A test device for thermal effects of optical components under continuous action

Abstract

The present invention discloses a testing device for the thermal effect of an optical element under the action of a continuous laser, which relates to the field of laser technology and includes a continuous laser alignment system, a sample temperature testing system, a wavefront phase testing system, a beam quality testing system, and a computer. The continuous laser alignment system receives a high-power laser beam emitted by a continuous laser emitting device and outputs a test laser. The test laser generates reflected light and transmitted light through the sample temperature testing system, and the reflected light and the transmitted light enter the wavefront phase testing system or the beam quality testing system respectively. The present invention adopts a testing device for the thermal effect of an optical element under the action of a continuous laser of the above structure, which can realize a variety of performance tests such as temperature rise test of an optical element under the action of a continuous laser, wavefront shape and phase distortion test, and beam quality test.

Description

Technical Field

[0001] The invention relates to the field of laser technology, in particular to a testing device for thermal effects of optical elements under continuous action. Background Art

[0002] With the rapid development of laser technology, it has been widely used in military, communication, medical and other fields. Especially in recent years, the demand for higher power output lasers in various fields has been growing. However, with the increase of laser power, the temperature of optical components rises and thermal distortion occurs, which causes the output laser beam to diverge, focus or distort, and deteriorates the beam quality. In order to study a series of problems caused by thermal effects, it is urgent to establish a thermal effect test system for optical components under the action of continuous lasers, realize the functions of optical component temperature rise test, wavefront shape and phase distortion monitoring, and beam quality test, so as to study and obtain the change law of thermal effect of optical components under a certain time resolution, and provide accurate data support for dealing with thermal effect problems.

[0003] The optical element thermal effect test system reflects the thermal performance of the optical element by testing the temperature. The optical element wavefront shape and phase distortion monitoring and beam quality test system monitors the wavefront and phase changes and the quality of the beam to provide optimization suggestions for further optimizing the design and adjustment of the optical element, thereby improving the performance and accuracy of the optical system. Currently known optical element performance test systems often have the disadvantages of complex structure and can only realize a single function. For example, the temperature rise test system mentioned in Chinese patent CN108981923B has optical elements installed on a constant temperature heating table, and the temperature rise results between the optical elements and the heating table will be inaccurate. For example, the wavefront test structure disclosed in Chinese patent CN102879109B has a complex optical path construction, requires a microlens array and a CCD detector to measure the wavefront, and the test results are inconvenient to process. A beam quality test system disclosed in Chinese patent CN208887783U requires moving the aperture for adjustment and collecting power values ​​to calculate the beam quality. Summary of the invention

[0004] The purpose of the present invention is to provide a testing device for the thermal effect of an optical element under the action of a continuous laser, which can realize a variety of performance tests such as temperature rise test of the optical element under the action of a continuous laser, wavefront shape and phase distortion test, and beam quality test.

[0005] To achieve the above-mentioned purpose, the present invention provides a testing device for the thermal effect of an optical element under the action of a continuous laser, comprising a continuous laser alignment system, a sample temperature testing system, a wavefront phase testing system, a beam quality testing system, and a computer. The continuous laser alignment system receives a high-power laser beam emitted by a continuous laser emitting device and outputs a test laser. The test laser generates reflected light and transmitted light through the sample temperature testing system. The reflected light and the transmitted light enter the wavefront phase testing system or the beam quality testing system respectively.

[0006] Preferably, the continuous laser alignment system includes a continuous laser standard adapter, a fixed bracket, a lens barrel, a light shielding ring, and a movable lens frame. The continuous laser standard adapter is arranged at one end of the fixed bracket, and the other end of the fixed bracket is provided with a lens barrel, which is nested in the light shielding ring. The light shielding ring is fixedly connected to one end of the movable lens frame, and a collimating lens is arranged in the center of the movable lens frame.

[0007] Preferably, the fixed bracket and the movable mirror frame are slidably connected to the displacement stage via displacement blocks respectively, and the displacement stage is assembled on the height-adjustable bracket via an adapter plate.

