Thermopile detector and spectrum detector

Abstract

The invention discloses a thermopile detector and a spectrum detector, relates to the technical field of spectrum detection, and provides a high-precision, high-performance, real-time and low-cost spectrum detection technical scheme. The thermopile detector comprises a substrate structure, a thermoelectric conversion structure and a phase change metamaterial structure, the thermoelectric conversion structure comprises a micro-heating structure and a thermocouple structure, the thermocouple structure is arranged on the substrate structure, the micro-heating structure is arranged above the thermocouple structure, and the phase change metamaterial structure is arranged above the micro-heating structure. The phase change metamaterial structure is used for absorbing light in a target wavelength range under the regulation and control of the micro-heating structure, converting the absorbed light energy into heat energy and transmitting the heat energy to the thermocouple structure, and the thermocouple structure is used for sensing first heat energy output by the micro-heating structure and second heat energy output by the phase change metamaterial structure; and the first heat energy and the second heat energy are converted into electric energy to be output.

Description

Technical Field

[0001] The present invention relates to the technical field of spectrum detection, and in particular to a thermopile detector and a spectrum detector. Background Art

[0002] Near-infrared spectroscopy, hyperspectral imaging and Raman spectroscopy are currently commonly used spectral detection technologies. Among them, near-infrared spectroscopy calculates the composition and molecular structure information of organic compounds based on the spectral characteristics in the sample according to the Lambert-Beer law. When using this method for spectral detection, it is necessary to consider the complex and serious overlapping of the spectral bands in the near-infrared spectral region. It is necessary to use some chemometric methods to extract effective information to achieve spectral detection. Hyperspectral imaging technology combines imaging technology with spectral technology. Through the two-dimensional geometric space and one-dimensional spectral information of the target to be measured, continuous and narrow-band image data with high spectral resolution is obtained. It is generally composed of a CCD camera, an imaging spectrometer, a lens, a line light source, a computer and control components. The system is generally complex and expensive. Raman spectroscopy obtains molecular information such as its structure, symmetry, and electronic environment by testing the vibration or rotation of internal molecules in the target sample. In this spectral detection technology, the spectrum is generated due to the comprehensive scattering effect of light generated after monochromatic light irradiation. The pretreatment time of this spectral detection technology is long, and the performance is greatly affected by the detection substrate.

[0003] With the development of science and technology and manufacturing technology, spectral detection technology has put forward higher requirements in terms of speed, accuracy, reliability, etc. Spectral detectors are gradually developing towards miniaturization, intelligence, real-time and multi-functionality.

[0004] With the rapid development of today's social economy, problems such as environmental pollution, food safety, and health and epidemic prevention are emerging in an endless stream. In order to meet the increasing needs of analysis and testing, it is urgent to develop low-cost, high-performance, and more specialized absorption spectroscopic detectors. Summary of the invention

[0005] The object of the present invention is to provide a thermopile detector and a spectrum detector, so as to provide a technical solution to solve the existing spectrum detection requirements of high precision, high performance, real-time performance and low cost.

[0006] In a first aspect, the present invention discloses a thermopile detector, which includes a base structure, a thermoelectric conversion structure, and a phase change metamaterial structure. The thermoelectric conversion structure includes a micro-heating structure and a thermocouple structure. The thermocouple structure is arranged on the base structure, the micro-heating structure is arranged above the thermocouple structure, and the phase change metamaterial structure is arranged above the micro-heating structure.

[0007] The micro-heating structure is used to regulate the temperature of the phase-change metamaterial structure according to the heat energy output by itself. The phase-change metamaterial structure is used to absorb light within a target wavelength range under the regulation of the micro-heating structure, and convert the absorbed light energy into heat energy and then transfer it to the thermocouple structure. The thermocouple structure is used to sense the first heat energy output by the micro-heating structure and the second heat energy output by the phase-change metamaterial structure, and convert the first heat energy and the second heat energy into electrical energy and then output it.

[0008] When the above technical solution is adopted, the thermopile detector includes a phase change metamaterial structure and a micro-heating structure. The phase change metamaterial structure is used to absorb light within a target wavelength range under the regulation of the micro-heating structure. Based on this, the present invention utilizes the temperature sensitivity of the phase change metamaterial structure to enable the phase change metamaterial to absorb certain wavelengths within a specific wavelength band. On this basis, the thermopile detector is applied to spectral detection to realize the detection of the absorption spectrum.

