X-ray reciprocal space multi-scale imaging system

Abstract

The invention relates to the technical field of material detection equipment, in particular to an X-ray reciprocal space multi-scale imaging system which is characterized in that an X-ray collimation and grating integration device is used for modulating cone-beam X-rays to obtain fan-beam X-rays; the grating device is used for preliminarily modulating an X-ray small-angle scattering signal generated after the fan-beam X-ray irradiates the sample to be detected; the grating and coding hole integration device is provided with a third grating and a coding hole, and the third grating is used for modulating the preliminarily modulated X-ray small-angle scattering signal again to obtain a modulated X-ray small-angle scattering signal; the coding hole is used for modulating an X-ray diffraction signal generated after the fan-beam X-ray irradiates the sample to be detected to obtain a modulated X-ray diffraction signal; and the detector is used for receiving the modulated X-ray small-angle scattering signal and the X-ray diffraction signal. According to the invention, tomography of the to-be-detected sample can be realized integrally and automatically, and crystal structure and mesoscale information of internal voxels can be obtained efficiently.

Description

Technical Field

[0001] The present disclosure relates to the technical field of material detection equipment, and in particular to an X-ray reciprocal space multi-scale imaging system. Background Art

[0002] With the rapid development of advanced materials research and radiological diagnostics, the demand for special tomographic detection of various new materials or diseased tissues is increasing day by day. In a large number of specific application scenarios, the imaging system needs to be able to obtain the crystal structure information and mesoscopic scale information inside the sample to be tested. For example, when performing tomographic detection of lithium battery cells, the above indicators can efficiently measure the performance parameters of lithium batteries. However, traditional X-ray tomography technology mainly relies on the physical laws of X-ray attenuation in matter for imaging, and cannot provide internal crystal structure information and mesoscopic scale information of the sample being tested. Therefore, it is of great significance to design an imaging system that can efficiently obtain the internal crystal structure information and mesoscopic scale information of the object. Summary of the invention

[0003] In view of this, the present disclosure proposes an X-ray reciprocal space multi-scale imaging system.

[0004] According to one aspect of the present disclosure, there is provided an X-ray reciprocal space multi-scale imaging system, the system comprising: an X-ray source, an X-ray collimation and grating integrated device, a grating device, a grating and coded hole integrated device, and a detector; wherein the X-ray source is used to generate cone-beam X-rays; the X-ray collimation and grating integrated device is configured with a first grating and an X-ray collimator, which are used to modulate the cone-beam X-rays to obtain fan-beam X-rays; the grating device is configured with a second grating, which is used to preliminarily modulate the X-ray small-angle scattering signal generated after the fan-beam X-rays are irradiated to the sample to be tested; the grating and coded hole integrated device is configured with a third grating and a coded hole, The third grating is used to re-modulate the X-ray small-angle scattering signal preliminarily modulated by the second grating to obtain a modulated X-ray small-angle scattering signal; the coded hole is used to modulate the X-ray diffraction signal generated after the fan beam X-ray is irradiated on the sample to be tested to obtain a modulated X-ray diffraction signal; the detector is used to receive the modulated X-ray small-angle scattering signal and the modulated X-ray diffraction signal; the modulated X-ray small-angle scattering signal and the modulated X-ray diffraction signal are used to generate a tomographic image of the sample to be tested, and the tomographic image contains the crystal structure and mesoscopic scale information inside the sample to be tested.

[0005] In one possible implementation, the tomographic image of the sample to be tested includes a first tomographic image generated based on the modulated X-ray small-angle scattering signal, and a second tomographic image generated based on the modulated X-ray diffraction signal; wherein the voxels in the sample to be tested corresponding to the same pixel point in the first tomographic image and the second tomographic image are the same.

[0006] In a possible implementation manner, the X-ray source is a light source equipped with an X-ray tube.

[0007] In a possible implementation, the grating device is equipped with an electric translation stage for driving the second grating to perform phase stepping.

[0008] In a possible implementation, the coded hole is a light-transmitting hole on a material plate whose X-ray absorption coefficient exceeds a preset value.

[0009] In a possible implementation manner, the third grating and the coded aperture are integrated on the same substrate.

[0010] In a possible implementation, the groove direction of any one of the first grating, the second grating and the third grating is horizontal, vertical or inclined; and / or the type of any one of the first grating, the second grating and the third grating is an absorption grating or a phase grating.

[0011] In a possible implementation, the system further includes a control computer for controlling one or more of the X-ray source, the X-ray collimation and grating integrated device, the grating device, and the grating and coded hole integrated device.

[0012] In a possible implementation, the system further includes: a radiation shielding device, wherein the X-ray source, the X-ray collimation and grating integration device, the grating device, the grating and coding hole integration device, and the detector are installed in the radiation shielding device.

[0013] In a possible implementation, the system further includes an electric sample displacement stage for driving the sample to be tested to move for electronic computed tomography (CT), digital X-ray (DR) or spiral CT.

[0014] In the disclosed embodiment, X-ray diffraction imaging and X-ray small-angle scattering imaging are integrated into the same system. This is much better than traditional X-ray imaging technology, and can simultaneously collect and utilize diffraction signals of large-angle scattering (i.e., X-ray diffraction signals) and dark field signals of small-angle scattering (i.e., X-ray small-angle scattering signals); since the laws of X-ray diffraction and X-ray small-angle scattering are related to the laws of the reciprocal space lattice of the crystal structure of the sample to be tested, the detector in this system simultaneously receives multi-scale (also called multi-characteristic or multi-contrast) signals (i.e., modulated X-ray small-angle scattering signals and modulated X-ray diffraction signals), which can be used to generate a tomographic image of the sample to be tested, and the tomographic image contains the crystal structure and mesoscopic scale information inside the sample to be tested, thereby realizing multi-scale reciprocal space imaging. In this way, the system can realize integrated and automated tomographic imaging of the samples to be tested, and efficiently obtain the crystal structure information and mesoscopic scale information of the voxels inside the samples to be tested. Since different samples have different crystal types and mesoscopic structures, combining these two types of information can help to better study the characteristics of the samples; it can meet the needs of special imaging of samples such as new materials and diseased tissues, and greatly promote the development of fields such as materials science and medical diagnostics.

