High-frequency monochromator and light splitting method thereof

Abstract

The invention provides a high-frequency monochromator and a light splitting method thereof, and is characterized in that the high-frequency monochromator comprises a spectrograph and a scanning emitting mechanism, and the scanning emitting mechanism is loaded after the spectrograph emits a light beam; an entrance slit, a spectrograph, a field diaphragm, a collimation optical assembly, a rotary reflector or a rotary reflector with a grating light splitting function, a convergence imaging assembly and an exit slit are sequentially arranged along a light path, and light is emitted through the field diaphragm and the exit slit to form an L-shaped light path; the entrance slit, the spectrograph, the field diaphragm, the collimation optical assembly, the rotary reflecting mirror or the rotary reflecting mirror with the grating light splitting function, the convergence imaging assembly and the exit slit are all vertically fixed to the horizontal plane, and the rotary reflecting mirror or the rotary reflecting mirror with the grating light splitting function is arranged at the switching position of the L-shaped light path; the monochromator is simple in light splitting structure and efficient in light splitting.

Description

Technical Field

[0001] The invention belongs to the technical field of spectral instruments, in particular to the technical field of monochromators, and specifically to a high-frequency monochromator. Background Art

[0002] In the prior art, a monochromator can generally be used as a light source to provide a standard monochromatic light source for tasks such as optical system spectral calibration.

[0003] The existing monochromator usually adopts a double CT structure to form a symmetrical structure, so as to maintain good monochromaticity and have good characteristics of correcting residual aberration. Its optical principle is usually that after the white light (complex color light) in the monochromator passes through the incident slit and enters the collimation system, the collimation system turns the incident light into a collimated parallel beam, and then enters the plane grating. After the dispersion of the plane grating, the incident white light is divided into monochromatic light for exit. Various monochromatic lights emitted from the plane grating are incident on the convergence optical system. The convergence optical system converges the exit light beam near the exit slit to form a monochromatic slit image arranged in sequence (color band). At this time, the monochromatic light dispersed by the grating is arranged in sequence according to the dispersion law and presented near the exit slit. By rotating the plane grating, the incident angle of the incident white light relative to the grating is changed, thereby changing the position of the monochromatic light after the grating dispersion at the exit slit of the monochromator. Through the selective transmission of the slit, the monochromatic light is emitted for the measurement or calibration of the spectral characteristics of the optical system.

[0004] But the problem is:

[0005] 1. The internal optical path structure is relatively complex. For example, the monochromator disclosed in the domestic patent CN101275869B forms a secondary diffraction optical path inside.

[0006] Second, the light splitting efficiency is not high if only the rotating planar grating structure is used. The component structure is large in size, has a large moment of inertia, and rotates slowly.

[0007] Therefore, there is an urgent need for a monochromator with a simple spectroscopic structure and efficient spectroscopic efficiency. Summary of the invention

[0008] In view of the above problems, the present application proposes a monochromator with a simple spectroscopic structure and high spectroscopic efficiency to solve the technical problem of the complex optical path of the existing monochromator.

[0009] The present application provides a high-frequency monochromator, which is characterized by comprising a spectrometer and a scanning output mechanism, wherein the scanning output mechanism is loaded after the spectrometer outputs a light beam, and an incident slit, a spectrometer, a field stop, a collimating optical component, a rotating reflector or a rotating reflector with a grating light splitting function, a converging imaging component, and an exit slit are sequentially arranged along the optical path, and the light is emitted through the field stop and the exit slit to form an L-shaped optical path;

[0010] The incident slit, the spectrometer, the field diaphragm, the collimating optical component, the rotating reflector or rotating reflector with a grating spectroscopic function, the converging imaging component, and the exit slit are all fixed vertically to the horizontal plane. The rotating reflector or rotating reflector with a grating spectroscopic function is arranged at the junction of the L-shaped optical path. The central axis of the collimating optical component and the central axis of the field diaphragm are on an optical axis. The converging imaging component and the exit slit are arranged on a straight optical axis in the light emitting direction. The central axis of the converging imaging component and the central axis of the exit slit are on an optical axis. A corresponding exit slit is arranged at the image plane of the converging imaging component.

