Design method of compliant flight operation mechanism driven by service performance atlas

Abstract

The invention discloses a method for designing a compliant flight operation mechanism driven by a service performance map. The method comprises the following steps: obtaining a service performance index of compliant flight operation; and constructing a theoretical performance map and a calculation model according to the service performance indexes and the theoretical performance indexes associated with the service performance indexes. And optimizing the calculation model to obtain a design model, screening according to the service performance indexes and the theoretical performance indexes to obtain associated experimental performance indexes, and constructing an experimental performance map. And testing service performance indexes and constructing a service performance map. And the service performance atlas is used as full-closed-loop feedback, the experimental performance atlas and the theoretical performance atlas are used as semi-closed-loop feedback, and the design model is optimized. And the steps are repeated until design optimization of the compliant flight operation mechanism is completed. Compared with the prior art, the static performance, the dynamic performance and the reliability performance of the mechanism serve as optimization targets, mechanism configuration and scale parameters are designed, and the design requirement of multiple performance indexes is met.

Description

Technical Field

[0001] The present invention relates to the technical field, and more specifically, to a design method for a compliant flight operating mechanism driven by a service performance map. Background Art

[0002] In microelectronic equipment, the operating mechanism is the end effector that performs precision operations, and its design performance is directly related to the technical specifications of the entire equipment. Traditional purely rigid operating mechanisms often have problems such as vibration transmission and motion lag when dealing with complex and changeable microelectronic manufacturing environments, and it is difficult to meet the needs of high-precision, high-speed, and high-flexibility operations. Therefore, the compliant flight operating mechanism came into being. The compliant flight operating mechanism uses the elastic deformation of the component itself to complete the transmission and conversion of motion and force. Abandoning the rigid kinematic pairs of traditional rigid mechanisms, flexible units are used as core components. The structure is more compact and lightweight, reducing the number of parts and installation costs, and improving the reliability and stability of the system. Using the characteristics of the compliant mechanism, vibration and impact are reduced in an active or passive manner, improving the stability and accuracy of the operation, and used as the end effector of microelectronic equipment. The current technical challenges are to seek the best performance of the dimensional synthesis of the compliant flight operating mechanism, optimize the dimensional parameters, and achieve service performance that meets the expected requirements.

[0003] The prior art discloses a stress-constrained topology optimization method for a compliant mechanism based on isogeometric analysis, including defining a design domain of the compliant mechanism, initializing design parameters of the compliant mechanism, expressing a geometric model of the compliant mechanism using a NURBS curve with the design parameters of the compliant mechanism; discretizing the design domain into a geometric analysis grid, solving a structural displacement function; introducing a density variable at a control point to obtain a control point density, and smoothing it; solving the normal form equivalent stress at a Gaussian integral point, and solving the maximum normal form equivalent stress of the compliant mechanism using a P norm method; using the output displacement maximization of the compliant mechanism as an objective function, the maximum normal form equivalent stress and the volume fraction of the compliant mechanism as constraints, establishing a topology optimization model based on the control point density after smoothing, and solving the optimized topology optimization model using a moving progressive algorithm. The defect of this scheme is that, since multiple performance indicators are often opposed to each other, the above technical scheme cannot find the optimal balance point between multiple performance indicators.

[0004] To this end, in combination with the above requirements and the defects of the existing technology, this application proposes a design method for a compliant flight operation mechanism driven by a service performance spectrum. Summary of the invention

[0005] The present invention provides a design method for a compliant flight operation mechanism driven by a service performance spectrum, which takes the static performance, dynamic performance and reliability performance of the mechanism as optimization targets, designs the mechanism configuration and scale parameters to meet the design requirements of multiple performance indicators.

[0006] The primary purpose of the present invention is to solve the above technical problems. The technical solution of the present invention is as follows:

[0007] A first aspect of the present invention provides a method for designing a compliant flight operating mechanism driven by a service performance map, the method comprising the following steps:

[0008] S1. Investigate the compliant flight operations of microelectronic equipment to obtain service performance indicators.

[0009] S2. Construct a theoretical performance map and a calculation model of a compliant flight operation mechanism based on service performance indicators and their associated theoretical performance indicators.

[0010] S3. Optimize the calculation model to obtain the configuration and structural parameter design model, select the relevant experimental performance indicators based on the service performance indicators and theoretical performance indicators, construct the experimental performance map, process the prototype and conduct tests.

[0011] S4. Install the prototype into a microelectronic device, test service performance indicators and construct a service performance map.

[0012] S5. Use the service performance spectrum as a full closed-loop feedback, and the experimental performance spectrum and theoretical performance spectrum as semi-closed-loop feedback in the process to optimize the configuration and structural parameter design model.

[0013] S6. Repeat steps S2-S6 until the service performance spectrum meets expectations, completing the design optimization of the compliant flight operation mechanism.

[0014] Furthermore, in steps S1 and S2, the service performance indicators include: production capacity, yield, stability and reliability, and the theoretical performance indicators associated with the service performance indicators include: static performance indicators, dynamic performance indicators and reliability performance indicators. The calculation model constructed according to the theoretical performance indicators is: static performance indicator function f 1 , dynamic performance index function f 2 and reliability performance index function f 3 .

