Dynamic inclination compensation double-shaft air floating platform, control method and exposure machine

Abstract

The invention relates to the technical field of air floating structure manufacturing, in particular to a dynamic inclination compensation double-shaft air floating platform which comprises a substrate platform used for placing and positioning a glass substrate, a micro-motion device arranged at the bottom end of the substrate platform, and an X-axis dynamic compensation adjusting device and a Y-axis dynamic compensation adjusting device which are used for adjusting the flatness of an air floating mechanism, a plurality of air floating pads are densely distributed between the contact surfaces of the Y-axis dynamic compensation adjusting device and the micro-motion device and between the Y-axis dynamic compensation adjusting device and the X-axis dynamic compensation adjusting device, and the air floating pads are mutually spliced through fixing screws to form an air floating guide rail; a pressure equalizing groove is formed in the top end of each air floating cushion, and air pressure sensors used for detecting air film pressure changes are arranged in the pressure equalizing grooves and distributed at the four corners and the center of the air floating cushions at equal intervals. The double-shaft air floating platform can automatically carry out dynamic inclination compensation, the pitching inclination and the rolling inclination of the air floating platform are reduced, the motion precision of the air floating platform is improved, and therefore the machining precision of the exposure machine is improved.

Description

Technical Field

[0001] The present invention relates to the technical field of air-floating structure manufacturing, and in particular to a dual-axis air-floating platform with dynamic tilt compensation, a control method and an exposure machine. Background Art

[0002] In high-end manufacturing equipment such as semiconductor exposure machines and precision laser cutting machines, dual-axis air-floating platforms have become key components for achieving high-precision positioning and motion control due to their excellent stability, smoothness and load capacity. However, due to the inherent characteristics of the air-floating cushion, namely the existence of the air film and limited stiffness, when the platform is subjected to external forces or moves by itself, it is easy to pitch or roll. Especially at the moment of starting and stopping or when moving to the limit of the stroke, the change in the thickness of the air film may cause destructive scratches between the air-floating plates, seriously affecting the processing accuracy and equipment life of the exposure machine.

[0003] The Chinese invention patent with publication number CN117406561A discloses a load-removing device for the air-floating mechanism of a PCB exposure machine, wherein the air-floating mechanism is used to carry a horizontal workbench, and the load-removing device provides support force to the horizontal workbench for load-removing. The load-removing device is symmetrically arranged at both ends of the horizontal workbench, and the load-removing device includes a support beam horizontally fixed on the exposure machine bracket and a mounting box slidably connected to the support beam, and a vertical elastic space is formed in the mounting box, and the horizontal workbench is connected to the upper surface of the mounting box. The mounting box continuously provides a support force to the horizontal workbench on both sides, so that the load acting on the air-floating plate on the horizontal workbench is reduced, achieving a load-removing effect, so that the thickness of the air film between the air-floating plate and the air-floating shaft is increased, and the load-bearing capacity is improved.

[0004] However, the air floating platform of this scheme lacks an effective dynamic tilt compensation mechanism, and the unloading device relies on static balance or simple passive response to deal with the tilt problem. When the thickness of the air film changes, resulting in pitch and roll angles on the part above the air film, the air film cannot adaptively adjust the distribution of air pressure, and the air floating platform cannot effectively adjust its flatness, thereby affecting the processing accuracy of the exposure machine. Summary of the invention

[0005] In order to solve the technical defects raised in the above-mentioned background technology, the purpose of the present invention is to provide a dual-axis air floating platform, a control method and an exposure machine having the same which can automatically perform dynamic tilt compensation, so as to adjust the flatness of the workpiece table of the exposure machine, reduce mechanical friction, reduce noise and vibration, and effectively improve the pitch and roll tilt of the air film during the exposure process, thereby improving the processing accuracy and exposure quality of the exposure machine.

