In-situ integration method of array bearing temperature sensor

Abstract

The invention discloses an in-situ integration method of an array bearing temperature sensor, and aims to solve the problem that the complexity of a bearing structure is increased by an existing bearing integrated sensor. The in-situ integration method of the bearing temperature sensor comprises the following steps: 1, cleaning the surface of a bearing; 2, depositing an insulating layer substrate on the surface of the outer ring of the clean bearing by adopting a magnetron sputtering process; 3, adopting a flexible mask plate, and arranging the mask plate on the outer diameter surface of the outer ring of the bearing; 4, sputtering and depositing a thermal resistance sensitive layer on the insulating layer of the outer diameter of the bearing outer ring by adopting a magnetron sputtering process; and 5, sputtering and depositing a protective layer on the thermal resistance sensitive layer of the outer diameter of the bearing outer ring by adopting a magnetron sputtering process to complete the in-situ integration method of the array bearing temperature sensor. The array thermal resistance film temperature sensor is formed by adopting the film thermal resistance sensor in-situ shape-following preparation process, and the structure of the whole system is simplified through the sensor in-situ integration process.

Description

Technical Field

[0001] The invention belongs to the field of sensor technology and fault diagnosis, and in particular relates to an in-situ integration method of a bearing temperature sensor. Background Art

[0002] The integration methods of bearing monitoring sensors are mainly external integration, embedded integration and in-situ integration. Typical external and embedded bearing integrated sensors include SKF-Insight of Sweden's SKF and VarioSense of Germany's Schaeffler. Most of these bearing integrated sensors are traditional hard and bulk sensors, which increase the complexity of the bearing structure and limit their application occasions. Compared with the first two, in-situ integration can be directly embedded in the outer ring of the bearing, and the key is the in-situ preparation of thin film sensors.

[0003] The in-situ preparation technology can directly generate thin film material sensors at the specified position of the bearing ring without offline preparation and subsequent processing. This preparation method has the advantages of simplified process, improved efficiency and reduced cost. Summary of the invention

[0004] The purpose of the present invention is to solve the problem that the existing bearing integrated sensor increases the complexity of the bearing structure, and to provide an in-situ integration method of an arrayed bearing temperature sensor.

[0005] The in-situ integration method of the arrayed bearing temperature sensor of the present invention is implemented according to the following steps:

[0006] Step 1: Clean the bearing surface to obtain a clean bearing;

[0007] Step 2: Using a magnetron sputtering process to deposit an insulating layer substrate on the outer diameter surface of the outer ring of the clean bearing to obtain a bearing with an insulating layer;

[0008] Step 3: Use a flexible mask plate with an arrayed pattern on it, and set the mask plate on the outer diameter surface of the outer ring of the bearing;

[0009] Step 4: sputtering and depositing a thermal resistance sensitive layer on the insulating layer of the outer diameter of the bearing outer ring by a magnetron sputtering process, so that multiple thermal resistance sensitive layers are evenly distributed on the outer diameter surface of the bearing outer ring;

[0010] Step 5: sputtering and depositing a protective layer on the thermal resistance sensitive layer on the outer diameter of the bearing outer ring by a magnetron sputtering process, thereby completing the in-situ integration method of the arrayed bearing temperature sensor;

[0011] The material of the insulating layer substrate in step 2 is SiC or Al2O3, the material of the thermal resistor sensitive layer in step 4 is Ag or Cu, and the material of the protective layer in step 5 is Si3N4 or Al2O3.

[0012] The present invention sequentially constructs a thin film thermal resistance sensor composed of an insulating layer, a sensitive layer and a protective layer in situ on the bearing surface, thereby monitoring the surface temperature of the bearing in real time during operation.

[0013] The present invention adopts the in-situ conformal preparation process of the thin film thermal resistor temperature sensor to form an array thermal resistor thin film temperature sensor preparation process and a sensing performance optimization scheme. The temperature intelligent detection microsystem developed by the present invention that can be constructed or integrated in-situ on the bearing surface is also suitable for intelligent monitoring of other engineering equipment, and can be summarized as an in-situ integration technology of intelligent bearings containing array temperature sensors, which has a wide prospect for promotion and application.

[0014] Compared with the prior art, the present invention realizes direct preparation of sensors on the bearing surface through an in-situ integration process, thereby realizing real-time monitoring of the bearing by a thin film thermal resistance sensor. The method has the following beneficial effects:

[0015] (1) Simple structural design: The in-situ sensor integration technology can simplify the structure of the entire system. Traditional external sensors require independent installation and wiring, which increases the complexity of the bearing structure. In-situ integrated sensors can be directly attached to the outer ring of the bearing, avoiding additional assembly and connection steps, simplifying the system design and installation process.