[0015] Further features and aspects of the present disclosure will become apparent from the following detailed description of exemplary embodiments with reference to the attached drawings. BRIEF DESCRIPTION OF THE DRAWINGS

[0016] The accompanying drawings, which are incorporated in and constitute a part of the specification, illustrate exemplary embodiments, features, and aspects of the disclosure and, together with the description, serve to explain the principles of the disclosure.

[0017] Figure 1 A schematic structural diagram of an X-ray reciprocal space multi-scale imaging system according to an embodiment of the present disclosure is shown.

[0018] Figure 2 A schematic diagram showing an electric sample displacement stage and a movement mode of a sample 3 to be tested according to an embodiment of the present disclosure is shown.

[0019] Figure 3 A schematic diagram showing the groove direction of a grating according to an embodiment of the present disclosure.

[0020] Figure 4 A schematic structural diagram of another X-ray reciprocal space multi-scale imaging system according to an embodiment of the present disclosure is shown.

[0021] Figure 5 A schematic structural diagram of an X-ray collimation and grating integration device 2 according to an embodiment of the present disclosure is shown.

[0022] Figure 6A schematic structural diagram of a grating device 4 according to an embodiment of the present disclosure is shown.

[0023] Figure 7 A schematic structural diagram of a grating and coded hole integrated device 5 according to an embodiment of the present disclosure is shown.

[0024] Figure 8 A workflow diagram of an X-ray reciprocal space multi-scale imaging system according to an embodiment of the present disclosure is shown. DETAILED DESCRIPTION

[0025] Various exemplary embodiments, features and aspects of the present disclosure will be described in detail below with reference to the accompanying drawings. The same reference numerals in the accompanying drawings represent elements with the same or similar functions. Although various aspects of the embodiments are shown in the accompanying drawings, the drawings are not necessarily drawn to scale unless otherwise specified.

[0026] References to "one embodiment" or "some embodiments" etc. described in this specification mean that a particular feature, structure or characteristic described in conjunction with the embodiment is included in one or more embodiments of the present application. Thus, the phrases "exemplary", "in one embodiment", "in some other embodiments", "in some other embodiments", etc. appearing in different places in this specification do not necessarily all refer to the same embodiment, but mean "one or more but not all embodiments", unless otherwise specifically emphasized in other ways. The terms "including", "comprising", "having" and their variations all mean "including but not limited to", unless otherwise specifically emphasized in other ways.

[0027] In this application, "at least one" means one or more, and "plurality" means two or more. "And / or" describes the association relationship of associated objects, indicating that three relationships may exist. For example, A and / or B can mean: including the existence of A alone, the existence of A and B at the same time, and the existence of B alone, where A and B can be singular or plural. The character " / " generally indicates that the previous and next associated objects are in an "or" relationship. "At least one of the following items" or similar expressions refers to any combination of these items, including any combination of single items or plural items. For example, at least one of a, b, or c can mean: a, b, c, ab, ac, bc, or abc, where a, b, c can be single or multiple.

[0028] In addition, in order to better illustrate the present disclosure, numerous specific details are given in the following specific embodiments. It should be understood by those skilled in the art that the present disclosure can also be implemented without certain specific details. In some examples, methods, means, components and circuits well known to those skilled in the art are not described in detail in order to highlight the subject matter of the present disclosure.

[0029] Figure 1 FIG. 2 is a schematic diagram showing the structure of an X-ray reciprocal space multi-scale imaging system according to an embodiment of the present disclosure. Figure 1 As shown, the system may include: an X-ray source 1, an X-ray collimation and grating integrated device 2, a grating device 4, a grating and coding hole integrated device 5, and a detector 6; the system may be applied to detect a sample to be tested 3 (also referred to as an object to be tested), wherein: The X-ray source 1 is used to generate cone-beam X-rays; Figure 1 The propagation direction of the X-rays shown in is the transmission direction of the cone beam X-rays. As an example, the X-ray source 1 may be a light source equipped with an X-ray tube, that is, the X-ray source 1 may use a conventional X-ray light source, such as a liquid target light source, which can emit high-brightness cone beam X-rays. As another example, the X-ray source 1 may be other light sources such as a synchrotron radiation light source to meet different needs. It should be noted that the X-ray source 1 preferably uses a conventional X-ray source, which can meet the working requirements in most scenarios, so there is no need to use a large scientific device such as a synchrotron radiation light source; in some special scenarios with high requirements on the light source, the X-ray source 1 can be replaced with a synchrotron radiation light source.

[0030] The X-ray collimation and grating integrated device 2 is configured with a first grating and an X-ray collimator, which are used to modulate the cone-beam X-rays generated by the X-ray source 1 to obtain fan-beam X-rays; illustratively, the X-ray collimation and grating integrated device 2 is arranged on the propagation path of the cone-beam X-rays, so that the X-ray collimation and grating integrated device 2 can receive the cone-beam X-rays. The cone-beam X-rays can pass through the X-ray collimator and the first grating in sequence, and after the cone-beam X-rays pass through the X-ray collimator, the cone-beam X-rays are collimated into a fan-beam X-ray, and after the fan-beam X-rays pass through the first grating, they are modulated into fan-beam X-rays with periodic arrangement of light and dark stripes.

