Michelson interference vibration testing system and vibration testing method

Abstract

The invention provides a Michelson interference vibration measurement system and a vibration test method, and relates to the technical field of interference vibration measurement, the system comprises a laser, a first spectroscope, a balance detector, a reflective mirror, a movable reflective mirror, an object placing table, a second spectroscope, a photoelectric detector, a camera, a light intensity sensor, a display screen and a demodulator; the laser beam is divided into reference light and measuring light through the first spectroscope; the reference light firstly passes through the balance detector, and phase modulation is carried out on the reference light; the modulated reference light is reflected on a reflective mirror to obtain first reflected light; the measuring light enters the object to be measured to obtain second reflected light; the reflected light forms frequency mixing light in the first spectroscope; the frequency-mixed light enters a second spectroscope to obtain first frequency-mixed light and second frequency-mixed light; the first frequency mixing light can irradiate on the light display screen to display light spots and light intensity values; the second frequency mixing light enters a photoelectric detector; and outputting the measured amplitude of the object to be measured. According to the invention, the vibration displacement of the object is accurately measured.

Description

Technical Field

[0001] The invention relates to the technical field of interferometric vibration measurement, in particular to a Michelson interferometric vibration measurement system and a vibration testing method. Background Art

[0002] The Michelson interferometer vibrometer is a vibration measuring instrument based on the Michelson interference principle. It uses the interference phenomenon to accurately measure the vibration displacement and velocity of an object. The Michelson interferometer consists of two optical paths, one part of the light beam is reflected, and the other part of the light beam is reflected through a reference mirror. By adjusting the position of the mirror or detecting the change in the phase of the light beam after reflection, interference fringes can be obtained. The changes in these fringes correspond to the tiny displacement changes of the object being measured.

[0003] The Michelson interferometer vibrometer system can provide high-precision vibration measurement at the nanometer level, avoiding the interference and risks brought by traditional contact measurement through non-contact methods. It is particularly suitable for high-speed rotating parts or high-temperature and high-pressure environments that cannot be directly contacted. Its portability and flexibility enable rapid detection in complex or space-limited sites, helping to promptly discover equipment failures or structural hazards, thereby improving diagnostic efficiency and maintenance reliability. This system has a wide range of application value in the fields of mechanical equipment monitoring, structural health assessment, and precision science research.

[0004] However, when traditional vibration measuring instruments are performing vibration detection on the object being measured, they do not consider whether the light beam is perpendicular to the surface of the object being measured. Since the surfaces of the objects being measured are not all horizontal, it is difficult to ensure the vertical state, and the quality of the reflected light cannot be ensured, which affects the stability of the interference signal, i.e., the mixed light, resulting in large deviations in the vibration measurement results and low measurement accuracy. Summary of the invention

[0005] In order to solve the technical problems that the traditional vibration measuring instruments in the prior art do not consider whether the light beam is perpendicular to the surface of the measured object during the vibration detection of the measured object, and since the surfaces of the measured objects are not all horizontal, it is difficult to ensure the vertical state, and the quality of the reflected light cannot be ensured, which affects the stability of the interference signal, i.e., the mixed light, resulting in large deviations in the vibration measurement results and low measurement accuracy, the present invention provides a Michelson interferometer vibration measurement system and a vibration testing method.

[0006] The technical solution provided by the embodiment of the present invention is as follows:

[0007] First aspect

[0008] A Michelson interferometer vibration measurement system provided by an embodiment of the present invention includes: a laser, a first beam splitter, a balanced detector, a reflector, a movable reflector, a storage table, a second beam splitter, a photoelectric detector, a camera, a light intensity sensor, a display screen and a demodulator;

[0009] The laser beam emitted by the laser is divided into reference light and measurement light by a first beam splitter;

[0010] The reference light is phase modulated by a balanced detector, and the phase modulated reference light is emitted into a reflector to obtain a first reflected light returned by the reflector;

[0011] The measuring light is incident on the object to be measured on the platform through the movable reflector, and a second reflected light returned by the movable reflector is obtained;

[0012] The first reflected light and the second reflected light form mixed light in the first beam splitter;

[0013] The mixed light is incident on the second beam splitter to obtain the first mixed light and the second mixed light;

[0014] The camera and the light intensity sensor are both connected to the display screen, wherein the camera and the light intensity sensor are used to collect the light spot and light intensity value of the first mixed frequency light respectively;

[0015] The second mixed frequency light is incident on the photoelectric detector, and an electrical signal corresponding to the second mixed frequency light is output;

[0016] The photoelectric detector is connected to the demodulator, and outputs the measured amplitude of the object to be measured in combination with the light spot and light intensity value displayed on the display screen.

