MPCVD equipment and antenna tensioning device thereof

Abstract

The invention relates to an MPCVD device and an antenna tensioning device thereof. The MPCVD device comprises an antenna tensioning device, which comprises a fixed sleeve, a rotating sleeve and a tensioning spring. One end of the tensioning spring is pressed on the rotating sleeve, and the other end is used to press on a conversion module of the MPCVD device. The fixed sleeve comprises a main sleeve and a clamp. The rotating sleeve is threadedly connected to the main sleeve. The rotating sleeve and the main sleeve are slidably sleeved on the antenna from bottom to top. When the clamp is in a loose state, a clearance is formed with the antenna so that the clamp can be slidably sleeved on the antenna. When the clamp is in a clamped state, it is locked and fixed with the antenna. When the clamp is in a clamped state, the clamp is fixedly connected to the main sleeve. After the antenna tensioning device is quickly moved to a suitable position on the antenna, it is fixed to the antenna, thereby improving installation efficiency and realizing rapid disassembly. No thread is required to be set on the antenna, which is beneficial to preventing the antenna from being damaged by excessive torque.

Description

Technical Field

[0001] The invention relates to the technical field of chemical vapor deposition technology, and in particular to MPCVD equipment and an antenna tensioning device thereof. Background Art

[0002] Microwave plasma chemical vapor deposition (MPCVD) is the preferred method for preparing high-quality single-crystal diamond. MPCVD equipment is microwave plasma chemical vapor deposition equipment, such as the MPCVD device disclosed in the patent application document with application publication number CN114196946A, which includes a microwave source, a waveguide, a mode converter, and a growth cavity. The growth cavity is a reaction cavity. An antenna is provided inside the mode converter. The upper end of the antenna is fixed to a water-cooled copper table, which is a substrate table. A quartz ring is provided below the water-cooled copper table. The quartz ring is pressed on the cavity bottom plate of the growth cavity. The microwave generated by the microwave source enters the mode converter through the waveguide and is then introduced into the growth cavity by the antenna.

[0003] Since the growth of high-quality single-crystal diamond requires a special growth environment, higher requirements are placed on the design and installation of MPCVD equipment. The vacuum degree of the MPCVD equipment cavity is one of the important factors in evaluating whether the equipment is qualified. In order to ensure the vacuum degree of the growth cavity, a corresponding antenna tensioning device needs to be set up. The antenna is pulled down by the antenna tensioning device so that the upper substrate stage presses the quartz ring, and the quartz ring is pressed against the cavity bottom plate. There are sealing gaskets between the quartz ring and the substrate stage and between the quartz ring and the cavity bottom plate to achieve sealing and separate the growth cavity from the waveguide cavity.

[0004] The patent application document with application publication number CN110684961A discloses a tensioning device for MPCVD, including a reaction chamber and a connecting rod, the connecting rod is an antenna, the upper end of the connecting rod passes through the chamber bottom plate of the reaction chamber, a flat plate is installed on the upper end of the connecting rod, the flat plate is the substrate stage, a closed ring is installed on the bottom surface of the flat plate, the closed ring is a quartz ring, the closed ring prevents the gases in the reaction chamber and the waveguide chamber from circulating with each other, a connecting ring and a waveguide chamber are provided below the reaction chamber, the connecting rod passes downward out of the chamber bottom plate, and passes through the connecting ring and the waveguide chamber, a tensioning device located below the waveguide chamber is installed on the connecting rod, the tensioning device includes a tensioning nut, the tensioning nut is threadedly connected to the connecting rod, a downward tensioning force can be applied to the connecting rod by screwing the tensioning nut, so that the closed ring is pressed and sealed with the flat plate and the chamber bottom plate, and the tensioning force of the connecting rod can be adjusted by rotating the tensioning nut.

[0005] The substrate stage and the closed ring constitute the upper module, the upper end of the antenna is fixed to the upper module, the upper module is pressed and sealed on the upper side of the cavity bottom plate of the reaction cavity, and the components sleeved on the connecting rod and located between the tensioning device and the cavity bottom plate constitute the conversion module, that is, the connecting ring and the waveguide cavity constitute the conversion module, and the conversion module is fixed to the cavity bottom plate of the reaction cavity. In actual use, since the tensioning nut is directly threaded on the antenna, when the tensioning nut is screwed, the screwing force of the tensioning nut directly acts on the antenna, which can easily deform the antenna and affect the use of the antenna; moreover, when installing the tensioning device, the tensioning nut needs to be screwed onto the antenna from bottom to top, and a long section of thread needs to be passed to achieve the tensioning of the antenna, and the installation efficiency is low. Summary of the invention

[0006] The object of the present invention is to provide an antenna tensioning device for MPCVD equipment to solve the problem that the antenna tensioning device of existing MPCVD equipment is unreliable in use and has low installation efficiency; the object of the present invention is also to provide an MPCVD equipment to solve the problem that the antenna tensioning device of existing MPCVD equipment is unreliable in use and has low installation efficiency.