[0008] Preferably, a water cooling device is provided outside the fixed bracket and the movable mirror frame respectively, and the water cooling device has a water inlet joint and a water outlet joint.

[0009] Preferably, the sample temperature testing system includes an infrared thermal imager, an optical element and an electric rotating table, the optical element is arranged on the electric rotating table, the infrared imager is aligned with the optical element, and the infrared thermal imager is electrically connected to a computer.

[0010] Preferably, the wavefront phase test system includes a first beam splitter, a second beam splitter, a first filter, a first focusing lens, a second focusing lens, and a wavefront sensor. The first beam splitter is tilted on the optical path of the test laser. The test laser generates reflected reference light and transmitted test light through the first beam splitter. The test light generates reflected wavefront test light and projected beam quality test light through the optical element. The reference light reflected by the first beam splitter and the wavefront test light reflected by the optical element interfere with each other through the second beam splitter and then pass through the second beam splitter. The second beam splitter is parallel to the optical path of the test laser. The first filter, the first focusing lens, the second focusing lens, and the wavefront sensor are located on the same axis and arranged in sequence. The wavefront sensor is electrically connected to the computer.

[0011] Preferably, the beam quality test system includes a second filter, an infrared camera, and an electric translation track. The infrared camera is arranged on the electric translation track. The second filter and the infrared camera are both arranged on the optical path of the test laser. The second filter is located in front of the infrared camera. The second filter receives the beam quality test light transmitted from the optical element. The infrared camera and the electric translation track are both electrically connected to the computer.

[0012] Preferably, in the sample temperature test system: by setting the input current of the continuous laser collimation system, the continuous laser with different powers is output, and the temperature rise variation law T under time resolution is obtained. I (t); By adjusting the collimating lens to set the output spot size, continuous lasers with different spot sizes are output to obtain the temperature rise variation law under time resolution T S (t); By changing the size of the optical element, the temperature rise variation law of optical elements of different sizes under time resolution is obtained T S (t);

[0013] The method for obtaining the temperature rise variation law is as follows: the infrared thermal imager obtains the temperature-time data of a series of optical components irradiated by continuous laser under different conditions, and the data is recorded by the computer:

[0014] (t i ,T i ),i=1,2,…,m

[0015] t i is the time of the i-th sampling, T i is the temperature of the optical element at the time of the i-th sampling, assuming that the sampling temperature and time satisfy the functional relationship:

[0016] T i =a0t i n +a1t i n-1 +…+a n-1 t i +a n

[0017] The computer calculates a0…a by polynomial fitting method. n , and obtain the temperature rise variation relationship of continuous laser optical elements.

[0018] Preferably, in the wavefront phase test system: by setting the input current of the continuous laser collimation system, the continuous laser with different powers is output, and the wavefront change relationship under different laser powers is obtained. The wavefront distortion under different laser powers is obtained by computer reconstruction calculation; the output spot size is set by adjusting the collimating lens, and continuous lasers with different spot sizes are output to obtain the wavefront change relationship under different spot sizes. The wavefront distortion under different laser powers is obtained by computer reconstruction; by changing the size of the optical element, the wavefront change relationship under different sizes of optical elements is obtained The wavefront distortion under different sizes of optical elements is obtained by computer reconstruction;

[0019] The method for obtaining the wavefront change relationship is as follows: under different conditions, the sub-lens of the wavefront sensor focuses the wavefront test light onto the CCD detection surface of the wavefront sensor, forming a sub-aperture spot array on the CCD detection surface. The focal length of the sub-lens of the wavefront sensor is f. Assume that the position of the i×jth sub-aperture spot collected on the CCD surface is Δx i ,Δy j , the wavefront slope reconstructed here is:

[0020]

[0021] in It represents the wavefront deviation detected by the wavefront sensor, and Δx and Δy represent the position deviation in the x and y directions.

