Stepped plane parallelism detection device and detection method thereof

Abstract

The invention discloses a step plane parallelism detection device and a detection method thereof.The step plane parallelism detection device comprises a base used for supporting and a sample piece to be detected located above the base, the sample piece to be detected is provided with a first step plane and a second step plane, the first step plane is a reference plane of the sample piece to be detected, and the second step plane is a plane to be detected; a rotating structure for driving a tested sample to rotate is arranged on the base, a base surface structure for providing a supporting surface for the rotating structure is arranged on the base, and the base surface structure is matched with the rotating structure for use; according to the invention, the reference surface of the tested sample piece is used as an actual reference surface during testing, only another plane is tested during testing, the position of the tested object is prevented from being frequently adjusted, the measurement error can be further reduced, and when the device is used for testing, only the tested sample piece does axis motion, the test track is a circle, and the motion only generates a circle surface parallelism error, so that the test accuracy is improved. Jumping errors caused by planar motion in the prior art cannot be generated.

Description

Technical Field

[0001] The invention relates to the technical field of plane parallelism measurement, in particular to a detection device and a detection method for step plane parallelism. Background Art

[0002] Plane parallelism is the evaluation of the parallel state between two planes. A step surface refers to a height difference between two planes of the sample being measured, one of which is the evaluation reference and the other is the measured surface.

[0003] Parallelism detection equipment is a special tool used to measure the degree of parallelism between a plane on the surface of a workpiece and a reference plane. It has multiple functions such as measurement control, data display, alarm prompts and data processing.

[0004] In the prior art, for the parallelism test of two step surfaces, the existing testing method generally adopts high-precision optical testing equipment, such as a three-coordinate laser flatness measuring instrument, to measure the parallelism of the two planes respectively. However, during the test, the position of the tested sample needs to be adjusted according to the different positions of the two planes. The adjustment process can easily cause the tested object to be offset compared to the position of the last test, affecting the test accuracy. Therefore, a detection device and a detection method for the parallelism of the step plane are needed to meet people's needs. Summary of the invention

[0005] The object of the present invention is to provide a detection device and a detection method for step plane parallelism to solve the problems raised in the above background technology.

[0006] To achieve the above object, the present invention provides the following technical solutions:

[0007] A detection device and a detection method for step plane parallelism, comprising:

[0008] Base, for support;

[0009] The sample to be tested is located above the base;

[0010] The rotating structure is arranged on the base and is used to drive the sample to be tested to rotate;

[0011] The base surface structure is arranged on the base and used in conjunction with the rotating structure to provide a support surface for the rotating structure;

[0012] The depth measuring structure is arranged on the base and is used to measure the parallelism of the plane of the sample being measured.

[0013] Preferably, the sample to be tested is provided with a first step surface and a second step surface, wherein the first step surface is a reference surface of the sample to be tested, and the second step surface is a plane to be tested.

[0014] Preferably, the rotating structure comprises:

[0015] The bottom plate is rotated and installed on the top of the base;

[0016] A rotating connecting rod is arranged above the rotating bottom plate;

[0017] A rotating top plate is arranged above the rotating connecting rod;

[0018] A rotating shaft is rotatably mounted on the base, and the rotating shaft is arranged on the rotating bottom plate to provide a rotating fulcrum for the rotating bottom plate;

[0019] The motor is arranged on the base, and the output end of the motor is arranged at one end of the rotating shaft, so as to drive the rotating shaft to rotate.

[0020] Preferably, the base surface structure comprises:

[0021] A support column, movably mounted on the base, for support;

[0022] Turn the base plate so that the threads are mounted on the support column;

[0023] A bearing, the outer ring of which is arranged on the inner wall of the rotating base plate;

[0024] Install the shaft and arrange it on the inner ring of the bearing;

[0025] The mounting shaft is detachably mounted on the rotating top plate, the mounting shaft is detachably mounted on the sample to be tested, and the mounting shaft is designed with a middle opening.