[0007] The technical solution of the antenna tensioning device of the MPCVD equipment of the present invention is:

[0008] The antenna tensioning device of the MPCVD equipment comprises a fixed sleeve, a rotating sleeve and a tensioning spring. The tensioning spring, the rotating sleeve and the fixed sleeve are used to be sleeved on the antenna. One end of the tensioning spring presses on the rotating sleeve, and the other end presses on the conversion module of the MPCVD equipment. The fixed sleeve comprises a main sleeve and a clamp. One of the main sleeve and the rotating sleeve is provided with a connecting internal thread, and the other is provided with a connecting external thread, so that the rotating sleeve can be threadedly connected to the main sleeve. The rotating sleeve and the main sleeve respectively have central holes for gap matching with the antenna, so that the rotating sleeve and the main sleeve can be slidably sleeved on the antenna from bottom to top. The clamp has a loose state and a clamping state. When the clamp is in the loose state, it is used to form a gap match with the antenna, so that the clamp is slidably sleeved on the antenna. When the clamp is in the clamping state, it is used to lock and fix with the antenna. A fixing structure is provided between the clamp and the main sleeve, and the fixing structure is used to fix the clamp to the main sleeve when the clamp is in the clamping state.

[0009] Beneficial effect: When installing the antenna tensioning device, the fixing sleeve and the rotating sleeve can be slidably sleeved on the antenna, which is conducive to the rapid movement of the antenna tensioning device on the antenna. After the antenna tensioning device is slidably sleeved to a suitable position, the clamp is made to clamp the antenna, so that the antenna tensioning device and the antenna are fixed. At the same time, the tensioning spring can be initially compressed, and then the antenna is pre-tensioned to form a primary tensioning. Then, the tensioning spring is further compressed by screwing the rotating sleeve and the fixing sleeve for relative movement, and the antenna is tensioned for a secondary time, so that the final tensioning of the antenna is appropriate, thereby improving the installation efficiency. When it is necessary to disassemble the antenna tensioning device, the compression amount of the tensioning spring can be reduced by first screwing the rotating sleeve and the fixing sleeve for relative movement. After the antenna is tightened to a certain extent, the clamp is loosened and the antenna tensioning device can be slid and removed. The disassembly operation is convenient. Of course, when the tensioning force allows, the clamp is directly loosened to remove the antenna tensioning device to achieve quick disassembly. Moreover, the fixing sleeve is threadedly connected to the rotating sleeve, and there is no need to set threads on the antenna, which is beneficial to prevent the antenna from being damaged by excessive torque. At the same time, based on the settings of the rotating sleeve and the fixing sleeve, opposite torques can be applied respectively, and a larger force can be applied to the rotating sleeve, so that the tensioning spring obtains a larger compression amount. During long-term use, the top pressure on the conversion module is continuously maintained, thereby maintaining the tension on the antenna, which is beneficial to reducing the number of times the rotating sleeve is screwed and improving the reliability of use.

[0010] Furthermore, the rotating sleeve includes a connecting sleeve and a pressing sleeve. The center hole of the connecting sleeve and the center hole of the pressing sleeve together constitute the center hole of the rotating sleeve. The connecting sleeve is provided with a first threaded section and a second threaded section arranged in the up and down directions. The first threaded section is threadedly connected to the pressing sleeve. The pressing sleeve is used to press the tensioning spring. The second threaded section is threadedly connected to the main sleeve.

[0011] Beneficial effects: The relative rotation of the connecting sleeve, the top pressure sleeve and the fixed sleeve can change the total height of the three to compress and release the tensioning spring. At the same time, by providing a connecting sleeve with two-section threads, after the thread structure between the fixed sleeve and the connecting sleeve is damaged, the antenna can be tensioned and relaxed through the thread structure between the connecting sleeve and the top pressure sleeve, thereby avoiding the equipment from being unable to be disassembled and repaired in time.

[0012] Furthermore, the thread directions of the first thread segment and the second thread segment are opposite.

[0013] Beneficial effect: the two sections of thread rotate in opposite directions, the connecting sleeve can move relative to the fixed sleeve, and the top pressure sleeve can move relative to the connecting sleeve. In actual use, the corresponding tools can be used to apply torque to the connecting sleeve so that it can move relative to the top pressure sleeve and the fixed sleeve at the same time. A larger adjustment amount can be obtained by one screwing, thereby improving the installation and locking efficiency.

[0014] Furthermore, the connecting sleeve includes an upper section, a middle section, and a lower section. The upper section and the lower section are both screw sections, the middle section is a bare rod section, the upper section constitutes the first threaded section, the thread on the lower section constitutes the connecting external thread, and the lower section constitutes the second threaded section.

[0015] Beneficial effects: the connecting sleeve is formed by a bare rod section and two screw rod sections, and is threadedly connected with the top pressure sleeve and the fixed sleeve by using an external thread, which is convenient for processing.

[0016] Furthermore, the outer diameter of the polished rod section is greater than the outer diameter of the screw rod section.