[0016] (2) Reduced space occupation: The use of thin film thermal resistor sensors can better utilize the space of the bearing and reduce the impact on the surrounding environment. Traditional external sensors usually require additional space and introduce external connecting wires, which limits the compact design and application of the bearing. In-situ integrated sensors can be arranged more compactly on the bearing surface, which not only saves space but also better protects the sensor from interference from the external environment.

[0017] (3) High overall reliability: The thin-film thermal resistance sensor can achieve direct contact with the bearing surface and can more accurately monitor the working status of the bearing. The direct contact between the sensor and the bearing can improve the sensitivity and stability of the signal and reduce interference and loss during signal transmission.

[0018] (4) Easy to use and maintain: The thin film thermal resistance sensor of the present invention is integrated with the bearing and does not require additional maintenance and care. Traditional external sensors may require regular inspection and replacement, which increases maintenance costs and workload. In-situ integrated sensors can not only provide long-term and stable monitoring performance, but also reduce the frequency of maintenance and replacement of sensors. BRIEF DESCRIPTION OF THE DRAWINGS

[0019] Figure 1 This is a real picture of a large-size mask plate for a thin-film thermal resistor in the embodiment;

[0020] Figure 2 This is a physical picture of a small-size mask plate for a thin-film thermal resistor in an embodiment. DETAILED DESCRIPTION

[0021] Specific implementation method 1: The in-situ integration method of the arrayed bearing temperature sensor of this implementation method is implemented according to the following steps:

[0022] Step 1: Clean the bearing surface to obtain a clean bearing;

[0023] Step 2: Using a magnetron sputtering process to deposit an insulating layer substrate on the outer diameter surface of the outer ring of the clean bearing to obtain a bearing with an insulating layer;

[0024] Step 3: Use a flexible mask plate with an arrayed pattern on it, and set the mask plate on the outer diameter surface of the outer ring of the bearing;

[0025] Step 4: sputtering and depositing a thermal resistance sensitive layer on the insulating layer of the outer diameter of the bearing outer ring by a magnetron sputtering process, so that multiple thermal resistance sensitive layers are evenly distributed on the outer diameter surface of the bearing outer ring;

[0026] Step 5: sputtering and depositing a protective layer on the thermal resistance sensitive layer on the outer diameter of the bearing outer ring by a magnetron sputtering process, thereby completing the in-situ integration method of the arrayed bearing temperature sensor;

[0027] The material of the insulating layer substrate in step 2 is SiC or Al2O3, the material of the thermal resistor sensitive layer in step 4 is Ag or Cu, and the material of the protective layer in step 5 is Si3N4 or Al2O3.

[0028] Specific implementation method 2: This implementation method is different from specific implementation method 1 in that ultrasonic cleaning is used in step 1 to clean the bearing surface.

[0029] Specific implementation method three: The difference between this implementation method and specific implementation method one or two is that the thickness of the insulating layer substrate deposited in step two is 150-600 nm.

[0030] Specific implementation method 4: This implementation method is different from any one of specific implementation methods 1 to 3 in that the material of the insulating layer substrate in step 2 is SiC.

[0031] Specific implementation method five: This implementation method is different from specific implementation methods one to four in that the number of patterns on the mask in step three is 3 to 6.

[0032] Specific implementation example 6: This implementation example is different from any one of specific implementation examples 1 to 5 in that the material of the mask in step 3 is quartz.

[0033] Specific implementation method 7: The difference between this implementation method and any one of specific implementation methods 1 to 6 is that the thickness of the thermal resistor sensitive layer deposited in step 4 is 100-550 nm.

[0034] Specific implementation example eight: This implementation example is different from specific implementation example seven in that in step four, a Ag film with a thickness of 350-450 nm is deposited as a thermal resistor sensitive layer.

[0035] Specific embodiment 9: The difference between this embodiment and any one of specific embodiments 1 to 8 is that the pattern of depositing the thermal resistor sensitive layer in step 4 is S-shaped (snake-shaped).

[0036] In this embodiment, connection pins are left at both ends of the thermal resistor sensitive layer.

[0037] Specific implementation example ten: This implementation example is different from specific implementation examples one to nine in that the thickness of the deposited protective layer in step five is 180 to 500 nm.