[0015] Furthermore, in step S2, the process of constructing the theoretical performance map includes:

[0016] S21. Establish a static model of the compliant flight operating mechanism and calculate the static performance indicators. Specifically, based on the finite element theory, simplify the compliant flight operating mechanism into a unit model composed of beam units and hinge units, establish the unit stiffness matrix of each unit, transform and combine the unit stiffness matrices to obtain the overall stiffness matrix, and solve the displacement of each node according to the overall stiffness matrix and the force conditions of each node.

[0017] S22. Establish a dynamic model of the compliant flight operation mechanism and calculate the dynamic performance indicators, specifically: according to the unit model, establish the unit mass matrix of each unit, transform and combine the unit mass matrices to obtain the overall mass matrix, and obtain the natural frequency of the mechanism according to the overall mass matrix and the overall stiffness matrix.

[0018] S23. Establish a reliability model for the compliant flight operation mechanism and calculate reliability performance indicators, specifically: obtain the maximum working stroke of the mechanism through stiffness calculation, calculate the maximum stress when the mechanism is at the maximum working stroke, and determine whether its maximum stress exceeds the allowable stress of the mechanism.

[0019] Furthermore, in step S3, the configuration and structural parameter design model is composed of the static performance index function f 1 , dynamic performance index function f 2 and reliability performance index function f 3 After determining the optimization objective, constraints, design variables and their value ranges, the Pareto front is solved and obtained through the decision algorithm.

[0020] Furthermore, the step S3 specifically includes the following steps:

[0021] S31. Determine the specific indicators of the service performance spectrum of the compliant mechanism based on the operating requirements of the microelectronic equipment.

[0022] S32. According to the specific index, determine the dimensional parameters that play a decisive role in the specific index as the dimensional parameters to be optimized; according to the dimensional restrictions during assembly, determine the optimization range.

[0023] S33. Based on the extracted dimensional parameters to be optimized, establish a static performance index function f 1 , dynamic performance index function f 2 , reliability performance index function f 3 .

[0024] S34, normalization processing, establishing comprehensive performance index function f 4 , and the optimization algorithm is used to determine the final structural parameters.

[0025] Further, in step S32, the size parameter to be optimized is:

[0026] x l =[l 1 ,l 2 ,l 3 ] T

[0027] x t =[t 1 ,t2 ,t 3 ,t 4 ,t 5 ,t 6 ,t 7 ,t 8 ,t 9 ] T

[0028] x R =[r 1 ,r 2 ,r 3 ,r 4 ,r 5 ,r 6 ] T

[0029] Among them, x l represents the length parameter vector to be optimized extracted by the mechanism, l represents the length parameter to be optimized, x t represents the thickness parameter vector to be optimized extracted by the mechanism, x R represents the flexible hinge radius parameter vector to be optimized extracted by the mechanism, t represents the thickness parameter to be optimized, and r represents the flexible hinge radius parameter to be optimized.

[0030] Furthermore, in step S33, when establishing the static performance index function f 1 , dynamic performance index function f 2 , reliability performance index function f 3 Before that, it is also necessary to convert the beam unit and hinge unit into a unit matrix, in which the static performance index function f is established. 1 The beam element needs to be converted into an element stiffness matrix in local coordinates, specifically:

[0031]

[0032] Among them, K i,j is the local element stiffness matrix between the i-th node and the j-th node. The local element stiffness matrix is ​​converted to the global coordinate using the following conversion formula to obtain the global element stiffness matrix:

[0033]

[0034]

[0035] Wherein, α is the counterclockwise rotation angle from the local coordinate system to the global coordinate system. The element stiffness matrix in the global coordinate system in the conversion formula is expanded to the following 3n×3n matrix, and the result is:

[0036]

[0037] Where n is the number of nodes. The matrices of all unit expansions are superimposed in sequence to obtain the overall stiffness matrix K. The displacement of each node is U = K -1 F, where F is the force condition of each node, and finally the mechanism magnification ratio is used as the static performance index function f 1 :

[0038]

[0039] Among them, δ out is the displacement of the output end of the mechanism, δ in is the input end displacement of the mechanism.

[0040] Furthermore, to establish the dynamic performance index function f 2 It needs to be calculated through the unit mass matrix, which is:

[0041]

[0042] According to the conversion formula, it is expanded into a 3n×3n matrix in the global coordinates, and the overall mass matrix is ​​obtained by superimposing them in sequence:

[0043]

[0044] det([K]-ω 2 [M])=0

[0045] By solving the above equations, we can get n characteristic solutions, where the characteristic value ω 1 ,ω 2 ,…,ω n Represents the n natural frequencies of the system, and then takes the first-order natural frequency as the dynamic performance index function

[0046] Furthermore, the reliability performance index function f is established 3 When the maximum stress and maximum rotational deformation of the straight circular hinge need to be calculated, specifically:

[0047]

[0048] Among them, σ max represents the maximum stress, E represents the elastic modulus of the material, t represents the thickness of the straight circular hinge, α max represents the maximum rotatable deformation angle, and R represents the radius of the straight circular flexible hinge; the above formula determines whether the mechanism is reliable by judging whether its maximum stress is greater than the allowable stress of the mechanism material, and uses the maximum stress as the reliability performance index function f 3 , when σ max When f≤[σ] 3 =1, when σ max>[σ] when f 3 =0.