[0022] Preferably, in the beam quality measurement system: by setting the input current of the continuous laser collimation system, the continuous laser with different powers is output to obtain the beam quality under different laser powers. By adjusting the collimating lens to set the output spot size, continuous lasers with different spot sizes can be output to obtain beam quality under different spot sizes. By changing the size of the optical element, the beam quality under different sizes of optical elements can be obtained.

[0023]

[0024] The method for obtaining the beam quality is as follows: the infrared camera is translated on the electric displacement track under the control of the computer. The infrared camera moves near the beam waist and collects a series of spot samples at the same interval. The sampled spot sample data includes the diameter information D and position information of the spot. The computer fits the hyperbolic function of the spot diameter and the sampling position:

[0025]

[0026] Where z is the axial distance of the test spot, and the parameters a, b, and c are the function coefficients obtained by computer fitting;

[0027] According to the fitted spot diameter function, the expression of beam quality can be obtained as follows:

[0028]

[0029] Where λ is the wavelength of the test laser.

[0030] Therefore, the present invention adopts a test device for the thermal effect of optical elements under the action of a continuous laser of the above structure, which can detect and record temperature rise, wavefront distortion and beam quality in real time, explore the internal connection between the three, and not only provide monitoring means for high-power laser systems, but also provide correction data for simulation models. The optical path structure is simple, the degree of automation is high, and the data processing is simple. It has the advantages of diversified functions, simple structure, convenient operation, and a wide range of applications. It can realize a variety of performance tests such as optical element temperature rise test, wavefront shape and phase distortion test, and beam quality test.

[0031] The technical solution of the present invention is further described in detail below through the accompanying drawings and embodiments. BRIEF DESCRIPTION OF THE DRAWINGS

[0032] Figure 1 This is a schematic structural diagram of Embodiment 1 of a testing device for thermal effects of optical elements under continuous laser action according to the present invention;

[0033] Figure 2 Schematic diagram of the structure of a continuous laser alignment system according to Embodiment 1 of the present invention;

[0034] Figure 3 This is a schematic diagram of the structure of a sample temperature testing system according to Example 1 of the present invention;

[0035] Figure 4 Schematic diagram of the structure of a wavefront phase test system according to Embodiment 1 of the present invention;

[0036] Figure 5 Schematic diagram of the structure of the beam quality testing system according to Embodiment 1 of the present invention;

[0037] Figure 6 This is a schematic diagram of the device structure of Example 2 of the present invention.

[0038] Reference numerals

[0039] 1. Continuous laser alignment system; 2. Sample temperature test system; 3. Wavefront phase test system; 4. Beam quality test system; 5. Continuous laser standard adapter; 6. Fixed bracket; 7. Lens barrel; 8. Shading ring; 9. Moving lens frame; 10. Collimating lens; 11. Displacement block; 12. Displacement stage; 13. Adapter plate; 14. Water cooling device; 15. Infrared thermal imager; 16. Optical element; 17. Electric rotating stage; 18. Wavefront sensor; 19. First focusing lens; 20. Second focusing lens; 21. First filter; 22. First beam splitter; 23. Second beam splitter; 24. Computer; 25. Second filter; 26. Infrared camera; 27. Electric translation track. DETAILED DESCRIPTION

[0040] The technical solution of the present invention is further described below through the accompanying drawings and embodiments.

[0041] Example

[0042] like Figure 1 As shown, a testing device for thermal effects of optical elements under the action of continuous laser includes a continuous laser alignment system 1, a sample temperature testing system 2, a wavefront phase testing system 3, a beam quality testing system 4, and a computer 24. The continuous laser alignment system 1 receives a high-power laser beam emitted by a continuous laser emitting device and outputs a test laser. The test laser generates reflected light and transmitted light through the sample temperature testing system 2. The reflected light and the transmitted light enter the wavefront phase testing system 3 or the beam quality testing system 4 respectively.