[0017] Beneficial effect: A step is formed between the polished rod section and the screw rod section, which can limit the relative movement between the connecting sleeve and the main sleeve, and between the connecting sleeve and the top pressure sleeve to avoid damage. At the same time, it is also convenient to use tools to apply force to the polished rod section to screw it.

[0018] Furthermore, tool insertion holes are provided on the main body sleeve, the bare rod section of the connecting sleeve, and the top pressure sleeve.

[0019] Beneficial effects: It is convenient to insert the wrench tool, and torque can be selectively applied to each part, which is convenient for operation.

[0020] Furthermore, the main sleeve includes a main body portion and a screw portion, the screw portion is located on the upper side of the main body portion, the threads on the screw portion constitute the connecting external threads, and the rotating sleeve is provided with the connecting internal threads; the outer diameter of the main body portion is greater than the outer diameter of the screw portion.

[0021] Beneficial effect: the inner hole of the main sleeve is a light hole, which is convenient for the installation of the antenna; at the same time, a step can be formed at the joint between the main body and the screw part, thereby limiting the downward movement of the rotating sleeve and preventing the thread from being damaged when the rotating sleeve is subjected to excessive force.

[0022] Furthermore, the fixing structure is a connecting screw, a screw hole extending in the up-down direction is provided on the lower end surface of the main body sleeve, a screw through hole is correspondingly provided on the clamp, and the main body sleeve and the clamp are fixedly connected by the connecting screw.

[0023] Beneficial effect: The screw holes extending in the up-down direction are used for connection with the screws, which is helpful to ensure that the fixing sleeve and the antenna are coaxially arranged so that the antenna is evenly stressed.

[0024] The technical solution of the MPCVD device of the present invention is:

[0025] The MPCVD device comprises a reaction chamber, an antenna, an upper module, a conversion module, and an antenna tensioning device. The reaction chamber comprises a chamber bottom plate. The upper end of the antenna is fixed to the upper module. The upper module is sealed with the upper side of the chamber bottom plate. The conversion module is fixed to the lower side of the chamber bottom plate. The antenna tensioning device is located below the conversion module. The antenna passes downward through the chamber bottom plate, the conversion module, and the antenna tensioning device. The antenna tensioning device comprises a fixed sleeve, a rotating sleeve, and a tensioning spring. The tensioning spring, the rotating sleeve, and the fixed sleeve are used to be sleeved on the antenna. One end of the tensioning spring is pressed on the rotating sleeve, and the other end is used to press on the conversion module of the MPCVD device. The fixed sleeve comprises a main The body sleeve and the clamp, one of the main sleeve and the rotating sleeve is provided with an internal connecting thread, and the other is provided with an external connecting thread, so that the rotating sleeve can be threadedly connected to the main sleeve. The rotating sleeve and the main sleeve respectively have central holes for gap matching with the antenna, so that the rotating sleeve and the main sleeve can be slidably sleeved on the antenna from bottom to top. The clamp has a loose state and a clamping state. When the clamp is in the loose state, it is used to form a gap match with the antenna, so that the clamp can be slidably sleeved on the antenna. When the clamp is in the clamping state, it is used to lock and fix with the antenna. A fixing structure is provided between the clamp and the main sleeve, and the fixing structure is used to fix the clamp to the main sleeve when the clamp is in the clamping state.

[0026] Beneficial effect: When installing the antenna tensioning device, the fixing sleeve and the rotating sleeve can be slidably sleeved on the antenna, which is conducive to the rapid movement of the antenna tensioning device on the antenna. After the antenna tensioning device is slidably sleeved to a suitable position, the clamp is made to clamp the antenna, so that the antenna tensioning device and the antenna are fixed. At the same time, the tensioning spring can be initially compressed, and then the antenna is pre-tensioned to form a primary tensioning. Then, the tensioning spring is further compressed by screwing the rotating sleeve and the fixing sleeve for relative movement, and the antenna is tensioned for a secondary time, so that the final tensioning of the antenna is appropriate, thereby improving the installation efficiency. When it is necessary to disassemble the antenna tensioning device, the compression amount of the tensioning spring can be reduced by first screwing the rotating sleeve and the fixing sleeve for relative movement. After the antenna is tightened to a certain extent, the clamp is loosened and the antenna tensioning device can be slid and removed. The disassembly operation is convenient. Of course, when the tensioning force allows, the clamp is directly loosened to remove the antenna tensioning device to achieve quick disassembly. Moreover, the fixing sleeve is threadedly connected to the rotating sleeve, and there is no need to set threads on the antenna, which is beneficial to prevent the antenna from being damaged by excessive torque. At the same time, based on the settings of the rotating sleeve and the fixing sleeve, opposite torques can be applied respectively, and a larger force can be applied to the rotating sleeve, so that the tensioning spring obtains a larger compression amount. During long-term use, the top pressure on the conversion module is continuously maintained, thereby maintaining the tension on the antenna, which is beneficial to reducing the number of times the rotating sleeve is screwed and improving the reliability of use.

