Inspection apparatus

Abstract

Disclosed is an inspection apparatus for inspecting an electrical characteristic of a device. The inspection apparatus comprises: an inspection socket for supporting a probe configured to come into contact with the device; a pusher support part fixed to the inspection socket; a pusher unit supported by the pusher support part and pressing the device; and a driving part which causes the pusher unit to approach or separate from the device so that the pusher unit is pressed and driven. The pusher unit comprises: a pusher body for pressing the device; and a pusher thickness adjusting part provided between the driving part and the pusher body so as to be horizontally slidable in the pressing direction of the device, and provided so that the pusher body has a plurality of heights in the pressing direction according to a position of the pusher thickness adjusting part which is sliding.

Description

Inspection device

[0001] The present invention relates to a testing device for testing electrical characteristics of a device such as a semiconductor.

[0002] The manufacturing process for semiconductor components such as ICs requires inspection equipment to inspect the final electronic components. These inspection equipment includes a test socket that supports the probe and a pusher that presses the device placed in the test socket for inspection. Typically, inspection equipment is designed to inspect only one type of device. However, inspecting devices with different thicknesses incurs the time and financial costs of replacing the appropriate pusher.

[0003] Patent No. 10-1528172 discloses a general-purpose inspection device capable of inspecting devices of different thicknesses. However, this conventional inspection device has a complex structure, increasing manufacturing costs and complicated operation.

[0004] The purpose of the present invention is to provide an inspection device capable of inspecting multiple types of devices with an economical and simple structure.

[0005] To achieve the above-described object, a test device for testing electrical characteristics of a device is provided. The test device includes a test socket for supporting a probe that contacts the device; a pusher support portion fixed to the test socket; a pusher unit supported by the pusher support portion for pressing the device; and a driving portion for moving the pusher unit closer to or away from the device so that the pusher unit is driven for pressing. The pusher unit includes a pusher body for pressing the device; and a pusher thickness adjustment portion that is slidable transversely in the pressing direction of the device between the drive portion and the pusher body and is provided so that the pusher body has a plurality of pressing direction heights depending on a sliding movement position.

[0006] The pusher body and the pusher thickness adjusting portion may include a protrusion that protrudes in the pressing direction, and a plurality of thickness adjusting recessed portions having different recessed depths provided at mutually spaced locations along the sliding direction of the other of the pusher body and the pusher thickness adjusting portion so as to engage with the protrusions. As a result, the thickness of the pusher can be easily adjusted according to the thickness of the device.

[0007] The pusher body and the pusher thickness adjusting portion may include a rail portion extending in the sliding direction and having the protrusion provided at one position. The other of the pusher body and the pusher thickness adjusting portion may include a rail receiving portion in which the rail portion is received so as to be movable in the sliding direction and in which the plurality of thickness adjusting recessed portions are provided to correspond to the protrusions. As a result, the pusher thickness adjusting portion can be easily adjusted while stably sliding.

[0008] The pusher body and the pusher thickness adjusting portion may include a rotatably provided cloud member. A plurality of cloud member receiving portions may be sunken to a predetermined depth to receive a portion of the cloud member at mutually spaced locations along the sliding direction of the other of the pusher body and the pusher thickness adjusting portion. As a result, the operability of the pusher thickness adjusting portion is improved and the flow space between the pusher thickness adjusting portion and the pusher body can be secured.

[0009] The above pusher thickness adjustment unit may include a stopper that protrudes transversely from at least one of the ends in the sliding direction and restricts movement in the sliding direction. This allows the pusher thickness adjustment unit to be switched in a stable and convenient manner.

[0010] An inspection device according to one embodiment of the present invention has a simple structure, reduces manufacturing costs, and is convenient to use when inspecting multiple types of devices.

[0011] FIG. 1 is a drawing showing an inspection device according to one embodiment of the present invention.

[0012] Figure 2 is a perspective view showing the overall pusher assembly of Figure 1.

[0013] Figure 3 is a cross-sectional view taken along line AA of Figure 2.