[0049] Further, steps S34 to S37 are specifically as follows: the static performance index function f 1 , dynamic performance index function f 2 The weight factor is divided into different regions to obtain the comprehensive performance index function f of the compliant flight operation mechanism. 4 =(w 1 f 1 +w 2 f 2 )f 3 , where w 1 Represents the weight coefficient of the static performance index function, w 2 Represents the weight coefficient of the dynamics performance index function.

[0050] The intelligent optimization algorithm comprises the following steps:

[0051] S35, comprehensive performance index function f 4 , using particle swarm optimization to perform single-objective optimization and obtain the optimal structural parameter x 1 .

[0052] S36, static performance index function f 1 , dynamic performance index function f 2 , reliability performance index function f 3 , multi-objective intelligent optimization algorithm is used to perform multi-objective optimization to obtain the optimal structural parameters x 2 .

[0053] S37, structural parameter x 1 With the structural parameter x 2 The corresponding theoretical performance spectrum is compared to determine the final structural parameters.

[0054] Compared with the prior art, the technical solution of the present invention has the following beneficial effects:

[0055] The present invention provides a design method for a compliant flight operation mechanism driven by a service performance spectrum. Static performance indicators, dynamic performance indicators and reliability performance indicators are modeled based on the service performance spectrum. By using the experimental performance spectrum and the theoretical performance spectrum as semi-closed loop feedback in the process, the optimization configuration and structural parameter design model can demonstrate the mutual influence and constraint relationship between various performance indicators, provide designers with all non-inferior solutions for multi-objective optimization, and decide on the mechanism configuration and structural parameters that are most suitable for the flight operation of specific microelectronic equipment. BRIEF DESCRIPTION OF THE DRAWINGS

[0056] Figure 1The present invention is a flow chart of a method for designing a compliant flight operating mechanism driven by a service performance map.

[0057] Figure 2 A schematic diagram of a performance map driven design method in one embodiment of the present invention.

[0058] Figure 3 It is a schematic diagram of the structure of a flexible flight shooting mechanism in an embodiment of the present invention.

[0059] Figure 4 It is a schematic diagram of the structure of a compliant flying spike crystal mechanism in one embodiment of the present invention.

[0060] Figure 5 This is an optimized parameter diagram of the flexible flight shooting mechanism in one embodiment of the present invention.

[0061] Figure 6 This is an optimized parameter diagram of the compliant flying thorn crystal mechanism in one embodiment of the present invention.

[0062] Figure 7 This is a node diagram of a flexible flying shooting mechanism in an embodiment of the present invention, in which the numbers are the serial numbers of the nodes of the simplified unit model of the flexible flying shooting mechanism.

[0063] Figure 8 This is a unit diagram of a flexible flight shooting mechanism in an embodiment of the present invention, in which the numbers are the serial numbers of the units of the simplified unit model of the flexible flight shooting mechanism.

[0064] Fig. 9 This is a node diagram of a compliant flying thorn crystal mechanism in an embodiment of the present invention. The numbers in the diagram are the serial numbers of the nodes of the simplified unit model of the compliant flying thorn crystal mechanism.

[0065] Fig.10 This is a unit diagram of a compliant flying thorn crystal mechanism in an embodiment of the present invention. The numbers in the figure are the serial numbers of each unit of the simplified unit model of the compliant flying thorn crystal mechanism.

[0066] Fig.11 A simplified mass-spring model diagram of a compliant flying shooting mechanism in one embodiment of the present invention.

[0067] Fig.12 The figure is a schematic diagram of the magnification mechanism of the flexible flight shooting mechanism in one embodiment of the present invention. DETAILED DESCRIPTION

[0068] In order to more clearly understand the above-mentioned purpose, features and advantages of the present invention, the present invention is further described in detail below in conjunction with the accompanying drawings and specific embodiments. It should be noted that the embodiments of the present application and the features in the embodiments can be combined with each other without conflict.

[0069] In the following description, many specific details are set forth to facilitate a full understanding of the present invention. However, the present invention may also be implemented in other ways different from those described herein. Therefore, the protection scope of the present invention is not limited to the specific embodiments disclosed below.

[0070] Example 1

[0071] like Figure 1 As shown, the present invention provides a method for designing a compliant flight operation mechanism driven by a service performance map, and the method comprises the following steps:

[0072] S1. Investigate the compliant flight operations of microelectronic equipment to obtain service performance indicators.

[0073] S2. Construct a theoretical performance map and a calculation model of a compliant flight operation mechanism based on service performance indicators and their associated theoretical performance indicators.

[0074] S3. Optimize the calculation model to obtain the configuration and structural parameter design model, select the relevant experimental performance indicators based on the service performance indicators and theoretical performance indicators, construct the experimental performance map, process the prototype and conduct tests.

[0075] S4. Install the prototype into a microelectronic device, test service performance indicators and construct a service performance map.

[0076] S5. Use the service performance spectrum as a full closed-loop feedback, and the experimental performance spectrum and theoretical performance spectrum as semi-closed-loop feedback in the process to optimize the configuration and structural parameter design model.