[0031] Exemplarily, the system may also be configured with a sample stage 7, which is disposed on the propagation path of the fan beam X-rays, and the sample 3 to be tested may be placed on the sample stage 7 so that the fan beam X-rays irradiate the sample 3 to be tested, and the sample 3 to be tested generates an X-ray diffraction signal and an X-ray small-angle scattering signal after being irradiated by the fan beam X-rays. It should be noted that in the embodiments of the present disclosure, the type, structure, and shape of the sample 3 to be tested are not limited. Exemplarily, the type of the sample 3 to be tested may be a new material, a medical sample, etc., the structure of the sample 3 to be tested may be a single crystal sample, a polycrystalline sample, an amorphous sample, etc., and the shape of the sample 3 to be tested may be a regular shape or an irregular shape.

[0032] In a possible implementation, the sample stage 7 may be an electric sample displacement stage. The electric sample displacement stage may be used to drive the sample 3 to be tested to move for computer tomography (CT), digital radiography (DR) or spiral CT, etc. For example, during the operation of the system, the electric sample displacement stage may drive the sample 3 to be tested to move according to the set imaging parameters and requirements, thereby meeting different imaging requirements. Figure 2 FIG. 2 is a schematic diagram showing a motorized sample displacement stage and a moving mode of a sample 3 to be tested according to an embodiment of the present disclosure. Figure 2 As shown, the sample 3 to be tested can move in four ways: moving along the x-direction, moving along the y-direction, moving along the z-direction, and rotating with the z-direction as the axis; wherein the y-direction is the propagation direction of the X-ray, and the z-direction is the vertically upward direction. As an example, taking the imaging mode of the X-ray reciprocal space multi-scale imaging system as tomographic imaging, that is, the X-ray reciprocal space multi-scale imaging system can adopt a spiral scanning mode, and the electric sample displacement stage can drive the sample 3 to be tested to rotate around the z-axis for one circle to scan the tomographic layer where the fan beam X-ray is located; thereafter, the electric sample displacement stage drives the sample 3 to be tested to translate up and down, and re-rotates to scan another tomographic layer, and repeats this process until all parts of the sample 3 to be tested that need to be imaged are scanned, thereby completing the spiral CT. In this way, when testing the sample 3, it is only necessary to place the sample 3 on the electric sample displacement stage. The electric sample displacement stage can drive the sample 3 to move automatically according to the set imaging parameters and requirements. The whole process is fully automated, without the need for manual intervention, and is easy to use. At the same time, the system can realize multiple forms of scanning such as CT, DR or spiral CT for the sample 3. Compared with equipment with a single scanning form, this system has higher universality.

[0033] The grating device 4 is configured with a second grating, which is used to preliminarily modulate the X-ray small-angle scattering signal generated after the fan beam X-rays are irradiated to the sample to be tested 3; illustratively, the grating device 4 is arranged on the propagation path of the X-ray small-angle scattering signal, so that the grating device 4 receives the X-ray small-angle scattering signal; the second grating in the grating device 4 can receive the X-ray small-angle scattering signal generated after the fan beam X-rays are irradiated to the sample to be tested 3, and modulate the X-ray small-angle scattering signal to obtain a modulated X-ray small-angle scattering signal.

[0034] The grating and coding hole integrated device 5 is configured with a third grating and a coding hole, wherein the third grating is used to re-modulate the X-ray small-angle scattering signal preliminarily modulated by the second grating to obtain a modulated X-ray small-angle scattering signal; the coding hole is used to modulate the X-ray diffraction signal generated after the fan beam X-ray is irradiated to the sample to be tested 3 to obtain a modulated X-ray diffraction signal. As another example, the coding hole is a light-transmitting hole on a material plate with strong X-ray absorption ability, for example, it can be a light-transmitting hole on a material plate with an X-ray absorption coefficient exceeding a preset value, wherein the X-ray absorption coefficient can also be called the absorption rate of X-rays, and the preset value can be set according to demand, for example, 30%. Exemplarily, the grating and coded hole integrated device 5 can be arranged on the propagation path of the X-ray diffraction signal and the preliminarily modulated X-ray small-angle scattering signal to receive the X-ray small-angle scattering signal preliminarily modulated by the second grating and the X-ray diffraction signal generated after the fan beam X-ray irradiates the sample to be tested 3; wherein, the third grating can be arranged on the propagation path of the preliminarily modulated X-ray small-angle scattering signal, and the coded hole is arranged on the propagation path of the X-ray diffraction signal generated after the fan beam X-ray irradiates the sample to be tested 3. As an example, the third grating and the coded hole can be integrated on the same substrate, so that the third grating and the coded hole are integrated on the same substrate to achieve simultaneous modulation of the X-ray small-angle scattering signal and the X-ray diffraction signal.

[0035] It should be noted that the gratings installed in the above-mentioned X-ray collimation and grating integrated device 2, grating device 4, grating and coding hole integrated device 5 can be configured according to needs, and there is no limitation on this. In one possible implementation, the groove direction of any grating among the first grating, the second grating and the third grating is horizontal, vertical or inclined; and / or, the type of any grating among the first grating, the second grating and the third grating is an absorption grating or a phase grating or other type of X-ray grating. That is, the groove direction of each grating installed in each component of the system can be in any direction. For example, Figure 3 A schematic diagram showing the groove direction of a grating according to an embodiment of the present disclosure is shown as follows: Figure 3 As shown, the groove direction of the grating can be: horizontal, vertical, or any inclined direction.

[0036] Exemplarily, the types and groove directions of the third grating and the second grating can be configured as needed, so that the third grating and the second grating can work together, and the X-ray small-angle scattering signal generated after the fan beam X-ray is irradiated to the sample 3 to be tested is modulated by the second grating and the third grating in sequence to obtain the desired modulated X-ray small-angle scattering signal. In a possible implementation, the grating device 4 is configured with an electric translation stage for driving the second grating to perform phase stepping; that is, the grating device 4 can be a stepping grating integrated device. In this way, the second grating phase stepping works in coordination with the fixed third grating, so that the X-ray small-angle scattering signal generated after the fan beam X-ray is irradiated to the sample 3 to be tested can be modulated to obtain the desired modulated X-ray small-angle scattering signal.