[0017] Second aspect

[0018] A vibration testing method provided by an embodiment of the present invention is applied to the Michelson interferometer vibration measurement system of the first aspect, comprising:

[0019] S1: Obtain the object to be measured and place it on the storage platform of the Michelson interferometer vibration measurement system;

[0020] S2: Start the Michelson interferometer vibration measurement system;

[0021] S3: Collect the sine wave signal obtained by the reference light passing through the balanced detector;

[0022] S4: Obtain the light spot and light intensity value;

[0023] S5: judging whether the reference light and the second reflected light are overlapped by the first condition that the light spots are overlapped or by the second condition that the light intensity value is the maximum value; if they are overlapped, proceeding to step S7; otherwise, proceeding to step S6;

[0024] S6: adjusting the reflection angle of the movable reflector until the first condition or the second condition is met, that is, the reference light and the second reflected light are overlapped;

[0025] S7: Collect electrical signals;

[0026] S8: Demodulate the electrical signal through the demodulator and output the measured amplitude of the object to be measured.

[0027] The beneficial effects brought about by the technical solution provided by the embodiment of the present invention include at least:

[0028] In the present invention, by combining a camera, a light intensity sensor, a movable reflector and a display screen, the movable reflector can be quickly adjusted based on whether the light spots overlap or the light intensity value, so as to ensure the vertical state of the light beam and the object to be measured in an intuitive manner, improve the stability of the mixed light, reduce the deviation of the vibration measurement result, and improve the measurement accuracy. By combining a light intensity sensor, a camera and a display screen, the measurement results are collected and displayed in real time, making data transmission more convenient, improving the detection efficiency and flexibility, and by using a demodulator to accurately demodulate the electrical signal, the measurement data is more accurate and reliable, and by adjusting the knob, the convenience of operation and the accuracy of measurement are improved. BRIEF DESCRIPTION OF THE DRAWINGS

[0029] In order to more clearly illustrate the technical solutions in the embodiments of the present invention, the following briefly introduces the drawings required for use in the description of the embodiments. Obviously, the drawings described below are only some embodiments of the present invention. For ordinary technicians in this field, other drawings can be obtained based on these drawings without creative work.

[0030] Figure 1 A schematic structural diagram of a Michelson interferometer vibration measurement system provided by an embodiment of the present invention;

[0031] Figure 2 A schematic diagram of the structure of a Michelson interferometer vibrometer provided in an embodiment of the present invention;

[0032] Figure 3 A schematic diagram of a flow chart of a vibration testing method provided by an embodiment of the present invention;

[0033] Figure 4 A schematic structural diagram of a movable reflector provided in an embodiment of the present invention. DETAILED DESCRIPTION

[0034] The technical solution of the present invention is described below in conjunction with the accompanying drawings.

[0035] In the embodiments of the present invention, words such as "exemplarily" and "for example" are used to indicate examples, illustrations or explanations. Any embodiment or design described as "example" in the present invention should not be interpreted as being more preferred or more advantageous than other embodiments or designs. Specifically, the use of the word "example" is intended to present the concept in a specific way. In addition, in the embodiments of the present invention, the meaning expressed by "and / or" can be both, or it can be either of the two.

[0036] In order to make the technical problems, technical solutions and advantages to be solved by the present invention more clear, a detailed description will be given below with reference to the accompanying drawings and specific embodiments.

[0037] Reference Manual Attached Figure 1 , showing a schematic structural diagram of a Michelson interferometer vibration measurement system provided in an embodiment of the present invention.

[0038] Reference Manual Attached Figure 2 , showing a schematic structural diagram of a Michelson interferometer vibrometer provided in an embodiment of the present invention.

[0039] like Figure 2 , is a schematic diagram of the structure of a Michelson interferometer, specifically including: a laser, a first beam splitter, a balanced detector, a reflector, a movable reflector adjustment device, a second beam splitter, a camera, an optical display screen, an electronic display screen, a beam splitter holder and a beam expander lens. The laser beam emitted by the laser is divided into a reference light and a measuring light through the first beam splitter, the reference light is incident on the reflector through the balanced detector, and the first reflected light returned by the reflector is obtained, the measuring light is incident on the object to be measured outside the Michelson interferometer through the movable reflector adjustment device, and the second reflected light returned by the movable reflector is obtained, the first reflected light and the second reflected light form mixed light in the first beam splitter, the mixed light is incident on the second beam splitter, and the first mixed light and the second mixed light are obtained, and the light intensity sensor in the camera and the optical display screen are connected to the electronic display screen.

