Liquid nitrogen vacuum probe station

Abstract

The invention relates to a liquid nitrogen vacuum probe station which comprises a probe station body, the probe station body is provided with a detection station, and the probe station body is provided with an adjusting assembly used for adjusting the environment in the detection station; a detection seat is rotatably mounted in the detection station, and the detection seat is provided with a rotating piece for driving the detection seat to rotate; the top of the detection seat is provided with a plurality of installation positions used for installing chips, the probe station body is slidably provided with a plurality of probes, all the probes are arranged at intervals in the axial direction of the detection seat, and each probe is provided with a sliding assembly used for driving the probe to move along the X axis, the Y axis and the Z axis. According to the liquid nitrogen vacuum probe station, the detection efficiency of the chip can be improved.

Description

Technical Field

[0001] The present application relates to the technical field of chip detection, and in particular to a liquid nitrogen vacuum probe station. Background Art

[0002] A chip is a type of integrated circuit. In electronics, it is a way to miniaturize the circuits of semiconductor devices and is often manufactured on the surface of semiconductor wafers. Probe stations are mainly used in the semiconductor industry, optoelectronics industry, integrated circuit and packaging testing. Probe stations are needed for various performance tests of chips, mainly to ensure quality and reliability before chip mass production, and to reduce R&D time and device manufacturing process costs.

[0003] In the prior art, a probe station is provided with a detection station, and a liquid nitrogen supply part and a vacuum pump are provided at the detection station to meet the environmental requirements when the probe station detects the chip; a probe is installed on one side of the detection station, and the probe is connected to a sliding assembly for driving the probe to move along the X-axis, the Y-axis and the Z-axis. After the chip is installed in the detection station, the probe is driven to move by the sliding assembly so that the probe contacts the surface of the chip to detect various performances of the chip.

[0004] However, after this type of probe station installs the chip at the inspection station, the probe is moved to inspect the chip. After the inspection is completed, the chip is taken out and the next chip is reinstalled. The probe is then driven to contact the next chip through the sliding component to inspect the next chip in and out. The inspection efficiency is low and it is not suitable for large-scale chip inspection operations, so further improvement is needed. Summary of the invention

[0005] In order to improve the detection efficiency of the chip, the present application provides a liquid nitrogen vacuum probe station.

[0006] The liquid nitrogen vacuum probe station provided in this application adopts the following technical solution: A liquid nitrogen vacuum probe station comprises a probe station body, the probe station body has a detection station, the probe station body is provided with an adjustment component for adjusting the environment in the detection station; a detection seat is rotatably installed in the detection station, and the detection seat is provided with a rotating part for driving the detection seat to rotate; the top of the detection seat has a plurality of mounting positions for mounting chips, and the probe station body is slidably installed with a plurality of probes, all the probes are arranged at intervals around the axial direction of the detection seat, and each of the probes is provided with a sliding component for driving the probe to move along the X-axis, the Y-axis and the Z-axis.

[0007] By adopting the above-mentioned technical scheme, through the setting of the detection seat and multiple probes, on the one hand, multiple mounting positions are set on the detection seat, and the multiple mounting positions can be used to install multiple chips to be detected, and the chips on the detection seat are detected by multiple probes at the same time, which greatly improves the detection efficiency of the chip; on the other hand, the detection seat is rotatably installed in the installation position. When the probe completes the detection of one of the chips, the probe is driven to move by the sliding assembly, and the detection seat is driven to rotate in conjunction with the rotating part, so that the probe can be quickly moved to dock with the next chip, and the next chip is detected, thereby improving the docking efficiency between the probe and the chip, and further improving the detection efficiency of the chip.

[0008] Optionally, the adjustment component includes a temperature adjustment component and a vacuum pumping component, the temperature adjustment component includes a liquid nitrogen supply cylinder for supplying liquid nitrogen and a heating wire for heating, the liquid nitrogen supply cylinder is installed on the probe station body and connected to the detection station, and the heating wire is arranged on the probe station body to increase the temperature in the detection station.

[0009] By adopting the above-mentioned technical scheme, through the setting of the temperature adjustment part and the vacuum pumping part, the vacuum pumping part can evacuate the detection station to meet the vacuum requirement of the probe when detecting the chip. By adding liquid nitrogen into the detection station through the liquid nitrogen supply cylinder, the temperature in the detection station can be lowered. By heating with an electric heating wire, the temperature in the detection station can be increased. This allows the operator to choose to lower or increase the temperature in the detection station according to the actual needs during the chip detection process to meet the temperature requirements during chip detection.

[0010] Optionally, an adsorption cavity is provided in the detection seat, and the detection seat is provided with an adsorption tube connected to the adsorption cavity, and the inner wall of the adsorption cavity is provided with a plurality of adsorption holes, all the adsorption holes are arranged corresponding to all the installation positions, and each of the adsorption holes is connected to the corresponding installation position.

[0011] By adopting the above-mentioned technical scheme, through the setting of the adsorption chamber and the adsorption hole, after the chip to be tested is placed in the installation position, the gas in the adsorption chamber is extracted outward through the adsorption tube, so that the chip can be adsorbed and fixed in the installation position under the action of the adsorption hole. The chip is fixed by adsorption, which reduces the possibility of damage to the chip when it is fixed, and reduces the possibility of the chip slipping due to the pushing force of the probe when the probe contacts the chip, thereby improving the stability of the chip during detection.

[0012] Optionally, a first sliding plate is slidably installed in the adsorption chamber, and a plurality of ejector rods are provided on the plate surface of the first sliding plate close to the adsorption hole, and all the ejector rods are arranged corresponding to all the adsorption holes, and one end of the ejector rod away from the first sliding plate is passed through the corresponding adsorption hole and extends to the installation position, and the outer diameter of the ejector rod is smaller than the inner diameter of the adsorption hole; the first sliding plate is provided with a moving part, and the moving part normally causes the end of the ejector rod away from the first sliding plate to extend to the installation position, and when the adsorption tube sucks air outward, the moving part drives the first sliding plate to slide and forces the ejector rod to move into the adsorption hole.

