at least partially located in the processing vacuum chamber to emit a beam into the processing vacuum chamber.

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