[0026] Preferably, the base surface structure further comprises a reference plate detachably mounted on the mounting shaft, and the reference plate is a standard plane plate.

[0027] Preferably, the depth measurement structure comprises:

[0028] a probe, located within the mounting shaft and in contact with the top surface of the reference plate;

[0029] The grating ruler is located on one side of the probe, and the reading head of the grating ruler is arranged on the probe;

[0030] The parallelism detection control panel is arranged on one side of the grating ruler, and the parallelism detection control panel is electrically connected to the grating ruler and the motor;

[0031] The fixing rod is arranged on the base and the parallelism detection control panel and is used to provide support for the parallelism detection control panel.

[0032] The detection method of step plane parallelism is as follows:

[0033] S1. First install the mounting shaft on the rotating base plate through the bearing, fix the reference plate on the bottom surface of the mounting shaft, and then adjust the position of the probe to make it contact with the reference plate.

[0034] S2. Use the parallelism detection control panel to control the rotating structure to drive the reference plate to rotate, and monitor the grating scale signal at the same time, calculate the verticality difference between the bottom surface of the installation shaft and the probe, and use the data as the compensation parameter of the test. Adjust the verticality of the installation shaft height and the plane according to the compensation parameter.

[0035] S3. After calibration, remove the reference plate and fix the stepped surface 1 of the sample to be measured to the bottom surface of the mounting shaft. It can be fixed with screws, and the position of the probe is adjusted to make it contact with the stepped surface 2 of the sample to be measured.

[0036] S4. After the measured sample is installed, it can be driven by the rotating structure to rotate in the plane of the reference plane. During the rotation of the measured sample, the flatness information of the step surface 2 can be converted into the up and down movement information of the probe. The grating ruler converts the information into an electrical signal and transmits it to the parallelism detection control panel. The parallelism detection control panel tests the parallelism parameters of the step surface 2 and the step surface 1.

[0037] Compared with the prior art, the present invention has the following beneficial effects:

[0038] (1) The present invention uses the reference plane of the tested object as the actual reference plane during testing, and only tests the other plane during testing, thereby avoiding frequent adjustments to the position of the object being tested, thereby further reducing the measurement error. When the device is tested, only the tested object moves along the axis, and the test trajectory is a circle. The movement will only produce a circular surface parallelism error, and will not produce the runout error caused by the plane movement in the prior art.

[0039] (3) The device has the effect of testing the parallelism of the motion trajectory and performing error compensation. Before the test, a reference plate can be installed to calculate the verticality difference between the bottom surface of the mounting shaft and the probe. The parallelism detection control panel is used to control the left and right movement of the grating scale and the probe, and the rotation of the reference plate is controlled at the same time to test the parallelism of the motion trajectory. The test data is used as the compensation parameter of the test, so that the verticality of the reference plate and the mounting axis plane can be calibrated according to the compensation parameter. The device has a simple structure and can reduce equipment costs. BRIEF DESCRIPTION OF THE DRAWINGS

[0040] Figure 1 The present invention provides a schematic structural diagram of a detection device and a detection method for step plane parallelism.

[0041] In the figure: 1. base; 2. support column; 3. rotating bottom plate; 4. rotating connecting rod; 5. rotating top plate; 6. rotating base plate; 7. bearing; 8. mounting shaft; 9. reference plate; 10. probe; 11. grating ruler; 12. parallelism detection control panel; 13. fixing rod; 14. step surface one; 15. step surface two; 16. sample to be tested; 17. rotating shaft; 18. motor. DETAILED DESCRIPTION

[0042] The following will be combined with the drawings in the embodiments of the present invention to clearly and completely describe the technical solutions in the embodiments of the present invention. Obviously, the described embodiments are only part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the present invention.

