Mechanism for accurately measuring micro abrasion loss of film material in situ
A thin-film material and precise measurement technology, applied in the direction of electromagnetic measuring devices, electric/magnetic thickness measurement, etc., can solve the problems of unconvincing measurement data, poor accuracy, and low measurement accuracy, and achieve broad market application prospects and major production practices meaning effect
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[0042] In order to enable those skilled in the art to better understand the solution of the present invention, the present invention will be further described in detail below in conjunction with the accompanying drawings and embodiments.
[0043] see Figure 1 to Figure 4 , the present invention provides a mechanism for accurately measuring the micro-abrasion of thin film materials in situ, including vertically distributed columns 7;
[0044] The upper part of the column 7 is hinged with the right end of a horizontal shaft 3; the horizontal shaft 3 can rotate around the upper part of the column 7 in the horizontal direction.
[0045] A displacement sensor 1 is fixedly connected to the left end of the horizontal axis 3;
[0046] The displacement sensor 1 is used to measure the film material placed directly under it before and after wear, and obtain the thickness change of the film material surface before and after wear, and the thickness change is used as the wear amount of th...
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