[0027] Furthermore, the rotating sleeve includes a connecting sleeve and a pressing sleeve. The center hole of the connecting sleeve and the center hole of the pressing sleeve together constitute the center hole of the rotating sleeve. The connecting sleeve is provided with a first threaded section and a second threaded section arranged in the up and down directions. The first threaded section is threadedly connected to the pressing sleeve. The pressing sleeve is used to press the tensioning spring. The second threaded section is threadedly connected to the main sleeve.

[0028] Beneficial effects: The relative rotation of the connecting sleeve, the top pressure sleeve and the fixed sleeve can change the total height of the three to compress and release the tensioning spring. At the same time, by providing a connecting sleeve with two-section threads, after the thread structure between the fixed sleeve and the connecting sleeve is damaged, the antenna can be tensioned and relaxed through the thread structure between the connecting sleeve and the top pressure sleeve, thereby avoiding the equipment from being unable to be disassembled and repaired in time.

[0029] Furthermore, the thread directions of the first thread segment and the second thread segment are opposite.

[0030] Beneficial effect: the two sections of thread rotate in opposite directions, the connecting sleeve can move relative to the fixed sleeve, and the top pressure sleeve can move relative to the connecting sleeve. In actual use, the corresponding tools can be used to apply torque to the connecting sleeve so that it can move relative to the top pressure sleeve and the fixed sleeve at the same time. A larger adjustment amount can be obtained by one screwing, thereby improving the installation and locking efficiency.

[0031] Furthermore, the connecting sleeve includes an upper section, a middle section, and a lower section. The upper section and the lower section are both screw sections, the middle section is a bare rod section, the upper section constitutes the first threaded section, the thread on the lower section constitutes the connecting external thread, and the lower section constitutes the second threaded section.

[0032] Beneficial effects: the connecting sleeve is formed by a bare rod section and two screw rod sections, and is threadedly connected with the top pressure sleeve and the fixed sleeve by using an external thread, which is convenient for processing.

[0033] Furthermore, the outer diameter of the polished rod section is greater than the outer diameter of the screw rod section.

[0034] Beneficial effect: A step is formed between the polished rod section and the screw rod section, which can limit the relative movement between the connecting sleeve and the main sleeve, and between the connecting sleeve and the top pressure sleeve to avoid damage. At the same time, it is also convenient to use tools to apply force to the polished rod section to screw it.

[0035] Furthermore, tool insertion holes are provided on the main body sleeve, the bare rod section of the connecting sleeve, and the top pressure sleeve.

[0036] Beneficial effects: It is convenient to insert the wrench tool, and torque can be selectively applied to each part, which is convenient for operation.

[0037] Furthermore, the main sleeve includes a main body portion and a screw portion, the screw portion is located on the upper side of the main body portion, the threads on the screw portion constitute the connecting external threads, and the rotating sleeve is provided with the connecting internal threads; the outer diameter of the main body portion is greater than the outer diameter of the screw portion.

[0038] Beneficial effect: the inner hole of the main sleeve is a light hole, which is convenient for the installation of the antenna; at the same time, a step can be formed at the joint between the main body and the screw part, thereby limiting the downward movement of the rotating sleeve and preventing the thread from being damaged when the rotating sleeve is subjected to excessive force.

[0039] Furthermore, the fixing structure is a connecting screw, a screw hole extending in the up-down direction is provided on the lower end surface of the main body sleeve, a screw through hole is correspondingly provided on the clamp, and the main body sleeve and the clamp are fixedly connected by the connecting screw.

[0040] Beneficial effect: The screw holes extending in the up-down direction are used for connection with the screws, which is helpful to ensure that the fixing sleeve and the antenna are coaxially arranged so that the antenna is evenly stressed.

[0041] Furthermore, a limiting groove is provided on the antenna, and the limiting groove is for a clamp of the antenna tensioning device to be clamped into.

[0042] Beneficial effect: A limiting groove is provided on the antenna, so that after the clamp is inserted, the clamp is limited, ensuring that the clamp and the antenna are reliably fixed. BRIEF DESCRIPTION OF THE DRAWINGS

[0043] Figure 1 This is a schematic diagram of the antenna installation structure of the MPCVD device in Example 1 of the present invention;

[0044] Figure 2 for Figure 1 A front view of

[0045] Figure 3 for Figure 1 A schematic diagram of the structure of the antenna tensioning device;

[0046] Figure 4 This is a schematic diagram of the antenna installation structure of the MPCVD equipment in Example 2 of the present invention.