[0037] The detector 6 is used to receive the modulated X-ray small-angle scattering signal and the modulated X-ray diffraction signal; wherein the modulated X-ray small-angle scattering signal and the modulated X-ray diffraction signal are used to generate a tomographic image of the sample 3 to be tested, and the tomographic image contains the crystal structure and mesoscopic scale information inside the sample 3 to be tested. The type of the detector 6 can be selected according to demand and is not limited to this. As an example, the detector 6 can be a photon counting type energy spectrum detector. Exemplarily, the detector 6 can be set on the propagation path of the modulated X-ray small-angle scattering signal and the modulated X-ray diffraction signal to detect the modulated X-ray small-angle scattering signal and the modulated X-ray diffraction signal.

[0038] In a possible implementation, the tomographic image of the sample 3 to be tested includes a first tomographic image generated based on the modulated X-ray small-angle scattering signal, and a second tomographic image generated based on the modulated X-ray diffraction signal; wherein the voxel in the sample 3 to be tested corresponding to the same pixel in the first tomographic image and the second tomographic image is the same. In this way, at the same time, the X-ray small-angle scattering signal and the X-ray diffraction signal generated by the same voxel of the sample 3 to be tested can pass through the third grating and the coded hole configured by the grating and coded hole integrated device 5 respectively, and the first tomographic image generated by the X-ray small-angle scattering signal modulated by the third grating received by the detector 6 and the second tomographic image generated by the X-ray diffraction signal modulated by the coded hole received by the detector 6 can be automatically aligned, that is, the voxel of the sample 3 to be tested corresponding to the same pixel in the first tomographic image and the second tomographic image is the same, and such an imaging result is extremely convenient and beneficial for the subsequent analysis of the internal characteristics of the sample 3 to be tested.

[0039] Among them, the X-ray collimation and grating integrated device 2, the grating and coding hole integrated device 5 and the detector 6 in the system are used for X-ray diffraction imaging (X-Ray small scatting imaging). X-ray diffraction imaging is an imaging technology based on X-rays. It is based on the physical principle of traditional X-ray diffraction and can be applied to the fields of material science, biomedicine, semiconductor industry, etc. It uses fan beam X-rays to irradiate the sample 3 to be tested, and the irradiated sample 3 to be tested will generate a number of X-ray diffraction signals. According to the Bragg law, the emission angle and intensity of the X-ray diffraction signals generated by different types of crystals are different. In this way, the X-ray diffraction signal generated by the sample 3 to be tested can be modulated by the coding hole in the grating and coding hole integrated device 5, and can be received by the detector 6. These X-ray diffraction signals reconstruct the spatial structure of the sample 3 to be tested, and have spatial resolution. Then, the modulated X-ray diffraction signal received by the detector 6 can be used to obtain the crystal structure information of each voxel of the sample 3 to be tested.

[0040] Among them, the X-ray collimation and grating integrated device 2, the grating device 4, the grating and coded hole integrated device 5 and the detector 6 in the system are used for X-ray small-angle scattering imaging. X-ray small-angle scattering imaging, also known as X-ray dark field imaging, is also an imaging technology based on X-rays. When the fan beam X-rays are irradiated onto the sample to be tested 3, a small-angle X-ray forward scattering will occur inside the sample to be tested 3, that is, an X-ray small-angle scattering signal is generated. The X-ray small-angle scattering signal is modulated by the second grating in the grating device 4 and the third grating in the grating and coded hole integrated device 5, and then the modulated X-ray small-angle scattering signal received by the detector 6 can be used to obtain the mesoscopic scale information inside the sample to be tested 3, especially for porous materials such as alveoli.

[0041] In the disclosed embodiment, X-ray diffraction imaging and X-ray small-angle scattering imaging are integrated into the same system. This is much better than traditional X-ray imaging technology, and can simultaneously collect and utilize diffraction signals of large-angle scattering (i.e., X-ray diffraction signals) and dark field signals of small-angle scattering (i.e., X-ray small-angle scattering signals); since the laws of X-ray diffraction and X-ray small-angle scattering are related to the laws of the reciprocal space lattice of the crystal structure of the sample to be tested, the detector in this system simultaneously receives multi-scale (also called multi-characteristic or multi-contrast) signals (i.e., modulated X-ray small-angle scattering signals and modulated X-ray diffraction signals), which can be used to generate a tomographic image of the sample to be tested, and the tomographic image contains the crystal structure and mesoscopic scale information inside the sample to be tested, thereby realizing multi-scale reciprocal space imaging. In this way, the system can realize integrated and automated tomographic imaging of the samples to be tested, and efficiently obtain the crystal structure information and mesoscopic scale information of the internal voxels of the samples to be tested. Since different samples have different crystal types and mesoscopic structures, combining these two types of information can help better study the characteristics of the samples; it can meet the needs of special imaging of samples such as new materials and diseased tissues, and greatly promote the development of fields such as materials science and medical diagnostics. In addition, the system can image a wide variety of samples to be tested, and can image samples of various shapes, greatly improving the scope of application.

[0042] Figure 4 FIG. 2 is a schematic diagram showing the structure of another X-ray reciprocal space multi-scale imaging system according to an embodiment of the present disclosure. Figure 4 As shown, the system may include: an X-ray source 1, an X-ray collimation and grating integrated device 2, a grating device 4, a grating and coding hole integrated device 5, a detector 6, a sample stage 7, an integrated power supply control module 8, a control computer 9, an external display 10, and a radiation shielding device 11. The system may be applied to detect a sample to be tested 3 (also referred to as an object to be tested).