[0006] In order to achieve the above object, the present invention adopts the following technical solution:

[0007] A dual-axis air-floating platform with dynamic tilt compensation comprises a substrate platform for placing and positioning a glass substrate, a micro-motion device arranged at the bottom end of the substrate platform, and an X-axis dynamic compensation adjustment device and a Y-axis dynamic compensation adjustment device for adjusting the flatness of the micro-motion device, wherein a plurality of air-floating pads are densely distributed between the contact surfaces of the Y-axis dynamic compensation adjustment device and the micro-motion device and the X-axis dynamic compensation adjustment device, and the plurality of air-floating pads are spliced ​​with each other through fixing screws to form an air-floating guide rail; a pressure equalizing groove is provided at the top of each of the air-floating pads, and an air pressure sensor for detecting changes in air film pressure is arranged in the air-floating pad, and the air pressure sensors are equidistantly distributed at the four corners and the center of the air-floating pad; an air supply pipe joint is also arranged at one end of the air-floating pad, and the air supply pipe joint is connected to an air source through an air pipe to form an air supply pipeline; the air pressure sensor detects the pressure distribution of each air-floating pad, and obtains the air film thickness according to the pressure distribution, and dynamically adjusts the air film thickness of the corresponding air-floating pad by adjusting the air supply pressure of the corresponding air-floating pad, so that the pitch tilt and roll tilt of the air film are reduced.

[0008] Preferably, the micro-motion device includes a gravity compensator, a micro-motion base, an air floating pad mounting member and a driving connecting member, and a plurality of the gravity compensators are provided, one end of the plurality of gravity compensators is fixedly connected to the substrate platform, and the other end is connected to the micro-motion base; the air floating pad mounting member is symmetrically arranged between the micro-motion base and the X-axis dynamic compensation adjustment device, and a plurality of through holes are provided on the air floating pad mounting member; the driving connecting member is arranged on both sides of the air floating pad mounting member, and one end of the driving connecting member is electromagnetically connected to the Y-axis dynamic compensation adjustment device.

[0009] Preferably, the X-axis dynamic compensation adjustment device includes a base, a support frame located on both sides of the base, and an X-axis linear motor arranged at the top of the support frame, X-axis load-bearing guide rails are distributed in parallel on the top of the base, and an X-axis guide rail is arranged between the X-axis load-bearing guide rails, the X-axis load-bearing guide rails and the X-axis guide rails are arranged along the length direction of the base, and the X-axis load-bearing guide rails and the X-axis guide rails are respectively connected to the Y-axis dynamic compensation adjustment device through air floating pads; the X-axis linear motor is transmission-connected to the Y-axis dynamic compensation adjustment device to drive the Y-axis dynamic compensation adjustment device to move along the direction of the X-axis guide rails.

[0010] Preferably, the Y-axis dynamic compensation adjustment device includes a Y-axis moving platform, a Y-axis load-bearing guide rail arranged on the Y-axis moving platform, a Y-axis guide rail located between the Y-axis load-bearing guide rails, and a Y-axis linear motor for driving the Y-axis air-floating guide rail to slide. The Y-axis moving platform is arranged transversely perpendicular to the X-axis load-bearing guide rail, and the Y-axis load-bearing guide rail and the Y-axis guide rail are respectively connected to the micro-motion device through air-floating pads; the Y-axis linear motor is transmission-connected to the driving connecting piece to drive the micro-motion device to move in the direction of the Y-axis guide rail.

[0011] Preferably, the X-axis linear motor and the Y-axis linear motor are both driven by a magnetic guide rail structure, and the inner wall of the magnetic guide rail is densely covered with electromagnetic blocks. The magnetic guide rail is respectively connected to the Y-axis load-bearing guide rail and the driving connector with a magnetic driver.

[0012] Preferably, the air floating cushions include load-bearing air floating cushions and guiding air floating cushions, the load-bearing air floating cushions are laid flat on the X-direction load-bearing guide rail and the Y-direction load-bearing guide rail; the guiding air floating cushions are distributed on both side walls of the X-direction guide rail and the Y-direction guide rail.

[0013] A control method for dynamic tilt compensation comprises the following steps:

[0014] a. When the X-axis linear motor accelerates or decelerates, considering that gas delivery takes a certain amount of time, the air supply pressure of the load-bearing air floating cushion is adjusted in advance according to the preset time, and the real-time pressure data is obtained through the air pressure sensor in the load-bearing air floating cushion. The air supply volume of each load-bearing air floating cushion is dynamically calculated and adjusted to compensate for the pitch tilt caused by the acceleration or deceleration of the X-axis linear motor;

[0015] b. When the Y-axis linear motor moves to the two ends of its travel range, the pressure distribution of each load-bearing air cushion and the guide air cushion is detected, the change in air film thickness is calculated in real time, and the air supply pressure of the guide air cushion on the side with thinner air film is automatically increased to narrow the gap in air film thickness on both sides.