[0043] See also Figure 1 The present invention provides a technical solution: a detection device for step plane parallelism and a detection method thereof, comprising a base 1 for support and a test sample 16 located above the base 1, wherein a step surface 14 and a step surface 2 15 are provided on the test sample 16, wherein the step surface 14 is a reference surface of the test sample 16, and the step surface 2 15 is a test plane.

[0044] In order to be able to more comprehensively measure the flatness of the tested plane of the sample 16 under test, a rotating structure for driving the tested sample 16 to rotate is arranged on the base 1, and a base surface structure for providing a support surface for the rotating structure is arranged on the base 1. The base surface structure is used in conjunction with the rotating structure, and a depth measurement structure for measuring the parallelism of the plane of the tested sample 16 is arranged on the base 1.

[0045] Among them, the rotating structure includes a rotating base plate 3 rotatably installed above the base 1, a rotating connecting rod 4 arranged above the rotating base plate 3, a rotating top plate 5 arranged above the rotating connecting rod 4, a rotating shaft 17 rotatably installed on the base 1 for providing a rotating fulcrum for the rotating base plate 3, the rotating shaft 17 is arranged on the rotating base plate 3, and a motor 18 is arranged on the base 1 for driving the rotating shaft 17 to rotate, the output end of the motor 18 is arranged at one end of the rotating shaft 17, and the output shaft of the motor 18 can drive the rotating shaft 17, the rotating base plate 3, the rotating connecting rod 4 and the rotating top plate 5 to rotate.

[0046] Among them, the base surface structure includes a support column 2 movably installed on the base 1 for support, a rotating base plate 6 movably installed on the support column 2, a bearing 7 with an outer ring arranged on the inner wall of the rotating base plate 6, and a mounting shaft 8 arranged on the inner ring of the bearing 7. The mounting shaft 8 is detachably mounted on the rotating top plate 5. The mounting shaft 8 is detachably mounted on the sample to be measured 16. The mounting shaft 8 is designed with a middle opening. The mounting shaft 8 can be mounted on the rotating base plate 6 through the bearing 7. The rotating top plate 5 can drive the mounting shaft 8 to rotate. The lower plane of the mounting shaft 8 is the reference plane of the sample to be measured 16 or the contact surface of the reference plate 9. The upper plane of the mounting shaft 8 can be regarded as the rotating plane of the rotating part of the shaft.

[0047] Among them, the base surface structure also includes a reference plate 9 that can be detachably installed on the mounting shaft 8. The reference plate 9 is a standard plane plate. Before the step plane parallelism test is performed, the reference plate 9 can be fixed to the bottom surface of the mounting shaft 8 to cooperate with the depth measurement structure to calculate the verticality of the bottom surface of the mounting shaft 8.

[0048] Among them, the depth measurement structure includes a probe 10 located in the installation shaft 8 and in contact with the top surface of the reference plate 9, a grating scale 11 located on one side of the probe 10, a reading head of the grating scale 11 arranged on the probe 10, a parallelism detection control panel 12 arranged on one side of the grating scale 11, the parallelism detection control panel 12 is electrically connected to the grating scale 11 and the motor 18, and a fixing rod 13 is arranged on the base 1 and the parallelism detection control panel 12 to provide support for the parallelism detection control panel 12. The parallelism detection control panel 12 can be used to control the grating scale 11 and the probe 10 to move left and right. During the rotation of the sample 16 to be tested, the flatness change information of the step surface 15 can be converted into the up and down movement information of the probe 10. The grating scale 11 converts the information into an electrical signal and transmits it to the parallelism detection control panel 12 to test the parallelism parameters of the two step planes.

[0049] The detection method of step plane parallelism is as follows:

[0050] S1. First, install the mounting shaft 8 on the rotating substrate 6 through the bearing 7, fix the reference plate 9 on the bottom surface of the mounting shaft 8, and fix it with screws. Then adjust the position of the probe 10 so that it contacts the reference plate 9.