[0043] Among them, the X-ray source 1, the X-ray collimation and grating integrated device 2, the grating device 4, the grating and coding hole integrated device 5, and the detector 6 are the same as the above Figure 1 The corresponding components in the system shown in are the same and will not be described again here.

[0044] The integrated power supply and control module 8 is connected to the X-ray source 1, the X-ray collimation and grating integrated device 2, the sample stage 7, the grating device 4, and the grating and coding hole integrated device 5. It can provide power for one or more of the X-ray source 1, the X-ray collimation and grating integrated device 2, the sample stage 7, the grating device 4, and the grating and coding hole integrated device 5. In addition, it can also send control signals to corresponding components after receiving instructions from the control computer 9 to control the corresponding components.

[0045] The control computer 9 is used to control one or more of the X-ray source 1, the X-ray collimation and grating integrated device 2, the grating device 4, and the grating and coding hole integrated device 5. Exemplarily, it can be connected to the external display 10 and the integrated power supply control module 8; the integrated power supply control module 8 can be manipulated so that the integrated power supply control module 8 generates a control signal to control one or more of the components such as the X-ray source 1, the X-ray collimation and grating integrated device 2, the sample stage 7, the grating device 4, the grating and coding hole integrated device 5. It can also collect the modulated X-ray small-angle scattering signal and the modulated X-ray diffraction signal received by the detector 6, and can generate a tomographic image of the sample to be tested 3 according to the modulated X-ray small-angle scattering signal and the modulated X-ray diffraction signal; it can also obtain the analysis results of the sample to be tested 3 (such as the crystal structure and mesoscopic scale information inside the sample to be tested 3) according to the tomographic image. Exemplarily, the control computer 9 can also connect to Bluetooth and external devices, store data, and customize the detection scheme through a computer program.

[0046] The external display 10 is used to receive and display information transmitted by the control computer 9, wherein the information may include: real-time status and parameters of the system, acquisition signals (such as the modulated X-ray small-angle scattering signal received by the detector 6 and the modulated X-ray diffraction signal), imaging results (such as the tomographic image of the sample 3 to be tested), analysis results of the sample 3 to be tested (such as the crystal structure and mesoscopic scale information inside the sample 3 to be tested), etc.

[0047] The radiation shielding device 11 is used to shield X-rays to prevent ionizing radiation damage to people caused by X-ray leakage. In this system, except for the control computer 9 and the external display 10, other components can be installed in the radiation shielding device 11; that is, the X-ray source 1, the X-ray collimation and grating integrated device 2, the grating device 4, the grating and coding hole integrated device 5, and the detector 6 are all installed in the radiation shielding device 11.

[0048] As an example, the control computer 9 can obtain the crystal structure information of the sample 3 to be tested by analyzing and comparing the modulated X-ray diffraction signal received by the detector 6 in combination with the diffraction spectrum database, for example, the crystal type of the sample 3 to be tested can be obtained. Exemplarily, before the system is run, relevant background data can be collected as a built-in database of the system. For example, the standard diffraction spectrum of common substances can be used as data in the database and stored in the built-in chip of the control computer 9, and the modulated X-ray diffraction signal actually detected by the detector 6 can be processed using a machine learning algorithm to obtain the crystal type information of the sample 3 to be tested. As an example, a neural network model can be pre-trained based on the data in the database or other existing data collected. The neural network model can classify different X-ray diffraction signals, thereby obtaining the crystal type information corresponding to different X-ray diffraction signals. Among them, the neural network model can be a conventional classification model, and the neural network model can be trained in an existing manner. In this way, during the actual detection process, the control computer 9 can separate the X-ray diffraction signals of each voxel in a certain slice of the sample 3 to be tested from the modulated X-ray diffraction signals actually detected by the detector 6 according to the existing method; then, the X-ray diffraction signals of each voxel in the slice are input into the trained neural network model, thereby automatically obtaining the crystal type information of the sample 3 to be tested.

[0049] As another example, the control computer 9 can convert the modulated X-ray small-angle scattering signal collected by the detector 6 into an attenuation signal of the macroscopic displacement curve contrast, so as to perform analysis and image reconstruction to obtain the crystal structure inside the sample 3 to be tested. For example, the background displacement curve and the corresponding displacement curve of the sample 3 to be tested can be obtained, and then the difference between the two displacement curves can be analyzed to extract contrast information such as absorption, phase contrast and dark field, so that the sample 3 to be tested can be imaged to obtain the mesoscopic scale information of the sample 3 to be tested. For example, the background displacement curve and the corresponding object displacement curve can be obtained based on the phase stepping method, or the background displacement curve and the corresponding object displacement curve can be obtained based on the distributed incoherent X-ray source perpendicular to the grating stripe direction, or the background displacement curve and the corresponding object displacement curve can be obtained based on the staggered or tilted grating and the distributed incoherent X-ray source parallel to the grating stripe direction. Exposure method.

[0050] For example, according to functional classification, the device in the above system can be divided into six parts, namely, the ray source subsystem, the coded aperture diffraction imaging subsystem, the grating small angle scattering imaging subsystem, the control power supply subsystem, the analysis output subsystem, and the radiation shielding subsystem.