[0043] like Figure 2 As shown, the continuous laser alignment system 1 is used to align the high-power laser for testing the thermal performance of the optical element 16. The continuous laser alignment system 1 includes a continuous laser standard adapter 5, a fixed bracket 6, a lens barrel 7, a light shielding ring 8, and a movable mirror frame 9. The continuous laser standard adapter 5 is arranged at one end of the fixed bracket 6, and the other end of the fixed bracket 6 is provided with a lens barrel 7, and the lens barrel 7 is nested in the light shielding ring 8. The light shielding ring 8 is fixedly connected to one end of the movable mirror frame 9, and a collimating lens 10 is arranged in the center of the movable mirror frame 9. Water cooling devices 14 are respectively arranged outside the fixed bracket 6 and the movable mirror frame 9. The water cooling device 14 has a water inlet joint and a water outlet joint. The circulating cooling water is connected through the water inlet joint and the water outlet joint to realize the temperature control of the alignment system, prevent the alignment system from being damaged due to thermal effects, and solve the thermal effect problem caused by high-power laser on the laser.

[0044] The fixed bracket 6 and the movable mirror frame 9 are respectively connected to the displacement stage 12 by sliding through the displacement block 11. The displacement stage 12 is assembled on the height-adjustable bracket through the adapter plate 13. The focal length can be freely adjusted by adjusting the position of the mirror frame. The collimation system can be replaced with a larger lifting platform and left and right displacement stages 12 through the adapter plate 13 to freely adjust the height of the laser light path.

[0045] like Figure 3 As shown, the sample temperature test system 2 includes an infrared thermal imager 15, an optical element 16 and an electric rotating table 17. The optical element 16 is arranged on the electric rotating table 17, and the test angle is precisely controlled by the electric rotating table 17. The infrared imager is electrically connected to the computer 24, and the infrared imager is aligned with the optical element 16 to monitor the temperature of the sample surface in real time. In this embodiment, the optical element 16 is irradiated with a laser to avoid the test error caused by heat conduction. At the same time, the optical element 16 is adjusted at a suitable angle through the electric rotating table 17 to avoid the problem of inaccurate test angle caused by manual adjustment.

[0046] In the sample temperature test system 2: by setting the input current of the continuous laser collimation system 1 and outputting continuous lasers of different powers, the temperature rise variation law T under time resolution is obtained.I (t); By adjusting the collimating lens 10 to set the output spot size, the continuous laser with different spot sizes is output to obtain the temperature rise variation law under time resolution T S (t); By changing the size of the optical element 16, the temperature rise variation law of the optical element 16 of different sizes under time resolution is obtained T S (t);

[0047] The method for obtaining the temperature rise variation law is as follows: the infrared thermal imager 15 obtains the temperature time data of a series of optical elements 16 continuously irradiated by laser under different conditions, and records them at equal time intervals by the computer 24:

[0048] (t i ,T i ),i=1,2,…,m

[0049] t i is the time of the i-th sampling, T i is the temperature of the optical element 16 at the i-th sampling, assuming that the sampling temperature and time satisfy the functional relationship:

[0050] T i =a0t i n +a1t i n-1 +…+a n-1 t i +a n

[0051] The computer 24 calculates a0…a by a polynomial fitting method. n , obtain the temperature rise variation relationship of the continuous laser optical element 16. By establishing the relationship between laser power, spot size, size of the optical element 16 and the temperature rise of the optical element 16, the design of the optical element 16 is guided.

[0052] The wavefront phase test is used to test the wavefront phase information of the laser, reflecting the influence of the surface deformation caused by the thermal effect of the optical element 16 on the wavefront phase, and providing suggestions for improving the design and optimization of the optical element 16. Figure 4 As shown, the wavefront phase testing system 3 includes a first beam splitter 22 , a second beam splitter 23 , a first filter 21 , a first focusing lens 19 , a second focusing lens 20 , and a wavefront sensor 18 . The wavefront sensor 18 is electrically connected to a computer 24 .