[0014] Fig. 4 is a cross-sectional view taken along line BB of Fig. 2.

[0015] Figure 5 is a drawing of the pusher assembly of Figure 2 seen from above in an exploded view.

[0016] Figure 6 is a drawing of the pusher assembly of Figure 2 seen from below in an exploded view.

[0017] Figure 7 is a drawing showing a thickness adjustment method of a pusher thickness adjustment unit.

[0018] Hereinafter, with reference to the attached drawings, an inspection device (1) according to an embodiment of the present invention will be described in detail. For convenience of explanation, only relevant parts for understanding the present invention have been described, and parts not directly related to the invention have been excluded from the drawings or description, and the same reference numerals have been assigned to identical or similar components throughout the specification.

[0019] Furthermore, detailed descriptions that would be obvious to those skilled in the art may not be disclosed. In the present invention, relative terms such as "first" and "second" may be used to distinguish one entity from another, and do not imply any actual relationship or order between them.

[0020] FIG. 1 is a drawing showing an inspection device (1) according to one embodiment of the present invention, FIG. 2 is a perspective view showing the pusher assembly (20) of FIG. 1 as a whole, FIG. 3 is a cross-sectional view taken along line AA of FIG. 2, FIG. 4 is a cross-sectional view taken along line BB of FIG. 2, FIG. 5 is a drawing showing the pusher assembly (20) of FIG. 2 in an exploded manner as seen from above, and FIG. 6 is a drawing showing the pusher assembly (20) of FIG. 2 in an exploded manner as seen from below.

[0021] Referring to FIG. 1, the inspection device (1) according to the present invention includes an inspection socket (10) and a pusher assembly (20).

[0022] The inspection socket (10) includes a probe support (12) that supports a plurality of elastically stretchable probes (11), an insert (13) that includes a device receiving portion (131) that is placed on the probe support (12) and receives an electronic component (hereinafter referred to as a “device”) (D) such as a semiconductor, and a support frame (14) that supports the probe support (12). The inspection socket (10) illustrated in Fig. 1 is described as an example for the purpose of explanation and is not limited to the above-described structure.

[0023] The probe support (12) supports a plurality of probes (11) in parallel in the thickness direction. Instead of a pogo pin, a rubber socket can be applied to the probe support (12).

[0024] The insert (13) is in the form of a basket that accommodates a device (D) and can be supported on a probe support (12) by a spring. The device (D) includes terminals such as bumps, and the terminals are accommodated in the device receiving portion (131) of the insert (13) so as to correspond to the probes (11) supported on the probe support (12).

[0025] The support frame (14) fixes and supports the probe support body (12) on the inside. The support frame (14) includes catches (15, 16) provided on both sides to detachably connect the pusher assembly (20).

[0026] Referring to FIGS. 1 to 6, the pusher assembly (20) includes a pusher support member (21) fixed to the inspection socket (10), a pusher unit (22, 23, 24) supported by the pusher support member (21) to pressurize the device (D), and a driving member (25) that brings the pusher unit (22, 23, 24) closer to or away from the device (D) so that the pusher unit (22, 23, 24) is pressurized.

[0027] The pusher support member (21) includes a support body (210), a cover member (211) coupled to the lower side of the support body (210), a pair of fastening members (212) provided on both sides of the support body (210) to be fastened to the inspection socket (10), a pusher support pin (214) that supports the pusher unit (22, 23, 24), and a support spring (215) inserted into the pusher support pin (214).

[0028] The support body (210) includes a driving screw hole (210a) extending vertically through the center and a plurality of pin receiving holes (210b) provided to surround the driving screw hole (210a).

[0029] A driving bolt (251) of a driving unit (25) described later is screwed into the driving screw hole (210a).

[0030] Pusher support pins (214) for hanging pusher units (22, 23, 24) on pusher support members (21) are inserted into the plurality of pin receiving holes (210b).

