Automatic silicon wafer cleaning truss manipulator

Abstract

The automatic silicon wafer cleaning truss manipulator comprises a cleaning table, a driving box is arranged at the top end of the cleaning table, the driving box is connected with the cleaning table through a fixing frame, a cleaning groove is formed in the top end of the cleaning table, and a to-be-machined product containing table is arranged at the position, located on one side of the cleaning groove, of the top end of the cleaning table. The device has the beneficial effects that by arranging the circulating driving assembly and the multiple sets of manipulators, the manipulators can circularly move after grabbing the placing baskets, so that the cleaned placing baskets can circularly move to the transfer placing table to be conveniently taken away by personnel, the manipulators do not need to return to the original path to grab again, the cleaning efficiency is improved, more time and labor are saved, and the working efficiency is improved. By arranging the clamping assembly, the manipulator can grab and clamp the placing basket from multiple directions, so that the clamping is firmer, the placing basket is prevented from sliding off from the manipulator in the cleaning process, and the safety of the manipulator is improved.

Description

Technical Field

[0001] The invention relates to the technical field of silicon wafer processing, and in particular to an automatic silicon wafer cleaning truss robot. Background Art

[0002] Silicon wafers, also known as silicon wafers, are important materials for making integrated circuits. Various semiconductor devices can be made by photolithography, ion implantation and other methods. Silicon wafers are one of the main substrate materials for semiconductors.

[0003] The surface of silicon wafers needs to be cleaned during the production and processing. Currently, the main way to clean silicon wafers is to place the silicon wafers in a basket, and then use a robot to grab the basket and move it to a cleaning tank for cleaning. When the existing robot grabs the basket for cleaning, the basket is easily slipped from the robot when it encounters water, and the grip is not reliable. At the same time, the existing robot needs to return the basket to its original position after cleaning, and it is time-consuming and troublesome to re-grab another set of cleaned baskets.

[0004] Currently, no effective solution has been proposed for the problems in the related technologies. Summary of the invention

[0005] In view of the problems in the related art, the present invention proposes an automated silicon wafer cleaning truss robot to overcome the above technical problems existing in the existing related art.

[0006] To this end, the specific technical solution adopted by the present invention is as follows:

[0007] An automated silicon wafer cleaning truss robot comprises a cleaning table, a driving box is provided at the top of the cleaning table, the driving box is connected to the cleaning table through a fixed frame, a cleaning tank is provided at the top of the cleaning table, a table for placing products to be processed is provided at the top of the cleaning table and located on one side of the cleaning tank, a transfer table is provided at the cleaning table and located on one side of the table for placing products to be processed, a placing basket is provided at the top of the table for placing products to be processed, a plurality of evenly distributed mounting plates are provided at the bottom of the driving box, the mounting plate is connected to the driving box through a circulating driving component, a clamping component is provided at the bottom of the mounting plate, and the clamping component comprises a lifting plate provided at the bottom of the mounting plate, The lifting plate is connected to the mounting plate through an electric push rod, and a hollow mounting column is provided at the bottom end of the lifting plate, and a plurality of clamps distributed in a circular array are provided at the bottom end of the hollow mounting column, and the clamps are connected to the hollow mounting column through a U-shaped connecting seat, and a cylinder is provided at the top end of the lifting plate, and the movable end of the cylinder penetrates the lifting plate and extends into the hollow mounting column to be connected to the lifting plate, and a plurality of connecting columns distributed in a circular array are provided at the bottom end of the lifting plate, and the bottom end of the connecting column extends to the outside of the hollow mounting column and is connected to the clamps through a movable support rod, and a stirring assembly is provided at the bottom end of the hollow mounting column and between the plurality of clamps distributed in a circular array.

[0008] Furthermore, an anti-dropping block is provided on one side of the clamping claw, and an annular groove matching the anti-dropping block is provided on the outer wall of the placement basket.

[0009] Furthermore, a through hole matching the connecting column is formed at the bottom end of the hollow mounting column, the clamp is connected to the U-shaped connecting seat via a first rotating shaft, and the movable support rods are respectively connected to the clamp and the connecting column via a second rotating shaft.