[0077] S6. Repeat steps S2-S6 until the service performance spectrum meets expectations, completing the design optimization of the compliant flight operation mechanism.

[0078] In steps S1 and S2, the service performance indicators include: production capacity, yield, stability and reliability. The theoretical performance indicators associated with the service performance indicators include: static performance indicators, dynamic performance indicators and reliability performance indicators. The calculation model constructed based on the theoretical performance indicators is: static performance indicator function f 1 , dynamic performance index function f 2 and reliability performance index function f 3 .

[0079] It should be noted that if Figure 2As shown in the figure, in the design process of compliant mechanisms, multiple performance indicators often need to be considered at the same time. There is a mutual influence and restriction relationship between various performance indicators. For example, the amplification ratio of the static performance indicator mechanism is opposite to the first-order natural frequency of the dynamic performance indicator mechanism. The increase of the amplification ratio of the static performance indicator mechanism will lead to a decrease in the first-order natural frequency of its dynamic performance indicator mechanism. By adjusting the design parameters, the balance point can be found in the performance spectrum to achieve the coordinated optimization of multiple performance indicators.

[0080] In a specific embodiment, the soft-flying focusing mechanism needs to be installed on Figure 3 In the LDI machine shown, the depth of field of the industrial camera in the LDI machine is 0.54mm. To meet its focusing requirements, the maximum stroke of the flexible flight focusing mechanism needs to reach more than 1.08mm. At the same time, the flexible flight focusing mechanism needs to achieve the function of fast focusing and its first-order natural frequency should be above 350Hz.

[0081] In step S2, the process of constructing the theoretical performance map includes:

[0082] S21. Establish a static model of the compliant flight operating mechanism and calculate the static performance indicators. Specifically, based on the finite element theory, simplify the compliant flight operating mechanism into a unit model composed of beam units and hinge units, establish the unit stiffness matrix of each unit, transform and combine the unit stiffness matrices to obtain the overall stiffness matrix, and solve the displacement of each node according to the overall stiffness matrix and the force conditions of each node.

[0083] S22. Establish a dynamic model of the compliant flight operation mechanism and calculate the dynamic performance indicators, specifically: according to the unit model, establish the unit mass matrix of each unit, transform and combine the unit mass matrices to obtain the overall mass matrix, and obtain the natural frequency of the mechanism according to the overall mass matrix and the overall stiffness matrix.

[0084] S23. Establish a reliability model for the compliant flight operation mechanism and calculate reliability performance indicators, specifically: obtain the maximum working stroke of the mechanism through stiffness calculation, calculate the maximum stress when the mechanism is at the maximum working stroke, and determine whether its maximum stress exceeds the allowable stress of the mechanism.

[0085] In step S3, the configuration and structural parameter design model is composed of the static performance index function f 1 , dynamic performance index function f 2 and reliability performance index function f 3 After determining the optimization objective, constraints, design variables and their value ranges, the Pareto front is solved and obtained through the decision algorithm.

[0086] Furthermore, the step S3 specifically includes the following steps:

[0087] S31. Determine the specific indicators of the service performance spectrum of the compliant mechanism based on the operating requirements of the microelectronic equipment.

[0088] S32. According to the specific index, determine the dimensional parameters that play a decisive role in the specific index as the dimensional parameters to be optimized; according to the dimensional restrictions during assembly, determine the optimization range.

[0089] S33. Based on the extracted dimensional parameters to be optimized, establish a static performance index function f 1 , dynamic performance index function f 2 , reliability performance index function f 3 .

[0090] S34, normalization processing, establishing comprehensive performance index function f 4 , and the optimization algorithm is used to determine the final structural parameters.

[0091] In the step S32, in a specific embodiment, the structural parameters of the flexible flight focusing mechanism, the flexible hinge parameters and other important size parameters are the parameters to be optimized. Figure 5 As shown, the size parameters to be optimized are:

[0092] x l =[l 1 ,l 2 ,l 3 ] T

[0093] x t =[t 1 ,t 2 ,t 3 ,t 4 ,t 5 ,t 6 ,t 7 ,t 8 ,t 9 ] T

[0094] x R =[r 1 ,r 2 ,r 3 ,r 4 ,r 5 ,r 6 ] T

[0095] Among them, x l represents the length parameter vector to be optimized extracted by the mechanism, l represents the length parameter to be optimized, x t represents the thickness parameter vector to be optimized extracted by the mechanism, x Rrepresents the flexible hinge radius parameter vector to be optimized extracted by the mechanism, t represents the thickness parameter to be optimized, and r represents the flexible hinge radius parameter to be optimized.

[0096] In a specific embodiment, the size of the compliant aircraft operating mechanism should be limited to 200*165*20mm 3 Within.

[0097] It should be noted that based on the finite element theory, the compliant flight operation mechanism is simplified into a unit model consisting of beam units and hinge units. Figure 7 and Figure 8 shown.