[0011] The present application also provides another high-frequency monochromator, characterized in that it includes a scanning output mechanism, the scanning output mechanism includes an incident slit, a collimating optical component, a rotating reflector with a grating spectroscopic function, a converging imaging component, and an exit slit, and the light forms an L-shaped optical path through incidence and emission, and the incident slit, the collimating optical component, the rotating reflector with a grating spectroscopic function, the converging imaging component, and the exit slit are sequentially arranged along the L-shaped optical path; the incident slit, the collimating optical component, the rotating reflector with a grating spectroscopic function, the converging imaging component, and the exit slit are all fixed vertically to the horizontal plane, and the rotating reflector with a grating spectroscopic function is arranged at the junction of the L-shaped optical path, the central axis of the collimating optical component and the central axis of the incident slit are on an optical axis, the central axis of the converging imaging component and the central axis of the exit slit are on an optical axis, and a corresponding exit slit is arranged at the image plane of the converging imaging component.

[0012] Furthermore, the rotating reflector or rotating reflector with grating light splitting function is a structure of a rotating reflector superimposed with a grating or a rotating reflector.

[0013] Furthermore, the rotating reflector or rotating reflector with grating light splitting function is a structure in which a scanning reflector is superimposed with a grating or a rotating reflector.

[0014] Furthermore, the collimating optical component is a lens or a reflector, and the resolution of the lens or the reflector is adapted to the resolution of the spectrum and the position of the motor.

[0015] Furthermore, the converging imaging component is a lens or a reflector, and the resolution of the converging imaging component is adapted to the resolution of the spectrum and the position of the motor.

[0016] Furthermore, the L-shaped optical path is at a certain angle. Specifically, the L-shaped optical path can be adjusted as needed to be an acute angle or an obtuse angle.

[0017] Furthermore, the rotating reflector with grating light splitting function or the rotating reflector is located at the entrance pupil and exit pupil of the two optical components, namely the collimating optical component and the converging imaging component.

[0018] Furthermore, the superimposed gratings are plane gratings, concave gratings or convex gratings.

[0019] Furthermore, the reflector or rotating reflector with grating light splitting function is rotated at high speed by the rotating mechanism, so the switching speed of the monochromatic light is also high, forming a high-frequency switching monochromatic output.

[0020] The present application provides a spectroscopic method for a monochromator, characterized in that the method uses any of the above-mentioned high-frequency monochromators, and includes the following steps: the incident slit, spectrometer, field stop, collimating optical system, rotating reflector or rotating reflector with grating spectroscopic function, converging imaging system, and exit slit are sequentially set up along the incident direction of the light, white light or complex color light is incident from the incident slit, the incident divergent light beam is changed into a collimated parallel light beam through the collimating optical system, and then is incident on the rotating reflector or rotating reflector with grating spectroscopic function, through the reflector, various color lights are incident on the converging imaging system and imaged on its image plane, and the images of the slits of various color lights are presented on the image plane of the converging imaging system, and corresponding exit slits are set on the image plane of the converging imaging system, and various color lights are sequentially emitted from the exit slit by rotating the rotating reflector or rotating reflector with grating spectroscopic function, that is, monochromatic light is emitted, to form a monochromator.

[0021] Furthermore, the reflector or rotating reflector with grating light splitting function is rotated at high speed by the rotating mechanism, so the switching speed of the monochromatic light is also high, forming a high-frequency switching monochromatic output.

[0022] Furthermore, the reflector or rotating reflector with grating light splitting function obtains monochromatic light of one color every time it rotates one angle.

[0023] Furthermore, a rotating reflector or a rotating reflector with a grating splitting function is arranged at the entrance pupil and exit pupil of the collimating optical system lens1 and the converging imaging system lens2, so as to facilitate efficient use of input and output light beam energy.

[0024] Compared with the prior art, this application has the following beneficial effects:

[0025] (1) The high-frequency monochromator of the present application adopts an L-shaped optical path, which is simple and the optical elements can be simply arranged; the L-shaped optical path can be adjusted to an angle of 0°-180° as needed, and has high adaptability.

[0026] (2) The high-frequency monochromator of the present application adopts a rotating mirror (or rotating mirror) with a grating spectroscopic function, which simplifies and expands the component structure of the existing monochromator while ensuring the spectroscopic efficiency. BRIEF DESCRIPTION OF THE DRAWINGS

[0027] Figure 1It is a structural schematic diagram of the high-frequency monochromator of the present invention.