[0010] Furthermore, the circulation drive assembly includes symmetrically arranged pulleys in the drive box, two groups of the pulleys are respectively connected to the drive box through a rotating shaft three, and the two groups of the pulleys are connected to each other through a transmission belt. The outer wall of the transmission belt is provided with a plurality of evenly distributed connecting blocks, a travel hole is provided at the bottom end of the drive box, a sliding block is provided on the inner wall of the travel hole, a sliding groove matching the sliding block is provided on the drive box, a connecting plate is provided on one side of the connecting block, the connecting plate is connected to the sliding block through a rotating shaft four, and the bottom end of the sliding block is connected to the mounting plate through a fixing rod.

[0011] Furthermore, a group of three top ends of the rotating shaft extend outside the driving box and are connected to a driving end of the motor.

[0012] Furthermore, the stirring assembly includes a rotating shaft five provided at the bottom end of the hollow mounting column, the outer wall of the rotating shaft five is sleeved with a stirring shaft, the stirring shaft is connected to the hollow mounting column through a lifting assembly, the outer wall of the stirring shaft is fixedly sleeved with stirring blades, the outer wall of the rotating shaft five is provided with a limit key, and the inner wall of the stirring shaft is provided with a key slot matching the limit key.

[0013] Furthermore, the top end of the rotating shaft 5 extends into the hollow mounting column and is connected to the driving end of the motor 2.

[0014] Furthermore, the lifting assembly includes a U-shaped lifting frame provided at the bottom end of the hollow mounting column, the top end of the U-shaped lifting frame extends into the hollow mounting column, the hollow mounting column is provided with symmetrically arranged gears, the gears are connected to the hollow mounting column through a rotating shaft six, the connecting column and the U-shaped lifting frame are both provided with meshing teeth matching the gears, and the U-shaped lifting frame is connected to the stirring shaft through a bearing.

[0015] Furthermore, a sliding hole matching the U-shaped lifting frame is formed at the bottom end of the hollow mounting column.

[0016] Furthermore, a limiting plate is provided at the top of the U-shaped lifting frame.

[0017] The beneficial effects of the present invention are as follows: by setting a circulating drive component and multiple groups of manipulators, the manipulators can move in a circulating manner after grabbing the placement basket, so that the placement basket after cleaning can be moved in a circulating manner to the transfer placement table for personnel to take away, without the need to return the manipulator to the original path and re-grab it, thereby improving its cleaning efficiency and saving time and effort. By setting a clamping component, the manipulator is able to grab and clamp the placement basket from multiple directions, making its clamping more secure and preventing the placement basket from slipping from the manipulator during the cleaning process, thereby improving its safety. By setting a stirring component, when the manipulator grabs the placement basket, it can simultaneously drive the stirring shaft to move into the placement basket. When the placement basket moves into the cleaning tank, the stirring component can drive the cleaning liquid in the placement basket to vibrate quickly, so that the cleaning liquid is in full contact with the silicon wafers in the placement basket, making the cleaning more thorough. BRIEF DESCRIPTION OF THE DRAWINGS

[0018] In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the drawings required for use in the embodiments will be briefly introduced below. Obviously, the drawings described below are only some embodiments of the present invention. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying creative work.

[0019] Figure 1 is a schematic diagram of the overall structure of an automated silicon wafer cleaning truss robot according to an embodiment of the present invention;

[0020] Figure 2 is a structural schematic diagram of an automated silicon wafer cleaning truss robot from another angle according to an embodiment of the present invention;

[0021] Figure 3 This is a front view of an automated silicon wafer cleaning truss robot according to an embodiment of the present invention;

[0022] Figure 4 is a structural schematic diagram of a hollow mounting column in an automated silicon wafer cleaning truss robot according to an embodiment of the present invention;

[0023] Figure 5 is a front view of a hollow mounting column in an automated silicon wafer cleaning truss robot according to an embodiment of the present invention;

[0024] Figure 6 is a cross-sectional view of a hollow mounting column in an automated silicon wafer cleaning truss robot according to an embodiment of the present invention;

[0025] Figure 7 is a cross-sectional view of a stirring shaft in an automated silicon wafer cleaning truss robot according to an embodiment of the present invention;

[0026] Figure 8 is a cross-sectional view of a driving box in an automated silicon wafer cleaning truss robot according to an embodiment of the present invention;

[0027] Fig. 9 yes Figure 8 A local enlarged schematic diagram of point A in the middle.