[0016] Preferably, in step a, by establishing a mathematical model of the relationship between air film thickness and pressure distribution, combined with the acceleration / deceleration curve of the X-axis linear motor, the air supply pressure of the air floating cushion on the inclined side is calculated and adjusted to ensure that the change in air film thickness does not exceed a preset threshold.

[0017] Preferably, in step b, a pressure distribution detection system is integrated to monitor and compare the air film thickness of the air floating cushions on the left and right sides in real time, and a PID control algorithm is used to adjust the air supply pressure to achieve rapid response and precise compensation.

[0018] An exposure machine comprises the above-mentioned dual-axis air-floating platform with dynamic tilt compensation.

[0019] In summary, the beneficial effects of the present invention are:

[0020] The present invention uses multiple air pressure sensors to detect and determine the pressure distribution of each air flotation cushion, thereby accurately determining the air film thickness of each air flotation cushion, and then dynamically adjusts the air film thickness of the corresponding air flotation cushion by adjusting the air supply pressure of the corresponding air flotation cushion, thereby reducing the inclination of the upper part of the air film, improving the movement accuracy of the air flotation platform, and further achieving the adjustment of the flatness of the workpiece table of the exposure machine, reducing mechanical friction, reducing noise and vibration, and effectively improving the problem of pitch and roll tilt of the air film during the exposure process, thereby improving the processing accuracy and exposure quality of the exposure machine. BRIEF DESCRIPTION OF THE DRAWINGS

[0021] Figure 1 It is a structural schematic diagram of a dual-axis air-floating platform for automatically performing dynamic tilt compensation according to the present invention;

[0022] Figure 2 It is a schematic diagram of the internal structure of the dual-axis air-floating platform for automatic dynamic tilt compensation of the present invention;

[0023] Figure 3 It is a top view of the dual-axis air-floating platform for automatic dynamic tilt compensation of the present invention;

[0024] Figure 4 yes Figure 3 Sectional view of the AA plane;

[0025] Figure 5 yes Figure 3 Sectional view of the middle BB plane;

[0026] Figure 6 It is a structural schematic diagram of the X-axis dynamic compensation adjustment device in the present invention;

[0027] Figure 7 yes Figure 6 A magnified view of the structure at a in the middle;

[0028] Figure 8 It is a structural schematic diagram of the Y-axis dynamic compensation adjustment device in the present invention;

[0029] Fig. 9 It is a schematic diagram of the structure of a single air flotation cushion in the present invention;

[0030] Fig.10 It is a schematic diagram of automatic dynamic compensation adjustment of the air film in the X-direction pitch tilt or roll tilt of the present invention.

[0031] 1. Substrate platform; 2. Micro-motion device; 21. Gravity compensator; 22. Micro-motion base; 23. Air floating cushion mounting; 24. Driving connector; 3. X-axis dynamic compensation adjustment device; 31. Base; 32. Support frame; 33. X-axis linear motor; 34. X-axis load-bearing guide rail; 35. X-axis guide rail; 4. Y-axis dynamic compensation adjustment device; 41. Y-axis moving platform; 42. Y-axis load-bearing guide rail; 43. Y-axis guide rail; 44. Y-axis linear motor; 5. Air floating cushion; 51. Load-bearing air floating cushion; 52. Guide air floating cushion; 53. Pressure equalizing groove; 6. Air pressure sensor; 7. Air supply pipe joint; 8. Electromagnetic block; 9. Magnetic drive; 10. Air film. DETAILED DESCRIPTION

[0032] The following will be combined with the accompanying drawings in the embodiments of the present invention to clearly and completely describe the technical solutions in the embodiments of the present invention. Obviously, the described embodiments are only part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field belong to the scope of protection of the present invention.