[0051] Wherein, the ray source subsystem includes an X-ray source 1; the coded hole diffraction imaging subsystem may include an X-ray collimation and grating integrated device 2, a grating and coded hole integrated device 5 and a detector 6. In this subsystem, the fan beam X-rays can be modulated into periodically arranged fan beam X-rays through the X-ray collimation and grating integrated device 2. The fan beam X-rays will diffract when irradiated on the sample to be tested 3, and emit X-ray diffraction signals, which are encoded through the coded hole part in the grating and coded hole integrated device 5, so that the detector 6 can extract the X-ray diffraction signals emitted by each voxel of the sample to be tested 3. In this way, the diffraction information of each voxel in the sample to be tested 3 can be extracted through the coded hole diffraction imaging subsystem. The grating small angle scattering imaging subsystem may include an X-ray collimation and grating integrated device 2, a grating device 4, a grating and coded hole integrated device 5 and a detector 6. In the subsystem, the fan beam X-rays can be modulated into periodically arranged fan beam X-rays through the X-ray collimation and grating integrated device 2. The fan beam X-rays are irradiated onto the sample 3 to be tested, and the X-ray small angle scattering signals are emitted after being scattered by the sample 3 to be tested. Through the grating device 4 and the grating and coded hole integrated device 5, wherein the grating parts in the grating device 4 and the grating and coded hole integrated device 5 work together, the detector 6 can extract the X-ray small angle scattering signals emitted by each voxel of the sample 3 to be tested. In this way, through the grating small angle scattering imaging subsystem, the small angle scattering information of each voxel in the sample 3 to be tested can be extracted. The control power supply subsystem may include an integrated power supply control module 8, the analysis output subsystem may include a control computer 9 and an external display 10; the radiation shielding subsystem may include a radiation shielding device 11. Since the laws of X-ray diffraction and small-angle X-ray scattering are related to the laws of the reciprocal space lattice of the crystal structure, the imaging technologies in the coded aperture diffraction imaging subsystem and the grating small-angle scattering imaging subsystem both belong to reciprocal space imaging technologies.

[0052] In the embodiment of the present disclosure, the control computer 9 can control the X-ray source 1 to emit cone-beam X-rays, the X-ray collimation and grating integration device 2 modulates the cone-beam X-rays into fan-beam X-rays, and the fan-beam X-rays irradiate the sample to be tested 3, thereby generating X-ray diffraction signals and X-ray small-angle scattering signals; then, the X-ray small-angle scattering signals modulated by the grating device 4 and the grating and coding hole integration device 5 are received by the detector 6, and the control computer 9 can process the X-ray small-angle scattering signals through a specific algorithm (which can be the algorithm involved in the present disclosure or an existing algorithm), thereby imaging and analyzing to obtain the mesoscopic scale information of each voxel of the sample to be tested 3; at the same time, the X-ray diffraction signals modulated by the coding hole part in the grating and coding hole integration device 5 are received by the detector 6, and the control computer 9 can separate the diffraction signal of each voxel under a certain fault in the sample to be tested 3 according to the specific algorithm, and analyze and obtain the crystal type information of each voxel in the sample to be tested 3 in combination with the standard diffraction spectrum and / or using machine learning and other methods. Furthermore, the control computer 9 combines and analyzes the obtained mesoscopic scale information of each voxel of the sample 3 to be tested with the crystal type information of each voxel in the sample 3 to be tested, so as to obtain a tomographic image containing the crystal structure information and mesoscopic scale information inside the sample 3 to be tested, and can also be displayed through the external display 10, thereby providing an efficient and complete tomographic imaging system for the crystal structure information and mesoscopic scale information inside the sample 3 to be tested.

[0053] The specific structure of each component in the above-mentioned X-ray reciprocal space multi-scale imaging system is exemplarily described below.

[0054] Figure 5 FIG. 2 is a schematic diagram of the structure of an X-ray collimation and grating integrated device 2 according to an embodiment of the present disclosure. The left side is a front view of the X-ray collimation and grating integrated device 2, and the right side is a cross-sectional view of the X-ray collimation and grating integrated device 2. Figure 5 As shown, the X-ray collimation and grating integrated device 2 may include a frame base 3-1, a fixed frame 3-2, an X-ray fan beam collimator 3-3, a grating holder 3-4, an X-ray fan beam collimator slit 3-5, and a first X-ray grating 3-6.

[0055] The frame base 3-1 and the fixed frame 3-2 are fixed parts of the X-ray collimation and grating integrated device 2, and can play a role in fixing other components in the X-ray collimation and grating integrated device 2. Figure 5 As shown, the fixed frame 3-2 is fixedly mounted on the frame base 3-1.

[0056] The X-ray fan beam collimator 3-3 and the X-ray fan beam collimator slit 3-5 are the parts of the X-ray collimation and grating integrated device 2 responsible for X-ray collimation, wherein the X-ray fan beam collimator 3-3 can be installed on the fixed frame 3-2. For example, the X-ray fan beam collimator 3-3 can be made of heavy metal or other materials with strong X-ray absorption; the X-ray fan beam collimator slit 3-5 is a slit opened on the X-ray fan beam collimator 3-3, and the direction in which the X-ray fan beam collimator slit 3-5 penetrates is consistent with the propagation direction of the X-ray ( Figure 5 The cone beam X-rays generated by the X-ray source 1 can be collimated into fan beam X-rays.

[0057] The grating holder 3-4 and the first X-ray grating 3-6 serve as the grating part in the X-ray collimation and grating integration device 2, wherein the first X-ray grating 3-6 is mounted on the grating holder 3-4, and the grating holder 3-4 can be mounted on the fixed frame 3-2.

[0058] The first X-ray grating 3-6 is one of the components of the grating small angle scattering imaging system. Exemplarily, the number of the first X-ray gratings 3-6, the groove direction of the grating, the grating type, etc. are not limited. For example, the groove direction of the grating can be horizontal, vertical or any inclined direction.

[0059] Figure 6 FIG. 4 is a schematic diagram showing the structure of a grating device 4 according to an embodiment of the present disclosure. Figure 6 As shown, the grating device 4 may include: a first grating fixing fixture 7-1, a second X-ray grating 7-2, a translation stage bracket 7-3, an electric translation stage 7-4, and a translation stage base 7-5.

[0060] The first grating fixing fixture 7 - 1 and the second X-ray grating 7 - 2 serve as the grating part in the grating device 4 , wherein the second X-ray grating 7 - 2 is mounted on the first grating fixing fixture 7 - 1 .