[0098] In step S33, when establishing the static performance index function f 1 , dynamic performance index function f 2 , reliability performance index function f 3 Before that, it is also necessary to convert the beam unit and hinge unit into a unit matrix, in which the static performance index function f is established. 1 The beam element needs to be converted into an element stiffness matrix in local coordinates, which is:

[0099]

[0100] Among them, K i,j is the local element stiffness matrix between the i-th node and the j-th node. The local element stiffness matrix is ​​converted to the global coordinate using the following conversion formula to obtain the global element stiffness matrix:

[0101]

[0102]

[0103] Wherein, α is the counterclockwise rotation angle from the local coordinate system to the global coordinate system. The element stiffness matrix in the global coordinate system in the conversion formula is expanded to the following 3n×3n matrix, and the result is:

[0104]

[0105] Where n is the number of nodes. The matrices of all unit expansions are superimposed in sequence to obtain the overall stiffness matrix K. The displacement of each node is U = K -1 F, where F is the force condition of each node, and finally the mechanism magnification ratio is used as the static performance index function f 1 :

[0106]

[0107] Among them, δ out is the displacement of the output end of the mechanism, δ inis the input end displacement of the mechanism.

[0108] Furthermore, to establish the dynamic performance index function f 2 It needs to be calculated through the unit mass matrix, which is:

[0109]

[0110] According to the conversion formula, it is expanded into a 3n×3n matrix in the global coordinates, and the overall mass matrix is ​​obtained by superimposing them in sequence:

[0111]

[0112] det([K]-ω 2 [M])=0

[0113] By solving the above equations, we can get n characteristic solutions, where the characteristic value ω 1 ,ω 2 ,…,ω n Represents the n natural frequencies of the system, and then takes the first-order natural frequency as the dynamic performance index function

[0114] Furthermore, the reliability performance index function f is established 3 When the maximum stress and maximum rotational deformation of the straight circular hinge need to be calculated, specifically:

[0115]

[0116] Among them, σ max represents the maximum stress, E represents the elastic modulus of the material, t represents the thickness of the straight circular hinge, α max represents the maximum rotatable deformation angle, and R represents the radius of the straight circular flexible hinge; the above formula determines whether the mechanism is reliable by judging whether its maximum stress is greater than the allowable stress of the mechanism material, and uses the maximum stress as the reliability performance index function f 3 , when σ max When f≤[σ] 3 =1, when σ max >[σ] when f 3 =0.

[0117] Example 2

[0118] Based on the above embodiment 1, combined with Figure 2-Figure 4 This embodiment describes in detail the specific process of optimizing the model using the intelligent optimization algorithm of the present invention.

[0119] Further, steps S34 to S37 are specifically as follows: the static performance index function f 1 , dynamic performance index function f2 The weight factor is divided into different regions to obtain the comprehensive performance index function f of the compliant flight operation mechanism. 4 =(w 1 f 1 +w 2 f 2 )f 3 , where w 1 Represents the weight coefficient of the static performance index function, w 2 Represents the weight coefficient of the dynamics performance index function.

[0120] It should be noted that the regional weight factor division is specifically as follows: 1 <8 o'clock 1 =0, when 8 <f 1 <12 o'clock 1 =1, when f 2 <200 hours 2 =0, when 200 <f 2 <300 hours 2 =1, when 300 <f 2 <350 hours 2 =1.2.

[0121] The intelligent optimization algorithm comprises the following steps:

[0122] S35, comprehensive performance index function f 4 , using particle swarm optimization to obtain the optimal structural parameter x 1 .

[0123] S36, static performance index function f 1 , dynamic performance index function f 2 , reliability performance index function f 3 , multi-objective intelligent optimization algorithm is used to perform multi-objective optimization to obtain the optimal structural parameters x 2 .

[0124] S37, structural parameter x 1 With the structural parameter x 2 The corresponding theoretical performance spectrum is compared to determine the final structural parameters.

[0125] In step S33, the kinetic energy, potential energy and elastic potential energy of each component of the mechanism can be analyzed; the dynamic performance index function f of the mechanism can be established by using the Lagrange equation method. 2 , the simplified mass-spring diagram of the mechanism is as follows Fig.11 As shown, the schematic diagram of the amplification mechanism of the mechanism is as follows Fig.12 Show;

[0126] The equivalent kinetic energy of the mechanism is:

[0127]

[0128] Where; n 2 =2,n 3 =2,n 4 =2,n 5 =2,I 2 ,I 4 ,I 5 Represents M 2 ,M 4 ,M 5 moment of inertia.

[0129] The dynamic equation of the system is:

[0130] in:

[0131]

[0132] F in is the input force, y 2 is the displacement of node 2 in the y direction. Then the natural frequency of the mechanism is:

[0133]

[0134] Taking the first-order natural frequency as the dynamic performance index function f 2 ;

[0135]

[0136] Example 3

[0137] Based on the above-mentioned embodiment 1 and embodiment 2, as Figure 4 , Figure 6 , Fig. 9 , Fig.10 As shown, this embodiment takes the scale parameter optimization design of the flexible flying thorn crystal mechanism as an example to illustrate the specific implementation steps of the present invention.