[0009] Further, the thermopile detector further comprises an absorption layer disposed between the thermoelectric conversion structure and the phase change metamaterial structure, and the phase change metamaterial structure comprises a phase change metamaterial stack disposed on the absorption layer;

[0010] The phase-change metamaterial stack is used to absorb light within a target wavelength range under the control of the micro-heating structure, and the absorption layer is used to convert the light energy absorbed by the phase-change metamaterial stack into heat energy, and transfer the heat energy to the thermocouple structure;

[0011] Or, the phase change metamaterial structure includes a phase change metamaterial stack;

[0012] The phase-change metamaterial stack is used to absorb light within a target wavelength range under the control of the micro-heating structure, and convert the light energy absorbed by the phase-change metamaterial stack into heat energy and then transfer it to the thermocouple structure.

[0013] Furthermore, the phase change metamaterial stack includes a first metal layer, an insulating stack and a second metal layer stacked from bottom to top, and the first metal layer is arranged on the micro-heating structure.

[0014] Wherein, the insulating stack includes a temperature phase change layer, and the second metal layer has a metal nanocolumn structure.

[0015] Furthermore, by adjusting the thickness of the temperature phase change layer, the thickness and radius of the metal nanocolumns in the metal nanocolumn structure, the absorption wavelength of the phase change metamaterial structure at room temperature is adjusted.

[0016] Furthermore, the thermoelectric conversion structure further comprises an insulating layer and a supporting layer arranged on the insulating layer, the thermocouple structure is formed in the insulating layer, and the micro-heating structure is formed in the supporting layer;

[0017] And / or, by adjusting the voltage or current applied to the micro-heating structure, the temperature of the phase-change metamaterial structure is adjusted, thereby adjusting the absorption wavelength of the phase-change metamaterial structure.

[0018] In a second aspect, the present invention further provides a spectral detector, comprising a tube cap with a window, a light shield located in the tube cap, a first thermopile detector and a second thermopile detector, wherein the first thermopile detector is arranged opposite to the window and is used to receive external light through the window, and the second thermopile detector is covered with the light shield to shield the light from above.

[0019] Among them, the first thermopile detector and the second thermopile detector both include a base structure, a thermoelectric conversion structure, and a phase change metamaterial structure. The thermoelectric conversion structure includes a micro-heating structure and a thermocouple structure. The thermocouple structure is arranged on the base structure, the micro-heating structure is arranged above the thermocouple structure, and the phase change metamaterial structure is arranged above the micro-heating structure.

[0020] The micro-heating structure is used to regulate the temperature of the phase-change metamaterial structure according to the heat energy output by itself. The phase-change metamaterial structure is used to absorb light within a target wavelength range under the regulation of the micro-heating structure, and convert the absorbed light energy into heat energy and then transfer it to the thermocouple structure. The thermocouple structure is used to sense the first heat energy output by the micro-heating structure and the second heat energy output by the phase-change metamaterial structure, and convert the first heat energy and the second heat energy into electrical energy and then output it.

[0021] In the case of adopting the above technical solution, when the required control temperature is greater than room temperature, the micro-heating structures of the first thermopile detector and the second thermopile detector are energized to construct different control temperatures, and the phase change metamaterial structure in the first thermopile detector and the second thermopile detector will respond to different absorption wavelengths at different temperatures to achieve temperature scanning spectrum detection. In this case, the control temperature corresponding to the input voltage is known, and the absorption wavelength of the phase change metamaterial structure corresponding to the temperature is also known. At this time, the output voltage of the second thermopile detector is the output voltage under the excitation of the micro-heating structure; the output voltage of the first thermopile detector is the output voltage under the excitation of the micro-heating structure and the phase change material absorption light excitation, so the intensity at the absorption wavelength corresponding to the input voltage can be obtained by subtracting the two, and the embodiment of the present invention obtains the absorption and intensity of different wavelengths by adjusting the input voltage.

[0022] When the required temperature is lower than room temperature, a voltage is input at both ends of the thermocouple structure of the second thermopile detector, and the ambient temperature of the first thermopile detector is changed by the second thermopile detector using the Peltier effect. The current ambient temperature information of the first thermopile detector is obtained through the input voltage of the second thermopile detector, and the current absorbable wavelength of the phase change metamaterial on the first thermopile detector is obtained, and the intensity of the current absorbable wavelength is obtained through the output voltage of the first thermopile detector. Thus, by adjusting the input voltage of the second thermopile detector, the absorption intensity of different absorption wavelengths of the spectrum detector is obtained.

[0023] Based on the above description, the spectral detector provided by the embodiment of the present invention is capable of performing spectral detection, and the embodiment of the present invention realizes absorption of a certain wavelength based on the temperature-sensitive property of the phase change metamaterial. Since the performance of the metamaterial itself is stable, its absorption of a specific wavelength is stable, and thus the spectral detector has stable spectral detection capability.