[0047] In the figure: 1, substrate stage; 2, quartz ring; 3, cavity bottom plate; 4, conversion module; 5, tensioning spring; 62, top pressure sleeve; 621, upper jack; 63, connecting sleeve; 631, middle jack; 71, main sleeve; 711, lower jack; 72, clamp; 8, antenna; 6, first set; 61, tool jack; 7, second set. DETAILED DESCRIPTION

[0048] In order to make the purpose, technical scheme and advantages of the present invention clearer, the present invention is further described in detail below in conjunction with the accompanying drawings and embodiments. It should be understood that the specific embodiments described herein are only used to explain the present invention and are not used to limit the present invention, that is, the described embodiments are only part of the embodiments of the present invention, rather than all the embodiments. The components of the embodiments of the present invention described and shown in the drawings herein can be arranged and designed in various different configurations.

[0049] Therefore, the following detailed description of the embodiments of the present invention provided in the accompanying drawings is not intended to limit the scope of the invention claimed for protection, but merely represents selected embodiments of the present invention. Based on the embodiments of the present invention, all other embodiments obtained by those skilled in the art without making creative work are within the scope of protection of the present invention.

[0050] It should be noted that the terms that may appear in the specific embodiments of the present invention, such as relational terms such as "first" and "second", are only used to distinguish one entity or operation from another entity or operation, and do not necessarily require or imply any such actual relationship or order between these entities or operations. Moreover, the terms that may appear, such as "include", "comprise" or any other variants thereof, are intended to cover non-exclusive inclusion, so that a process, method, article or device including a series of elements includes not only those elements, but also other elements that are not explicitly listed, or also includes elements inherent to such process, method, article or device. In the absence of further restrictions, the elements defined by the possible statements "including one...", etc., do not exclude the existence of other identical elements in the process, method, article or device including the elements.

[0051] In the description of the present invention, unless otherwise clearly specified and limited, the terms "installed", "connected" and "connected" that may appear should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be a direct connection, or it can be indirectly connected through an intermediate medium, or it can be the internal communication of two components. For those skilled in the art, the specific meanings of the above terms in the present invention can be understood by specific circumstances.

[0052] In the description of the present invention, unless otherwise clearly specified and limited, the term "provided with" that may appear should be understood in a broad sense. For example, the object "provided with" may be a part of the body, or may be arranged separately from the body and connected to the body, and the connection may be a detachable connection or an inseparable connection. For those skilled in the art, the specific meanings of the above terms in the present invention can be understood according to specific circumstances.

[0053] The present invention is described in further detail below in conjunction with embodiments.

[0054] Embodiment 1 of the MPCVD device of the present invention:

[0055] like Figure 1 , Figure 2 , Figure 3 As shown, the MPCVD equipment includes a reaction chamber, an upper module, a conversion module 4, an antenna 8, and an antenna tensioning device. The reaction chamber includes a chamber bottom plate 3, the upper module includes a substrate stage 1 and a quartz ring 2, the upper end of the antenna 8 is fixed to the upper module, and the antenna 8 passes downward through the conversion module 4 and the antenna tensioning device. The antenna tensioning device is used to apply a tensioning force to the antenna 8 to pull down the antenna 8 so that the upper module at the upper end of the antenna 8 is pressed against the chamber bottom plate 3 to achieve sealing and maintain the vacuum degree in the reaction chamber.

[0056] The conversion module 4 is fixed to the cavity bottom plate 3, and the antenna tensioning device is located on the lower side of the conversion module. The conversion module 4 has a waveguide cavity inside. The conversion module 4 is provided with an opening on one side in the horizontal direction. The opening is used to connect with the corresponding waveguide tube to form a channel for microwave transmission. The antenna 8 passes through the waveguide cavity of the conversion module 4 in the up and down directions to guide the microwaves input from the side into the growth cavity of the MPCVD equipment.

[0057] The antenna tensioning device is located below the conversion module 4 and includes a fixed sleeve, a rotating sleeve, and a tensioning spring 5. The fixed sleeve, the rotating sleeve, and the tensioning spring 5 are all sleeved on the antenna 8. The fixed sleeve is fixed to the antenna 8, and the rotating sleeve can rotate relative to the antenna 8.

[0058] The fixing sleeve includes a main sleeve 71 and a clamping hoop 72. The central hole of the main sleeve 71 is in clearance with the antenna 8. A clamping screw is provided on the clamping hoop 72. The clamping screw is connected with a nut. The clamping hoop 72 is clamped and fixed on the antenna 8 by tightening the clamping screw. The clamping hoop 72 has a loose state and a clamping state. When the clamping hoop 72 is in the loose state, it can form a clearance with the antenna 8. When the clamping hoop 72 is in the clamping state, it is locked and fixed with the antenna 8. A limiting groove is provided on the antenna 8. The limiting groove is an annular groove. The limiting groove is inserted into the limiting groove. After the clamping hoop 72 is inserted into the limiting groove, the upper and lower limits are formed on the clamping hoop 72, so that the clamping hoop 72 is reliably fixed to the antenna 8, and the position of the fixing sleeve on the antenna 8 is ensured to be fixed. The main body sleeve 71 is fixedly connected to the clamp 72, and the lower end surface of the main body sleeve 71 abuts against the upper end surface of the clamp 72. The lower end surface of the main body sleeve 71 is provided with a screw hole extending in the up-down direction, and the clamp 72 is correspondingly provided with a screw through hole passing through the up-down direction. The main body sleeve 71 and the clamp 72 are fixedly connected by connecting screws, and the connecting screws constitute a fixed structure.