[0040] A Michelson interferometer vibration measurement system provided by an embodiment of the present invention includes: a laser, a first beam splitter, a balanced detector, a reflector, a movable reflector, a storage table, a second beam splitter, a photoelectric detector, a camera, a light intensity sensor, a display screen and a demodulator.

[0041] Among them, the laser is a device that generates a light beam, usually a stable monochromatic light source. In the Michelson interferometer vibrometer system, the laser provides high-coherence laser as the light source for interference measurement. The spectroscope is an optical element that divides the incident laser beam into two beams. The balanced detector is used to measure the light signal in the reference light path. The balanced detector is usually used to detect the intensity or sinusoidal wave change of the light signal for subsequent interference signal analysis and demodulation. The reflector is an optical element used to reflect the light beam. On the reference light path, the reflector reflects the reference light and returns it to the spectroscope or detector of the system. The movable reflector is an optical element used to reflect and change the propagation direction of the light beam. The stage is a supporting device for placing the object to be measured. The photodetector is a device that converts the light signal into an electrical signal. The camera is an imaging device used to collect the spot information of the mixed light. It can monitor and display the changes in the interference pattern in real time, help adjust and observe the alignment of the light beam, and the light intensity sensor can be used to detect the sensor of the intensity of the mixed light. The light intensity sensor can measure the intensity change of the light beam and display it on the display screen for precise adjustment and optimization of the interference signal. The display screen is a screen that displays the measurement results, light spot position and light intensity changes. The display screen displays the data information collected by the light intensity sensor and camera in real time to help operators make adjustments and observations. The role of the demodulator is to process the electrical signal generated by the mixed light and demodulate the vibration amplitude and frequency of the object to be measured through a specific algorithm (such as the PGC algorithm).

[0042] The laser beam emitted by the laser is divided into reference light and measurement light by the first beam splitter.

[0043] Among them, the reference light is the part of the laser beam emitted by the laser that is separated after passing through the first spectroscope, and usually does not pass through the object to be measured. The main function of the reference light is to provide a stable reference signal. Its intensity and phase remain unchanged during the measurement process. It is used for interference comparison with the measuring light to detect the vibration or displacement change of the object to be measured. The measuring light is the laser beam emitted by the laser that is separated after passing through the first spectroscope and enters the object to be measured. After irradiating the object to be measured, the measuring light will be affected by the surface state and vibration of the object and undergo a phase change.

[0044] It should be noted that the reference light and the measurement light propagate along different paths respectively, which ensures the stability and accuracy of the optical path and improves the system's sensitivity to tiny vibrations. The reference light provides a reference signal for the system, which helps to eliminate the impact of environmental noise on the measurement results and enhances anti-interference capabilities.

[0045] The reference light is phase-modulated by a balanced detector, and the phase-modulated reference light is emitted into a reflector to obtain a first reflected light returned by the reflector.

[0046] Specifically, the balanced detector can ensure the stability of the reference light signal, reduce environmental noise interference, and improve measurement accuracy. The first reflected light reflected by the reflector provides a stable reference signal for interference measurement, making subsequent interference analysis more accurate and maintaining the stability of the reference light path. This enables the entire system to better capture subtle vibration information of the object to be measured, thereby improving the system's anti-interference and signal sensitivity.

[0047] The measuring light is incident on the object to be measured on the object placement table through the movable reflector, and the second reflected light returned by the movable reflector is obtained.

[0048] It should be noted that the movable reflector can accurately guide the measuring light to illuminate the object to be measured, ensuring the stability and accuracy of the optical path. The second reflected light carries the vibration information of the object to be measured, and through interference comparison with the reference light, high-sensitivity vibration detection is achieved. This design allows flexible adjustment of the angle of the movable reflector to adapt it to the measurement needs of different objects, thereby improving the adaptability and measurement efficiency of the system.

[0049] The first reflected light and the second reflected light form mixed light in the first beam splitter.

[0050] It should be noted that the generation of mixed light is based on the interference principle of reference light and measurement light. It can accurately reflect the tiny vibration characteristics of the object to be measured and provide high-resolution measurement results. The phase difference between the reference light and the measurement light is used in the interference process to enhance the signal's sensitivity to tiny changes, greatly improving the system's vibration detection accuracy.

[0051] The mixed light is incident on the second beam splitter to obtain the first mixed light and the second mixed light.

[0052] It should be noted that this optical path separation can process different signal channels at the same time, improving the parallelism and efficiency of the measurement. The first mixed light and the second mixed light are used for different sensors and detectors respectively, which is helpful to collect light spots, light intensity values ​​and electrical signals, further enriching the acquisition dimension of vibration information.

[0053] The camera and the light intensity sensor are both connected to the display screen, wherein the camera and the light intensity sensor are used to collect the light spot and light intensity value of the first mixed-frequency light respectively.