[0024] It should be understood that the embodiment of the present invention is achieved by integrating the temperature-sensitive phase change metamaterial into a thermopile detector with a built-in micro-heating structure. The thermopile detector with a built-in micro-heating structure can be realized through an integrated preparation technology. On this basis, it is combined with semiconductor processes such as lithography and thin film deposition, and then combined with conventional packaging processes to complete the preparation of the spectral detector. Therefore, its preparation method is simple and suitable for mass production.

[0025] It should be further understood that the embodiment of the present invention is implemented by integrating a temperature-sensitive phase-change metamaterial into a thermopile detector with a micro-heating structure. The temperature control at the phase-change metamaterial can be achieved by adjusting the input voltage loaded on the micro-heating structure, and then the presence or absence of an absorption wavelength at the corresponding temperature and the absorption wavelength and its intensity at the corresponding temperature are determined through the spectrum detector signal (the first thermopile detector and the second thermopile detector). The spectrum detector has a fast response speed and can reflect the spectrum absorption results in real time.

[0026] Finally, in the embodiment of the present invention, two thermopile detectors that have integrated temperature-sensitive phase-change metamaterials and micro-heating structures are sealed together, and the detection of spectral wavelength and intensity is achieved by comparing the device signals of the two thermopile detectors. Therefore, the spectral detector has a simple structure, intuitive results, low cost, and effectively eliminates the interference of self-heating structure, stray light and other factors on the spectral detection results, and the detection results are highly reliable.

[0027] Based on the above description, the present invention can provide a spectrum detector with high precision, high performance, real-time performance and low cost. BRIEF DESCRIPTION OF THE DRAWINGS

[0028] The drawings described herein are used to provide a further understanding of the present invention and constitute a part of the present invention. The exemplary embodiments of the present invention and their descriptions are used to explain the present invention and do not constitute an improper limitation of the present invention. In the drawings:

[0029] Figure 1 A schematic diagram of the structure of a thermopile detector provided by an embodiment of the present invention is shown;

[0030] Figure 2 A schematic structural diagram of a spectrum detector provided by an embodiment of the present invention is shown;

[0031] Figure 3 A spectrum detection flow chart of a spectrum detector provided by an embodiment of the present invention is shown. DETAILED DESCRIPTION

[0032] Hereinafter, embodiments of the present disclosure will be described with reference to the accompanying drawings. However, it should be understood that these descriptions are exemplary only and are not intended to limit the scope of the present disclosure. In addition, in the following description, descriptions of well-known structures and technologies are omitted to avoid unnecessary confusion of the concepts of the present disclosure.

[0033] In addition, the terms "first" and "second" are used for descriptive purposes only and should not be understood as indicating or implying relative importance or implicitly indicating the number of the indicated technical features. Therefore, the features defined as "first" and "second" may explicitly or implicitly include one or more of the features. In the description of the present invention, the meaning of "multiple" is two or more, unless otherwise clearly and specifically defined. The meaning of "several" is one or more, unless otherwise clearly and specifically defined.

[0034] Near-infrared spectroscopy, hyperspectral imaging and Raman spectroscopy are currently commonly used spectral detection technologies. Among them, near-infrared and outdoor spectroscopy calculates the composition and molecular structure information of organic compounds based on the spectral characteristics of the sample according to the Lambert-Beer law. When using this method for spectral detection, it is necessary to consider the complex and serious overlapping of the spectral bands in the near-infrared spectral region. It is necessary to use some chemometric methods to extract effective information and then realize spectral detection. Hyperspectral imaging technology combines imaging technology with spectral technology. Through the two-dimensional geometric space and one-dimensional spectral information of the target to be measured, continuous and narrow-band image data with high spectral resolution is obtained. It is generally composed of a CCD camera, an imaging spectrometer, a lens, a line light source, a computer and control components. The system is generally complex and expensive. Raman spectroscopy obtains molecular information such as its structure, symmetry, and electronic environment by testing the vibration or rotation of internal molecules in the target sample. In this spectral detection technology, the spectrum is generated due to the comprehensive scattering effect of light generated after monochromatic light irradiation. The pretreatment time of this spectral detection technology is long, and the performance is greatly affected by the detection substrate.

[0035] With the development of science and technology and manufacturing technology, spectral detection technology has put forward higher requirements in terms of speed, accuracy, reliability, etc. Spectral detectors are gradually developing towards miniaturization, intelligence, real-time and multi-functionality.