[0013] By adopting the above technical solution, through the arrangement of the first sliding plate, the ejector rod and the moving part, under normal conditions, the ejector rod extends to the installation position away from one end of the first sliding plate, and after the chip to be detected is placed in the installation position, the gas in the adsorption chamber is extracted, and the moving part can drive the first sliding plate to slide, so that the ejector rod moves into the adsorption hole, thereby adsorbing the chip to the installation position; after the chip detection is completed, the adsorption effect on the adsorption chamber is released, and the moving part resets the first sliding plate, so that the ejector block extends into the installation position to eject the chip after the detection, so as to facilitate the removal of the chip and improve the convenience of chip disassembly and assembly.

[0014] Optionally, a second sliding plate located below the first sliding plate is slidably installed in the adsorption chamber, and a return spring is provided between the second sliding plate and the inner wall of the adsorption chamber, and the return spring normally causes the second sliding plate to move to fit with the inner wall of the adsorption chamber away from the adsorption hole; the outer wall of the second sliding plate fits with the inner wall of the adsorption chamber, and when the adsorption tube inhales air outwards, the second sliding plate moves toward the side close to the first sliding plate; the moving part includes a first gear, a first rack and a second rack, the first gear is rotatably installed on the inner wall of the adsorption chamber, one end of the first rack is fixed to the first sliding plate, and the other end is extended toward the side close to the second sliding plate, one end of the second rack is fixed to the second sliding plate, and the other end is extended toward the side close to the first sliding plate, and the first rack and the first gear, as well as the second rack and the first gear, are all meshed and transmitted.

[0015] By adopting the above technical solution, through the arrangement of the first gear, the first rack and the second rack, the second sliding plate fits with the inner wall of the adsorption chamber away from the adsorption hole under the action of the reset spring. When the adsorption tube extracts the gas in the adsorption chamber, the second sliding plate moves toward the side close to the first sliding plate, and drives the first sliding plate to slide under the action of the first gear, the first rack and the second rack, forcing the ejector rod to move into the adsorption hole so that the chip can be adsorbed on the adsorption hole; after the chip is detected, the adsorption effect on the adsorption chamber is removed, and the second sliding plate is reset under the action of its own gravity and the reset spring, thereby driving the first sliding plate to slide and reset, so that the ejector rod of the first sliding plate can eject the chip outward, thereby improving the convenience of chip disassembly and assembly.

[0016] Optionally, the second sliding plate separates the adsorption chamber into an adsorption area and an adjustment area, and the first sliding plate is located in the adsorption area; a rotating shaft is installed on the bottom wall of the detection seat, and the rotating shaft is rotatably installed on the inner wall of the detection station, and the detection seat is rotatably installed in the detection station through the rotating shaft; an adjustment groove connected to the adjustment area is opened on the end face of the rotating shaft, and the adjustment groove is used to inhale liquid nitrogen or hot gas.

[0017] By adopting the above technical scheme and setting the adjustment zone and the adjustment groove, when the temperature environment requirement during the chip detection process is low temperature (the liquid nitrogen supply cylinder is turned on and the heating wire is turned off), the gas in the adsorption chamber is extracted to adsorb the chip to the installation position. During this process, the second sliding plate is pressed and moves toward the side close to the first sliding plate to expand the size of the adjustment zone. The adjustment groove can draw liquid nitrogen into the adjustment zone to quickly adjust the temperature in the detection seat so that the temperature in the detection seat can be quickly cooled down. After the chip detection is completed, the second sliding plate is reset to squeeze out the liquid nitrogen in the adjustment zone. When the temperature requirement during the chip detection process is high temperature (the liquid nitrogen supply cylinder is turned off and the heating wire is turned on), the adjustment groove can suck the hot air in the detection station into the adjustment zone to quickly heat up the detection seat, which greatly improves the efficiency of temperature regulation of the detection seat, thereby improving the efficiency of chip detection.

[0018] Optionally, a limit member is provided in the regulating groove, and the limit member is used to slow down the exhaust speed of the regulating groove or the discharge speed of the regulating groove.

[0019] By adopting the above technical solution and setting the limiter, the chip is evacuated from the adsorption chamber after the detection is completed, and the second sliding plate slides and resets under the action of the reset spring, so that the liquid nitrogen or hot gas in the adjustment area is squeezed out through the adjustment groove. The limiter can slow down the exhaust speed of the adjustment groove or the drainage speed of the adjustment groove, thereby slowing down the reset speed of the second sliding plate and the first sliding plate, so that the ejector rod can smoothly eject the chip outward, reducing the possibility that the drainage speed or exhaust speed of the adjustment groove is too fast, making the reset speed of the first sliding plate too fast and causing the ejector rod to strongly hit the chip, thereby improving the chip ejection effect.

[0020] Optionally, the limiting member includes a blocking plate, a torsion spring and a limiting block, one side of the blocking plate is hinged to the inner wall of the adjusting slot, the torsion spring is installed between the blocking plate and the inner wall of the adjusting slot, and the torsion spring normally closes the blocking plate in the adjusting slot; the limiting block is used to abut against the blocking plate to control the opening and closing angle of the blocking plate, the limiting block is installed on the inner wall of the adjusting slot, and the limiting block is located on the side of the blocking plate away from the adjustment area.

[0021] By adopting the above-mentioned technical solution, through the setting of the blocking plate, the torsion spring and the limit block, when the second sliding plate slides and resets, the liquid nitrogen or hot gas in the adjustment area is squeezed out through the adjustment groove, and the liquid nitrogen or hot gas can push the blocking plate and force the blocking plate to flip toward the side close to the limit block, thereby opening the blocking plate and allowing the liquid nitrogen or hot gas to be discharged outward; the limit block is used to abut against the blocking plate to control the maximum opening and closing angle of the blocking plate, thereby controlling the opening size of the adjustment groove, and then controlling the discharge speed of the liquid nitrogen or hot gas, reducing the possibility of the liquid nitrogen or hot gas in the adjustment area being discharged outward too quickly.