[0051] S2. Use the parallelism detection control panel 12 to control the rotating structure to drive the reference plate 9 to rotate, and monitor the grating ruler 11 signal at the same time, calculate the verticality difference between the bottom surface of the installation shaft 8 and the probe 10, and use the data as the compensation parameter of the test, and adjust the verticality of the height of the installation shaft 8 and the plane according to the compensation parameter.

[0052] S3. After calibration, remove the reference plate 9 and fix the stepped surface 14 (reference surface) of the sample 16 to the bottom surface of the mounting shaft 8, which can be fixed with screws. Adjust the position of the probe 10 so that it contacts the stepped surface 2 15 of the sample 16.

[0053] S4. After the measured sample 16 is installed, it can be driven by the rotating structure to make the measured sample 16 rotate in a plane with the reference plane. During the rotation of the measured sample 16, the flatness information of the step surface 2 15 can be converted into the up and down movement information of the probe 10. The grating ruler 11 converts the information into an electrical signal and transmits it to the parallelism detection control panel 12. The parallelism detection control panel 12 tests the parallelism parameters of the step surface 2 15 and the step surface 1 14.

[0054] The working principle is:

[0055] When in use, first install the mounting shaft 8 on the rotating base plate 6 through the bearing 7, and then fix the reference plate 9 to the bottom surface of the mounting shaft 8 with screws. The height of the mounting shaft 8 in the base 1 can be adjusted by raising the support column 2 below to adjust the verticality of the mounting shaft 8 plane and the probe 10 on the grating ruler 11. The lower plane of the mounting shaft 8 is the reference plane of the sample 16 to be tested, that is, the contact surface of the step surface 14 (or the reference plate 9). The upper plane of the mounting shaft 8 can be regarded as the rotating plane of the rotating part of the shaft. Then, the parallelism detection control panel 12 is used to control the left and right movement of the grating ruler 11 and the probe 10, and the operation of the motor 18 is controlled at the same time. The output shaft of the motor 18 can drive the rotating shaft 17, the rotating bottom plate 3, the rotating connecting rod 4, and the rotating top plate 5 to rotate. The rotating top plate 5 can drive the mounting shaft 8 to rotate, and the mounting shaft 8 drives the reference plate 9 to rotate, so that the probe 10 can detect the depth of different positions of the test surface. The reference plate 9 is a standard flat plate. If the flatness of the reference plate 9 changes during the rotation, it can be detected. The reading head of the grating ruler 11 detects and converts the information into electrical signals and transmits it to the parallelism detection control panel 12, calculates the verticality difference between the bottom surface of the mounting shaft 8 and the probe 10, and uses the data as the compensation parameter of the test, so as to adjust the height of the mounting shaft 8 according to the compensation parameter, thereby calibrating the verticality of the plane of the mounting shaft 8, and uses the parallelism detection control panel 12 to display or transmit the step plane parallelism data. After the calibration is completed, the reference plate 9 is removed and the reference surface of the sample 16 to be tested is fixed to the bottom surface of the mounting shaft 8, and then the position of the probe 10 is adjusted to make it contact with the step surface 15 of the sample 16 to be tested. The parallelism detection control panel 12 controls the rotation of the sample 16 to be tested and the left and right movement of the probe 10. During the rotation of the sample 16 to be tested, the flatness change information of the step surface 15 can be converted into the up and down movement information of the probe 10. The grating ruler 11 converts the information into electrical signals and transmits it to the parallelism detection control panel 12 to test the parallelism parameters of the two step planes.

[0056] Although embodiments of the present invention have been shown and described, it will be appreciated by those skilled in the art that various changes, modifications, substitutions and variations may be made to the embodiments without departing from the principles and spirit of the present invention, and that the scope of the present invention is defined by the appended claims and their equivalents.

Claims

1. A device for detecting the parallelism of a step plane, comprising: A base (1) for support; A sample to be tested (16) is located above the base (1); A rotating structure, arranged on the base (1), and used to drive the sample (16) to be tested to rotate; A base surface structure, arranged on the base (1), used in conjunction with the rotating structure to provide a support surface for the rotating structure; The depth measurement structure is arranged on the base (1) and is used to measure the parallelism of the plane of the sample (16) to be measured.