[0054] Among them, the light spot is the bright spot or pattern formed on the sensor or display after the laser beam interferes or reflects, which is used to judge the coincidence and interference state of the light beam path. The light intensity value is the intensity value of the light, which indicates the energy or brightness of the light beam. It is detected by the sensor and is used to reflect the intensity change of the interference light.

[0055] Specifically, the camera collects the light spot position in real time, can intuitively judge the interference of the light beam, and improve the accuracy of light adjustment. The light intensity sensor can feedback the light intensity changes in real time, provide accurate signal strength information, and help optimize the measurement results. The light spot and light intensity value are displayed in real time on the display screen, and judgments and adjustments can be made quickly, which improves the visibility and operational efficiency of the measurement process and ensures the accuracy and stability of the measurement.

[0056] The second mixed frequency light is incident on the photoelectric detector, and an electrical signal corresponding to the second mixed frequency light is output.

[0057] The photoelectric detector is connected to the demodulator, and outputs the measured amplitude of the object to be measured in combination with the light spot and light intensity value displayed on the display screen.

[0058] In a possible implementation, the light intensity sensor is connected to the display screen via a Bluetooth module.

[0059] It should be noted that the photoelectric detector accurately converts optical signals into electrical signals, which is helpful for subsequent digital signal processing and demodulation, improving the measurement accuracy. Combined with the intuitive feedback of the light spot and light intensity value, the system can adjust the optical path in real time to ensure the optimization of interference conditions and improve the stability of the measurement. The demodulator further extracts and outputs the amplitude signal to provide users with accurate vibration amplitude information. It is suitable for high-precision vibration detection scenarios, and is easy to operate and efficient.

[0060] The beneficial effects brought about by the technical solution provided by the embodiment of the present invention include at least:

[0061] In the present invention, by combining a camera, a light intensity sensor, a movable reflector and a display screen, the movable reflector can be quickly adjusted based on whether the light spots overlap or the light intensity value, so as to ensure the vertical state of the light beam and the object to be measured in an intuitive manner, improve the stability of the mixed light, reduce the deviation of the vibration measurement result, and improve the measurement accuracy. By combining a light intensity sensor, a camera and a display screen, the measurement results are collected and displayed in real time, making data transmission more convenient, improving the detection efficiency and flexibility, and by using a demodulator to accurately demodulate the electrical signal, the measurement data is more accurate and reliable, and by adjusting the knob, the convenience of operation and the accuracy of measurement are improved.

[0062] Reference Manual Attached Figure 3 , showing a schematic flow chart of a vibration testing method provided by the present invention.

[0063] The present invention also provides a vibration testing method, which is applied to the above-mentioned Michelson interferometer vibration measurement system, comprising:

[0064] S1: Obtain the object to be measured and place it on the storage platform of the Michelson interferometer vibration measurement system.

[0065] It should be noted that placing the object to be measured on the stage of the Michelson interferometer vibrometer system and ensuring that the object is in a fixed and stable measurement position can improve the accuracy and repeatability of the measurement and reduce the error caused by the change of the object's position.

[0066] S2: Start the Michelson interferometer vibration measurement system.

[0067] S3: Collect the sinusoidal wave signal obtained by the reference light passing through the balanced detector.

[0068] Among them, the sinusoidal wave signal is a waveform signal caused by interference or modulation of light, and is often used to reflect information about vibration or phase change.

[0069] It should be noted that by collecting sinusoidal wave signals, the phase changes of the reference light can be recorded with high precision, providing basic data for vibration detection. The introduction of balanced detectors ensures the stability and accuracy of the signal and effectively reduces noise interference. The sinusoidal wave signal can clearly reflect the periodic characteristics of light interference, which is convenient for subsequent signal demodulation and processing, and improves the system's vibration detection accuracy and response speed.

[0070] S4: Obtain the light spot and light intensity values.

[0071] It should be noted that obtaining the light spot and light intensity values ​​can intuitively reflect the interference situation and ensure that the optical paths of the reference light and the measurement light accurately coincide. The light spot helps with visual adjustment and simplifies the operating process, while the precise collection of light intensity values ​​provides a reliable intensity signal for vibration measurement. Combining the two, the system can provide real-time feedback on the effect of light adjustment, improve the accuracy and stability of the measurement, and ensure the reliability of interference measurement.

[0072] S5: Determine whether the reference light and the second reflected light overlap by the first condition that the light spots are overlapped or by the second condition that the light intensity value is the maximum. If they overlap, proceed to step S7; otherwise, proceed to step S6.