[0022] Optionally, a limiting plate is fitted on the top wall of the detection seat, the thickness of the limiting plate is less than the thickness of the chip, a plurality of mounting grooves are provided on the surface of the limiting plate, the shape of the mounting grooves is adapted to the shape of the chip, all the mounting grooves are arranged corresponding to all the adsorption holes, each of the mounting grooves passes through the limiting plate and forms the mounting position; a connecting piece is provided between the limiting plate and the detection seat, and the limiting plate can be detachably mounted on the detection seat through the connecting piece.

[0023] By adopting the above-mentioned technical scheme, through the setting of the limit plate, the mounting position formed by the mounting groove of the limit plate is used for chip installation, so that after the chip is installed in the mounting groove, the inner wall of the mounting groove limits the chip, thereby reducing the possibility of the chip being pushed by the probe and slipping when the probe contacts the chip; on the other hand, the limit plate is detachably installed on the detection seat through a connecting piece, and different limit plates can be replaced according to actual needs so that the size of the mounting groove of the limit plate can correspond to the size of the chip, thereby improving the overall structure to adapt to the installation of chips of different sizes.

[0024] Optionally, a connecting hole is provided on the top wall of the detection seat, a connecting rod inserted in the connecting hole is fixed to the lower surface of the limiting plate, and a rotating hole connected to the connecting hole is provided on the side wall of the detection seat, a rotating rod is rotatably installed in the rotating hole, and one end of the rotating rod extends into the connecting hole; the connecting member includes a first magnet, a second magnet and a third magnet, the first magnet is fixed to the end surface of the connecting rod away from the limiting plate, the second magnet and the third magnet are both fixed to the peripheral wall of the rotating rod and are located in the connecting hole, and the second magnet and the third magnet are arranged at intervals around the axial direction of the rotating rod, when the second magnet rotates to be opposite to the first magnet, there is a magnetic attraction force between the first magnet and the second magnet, and when the third magnet rotates to be opposite to the first magnet, there is a repulsive force between the first magnet and the third magnet.

[0025] By adopting the above-mentioned technical solution, through the arrangement of the first magnet, the second magnet and the third magnet, after the limit plate is inserted into the connecting hole of the detection seat through the connecting rod, the rotating rod is driven to rotate, and the second magnet is forced to rotate to a state relative to the first magnet. At this time, there is a magnetic attraction force between the first magnet and the second magnet to fix the limit plate to the top wall of the detection seat; when disassembling, it is only necessary to rotate the rotating rod to force the third magnet to rotate to a state relative to the first magnet. There is a repulsive force between the first magnet and the third magnet, thereby pushing the limit plate outward to facilitate the replacement of the limit plate.

[0026] In summary, the present application includes at least one of the following beneficial technical effects: 1. Through the arrangement of the detection seat and multiple probes, on the one hand, the detection seat is provided with multiple installation positions, and the multiple installation positions can be used to install multiple chips to be detected, and the chips on the detection seat are detected by multiple probes at the same time, which greatly improves the detection efficiency of the chip; on the other hand, the detection seat is rotatably installed in the installation position. When the probe has finished detecting one of the chips, the probe is driven to move by the sliding component, and the detection seat is driven to rotate in conjunction with the rotating member, so that the probe can be quickly moved to dock with the next chip, and the next chip is detected, thereby improving the docking efficiency between the probe and the chip, and further improving the detection efficiency of the chip; 2. Through the arrangement of the first sliding plate, the ejector rod and the moving part, under normal conditions, one end of the ejector rod away from the first sliding plate extends to the installation position. After the chip to be tested is placed in the installation position, the gas in the adsorption chamber is extracted, and the moving part can drive the first sliding plate to slide, so that the ejector rod moves into the adsorption hole, thereby adsorbing the chip to the installation position; after the chip is tested, the adsorption effect on the adsorption chamber is released, and the moving part resets the first sliding plate, so that the ejector block extends into the installation position to eject the chip after the test, so as to facilitate the removal of the chip and improve the convenience of chip disassembly and assembly; 3. Through the setting of the limiter, the chip is evacuated from the adsorption chamber after the detection is completed, and the second sliding plate slides and resets under the action of the reset spring, so that the liquid nitrogen or hot gas in the adjustment area is squeezed out through the adjustment groove. The limiter can slow down the exhaust speed of the adjustment groove or the drainage speed of the adjustment groove, thereby slowing down the reset speed of the second sliding plate and the first sliding plate, so that the ejector rod can smoothly eject the chip outward, reducing the possibility that the drainage speed or exhaust speed of the adjustment groove is too fast, making the reset speed of the first sliding plate too fast and causing the ejector rod to strongly hit the chip, thereby improving the chip ejection effect. BRIEF DESCRIPTION OF THE DRAWINGS

[0027] Figure 1 is a schematic diagram of the overall structure of Example 1; Figure 2 is a partial cross-sectional view of the sliding assembly according to Embodiment 1; Figure 3 is a partial cross-sectional view of the rotating member of embodiment 1; Figure 4 is a partial cross-sectional view of the first sliding plate and the second sliding plate embodied in Embodiment 2; Figure 5 is a partial cross-sectional view of the ejector rod of embodiment 2; Figure 6 yes Figure 5 The enlarged view of point A in the middle; Figure 7 is an exploded schematic diagram of the limiting piece embodied in Example 2; Figure 8 is a partial cross-sectional view of a stopper according to Embodiment 3; Fig. 9 It is a partial cross-sectional view showing the blocking plate abutting against the limiting block according to the third embodiment.