[0028] In the figure:

[0029] 1. Cleaning table; 2. Drive box; 3. Fixed frame; 4. Cleaning tank; 5. Placement table for products to be processed; 6. Transfer table; 7. Placement basket; 8. Mounting plate; 9. Lifting plate; 10. Electric push rod; 11. Hollow mounting column; 12. Clamping claw; 13. U-shaped connecting seat; 14. Cylinder; 15. Lifting plate; 16. Connecting column; 17. Movable support rod; 18. Through hole; 19. Rotating shaft 1; 20. Rotating shaft 2; 21. Pulley; 22 , shaft three; 23, transmission belt; 24, connecting block; 25, travel hole; 26, sliding block; 27, slide groove; 28, connecting plate; 29, shaft four; 30, fixing rod; 31, motor one; 32, shaft five; 33, stirring shaft; 34, limit key; 35, keyway; 36, motor two; 37, U-shaped lifting frame; 38, gear; 39, shaft six; 40, meshing teeth; 41, sliding hole; 42, limit plate; 43, anti-drop block. DETAILED DESCRIPTION

[0030] To further illustrate each embodiment, the present invention provides drawings, which are part of the disclosure of the present invention and are mainly used to illustrate the embodiments and can be used in conjunction with the relevant descriptions in the specification to explain the operating principles of the embodiments. With reference to these contents, ordinary technicians in the field should be able to understand other possible implementations and advantages of the present invention. The components in the figures are not drawn to scale, and similar component symbols are generally used to represent similar components.

[0031] According to an embodiment of the present invention, an automated silicon wafer cleaning truss robot is provided.

[0032] Embodiment 1:

[0033] like Figure 1-9 As shown, the automated silicon wafer cleaning truss robot according to an embodiment of the present invention includes a cleaning table 1, a driving box 2 is provided at the top of the cleaning table 1, the driving box 2 is connected to the cleaning table 1 through a fixing frame 3, a cleaning tank 4 is provided at the top of the cleaning table 1, a workpiece placement table 5 is provided at the top of the cleaning table 1 and located on one side of the cleaning tank 4, a transfer placement table 6 is provided at the cleaning table 1 and located on one side of the workpiece placement table 5, a placement basket 7 is provided at the top of the workpiece placement table 5, a plurality of evenly distributed mounting plates 8 are provided at the bottom of the driving box 2, the mounting plate 8 is connected to the driving box 2 through a circulating driving component, a clamping component is provided at the bottom of the mounting plate 8, and the clamping component includes a lifting plate 9 provided at the bottom of the mounting plate 8, and the lifting plate 9 It is connected to the mounting plate 8 through an electric push rod 10, a hollow mounting column 11 is provided at the bottom end of the lifting plate 9, a plurality of clamps 12 distributed in a circular array are provided at the bottom end of the hollow mounting column 11, the clamps 12 are connected to the hollow mounting column 11 through a U-shaped connecting seat 13, a cylinder 14 is provided at the top end of the lifting plate 9, the movable end of the cylinder 14 passes through the lifting plate 9 and extends to the hollow mounting column 11 and is connected to the lifting plate 15, a plurality of connecting columns 16 distributed in a circular array are provided at the bottom end of the lifting plate 15, the bottom end of the connecting column 16 extends to the outside of the hollow mounting column 11 and is connected to the clamps 12 through a movable support rod 17, a stirring assembly is provided at the bottom end of the hollow mounting column 11 and between the plurality of clamps 12 distributed in a circular array.