[0028] Figure 2 It is a schematic diagram of the structure of a spectrometer containing a convex grating according to a preferred embodiment of the present invention.

[0029] Figure 3 This is a working principle diagram of the high-frequency monochromator of the present invention.

[0030] Figure 4 This is a schematic diagram of the structure of a high-frequency monochromator according to a preferred embodiment of this aspect.

[0031] Figure 5 It is a schematic diagram of the structure of a rotating reflector with grating splitting function.

[0032] Description of the markings in the figure:

[0033] 1. Entrance slit, 2. Convex grating, 3. Exit slit, 4. Collimation optical component, 5. Converging imaging component, 6. Grating, 7. Reflector, 8. Rotation axis, 9. Motor, 10. Rotating reflector with grating spectroscopic function (or rotating reflector), 11. Field stop. DETAILED DESCRIPTION

[0034] The technical solution of the present invention is further explained below in conjunction with the accompanying drawings and specific embodiments. It is believed that those skilled in the art can fully understand the technical solution of this case.

[0035] Embodiment 1

[0036] like Figure 1 As shown, this embodiment provides a high-frequency monochromator including a spectrometer and a scanning output mechanism. The scanning output mechanism is loaded after the spectrometer outputs a light beam. An incident slit 1, a spectrometer, a field stop 11, a collimating optical component 4, a rotating reflector with a grating light splitting function or a rotating reflector 10, a converging imaging component 5, and an exit slit 3 are sequentially arranged along the optical path. The light is emitted through the field stop 11 and the exit slit 3 to form an L-shaped optical path.

[0037] The incident slit 1, the spectrometer, the field aperture 11, the collimating optical component 4, the rotating reflector or the rotating reflector 10 with a grating spectroscopic function, the converging imaging component 5, and the exit slit 3 are all fixed vertically to the horizontal plane. The rotating reflector or the rotating reflector 10 with a grating spectroscopic function is arranged at the junction of the L-shaped optical path. The central axis of the collimating optical component 4 and the central axis of the field aperture 11 are on the same optical axis. The converging imaging component 5 and the exit slit 3 are arranged on a straight optical axis in the light emitting direction. The central axis of the converging imaging component 5 and the central axis of the exit slit 3 are on the same optical axis. A corresponding exit slit 3 is arranged at the image plane of the converging imaging component 5.

[0038] In this embodiment, the selected spectrometer may be any conventional spectrometer.

[0039] In this embodiment, the L-shaped light path is at a certain angle. Specifically, the L-shaped light path can be adjusted as needed to be an acute angle or an obtuse angle.

[0040] In this embodiment, if Figure 5 As shown, the rotating reflector with grating light splitting function or the rotating reflector 10 is a structure of a rotating reflector superimposed with a grating or a rotating reflector. The rotating reflector with grating light splitting function is a structure of a rotating reflector superimposed with a grating. The rotating mirror can be a plane or superimposed grating, the type of grating is not limited, and the superimposed grating 6 adopts a plane grating, a concave grating or a convex grating.

[0041] In another embodiment, if Figure 5 As shown, the rotating mirror or rotating mirror 10 with grating light splitting function is a structure of scanning mirror superimposed grating or rotating mirror. The rotating mirror can be a plane or superimposed grating, the type of grating is not limited, and the superimposed grating 6 adopts a plane grating, a concave grating or a convex grating.

[0042] In this embodiment, the collimating optical component 4 is a lens or a reflector, and the resolution of the lens or the reflector is adapted to the resolution of the spectrum and the position of the motor.

[0043] In this embodiment, the converging imaging component 5 is a lens or a reflector, and the resolution of the converging imaging component 5 is adapted to the resolution of the spectrum and the position of the motor.

[0044] In this embodiment, the rotating reflector or rotating reflector 10 with grating light splitting function is located at the entrance pupil and exit pupil of the collimating optical component 4 and the converging imaging component 5, so as to conveniently and efficiently utilize the energy of input and output beams.

[0045] In this embodiment, the line width of the slit will affect the spectral resolution and energy of the spectrometer; the slit (the end in the figure), the line width of the slit will affect the spectral resolution and energy of the spectrometer. It can be adjusted as needed.