[0073] Specifically, this step can ensure the precise adjustment of the optical path through two independent judgment methods, thereby increasing the reliability of the measurement. The visual detection of light spot overlap can intuitively guide the user to make fine adjustments, simplify the operation process, and improve the friendliness and efficiency of the system. The maximum detection method of light intensity value helps to achieve automatic adjustment, reduce human errors, and ensure the optimization of measurement conditions. By combining these two conditions, the system can quickly and accurately reach the optimal interference state, thereby improving measurement accuracy and stability.

[0074] Reference Manual Attached Figure 4 , shows a schematic structural diagram of a movable reflector provided in an embodiment of the present invention.

[0075] like Figure 4, is a structural schematic diagram of a movable reflector, which has a parallel knob and a vertical knob, wherein the vertical knob includes a coarse adjustment knob with a large gear and a thin bar knob with a small gear, and the parallel knob includes a coarse adjustment knob with a large pitch screw and a fine adjustment knob with a small pitch screw.

[0076] Adjust the coarse adjustment knob of the vertical adjustment knob of the movable reflector so that the large gear drives the movable reflector to rotate at a larger angle around the axis perpendicular to its surface and roughly align it with the light path. Then, adjust the thin strip knob of the vertical knob to increase the reduction ratio of the small gear and slow down the rotation speed, thereby making a finer angle adjustment for the movable reflector and further adjusting the vertical angle of the movable reflector so that the light spots overlap accurately.

[0077] The coarse adjustment knob of the parallel adjustment knob of the movable reflector is adjusted, and the large pitch screw drives the reflector to rotate around an axis parallel to the edge line of the reflector, and the inclination angle of the reflector is greatly adjusted. Then, the inclination angle of the movable reflector is fine-tuned by the fine adjustment knob, and the inclination angle of the movable reflector is accurately controlled until the reference light and the second reflected light coincide.

[0078] S6: adjusting the reflection angle of the movable reflector until the first condition or the second condition is met, that is, the reference light and the second reflected light are overlapped.

[0079] In a possible implementation, the movable reflector includes a parallel adjustment knob and a vertical adjustment knob.

[0080] In a possible implementation, the parallel adjustment knob and the vertical adjustment knob both include a coarse adjustment knob and a fine adjustment knob.

[0081] It should be noted that the coarse adjustment knob is used to quickly adjust a wide range of angles, while the fine adjustment knob provides fine tuning control to achieve high-precision alignment. This two-stage adjustment method can not only quickly complete rough calibration, but also further optimize the optical path overlap state through fine adjustment, thereby effectively improving the measurement accuracy and stability of the system, reducing human errors and ensuring efficient operation.

[0082] In a possible implementation manner, S6 specifically includes:

[0083] By adjusting the coarse adjustment knob and the fine adjustment knob of the vertical adjustment knob, the movable reflector is rotated around the central axis perpendicular to the midpoint of the side of the movable reflector to change the vertical angle of the movable reflector until the first condition or the second condition is met.

[0084] By adjusting the coarse adjustment knob and the fine adjustment knob of the parallel adjustment knob, the movable reflector is rotated around the central axis parallel to the edge line of the movable reflector, and the tilt angle of the reflector is changed until the reference light and the second reflected light coincide.

[0085] It should be noted that by adjusting the reflection angle of the movable reflector so that the reference light and the second reflected light coincide, the accuracy of the interferometric measurement system can be significantly improved, ensuring that the two beams of light are accurately superimposed in space, thereby generating a stable interference pattern and ensuring the accuracy and sensitivity of the measurement results.

[0086] S7: Collect electrical signals.

[0087] S8: Demodulate the electrical signal through the demodulator and output the measured amplitude of the object to be measured.

[0088] In a possible implementation, S8 specifically includes:

[0089] S801: Input the electrical signal to the demodulator.

[0090] S802: Demodulate the electrical signal using a PGC algorithm.

[0091] It should be noted that demodulating the electrical signal through the PGC algorithm can effectively improve the demodulation accuracy of the interference signal and ensure the accurate vibration amplitude. At the same time, it has strong anti-noise ability and improves measurement stability.

[0092] S803: Output the demodulated signal as the measured amplitude of the object to be measured.

[0093] In a possible implementation manner, the measured amplitude is calculated as follows:

[0094]

[0095] Where S(t) represents the demodulated signal, S0 represents the DC bias of the demodulated signal, S1 represents the AC amplitude of the demodulated signal, C represents the phase modulation depth related to the driving signal strength of the balanced detector, ω c represents the carrier frequency of the demodulator, d(t) represents the measured amplitude of the object to be measured, and k represents the wave number of the mixed light, where k = 2π / λ, λ represents the wavelength of the mixed light, It represents the initial phase caused by the initial optical path difference between the measurement arm and the reference arm.