[0033] Those skilled in the art should understand that, in the disclosure of the present invention, the orientation or position relationship indicated by the terms "longitudinal", "lateral", "up", "down", "front", "back", "left", "right", "vertical", "horizontal", "top", "bottom", "inside", "outside", etc. are based on the orientation or position relationship shown in the drawings, which are only for the convenience of describing the present invention and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, be constructed and operate in a specific orientation. Therefore, the above terms should not be understood as limiting the present invention.

[0034] In addition, the terms "installed", "set", "provided with", "connected", and "connected" should be understood in a broad sense. For example, it can be a fixed connection, a detachable connection, or an integral structure; it can be a mechanical connection, or an electrical connection; it can be a direct connection, or an indirect connection through an intermediate medium, or it can be an internal connection between two devices, elements, or components. For those of ordinary skill in the art, the specific meanings of the above terms in the present invention can be understood according to specific circumstances.

[0035] In the description of the present invention, if there are words such as "several", it means one or more, "more" means two or more, "greater than", "less than", "exceed" etc. are understood as not including the number itself, and "above", "below", "within" etc. are understood as including the number itself. If there are descriptions of first, second, and third, they are only used to distinguish technical features, and cannot be understood as indicating or implying relative importance or implicitly indicating the number of the indicated technical features or implicitly indicating the order of the indicated technical features.

[0036] The following is combined with Figure 1-10 , an embodiment of a dual-axis air-floating platform with dynamic tilt compensation, a control method and an exposure machine of the present invention is further described in detail.

[0037] Embodiment 1

[0038] A dual-axis air-floating platform with dynamic tilt compensation, such as Figure 1 and Fig. 9As shown, it includes a substrate platform 1 for placing and positioning a glass substrate, a micro-motion device 2 arranged at the bottom of the substrate platform 1, and an X-axis dynamic compensation adjustment device 3 and a Y-axis dynamic compensation adjustment device 4 for adjusting the flatness of the air floating mechanism. A plurality of air floating pads 5 are densely distributed between the contact surfaces of the Y-axis dynamic compensation adjustment device 4 and the micro-motion device 2 and the X-axis dynamic compensation adjustment device 3, respectively. The plurality of air floating pads 5 are spliced ​​with each other through fixing screws to form an air floating guide rail; a pressure equalizing groove 53 is opened at the top of each air floating pad 5, and an air pressure sensor 6 for detecting the pressure change of the air film 10 is arranged in the air floating pad 5, and the air pressure sensors 6 are equidistantly distributed at the four corners and the center of the air floating pad 5; a throttle hole is arranged in the gas bearing 5 The throttling hole can be a small hole throttling, a porous medium throttling or a micropore throttling; one end of the gas bearing 5 is also provided with a gas supply pipe joint 7 connected to the throttling hole, and the gas pipe joint is connected to the gas source through the gas pipe to form a gas supply pipeline; the gas bearing 5 is infused with high-pressure gas by the gas supply pipeline, so as to form a bearing gas film between the outlet surface of the throttling hole of the gas bearing 5 and the bearing surface of the guide rail; there is a corresponding relationship between the pressure distribution of the gas film and the thickness of the gas film. After the air pressure sensor 6 detects the pressure distribution of each gas bearing 5 and obtains the thickness of the gas film 10 through the pressure distribution, the thickness of the gas film 10 of the corresponding gas bearing 5 is dynamically adjusted by adjusting the gas supply pressure of the corresponding gas bearing 5, so that the pitch tilt and roll tilt of the gas film 10 are reduced.

[0039] Specifically, preloaded magnetic steel is spliced ​​between two adjacent rows of air-floating cushions 5, and the preloaded magnetic steel is used to quickly respond to the inflation speed of the air-floating cushions 5, so that the pressure distribution in the air-floating cushions 5 can be instantly adjusted when the air film 10 is pitched or rolled, thereby changing the thickness of the air film 10 to ensure that it is always flat. Among them, the air-floating cushions 5 include load-bearing air-floating cushions 51 and guide air-floating cushions 52, and the load-bearing air-floating cushions 51 are laid flat on the X-direction load-bearing guide rails 34 and the Y-direction load-bearing guide rails 42; the guide air-floating cushions 52 are distributed on the two side walls of the X-direction guide rails 35 and the Y-direction guide rails 43.