[0053] The first beam splitter 22 is tiltedly arranged on the optical path of the test laser. The test laser generates reflected reference light and transmitted test light through the first beam splitter 22. The test light generates reflected wavefront test light and projected beam quality test light through the optical element 16. The reference light reflected by the first beam splitter 22 and the wavefront test light reflected by the optical element 16 interfere with each other and then pass through the second beam splitter 23. The second beam splitter 23 is parallel to the optical path of the test laser. The first filter 21, the first focusing lens 19, the second focusing lens 20, and the wavefront sensor 18 are located on the same axis and are arranged in sequence.

[0054] The first filter 21 plays the role of attenuating the light energy reflected by the optical element 16. A suitable filter is selected according to the actual power density and wavelength range of the laser to prevent excessive energy from entering the wavefront sensor 18. The interval difference between the first focusing lens 19 and the second focusing lens 20 is the sum of the focal lengths of the two lenses. The two lenses together form a beam reduction structure to control the spot size reaching the wavefront sensor 18 to be smaller than the size of the detection window.

[0055] In the wavefront phase test system 3: by setting the input current of the continuous laser collimation system 1, the continuous laser with different powers is output, and the wavefront change relationship under different laser powers is obtained. The computer 24 reconstructs the wavefront distortion under different laser powers; the output spot size is set by adjusting the collimating lens 10, and continuous lasers with different spot sizes are output to obtain the wavefront change relationship under different spot sizes. The computer 24 reconstructs the wavefront distortion under different laser powers; by changing the size of the optical element 16, the wavefront change relationship under different sizes of the optical element 16 is obtained. The computer 24 reconstructs the wavefront distortion under the optical elements 16 of different sizes;

[0056] The method for obtaining the wavefront change relationship is as follows: under different conditions, the wavefront sensor 18 uses a microlens array to divide the incident wavefront into many sub-wavefronts, and the sub-lens of the wave detector focuses the incident light onto the CCD detection surface of the wavefront sensor 18, forming a sub-aperture spot array on the CCD detection surface. The focal length of the sub-lens of the wavefront sensor 18 is f. Assume that the position of the i×jth sub-aperture spot collected on the CCD surface is Δx i ,Δy j , the wavefront slope reconstructed here is:

[0057]

[0058] in It represents the wavefront deviation detected by the wavefront sensor, and Δx and Δy represent the position deviation in the x and y directions.

[0059] By establishing the relationship between laser power, spot size, optical element 16 size and wavefront distortion of optical element 16, feedback is provided for further improving the design and optimization of optical element 16.

[0060] The beam quality system is used to measure the influence of thermal effect of optical element 16 on beam quality. Figure 5 As shown, the beam quality testing system 4 includes a second filter 25 , an infrared camera 26 , and an electric translation track 27 . The infrared camera 26 is disposed on the electric translation track 27 . Both the infrared camera 26 and the electric translation track 27 are electrically connected to the computer 24 .

[0061] The second filter 25 is a filter group arranged with the optical path as the center, which plays a role in further attenuating the laser energy. According to the actual power density of the laser, filters with different transmission capabilities are selected for free combination to ensure that the infrared camera 26 will not be overexposed and the received light spot is clear. The second filter 25 and the infrared camera 26 are both set on the optical path of the test laser, and the second filter 25 is located before the infrared camera 26. The second filter 25 receives the beam quality test light transmitted from the optical element 16.

[0062] In the beam quality measurement system: by setting the input current of the continuous laser collimation system 1, the continuous laser with different powers is output to obtain the beam quality under different laser powers By adjusting the collimating lens 10 to set the output spot size, continuous lasers with different spot sizes are output to obtain beam qualities under different spot sizes. By changing the size of the optical element 16, the beam quality under different sizes of optical elements 16 is obtained.

[0063] The method for obtaining the beam quality is as follows: the infrared camera 26 translates on the electric displacement track under the control of the computer 24. The infrared camera 26 moves near the beam waist and collects a series of spot samples at the same interval. The sampled spot sample data includes the diameter information D and position information of the spot. The computer 24 fits a hyperbolic function of the spot diameter and the sampling position. The fitted curve intuitively reflects the Gaussian beam properties of the test laser.