[0096] Specifically, the demodulator adopts the PGC (Phase Generated Carrier) algorithm, which greatly improves the accuracy and anti-interference ability of signal demodulation. The PGC algorithm can effectively separate the phase information in the signal by precisely controlling and extracting the phase of the carrier signal, reducing the impact of noise on the measurement results, enabling the system to maintain stable performance in complex environments, thereby improving the overall measurement reliability and efficiency of the system.

[0097] In a possible implementation manner, S802 further includes:

[0098] The demodulated electrical signal is filtered through a low-pass filter to remove high-frequency noise and obtain the measured amplitude of the object to be measured.

[0099] It should be noted that by demodulating the electrical signal with a demodulator, the measured amplitude information of the object to be measured can be effectively extracted. The demodulator can separate the phase and amplitude information in the interference signal and convert it into a numerical output corresponding to the vibration of the object. Through this demodulation process, the system can accurately identify tiny vibration amplitudes and ensure high resolution and accuracy of the measurement data. The demodulated signal is clearer and more readable, which is convenient for subsequent analysis and processing. At the same time, it effectively filters out interference noise, thereby improving the reliability and stability of the measurement.

[0100] The beneficial effects brought about by the technical solution provided by the embodiment of the present invention include at least:

[0101] In the present invention, by combining a camera, a light intensity sensor, a movable reflector and a display screen, the movable reflector can be quickly adjusted based on whether the light spots overlap or the light intensity value, so as to ensure the vertical state of the light beam and the object to be measured in an intuitive manner, improve the stability of the mixed light, reduce the deviation of the vibration measurement result, and improve the measurement accuracy. By combining a light intensity sensor, a camera and a display screen, the measurement results are collected and displayed in real time, making data transmission more convenient, improving the detection efficiency and flexibility, and by using a demodulator to accurately demodulate the electrical signal, the measurement data is more accurate and reliable, and by adjusting the knob, the convenience of operation and the accuracy of measurement are improved.

[0102] It should be understood that the processor in the embodiment of the present invention may be a central processing unit (CPU), and the processor may also be other general-purpose processors, digital signal processors (DSP), application specific integrated circuits (ASIC), field programmable gate arrays (FPGA) or other programmable logic devices, discrete gate or transistor logic devices, discrete hardware components, etc. The general-purpose processor may be a microprocessor or the processor may also be any conventional processor, etc.

[0103] It should also be understood that the memory in the embodiments of the present invention may be a volatile memory or a non-volatile memory, or may include both volatile and non-volatile memories. Among them, the non-volatile memory may be a read-only memory (ROM), a programmable read-only memory (PROM), an erasable programmable read-only memory (EPROM), an electrically erasable programmable read-only memory (EEPROM), or a flash memory. The volatile memory may be a random access memory (RAM), which is used as an external cache. By way of example and not limitation, many forms of random access memory (RAM) are available, such as static RAM (SRAM), dynamic random access memory (DRAM), synchronous DRAM (SDRAM), double data rate synchronous dynamic random access memory (DDR SDRAM), enhanced synchronous dynamic random access memory (ESDRAM), synchronous link DRAM (SLDRAM), and direct RAM bus random access memory (DR RAM).

[0104] The above embodiments can be implemented in whole or in part by software, hardware (such as circuits), firmware or any other combination. When implemented using software, the above embodiments can be implemented in whole or in part in the form of a computer program product. The computer program product includes one or more computer instructions or computer programs. When a computer instruction or computer program is loaded or executed on a computer, a process or function according to an embodiment of the present invention is generated in whole or in part. The computer can be a general-purpose computer, a special-purpose computer, a computer network, or other programmable device. Computer instructions can be stored in a computer-readable storage medium, or transmitted from one computer-readable storage medium to another computer-readable storage medium. For example, computer instructions can be transmitted from one website, computer, server or data center to another website, computer, server or data center by wired (such as infrared, wireless, microwave, etc.). The computer-readable storage medium can be any available medium that can be accessed by a computer or a data storage device such as a server or data center that contains one or more available media sets. The available medium can be a magnetic medium (for example, a floppy disk, a hard disk, a tape), an optical medium (for example, a DVD), or a semiconductor medium. The semiconductor medium can be a solid-state hard disk.

[0105] It should be understood that the term "and / or" in this article is only a description of the association relationship of associated objects, indicating that there can be three relationships. For example, A and / or B can represent: A exists alone, A and B exist at the same time, and B exists alone. A and B can be singular or plural. In addition, the character " / " in this article generally indicates that the associated objects before and after are in an "or" relationship, but it may also indicate an "and / or" relationship. Please refer to the context for specific understanding.