[0040] like Fig.10 As shown, by using multiple air pressure sensors 6 to detect and determine the pressure distribution of each air floating cushion 5, the thickness of the air film 10 of each air floating cushion 5 can be determined more accurately, and then the thickness of the air film 10 of the corresponding air floating cushion 5 can be dynamically adjusted by adjusting the air supply pressure of the corresponding air floating cushion 5, so that the inclination of the upper part of the air film 10 is reduced, the movement accuracy of the air floating platform is improved, and the positioning accuracy of the glass substrate and the processing accuracy of the exposure machine are effectively improved.

[0041] It is worth noting that in addition to using multiple air pressure sensors 6 to detect the thickness of the air film in real time, the present invention can also add two non-contact displacement sensors at both ends of the Y-axis platform 41 to measure the distance between the Y-axis load-bearing guide rail 42 and the X-axis load-bearing guide rail 34, thereby judging the inclination of the dual-axis air floating platform, and then adjusting the air supply pressure of the gas bearing in the corresponding area according to the inclination, thereby ensuring that the dual-axis air floating platform does not tilt, effectively improving the motion accuracy, positioning accuracy, and processing accuracy.

[0042] In this embodiment, if Figure 2 As shown, the micro-motion device 2 includes a gravity compensator 21, a micro-motion base 22, an air floating pad mounting member 23 and a driving connecting member 24. A plurality of gravity compensators 21 are provided, one end of the plurality of gravity compensators 21 is fixedly connected to the substrate platform 1, and the other end is connected to the micro-motion base 22; the air floating pad mounting member 23 is symmetrically arranged between the micro-motion base 22 and the X-axis dynamic compensation adjustment device 3, and a plurality of through holes are opened on the air floating pad mounting member 23; the driving connecting member 24 is arranged on both sides of the air floating pad mounting member 23, and one end of the driving connecting member 24 is electromagnetically connected to the Y-axis dynamic compensation adjustment device 4.

[0043] Specifically, the gravity compensator 21 can perform gravity compensation for the placement of the glass substrate on the substrate platform 1, so that the substrate platform 1 remains stable; the micro-motion base 22 connected to the bottom end of the gravity compensator 21 can fine-tune the position according to the real-time gravity change to avoid tilting and affecting the flatness of the substrate platform 1. At the same time, the air floating pad mounting member 23 connected to the bottom end of the micro-motion base 22 can be installed with air floating pads 5 in batches, so that under the action of the air floating pads 5, the friction between the micro-motion device 2 and the substrate platform 1 can be reduced, and the transmission speed is faster and more accurate; in order to drive the micro-motion device 2 to slide on the Y-axis dynamic compensation adjustment device 4, drive connectors 24 are also provided on both sides of the air floating pad mounting member 23, and the bottom end of the drive connector 24 is electromagnetically connected to the Y-axis linear motor 44. The transmission principle is similar to the magnetic levitation technology, so it will not be repeated here.

[0044] In this embodiment, if Figure 3-6 As shown, the X-axis dynamic compensation adjustment device 3 includes a base 31, support frames 32 located on both sides of the base 31, and an X-axis linear motor 33 arranged at the top of the support frame 32. X-axis load-bearing guide rails 34 are distributed in parallel on the top of the base 31, and X-axis guide rails 35 are arranged between the X-axis load-bearing guide rails 34. The X-axis load-bearing guide rails 34 and the X-axis guide rails 35 are arranged along the length direction of the base 31, and the X-axis load-bearing guide rails 34 and the X-axis guide rails 35 are respectively connected to the Y-axis dynamic compensation adjustment device 4 through air floating pads 5; the X-axis linear motor 33 is connected to the Y-axis dynamic compensation adjustment device 4 in transmission connection to drive the Y-axis dynamic compensation adjustment device 4 to move along the direction of the X-axis guide rails 35.