[0034] Embodiment 2:

[0035] like Figure 1-9As shown, it includes a cleaning table 1, a driving box 2 is provided at the top of the cleaning table 1, and the driving box 2 is connected to the cleaning table 1 through a fixing frame 3. A cleaning tank 4 is opened at the top of the cleaning table 1, and a table 5 for placing products to be processed is provided at the top of the cleaning table 1 and located on one side of the cleaning tank 4. A transfer table 6 is provided on the cleaning table 1 and located on one side of the table 5 for placing products to be processed. A placing basket 7 is provided at the top of the table 5 for placing products to be processed, and a plurality of evenly distributed mounting plates 8 are provided at the bottom of the driving box 2, and the mounting plates 8 are connected to the driving box 2 through a circulating driving component, and a clamping component is provided at the bottom of the mounting plate 8, and the clamping component includes a lifting plate 9 provided at the bottom of the mounting plate 8, and the lifting plate 9 is connected to the mounting plate 8 through an electric push rod 10. The lifting plate 9 is connected with the mounting plate 8, a hollow mounting column 11 is provided at the bottom end of the lifting plate 9, a plurality of clamps 12 distributed in a circular array are provided at the bottom end of the hollow mounting column 11, and the clamps 12 are connected to the hollow mounting column 11 through a U-shaped connecting seat 13, a cylinder 14 is provided at the top end of the lifting plate 9, the movable end of the cylinder 14 passes through the lifting plate 9 and extends to the hollow mounting column 11 and is connected to the lifting plate 15, a plurality of connecting columns 16 distributed in a circular array are provided at the bottom end of the lifting plate 15, the bottom end of the connecting column 16 extends to the outside of the hollow mounting column 11 and is connected to the clamps 12 through a movable support rod 17, and a stirring assembly is provided at the bottom end of the hollow mounting column 11 and between the plurality of clamps 12 distributed in a circular array. The circulating drive assembly includes symmetrically arranged pulleys 21 provided in the driving box 2, two groups of pulleys 21 are respectively connected to the driving box 2 through the rotating shaft 3 22, and the two groups of pulleys 21 are connected to each other through the transmission belt 23, and the outer wall of the transmission belt 23 is provided with a number of evenly distributed connection blocks 24, the bottom end of the driving box 2 is provided with a travel hole 25, and the inner wall of the travel hole 25 is provided with a sliding block 26, and the driving box 2 is provided with a slide groove 27 matching the sliding block 26, and a connecting plate 28 is provided on one side of the connection block 24, and the connecting plate 28 is connected to the sliding block 26 through the rotating shaft 4 29, and the bottom end of the sliding block 26 is connected to the mounting plate 8 through the fixing rod 30. The top end of a group of rotating shafts 3 22 extends to the outside of the driving box 2 and is connected to the driving end of the motor 1 31.When in use, a placement basket 7 containing silicon wafers is placed on a workpiece placement table 5, a motor 1 31 is started to drive a set of rotating shafts 20 to rotate, the rotating shafts 20 drive the pulleys 21 to rotate, the pulleys 21 drive the transmission belts 23 to rotate, the transmission belts 23 drive the connecting blocks 24 to rotate, the connecting blocks 24 drive the sliding blocks 26 to move in an elliptical trajectory through the rotating shafts 4 29, the sliding blocks 26 drive the mounting plates 8 to move through the fixing rods 30, the mounting plates 8 drive the hollow mounting columns 11 to move, and when the hollow mounting columns 11 move to the workpiece to be processed When the top of the product placement table 5 is reached, the cylinder 14 is started to drive the lifting plate 15 to move upward, and the lifting plate 15 drives the connecting column 16 to move upward. The connecting column 16 starts to pull the multiple sets of clamps 12 through the movable support rod 17, so that the multiple sets of clamps 12 grab the placement basket 7 on the product placement table 5. At this time, the transmission belt 23 continues to run, and the personnel place another set of placement baskets 7 on the product placement table 5 to be processed, which is grabbed by the robot behind. When the hollow installation column 11 moves to the top of the cleaning tank 4, the electric push rod 10 is started to drive the lifting plate 9 When the basket 7 moves to the other side of the cleaning tank 4, the electric push rod 10 is started to drive the basket 7 to move upward and leave the cleaning tank 4. When the basket 7 moves to the top of the transfer placement table 6, the cylinder 14 is started to drive the lifting plate 15 to move downward, and the lifting plate 15 drives the connecting column 16 to move downward. The connecting column 16 pushes the clamping jaws 12 through the movable support rod 17, so that the clamping jaws 12 release the basket 7, and the basket 7 falls to the The cleaning basket can be taken away from the transfer placement table 6 by setting a circulating drive component and multiple groups of manipulators. After the manipulator grabs the placement basket, it can be moved in a circular motion, so that the placement basket after cleaning can be moved in a circular motion to the transfer placement table for personnel to take away. There is no need to return the manipulator to the original path and grab it again, thereby improving its cleaning efficiency and saving time and effort. By setting a clamping component, the manipulator can grab and clamp the placement basket from multiple directions, making its clamping more secure, preventing the placement basket from slipping from the manipulator during the cleaning process, and improving its safety.