[0028] Explanation of the reference numerals: 1. probe station body; 11. detection station; 12. adjustment cylinder; 13. mounting bracket; 2. adjustment assembly; 21. temperature adjustment member; 211. liquid nitrogen supply cylinder; 212. heating wire; 22. vacuum member; 3. detection seat; 31. mounting position; 32. adsorption chamber; 321. adsorption area; 322. adjustment area; 33. adsorption tube; 34. adsorption hole; 35. first sliding plate; 351. ejector rod; 352. vent hole; 36. moving member; 361. first gear; 362. first rack; 363. second rack; 37. second sliding plate; 371. reset spring; 38. rotating shaft; 381. adjustment slot; 382. limit member; 3821. stop Baffle; 3822, limit block; 383, avoidance groove; 39, connecting hole; 391, rotating hole; 392, rotating rod; 4, rotating member; 41, second gear; 42, third gear; 43, rotating motor; 5, probe; 6, sliding assembly; 61, first sliding seat; 62, second sliding seat; 63, third sliding seat; 64, docking rod; 65, telescopic sleeve; 66, penetration channel; 67, swing member; 671, pull rod; 672, adjustment rod; 673, third rack; 674, fourth gear; 7, limit plate; 71, mounting groove; 72, connecting member; 721, first magnet; 722, second magnet; 723, third magnet; 73, connecting rod; 8, workbench. DETAILED DESCRIPTION

[0029] The following is combined with Figure 1-9 This application is described in further detail.

[0030] Embodiment 1: The embodiment of the present application discloses a liquid nitrogen vacuum probe station.

[0031] Reference Figure 1 , Figure 2A liquid nitrogen vacuum probe station includes a probe station body 1, a workbench 8 is arranged at the bottom of the probe station body 1, the probe station body 1 is fixedly installed on the table top of the workbench 8, and the probe station body 1 is erected on the ground through the workbench 8; in this embodiment, the shape of the probe station body 1 is set to be polygonal, and a circular detection groove is opened on the upper surface of the probe station body 1 to form a detection station 11 for detecting chips; it should be noted that a transparent cover plate (not shown in the figure) is installed at the upper end groove of the probe station body 1 at the detection groove, and the outer peripheral wall of the cover plate is threadedly connected to the inner wall of the detection groove for opening and closing the detection station 11.

[0032] Reference Figure 1 , Figure 2 The probe station body 1 is equipped with an adjustment component 2, which is used to adjust the detection environment (temperature and vacuum degree) in the detection station 11; in this embodiment, the adjustment component 2 includes a temperature adjustment component 21 and a vacuum pumping component 22, the temperature adjustment component 21 includes a liquid nitrogen supply cylinder 211 and a heating wire 212, the liquid nitrogen supply cylinder 211 is vertically installed on the table top of the workbench 8, the liquid outlet end of the liquid nitrogen supply cylinder 211 is connected to the side wall of the probe station body 1 and connected to the detection station 11, the liquid nitrogen supply cylinder 211 is used to introduce liquid nitrogen into the detection station 11 to cool down the detection station 11 (the liquid nitrogen supply cylinder 211 is a prior art, and its internal structure is not elaborated on here).

[0033] Reference Figure 1 , Figure 2 , an adjusting cylinder 12 is installed on the side wall of the probe station body 1, and a plurality of adjusting cylinders 12 are provided and the plurality of adjusting cylinders 12 are arranged at intervals along the central axis of the detection groove. In this embodiment, the number of adjusting cylinders 12 is set to four, and each adjusting cylinder 12 is connected to the detection station 11. The number of heating wires 212 is set corresponding to the number of adjusting cylinders 12, and the heating wires 212 are wound around the outer peripheral wall of the corresponding adjusting cylinder 12. The heating wires 212 are connected to a power supply component for causing the heating wires 212 to generate heat (the power supply component is a prior art, and its structure is not explained here, and is not shown in the figure). The heated heating wires 212 increase the temperature inside the adjusting cylinder 12, thereby heating the detection station 11.

[0034] Reference Figure 1 The vacuum pump 22 includes a vacuum tube and a vacuum pump (the vacuum pump is not shown in the figure). One end of the vacuum tube is connected to the side wall of the detection seat 3 and is connected to the detection station 11. The other end of the vacuum tube is connected to the vacuum pump so that the detection station 11 can be vacuumed to meet the environmental requirements for vacuum degree during chip detection.

[0035] Reference Figure 1 , Figure 3In this embodiment, a mounting frame 13 is fixedly installed on the inner wall of the detection station 11, and a detection seat 3 is installed on the mounting frame 13. The detection seat 3 is used to install the chip to be detected, and a gap is formed between the detection seat 3 and the bottom wall of the detection station 11 through the mounting frame 13; a rotating shaft 38 is fixedly installed on the bottom wall of the detection seat 3, and the rotating shaft 38 is vertically arranged. The rotating shaft 38 is rotatably installed on the mounting frame 13, and the detection seat 3 is rotatably installed on the mounting frame 13 through the rotating shaft 38. The mounting frame 13 is equipped with a rotating member 4 for driving the detection seat 3 to rotate.

[0036] Reference Figure 3 The rotating member 4 includes a second gear 41, a third gear 42 and a rotating motor 43. The second gear 41 is coaxially fixed to the outer peripheral wall of the rotating shaft 38. The third gear 42 is rotatably installed on the bottom wall of the detection station 11. The third gear 42 and the second gear 41 are meshed and transmitted, and the outer diameter of the third gear 42 is smaller than the outer diameter of the second gear 41; the rotating motor 43 is fixedly installed on the lower surface of the workbench 8, and the output shaft of the rotating motor 43 passes through the bottom wall of the workbench 8 and the probe station body 1 in sequence and is coaxially connected to the third gear 42; the third gear 42 is driven to rotate by the rotating motor 43, which can drive the detection seat 3 to rotate axially around the rotating shaft 38.