[0106] In the present invention, "at least one" means one or more, and "more than one" means two or more. "At least one of the following" or similar expressions refers to any combination of these items, including any combination of single or plural items. For example, at least one of a, b, or c can be represented by: a, b, c, ab, ac, bc, or abc, where a, b, c can be single or multiple.

[0107] It should be understood that in various embodiments of the present invention, the size of the serial numbers of the above-mentioned processes does not mean the order of execution. The execution order of each process should be determined by its function and internal logic, and should not constitute any limitation on the implementation process of the embodiments of the present invention.

[0108] Those skilled in the art will appreciate that the units and algorithm steps of each example described in conjunction with the embodiments disclosed herein can be implemented in electronic hardware, or a combination of computer software and electronic hardware. Whether these functions are performed in hardware or software depends on the specific application and design constraints of the technical solution. Professional and technical personnel can use different methods to implement the described functions for each specific application, but such implementation should not be considered to be beyond the scope of the present invention.

[0109] Those skilled in the art can clearly understand that, for the convenience and brevity of description, the specific working processes of the above-described equipment, devices and units can refer to the corresponding processes in the aforementioned method embodiments and will not be repeated here.

[0110] In the several embodiments provided by the present invention, it should be understood that the disclosed devices, apparatuses and methods can be implemented in other ways. For example, the device embodiments described above are only schematic, for example, the division of units is only a logical function division, and there may be other division methods in actual implementation, such as multiple units or components can be combined or integrated into another device, or some features can be ignored or not executed. Another point is that the mutual coupling or direct coupling or communication connection shown or discussed can be through some interfaces, indirect coupling or communication connection of devices or units, which can be electrical, mechanical or other forms.

[0111] The units described as separate components may or may not be physically separated, and the components shown as units may or may not be physical units, that is, they may be located in one place or distributed on multiple network units. Some or all of the units may be selected according to actual needs to achieve the purpose of the solution of this embodiment.

[0112] In addition, each functional unit in each embodiment of the present invention may be integrated into one processing unit, or each unit may exist physically separately, or two or more units may be integrated into one unit.

[0113] If the function is implemented in the form of a software functional unit and sold or used as an independent product, it can be stored in a computer-readable storage medium. Based on this understanding, the technical solution of the present invention, or the part that contributes to the prior art, or the part of the technical solution, can be embodied in the form of a software product. The computer software product is stored in a storage medium, including several instructions for a computer device (which can be a personal computer, server, or network device, etc.) to perform all or part of the steps of the methods of various embodiments of the present invention. The aforementioned storage medium includes: U disk, mobile hard disk, read-only memory (ROM), random access memory (RAM), disk or optical disk, etc., various media that can store program codes.

[0114] An embodiment of the present invention provides a computer-readable storage medium on which a computer program is stored. When the program is executed by a processor, a vibration testing method as described in the method embodiment is implemented.

[0115] A computer-readable storage medium provided by the present invention can implement the steps and effects of the vibration testing method of the above method embodiment. To avoid repetition, the present invention will not go into details.

[0116] The beneficial effects brought about by the technical solution provided by the embodiment of the present invention include at least:

[0117] In the present invention, by combining a camera, a light intensity sensor, a movable reflector and a display screen, the movable reflector can be quickly adjusted based on whether the light spots overlap or the light intensity value, so as to ensure the vertical state of the light beam and the object to be measured in an intuitive manner, improve the stability of the mixed light, reduce the deviation of the vibration measurement result, and improve the measurement accuracy. By combining a light intensity sensor, a camera and a display screen, the measurement results are collected and displayed in real time, making data transmission more convenient, improving the detection efficiency and flexibility, and by using a demodulator to accurately demodulate the electrical signal, the measurement data is more accurate and reliable, and by adjusting the knob, the convenience of operation and the accuracy of measurement are improved.

[0118] The above are only specific embodiments of the present invention, but the protection scope of the present invention is not limited thereto. Any person skilled in the art who is familiar with the technical field can easily think of changes or substitutions within the technical scope disclosed by the present invention, which should be included in the protection scope of the present invention. Therefore, the protection scope of the present invention should be based on the protection scope of the claims.

[0119] There are a few points to note:

[0120] (1) The drawings of the embodiments of the present invention only relate to the structures related to the embodiments of the present invention, and other structures may refer to the general design.

[0121] (2) For the sake of clarity, in the drawings used to describe the embodiments of the present invention, the thickness of the layers or regions is exaggerated or reduced, that is, these drawings are not drawn according to the actual scale. It is understood that when an element such as a layer, film, region or substrate is referred to as being "on" or "under" another element, the element may be "directly" "on" or "under" the other element or there may be intermediate elements.