[0138] S1: Based on Figure 4 Investigate the compliant flight operations of microelectronic equipment and extract key service performance indicators;

[0139] S2: Select relevant theoretical performance indicators based on the service performance indicators, derive the calculation model of the compliant flight operation mechanism, and construct a theoretical performance map;

[0140] S3: Determine the optimization objectives, constraints, design variables and their value ranges, use intelligent algorithms to solve the Pareto front, and obtain the optimal configuration and structural parameters through decision-making algorithms;

[0141] S4: Select relevant experimental performance indicators based on the service performance indicators and theoretical performance indicators, process and test the prototype, and construct an experimental performance map;

[0142] S5: Install the compliant flight operation mechanism prototype on microelectronic equipment, test service performance indicators, and build a service performance map;

[0143] S6: Use the service performance spectrum as the final full-closed-loop feedback, and the experimental performance spectrum and theoretical performance spectrum as semi-closed-loop feedback in the process to improve the configuration and structural parameter design model.

[0144] S7: Repeat S2-S6 until a service performance spectrum that meets expectations is achieved.

[0145] In the specific implementation process, in step S1, the static performance index, dynamic performance index and reliability performance index are calculated and the static performance index function f is established in step S23. 1 , dynamic performance index function f 2 , reliability performance index function f 3 The process is basically similar, the difference is that when calculating the static performance indicators, dynamic performance indicators and reliability performance indicators, there is no need to extract the structural parameters of the flexible aircraft operating mechanism as design variables. The static performance indicators, dynamic performance indicators and reliability performance indicators are directly calculated through the specific structural parameters of the flexible aircraft operating mechanism under the initial configuration.

[0146] In the specific implementation process, in step S2, the specific steps of establishing the multi-objective optimization model include:

[0147] S21: Determine the specific indicators of the service performance spectrum of the compliant mechanism based on the operational requirements of the microelectronic equipment.

[0148] The flexible flying crystal mechanism must meet the requirements of completing the crystal piercing action. The maximum stroke of the flexible flying crystal mechanism should reach more than 0.8mm. At the same time, the flexible flying crystal mechanism must realize the function of rapid crystal piercing. The first-order natural frequency of the mechanism should be above 600Hz.

[0149] S22: Determine the dimensional parameters that play a decisive role in the specific indicators based on the specific indicators; determine the optimization range based on the dimensional restrictions during assembly.

[0150] The structural parameters of the compliant flying thorn crystal mechanism, the flexible hinge parameters and other important dimensional parameters are extracted as the parameters to be optimized. Figure 6 As shown, the extraction parameters are

[0151] x l =[l 1 ,l 2 ,l 3 ,l4 ,l 5 ,l 6 ] T (1)

[0152] x t =[t 1 ,t 2 ,t 3 ,t 4 ,t 5 ,t 6 ,t 7 ,t 8 ] T (2)

[0153] x R =[r 1 ,r 2 ,r 3 ,r 4 ,r 5 ,r 6 ] T (3)

[0154] S23: Based on the extracted dimensional parameters to be optimized, establish the static performance index function f 1 , dynamic performance index function f 2 , reliability performance index function f 3 .

[0155] S231: Establish the static performance index function f of the compliant flying thorn crystal mechanism 1 .

[0156] Based on the finite element theory, the compliant flying thorn crystal mechanism is simplified into a unit model consisting of beam units and hinge units. Fig. 9 and Fig.10 As shown;

[0157] Among them, the element stiffness matrix of the beam element in local coordinates is

[0158]

[0159] Among them, K i,j is the local element stiffness matrix between the i-th node and the j-th node;

[0160] The local unit stiffness matrix obtained in formula (4) is converted to the global coordinate to obtain the global unit stiffness matrix. The conversion formula is as follows:

[0161]

[0162] in,

[0163]

[0164] Where α is the counterclockwise rotation angle from the local coordinate system to the global coordinate system;

[0165] The element stiffness matrix in the global coordinate system in equation (5) is expanded to the following 3n×3n matrix:

[0166]

[0167] Where n is the number of nodes;

[0168] The expanded matrices of all units are superimposed in sequence to obtain the overall stiffness matrix K. The displacement of each node is:

[0169] U=K -1 F (8)

[0170] Among them, F is the force condition of each node;

[0171] Taking the mechanism magnification ratio as the static performance index function f 1 ;

[0172]

[0173] Among them, δ out is the displacement of the output end of the mechanism, δ in is the displacement of the input end of the mechanism;

[0174] S232: Establish the dynamic performance index function f of the compliant flying thorn crystal mechanism 2 .

[0175] The element mass matrix of the element is:

[0176]

[0177] As in S1, the unit mass matrix is ​​converted to the global coordinates and then expanded to a 3n×3n matrix, and the overall mass matrix is ​​obtained by superimposing them in sequence;

[0178]

[0179] det([K]-ω 2 [M])=0 (12)

[0180] By solving the above equations, we can get n characteristic solutions, where the characteristic value ω 1 ,ω 2 ,…,ω n represents the n natural frequencies of the system;

[0181] Taking the first-order natural frequency as the dynamic performance index function f 2 ;

[0182]

[0183] S233: Establish the reliability performance index function f of the compliant flying thorn crystal mechanism 3 .