[0037] Reference Figure 1 , Figure 3 , a plurality of grooves are provided on the top wall of the detection seat 3, and all the grooves are evenly distributed along the top wall of the detection seat 3. In this embodiment, the depth of the grooves is less than the thickness of the chip to form a plurality of mounting positions 31 for placing the chip; an adsorption cavity 32 is provided inside the detection seat 3, and a plurality of adsorption holes 34 are provided on the inner top wall of the adsorption cavity 32, and all the adsorption holes 34 are arranged in a one-to-one correspondence with all the mounting positions 31, and each adsorption is connected to the corresponding mounting position 31; an adsorption tube 33 is connected to the outer peripheral wall of the detection seat 3, one end of the adsorption tube 33 is connected to the outer peripheral wall of the detection seat 3 and is connected to the adsorption cavity 32, and the other end of the adsorption tube 33 passes through the probe station body 1 and is connected to an exhaust pump (not shown in the figure). In this embodiment, the adsorption tube 33 is a flexibly arranged corrugated tube; after the chip is placed in the mounting position 31, the gas in the adsorption cavity 32 is extracted through the adsorption tube 33, so that the chip can be adsorbed on the mounting position 31 to limit and fix the chip.

[0038] Reference Figure 1 , Figure 2 A plurality of probes 5 are arranged in the detection station 11, and all the probes 5 are arranged at intervals around the axial direction of the detection seat 3. In this embodiment, there are four probes 5, and all the probes 5 are arranged corresponding to all the adjustment cylinders 12. The probes 5 are used to contact the surface of the chip to detect various performances of the chip; each probe 5 is connected to a sliding assembly 6, and the sliding assembly 6 is used to drive the probe 5 to move along the X-axis, the Y-axis and the Z-axis.

[0039] Reference Figure 1 , Figure 2 The sliding assembly 6 includes a first sliding seat 61, a second sliding seat 62 and a third sliding seat 63. The first sliding seat 61 is slidably installed on the upper surface of the workbench 8. The first sliding seat 61 is located on one side of the probe station body 1 and can slide back and forth in a direction close to or away from the probe station body 1; the second sliding seat 62 is slidably installed on the first sliding seat 61 and can slide back and forth in a height direction. The third sliding seat 63 is slidably installed on the second sliding seat 62. The sliding direction of the third sliding seat 63 is perpendicular to the sliding direction of the second sliding seat 62, and the sliding direction of the third sliding seat 63 is perpendicular to the sliding direction of the first sliding seat 61.

[0040] Reference Figure 1 , Figure 2 A docking rod 64 is installed on the side wall of the third sliding seat 63 close to the probe station body 1, one end of the docking rod 64 is connected to the third sliding seat 63, and the other end is penetrated through the corresponding adjustment cylinder 12 and penetrates into the detection station 11, and the end surface of the docking rod 64 away from the third sliding seat 63 is connected to the corresponding probe 5; the probe 5 is gradually tilted downward from the side close to the docking rod 64 to the side away from the docking rod 64 so as to be able to contact the surface of the chip, thereby detecting the chip; in this embodiment, the method of driving the first sliding seat 61 to slide, the method of driving the second sliding seat 62 to slide, and the method of driving the third sliding seat 63 to slide are all screw drive (screw drive is a common means in this field, and its specific structure is not elaborated too much here).

[0041] Reference Figure 1 , Figure 2 A telescopic sleeve 65 is installed between the third sliding seat 63 and the corresponding adjusting cylinder 12. In this embodiment, the telescopic sleeve 65 and the adjusting cylinder 12 are both corrugated tubes made of stainless steel. The telescopic sleeve 65 is sleeved on the docking rod 64 and together with the adjusting cylinder 12 forms a penetration channel 66 for the docking rod 64 to penetrate. In this design, the telescopic sleeve 65 is connected between the third sliding seat 63 and the adjusting sleeve so that the penetration channel 66 is a closed space, and then the detection station 11 is a closed space, so that the detection station 11 can be vacuumed.

[0042] Reference Figure 1 , Figure 2In this embodiment, the docking rod 64 and the third sliding seat 63 are ball-jointed, and the docking rod 64 is provided with a swinging member 67, which is used to drive the probe 5 to swing around the hinge point between the docking rod 64 and the third sliding seat 63; the swinging member 67 includes a pull rod 671, an adjustment rod 672, a third rack 673 and a fourth gear 674, one end of the pull rod 671 is connected to the outer peripheral wall of the docking rod 64, the pull rod 671 and the outer peripheral wall of the docking rod 64 are ball-jointed, the other end of the pull rod 671 passes through the penetration channel 66, and the third rack 673 is fixed It is fixedly installed on the outer peripheral wall of the pull rod 671 and the length direction of the third rack 673 is consistent with the length direction of the pull rod 671; the adjusting rod 672 is rotatably installed on the outer side wall of the adjusting cylinder 12, the axial direction of the adjusting rod 672 is perpendicular to the axial direction of the pull rod 671, and the fourth gear 674 is coaxially fixed to the outer peripheral wall of the adjusting rod 672 and meshes with the third rack 673 for transmission; the adjusting rod 672 is driven to rotate, and the pull rod 671 can pull the docking rod 64 under the action of the third rack 673 and the fourth gear 674, so that the probe 5 can swing to a certain angle.

[0043] The implementation principle of Example 1 of the present application is as follows: by setting the temperature adjustment component 21 and the vacuum component 22, the environment in the detection station 11 can be adjusted to the environment required for chip detection; during the detection operation, the chip is placed in the installation position 31, and then the air in the adsorption chamber 32 is extracted so that the chip can be adsorbed on the installation position 31; the inner wall of the installation position 31 can limit the chip, reducing the possibility of the chip slipping when the probe 5 contacts the chip, and limiting the chip by adsorption can reduce the possibility of damage to the chip when it is fixed.

