A device and manufacturing process for improving the corrosion resistance of alloy by laser shock assisted magnetron sputtering

Abstract

The present invention provides a device and a manufacturing process for improving the corrosion resistance of alloys by laser shock and magnetron sputtering, including a laser shock system, a magnetron sputtering coating system, a PDMS immersion modification system and a working chamber; the working chamber is divided into a first cavity, a second cavity and a third cavity by a retractable cavity partition, and a three-axis processing platform that can move in the first cavity, the second cavity and the third cavity is provided in the working chamber; a substrate is placed on the three-axis processing platform; the laser shock system is used for laser shocking the substrate in the first cavity; the magnetron sputtering coating system is located in the second cavity, and is used to form a deposited film on the surface of the substrate after laser shock; the PDMS immersion modification system is located in the third cavity, and is used to form a super-hydrophobic layer on the surface of the substrate by modifying the substrate with a deposited film on the surface with a PDMS solution. The present invention can realize the uninterrupted processing of substrate laser shock strengthening and magnetron sputtering to prepare a super-hydrophobic coating in sequence.

Description

Technical Field

[0001] The invention relates to the technical field of metal material surface modification, and in particular to a device and a manufacturing process for improving the corrosion resistance of alloys by using laser shock coordinated magnetron sputtering. Background Art

[0002] Alloy refers to a solid product with metallic properties obtained by mixing and melting one metal with another or several metals or non-metals, cooling and solidifying. For this reason, alloy materials are widely used in many fields such as automobile manufacturing, aerospace, and marine engineering due to their high specific strength and good plasticity. Although alloy materials have good corrosion resistance in a variety of environments, the Cl- contained in harsh environments such as seawater and marine atmosphere will cause the alloy itself to become thinner, reduce strength, and sometimes cause local perforation or fracture, and even structural damage, restricting its further application and development. Inspired by the surface of lotus leaves, researchers have prepared a series of superhydrophobic metal surfaces by constructing micro-nano composite structures and modifying low surface energy substances.

[0003] At present, domestic and foreign research mainly obtains super-hydrophobic characteristics by changing chemical corrosion method, electrochemical corrosion method, and anodic oxidation method, and improves the corrosion resistance of alloys in seawater. However, the corrosion protection provided by the super-hydrophobic coating on the alloy in many practical cases shows instability. During the long-term contact between the super-hydrophobic surface and the aggressive ions, the super-hydrophobic surface fails, causing corrosion and cracking in the matrix. Meanwhile, the above-mentioned method for preparing super-hydrophobic surface can only construct disordered microstructure surface, and it is impossible to control shape and property, and it is difficult to be applied to large-area industrial alloy surfaces. Summary of the invention

[0004] In view of the shortcomings of the prior art, the present invention provides a device and a manufacturing process for improving the corrosion resistance of alloys by laser shock synergistic magnetron sputtering. The laser shock system is used to impact strengthen the alloy, and high-density dislocations, dislocation residues, and subgrain boundaries are generated on the alloy surface to form a corrosion-resistant strain-strengthened sublayer. Then, magnetron sputtering is used to form a multi-peak roughness texture on the sample surface, and finally, after modification with a PDMS solution, a corrosion-resistant super-hydrophobic layer is formed.

[0005] The present invention achieves the above technical objectives through the following technical means.

[0006] A device for improving alloy corrosion resistance by laser shock and magnetron sputtering, comprising a laser shock system, a magnetron sputtering coating system, a PDMS immersion modification system and a working chamber;

[0007] The working chamber is divided into a first cavity, a second cavity and a third cavity by a retractable cavity partition, and a three-axis processing platform that can move in the first cavity, the second cavity and the third cavity is provided in the working chamber; a substrate is placed on the three-axis processing platform;

[0008] The laser shock system is used for laser shocking the substrate in the first cavity;

[0009] The magnetron sputtering coating system is located in the second chamber and is used to form a deposited film on the surface of the substrate after laser shock;

[0010] The PDMS immersion modification system is located in the third cavity, and is used to form a super-hydrophobic layer on the surface of the substrate by modifying the substrate with a deposited film formed on the surface with a PDMS solution.