[0036] Embodiment three:

[0037] like Figure 1-9As shown, it includes a cleaning table 1, a driving box 2 is provided at the top of the cleaning table 1, and the driving box 2 is connected to the cleaning table 1 through a fixing frame 3. A cleaning tank 4 is opened at the top of the cleaning table 1, and a table 5 for placing products to be processed is provided at the top of the cleaning table 1 and located on one side of the cleaning tank 4. A transfer table 6 is provided on the cleaning table 1 and located on one side of the table 5 for placing products to be processed. A placing basket 7 is provided at the top of the table 5 for placing products to be processed, and a plurality of evenly distributed mounting plates 8 are provided at the bottom of the driving box 2, and the mounting plates 8 are connected to the driving box 2 through a circulating driving component, and a clamping component is provided at the bottom of the mounting plate 8, and the clamping component includes a lifting plate 9 provided at the bottom of the mounting plate 8, and the lifting plate 9 is connected to the mounting plate 8 through an electric push rod 10. The lifting plate 9 is connected to the mounting plate 8, and a hollow mounting column 11 is provided at the bottom end of the lifting plate 9, and a plurality of clamping claws 12 distributed in a circumferential array are provided at the bottom end of the hollow mounting column 11, and the clamping claws 12 are connected to the hollow mounting column 11 through a U-shaped connecting seat 13. A cylinder 14 is provided at the top end of the lifting plate 9, and the movable end of the cylinder 14 penetrates the lifting plate 9 and extends to the hollow mounting column 11 to be connected to the lifting plate 15, and a plurality of connecting columns 16 distributed in a circumferential array are provided at the bottom end of the lifting plate 15, and the bottom end of the connecting column 16 extends to the outside of the hollow mounting column 11 and is connected to the clamping claw 12 through a movable support rod 17, and a stirring assembly is provided at the bottom end of the hollow mounting column 11 and between the plurality of clamping claws 12 distributed in a circumferential array. An anti-slip block 43 is provided on one side of the clamping claw 12, and an annular groove matching the anti-slip block 43 is provided on the outer wall of the placing basket 7. The bottom end of the hollow mounting column 11 is provided with a through hole 18 matching the connecting column 16, the clamping jaw 12 is connected to the U-shaped connecting seat 13 via a rotating shaft 19, and the movable support rod 17 is respectively connected to the clamping jaw 12 and the connecting column 16 via a rotating shaft 20. The stirring assembly includes a rotating shaft 5 32 provided at the bottom end of the hollow mounting column 11, the outer wall of the rotating shaft 5 32 is sleeved with a stirring shaft 33, the stirring shaft 33 is connected to the hollow mounting column 11 via a lifting assembly, the outer wall of the stirring shaft 33 is fixedly sleeved with stirring blades, the outer wall of the rotating shaft 5 32 is provided with a limit key 34, and the inner wall of the stirring shaft 33 is provided with a key slot 35 matching the limit key 34. The top end of the rotating shaft 5 32 extends into the hollow mounting column 11 and is connected to the driving end of the motor 2 36. The lifting assembly includes a U-shaped lifting frame 37 provided at the bottom end of the hollow mounting column 11, the top end of the U-shaped lifting frame 37 extends into the hollow mounting column 11, and a symmetrically arranged gear 38 is provided in the hollow mounting column 11. The gear 38 is connected to the hollow mounting column 11 through a rotating shaft 6 39, and meshing teeth 40 matching the gear 38 are provided on the connecting column 16 and the U-shaped lifting frame 37. The U-shaped lifting frame 37 is connected to the stirring shaft 33 through a bearing.The bottom end of the hollow mounting column 11 is provided with a sliding hole 41 matching the U-shaped lifting frame 37. A limit plate 42 is provided at the top of the U-shaped lifting frame 37. When the clamp 12 grabs the placement basket 7, the cylinder 14 drives the lifting plate 15 to move upward, and the lifting plate 15 drives the connecting column 16 to move upward. When the connecting column 16 moves upward, it drives the gear 38 to rotate through the meshing teeth 40. The gear 38 rotates and drives the U-shaped lifting frame 37 to move downward through another set of meshing teeth 40. The U-shaped lifting frame 37 drives the stirring shaft 33 to move downward to the placement basket 7. When the placement basket 7 moves to the cleaning tank 4, the motor 2 36 is started to drive the rotating shaft 5 32 to rotate. The rotating shaft 5 32 drives the stirring shaft 33 to rotate through the limit key 34. The stirring shaft 33 drives the stirring blades to stir the cleaning liquid in the placement basket 7, so that the cleaning liquid is quickly The vibration fully contacts the silicon wafers in the placement basket 7. When the clamp 12 releases the placement basket 7, the cylinder 14 drives the lifting plate 15 to move downward, and the lifting plate 15 drives the connecting column 16 to move downward. At this time, the connecting column 16 drives the gear 38 to rotate in the opposite direction through the meshing tooth 40, and the gear 38 drives the stirring shaft 33 to move upward and away from the placement basket 7 through the U-shaped lifting frame 37. By setting a stirring component, when the manipulator grabs the placement basket, the stirring shaft can be driven to move into the placement basket at the same time. When the placement basket moves into the cleaning tank, the stirring component can drive the cleaning liquid in the placement basket to vibrate quickly, so that the cleaning liquid is in full contact with the silicon wafers in the placement basket, making the cleaning more thorough.