[0044] The detection seat 3 is provided with multiple mounting positions 31 and multiple probes 5. The multiple probes 5 can detect multiple chips at the same time, greatly improving the detection efficiency of the chip; after the probe 5 completes the detection of a chip, the probe 5 is driven by the sliding component 6 to move to contact the next chip. In this process, the detection seat 3 can be driven to rotate, which can drive the chip to rotate a certain angle, so that the next chip can quickly reduce the distance with the probe 5, and reduce the sliding adjustment amount of the first sliding seat 61, the second sliding seat 62 and the third sliding seat 63, so that the probe 5 can quickly dock with the next chip, further improving the detection efficiency of the chip; at the same time, the contact between the probe 5 and the chip can be controlled by driving the adjustment rod 672 to rotate, forcing the docking rod 64 to swing a certain angle, thereby improving the operational flexibility of the overall structure.

[0045] Embodiment 2: The embodiment of the present application discloses a liquid nitrogen vacuum probe station.

[0046] Reference Figure 4 , Figure 5The difference between the liquid nitrogen vacuum probe station disclosed in the embodiment of the present application and embodiment 1 is that: In the present embodiment, a first sliding plate 35 and a second sliding plate 37 are respectively slidably installed in the adsorption chamber 32, and the second sliding plate 37 is located below the first sliding plate 35. The first sliding plate 35 is normally in contact with the inner top wall of the adsorption chamber 32. The surface of the first sliding plate 35 is provided with a plurality of ventilation holes 352 that penetrate the first sliding plate 35, and all the ventilation holes 352 are staggered with all the adsorption holes 34; a plurality of ejector rods 351 are fixedly installed on the upper surface of the first sliding plate 35, and all the ejector rods 351 are arranged corresponding to all the adsorption holes 34, and one end of each ejector rod 351 away from the first sliding plate 35 is penetrated through the corresponding adsorption hole 34 and extends to the mounting position 31. The outer diameter of the ejector rod 351 of the present application is smaller than the inner diameter of the adsorption hole 34.

[0047] Reference Figure 4 , Figure 5 The inner bottom wall of the adsorption chamber 32 is provided with a plurality of embedding grooves, each of which is provided with a return spring 371, one end of which is connected to the lower surface of the second sliding plate 37, and the other end is fixedly connected to the bottom wall of the embedding groove. The return spring 371 normally moves the second sliding plate 37 to fit with the inner bottom wall of the adsorption chamber 32; in this embodiment, the outer wall of the second sliding plate 37 fits with the inner wall of the adsorption chamber 32, and when the adsorption tube 33 sucks air outward, the second sliding plate 37 Under pressure, it can move toward the side close to the first sliding plate 35; a moving member 36 is provided between the first sliding plate 35 and the second sliding plate 37, and the moving member 36 normally makes the first sliding plate 35 fit with the inner top wall of the adsorption chamber 32 (that is, the end of the ejector rod 351 away from the first sliding plate 35 extends to the mounting position 31), when the second sliding plate 37 moves toward the side close to the first sliding plate 35, the moving member 36 drives the first sliding plate 35 to move downward and forces the ejector rod 351 to move into the adsorption hole 34.

[0048] Reference Figure 5 , Figure 6 In this embodiment, the moving member 36 includes a first gear 361, a first rack 362 and a second rack 363. The first gear 361 is rotatably mounted on the inner wall of the adsorption chamber 32. One end of the first rack 362 is fixed to the first sliding plate 35, and the other end is extended toward the side close to the second sliding plate 37. The first rack 362 and the first gear 361 are meshed for transmission; one end of the second rack 363 is fixed to the second sliding plate 37, and the other end is extended toward the side close to the first sliding plate 35. The second rack 363 and the first gear 361 are meshed for transmission.

[0049] Reference Figure 4 , Figure 5 , Figure 6When the second sliding plate 37 moves toward the side close to the first sliding plate 35, the second sliding plate 37 separates the adsorption chamber 32 into an adsorption area 321 and an adjustment area 322, and the first sliding plate 35 is located in the adsorption area 321; an adjustment groove 381 is provided on the lower end surface of the rotating shaft 38, and the adjustment groove 381 is connected to the adjustment area 322. The lower end of the rotating shaft 38 extends to the bottom of the detection station 11 for adsorbing liquid nitrogen or hot gas. When the second sliding plate 37 moves toward the side close to the first sliding plate 35, the liquid nitrogen or hot gas in the detection station 11 is sucked into the adjustment area 322 through the adjustment groove 381. When the second sliding plate 37 moves toward the side away from the first sliding plate 35, the liquid nitrogen or hot gas in the adjustment area 322 is squeezed into the detection station 11 through the adjustment groove 381.

[0050] Reference Figure 5 , Figure 6 , Figure 7 In this embodiment, a limiting piece 7 is provided on the top wall of the detection seat 3. The shape of the limiting piece 7 matches the shape of the detection seat 3. The thickness of the limiting piece 7 is less than the thickness of the chip. A plurality of mounting grooves 71 are provided on the surface of the limiting piece 7. The shape of the mounting grooves 71 matches the shape of the chip. All mounting grooves 71 are provided corresponding to all adsorption holes 34. Each mounting groove 71 runs through the limiting piece 7 and forms a mounting position 31 for mounting the chip. A plurality of connecting holes 39 are provided on the top wall of the detection seat 3. All connecting holes 39 surround the detection seat 3. Axially spaced apart, a plurality of connecting rods 73 are fixed to the lower surface of the limiting piece 7, all connecting rods 73 are arranged corresponding to all connecting holes 39, and each connecting rod 73 is inserted into the corresponding connecting hole 39; a rotating hole 391 connected to the connecting hole 39 is opened on the side wall of the detection seat 3, a rotating rod 392 is rotatably installed in the rotating hole 391, and one end of the rotating rod 392 extends into the connecting hole 39; a connecting piece 72 is installed between the rotating rod 392 and the connecting rod 73, and the limiting piece 7 is detachably installed on the detection seat 3 through the connecting piece 72.