[0059] The rotating sleeve includes a connecting sleeve 63 and a pressing sleeve 62. The aperture of the center hole of the connecting sleeve 63 and the aperture of the center hole of the pressing sleeve 62 are both larger than the outer diameter of the antenna 8. The center hole of the connecting sleeve 63 and the center hole of the pressing sleeve 62 are both in clearance fit with the antenna 8. The center hole of the connecting sleeve 63 is a light hole. The connecting sleeve 63 includes an upper section, a middle section, and a lower section. The upper section and the lower section are both screw sections. The middle section is a light rod section. The upper section constitutes a first threaded section. The thread on the lower section constitutes a connecting external thread. The lower section constitutes a second threaded section. The first threaded section and the second threaded section are arranged in the up-down direction. An internal thread is provided on the inner circumference of the pressing sleeve 62. The pressing sleeve 62 is threadedly connected to the first threaded section of the connecting sleeve 63. A connecting internal thread is provided on the inner circumference of the fixed sleeve. The main sleeve 71 is threadedly connected to the second threaded section of the connecting sleeve 63. The lower end of the tensioning spring 5 presses on the pressing sleeve 62, and the upper end presses on the conversion module 4. The connecting sleeve 63 can move relative to the main sleeve 71, and the top pressure sleeve 62 can move relative to the connecting sleeve 63. The relative rotation of the connecting sleeve 63, the top pressure sleeve 62 and the main sleeve 71 can change the total height of the three to compress and release the tensioning spring 5. At the same time, by providing a connecting sleeve 63 with two sections of threads, after the threaded structure between the main sleeve 71 and the connecting sleeve 63 is damaged, the antenna 8 can also be tensioned and relaxed through the threaded structure between the connecting sleeve 63 and the top pressure sleeve 62, thereby avoiding the inability to disassemble and repair the equipment in time due to damage to a single set of threads.

[0060] The first thread section of the connecting sleeve 63 has an opposite thread direction to the second thread section, so that in actual use, the corresponding tools can be used to apply torque to the connecting sleeve 63, the main sleeve 71, and the top pressure sleeve 62 respectively, so that the connecting sleeve 63 can move relative to the top pressure sleeve 62 and the main sleeve 71 at the same time, and a larger adjustment amount can be obtained by one screwing, thereby improving the tensioning efficiency of the antenna 8. The matching threads between the connecting sleeve 63 and the top pressure sleeve 62 and between the connecting sleeve 63 and the main sleeve 71 are both coarse threads, which increase the thread strength and reduce the risk of damage.

[0061] A plurality of upper plug holes 621 are provided on the top pressure sleeve 62 along the circumferential direction, the outer diameter of the smooth rod section of the connecting sleeve 63 is larger than the outer diameter of the screw section, a plurality of middle plug holes 631 are provided on the smooth rod section of the connecting sleeve 63 along the circumferential direction, and a plurality of lower plug holes 711 are provided on the main body sleeve 71 along the circumferential direction. The upper plug holes 621, the middle plug holes 631 and the lower plug holes 711 are all tool insertion holes for inserting screwing tools. Tool insertion holes are provided on the connecting sleeve 63, the top pressure sleeve 62 and the main body sleeve 71, so that torque can be selectively applied to each part, which is convenient for operation.

[0062] The upper end of the antenna 8 is threadedly connected and fixed to the substrate stage 1 , and sealing gaskets are provided between the lower side surface of the substrate stage 1 and the upper end surface of the quartz ring 2 , and between the lower end surface of the quartz ring 2 and the upper side surface of the cavity bottom plate 3 .

[0063] During installation, the quartz ring 2 is placed on the cavity bottom plate 3, the antenna 8 is fixed to the substrate stage 1, so that the antenna 8 passes through the cavity bottom plate 3 and the conversion module 4 from top to bottom, and the substrate stage 1 is against the quartz ring 2. Then, the antenna tensioning device is installed on the antenna 8, so that the tensioning spring 5, the top pressure sleeve 62, the connecting sleeve 63, the main body sleeve 71, and the clamp 72 in the loose state are slid from bottom to top onto the antenna. When sliding to the set position, that is, when the clamp 72 corresponds to the limiting groove on the antenna 8, the fixing sleeve is fixed to the antenna 8 through the clamp 72.

[0064] When tensioning the antenna 8, the connecting sleeve 63, the top pressure sleeve 62 and the main sleeve 71 are respectively inserted through the matching tools, so that the top pressure sleeve 62 and the main sleeve 71 do not rotate, and the connecting sleeve 63 rotates, the top pressure sleeve 62 presses the tensioning spring 5 upward, and the fixed sleeve pulls the antenna 8 downward, so that the substrate table 1 presses the quartz ring 2, and the quartz ring 2 is pressed against the upper side of the cavity bottom plate 3. After the antenna 8 is tensioned to a certain extent, the final tensioning can be achieved by rotating the connecting sleeve 63 relative to the top pressure sleeve 62 alone or by rotating the top pressure sleeve 62 relative to the connecting sleeve 63 alone to ensure that the tensioning force is appropriate.