[0011] Further, the laser impact system includes a laser emission system, a high-pressure gas system, a laser head and a paint spraying system;

[0012] The laser emission system is used to generate a laser beam; the high-pressure gas system is used to generate high-pressure gas; the laser head is installed on the top of the first cavity, and three channels with the same cross-section are arranged inside the laser head. The laser beam is emitted into the surface of the substrate through the central channel; air inlet channels are arranged on both sides of the central channel, and the air inlet channels are connected to the high-pressure gas system. The high-pressure gas is sprayed onto the surface of the substrate through the laser head to generate a high-pressure gas layer, and the high-pressure gas layer serves as a constraint layer for the substrate; the paint spraying system is located in the first cavity and is used to form an absorption layer on the surface of the substrate.

[0013] Furthermore, a pressure sensor probe is installed in the first cavity for detecting the pressure in the first cavity; a high-pressure resistant lens is installed on the top of the first cavity, and the laser beam passes through the high-pressure resistant lens and enters the laser head.

[0014] Furthermore, the PDMS immersion modification system includes a pump, an agitator, a PDMS container and an immersion modification container; the PDMS container is provided with an agitator for mixing and stirring the raw materials to generate a PDMS solution; a pump and an electromagnetic valve are provided between the PDMS container and the immersion modification container; and a substrate is placed in the immersion modification container.

[0015] Furthermore, the PDMS immersion modification system also includes a wastewater storage tank and a first CCD industrial camera; the wastewater storage tank is connected to the immersion modification container for recovering used PDMS solution; a first CCD industrial camera is installed on the top of the third cavity for monitoring the operation of the immersion modification system and the surface modification of the substrate.

[0016] Furthermore, the magnetron sputtering coating system includes a cooling water circulation system, an argon gas bottle, a high-voltage power supply and an annular magnet; the argon gas bottle is connected to the second cavity and is used to fill the second cavity with argon gas; the high-voltage power supply includes a positive plate and a negative plate, and the positive plate is located at the substrate; a target material is installed on the negative plate, and an electric field is generated between the positive plate and the negative plate, and the target material is bombarded by the electric field of argon positive ions to generate target atoms that are deposited on the surface of the substrate to form a deposited film; the cooling water circulation system is connected to the second cavity and is used to control the temperature in the second cavity; an annular magnet is installed on the target material, and the magnetic field generated by the annular magnet is used to constrain charged ions to gather above the substrate.

[0017] Furthermore, the magnetron sputtering coating system also includes a temperature sensor, a vacuum machine and a second CCD industrial camera; the temperature sensor is used to detect the temperature of the second cavity; the vacuum machine is used to generate low pressure in the second cavity; the second CCD industrial camera is installed in the second cavity and is used to monitor the deposition morphology on the substrate surface in real time.

[0018] A manufacturing process of a device for improving the corrosion resistance of alloy by laser shock assisted magnetron sputtering, comprising the following steps:

[0019] After the substrate surface is pretreated, it is placed on a three-axis processing platform, and a paint spraying system is used to form an absorption layer on the substrate surface;

[0020] The high-pressure gas system generates high-pressure gas which is sprayed onto the surface of the substrate through the laser head to generate a high-pressure gas layer, and the high-pressure gas layer serves as a constraint layer of the substrate; the laser beam generated by the laser emission system impacts the surface of the substrate;

[0021] The substrate after laser impact is moved to the second cavity, and the internal pressure of the second cavity, the flow rate of argon gas and the circulation flow rate of cooling water are set; an electric field is generated inside the second cavity through the positive plate and the negative plate, and argon gas is input from the argon gas bottle. Under the control of the annular magnet, the argon gas is ionized into positive ions, and the positive ions are accelerated into high-energy particles under the action of the electric field. The high-energy particles bombard the target material, so that the atoms of the target material are sputtered to the surface of the substrate to form a deposited film;

[0022] The substrate with the deposited film is moved to the third cavity; the substrate with the deposited film is placed in an immersion modification container; the PDMS container mixes and stirs the raw materials through a stirrer to generate a PDMS solution; the pump transports the PDMS solution to the immersion modification container, and the substrate with the deposited film formed on the surface is modified with the PDMS solution to form a super hydrophobic layer on the surface of the substrate.

