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The invention relates to the field of fabrics, provides a microcapsule color-changeable functional fabric, and solves the defect that a color-changeable fabric in the prior art is not washable. Which comprises a fabric body coated with a phase change microcapsule, and is characterized in that the phase change microcapsule is provided with a first cavity and a second cavity which are independently distributed at an interval, a photo-thermal double-response color-changing compound is packaged in the first cavity, and a photo-thermal double-response color-changing compound is packaged in the second cavity. The photo-thermal double-response color-changing compound is composed of a spiropyrane photosensitizer and a thermochromic liquid crystal material according to the weight ratio of 1: 1-1: 2, the color-changing response wavelength range of the photo-thermal double-response color-changing compound is 300-700 nm, and the color-changing temperature interval is 20-45 DEG C; and a temperature-adjusting and energy-storing compound is packaged in the second chamber.

This invention discloses an etching method for a special passivation layer structure with high light transmittance (clear ratio, CR). The invention employs a customized "step-by-step etching" process: the first stage uses high-pressure, high-RF power physical bombardment in an argon (Ar)-rich gas environment to rapidly etch the passivation layer and most of the TiN through enhanced physical bombardment; the second stage uses low-pressure, low-RF power and adjusted gas ratios to uniformly etch the remaining TiN while minimizing damage to the substrate. This method simultaneously solves the problems of TiN residue, substrate over-etching damage, and surface defects, significantly improving product reliability and yield.