[0064]

[0065] Where z is the axial distance of the test spot, and the parameters a, b, and c are the function coefficients obtained by computer fitting;

[0066] According to the fitted spot diameter function, the expression of beam quality can be obtained as follows:

[0067]

[0068] Where λ is the wavelength of the test laser.

[0069] Therefore, the present invention adopts a test device for the thermal effect of the optical element 16 under the action of a continuous laser of the above structure, which can detect and record temperature rise, wavefront distortion and beam quality in real time, explore the internal connection between the three, and not only provide monitoring means for the high-power laser system, but also provide correction data for the simulation model. The optical path structure is simple, the degree of automation is high, and the data processing is simple. It has the advantages of diversified functions, simple structure, convenient operation, and a wide range of applications, and can realize a variety of performance tests such as temperature rise test of the optical element 16, wavefront shape and phase distortion test, and beam quality test.

[0070] Example 2

[0071] The difference between this embodiment and embodiment 1 is that the optical path positions of the beam quality testing system 4 and the wavefront phase testing system 3 are reversed. Figure 6 As shown, the optical path position is selected according to the reflection and transmission capabilities of the optical element 16 to be tested, and the reflection surface type and the reflection beam quality or the transmission surface type and the transmission beam quality can be tested.

[0072] Finally, it should be noted that the above embodiments are only used to illustrate the technical solution of the present invention rather than to limit it. Although the present invention has been described in detail with reference to the preferred embodiments, those skilled in the art should understand that they can still modify or replace the technical solution of the present invention with equivalents, and these modifications or equivalent replacements cannot cause the modified technical solution to deviate from the spirit and scope of the technical solution of the present invention.

Claims

1. A device for testing the thermal effect of optical components under the action of continuous laser, characterized in that: It includes a continuous laser alignment system, a sample temperature test system, a wavefront phase test system, a beam quality test system, and a computer. The continuous laser alignment system receives a high-power laser beam emitted by a continuous laser emission device and outputs a test laser. The test laser generates reflected light and transmitted light through the sample temperature test system. The reflected light and the transmitted light enter the wavefront phase test system or the beam quality test system respectively. The sample temperature test system includes an infrared thermal imager, an optical element and an electric rotating table, the optical element is arranged on the electric rotating table, the infrared thermal imager is aligned with the optical element, and the infrared thermal imager is electrically connected to a computer; The wavefront phase test system comprises a first beam splitter, a second beam splitter, a first filter, a first focusing lens, a second focusing lens, and a wavefront sensor. The first beam splitter is tilted on the optical path of the test laser. The test laser generates reflected reference light and transmitted test light through the first beam splitter. The test light generates reflected wavefront test light and transmitted beam quality test light through the optical element. The reference light reflected by the first beam splitter and the wavefront test light reflected by the optical element interfere with each other and then transmit through the second beam splitter. The second beam splitter is parallel to the optical path of the test laser. The first filter, the first focusing lens, the second focusing lens, and the wavefront sensor are located on the same axis and are arranged in sequence. The wavefront sensor is electrically connected to a computer. In the wavefront phase test system: by setting the input current of the continuous laser collimation system, the continuous laser with different powers is output, and the wavefront change relationship under different laser powers is obtained. The wavefront distortion under different laser powers was obtained by computer reconstruction; The method for obtaining the wavefront change relationship is as follows: under different conditions, the sub-lens of the wavefront sensor focuses the wavefront test light onto the CCD detection surface of the wavefront sensor, forming a sub-aperture spot array on the CCD detection surface. The focal length of the sub-lens of the wavefront sensor is f. Assume that the position of the i×jth sub-aperture spot collected on the CCD surface is Δx i ,Δy j , the wavefront slope reconstructed here is: in It represents the wavefront deviation detected by the wavefront sensor, and Δx and Δy represent the position deviation in the x and y directions.