[0038] When in use, a placement basket 7 containing silicon wafers is placed on a workpiece placement table 5, a motor 1 31 is started to drive a set of rotating shafts 20 to rotate, the rotating shafts 20 drive the pulleys 21 to rotate, the pulleys 21 drive the transmission belts 23 to rotate, the transmission belts 23 drive the connecting blocks 24 to rotate, the connecting blocks 24 drive the sliding blocks 26 to move in an elliptical trajectory through the rotating shafts 4 29, the sliding blocks 26 drive the mounting plates 8 to move through the fixing rods 30, the mounting plates 8 drive the hollow mounting columns 11 to move, and when the hollow mounting columns 11 move to the workpiece to be processed When the top of the product placement table 5 is reached, the cylinder 14 is started to drive the lifting plate 15 to move upward, and the lifting plate 15 drives the connecting column 16 to move upward. The connecting column 16 starts to pull the multiple sets of clamps 12 through the movable support rod 17, so that the multiple sets of clamps 12 grab the placement basket 7 on the product placement table 5. At this time, the transmission belt 23 continues to run, and the personnel place another set of placement baskets 7 on the product placement table 5 to be processed, which is grabbed by the robot behind. When the hollow installation column 11 moves to the top of the cleaning tank 4, the electric push rod 10 is started to drive the lifting plate 9 When the basket 7 moves to the other side of the cleaning tank 4, the electric push rod 10 is started to drive the basket 7 to move upward and leave the cleaning tank 4. When the basket 7 moves to the top of the transfer placement table 6, the cylinder 14 is started to drive the lifting plate 15 to move downward, and the lifting plate 15 drives the connecting column 16 to move downward. The connecting column 16 pushes the clamping jaws 12 through the movable support rod 17, so that the clamping jaws 12 release the basket 7, and the basket 7 falls to the The basket is taken away from the transfer placement table 6. By setting a circulating drive component and multiple groups of manipulators, the manipulator can move in a circular motion after grabbing the placement basket, so that the placement basket after cleaning can be moved in a circular motion to the transfer placement table for personnel to take away, without the need to return the manipulator to the original path and grab it again, thereby improving its cleaning efficiency and saving time and effort. By setting a clamping component, the manipulator can grab and clamp the placement basket from multiple directions, making its clamping more secure, preventing the placement basket from slipping from the manipulator during the cleaning process, and improving its safety.When the clamp 12 grabs the placement basket 7, the cylinder 14 drives the lifting plate 15 to move upward, and the lifting plate 15 drives the connecting column 16 to move upward. When the connecting column 16 moves upward, it drives the gear 38 to rotate through the meshing teeth 40. The gear 38 rotates and drives the U-shaped lifting frame 37 to move downward through another set of meshing teeth 40. The U-shaped lifting frame 37 drives the stirring shaft 33 to move downward to the placement basket 7. When the placement basket 7 moves to the cleaning tank 4, the motor 2 36 is started to drive the rotating shaft 5 32 to rotate. The rotating shaft 5 32 drives the stirring shaft 33 to rotate through the limit key 34. The stirring shaft 33 drives the stirring blade to stir the cleaning liquid in the placement basket 7, so that the cleaning liquid can be quickly The vibration fully contacts the silicon wafers in the placement basket 7. When the clamp 12 releases the placement basket 7, the cylinder 14 drives the lifting plate 15 to move downward, and the lifting plate 15 drives the connecting column 16 to move downward. At this time, the connecting column 16 drives the gear 38 to rotate in the opposite direction through the meshing teeth 40. The gear 38 drives the stirring shaft 33 to move upward and away from the placement basket 7 through the U-shaped lifting frame 37. By setting the stirring component, when the manipulator grabs the placement basket, the stirring shaft can be driven to move into the placement basket at the same time. When the placement basket moves into the cleaning tank, the stirring component can drive the cleaning liquid in the placement basket to vibrate quickly, so that the cleaning liquid fully contacts the silicon wafers in the placement basket, making the cleaning more thorough. ;