[0051] Reference Figure 6 , Figure 7 Two embedding grooves are provided on the outer wall of the rotating rod 392, and the two embedding grooves are arranged at intervals around the axial direction of the rotating rod 392, and the two embedding grooves are both located in the connecting hole 39; in this embodiment, the connecting member 72 includes a first magnet 721, a second magnet 722 and a third magnet 723, the first magnet 721 is fixedly installed on the end surface of the connecting rod 73 away from the limiting plate 7, the second magnet 722 and the third magnet 723 are respectively embedded in the two embedding grooves of the rotating rod 392, when the second magnet 722 rotates to be opposite to the first magnet 721, there is a magnetic attraction force between the first magnet 721 and the second magnet 722, when the third magnet 723 rotates to be opposite to the first magnet 721, there is a repulsive force between the first magnet 721 and the third magnet 723.

[0052] The implementation principle of Example 2 of the present application is as follows: through the setting of the limiting plate 7, after the chip is adsorbed by the adsorption hole 34, the inner wall of the mounting groove 71 of the limiting plate 7 can limit the chip, thereby reducing the possibility of the chip sliding when the probe 5 contacts the chip, and improving the stability of chip detection; the limiting plate 7 is detachably mounted on the detection seat 3 through the connecting piece 72, and the limiting plate 7 with different sizes of the mounting groove 71 can be replaced through the connecting piece 72, so as to adapt to the installation of chips of different sizes and improve the adaptability of the overall structure.

[0053] When the chip is installed in the installation area, the chip is placed in the installation area so that the ejector rod 351 is supported on the lower surface of the chip, and then the air in the adsorption chamber 32 is extracted to form a negative pressure in the adsorption chamber 32. The second sliding plate 37 moves toward the side close to the first sliding plate 35 under the action of the negative pressure, thereby driving the first sliding plate 35 to move downward, forcing the ejector rod 351 to move into the adsorption hole 34. At this time, the chip is adsorbed by the adsorption hole 34 and is thus confined in the installation area; after the chip inspection is completed, the air extraction effect on the adsorption chamber 32 is released, and the second sliding plate 37 moves downward under the action of the reset spring 371 and its own gravity, so that the first sliding plate 35 can be reset, thereby ejecting the chip through the ejector rod 351, so that the operator can take out the chip after the inspection.

[0054] During the upward movement of the second sliding plate 37, the liquid nitrogen or hot air in the detection station 11 can be sucked into the adjustment area 322, so that the liquid nitrogen or hot air can exchange heat with the inside of the detection seat 3, so that the detection seat 3 can be quickly cooled or heated, thereby improving the efficiency of temperature regulation of the detection seat 3 and further improving the detection efficiency of the chip.

[0055] Embodiment 3: The embodiment of the present application discloses a liquid nitrogen vacuum probe station.

[0056] Reference Figure 8 , Fig. 9 The difference between the liquid nitrogen vacuum probe station disclosed in the embodiment of the present application and embodiment 2 is that: In this embodiment, the cross-sectional shape of the adjusting groove 381 is set to be rectangular, and the inner wall of the adjusting groove 381 is provided with an avoidance groove 383. A limiting member 382 is installed in the adjusting groove 381, and the limiting member 382 is used to slow down the exhaust speed of the adjusting groove 381 or the discharge speed of the adjusting groove 381; the limiting member 382 includes a blocking plate 3821, a torsion spring and a limiting block 3822. One side of the blocking plate 3821 is hinged to the inner wall of the avoidance groove 383, and the torsion spring is installed between the blocking plate 3821 and the inner wall of the adjusting groove 381 (the torsion spring is not shown in the figure). The torsion spring normally causes the blocking plate 3821 to rotate out of the avoidance groove 383 and close to the adjusting groove 381. The limiting block 3822 is used to abut against the blocking plate 3821 to control the opening and closing angle of the blocking plate 3821. The limiting block 3822 is installed on the inner wall of the adjusting groove 381, and the limiting block 3822 is located on the side of the blocking plate 3821 away from the adjustment area 322.

[0057] The implementation principle of Example 3 of the present application is as follows: after the chip detection is completed, the second sliding plate 37 moves downward, thereby squeezing out the liquid nitrogen or hot gas in the adjustment area 322. At this time, the liquid nitrogen or hot gas can push the blocking plate 3821 and force the blocking plate 3821 to abut against the limit block 3822. The limit block 3822 can control the maximum opening and closing angle of the blocking plate 3821, thereby controlling the discharge speed of the liquid nitrogen or hot gas, and then controlling the sliding speed of the second sliding plate 37 and the first sliding plate 35, reducing the possibility that the reset speed of the first sliding plate 35 is too fast, causing the ejection rod 351 to violently hit the chip, thereby improving the stability of the chip ejection.

[0058] The above are preferred embodiments of the present application, and the protection scope of the present application is not limited thereto. Therefore, any equivalent changes made according to the structure, shape, and principle of the present application should be included in the protection scope of the present application.

Claims

1. A liquid nitrogen vacuum probe station, comprising a probe station body (1), characterized in that: The probe station body (1) has a detection station (11), and the probe station body (1) is provided with an adjustment component (2) for adjusting the environment in the detection station (11); a detection seat (3) is rotatably installed in the detection station (11), and the detection seat (3) is provided with a rotating member (4) for driving the detection seat (3) to rotate; the top of the detection seat (3) has a plurality of mounting positions (31) for mounting chips, and the probe station body (1) is slidably installed with a plurality of probes (5), all of which are arranged at intervals around the axial direction of the detection seat (3), and each of the probes (5) is provided with a sliding component (6) for driving the probe (5) to move along the X-axis, the Y-axis and the Z-axis.

2. A liquid nitrogen vacuum probe station according to claim 1, characterized in that: The regulating component (2) comprises a temperature regulating part (21) and a vacuum pump (22); the temperature regulating part (21) comprises a liquid nitrogen supply cylinder (211) for supplying liquid nitrogen and a heating wire (212) for heating; the liquid nitrogen supply cylinder (211) is installed on the probe station body (1) and connected to the detection station (11); the heating wire (212) is arranged on the probe station body (1) to increase the temperature in the detection station (11).