[0031] The cover member (211) covers the lower surface of the support body (210) after the pusher support pin (214) and the support spring (215) are inserted into the pin receiving hole (210b). The cover member (211) includes a pin passage hole (211a) having a diameter smaller than the outer diameter of the support spring (214) and the pin head (215) at a position corresponding to the pin receiving hole (210b). Therefore, when the cover member (211) is fastened, the support spring (215) and the pin head (214b) are not pulled out through the pin passing hole (211a) but are restrained.

[0032] The fastening member (212) has one end detachably hooked to the hooking jaws (141, 142) of the support frame (14) of the inspection socket (10) and the other end is hinge-rotatably supported on the support body (210). A spring (213) is interposed between the other end of the fastening member (212) and the support body (210). Therefore, the spring (213) biases the other end of the fastening member (212) away from the support body (210) so that one end of the fastening member (212) remains hooked to the hooking jaws (141, 142) of the support frame (14). The fastening member (212) disclosed in FIG. 1 is one example and may be designed in various structures.

[0033] The pusher pin (214) includes a pin body (214a) extending in the longitudinal direction and a pin head (214b) provided at one end of the pin body (214a) with a diameter larger than that of the pin body (214a).

[0034] The pusher support pin (214) is inserted into the pin receiving hole (210b) of the support body (210) so that the pin head (214b) is positioned at the upper side, and the other end of the pin body (214a) passes through the pin passage hole (241) of the pressing member (24) and is fixedly connected to the pusher body (22). That is, two facing each other among the four pusher support pins (214) are fixedly connected to the middle of a pair of guides (225, 225) provided on the upper surface of the pusher body (22), and the remaining two are fixedly connected to a pair of first stoppers (223a, 223b) provided on the island (223).

[0035] The support spring (215) is inserted into the pin receiving hole (210b) while being fitted into the pin body (214a) of the pusher support pin (214).

[0036] When the driving unit (25) is operated in the forward direction (in the direction of pressing the pressing member (24)), the pusher support pin (214) moves downward within the pin receiving hole (210b) to compress the support spring (215) and move the pusher unit (22, 23, 24) away from the pusher body (210). When the driving unit (25) is operated in the reverse direction, the pressure of the pressing member (24) is released and the compression of the support spring (215) is restored, resulting in the pusher unit (22, 23, 24) moving toward the pusher body (210).

[0037] The pusher unit (22, 23, 24) can be approached or moved away from the device (D). The pusher unit (22, 23, 24) includes a pusher body (22) that pressurizes the device (D), a pusher thickness adjusting part (23) provided on the pusher body (22), and a pressing member (24) provided on the pusher thickness adjusting part (23).

[0038] The pusher body (22) includes a plate-shaped pusher base (221), a pusher (222) that protrudes downward from the pusher base (221) and directly presses the device (D), a rectangular island (223) provided above the pusher base (222), a pair of guides (224, 225) that extend side by side and spaced apart from each other on both sides (long sides) of the island (223), and a pair of rail receiving portions (226) formed between each of the pair of guides (224, 225) and each of the two sides of the island (223).

[0039] The pusher (222) protrudes integrally from one side (lower side) of the pusher base (221) and has a pressing surface that pressurizes the device (D).

[0040] The island (223) is integrally formed to protrude from the other surface (upper side) of the pusher base (221) so as to be accommodated in the island receiving portion (23a) provided in the pusher thickness adjusting portion (23) described later in a rectangular shape. The island (223) includes first stoppers (223a, 223b) provided in an arch shape on the front and rear short sides in the sliding direction of the pusher thickness adjusting portion (23), respectively. When the pusher thickness adjusting portion (23) slides forward and backward, the first stoppers (223a, 223b) are caught in the stopper grooves (23b, 23c) provided in the island receiving portion (23a) of the pusher thickness adjusting portion (23) described later, thereby restricting the sliding of the pusher thickness adjusting portion (23).

[0041] A pair of guides (224, 225) are spaced apart from both sides of the island (223) by a predetermined distance and extend in the sliding direction of the pusher thickness adjustment part (23).