[0061] The translation stage bracket 7-3 and the translation stage base 7-5 are fixed parts in the grating device 4, and can play a role in fixing other components in the grating device 4; wherein the translation stage bracket 7-3 is used to fix other components that need to be moved. Exemplarily, the first grating fixing fixture 7-1 can fix (wherein, Figure 6 As shown in the figure, it is fixed by three screws on the translation stage bracket 7-3 and moves together with it.

[0062] The electric translation stage 7-4 is a moving part in the grating device 4, which can perform high-precision displacement. It is fixed on the translation stage base 7-5. For example, the electric translation stage 7-4 can be a piezoelectric ceramic translation stage. The translation stage bracket 7-3 is a movable component extending from the top of the electric translation stage 7-4. The moving direction of the translation stage, that is, the direction in which the grating can be stepped, is as follows: Figure 6 As shown, the moving direction of the translation stage is perpendicular to the propagation direction of the X-rays.

[0063] It should be noted that in the actual imaging process, the system will control whether the grating device 4 performs phase stepping and the phase stepping method according to the imaging requirements and parameters set manually, that is, under certain special imaging requirements, the electric translation stage 7-4 can drive the second X-ray grating 7-2 to perform phase stepping. The electric translation stage 7-4 is a key component of the small-angle scattering imaging system and can control the stepping movement of the grating.

[0064] Figure 7 FIG. 5 is a schematic diagram showing the structure of a grating and coded hole integrated device 5 according to an embodiment of the present disclosure. Figure 7 As shown, the grating and coding hole integrated device 5 may include: a grating and coding hole integrated device bracket 8-1, a coding hole fixture 8-2, a coding hole 8-3, a second grating fixing fixture 8-4, and a third X-ray grating 8-5.

[0065] As an example, the coding hole holder 8-2, the coding hole 8-3, the second grating fixing fixture 8-4, and the third X-ray grating 8-5 in the grating and coding hole integrated device 5 can be integrated on the same substrate.

[0066] The grating and coding hole integrated device support 8-1 is a fixed part of the grating and coding hole integrated device 5. It can play a role in fixing other components in the grating and coding hole integrated device 5. For example, it can fix the substrate integrated with the coding hole holder 8-2, the coding hole 8-3, the second grating fixing fixture 8-4, and the third X-ray grating 8-5. The plane where the substrate is located is perpendicular to the propagation direction of the X-ray.

[0067] The coding hole holder 8-2 and the coding hole 8-3 are the coding parts of the grating and coding hole integrated device 5, which are used to encode the X-ray diffraction signal emitted by the sample 3 to be tested; illustratively, a coding hole holder 8-2 and a coding hole 8-3 can be respectively arranged at the upper part and the lower part, and the second grating fixing fixture 8-4 and the third X-ray grating 8-5 can be arranged between the coding hole holder 8-2 and the coding hole 8-3; illustratively, the upper and lower coding holes 8-3 can be made of heavy metal or other materials with strong X-ray absorption, and a number of light-transmitting holes engraved on a smooth heavy metal or other material plate with strong X-ray absorption are coding holes 8-3. The coding hole 8-3 is installed on the coding hole holder 8-2, and the coding hole holder 8-2 is installed on the grating and coding hole integrated device bracket 8-1 by screws. Considering that in X-ray diffraction imaging, since the X-ray diffraction signal collected by the detector 6 is a superposition of the X-ray diffraction signals of multiple voxels of the sample 3 to be tested, it is difficult to extract the individual X-ray diffraction signal of each voxel, and the coding hole 8-3 configured in the grating and coding hole integrated device 5 can effectively solve this problem. For example, the coding hole 8-3 is a number of small holes engraved on a thin plate of heavy metal or other materials with strong X-ray absorption, which allow the X-ray diffraction signal to pass through, and a certain pixel of the detector 6 can only receive the X-ray diffraction signal emitted by the voxel on the line connecting the pixel and a certain small hole in the coding hole 8-3. Through the relevant algorithm, the individual X-ray diffraction signal of each voxel of the sample 3 to be tested can be accurately obtained.

[0068] The second grating fixing fixture 8-4 and the third X-ray grating 8-5 are the grating parts of the grating and coding hole integrated device 5, wherein the third X-ray grating 8-5 is fixed on the second grating fixing fixture 8-4, and the second grating fixing fixture 8-4 is installed on the grating and coding hole integrated device bracket 8-1 by screws; illustratively, the second grating fixing fixture 8-4 and the third X-ray grating 8-5 are arranged between the upper and lower coding holes 8-3.

[0069] The following is an exemplary description of the workflow of the above-mentioned X-ray reciprocal space multi-scale imaging system. Figure 8 FIG. 2 shows a workflow diagram of an X-ray reciprocal space multi-scale imaging system according to an embodiment of the present disclosure. Figure 8As shown, the user selects the sample to be tested and places it on the electric sample displacement stage. The X-ray reciprocal space multi-scale imaging system is started by the control computer, the imaging parameters and requirements are set on the control computer, and the power supply is controlled on the control computer to start working. The electric sample displacement stage drives the sample to be tested to move to the initial position according to the set imaging parameters and requirements. After that, the X-ray source emits a cone beam X-ray, which is modulated into a fan beam X-ray after passing through the X-ray collimation and grating integration device and irradiates the sample to be tested. After being irradiated by the fan beam X-ray, the sample to be tested emits an X-ray diffraction signal and an X-ray small-angle scattering signal. Among them, after the X-ray diffraction signal passes through the coded hole in the grating and coded hole integrated device, it is received by the detector. The control computer extracts the X-ray diffraction signal of each voxel in the sample to be tested through a specific algorithm. The control computer obtains the crystal type information of each voxel of the sample to be tested and images it according to the X-ray diffraction signal of each voxel, combined with machine learning and standard diffraction patterns. At the same time, after the X-ray small-angle scattering signal passes through the second grating in the grating device and the third grating in the grating and coded hole integrated device, it is received by the detector. The control computer analyzes and processes the collected X-ray small-angle scattering signal of each voxel in the sample to be tested, reconstructs the small-angle scattering image of the sample to be tested, and thus obtains the mesoscopic scale information of each voxel of the sample to be tested. The sample stage continuously changes the position of the sample to be tested according to the set imaging parameters and requirements, and images different positions or different faults of the sample to be tested. The control computer saves the crystal structure information and mesoscopic scale information of each voxel in the sample to be tested, and can display this information and imaging results through an external display. Furthermore, the data can also be copied to other devices through the control computer to meet different requirements.