[0184] During the deformation of the compliant flying thorn crystal mechanism, the stress is concentrated at the flexible hinge. The stroke output of the mechanism increases with the increase of the rotational deformation of the flexible hinge. As the rotational deformation of the flexible hinge increases, the deformation stress also increases. The deformation stress of the hinge will affect the reliability of the mechanism. For a straight circular hinge, the relationship between the maximum stress and the maximum rotational deformation is:

[0185]

[0186] in,

[0187]

[0188] The reliability of the mechanism can be determined by judging whether its maximum stress is greater than the allowable stress of the mechanism material;

[0189] Taking the maximum stress as the reliability performance index function f 3 , when σ max When f≤[σ] 3 =1, when σ max >[σ] when f 3 =0;

[0190] S24: Normalization processing, establishing a comprehensive performance index function f 4 .

[0191] The performance index f 1 Divide the weight factors by region, for example: when f 1 <8 o'clock 1 =0, when 8 <f 1 <12 o'clock 1 =1; the performance index f 2 Divide the weight factors by region, for example: when f 2 <200 hours 2 =0, when 200 <f 2 <300 hours 2 =1, when 300 <f 2 <350 hours 2 =1.2; get the comprehensive performance index function f of the compliant flight operation mechanism 4 ;

[0192] in;

[0193] f 4 =(w 1 f 1 +w 2 f2 )f 3 (17)

[0194] In the specific implementation process, in step S3, the specific steps of implementing the intelligent optimization algorithm include:

[0195] S31: Comprehensive performance index function f 4 , using particle swarm optimization to obtain the optimal structural parameter x 1 .

[0196] S32: Static performance index function f 1 , dynamic performance index function f 2 , reliability performance index function f 3 , multi-objective intelligent optimization algorithm is used to perform multi-objective optimization to obtain the optimal structural parameters x 2 .

[0197] S33: For structural parameters x 1 With the structural parameter x 2 The corresponding theoretical performance spectrum is compared to determine the final structural parameters.

[0198] Obviously, the above embodiments of the present invention are merely examples for clearly illustrating the present invention, and are not intended to limit the embodiments of the present invention. The icons describing the structural positional relationships in the accompanying drawings are only used for exemplary purposes and are not to be construed as limiting the present invention. For those of ordinary skill in the art, other different forms of changes or modifications can be made based on the above description. It is not necessary and is not possible to list all the embodiments here. Any modifications, equivalent substitutions, improvements, etc. made within the spirit and principles of the present invention shall be included in the scope of protection of the claims of the present invention.

Claims

1. A service performance map-driven compliant flight operation mechanism design method, characterized in that: The following steps are involved: S1. Investigate the compliant flight operations of microelectronic equipment and obtain service performance indicators; S2. Constructing a theoretical performance map and a calculation model of a compliant flight operation mechanism based on the service performance indicators and the theoretical performance indicators associated therewith; S3. Optimize the calculation model to obtain the configuration and structural parameter design model, select the relevant experimental performance indicators according to the service performance indicators and theoretical performance indicators, construct the experimental performance map, process the prototype and conduct the test; S4, installing the prototype into a microelectronic device, testing service performance indicators and constructing a service performance map; S5. Use the service performance spectrum as a full closed-loop feedback, and the experimental performance spectrum and theoretical performance spectrum as semi-closed-loop feedback in the process to optimize the configuration and structural parameter design model; S6. Repeat steps S2-S6 until the service performance spectrum meets expectations, completing the design optimization of the compliant flight operation mechanism.

2. The method for designing a compliant flight operation mechanism driven by a service performance map according to claim 1, characterized in that: In steps S1 and S2, the service performance indicators include: production capacity, yield, stability and reliability, and the theoretical performance indicators associated with the service performance indicators include: static performance indicators, dynamic performance indicators and reliability performance indicators. The calculation model constructed according to the theoretical performance indicators is: static performance indicator function f1, dynamic performance indicator function f2 and reliability performance indicator function f3.

3. The method for designing a compliant flight operation mechanism driven by a service performance map according to claim 2, characterized in that: In step S2, the process of constructing the theoretical performance map includes: S21. Establish a static model of the compliant flight operating mechanism and calculate the static performance indicators. Specifically, based on the finite element theory, simplify the compliant flight operating mechanism into a unit model composed of beam units and hinge units, establish the unit stiffness matrix of each unit, transform and combine the unit stiffness matrices to obtain the overall stiffness matrix, and solve the displacement of each node according to the overall stiffness matrix and the force conditions of each node. S22. Establish a dynamic model of the compliant flight operation mechanism and calculate the dynamic performance indicators, specifically: according to the unit model, establish the unit mass matrix of each unit, transform and combine the unit mass matrices to obtain the overall mass matrix, and obtain the natural frequency of the mechanism according to the overall mass matrix and the overall stiffness matrix. S23. Establish a reliability model for the compliant flight operation mechanism and calculate reliability performance indicators, specifically: obtain the maximum working stroke of the mechanism through stiffness calculation, calculate the maximum stress when the mechanism is at the maximum working stroke, and determine whether its maximum stress exceeds the allowable stress of the mechanism.