[0046] In this embodiment, the rotating reflector 10 with grating spectroscopic function is rotated at high speed by the rotating mechanism, so the switching speed of monochromatic light is also high, forming a high-frequency switching monochromatic output. The reflector (reflector 10 with grating spectroscopic function) is rotated at high speed, so the switching speed of monochromatic light is also high, thus realizing high-frequency switching monochromatic light output.

[0047] A spectroscopic method for a monochromator comprises the following steps: an incident slit 1, a spectrometer, a field stop 11, a collimating optical component 4, a rotating reflector or a rotating reflector 10 with a grating spectroscopic function, a converging imaging component 5, and an exit slit 3 are sequentially arranged along the incident direction of light; white light or polychromatic light is incident from the incident slit 1, and the incident divergent light beam is changed into a collimated parallel light beam through the spectrometer, the field stop 11, and the collimating optical component 4; various colored lights are incident on the converging imaging component 5 and imaged on its image plane; color bands of the slit 1 of various colored lights are presented on the image plane of the converging imaging component 5; a corresponding exit slit 3 is arranged on the image plane of the converging imaging component 5; various colored lights are sequentially emitted from the exit slit 3 by rotating the rotating reflector or the rotating reflector 10 with a grating spectroscopic function, i.e., monochromatic light is emitted, to form a monochromator. When a reflector or a rotating reflector with a grating spectroscopic function rotates one angle, monochromatic light of one color is obtained.

[0048] A scanning optical system is loaded after the exit light beam, and the scanning mirror in the scanning optical system is used to scan the monochromatic light into the exit optical system, and the monochromatic light is emitted after the fixed exit slit 3. The scanning reflector can provide fast monochromatic light switching action, and its switching frequency can exceed 1000Hz. On the focal plane of the exit optical system, a fixed exit slit 3 is set, and the output of the specified monochromatic light can be achieved by scanning with the scanning mirror.

[0049] Embodiment 2

[0050] like Figure 2 As shown, on the basis of embodiment one, the spectrometer is preferably a spectrometer containing a convex grating, and the structure of the spectrometer is as shown in the schematic diagram, including an incident slit 1, a reflector, a convex grating, an exit slit 3 or a field stop 11, and the incident slit 1, the exit slit 3 or the field stop 11, the reflector, the convex grating, the exit slit 3 or the field stop 11 are arranged in sequence along the optical path.

[0051] This embodiment uses a convex grating as a light splitting element, and the convex grating does not need to rotate during the light splitting process, thereby ensuring that the position of the emitted monochromatic light is relatively fixed. A scanning optical system is loaded after the emitted light beam, and the scanning mirror in the scanning optical system is used to scan the monochromatic light into the emission optical system, and the monochromatic light is emitted after the fixed emission slit 3.

[0052] Of course, the spectroscopic element can also use a plane grating, and still use a scanning optical system after the diffraction spectrum exit position, use the scanning mirror in the scanning optical system to scan the monochromatic light to the exit optical system, and emit the monochromatic light after the fixed exit slit 3.

[0053] Embodiment 3

[0054] This embodiment is simplified on the basis of the first embodiment. Its principle is that a simple high-speed monochromator is composed of two matching objective lenses and a high-speed grating swing mirror, so that the white light beam collimated by the front objective lens is incident on the rotating mirror (grating) and forms a collimated light beam arranged in a monochromatic pattern after diffraction by the high-speed swing mirror, and the monochromatic spectrum is arranged on the focal plane of the objective lens after convergence by the second objective lens, and then the monochromatic light is emitted through the exit slit 3. When the exit slit 3 is fixed, the rotation of the swing mirror can select the wavelength of the emitted monochromatic light, that is, the spectrum.