[0023] Furthermore, the maximum energy density of the laser beam is 17 GW / cm 2; The spot size of the laser beam is 3mm; The spot overlap rate of the laser beam is 50%; The pulse width of the laser beam is 20ns; The frequency of the laser beam is 10Hz; The laser energy of the laser beam is 8J.

[0024] Furthermore, the pressure in the second cavity is set to 6.0*10 -4 Pa, the argon gas flow rate is 30 L / min, the working voltage between the positive plate and the negative plate is 600 V, the deposition time is 120 min, and the cooling water circulation flow rate is 50 L / min.

[0025] The beneficial effects of the present invention are:

[0026] 1. The device and manufacturing process for improving the corrosion resistance of alloys by laser shock strengthening and magnetron sputtering of the present invention can realize the uninterrupted processing of substrate laser shock strengthening and magnetron sputtering to prepare super-hydrophobic coatings, without disassembly and transportation of materials, and is an efficient processing device that can be applied to large-area industrial alloy surfaces. The device has a simple structure, low cost, and is green and pollution-free.

[0027] 2. The device and manufacturing process for improving the corrosion resistance of alloys by laser shock assisted magnetron sputtering described in the present invention can prepare a super-hydrophobic surface with an ordered microstructure. The film obtained by magnetron sputtering is dense and uniform; the film has good firmness, the sputtered film has excellent adhesion to the substrate, and the mechanical strength is also improved.

[0028] 3. The device and manufacturing process of the present invention for improving the corrosion resistance of alloys by laser shock synergistically using magnetron sputtering, because laser shock induces grain refinement on the surface of the alloy, increases the specific surface area, and increases the nucleation density of the thin film, which is beneficial to the deposition of a crystalline film; at the same time, during magnetron sputtering, the alloy can obtain a crystalline film at a relatively low temperature, and the residual compressive stress on the laser shock surface will not be released, thereby fully protecting the strain-hardened sublayer and achieving a synergistic effect. BRIEF DESCRIPTION OF THE DRAWINGS

[0029] In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the drawings required for use in the embodiments or the description of the prior art will be briefly introduced below. The drawings described below are some embodiments of the present invention. For ordinary technicians in this field, it is obvious that other drawings can be obtained based on these drawings without paying any creative work.

[0030] Figure 1 This is a schematic structural diagram of the device for improving the corrosion resistance of alloys by combining laser shock assisted magnetron sputtering according to the present invention.

[0031] Figure 2 This is a schematic diagram of the magnetron sputtering coating system described in the present invention.

[0032] Figure 3 Schematic diagram of the laser shock spot of the present invention.

[0033] Figure 4 This is a process flow chart of the present invention for improving the corrosion resistance of alloys by combining laser shock assisted magnetron sputtering.

[0034] In the figure:

[0035] 1-air pressure pump; 2-pressure gauge; 3-accumulator; 4-fiber laser; 5-gas pipeline; 6-first cavity; 7-reflector; 8-high pressure lens; 9-pressure sensor probe; 10-control computer; 11-pressure sensor; 12-temperature sensor probe; 13-temperature sensor; 14-argon gas bottle; 16-cooling water circulation; 17-ring magnet; 18-cavity partition; 19-third cavity; 20-first CCD industrial camera; 21-wastewater storage tank; 22-three-axis machining platform controller; 23-black paint conduit; 24-laser head; 25-high pressure gas layer; 26-substrate; 27-guide rail; 28-three-axis machining platform; 29-second cavity; 30-high voltage power supply; 31-target material; 32-waste gas storage tank; 33-second CCD industrial camera; 34-immersion modification container; 35-pump; 36-agitator; 37-solenoid valve; 38-vacuum system. DETAILED DESCRIPTION

[0036] Embodiments of the present invention are described in detail below, examples of which are shown in the accompanying drawings, wherein the same or similar reference numerals throughout represent the same or similar elements or elements having the same or similar functions. The embodiments described below with reference to the accompanying drawings are exemplary and are intended to be used to explain the present invention, and should not be construed as limiting the present invention.

[0037] In the description of the present invention, it should be understood that the terms "center", "longitudinal", "lateral", "length", "width", "thickness", "upper", "lower", "axial", "radial", "vertical", "horizontal", "inner", "outer" and the like indicate positions or positional relationships based on the positions or positional relationships shown in the accompanying drawings, and are only for the convenience of describing the present invention and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as limiting the present invention. In addition, the terms "first" and "second" are only used for descriptive purposes, and cannot be understood as indicating or implying relative importance or implicitly indicating the number of technical features indicated. Thus, the features defined as "first" and "second" may explicitly or implicitly include one or more of the features. In the description of the present invention, the meaning of "multiple" is two or more, unless otherwise clearly and specifically defined.