[0042] The rail portions (23d, 23e) of the pusher thickness adjustment portion (23) described later are received and engaged in the rail receiving portion (226). The rail receiving portion (226) includes a pair of thickness adjustment recessed portions (227) formed to be spaced apart from each other in the sliding direction on the floor, a cloud member receiving portion (228a), and a cloud member (228b).

[0043] A pair of thickness-adjusting recessed portions (227) accommodate the protrusions (231) of the pusher thickness-adjusting portion (23) described later. The pair of thickness-adjusting recessed portions (227) include first and second recessed portions (227a, 227b) each having different recessed depths. The thickness-adjusting recessed portions (227) are not limited to two first and second grooved portions (227a, 227b) and may include three or more recessed portions having different recessed depths.

[0044] The cloud member receiving portion (228a) is sunken in the middle of a pair of thickness-adjusting recessed portions (227) and receives a cloud member (228b) described later.

[0045] The cloud member (228b) provides a fluid space to facilitate sliding of the pusher thickness adjustment part (23) as a rotating ball, roller, or wheel.

[0046] The pusher thickness adjustment part (23) can slide horizontally in the pressing direction of the device (D) between the pressing member (24) or the driving part (25) and the pusher body (22), and varies the pressing direction height of the pusher body (22) depending on the sliding movement position.

[0047] The pusher thickness adjustment part (23) includes an island receiving part (23a) formed in a rectangular shape through the center, a pair of stopper grooves (23b, 23c) provided on the front and rear sides (short sides) of the island receiving part (23a) in the sliding direction, and a pair of rail parts (23d, 23e) provided on both sides (long sides) of the island receiving part (23a) extending along the sliding direction of the pusher thickness adjustment part (23).

[0048] A pair of rail parts (23d, 23e) includes a pair of protruding parts (231) spaced apart from each other at a position on the bottom surface, that is, the surface facing the thickness adjustment recessed part (227) of the pusher body (22), and a pair of cloud member receiving parts (233a, 233b) spaced apart from each other at a predetermined depth between the pair of protruding parts (231).

[0049] A pair of protrusions (231) are variably accommodated in first and second recessed portions (227a, 227b) having different depths depending on the sliding amount of the pusher thickness adjusting portion (23). In Fig. 4, when the pusher thickness adjusting portion (23) is moved to the right, a pair of protrusions (231) are positioned in the second recessed portion (227b) having a shallow depth. In Fig. 4, when the pusher thickness adjusting portion (23) is pushed to the left and slid, a pair of protrusions (231) are positioned in the first recessed portion (227a) having a deep depth. As a result, the pressing direction height of the pusher body (22) is adjusted differently depending on the sliding state of the pusher thickness adjusting portion (23).

[0050] The pusher thickness adjustment part (23) includes a second stopper (232a, 23b) that protrudes in the horizontal direction of the sliding direction at least on one of the two ends in the sliding direction and is restricted from being caught by the pusher body (22) or the support body (210) when moving in the sliding direction.

[0051] As a modified example, a rail portion (23d, 23e) having a protrusion (231) may be provided on the upper surface of the pusher body (22), and a rail receiving portion (226) having a thickness-adjusting recessed portion (227) may be provided on the pusher thickness-adjusting portion (23).

[0052] As a modified embodiment, a cloud member receiving portion (228a) may be provided in the pusher thickness adjusting portion (23).

[0053] As a modified example, a protrusion (231) and a thickness-adjusting recessed portion (227) may be provided between the pusher thickness-adjusting portion (23) and the pressing member (24).

[0054] The pressing member (24) is provided on the pusher thickness adjustment member (23) in the form of a plate and can be pressed by the driving member (25). It is also possible to omit the pressing member (24) and have the driving member (25) directly press the pusher thickness adjustment member (23).

[0055] The driving unit (25) includes a driving bolt (251) and an operating unit (253) that is connected to the upper side of the driving bolt (251).

[0056] The drive bolt (251) has screws formed on its outer surface and is screw-connected to the drive screw hole (210a) of the support body (210). The drive bolt (251) is provided with a number of fixing holes (251a) arranged in the circumferential direction on the upper portion.