[0055] like Figure 3-4 As shown, this embodiment provides another high-frequency monochromator, including a scanning output mechanism, the scanning output mechanism includes an incident slit 1, a collimating optical component 4, a rotating reflector or a rotating reflector 10 with a grating spectroscopic function, a converging imaging component 5, and an exit slit 3. The light forms an L-shaped optical path through incident and exiting, and the incident slit 11, the collimating optical component 4, the rotating reflector 10 with a grating spectroscopic function, the converging imaging component 55, and the exit slit 3 are sequentially arranged along the L-shaped optical path; the incident slit 1, the collimating optical component 4, the rotating reflector with a grating spectroscopic function, the converging imaging component 5, and the exit slit 3 are all fixed vertically to the horizontal plane, and the rotating reflector with a grating spectroscopic function is arranged at the junction of the L-shaped optical path, the central axis of the collimating optical component 4 and the central axis of the incident slit 1 are on an optical axis, the central axis of the converging imaging component 5 and the central axis of the exit slit 3 are on an optical axis, and the corresponding exit slit 3 is arranged at the image plane of the converging imaging component 5.

[0056] In this embodiment, the L-shaped optical path can be adjusted to an acute angle or an obtuse angle as required, that is, an angle of 0°-180°;

[0057] In this embodiment, if Figure 5 As shown, the rotating reflector with grating light splitting function is a structure of a rotating reflector superimposed with a grating or a rotating reflector. The rotating reflector with grating light splitting function is a structure of a rotating reflector superimposed with a grating. The rotating mirror can be a plane or superimposed grating, the type of grating is not limited, and the superimposed grating adopts a plane grating, a concave grating or a convex grating.

[0058] In another embodiment, if Figure 5 As shown, the rotating reflector with grating light splitting function is a structure of a scanning reflector superimposed with a grating or a rotating reflector. The rotating mirror can be a plane or superimposed grating, the type of grating 6 is not limited, and the superimposed grating adopts a plane grating, a concave grating or a convex grating.

[0059] In this embodiment, the collimating optical component 4 is a lens or a reflector, and the resolution of the collimating mirror is adapted to the resolution of the spectrum and the position of the motor.

[0060] In this embodiment, the rotating reflector with grating light splitting function is located at the entrance pupil and exit pupil of the collimating optical component 4 and the converging imaging component 5, so as to conveniently and efficiently utilize the energy of the input and output light beams.

[0061] In this embodiment, the line width of the slit will affect the spectral resolution and energy of the spectrometer; the slit (the end in the figure), the line width of the slit will affect the spectral resolution and energy of the spectrometer. It can be adjusted as needed.

[0062] In this embodiment, the reflector 10 with grating spectroscopic function is rotated at high speed by a rotating mechanism (motor and rotating shaft), so the switching speed of monochromatic light is also high, forming a high-frequency switching monochromatic output. The reflector (reflector 10 with grating spectroscopic function) is rotated at high speed, so the switching speed of monochromatic light is also high, thus realizing high-frequency switching monochromatic light output.

[0063] White light or polychromatic light is incident from the incident slit 1, and the incident divergent light beam is changed into a collimated parallel light beam by the collimating optical component 4, and then incident on the rotating reflector with grating spectroscopic function. After grating spectroscopic function, various colored lights are incident on the converging imaging component 5 and imaged on its image plane. The image of the slit 1 of various colored lights is presented on the image plane of the converging imaging component 5, and a corresponding exit slit 33 is set on the image plane of the converging imaging component 5. By rotating the rotating reflector with grating spectroscopic function, various colored lights are sequentially emitted from the exit slit 3, that is, monochromatic light is emitted, forming a monochromator. When the reflector with grating spectroscopic function or the rotating reflector rotates one angle, monochromatic light of one color is obtained. When the reflector with grating spectroscopic function or the rotating reflector rotates one angle, monochromatic light of one color is obtained.

[0064] The above description is only a preferred embodiment of the present invention and is not intended to limit the present invention. Although the present invention is described in detail with reference to the aforementioned embodiments, those skilled in the art can still modify the technical solutions described in the aforementioned embodiments or replace some of the technical features therein by equivalents. Any modification, equivalent replacement, improvement, etc. made within the spirit and principle of the present invention shall be included in the protection scope of the present invention.