[0065] By first sliding the fixing sleeve and the rotating sleeve onto the antenna, and then fixing the fixing sleeve and the antenna through a clamp, it is convenient for the antenna tensioning device to move quickly on the antenna. After the antenna tensioning device is slidably mounted to a suitable position, the clamp is used to clamp the antenna, so that the antenna tensioning device is fixed to the antenna. While fixing, the tensioning spring is initially compressed, and the antenna is pre-tensioned to form a primary tension. Then, the tensioning spring is further compressed by screwing the rotating sleeve and the fixing sleeve for relative movement, and the antenna is tensioned for a secondary time, so that the final tensioning of the antenna is appropriate, thereby improving the installation efficiency. When the antenna tensioning device needs to be disassembled, the compression of the tensioning spring can be reduced by screwing the rotating sleeve and the fixing sleeve for relative movement, thereby reducing the force on the clamp, and then the clamp is When the clamp is loosened, the antenna tensioning device can be slid and removed, and the disassembly operation is convenient. Of course, when the tensioning force allows, the clamp can be directly loosened to remove the antenna tensioning device to achieve quick disassembly; moreover, by arranging a threaded connection structure on the fixed sleeve and the rotating sleeve, when the rotating sleeve is screwed, the antenna can be tightened by the relative movement of the rotating sleeve and the fixed sleeve, which is beneficial to prevent the antenna from being damaged by excessive torque; moreover, based on the settings of the rotating sleeve and the fixed sleeve, opposite torques can be applied respectively, and a larger force can be applied to the rotating sleeve, so that the tensioning spring obtains a larger compression amount. During long-term use, the top pressure on the conversion module is continuously maintained, thereby maintaining the tension on the antenna, which is beneficial to reducing the number of times the rotating sleeve is screwed and improving the reliability of use.

[0066] Embodiment 2 of the MPCVD device of the present invention:

[0067] The difference between this embodiment and embodiment 1 is that in embodiment 1, the rotating sleeve includes a connecting sleeve and a pressing sleeve, the connecting sleeve is provided with a first thread segment and a second thread segment arranged in the up-down direction, the first thread segment is threadedly connected to the pressing sleeve, the pressing sleeve is used to press the tensioning spring, the connecting external thread is provided on the second thread segment, the fixing sleeve is provided with a connecting internal thread, and the second thread segment is threadedly connected to the fixing sleeve. In this embodiment, Figure 4 As shown, the antenna tensioning device of the MPCVD equipment includes a tensioning spring 5, a first sleeve 6, and a second sleeve 7. The first sleeve 6 constitutes a rotating sleeve, and the second sleeve 7 constitutes a fixed sleeve. The second sleeve 7 includes a main body and a screw rod portion. The screw rod portion is located on the upper side of the main body portion. The outer diameter of the main body portion is larger than the outer diameter of the screw rod portion. The main body portion is fixed to the antenna. The thread on the screw rod portion constitutes a connecting external thread. The first sleeve 6 is provided with a connecting internal thread. The first sleeve 6 is threadedly connected to the screw rod portion of the second sleeve 7. The first sleeve 6 is provided with a tool socket 61. The tool socket 61 is a tool insertion hole for inserting a matching tool. The first sleeve 6 is screwed to move upward relative to the second sleeve 7, thereby pressing the tensioning spring 5 upward, and the second sleeve 7 pulls the antenna 8 downward to tension the antenna.

[0068] Embodiment 3 of the MPCVD device of the present invention:

[0069] The difference between this embodiment and embodiment 1 is that in embodiment 1, the rotating sleeve includes a connecting sleeve and a pressing sleeve, and the connecting sleeve is provided with two screw segments, one screw segment is threadedly connected to the pressing sleeve, and the other screw segment is threadedly connected to the fixed sleeve. In this embodiment, only one screw segment is provided on the rotating sleeve, and the threads on the screw segment constitute connecting external threads, and the fixed sleeve is provided with connecting internal threads, and the fixed sleeve is threadedly connected to the screw segments of the rotating sleeve.

[0070] Embodiment 4 of the MPCVD device of the present invention:

[0071] The difference between this embodiment and embodiment 1 is that in embodiment 1, the main body sleeve and the clamp are fixedly connected by connecting screws. In this embodiment, the lower end of the main body sleeve is provided with an outward edge, the outward edge is provided with a pin hole, and the clamp is correspondingly provided with a through hole, and the main body sleeve and the clamp are fixedly connected by a limit pin.

[0072] Embodiment of the antenna tensioning device of the MPCVD device in the present invention:

[0073] The antenna tensioning device of the MPCVD equipment in this embodiment has the same structure as the antenna tensioning device described in any of the embodiments 1 to 4 of the above-mentioned MPCVD equipment, and will not be repeated here.