[0122] (3) In the absence of conflict, the embodiments of the present invention and the features therein may be combined with each other to obtain new embodiments.

[0123] The above are only specific embodiments of the present invention, but the protection scope of the present invention is not limited thereto. The protection scope of the present invention shall be based on the protection scope of the claims.

Claims

1. A Michelson interferometer vibration measurement system, characterized in that: include: Laser, first beam splitter, balanced detector, reflector, movable reflector, storage table, second beam splitter, photoelectric detector, camera, light intensity sensor, display screen and demodulator; The laser beam emitted by the laser is divided into reference light and measurement light by the first beam splitter; The reference light is phase-modulated by the balanced detector, and the phase-modulated reference light is emitted into the reflector to obtain a first reflected light returned by the reflector; The measuring light is emitted into the object to be measured on the object placement table through the movable reflector to obtain a second reflected light returned by the movable reflector; The first reflected light and the second reflected light form mixed light in the first beam splitter; The mixed light is incident on the second beam splitter to obtain a first mixed light and a second mixed light; The camera and the light intensity sensor are both connected to the display screen, wherein the camera and the light intensity sensor are used to collect the light spot and light intensity value of the first mixed-frequency light respectively; The second mixed frequency light is incident on the photodetector, and an electrical signal corresponding to the second mixed frequency light is output; The photoelectric detector is connected to the demodulator, and outputs the measured amplitude of the object to be measured in combination with the light spot and light intensity value displayed on the display screen.

2. The Michelson interferometer vibrometer system according to claim 1, characterized in that: The light intensity sensor is connected to the display screen via a Bluetooth module.

3. A vibration testing method, characterized in that: The Michelson interferometer vibrometer system applied to any one of claims 1 to 2, the method comprising: S1: Acquire the object to be measured, and place the object to be measured on the storage platform of the Michelson interferometer vibration measurement system; S2: starting the Michelson interferometer vibration measurement system; S3: collecting a sine wave signal obtained by the reference light passing through the balanced detector; S4: Acquire the light spot and the light intensity value; S5: judging whether the reference light and the second reflected light are overlapped by the first condition that the light spots are overlapped or by the second condition that the light intensity value is the maximum value; if they are overlapped, proceeding to step S7; otherwise, proceeding to step S6; S6: adjusting the reflection angle of the movable reflector until the first condition or the second condition is met, that is, the reference light and the second reflected light are overlapped; S7: collecting the electrical signal; S8: demodulating the electrical signal through the demodulator, and outputting the measured amplitude of the object to be measured.

4. The vibration testing method according to claim 3, characterized in that: The movable reflector includes a parallel adjustment knob and a vertical adjustment knob.

5. The vibration testing method according to claim 4, characterized in that: The parallel adjustment knob and the vertical adjustment knob both include a coarse adjustment knob and a fine adjustment knob.

6. The vibration testing method according to claim 5, characterized in that: The S6 is specifically: By adjusting the coarse adjustment knob and the fine adjustment knob of the vertical adjustment knob, the movable reflector is rotated around a central axis perpendicular to the midpoint of the side of the movable reflector to change the vertical angle of the movable reflector until the first condition or the second condition is met; By adjusting the coarse adjustment knob and the fine adjustment knob of the parallel adjustment knob, the movable reflector is rotated around a central axis parallel to the edge line of the movable reflector, and the tilt angle of the reflector is changed until the reference light and the second reflected light coincide.

7. The vibration testing method according to claim 3, characterized in that: The S8 specifically includes: S801: Input the electrical signal to the demodulator; S802: Demodulate the electrical signal using a PGC algorithm; S803: Outputting the demodulated signal as the measured amplitude of the object to be measured.

8. The vibration testing method according to claim 7, characterized in that: The measured amplitude is calculated as follows: Where S(t) represents the demodulated signal, S0 represents the DC bias of the demodulated signal, S1 represents the AC amplitude of the demodulated signal, C represents the phase modulation depth related to the driving signal strength of the balanced detector, ω c represents the carrier frequency of the demodulator, d(t) represents the measured amplitude of the object to be measured, and k represents the wave number of the mixed light, where k = 2π / λ, λ represents the wavelength of the mixed light, It represents the initial phase caused by the initial optical path difference between the measurement arm and the reference arm.

9. The vibration testing method according to claim 8, characterized in that: After S802, the method further includes: The demodulated electrical signal is filtered through a low-pass filter to remove high-frequency noise and obtain the measured amplitude of the object to be measured.

10. A computer-readable storage medium having a computer program stored thereon, characterized in that: When the program is executed by a processor, the vibration testing method according to any one of claims 3 to 9 is implemented.

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