[0036] With the rapid development of today's social economy, problems such as environmental pollution, food safety, and health and epidemic prevention are emerging in an endless stream. In order to meet the increasing needs of analysis and testing, it is urgent to develop low-cost, high-performance, and more specialized absorption spectroscopic detectors.

[0037] Based on this, refer to Figure 1 The embodiment of the present invention provides a thermopile detector, which includes a base structure 16, a thermoelectric conversion structure 10, and a phase-change metamaterial structure 9. The thermoelectric conversion structure includes a micro-heating structure 11, an insulating layer and a supporting layer 12, a metal connection 13, and a thermocouple structure 14. The thermocouple structure is arranged above the base structure 16, the micro-heating structure 11 is arranged above the thermocouple structure, and the phase-change metamaterial structure 9 is arranged above the micro-heating structure 11. In practice, a cavity 17 is also provided in the base structure 16, and the cavity 17 is used to ensure the temperature difference between the hot and cold ends of the thermocouple structure.

[0038] The micro-heating structure 11 is used to regulate the temperature of the phase-change metamaterial structure 9 according to the heat energy output by itself. The phase-change metamaterial structure 9 is used to absorb light within the target wavelength range under the regulation of the micro-heating structure 11, and convert the absorbed light energy into heat energy and then transfer it to the thermocouple structure. The thermocouple structure is used to absorb the first heat energy output by the micro-heating structure 11 and the second heat energy output by the phase-change metamaterial structure 9, and convert the first heat energy and the second heat energy into electrical energy and then output it.

[0039] Based on this, the above-mentioned thermopile detector includes a phase change metamaterial structure and a micro-heating structure. The phase change metamaterial structure is used to absorb light within a target wavelength range under the regulation of the micro-heating structure. Based on this, the embodiment of the present invention can utilize the temperature sensitivity of the phase change metamaterial structure to enable the phase change metamaterial to absorb certain wavelengths within a specific wavelength band. On this basis, the thermopile detector is applied to spectral detection to realize the detection of the absorption spectrum.

[0040] Furthermore, the thermopile detector in the embodiment of the present invention can also be used for energy storage and power generation. Specifically, the phase change metamaterial structure absorbs light at different temperatures and then passes through the photothermal conversion layer of the thermopile detector, converting the absorbed light into heat, which is converted into electrical energy output through the thermopile detector.

[0041] It can also be applied to thermal management of electronic devices. Specifically, the heat generated by electronic devices causes the temperature to rise, and the temperature-sensitive phase change material absorbs light. The light is converted into heat and then converted into electrical energy output through the thermopile device, thereby sensing the temperature change of the electronic device for thermal management.

[0042] In one example, referring to Figure 1 The thermopile detector further includes an absorption layer 15 disposed between the thermoelectric conversion structure 10 and the phase change metamaterial structure 9, and the phase change metamaterial structure 9 includes a phase change metamaterial stack disposed on the absorption layer 15. The phase change metamaterial stack is used to absorb light within a target wavelength range under the control of the micro-heating structure 11, and the absorption layer 15 is used to convert the light energy absorbed by the phase change metamaterial stack into heat energy, and transfer the heat energy to the thermocouple structure.

[0043] Based on this, the phase change metamaterial structure 9 can absorb light within the target wavelength range and convert the absorbed light energy into heat energy through the absorption layer 15 in the thermopile detector.

[0044] In another example, the phase-change metamaterial structure includes a phase-change metamaterial stack;

[0045] The phase-change metamaterial stack is used to absorb light within a target wavelength range under the control of the micro-heating structure, and convert the light energy absorbed by the phase-change metamaterial stack into heat energy and then transfer it to the thermocouple structure.

[0046] Reference Figure 1 The phase change metamaterial stack includes a first metal layer 18, an insulating stack and a second metal layer 21 stacked from bottom to top, wherein the first metal layer 18 is disposed on the micro-heating structure 11. The insulating stack includes a temperature phase change layer, and the second metal layer 21 has a metal nanocolumn structure.

[0047] In the embodiment of the present invention, the absorption wavelength of the phase change metamaterial structure at room temperature can be adjusted by adjusting the thickness of the temperature phase change layer and the thickness and radius of the metal nanocolumns in the metal nanocolumn structure.

[0048] Among them, refer to Figure 1The laminated structure formed by the insulating laminated aluminum oxide layer 20 and the vanadium oxide layer 19 should be understood that vanadium oxide is a temperature-sensitive phase change material. Vanadium oxide can achieve its reversible phase change between semiconductor and metal through excitation means such as thermal phase change and electro-induced phase change. After the phase change, vanadium oxide can change from a semiconductor state with high transmittance to a metal state with high reflectivity, and its resistivity will change from high resistivity to low resistivity. Therefore, the vanadium oxide layer 19 can be used as a phase change material layer in the embodiment of the present invention. It should be understood that other temperature-sensitive phase change metamaterials can also be applied to the embodiment of the present invention, and the embodiment of the present invention does not specifically limit this.