[0038] In the present invention, unless otherwise clearly specified and limited, the terms "installed", "connected", "connected", "fixed" and the like should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be a direct connection, or it can be an indirect connection through an intermediate medium, or it can be the internal communication of two components. For ordinary technicians in this field, the specific meanings of the above terms in the present invention can be understood according to specific circumstances.

[0039] like Figure 1 As shown, the device for improving the corrosion resistance of alloy by laser shock synergistically using magnetron sputtering of the present invention comprises a laser shock system, a magnetron sputtering coating system, a PDMS immersion modification system and a working chamber;

[0040] The working chamber is divided into a first cavity 6, a second cavity 29 and a third cavity 19 by a retractable cavity partition 18. A three-axis processing platform 28 is provided in the working chamber and can move in the first cavity 6, the second cavity 29 and the third cavity 19; a substrate 26 is placed on the three-axis processing platform 28; guide rails 27 are respectively installed between the first cavity 6, the second cavity 29 and the third cavity 19, and the three-axis processing platform 28 can move along the guide rails 27. The laser impact system is used for laser impacting the substrate 26 in the first cavity 6; the magnetron sputtering coating system is located in the second cavity 29 and is used for forming a deposited film on the surface of the substrate 26 after laser impact; the PDMS immersion modification system is located in the third cavity 19 and is used for forming a super hydrophobic layer on the surface of the substrate 26 by modifying the substrate 26 with a deposited film formed on the surface with a PDMS solution.

[0041] The laser impact system includes a laser emission system, a high-pressure gas system, a laser head 24 and a paint spraying system; the laser emission system includes a fiber laser 4 and a reflector 7, and the fiber laser 4 is used to generate a laser beam; the laser beam is emitted into the laser head 24 on the second cavity 29 through the reflector 7; the high-pressure gas system includes an air pump 1 and an accumulator 3, and the high-pressure gas generated by the air pump 1 is input into the accumulator 3, and a pressure gauge 2 is installed on the accumulator 3. The accumulator 3 inputs the high-pressure gas into the laser head 24 through a gas pipeline. The laser head 24 is mounted on the top of the first cavity 6. Three channels with the same cross section are arranged inside the laser head 24. The laser beam is shot into the surface of the substrate 26 through the central channel. Air inlet channels are arranged on both sides of the central channel. The air inlet channels are connected to the high-pressure gas system. The air inlet channels on both sides intersect with the central channel to form three channels with the same cross section. The high-pressure gas is sprayed onto the surface of the substrate 26 through the laser head 24 to generate a high-pressure gas layer 25. The high-pressure gas layer 25 serves as a constraint layer for the substrate 26. The paint spraying system is located in the first cavity 6 and is used to form an absorption layer on the surface of the substrate 26. A pressure sensor probe 9 is installed in the first cavity 6 to detect the pressure in the first cavity 6. The pressure sensor 11 is used to convert the signal of the pressure sensor probe 9 and input it into the control computer 10. A high-pressure resistant lens 8 is installed on the top of the first cavity 6. The laser beam passes through the high-pressure resistant lens 8 and is shot into the laser head 24.