2. The step plane parallelism detection device according to claim 1, characterized in that: The sample (16) to be tested is provided with a step surface 1 (14) and a step surface 2 (15), wherein the step surface 1 (14) is a reference surface of the sample (16) to be tested, and the step surface 2 (15) is a plane to be tested.

3. The device for detecting the parallelism of a step plane according to claim 1, characterized in that: The rotating structure comprises: A rotating bottom plate (3) is rotatably mounted above the base (1); A rotating connecting rod (4) is arranged above the rotating base plate (3); A rotating top plate (5) is arranged above the rotating connecting rod (4); A rotating shaft (17) is rotatably mounted on the base (1), and the rotating shaft (17) is arranged on the rotating base plate (3) and is used to provide a rotating fulcrum for the rotating base plate (3); The motor (18) is arranged on the base (1), and the output end of the motor (18) is arranged at one end of the rotating shaft (17) for driving the rotating shaft (17) to rotate.

4. The device for detecting the parallelism of a step plane according to claim 1, characterized in that: The base surface structure comprises: A support column (2) is movably mounted on the base (1) for supporting; A rotating base plate (6) is threadably mounted on the support column (2); A bearing (7), the outer ring of which is arranged on the inner wall of the rotating base plate (6); A mounting shaft (8) is arranged on the inner ring of the bearing (7); The mounting shaft (8) is detachably mounted on the rotating top plate (5), the mounting shaft (8) is detachably mounted on the sample to be tested (16), and the mounting shaft (8) is designed with a middle opening.

5. The device for detecting the parallelism of a step plane according to claim 1, characterized in that: The base surface structure also includes a reference plate (9) which is detachably mounted on the mounting shaft (8), and the reference plate (9) is a standard plane plate.

6. The device for detecting the parallelism of a step plane according to claim 1, characterized in that: The depth measurement structure comprises: A probe (10) is located inside the mounting shaft (8) and in contact with the top surface of the reference plate (9); A grating ruler (11) is located on one side of the probe (10), and a reading head of the grating ruler (11) is arranged on the probe (10); A parallelism detection control panel (12) is arranged on one side of the grating ruler (11), and the parallelism detection control panel (12) is electrically connected to the grating ruler (11) and the motor (18); The fixing rod (13) is arranged on the base (1) and the parallelism detection control panel (12) and is used to provide support for the parallelism detection control panel (12).

7. The detection method of step plane parallelism is as follows: S1. First, install the installation shaft (8) on the rotating base plate (6) through the bearing (7), fix the reference plate (9) on the bottom surface of the installation shaft (8) with screws, and then adjust the position of the probe (10) so that it contacts the reference plate (9); S2, using the parallelism detection control panel (12) to control the rotating structure to drive the reference plate (9) to rotate, while monitoring the signal of the grating ruler (11), calculating the verticality difference between the bottom surface of the installation shaft (8) and the probe (10), and using the data as the compensation parameter of the test, adjusting the verticality between the height of the installation shaft (8) and the plane according to the compensation parameter; S3. After calibration, remove the reference plate (9) and fix the stepped surface 1 (14) (reference surface) of the sample (16) to the bottom surface of the mounting shaft (8), which can be fixed by screws, and adjust the position of the probe (10) so that it contacts the stepped surface 2 (15) of the sample (16) to be tested; S4. After the measured sample (16) is installed, the measured sample (16) can be rotated in a plane with respect to the reference plane under the drive of the rotating structure. During the rotation of the measured sample (16), the flatness information of the second step surface (15) can be converted into the up and down movement information of the probe (10). The grating ruler (11) converts the information into an electrical signal and transmits it to the parallelism detection control panel (12). The parallelism detection control panel (12) tests the parallelism parameters of the second step surface (15) and the first step surface (14).

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