[0045] Specifically, during the dynamic compensation adjustment of the X-axis, when the X-axis linear motor 33 is accelerating or decelerating, thrust will be generated on the part above the air cushion 5 on the X-axis load-bearing guide rail 34, and the thrust will cause the part above the air cushion 5 to be subjected to torque, thereby causing pitch tilt; and in the previous stage before the X-axis linear motor 33 is about to start or change speed, the system actively increases or decreases the air supply pressure of the load-bearing air cushion 51 in the corresponding area, monitors the pressure distribution in real time through the built-in air pressure sensor 6, forms a feedback loop, and finely adjusts the air supply pressure to offset the torque effect caused by the acceleration or deceleration of the X-axis linear motor 33, and prevents the air floating platform from having unnecessary pitch tilt. This method can ensure the balanced distribution of the thickness of the air film 10 through predictive pressure adjustment and immediate feedback control, and avoid the risk of scratches caused by excessive deviation of the air film 10.

[0046] In this embodiment, if Figure 7 , 8 As shown, the Y-axis dynamic compensation adjustment device 4 includes a Y-axis moving table 41, a Y-axis load-bearing guide rail 42 arranged on the Y-axis moving table 41, a Y-axis guide rail 43 located between the Y-axis load-bearing guide rail 42, and a Y-axis linear motor 44 for driving the Y-axis air-floating guide rail to slide. The Y-axis moving table 41 is arranged horizontally and perpendicular to the X-axis load-bearing guide rail 34, and the Y-axis load-bearing guide rail 42 and the Y-axis guide rail 43 are respectively connected to the micro-motion device 2 through the air-floating pad 5; the Y-axis linear motor 44 is transmission-connected to the driving connecting member 24 to drive the micro-motion device 2 to move along the direction of the Y-axis guide rail 43.

[0047] Specifically, when the air cushion 5 on the Y-axis load-bearing guide rail 42 moves to the two ends of the stroke, the effective load borne by the load-bearing air cushion 51 and the guide air cushion 52 on the left and right sides will change asymmetrically, thereby causing a difference in the thickness of the air film 10, inducing the problem of roll tilt. Therefore, during the Y-axis transmission process, the system collects the pressure information of the load-bearing air cushion 51 and the guide air cushion 52 on the left and right sides in real time through the air pressure sensor 6, and constructs a data map reflecting the change in the thickness of the air film 10. Then, based on this information base, the system intelligently determines which side of the air film 10 is relatively weak, and specifically increases the air supply pressure of the air cushion 5 on that side until the thickness of the air film 10 on both sides tends to be consistent, thereby eliminating the roll tilt. This series of compensation measures are automatically completed under the guidance of the closed-loop control logic, ensuring the accuracy and timeliness of the compensation process.

[0048] In this embodiment, both the X-axis linear motor 33 and the Y-axis linear motor 44 are driven by a magnetic guide rail structure, and the inner wall of the magnetic guide rail is densely covered with electromagnetic blocks 8, and the magnetic guide rail is respectively connected to the Y-axis load-bearing guide rail 42 and the driving connector 24 with a magnetic driver 9.

[0049] Specifically, the X-axis linear motor 33 and the Y-axis linear motor 44 both use magnetic guide rails that can cooperate with the magnetic driver 9 through the principle of electromagnetic induction, so as to quickly drive the X-axis guide rail 35 and the Y-axis guide rail 43 to move, thereby improving the conveying efficiency of the dual-axis air floating platform.

[0050] Embodiment 2

[0051] A control method for dynamic tilt compensation comprises the following steps:

[0052] a) When the X-axis linear motor 33 accelerates or decelerates, considering that gas delivery requires a certain amount of time, the gas supply pressure of the load-bearing air floating cushion 51 is adjusted in advance according to a preset time, and the real-time pressure data is obtained through the air pressure sensor 6 in the load-bearing air floating cushion 51, and the gas supply amount of each load-bearing air floating cushion 51 is dynamically calculated and adjusted to compensate for the pitch tilt caused by the acceleration or deceleration of the X-axis linear motor 33;

[0053] b) When the Y-axis linear motor 44 moves to the two ends of its travel range, the pressure distribution of each load-bearing air cushion 51 and the guide air cushion 52 is detected, and the thickness change of the air film 10 is calculated in real time, and the air supply pressure of the guide air cushion 52 on the thinner side of the air film 10 is automatically increased to narrow the thickness difference of the air film 10 on both sides, thereby reducing or eliminating the roll tilt.