4. The service performance map driven compliant flight operation mechanism design method according to claim 1, characterized in that: In the step S3, the configuration and structural parameter design model determines the optimization target, constraint conditions, design variables and their value ranges by the static performance index function f1, the dynamic performance index function f2 and the reliability performance index function f3, and then solves the Pareto front end, which is obtained by the decision algorithm. The step S3 specifically includes the following steps: S31. Determine the specific indicators of the service performance map of the compliant mechanism based on the operational requirements of microelectronic equipment; S32, according to the specific index, determine the size parameter that plays a decisive role in the specific index as the size parameter to be optimized; according to the size limit during assembly, determine the optimization range; S33, establishing a static performance index function f1, a dynamic performance index function f2, and a reliability performance index function f3 according to the extracted size parameters to be optimized; S34, normalization processing, establishing a comprehensive performance index function f4, and using an optimization algorithm to determine the final structural parameters.

5. The method for designing a compliant flight operation mechanism driven by a service performance map according to claim 4, characterized in that: In step S32, the size parameters to be optimized are: x l ＝[l1,l2,l3] T <h2 style=";text-align:left;direction:ltr">x<h2 style=";text-align:left;direction:ltr"> t <h2 style=";text-align:left;direction:ltr"> (t1,t2,t3,t4,t5,t6,t7,t8,t9)<h2 style=";text-align:left;direction:ltr"> T x R ＝[r1,r2,r3,r4,r5,r6] T Among them, x l represents the length parameter vector to be optimized extracted by the mechanism, l represents the length parameter to be optimized, x t represents the thickness parameter vector to be optimized extracted by the mechanism, x R represents the flexible hinge radius parameter vector to be optimized extracted by the mechanism, t represents the thickness parameter to be optimized, and r represents the flexible hinge radius parameter to be optimized.

6. The method for designing a compliant flight operation mechanism driven by a service performance map according to claim 5, characterized in that: In step S33, before establishing the static performance index function f1, the dynamic performance index function f2, and the reliability performance index function f3, the beam unit and the hinge unit need to be converted into a unit matrix, wherein establishing the static performance index function f1 requires converting the beam unit into a unit stiffness matrix in the local coordinate, specifically: Among them, K i,j is the local element stiffness matrix between the i-th node and the j-th node. The local element stiffness matrix is ​​converted to the global coordinate using the following conversion formula to obtain the global element stiffness matrix: Wherein, α is the counterclockwise rotation angle from the local coordinate system to the global coordinate system. The element stiffness matrix in the global coordinate system in the conversion formula is expanded to the following 3n×3n matrix, and the result is: Where n is the number of nodes. The matrices of all unit expansions are superimposed in sequence to obtain the overall stiffness matrix K. The displacement of each node is U = K -1 F, where F is the force condition of each node, and finally the mechanism magnification ratio is used as the static performance index function f1: Among them, δ out is the displacement of the output end of the mechanism, δ in is the input end displacement of the mechanism.

7. The method for designing a compliant flight operation mechanism driven by a service performance map according to claim 6, characterized in that: To establish the dynamic performance index function f2, it is necessary to calculate the unit mass matrix, which is: According to the conversion formula, it is expanded into a 3n×3n matrix in the global coordinates, and the overall mass matrix is ​​obtained by superimposing them in sequence: det([K]-ω 2 [M])=0 Among them, by solving the above equations, n characteristic solutions can be obtained, where the characteristic values ​​ω1, ω2, …, ω n Represents the n natural frequencies of the system, and then takes the first-order natural frequency as the dynamic performance index function 8. The method for designing a compliant flight operation mechanism driven by a service performance map according to claim 7, characterized in that: When establishing the reliability performance index function f3, it is necessary to calculate the relationship between the maximum stress and the maximum rotational deformation of the straight circular hinge, specifically: Among them, σ max represents the maximum stress, E represents the elastic modulus of the material, t represents the thickness of the straight circular hinge, α max represents the maximum rotatable deformation angle, and R represents the radius of the straight circular flexible hinge. The above formula determines whether the mechanism is reliable by judging whether its maximum stress is greater than the allowable stress of the mechanism material, and uses the maximum stress as the reliability performance index function f3. When σ max ≤[σ] when f3=1, when σ max >[σ] when f3=0.

9. The method for designing a compliant flight operation mechanism driven by a service performance map according to claim 8, characterized in that: Steps S34 to S37 are specifically as follows: the static performance index function f1 and the dynamic performance index function f2 are divided into regional weight factors to obtain a comprehensive performance index function f4 = (w1f1+w2f2)f3 of the compliant flight operating mechanism, wherein w1 represents the weight coefficient of the static performance index function, and w2 represents the weight coefficient of the dynamic performance index function.

10. The method for designing a compliant flight operation mechanism driven by a service performance map according to claim 9, characterized in that: The intelligent optimization algorithm comprises the following steps: S35. For the comprehensive performance index function f4, a particle swarm algorithm is used to perform single-objective optimization to obtain the optimal structural parameter x1. S36. A multi-objective intelligent optimization algorithm is used to perform multi-objective optimization on the static performance index function f1, the dynamic performance index function f2, and the reliability performance index function f3 to obtain the optimal structural parameter x2. S37. Compare the theoretical performance spectra corresponding to the structural parameter x1 and the structural parameter x2 to determine the final structural parameter.

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