2. The device for testing the thermal effect of optical elements under the action of continuous laser according to claim 1, characterized in that: The continuous laser collimation system includes a continuous laser standard adapter, a fixed bracket, a lens barrel, a shading ring, and a movable lens frame. The continuous laser standard adapter is arranged at one end of the fixed bracket, and a lens barrel is arranged at the other end of the fixed bracket. The lens barrel is nested in the shading ring. The shading ring is fixedly connected to one end of the movable lens frame, and a collimating lens is arranged in the center of the movable lens frame.

3. The device for testing the thermal effect of optical elements under the action of continuous laser according to claim 2, characterized in that: The fixed bracket and the movable mirror frame are respectively connected to the displacement table by sliding through the displacement block, and the displacement table is assembled on the height-adjustable bracket through the adapter plate.

4. The device for testing the thermal effect of optical elements under the action of continuous laser according to claim 3, characterized in that: A water cooling device is respectively arranged outside the fixed bracket and the movable mirror frame, and the water cooling device has a water inlet joint and a water outlet joint.

5. The device for testing the thermal effect of optical elements under the action of continuous laser according to claim 4, characterized in that: The beam quality test system includes a second filter, an infrared camera, and an electric translation track. The infrared camera is arranged on the electric translation track. The second filter and the infrared camera are both arranged on the optical path of the test laser. The second filter is located in front of the infrared camera. The second filter receives the beam quality test light transmitted from the optical element. The infrared camera and the electric translation track are both electrically connected to the computer.

6. The device for testing the thermal effect of optical elements under the action of continuous laser according to claim 5, characterized in that: In the sample temperature test system: by setting the input current of the continuous laser collimation system and outputting continuous lasers of different powers, the temperature rise variation law T under time resolution is obtained. I (t); By adjusting the collimating lens to set the output spot size, continuous lasers with different spot sizes are output, and the temperature rise variation law of different spot sizes under time resolution is obtained. S (t); By changing the size of the optical element, the temperature rise variation law of optical elements of different sizes under time resolution is obtained T V (t); The method for obtaining the temperature rise variation law is as follows: the infrared thermal imager obtains the temperature-time data of a series of optical components irradiated by continuous laser under different conditions, and the data is recorded by the computer: (t i ,T i ),i=1,2,...,m t i is the time of the i-th sampling, T i is the temperature of the optical element at the time of the i-th sampling, assuming that the sampling temperature and time satisfy the functional relationship: T i =a0t i n +a1t i n-1 +...+a n-1 t i +a n The computer calculates a0...a by polynomial fitting method. n , and obtain the temperature rise variation relationship of continuous laser optical elements.

7. The device for testing the thermal effect of optical elements under the action of continuous laser according to claim 6, characterized in that: In the wavefront phase test system: by adjusting the collimating lens to set the output spot size, continuous lasers with different spot sizes are output to obtain the wavefront change relationship under different spot sizes The wavefront distortion under different spot sizes is calculated by computer reconstruction; by changing the size of the optical element, the wavefront change relationship under different size optical elements is obtained. The wavefront distortion of optical elements of different sizes is obtained by computer reconstruction.

8. The device for testing the thermal effect of optical elements under the action of continuous laser according to claim 7, characterized in that: In the beam quality measurement system: by setting the input current of the continuous laser collimation system, the continuous laser with different powers is output to obtain the beam quality under different laser powers. By adjusting the collimating lens to set the output spot size, continuous lasers with different spot sizes can be output to obtain beam quality under different spot sizes. By changing the size of the optical element, the beam quality under different sizes of optical elements can be obtained The method for obtaining the beam quality is as follows: the infrared camera is translated on the electric translation track under the control of the computer. The infrared camera moves near the beam waist and collects a series of spot samples at the same interval. The sampled spot sample data includes the diameter information D and position information of the spot. The computer fits the hyperbolic function of the spot diameter and the sampling position: Where z is the axial distance of the test spot, and the parameters a, b, and c are the function coefficients obtained by computer fitting; According to the fitted spot diameter function, the expression of beam quality can be obtained as follows: Where λ is the wavelength of the test laser.

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