[0039] To summarize, by setting up a circulating drive component and multiple groups of manipulators, the manipulator can move in a circular motion after grabbing the placement basket, so that the placement basket after cleaning can be moved in a circular motion to the transfer placement table for personnel to take away, without the need to return the manipulator to the original route and re-grab it, thereby improving its cleaning efficiency and saving time and effort. By setting up a clamping component, the manipulator can grab and clamp the placement basket from multiple directions, making its clamping more secure and preventing the placement basket from slipping from the manipulator during the cleaning process, thereby improving its safety. By setting up a stirring component, when the manipulator grabs the placement basket, it can simultaneously drive the stirring shaft to move into the placement basket. When the placement basket moves into the cleaning tank, the stirring component can drive the cleaning liquid in the placement basket to vibrate rapidly, so that the cleaning liquid is in full contact with the silicon wafers in the placement basket, making the cleaning more thorough.

[0040] The above description is only a preferred embodiment of the present invention and is not intended to limit the present invention. Any modifications, equivalent substitutions, improvements, etc. made within the spirit and principle of the present invention should be included in the protection scope of the present invention.

Claims

1. An automated silicon wafer cleaning truss robot, characterized in that: The invention comprises a washing table (1), wherein a driving box (2) is provided at the top of the washing table (1), wherein the driving box (2) is connected to the washing table (1) through a fixing frame (3), wherein a washing tank (4) is provided at the top of the washing table (1), wherein a table (5) for placing products to be processed is provided at the top of the washing table (1) and located on one side of the washing tank (4), wherein a transfer table (6) is provided at the washing table (1) and located on one side of the table (5) for placing products to be processed, wherein a placing basket (7) is provided at the top of the table (5) for placing products to be processed, wherein a plurality of evenly distributed mounting plates (8) are provided at the bottom of the driving box (2), wherein the mounting plates (8) are connected to the driving box (2) through a circulating driving assembly, wherein a clamping assembly is provided at the bottom of the mounting plate (8), wherein the clamping assembly comprises a lifting plate (9) provided at the bottom of the mounting plate (8), wherein the lifting plate (9) is connected to the mounting plate (8) through an electric push rod (10). The lifting plate (9) is connected to the mounting plate (8); a hollow mounting column (11) is provided at the bottom end of the lifting plate (9); a plurality of clamping claws (12) distributed in a circumferential array are provided at the bottom end of the hollow mounting column (11); the clamping claws (12) are connected to the hollow mounting column (11) through a U-shaped connecting seat (13); a cylinder (14) is provided at the top end of the lifting plate (9); a movable end of the cylinder (14) passes through the lifting plate (9) and extends into the hollow mounting column (11) to be connected to the lifting plate (15); a plurality of connecting columns (16) distributed in a circumferential array are provided at the bottom end of the lifting plate (15); the bottom end of the connecting column (16) extends outside the hollow mounting column (11) and is connected to the clamping claws (12) through a movable support rod (17); a stirring assembly is provided at the bottom end of the hollow mounting column (11) and between the plurality of clamping claws (12) distributed in a circumferential array.