3. A liquid nitrogen vacuum probe station according to claim 2, characterized in that: The detection seat (3) is provided with an adsorption chamber (32), the detection seat (3) is provided with an adsorption tube (33) connected to the adsorption chamber (32), the inner wall of the adsorption chamber (32) is provided with a plurality of adsorption holes (34), all the adsorption holes (34) are arranged corresponding to all the mounting positions (31), and each of the adsorption holes (34) is connected to the corresponding mounting position (31).

4. A liquid nitrogen vacuum probe station according to claim 3, characterized in that: A first sliding plate (35) is slidably installed in the adsorption chamber (32); a plurality of ejector rods (351) are provided on the plate surface of the first sliding plate (35) close to the adsorption hole (34); all the ejector rods (351) are arranged corresponding to all the adsorption holes (34); one end of the ejector rod (351) away from the first sliding plate (35) is penetrated through the corresponding adsorption hole (34) and extends to the installation position (31); the outer diameter of the ejector rod (351) is smaller than the inner diameter of the adsorption hole (34); the first sliding plate (35) is provided with a moving part (36); the moving part (36) normally causes one end of the ejector rod (351) away from the first sliding plate (35) to extend to the installation position (31); when the adsorption tube (33) sucks air outward, the moving part (36) drives the first sliding plate (35) to slide and forces the ejector rod (351) to move into the adsorption hole (34).

5. A liquid nitrogen vacuum probe station according to claim 4, characterized in that: A second sliding plate (37) is slidably installed in the adsorption chamber (32) and is located below the first sliding plate (35). A return spring (371) is provided between the second sliding plate (37) and the inner wall of the adsorption chamber (32). The return spring (371) normally moves the second sliding plate (37) to fit the inner wall of the adsorption chamber (32) away from the adsorption hole (34). The outer wall of the second sliding plate (37) fits the inner wall of the adsorption chamber (32). When the adsorption tube (33) inhales air outward, the second sliding plate (37) moves toward the side close to the first sliding plate (35). The moving member (36) includes The invention comprises a first gear (361), a first rack (362) and a second rack (363), wherein the first gear (361) is rotatably mounted on the inner wall of the adsorption chamber (32), one end of the first rack (362) is fixed to the first sliding plate (35), and the other end is extended toward a side close to the second sliding plate (37), one end of the second rack (363) is fixed to the second sliding plate (37), and the other end is extended toward a side close to the first sliding plate (35), and the first rack (362) and the first gear (361) are meshed and transmitted.

6. A liquid nitrogen vacuum probe station according to claim 5, characterized in that: The second sliding plate (37) separates the adsorption chamber (32) into an adsorption area (321) and an adjustment area (322), and the first sliding plate (35) is located in the adsorption area (321); a rotating shaft (38) is installed on the bottom wall of the detection seat (3), and the rotating shaft (38) is rotatably installed on the inner wall of the detection station (11), and the detection seat (3) is rotatably installed in the detection station (11) through the rotating shaft (38); an adjustment groove (381) connected to the adjustment area (322) is opened on the end surface of the rotating shaft (38), and the adjustment groove (381) is used to absorb liquid nitrogen or hot gas.

7. A liquid nitrogen vacuum probe station according to claim 6, characterized in that: A limiting member (382) is arranged in the regulating groove (381), and the limiting member (382) is used to slow down the exhaust speed of the regulating groove (381) or the liquid discharge speed of the regulating groove (381).

8. A liquid nitrogen vacuum probe station according to claim 7, characterized in that: The limiting member (382) comprises a blocking plate (3821), a torsion spring and a limiting block (3822); one side of the blocking plate (3821) is hinged to the inner wall of the adjusting groove (381); the torsion spring is installed between the blocking plate (3821) and the inner wall of the adjusting groove (381); the torsion spring normally causes the blocking plate (3821) to be closed in the adjusting groove (381); the limiting block (3822) is used to abut against the blocking plate (3821) to control the opening and closing angle of the blocking plate (3821); the limiting block (3822) is installed on the inner wall of the adjusting groove (381), and the limiting block (3822) is located on the side of the blocking plate (3821) away from the adjusting area (322).

9. A liquid nitrogen vacuum probe station according to claim 3, characterized in that: A limit plate (7) is fitted on the top wall of the detection seat (3); the thickness of the limit plate (7) is less than the thickness of the chip; a plurality of mounting grooves (71) are provided on the surface of the limit plate (7); the shape of the mounting grooves (71) matches the shape of the chip; all mounting grooves (71) are arranged corresponding to all adsorption holes (34); each mounting groove (71) passes through the limit plate (7) and forms the mounting position (31); a connecting piece (72) is provided between the limit plate (7) and the detection seat (3); the limit plate (7) is detachably mounted on the detection seat (3) via the connecting piece (72).

10. A liquid nitrogen vacuum probe station according to claim 9, characterized in that: The top wall of the detection seat (3) is provided with a connecting hole (39), the lower surface of the limiting plate (7) is fixed with a connecting rod (73) inserted in the connecting hole (39), the side wall of the detection seat (3) is provided with a rotating hole (391) connected to the connecting hole (39), a rotating rod (392) is rotatably installed in the rotating hole (391), and one end of the rotating rod (392) extends into the connecting hole (39); the connecting member (72) comprises a first magnet (721), a second magnet (722) and a third magnet (723), the first magnet (721) is fixed to the connecting rod (73) away from the limiting plate ( 7), the second magnet (722) and the third magnet (723) are both fixed to the peripheral wall of the rotating rod (392) and located in the connecting hole (39), and the second magnet (722) and the third magnet (723) are arranged at intervals around the axial direction of the rotating rod (392), when the second magnet (722) rotates to be opposite to the first magnet (721), there is a magnetic attraction force between the first magnet (721) and the second magnet (722), and when the third magnet (723) rotates to be opposite to the first magnet (721), there is a repulsion force between the first magnet (721) and the third magnet (723).

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