[0074] Finally, it should be noted that the above is only a preferred embodiment of the present invention and is not intended to limit the present invention. Although the present invention is described in detail with reference to the aforementioned embodiments, those skilled in the art can still modify the technical solutions recorded in the aforementioned embodiments without creative work, or replace some of the technical features therein with equivalents. Any modification, equivalent replacement, improvement, etc. made within the spirit and principles of the present invention shall be included in the protection scope of the present invention.

Claims

1. An antenna tensioning device for MPCVD equipment, characterized in that: The invention comprises a fixed sleeve, a rotating sleeve, and a tensioning spring (5). The tensioning spring (5), the rotating sleeve, and the fixed sleeve are used to be sleeved on an antenna (8). One end of the tensioning spring (5) is pressed against the rotating sleeve, and the other end is used to be pressed against a conversion module (4) of an MPCVD device. The fixed sleeve comprises a main sleeve (71) and a clamp (72). One of the main sleeve (71) and the rotating sleeve is provided with a connecting internal thread, and the other is provided with a connecting external thread, so that the rotating sleeve can be threadedly connected to the main sleeve (71). The rotating sleeve and the main sleeve (71) respectively have a clearance fit with the antenna (8). The central hole of the main body (71) is provided so that the rotating sleeve and the main body (71) can be slidably mounted on the antenna (8) from bottom to top. The hoop (72) has a loose state and a clamping state. When the hoop (72) is in the loose state, it is used to form a clearance fit with the antenna (8) so that the hoop (72) can be slidably mounted on the antenna (8). When the hoop (72) is in the clamping state, it is used to be locked and fixed with the antenna (8). A fixing structure is provided between the hoop (72) and the main body (71). The fixing structure is used to fix the hoop (72) and the main body (71) when the hoop (72) is in the clamping state.

2. The antenna tensioning device of the MPCVD equipment according to claim 1, characterized in that: The rotating sleeve comprises a connecting sleeve (63) and a pressing sleeve (62); the central hole of the connecting sleeve (63) and the central hole of the pressing sleeve (62) together constitute the central hole of the rotating sleeve; the connecting sleeve (63) is provided with a first thread segment and a second thread segment arranged in the up-down direction; the first thread segment is threadedly connected to the pressing sleeve (62); the pressing sleeve (62) is used to press the tensioning spring (5); and the second thread segment is threadedly connected to the main sleeve (71).

3. The antenna tensioning device of the MPCVD equipment according to claim 2, characterized in that: The first thread segment and the second thread segment have opposite thread directions.

4. The antenna tensioning device of the MPCVD equipment according to claim 3, characterized in that: The connecting sleeve (63) comprises an upper section, a middle section and a lower section, the upper section and the lower section are both screw sections, the middle section is a bare rod section, the upper section constitutes the first threaded section, the threads on the lower section constitute the connecting external threads, and the lower section constitutes the second threaded section.

5. The antenna tensioning device of the MPCVD equipment according to claim 4, characterized in that: The outer diameter of the polished rod section is greater than the outer diameter of the screw section.

6. The antenna tensioning device of the MPCVD equipment according to claim 5, characterized in that: Tool insertion holes are provided on the main body sleeve (71), the bare rod section of the connecting sleeve (63) and the top pressing sleeve (62).

7. The antenna tensioning device of the MPCVD equipment according to claim 1, characterized in that: The main sleeve (71) comprises a main body portion and a screw portion, wherein the screw portion is located on the upper side of the main body portion, the threads on the screw portion constitute the connecting external threads, and the rotating sleeve is provided with the connecting internal threads; the outer diameter of the main body portion is greater than the outer diameter of the screw portion.

8. The antenna tensioning device of the MPCVD equipment according to any one of claims 1 to 7, characterized in that: The fixing structure is a connecting screw. The lower end surface of the main body sleeve (71) is provided with a screw hole extending in the up-down direction. The clamp (72) is correspondingly provided with a screw through hole. The main body sleeve (71) and the clamp (72) are fixedly connected by the connecting screw.

9. An MPCVD device, comprising a reaction chamber, an antenna (8), an upper module, a conversion module (4), and an antenna tensioning device, wherein the reaction chamber comprises a chamber bottom plate (3), the upper end of the antenna (8) is fixed to the upper module, the upper module is sealed with the upper side of the chamber bottom plate (3), the conversion module (4) is fixed to the lower side of the chamber bottom plate (3), the antenna tensioning device is located below the conversion module (4), the antenna (8) passes downward through the chamber bottom plate (3), the conversion module (4), and the antenna tensioning device, and is characterized in that: The antenna tensioning device is the antenna tensioning device of the MPCVD equipment according to any one of claims 1 to 8.

10. The MPCVD device according to claim 9, characterized in that: The antenna (8) is provided with a limiting groove, and the limiting groove is used for a clamp (72) of the antenna tensioning device to be clamped into.

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