[0057] The operating unit (253) is rotated by the user for inspection. The operating unit (253) is connected to the driving bolt (251) by selectively screwing a plurality of fixing screws (252) into a plurality of fixing holes (251a) of the driving bolt (251).

[0058] The driving unit (25) moves forward in the screw travel direction as the operating unit (253) is rotated, and the lower end (tip) of the driving bolt (251) presses the pressing member (24). As a result, the pusher unit (22, 23, 24) moves downward to pressurize the device (D).

[0059] The driving unit (25) is not limited to a screw driving method and can pressurize and drive the pressing member (24) or thickness adjusting member (23) in various ways.

[0060] Figure 7 is a drawing showing a thickness adjustment method of the pusher thickness adjustment unit (23).

[0061] In Fig. 7(a), the pusher thickness adjustment part (23) is moved to the right. At this time, the protrusion (231) of the pusher thickness adjustment part (23) is positioned in the first recessed part (227a) that is relatively deeply recessed. Consequently, the thickness between the upper surface of the pusher thickness adjustment part (23) and the lower surface of the pusher body (22) has a relatively small thickness (t1).

[0062] In Fig. 7(b), the pusher thickness adjustment part (23) slides from the right to the left and crosses the step between the first depressed part (227a) and the second depressed part (227b). At this time, the cloud member (228b) provides a flow gap (s1) for the sliding movement of the pusher thickness adjustment part (23), i.e., for smoothly crossing the step.

[0063] In Fig. 7(c), the pusher thickness adjustment part (23) is in a state of sliding to the left. At this time, the protrusion (231) of the pusher thickness adjustment part (23) is positioned in the second recessed part (227b) that is relatively shallow. Consequently, the thickness between the upper surface of the pusher thickness adjustment part (23) and the lower surface of the pusher body (22) has a relatively large thickness (t2).

[0064] In the foregoing specification, the present invention and its advantages have been described with reference to specific embodiments. However, it will be apparent to those skilled in the art that various modifications and variations are possible without departing from the scope of the present invention as set forth in the claims below. Accordingly, the specification and drawings should be considered illustrative of the present invention rather than limiting. All such possible modifications should be made within the scope of the present invention.

Claims

1. In a testing device that tests the electrical characteristics of a device, An inspection socket supporting a probe that contacts the above device; A pusher support member fixed to the above inspection socket; A pusher unit supported by the pusher support member to pressurize the device; and It includes a driving unit that approaches or moves the pusher unit away from the device so that the pusher unit is pressurized. The above pusher unit, A pusher body for pressurizing the above device; and An inspection device including a pusher thickness adjustment unit that is slidable transversely in the pressing direction of the device between the driving unit and the pusher body and is provided so that the pusher body has a plurality of pressing direction heights depending on the sliding movement position.

2. In paragraph 1, One of the above pusher body and the above pusher thickness adjustment part includes a protrusion that protrudes in the pressing direction, An inspection device including a plurality of thickness-adjusting recessed portions having different recessed depths so as to engage with the protrusions at mutually spaced locations along the sliding direction of the other of the pusher body and the pusher thickness-adjusting portion.

3. In paragraph 2, A rail part is included that extends in the sliding direction and has the protrusion provided at one position in one of the pusher body and the pusher thickness adjustment part. An inspection device including a rail receiving portion in which the rail portion is movably received in the sliding direction in the other of the pusher body and the pusher thickness adjusting portion, and in which the plurality of thickness adjusting recessed portions are provided to correspond to the protrusion portion.

4. In paragraph 1, It includes a cloud member that is rotatably provided in one of the above pusher body and the above pusher thickness adjustment part, An inspection device including a plurality of cloud member receiving portions sunk to a predetermined depth to receive a portion of the cloud member at mutually spaced locations along the sliding direction of the other of the pusher body and the pusher thickness adjusting portion.

5. In paragraph 1, An inspection device in which the pusher thickness adjustment part includes a stopper that protrudes in the transverse direction of the sliding direction at least on one of both ends in the sliding direction and restricts movement in the sliding direction.

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