Claims

1. A high frequency monochromator, characterized in that: It includes a spectrometer and a scanning output mechanism. The scanning output mechanism is loaded after the spectrometer outputs a light beam. An incident slit, a spectrometer, a field diaphragm, a collimating optical component, a rotating reflector with a grating light splitting function or a rotating reflector, a converging imaging component, and an exit slit are sequentially arranged along the light path. The light is emitted through the field diaphragm and the exit slit to form an L-shaped light path. The entrance slit, the spectrometer, the field diaphragm, the collimating optical component, the rotating reflector or rotating reflector with a grating spectroscopic function, the converging imaging component, and the exit slit are all fixed vertically to the horizontal plane. The rotating reflector or rotating reflector with a grating spectroscopic function is arranged at the junction of the L-shaped optical path. The central axis of the collimating optical component and the central axis of the field diaphragm are on an optical axis. The converging imaging component and the exit slit are arranged on a straight optical axis in the light emitting direction. The central axis of the converging imaging component and the central axis of the exit slit are on an optical axis. A corresponding exit slit is arranged at the image plane of the converging imaging component.

2. A high frequency monochromator, characterized in that: It includes a scanning output mechanism, which includes an incident slit, a collimating optical component, a rotating reflector with a grating light splitting function, a converging imaging component, and an exit slit. The light forms an L-shaped optical path through incident and exiting, and an incident slit, a collimating optical component, a rotating reflector with a grating light splitting function, a converging imaging component, and an exit slit are sequentially arranged along the L-shaped optical path; the incident slit, the collimating optical component, the rotating reflector with a grating light splitting function, the converging imaging component, and the exit slit are all fixed vertically to a horizontal plane, the rotating reflector with a grating light splitting function is arranged at a junction of the L-shaped optical path, the central axis of the collimating optical component and the central axis of the incident slit are on one optical axis, the central axis of the converging imaging component and the central axis of the exit slit are on one optical axis, and a corresponding exit slit is arranged at the image plane of the converging imaging component.

3. A high frequency monochromator according to claim 1 or 2, characterized in that: The rotating reflector or rotating reflector with grating light splitting function is a structure of a rotating reflector superimposed with a grating, or a structure of a scanning reflector superimposed with a grating or a rotating reflector.

4. A high frequency monochromator according to claim 1 or 2, characterized in that: The collimating optical component is a lens or a reflector, and the resolution of the collimating optical component is adapted to the resolution of the spectrum and the position of the motor; the converging imaging component is a lens or a reflector, and the resolution of the converging imaging component is adapted to the resolution of the spectrum and the position of the motor.

5. A high frequency monochromator according to claim 1 or 2, characterized in that: The L-shaped optical path forms a certain angle.

6. A high frequency monochromator according to claim 1 or 2, characterized in that: The rotating reflector or rotating reflector with grating light splitting function is located at the entrance pupil and exit pupil of two optical components, the collimating optical component and the converging imaging component.

7. A spectroscopic method for a monochromator, characterized in that: The use of the high-frequency monochromator as described in any one of claims 1 or 2 comprises the following steps: setting up the incident slit, spectrometer, field diaphragm, collimating optical component, rotating reflector or rotating reflector with grating spectroscopic function, converging imaging component, and exit slit in sequence along the incident direction of light; white light or complex color light is incident from the incident slit, and the incident divergent light beam is changed into a collimated parallel light beam through the spectrometer, field diaphragm, and collimating optical component, and then is incident on the rotating reflector or rotating reflector with grating spectroscopic function; various color lights are incident on the converging imaging component and imaged to its image plane; color bands of slit 1 of various color lights are presented on the image plane of the converging imaging component; a corresponding exit slit is set on the image plane of the converging imaging component; various color lights are sequentially emitted from the exit slit by rotating the rotating reflector or rotating reflector with grating spectroscopic function, that is, monochromatic light is emitted, to form a monochromator.

8. The spectroscopic method of a monochromator as claimed in claim 7, characterized in that: The reflector or rotating reflector with grating light splitting function is rotated at high speed by the rotating mechanism, so the switching speed of the monochromatic light is also high, forming a high-frequency switching monochromatic output.

9. The spectroscopic method of a monochromator according to claim 7, characterized in that: The reflector or rotating reflector with grating light splitting function obtains monochromatic light of one color every time it rotates one angle.

10. The spectroscopic method of a monochromator according to claim 7, characterized in that: The rotating reflector or rotating reflector with grating splitting function is arranged at the entrance pupil and exit pupil of the collimating optical component and the converging imaging component, so as to facilitate the efficient use of input and output light beam energy.

Images