High-precision quick level adjusting device

A leveling device and high-precision technology, which is applied in the direction of instruments, electrical components, and instrument parts, etc., can solve the problems of insufficient stability of the leveling mechanism and low leveling accuracy, and achieve the effect of eliminating gaps and improving accuracy

Active Publication Date: 2008-03-26
SHANGHAI MICRO ELECTRONICS EQUIP (GRP) CO LTD
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

[0006] The purpose of the present invention is to provide a high-precision fast leveling device, which can effectively sol

Method used

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  • High-precision quick level adjusting device
  • High-precision quick level adjusting device

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Embodiment Construction

[0020] The high-precision fast leveling device of the present invention will be described in further detail below in conjunction with a preferred embodiment.

[0021] Please refer to Figure 1 to Figure 3, the high-precision fast leveling device of the present invention includes an adjustment platform 1, an installation base 6, and multiple sets of parallel reeds 2 installed between the adjustment platform 1 and the installation base 6, and online position measurement Sensor assembly 3 , eccentric wheel / cam assembly 4 , pretension tension spring 5 , executive wheel assembly 7 and drive motor 8 .

[0022] In this embodiment, both the adjustment platform 1 and the installation base 6 are circular, and three sets of parallel reeds 2 are used for connection. between 6. Correspondingly, the leveling device also includes three sets of on-line position measurement sensor assemblies 3, eccentric wheel / cam assembly 4 and executive wheel assembly 7, the on-line position measurement sens...

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Abstract

This invention provides an accurate quick leveling device including a leveling platform, an installing base, multiple sets of parallel reeds between the leveling platform and the base, on-line position measurement sensor components, eccentric/cam components, pre-strain springs and an executing wheel component, all of which are set on the base corresponding to each other in a same included angle.

Description

technical field [0001] The invention relates to a fast leveling mechanism, in particular to a high-precision fast leveling device used in precision instruments and equipment in the field of semiconductor manufacturing. Background technique [0002] In the field of semiconductor manufacturing, the leveling of workpieces by precision instruments and equipment usually requires high precision, high efficiency and no damage to the surface of the workpiece. Some automatic leveling mechanisms in the prior art use motors plus screw nuts or piezoelectric ceramics to level the workpiece at three or four points under the bearing platform. This leveling mechanism does not damage the surface of the workpiece, but due to the wire There is a gap in the lever nut, and the piezoelectric ceramic has a gap, so it is difficult to achieve high precision. At the same time, because it needs to be adjusted point by point repeatedly, and because it is adjusted on the back of the workpiece, it needs ...

Claims

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Application Information

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IPC IPC(8): H01L21/00G12B5/00
Inventor 朱岳彬
Owner SHANGHAI MICRO ELECTRONICS EQUIP (GRP) CO LTD
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