[0049] More specifically, the embodiments of the present invention can adjust the absorption wavelength of the phase change metamaterial structure at room temperature by regulating structural parameters such as the radius of the metal nanocolumns, the thickness of the nanocolumns, and the thickness of the vanadium oxide layer. On this basis, the phase change characteristics of vanadium oxide are utilized to load voltage or current to the micro-heating structure in the thermopile detector to cause it to heat up and thus control the temperature, thereby achieving adjustment of the absorption wavelength of the phase change metamaterial structure.

[0050] The thermoelectric conversion structure 10 further includes an insulating layer and a supporting layer 12 disposed on the insulating layer. The thermocouple structure is formed in the insulating layer, and the micro-heating structure 11 is formed in the supporting layer 12 .

[0051] Based on the above description, the embodiment of the present invention applies the temperature-sensitive phase change metamaterial and the thermopile infrared detector with its own micro-heating structure to spectral detection, and realizes the detection of the wavelength and intensity of the spectrum in a certain band by temperature scanning.

[0052] Second, refer to Figure 2 The embodiment of the present invention further provides a spectrum detector, the spectrum detector comprising a tube cap 2 with a window 3, a light shield 6 located in the tube cap 2, a first thermopile detector 4 and a second thermopile detector 5, the first thermopile detector 4 being arranged opposite to the window 3 for receiving external light 1 through the window 3, and the second thermopile detector 5 5 The upper part is covered with the light shield 6 for shielding the light from above;

[0053] Wherein, the first thermopile detector 4 and the second thermopile detector 5 both include a base structure, a thermoelectric conversion structure, and a phase-change metamaterial structure, the thermoelectric conversion structure includes a micro-heating structure and a thermocouple structure, the thermocouple structure is arranged on the base structure, the micro-heating structure is arranged above the thermocouple structure, and the phase-change metamaterial structure is arranged above the micro-heating structure;

[0054] The micro-heating structure is used to regulate the temperature of the phase-change metamaterial structure according to the heat energy output by itself. The phase-change metamaterial structure is used to absorb light within a target wavelength range under the regulation of the micro-heating structure, and convert the absorbed light energy into heat energy and then transfer it to the thermocouple structure. The thermocouple structure is used to absorb the first heat energy output by the micro-heating structure and the second heat energy output by the phase-change metamaterial structure, and convert the first heat energy and the second heat energy into electrical energy and then output it.

[0055] Further, see Figure 2 The first thermopile detector 4 further includes a first input pin 7-1, a second input pin 7-2, a first output pin 7-3 and a second output pin 7-4. The first input pin 7-1 and the second input pin 7-2 are connected to the micro-heating structure of the first thermopile detector 4, and are used to provide a target current or a target voltage to the micro-heating structure of the first thermopile detector 4. The first output pin 7-3 and the second output pin 7-4 are output pins of the first thermopile detector 4.

[0056] It should be understood that the micro-heating structure of the first thermopile detector 4 is connected to an external power supply terminal based on the first input pin 7-1 and the second input pin 7-2, and the power supply terminal is used to provide a target current or a target voltage to the micro-heating structure to heat the micro-heating structure, so that the phase change metamaterial structure absorbs light within a target wavelength range. The first output pin 7-3 and the second output pin 7-4 are external output pins of the first thermopile detector 4. By detecting the voltage values ​​of the first output pin 7-3 and the second output pin 7-4, the output voltage of the first thermopile detector can be obtained, and then the intensity of the current absorbable wavelength of the first thermopile detector can be obtained.

[0057] The second thermopile detector further includes a third input pin 8-1, a fourth input pin 8-2, a third output pin 8-3 and a fourth output pin 8-4. The third input pin 8-1 and the fourth input pin 8-2 are connected to the micro-heating structure of the second thermopile detector 5, and are used to provide a target current or a target voltage to the micro-heating structure of the second thermopile detector 5. The third output pin 8-3 and the fourth output pin 8-4 are output pins of the second thermopile detector 5.

[0058] Similarly, the micro-heating structure of the second thermopile detector 4 is connected to an external power supply terminal based on the third input pin 8-1 and the fourth input pin 8-2, and the power supply terminal is used to provide a target current or a target voltage to the micro-heating structure to heat the micro-heating structure, so that the phase change metamaterial structure absorbs light within the target wavelength range. The third output pin 8-3 and the fourth output pin 8-4 are external output pins of the second thermopile detector 5. By detecting the voltage values ​​of the third output pin 8-3 and the fourth output pin 8-4, the output voltage of the second thermopile detector can be obtained, and then the thermal energy of the micro-heater of the second thermopile detector can be obtained.