[0070] In the disclosed embodiment, the control computer can control the X-ray source to emit cone-beam X-rays, the X-ray collimation and grating integration device modulates the cone-beam X-rays into fan-beam X-rays, and the fan-beam X-rays irradiate the sample to be tested, thereby generating X-ray diffraction signals and X-ray small-angle scattering signals; then, the X-ray small-angle scattering signals modulated by the grating device and the grating part in the grating and coded hole integration device are received by the detector; at the same time, the X-ray diffraction signals modulated by the coded hole part in the grating and coded hole integration device are received by the detector; thereby, the X-ray small-angle scattering signals and the X-ray diffraction signals can be synchronously collected.

[0071] Exemplarily, the X-ray small angle scattering signal can be processed by a specific algorithm, so that the mesoscopic scale information of each voxel of the sample to be tested can be analyzed; the X-ray diffraction signal of each voxel under a certain fault in the sample to be tested can be separated according to a specific algorithm, and the crystal type information of each voxel in the sample to be tested can be obtained by combining the standard diffraction spectrum and / or using machine learning and other methods. Further, on the basis of simultaneously obtaining the mesoscopic scale information of each voxel of the sample to be tested and the crystal type information of each voxel in the sample to be tested, these two types of information can be combined and analyzed to obtain a tomographic image containing the crystal structure information and mesoscopic scale information inside the sample to be tested, so as to further study and analyze the characteristics of the sample to be tested. Exemplarily, the tomographic image can also be displayed on an external display. In this way, when using this system for detection, it is only necessary to place the sample to be tested on the electric sample displacement stage and set the imaging parameters and requirements. The entire imaging process is fully automated, and the required results can be directly output and saved without manual data processing, which is convenient to use.

[0072] The embodiments of the present disclosure have been described above, and the above description is exemplary, not exhaustive, and is not limited to the disclosed embodiments. Many modifications and changes will be apparent to those of ordinary skill in the art without departing from the scope and spirit of the described embodiments. The selection of terms used herein is intended to best explain the principles of the embodiments, practical applications, or technical improvements in the market, or to enable other persons of ordinary skill in the art to understand the embodiments disclosed herein.

Claims

1. An X-ray reciprocal space multi-scale imaging system, characterized in that: The system comprises: an X-ray source, an X-ray collimation and grating integrated device, a grating device, a grating and coding hole integrated device, and a detector; wherein, The X-ray source is used to generate cone-beam X-rays; The X-ray collimation and grating integrated device is configured with a first grating and an X-ray collimator, and is used to modulate the cone beam X-rays to obtain fan beam X-rays; The grating device is configured with a second grating for preliminarily modulating the X-ray small-angle scattering signal generated after the fan beam X-ray irradiates the sample to be tested; The grating and coded hole integrated device is configured with a third grating and a coded hole, wherein the third grating is used to re-modulate the X-ray small-angle scattering signal preliminarily modulated by the second grating to obtain a modulated X-ray small-angle scattering signal; the coded hole is used to modulate the X-ray diffraction signal generated after the fan beam X-ray irradiates the sample to be tested to obtain a modulated X-ray diffraction signal; The detector is used to receive the modulated X-ray small-angle scattering signal and the modulated X-ray diffraction signal; wherein the modulated X-ray small-angle scattering signal and the modulated X-ray diffraction signal are used to generate a tomographic image of the sample to be tested, and the tomographic image contains the crystal structure and mesoscopic scale information inside the sample to be tested.

2. The system according to claim 1, characterized in that The tomographic image of the sample to be tested includes a first tomographic image generated based on the modulated X-ray small-angle scattering signal, and a second tomographic image generated based on the modulated X-ray diffraction signal; wherein the voxels in the sample to be tested corresponding to the same pixel point in the first tomographic image and the second tomographic image are the same.

3. The system according to claim 1, characterized in that The X-ray source is a light source equipped with an X-ray tube.

4. The system according to claim 1, characterized in that The grating device is equipped with an electric translation stage for driving the second grating to perform phase stepping.

5. The system according to claim 1, characterized in that The coded holes are light-transmitting holes on a material plate whose X-ray absorption coefficient exceeds a preset value.

6. The system according to claim 1, characterized in that The third grating and the coding hole are integrated on the same substrate.

7. The system according to claim 1, characterized in that The groove direction of any grating among the first grating, the second grating and the third grating is horizontal, vertical or inclined; and / or the type of any grating among the first grating, the second grating and the third grating is absorption grating or phase grating.

8. The system according to claim 1, characterized in that The system also includes a control computer for controlling one or more of the X-ray source, the X-ray collimation and grating integrated device, the grating device, and the grating and coded hole integrated device.

9. The system according to claim 1, characterized in that The system further comprises: a radiation shielding device, wherein the X-ray source, the X-ray collimation and grating integration device, the grating device, the grating and coding hole integration device, and the detector are installed in the radiation shielding device.

10. The system according to any one of claims 1 to 9, characterized in that: The system also includes an electric sample displacement stage for driving the sample to be tested to move so as to perform electronic computed tomography (CT), digital X-ray (DR) or spiral CT.

Images