[0054] In this embodiment, in step a), by establishing a mathematical model of the relationship between the thickness of the air film 10 and the pressure distribution, combined with the acceleration / deceleration curve of the linear motor, the air supply pressure of the air floating cushion 5 on the inclined side is calculated and adjusted to ensure that the thickness change of the air film 10 does not exceed the preset threshold.

[0055] In this embodiment, in step b), a pressure distribution detection system is specifically integrated to monitor and compare the thickness of the air film 10 of the air floating cushions 5 on the left and right sides in real time, and a PID control algorithm is used to adjust the air supply pressure to achieve rapid response and precise compensation.

[0056] Specifically, in addition to the above two key technical points, the method of the present invention also incorporates a series of auxiliary mechanisms to form a complete and efficient dynamic tilt compensation system: including

[0057] Real-time monitoring system: continuously tracks the operating status of the air cushion 5, including but not limited to important indicators such as the thickness of the air film 10, pressure distribution, temperature fluctuation, etc., to ensure that any abnormal situation can be detected and handled in the first time, thereby minimizing the probability of sudden failure.

[0058] Adaptive correction mechanism: Based on machine learning algorithms, the optimal compensation strategy is extracted from the actual operation data accumulated over a long period of time, and it is continuously updated to make the compensation effect closer to the ideal goal, further enhancing the stability and robustness of the system.

[0059] Embodiment 3

[0060] An exposure machine adopts the above-mentioned dual-axis air-floating platform with dynamic tilt compensation as a workpiece stage, so that when the exposure machine is working, the workpiece can be transported quickly and smoothly, effectively improving the positioning accuracy of the glass substrate to be processed and the processing accuracy of the exposure machine.

[0061] Working principle of the present invention:

[0062] During the process of conveying workpieces on the dual-axis air floating platform, the X-axis dynamic compensation adjustment device 3 and the Y-axis dynamic compensation adjustment device 4 can perform synchronous dynamic compensation according to the processing requirements. By using multiple air pressure sensors 6 to detect and determine the pressure distribution of each air floating cushion 5, the thickness of the air film 10 of each air floating cushion 5 can be more accurately determined, and then the thickness of the air film 10 of the corresponding air floating cushion 5 can be dynamically adjusted by adjusting the air supply pressure of the corresponding air floating cushion 5, so that the inclination of the upper part of the air film 10 is reduced, thereby improving the movement accuracy of the air floating platform.

[0063] The embodiments of this specific implementation are all preferred embodiments of the present application, and are not intended to limit the protection scope of the present application. The same components are represented by the same figure marks. Therefore, any equivalent changes made based on the structure, shape, and principle of the present application should be included in the protection scope of the present application.

Claims

1. A dual-axis air floating platform with dynamic tilt compensation, comprising a substrate platform for placing and positioning a glass substrate, a micro-motion device arranged at the bottom of the substrate platform, and an X-axis dynamic compensation adjustment device and a Y-axis dynamic compensation adjustment device for adjusting the flatness of the micro-motion device, characterized in that: A plurality of air cushions are densely distributed between the contact surfaces of the Y-axis dynamic compensation adjustment device and the micro-motion device and the X-axis dynamic compensation adjustment device, and the plurality of air cushions are spliced ​​with each other by fixing screws to form an air floating guide rail; a pressure equalizing groove is provided at the top of each air cushion, and an air pressure sensor for detecting changes in air film pressure is provided in the air cushion, and the air pressure sensors are equidistantly distributed at the four corners and the center of the air cushion; an air supply pipe joint is also provided at one end of the air cushion, and the air supply pipe joint is connected to the air source through an air pipe to form an air supply pipeline; the air pressure sensor detects the pressure distribution of each air cushion, and obtains the air film thickness according to the pressure distribution, and dynamically adjusts the air film thickness of the corresponding air cushion by adjusting the air supply pressure of the corresponding air cushion, so that the pitch tilt and roll tilt of the air film are reduced.

2. The dual-axis air-floating platform with dynamic tilt compensation according to claim 1, characterized in that: The micro-motion device includes a gravity compensator, a micro-motion base, an air floating pad mounting part and a driving connecting part. There are multiple gravity compensators, one end of each of which is fixedly connected to the substrate platform, and the other end is connected to the micro-motion base; the air floating pad mounting part is symmetrically arranged between the micro-motion base and the X-axis dynamic compensation adjustment device, and a plurality of through holes are opened on the air floating pad mounting part; the driving connecting part is arranged on both sides of the air floating pad mounting part, and one end of the driving connecting part is electromagnetically connected to the Y-axis dynamic compensation adjustment device.