[0059] In a possible implementation, the thermopile detector further includes an absorption layer disposed between the thermoelectric conversion structure and the phase change metamaterial structure, and the phase change metamaterial structure includes a phase change metamaterial stack disposed on the absorption layer; the phase change metamaterial stack is used to absorb light within a target wavelength range under the regulation of the micro-heating structure, and the absorption layer is used to convert light energy absorbed by the phase change metamaterial stack into thermal energy, and transfer the thermal energy to the thermocouple structure.

[0060] The phase change metamaterial stack includes a first metal layer, an insulating stack and a second metal layer stacked from bottom to top, wherein the first metal layer is arranged on the micro-heating structure, wherein the insulating stack includes a temperature phase change layer, and the second metal layer has a metal nanocolumn structure.

[0061] By adjusting the thickness of the temperature phase change layer, the thickness and radius of the metal nanocolumns in the metal nanocolumn structure, the absorption wavelength of the phase change metamaterial structure at room temperature can be adjusted. The temperature of the phase change metamaterial structure can also be adjusted by adjusting the voltage or current applied to the micro-heating structure, thereby adjusting the absorption wavelength of the phase change metamaterial structure.

[0062] In another possible implementation, the phase-change metamaterial structure includes a phase-change metamaterial stack;

[0063] The phase-change metamaterial stack is used to absorb light within a target wavelength range under the control of the micro-heating structure, and convert the light energy absorbed by the phase-change metamaterial stack into heat energy and then transfer it to the thermocouple structure.

[0064] In the embodiment of the present invention, refer to Figure 2 and Figure 3, when the required control temperature is greater than room temperature, different temperature environments are constructed by applying different voltages or currents to the micro-heating structures of the first thermopile detector 4 and the second thermopile detector 5. Since the second thermopile detector 5 is shielded from light and cannot absorb light, the phase change metamaterial structure of the first thermopile detector will absorb light of different wavelengths at different temperatures. The signal subtraction between the first thermopile detector and the second thermopile detector can realize temperature scanning spectrum detection. In this case, the temperature corresponding to the input voltage is known, and the absorption wavelength of the phase change metamaterial structure under the temperature is also known. At this time, the output voltage of the second thermopile detector is the output voltage under the excitation of the micro-heating structure; the output voltage of the first thermopile detector is the output voltage under the excitation of the micro-heating structure and the phase change material absorption light excitation. Therefore, the intensity at the absorption wavelength corresponding to the input voltage can be obtained by subtracting the two. By adjusting the input voltage, the absorption and intensity of light of different wavelengths can be obtained.

[0065] When the required temperature is lower than room temperature, a voltage is input to both ends 8-3 and 8-4 of the electrical output of the thermocouple structure of the second thermopile detector, and the ambient temperature of the first thermopile detector is changed by the second thermopile detector using the Peltier effect, so that the phase change material on the first thermopile detector absorbs light of different wavelengths at different ambient temperatures. In this case, the current temperature information is obtained through the input voltage of the second thermopile detector, and the absorbable wavelength of the phase change metamaterial is known, and the intensity of the current absorbable wavelength is obtained through the output voltage of the first thermopile detector. By adjusting the input voltage, the absorption and intensity of different wavelengths are obtained.

[0066] Based on the above description, the spectral detector provided by the present invention is capable of performing spectral detection, and the present invention realizes absorption of a certain wavelength based on the temperature-sensitive property of the phase change metamaterial. Since the performance of the metamaterial itself is stable, its absorption of a specific wavelength is stable, and thus the spectral detector has stable spectral detection capability.

[0067] It should be understood that the present invention is achieved by integrating the temperature-sensitive phase change metamaterial into a thermopile detector with a built-in micro-heating structure. The thermopile detector with a built-in micro-heating structure can be realized through an integrated preparation technology. On this basis, semiconductor processes such as lithography and thin film deposition are combined to complete the preparation of the spectral detector. Therefore, its preparation method is simple and suitable for mass production.

[0068] It should be further understood that the present invention is realized by integrating the temperature-sensitive phase-change metamaterial into a thermopile detector with a micro-heating structure. The temperature control of the phase-change metamaterial can be achieved by adjusting the input voltage loaded on the micro-heating structure, and then the presence or absence of absorption wavelengths and light wavelengths at the corresponding temperature can be determined through the spectrum detector signal (the first thermopile detector and the second thermopile detector). Therefore, the spectrum detector has a fast response speed and can reflect the spectrum absorption results in real time.

