Unlock instant, AI-driven research and patent intelligence for your innovation.

Etching solution composition and method for producing metal wiring using same

A technology of composition and etching solution, which is applied in the manufacture of printed circuits, metal pattern materials, printed circuits, etc., can solve the problems of over-etching, non-etching, different etching rates, etc., and achieve the effect of improving reliability

Active Publication Date: 2022-04-19
SAMSUNG DISPLAY CO LTD +1
View PDF0 Cites 0 Cited by
  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

However, substances used to form each layer have different etch rates, so over-etching or under-etching may occur in some layers

Method used

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
View more

Image

Smart Image Click on the blue labels to locate them in the text.
Viewing Examples
Smart Image
  • Etching solution composition and method for producing metal wiring using same
  • Etching solution composition and method for producing metal wiring using same
  • Etching solution composition and method for producing metal wiring using same

Examples

Experimental program
Comparison scheme
Effect test

Embodiment Construction

[0037] Hereinafter, various embodiments of the present invention will be described in detail with reference to the accompanying drawings, so that those with basic knowledge in the technical field to which the present invention pertains can easily implement. The present invention can be realized in many different forms and is not limited to the embodiments described herein.

[0038] In order to clearly clarify the present invention, parts irrelevant to the description are omitted, and the same reference numerals are assigned to the same or similar constituent elements throughout the specification.

[0039] In addition, the size and thickness of the respective components shown in the drawings are arbitrarily shown for convenience of explanation, and therefore the present invention is not necessarily limited to the illustrated ones. In the drawings, in order to clearly show various layers and regions, the thickness is exaggerated and shown. In addition, in the drawings, the thic...

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
Login to View More

PUM

No PUM Login to View More

Abstract

According to one embodiment of the present invention, there is provided an etching solution composition and a method for manufacturing a metal wiring using the same, wherein the etching solution composition comprises: 8 to 20 wt % of a persulfate-based compound; from 0.1 wt % To 5% by weight of 1-nitrogen-based cyclic compounds, 0.05 to 1% by weight of 3-nitrogen-based cyclic compounds, and one or more nitrogen-based cyclic compounds selected from mixtures of these compounds; 0.1 to 1% by weight 1 wt % of a fluorine-based compound; 0.1 to 1 wt % of a copper corrosion preventing compound; and the balance of water.

Description

technical field [0001] The present invention relates to an etchant composition and a method for producing metal wiring using the composition. Background technique [0002] Generally, as a display device, a liquid crystal display device (Liquid Crystal Display; LCD), an organic light emitting display device (Organic Light Emitting Diode Display; OLED), or the like is used. [0003] Such a display device includes a plurality of metal wirings which have effects such as an increase in electrical conductivity or a decrease in contact resistance as necessary effects, and thereby aim at realizing a stabilized image. [0004] In order to achieve the aforementioned effects, the metal wiring may include a structure in which a plurality of layers made of mutually different substances are laminated. However, substances used to form the respective layers have different etch rates, and thus over-etching or under-etching may occur in some layers. Contents of the invention [0005] Embo...

Claims

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
Login to View More

Application Information

Patent Timeline
no application Login to View More
Patent Type & Authority Patents(China)
IPC IPC(8): C23F1/44
CPCC23F1/44C23F1/26C23F1/18C23F11/149H05K3/067H05K1/09
Inventor 裵俊佑朴弘植金奎佈申贤哲李相赫
Owner SAMSUNG DISPLAY CO LTD