[0042] like Figure 1 and Figure 2As shown, the magnetron sputtering coating system includes a cooling water circulation system, an argon gas bottle 14, a high-voltage power supply 30 and an annular magnet 17; the argon gas bottle 14 is connected to the second cavity 29, and is used to fill the second cavity 29 with argon gas; the high-voltage power supply 30 includes a positive plate and a negative plate, and the positive plate is located at the substrate 26; a target material 31 is installed on the negative plate, and an electric field is generated between the positive plate and the negative plate, and the target material is bombarded by the electric field of argon positive ions to generate target atoms that are deposited on the surface of the substrate 26 to form a deposited film; the cooling water circulation system is connected to the second cavity 29, and is used to control the temperature in the second cavity 29; an annular magnet 17 is installed on the target material 31, and the magnetic field generated by the annular magnet 17 is used to constrain charged ions to gather above the substrate 26. The magnetron sputtering coating system also includes a temperature sensor probe 12, a vacuum system 38 and a second CCD industrial camera 33; the temperature sensor probe 12 is used to detect the temperature of the second cavity 29; the temperature sensor 13 is used to convert the temperature sensor probe 12 signal and input it into the control computer 10. The vacuum system 38 is used to generate low pressure in the second cavity 29; the second CCD industrial camera 33 is installed in the second cavity 29 and is used to monitor the deposition morphology on the substrate surface in real time. The magnetron sputtering coating system forms a crystalline film with a multi-peak roughness texture on the laser impact surface. Since the laser impact induces grain refinement on the alloy surface, the specific surface area increases, the film nucleation density is increased, and the deposition of the crystalline film is beneficial; at the same time, during magnetron sputtering, the alloy can obtain a crystalline film at a lower temperature, and the residual compressive stress on the surface will not be released, thereby fully protecting the strain hardening sublayer.

[0043] The PDMS immersion modification system includes a pump 35, a stirrer 36, a PDMS container and an immersion modification container 34; the PDMS container is provided with a stirrer 36 for mixing and stirring the raw materials to generate a PDMS solution; the stirrer 36 fully stirs the prepolymer PDMS, the curing agent and the nano-silicon dioxide powder mixed in a weight ratio of 10:1:1 to form a PDMS solution. A pump 35 and a solenoid valve 37 are provided between the PDMS container and the immersion modification container 34; a substrate 26 is placed in the immersion modification container 34. The PDMS immersion modification system also includes a wastewater storage tank 21 and a first CCD industrial camera 20; the wastewater storage tank 21 is connected to the immersion modification container 34 for recycling the used PDMS solution; the first CCD industrial camera 20 is installed on the top of the third cavity 19 for monitoring the operation of the immersion modification system and the surface modification of the substrate. The cooling water circulation 16 is used to keep the temperature in the second cavity 29 at room temperature, and the wastewater storage tank 21 uses the used cooling water to dilute the PDMS waste liquid generated by the immersion modification system, so as to facilitate better recycling and avoid water pollution.

[0044] Taking AA5083 aluminum alloy as an example, the manufacturing process of the device for improving the corrosion resistance of the alloy by laser shock assisted magnetron sputtering of the present invention is as follows: Figure 3 and Figure 4 As shown, the specific steps are as follows:

[0045] A. Grind and clean the substrate 26, place it on the three-axis processing platform 28 for installation and fixation, move the three-axis processing platform 28 to send the substrate to the painting system for painting, so that an absorption layer is formed on the surface of the substrate 26;

[0046] B. Set the laser shock process parameters and magnetron sputtering process parameters in the control computer. Laser energy: 8J, spot size: 3mm, spot overlap rate: 50%, frequency: 10Hz; the pressure in the magnetron sputtering chamber is set to 6.0×10 -4 Pa, high-purity argon gas flow rate is 30L / min, working voltage is 600V, deposition time is 120min, and cooling water circulation flow rate is 50L / min;

[0047] The high pressure gas generated by the pressure accumulator 3 is sprayed onto the surface of the substrate 26 through the gas pipeline 5 to generate a high pressure gas layer 25 to replace the fragile glass constraint layer and the flowing water constraint layer that easily oxidizes the substrate. The pressure inside the first cavity is detected by observing the pressure sensor.

[0048] D. Move the laser head to the designated starting point, set the parameters of the fiber laser 4, including laser power, spot size, change the overlap rate and spot position by moving the three-axis platform; the laser beam impacts the surface of the substrate 26;

[0049] The substrate 26 after E laser impact is moved to the second cavity 29 through the guide rail 27, and the internal pressure, argon gas flow rate, and cooling water flow rate of the second cavity 29 are set; a temperature sensor probe installed on the second cavity 29 observes the internal temperature.

[0050] F turns on the high voltage power supply 30, generates an electric field in the second cavity 29, and the argon gas cylinder 14 inputs argon gas, which is ionized into positive ions under the control of the annular magnet 17. The positive ions are accelerated to become high-energy particles under the action of the electric field, and the high-energy particles bombard the target material 31, so that the atoms of the target material 31 are sputtered to the surface of the substrate 26 to form a deposited film. The second CCD industrial camera 33 installed on the fixture monitors the deposition morphology on the substrate surface in real time.