[0069] Finally, the present invention seals two thermopile detectors that have integrated temperature-sensitive phase-change metamaterials and micro-heating structures together, and detects the wavelength and intensity of the spectrum by comparing the signals of the two devices. Therefore, the spectral detector has a simple structure, intuitive results, low cost, and effectively eliminates the interference of self-heating structure, stray light and other factors on the spectral detection results, and the detection results are highly reliable. Based on the above description, the embodiments of the present invention can provide a spectral detector with high precision, high performance, real-time performance and low cost.

[0070] It is worth noting that the detection band of the spectrum detector in the embodiment of the present invention is determined by the specific material properties and structure of the phase change metamaterial in the phase change metamaterial part structure. For example, the phase change material vanadium oxide can enable the spectrum detector to complete spectrum detection in the mid-infrared band. It should be understood that when it is necessary to detect light in other bands, the corresponding phase change material can be used.

[0071] Based on the above description, the embodiment of the present invention integrates the temperature-responsive multi-stable metamaterial in situ on the surface of the thermopile sensor with a micro-heating structure to form a spectrum detector and a spectrum tunable device. The embodiment of the present invention also utilizes the characteristics that the metamaterial produces a phase change with temperature changes, thereby changing the absorption peak, and that the micro-heating structure can provide temperature changes when working, so that the spectrum detector completes spectrum detection.

[0072] The design principle of the spectrum detector in the embodiment of the present invention can be used not only to prepare a spectrum detector in a certain band, but also to prepare a spectrum detector for a single wavelength, a spectrum detector for a dual wavelength, or a multi-spectrum detector according to the characteristics of the temperature-sensitive phase change metamaterial. Furthermore, the design principle of the spectrum detector in the embodiment of the present invention can be applied not only to spectrum detection, but also to switch devices.

[0073] Although the present invention is described herein in conjunction with various embodiments, in the process of implementing the claimed invention, those skilled in the art may understand and implement other variations of the disclosed embodiments by viewing the drawings, the disclosure, and the appended claims. In the claims, the word "comprising" does not exclude other components or steps, and "one" or "an" does not exclude multiple situations. A single processor or other unit may implement several functions listed in the claims. Certain measures are recorded in different dependent claims, but this does not mean that these measures cannot be combined to produce good results.

[0074] Although the present invention has been described in conjunction with specific features and embodiments thereof, it is apparent that various modifications and combinations may be made thereto without departing from the spirit and scope of the present invention. Accordingly, this specification and the accompanying drawings are merely exemplary illustrations of the present invention as defined by the appended claims and are deemed to cover any and all modifications, variations, combinations or equivalents within the scope of the present invention. Obviously, those skilled in the art may make various modifications and variations to the present invention without departing from the spirit and scope of the present invention. Thus, the present invention is intended to include such modifications and variations if they fall within the scope of the claims of the present invention and their equivalents.

Claims

1. A thermopile detector, characterized in that: The thermopile detector includes a base structure, a thermoelectric conversion structure, and a phase-change metamaterial structure. The thermoelectric conversion structure includes a micro-heating structure and a thermocouple structure. The thermocouple structure is arranged on the base structure, the micro-heating structure is arranged above the thermocouple structure, and the phase-change metamaterial structure is arranged above the micro-heating structure. The micro-heating structure is used to regulate the temperature of the phase-change metamaterial structure according to the heat energy output by itself. The phase-change metamaterial structure is used to absorb light within a target wavelength range under the regulation of the micro-heating structure, and convert the absorbed light energy into heat energy and then transfer it to the thermocouple structure. The thermocouple structure is used to sense the first heat energy output by the micro-heating structure and the second heat energy output by the phase-change metamaterial structure, and convert the first heat energy and the second heat energy into electrical energy and then output it.

2. The thermopile detector according to claim 1, characterized in that: The thermopile detector further comprises an absorption layer disposed between the thermoelectric conversion structure and the phase change metamaterial structure, wherein the phase change metamaterial structure comprises a phase change metamaterial stack disposed on the absorption layer; The phase-change metamaterial stack is used to absorb light within a target wavelength range under the control of the micro-heating structure, and the absorption layer is used to convert the light energy absorbed by the phase-change metamaterial stack into heat energy, and transfer the heat energy to the thermocouple structure; Or, the phase change metamaterial structure includes a phase change metamaterial stack; The phase-change metamaterial stack is used to absorb light within a target wavelength range under the control of the micro-heating structure, and convert the light energy absorbed by the phase-change metamaterial stack into heat energy and then transfer it to the thermocouple structure.