2. The automatic silicon wafer cleaning truss robot according to claim 1, characterized in that: An anti-slip block (43) is provided on one side of the clamping claw (12), and an annular groove matching the anti-slip block (43) is provided on the outer wall of the placement basket (7).

3. The automatic silicon wafer cleaning truss robot according to claim 1, characterized in that: The bottom end of the hollow mounting column (11) is provided with a through hole (18) matching the connecting column (16); the clamping jaw (12) is connected to the U-shaped connecting seat (13) via a first rotating shaft (19); and the movable support rod (17) is respectively connected to the clamping jaw (12) and the connecting column (16) via a second rotating shaft (20).

4. The automatic silicon wafer cleaning truss robot according to claim 1, characterized in that: The circulating drive assembly comprises symmetrically arranged pulleys (21) in the driving box (2), two groups of the pulleys (21) are respectively connected to the driving box (2) through a rotating shaft (22), the two groups of the pulleys (21) are connected to each other through a transmission belt (23), the outer wall of the transmission belt (23) is provided with a plurality of evenly distributed connecting blocks (24), the bottom end of the driving box (2) is provided with a travel hole (25), the inner wall of the travel hole (25) is provided with a sliding block (26), the driving box (2) is provided with a sliding groove (27) matching the sliding block (26), one side of the connecting block (24) is provided with a connecting plate (28), the connecting plate (28) is connected to the sliding block (26) through a rotating shaft (29), and the bottom end of the sliding block (26) is connected to the mounting plate (8) through a fixing rod (30).

5. The automatic silicon wafer cleaning truss robot according to claim 4, characterized in that: The top end of a set of rotating shafts three (22) extends to the outside of the driving box (2) and is connected to the driving end of motor one (31).

6. The automatic silicon wafer cleaning truss robot according to claim 1, characterized in that: The stirring assembly comprises a rotating shaft (32) provided at the bottom end of the hollow mounting column (11); a stirring shaft (33) is sleeved on the outer wall of the rotating shaft (32); the stirring shaft (33) is connected to the hollow mounting column (11) through a lifting assembly; a stirring blade is fixedly sleeved on the outer wall of the stirring shaft (33); a limit key (34) is provided on the outer wall of the rotating shaft (32); and a key slot (35) matching the limit key (34) is opened on the inner wall of the stirring shaft (33).

7. The automatic silicon wafer cleaning truss robot according to claim 6, characterized in that: The top end of the rotating shaft 5 (32) extends into the hollow mounting column (11) and is connected to the driving end of the motor 2 (36).

8. The automatic silicon wafer cleaning truss robot according to claim 6, characterized in that: The lifting assembly comprises a U-shaped lifting frame (37) provided at the bottom end of the hollow mounting column (11), the top end of the U-shaped lifting frame (37) extending into the hollow mounting column (11), a symmetrically arranged gear (38) provided in the hollow mounting column (11), the gear (38) being connected to the hollow mounting column (11) via a rotating shaft (39), the connecting column (16) and the U-shaped lifting frame (37) both being provided with meshing teeth (40) matching the gear (38), and the U-shaped lifting frame (37) being connected to the stirring shaft (33) via a bearing.

9. The automatic silicon wafer cleaning truss robot according to claim 8, characterized in that: A sliding hole (41) matching the U-shaped lifting frame (37) is formed at the bottom end of the hollow installation column (11).

10. The automatic silicon wafer cleaning truss robot according to claim 8, characterized in that: A limiting piece (42) is provided at the top end of the U-shaped lifting frame (37).

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