3. The dual-axis air-floating platform with dynamic tilt compensation according to claim 2, characterized in that: The X-axis dynamic compensation adjustment device includes a base, support frames located on both sides of the base, and an X-axis linear motor arranged at the top of the support frame. X-axis load-bearing guide rails are distributed in parallel on the top of the base, and an X-axis guide rail is arranged between the X-axis load-bearing guide rails. The X-axis load-bearing guide rails and the X-axis guide rails are arranged along the length direction of the base, and the X-axis load-bearing guide rails and the X-axis guide rails are respectively connected to the Y-axis dynamic compensation adjustment device through air floating pads; the X-axis linear motor is transmission-connected to the Y-axis dynamic compensation adjustment device to drive the Y-axis dynamic compensation adjustment device to move along the direction of the X-axis guide rails.

4. The dual-axis air-floating platform with dynamic tilt compensation according to claim 3, characterized in that: The Y-axis dynamic compensation adjustment device includes a Y-axis moving platform, a Y-axis load-bearing guide rail arranged on the Y-axis moving platform, a Y-axis guide rail located between the Y-axis load-bearing guide rails, and a Y-axis linear motor for driving the Y-axis air-floating guide rail to slide. The Y-axis moving platform is arranged transversely and perpendicular to the X-axis load-bearing guide rail, and the Y-axis load-bearing guide rail and the Y-axis guide rail are respectively connected to the micro-motion device through air-floating pads; the Y-axis linear motor is transmission-connected to the driving connecting piece to drive the micro-motion device to move along the direction of the Y-axis guide rail.

5. The dual-axis air-floating platform with dynamic tilt compensation according to claim 4, characterized in that: The X-axis linear motor and the Y-axis linear motor are both driven by a magnetic guide rail structure, and the inner wall of the magnetic guide rail is densely covered with electromagnetic blocks. The magnetic guide rail is respectively connected to the Y-axis load-bearing guide rail and the driving connector with a magnetic driver.

6. The dual-axis air-floating platform with dynamic tilt compensation according to claim 1, characterized in that: The air floating cushions include load-bearing air floating cushions and guiding air floating cushions. The load-bearing air floating cushions are laid flat on the X-direction load-bearing guide rails and the Y-direction load-bearing guide rails; the guiding air floating cushions are distributed on the two side walls of the X-direction guide rails and the Y-direction guide rails.

7. A control method for dynamic tilt compensation, comprising the following steps; a. When the X-axis linear motor accelerates or decelerates, considering that gas delivery takes a certain amount of time, the air supply pressure of the load-bearing air floating cushion is adjusted in advance according to the preset time, and the real-time pressure data is obtained through the air pressure sensor in the load-bearing air floating cushion. The air supply volume of each load-bearing air floating cushion is dynamically calculated and adjusted to compensate for the pitch tilt caused by the acceleration or deceleration of the X-axis linear motor; b. When the Y-axis linear motor moves to the two ends of its travel range, the pressure distribution of each load-bearing air cushion and the guide air cushion is detected, the change in air film thickness is calculated in real time, and the air supply pressure of the guide air cushion on the side with thinner air film is automatically increased to narrow the gap in air film thickness on both sides.

8. The control method for dynamic tilt compensation according to claim 7, characterized in that: In step a, a mathematical model of the relationship between air film thickness and pressure distribution is established, and the air supply pressure of the air floating cushion on the tilted side is calculated and adjusted in combination with the acceleration / deceleration curve of the X-axis linear motor to ensure that the change in air film thickness does not exceed a preset threshold.

9. The control method for dynamic tilt compensation according to claim 7, characterized in that: In the step b, specifically, a pressure distribution detection system is integrated to monitor and compare the air film thickness of the air floating cushions on the left and right sides in real time, and a PID control algorithm is used to adjust the air supply pressure to achieve rapid response and precise compensation.

10. An exposure machine, comprising the dual-axis air-floating platform with dynamic tilt compensation according to any one of claims 1 to 6.

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