[0051] G moves the substrate with a multi-peak roughness texture to the third cavity 19 through the guide rail. At the same time, the stirring system fully stirs the prepolymer PDMS (polydimethylsiloxane), curing agent and nano-silica powder mixed in a weight ratio of 10:1:1 to form a PDMS solution.

[0052] The H pump 35 absorbs the PDMS solution into the immersion modification container, so that the substrate is fully immersed and modified. The electromagnetic valve 37 is used to control the flow rate and speed of the PDMS solution. By modifying the substrate 26 with the deposited film formed on the surface with the PDMS solution, a super hydrophobic layer is formed on the surface of the substrate 26.

[0053] I After sample preparation is completed, turn off all equipment.

[0054] It should be understood that although this specification is described according to various embodiments, not every embodiment contains only one independent technical solution. This narrative method of the specification is only for the sake of clarity. Those skilled in the art should regard the specification as a whole. The technical solutions in each embodiment may also be appropriately combined to form other implementation methods that can be understood by those skilled in the art.

[0055] The series of detailed descriptions listed above are only specific descriptions of feasible embodiments of the present invention. They are not intended to limit the scope of protection of the present invention. All equivalent embodiments or changes that do not deviate from the technical spirit of the present invention should be included in the scope of protection of the present invention.

Claims

1. A device for improving the corrosion resistance of alloy by laser shock assisted magnetron sputtering, characterized in that: Including laser shock system, magnetron sputtering coating system, PDMS immersion modification system and working chamber; The working chamber is divided into a first chamber (6), a second chamber (29) and a third chamber (19) by a retractable chamber partition (18); a three-axis machining platform (28) is provided in the working chamber and can move in the first chamber (6), the second chamber (29) and the third chamber (19); a substrate (26) is placed on the three-axis machining platform (28); The laser shock system is used to perform laser shock on a substrate (26) in a first cavity (6); The magnetron sputtering coating system is located in the second cavity (29) and is used to form a deposited film on the surface of the substrate (26) after laser shock; The PDMS immersion modification system is located in the third cavity (19) and is used to form a super-hydrophobic layer on the surface of the substrate (26) by modifying the substrate (26) with a deposited film formed on the surface with a PDMS solution.

2. The device for improving alloy corrosion resistance by laser shock assisted magnetron sputtering according to claim 1 is characterized in that: The laser impact system comprises a laser emission system, a high-pressure gas system, a laser head (24) and a paint spraying system; The laser emission system is used to generate a laser beam; the high-pressure gas system is used to generate high-pressure gas; the laser head (24) is installed on the top of the first cavity (6), and three channels with a common cross section are arranged inside the laser head (24), and the laser beam is emitted into the surface of the substrate (26) through the central channel; air inlet channels are arranged on both sides of the central channel, and the air inlet channels are connected to the high-pressure gas system. The high-pressure gas is sprayed onto the surface of the substrate (26) through the laser head (24) to generate a high-pressure gas layer (25), and the high-pressure gas layer (25) serves as a constraint layer of the substrate (26); the paint spraying system is located in the first cavity (6) and is used to form an absorption layer on the surface of the substrate (26).

3. The device for improving alloy corrosion resistance by laser shock assisted magnetron sputtering according to claim 2 is characterized in that: A pressure sensor probe (9) is installed in the first cavity (6) for detecting the pressure in the first cavity (6); a high-pressure resistant lens (8) is installed on the top of the first cavity (6), and the laser beam passes through the high-pressure resistant lens (8) and is emitted into the laser head (24).

4. The device for improving alloy corrosion resistance by laser shock assisted magnetron sputtering according to claim 1 is characterized in that: The PDMS immersion modification system comprises a pump (35), an agitator (36), a PDMS container and an immersion modification container (34); the agitator (36) is arranged in the PDMS container for mixing and stirring raw materials to generate a PDMS solution; a pump (35) and an electromagnetic valve (37) are arranged between the PDMS container and the immersion modification container (34); and a substrate (26) is placed in the immersion modification container (34).