3. The thermopile detector according to claim 2, characterized in that: The phase change metamaterial stack comprises a first metal layer, an insulating stack and a second metal layer stacked from bottom to top, wherein the first metal layer is arranged on the micro-heating structure; Wherein, the insulating stack includes a temperature phase change layer, and the second metal layer has a metal nanocolumn structure.

4. The thermopile detector according to claim 3, characterized in that: By adjusting the thickness of the temperature phase change layer, the thickness and radius of the metal nanocolumns in the metal nanocolumn structure, the absorption wavelength of the phase change metamaterial structure at room temperature is adjusted.

5. The thermopile detector according to any one of claims 1 to 4, characterized in that: The thermoelectric conversion structure further includes an insulating layer and a supporting layer disposed on the insulating layer, the thermocouple structure is formed in the insulating layer, and the micro-heating structure is formed in the supporting layer; And / or, by adjusting the voltage or current applied to the micro-heating structure, the temperature at the phase-change metamaterial structure is adjusted, thereby adjusting the absorption wavelength of the phase-change metamaterial structure.

6. A spectrum detector, characterized in that: The spectral detector includes a tube cap with a window, a light shield located in the tube cap, a first thermopile detector and a second thermopile detector, wherein the first thermopile detector is arranged opposite to the window and is used to receive external light through the window, and the second thermopile detector is covered with the light shield and is used to shield the light from above; Wherein, the first thermopile detector and the second thermopile detector both include a base structure, a thermoelectric conversion structure, and a phase-change metamaterial structure, the thermoelectric conversion structure includes a micro-heating structure and a thermocouple structure, the thermocouple structure is arranged on the base structure, the micro-heating structure is arranged above the thermocouple structure, and the phase-change metamaterial structure is arranged above the micro-heating structure; The micro-heating structure is used to regulate the temperature of the phase-change metamaterial structure according to the heat energy output by itself. The phase-change metamaterial structure is used to absorb light within a target wavelength range under the regulation of the micro-heating structure, and convert the absorbed light energy into heat energy and then transfer it to the thermocouple structure. The thermocouple structure is used to sense the first heat energy output by the micro-heating structure and the second heat energy output by the phase-change metamaterial structure, and convert the first heat energy and the second heat energy into electrical energy and then output it.

7. The spectral detector according to claim 6, characterized in that: The first thermopile detector further includes a first input pin, a second input pin, a first output pin and a second output pin, wherein the first input pin and the second input pin are connected to the micro-heating structure of the first thermopile detector, and are used to provide a target current or a target voltage to the micro-heating structure of the first thermopile detector, and the first output pin and the second output pin are output pins of the first thermopile detector; The second thermopile detector also includes a third input pin, a fourth input pin, a third output pin and a fourth output pin. The third input pin and the fourth input pin are connected to the micro-heating structure of the second thermopile detector and are used to provide a target current or a target voltage to the micro-heating structure of the second thermopile detector. The third output pin and the fourth output pin are output pins of the second thermopile detector.

8. The spectral detector according to claim 6, characterized in that: The thermopile detector further comprises an absorption layer disposed between the thermoelectric conversion structure and the phase change metamaterial structure, wherein the phase change metamaterial structure comprises a phase change metamaterial stack disposed on the absorption layer; The phase-change metamaterial stack is used to absorb light within a target wavelength range under the control of the micro-heating structure, and the absorption layer is used to convert the light energy absorbed by the phase-change metamaterial stack into heat energy, and transfer the heat energy to the thermocouple structure; Or, the phase change metamaterial structure includes a phase change metamaterial stack; The phase-change metamaterial stack is used to absorb light within a target wavelength range under the control of the micro-heating structure, and convert the light energy absorbed by the phase-change metamaterial stack into heat energy and then transfer it to the thermocouple structure.

9. The spectral detector according to claim 8, characterized in that: The phase-change metamaterial stack includes a first metal layer, an insulating stack and a second metal layer stacked from bottom to top, and the first metal layer is arranged on the micro-heating structure. Wherein, the insulating stack includes a temperature phase change layer, and the second metal layer has a metal nanocolumn structure.

10. The spectral detector according to claim 9, characterized in that: By adjusting the thickness of the temperature phase change layer, the thickness and radius of the metal nanocolumns in the metal nanocolumn structure, the absorption wavelength of the phase change metamaterial structure at room temperature is adjusted; And / or, by adjusting the voltage or current applied to the micro-heating structure, the temperature of the phase-change metamaterial structure is adjusted, thereby adjusting the absorption wavelength of the phase-change metamaterial structure.

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