[0038] Embodiment: The in-situ integration method of the arrayed bearing temperature sensor of this embodiment is implemented according to the following steps:

[0039] Step 1: Perform ultrasonic cleaning on the surface of a bearing with an outer diameter of 100 mm to obtain a clean bearing;

[0040] Step 2: depositing a square insulating layer substrate with a thickness of 150 nm on the outer diameter surface of the outer ring of the clean bearing by a magnetron sputtering process to obtain a bearing with an insulating layer;

[0041] Step 3: Use a flexible mask plate with an arrayed pattern on it, and set the mask plate on the outer diameter surface of the outer ring of the bearing;

[0042] Step 4: sputtering and depositing a 400nm thick thermal resistor sensitive layer on the insulating layer of the outer diameter of the bearing outer ring by a magnetron sputtering process, so that multiple thermal resistor sensitive layers are evenly distributed on the outer diameter surface of the bearing outer ring, and the pattern of the thermal resistor sensitive layer is serpentine (S-shaped);

[0043] Step 5: sputtering and depositing a protective layer with a thickness of 300 nm on the thermal resistor sensitive layer on the outer diameter of the bearing outer ring by a magnetron sputtering process, wherein the protective layer covers the thermal resistor sensitive layer, thereby completing the in-situ integration method of the arrayed bearing temperature sensor;

[0044] Step 6: Thin film sensor adhesion test: Place the bearing ring prepared in situ in alcohol for ultrasonic cleaning to simulate high-speed vibration to observe whether the multi-layer film has good adhesion to the bearing surface.

[0045] The material of the insulating layer substrate is SiC, the material of the thermal resistor sensitive layer is Ag, and the material of the protective layer is Si3N4.

[0046] This embodiment involves the field of sensor technology and fault diagnosis, and has wide applications in the fields of industry, automobiles, aerospace, etc. This technology provides important support for real-time monitoring, fault diagnosis, and predictive maintenance of bearings. By constructing an array of thin-film thermal resistance temperature sensors in situ on the bearing surface, innovative applications of sensor technology in the field of mechanical engineering are achieved.

[0047] The in-situ integration technology of this embodiment can also be applied to the in-situ preparation of vibration sensors, acceleration sensors, pressure sensors, etc. on the bearing surface by changing the position, shape, thickness of the thin film structure design used in the steps and the combination of raw materials for preparing the sensitive layer. It will realize the integration of multiple sensors on the bearing surface and realize intelligent monitoring of the bearing status, with flexible application and strong scalability.

Claims

1. An in-situ integration method for arrayed bearing temperature sensors, characterized in that The in-situ integration method of the arrayed bearing temperature sensor is implemented according to the following steps: Step 1: Clean the bearing surface to obtain a clean bearing; Step 2: Using a magnetron sputtering process to deposit an insulating layer substrate on the outer diameter surface of the outer ring of the clean bearing to obtain a bearing with an insulating layer; Step 3: Use a flexible mask plate with an arrayed pattern on it, and set the mask plate on the outer diameter surface of the outer ring of the bearing; Step 4: sputtering and depositing a thermal resistance sensitive layer on the insulating layer of the outer diameter of the bearing outer ring by a magnetron sputtering process, so that multiple thermal resistance sensitive layers are evenly distributed on the outer diameter surface of the bearing outer ring; Step 5: sputtering and depositing a protective layer on the thermal resistance sensitive layer on the outer diameter of the bearing outer ring by a magnetron sputtering process, thereby completing the in-situ integration method of the arrayed bearing temperature sensor; The material of the insulating layer substrate in step 2 is SiC or Al2O3, the material of the thermal resistor sensitive layer in step 4 is Ag or Cu, and the material of the protective layer in step 5 is Si3N4 or Al2O3.

2. The in-situ integration method of arrayed bearing temperature sensors according to claim 1 is characterized in that In step one, ultrasonic cleaning is used to clean the bearing surface.

3. The in-situ integration method of arrayed bearing temperature sensors according to claim 1, characterized in that The thickness of the insulating layer deposited on the substrate in step 2 is 150-600 nm.

4. The in-situ integration method of arrayed bearing temperature sensors according to claim 1, characterized in that The material of the insulating layer substrate in step 2 is SiC.

5. The in-situ integration method of arrayed bearing temperature sensors according to claim 1, characterized in that In step 3, the number of patterns on the mask is 3 to 6.

6. The in-situ integration method of arrayed bearing temperature sensors according to claim 1, characterized in that The material of the mask in step three is quartz.

7. The in-situ integration method of arrayed bearing temperature sensors according to claim 1, characterized in that The thickness of the thermal resistor sensitive layer deposited in step 4 is 100-550 nm.

8. The in-situ integration method of arrayed bearing temperature sensors according to claim 7, characterized in that In step 4, a Ag film with a thickness of 350-450 nm is deposited as a thermal resistor sensitive layer.

9. The in-situ integration method of arrayed bearing temperature sensors according to claim 1, characterized in that The pattern of the thermal resistor sensitive layer deposited in step 4 is S-shaped.

10. The in-situ integration method of arrayed bearing temperature sensors according to claim 1, characterized in that The thickness of the deposited protective layer in step 5 is 180-500 nm.

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