5. The device for improving alloy corrosion resistance by laser shock assisted magnetron sputtering according to claim 4 is characterized in that: The PDMS immersion modification system also includes a wastewater storage tank (21) and a first CCD industrial camera (20); the wastewater storage tank (21) is connected to the immersion modification container (34) for recovering the used PDMS solution; the first CCD industrial camera (20) is installed on the top of the third cavity (19) for monitoring the operation of the immersion modification system and the surface modification of the substrate.

6. The device for improving alloy corrosion resistance by laser shock assisted magnetron sputtering according to claim 1 is characterized in that: The magnetron sputtering coating system comprises a cooling water circulation system, an argon gas bottle (14), a high-voltage power supply (30) and an annular magnet (17); the argon gas bottle (14) is connected to the second cavity (29) and is used to fill the second cavity (29) with argon gas; the high-voltage power supply (30) comprises a positive plate and a negative plate, the positive plate is located at the substrate (26); a target material (31) is mounted on the negative plate, an electric field is generated between the positive plate and the negative plate, and the target material is bombarded by the electric field of argon positive ions to generate target atoms that are deposited on the surface of the substrate (26) to form a deposition film; the cooling water circulation system is connected to the second cavity (29) and is used to control the temperature in the second cavity (29); an annular magnet (17) is mounted on the target material (31), and the magnetic field generated by the annular magnet (17) is used to constrain charged ions to gather above the substrate (26).

7. The device for improving alloy corrosion resistance by laser shock assisted magnetron sputtering according to claim 6 is characterized in that: The magnetron sputtering coating system also includes a temperature sensor, a vacuum system (38) and a second CCD industrial camera (33); the temperature sensor is used to detect the temperature of the second cavity (29); the vacuum system (38) is used to generate a low pressure in the second cavity (29); the second CCD industrial camera (33) is installed in the second cavity (29) and is used to monitor the deposition morphology on the substrate surface in real time.

8. A process for manufacturing a device for improving alloy corrosion resistance by laser shock assisted magnetron sputtering according to any one of claims 1 to 7, characterized in that: The steps include: After pre-treatment of the surface of the substrate (26), the substrate (26) is placed on a three-axis processing platform (28), and a paint spraying system is used to form an absorption layer on the surface of the substrate (26); The high-pressure gas system generates high-pressure gas which is sprayed onto the surface of the substrate (26) through a laser head (24) to generate a high-pressure gas layer (25), wherein the high-pressure gas layer (25) serves as a constraint layer of the substrate (26); the laser beam generated by the laser emission system impacts the surface of the substrate (26); The substrate (26) after laser impact is moved to the second cavity (29), and the internal pressure of the second cavity (29), the flow rate of argon gas and the circulation flow rate of cooling water are set; an electric field is generated inside the second cavity (29) through the positive plate and the negative plate, and argon gas is input from the argon gas bottle (14). Under the control of the annular magnet (17), the argon gas is ionized into positive ions, and the positive ions are accelerated to become high-energy particles under the action of the electric field. The high-energy particles bombard the target material (31), so that atoms of the target material (31) are sputtered onto the surface of the substrate (26), forming a deposited film; The substrate (26) with the deposited film is moved to the third cavity (19); the substrate (26) with the deposited film is placed in an immersion modification container (34); the PDMS container mixes and stirs the raw materials through a stirrer (36) to generate a PDMS solution; a pump (35) transports the PDMS solution to the immersion modification container (34), and the substrate (26) with the deposited film formed on the surface is modified with the PDMS solution to form a super hydrophobic layer on the surface of the substrate (26).

9. The manufacturing process of the device for improving alloy corrosion resistance by laser shock assisted magnetron sputtering according to claim 8 is characterized in that: The maximum energy density of the laser beam is 17 GW / cm 2 ; The spot size of the laser beam is 3mm; The spot overlap rate of the laser beam is 50%; The pulse width of the laser beam is 20ns; The frequency of the laser beam is 10Hz; The laser energy of the laser beam is 8J.

10. The manufacturing process of the device for improving alloy corrosion resistance by laser shock assisted magnetron sputtering according to claim 8, characterized in that: The pressure in the second cavity (29) is set to 6.0×10 -4 Pa, the argon gas flow rate is 30 L / min, the working voltage between the positive plate and the negative plate is 600 V, the deposition time is 120 min, and the cooling water circulation flow rate is 50 L / min.

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