Macro-micro-motion walking type piezoelectric motion platform and installation method thereof

Abstract

The invention discloses a macro-micro-motion walking type piezoelectric motion platform and an installation method thereof. The macro-micro-motion walking type piezoelectric motion platform comprises a base platform and a macro-motion motion platform. The macro motion platform is connected with the base table in a front-back sliding mode, and the base table is provided with a walking type piezoelectric actuator used for driving the macro motion platform to move front and back. And the macro-motion platform is provided with a micro-motion platform surface. The left side and the right side of the micro-motion platform face are connected with the macro-motion platform through low-rigidity flexible hinges. And a high-rigidity flexible hinge and a piezoelectric stack actuator are arranged on the rear side of the micro-motion table top. And the high-rigidity flexible hinge is provided with a first end and a second end which are respectively connected with the micro-motion platform surface and the macro-motion platform. The front end and the rear end of the piezoelectric stack actuator abut against the micro-motion table top and the second end respectively. According to the installation method, fine adjustment is carried out on installation of the linear guide rail, the positioning block and the actuator rotor through the adjusting screw holes, and therefore the sliding direction of the base table and the macro motion platform can be consistent with the driving direction of the walking type piezoelectric actuator.

Description

Technical Field

[0001] The invention relates to the field of precision drive technology, and in particular to a macro-micro motion walking type piezoelectric motion table and a mounting method thereof. Background Art

[0002] With the continuous development of modern manufacturing and detection technology, especially in the fields of semiconductors, precision optics and nanotechnology, the demand for high-precision scanning is increasing. At the same time, high-precision scanning often also requires a vacuum, non-magnetic, low heat consumption and other working environments. Traditional motor drive systems still have shortcomings in nano-level displacement control, such as low precision, limited response speed, high heat generation and complex mechanical structure.

[0003] Piezoelectric actuators are ideal for high-resolution and high-precision scanning due to their sub-micron accuracy, fast response, non-magnetic, low heat generation, and high rigidity. However, they are limited by the travel range of only a few microns to tens of microns. In the prior art, walking piezoelectric actuators can provide stable and repeatable displacement control in a very small space by simulating the walking process of animals. They are particularly suitable for output displacement requirements that require long travel and high precision, such as microscope imaging, optical detection, and nano-level processing.

[0004] Although the walking piezoelectric actuator improves process accuracy, significantly reduces the size and power consumption of the system, and optimizes the performance and efficiency of the overall equipment, the walking piezoelectric actuator will produce stepping shocks during the continuous driving process, resulting in loss of accuracy, which limits its application under high-precision scanning requirements. Summary of the invention

[0005] The purpose of the present invention is to provide a macro-micro-motion walking piezoelectric motion table to solve one or more technical problems existing in the prior art and at least provide a beneficial choice or create conditions.

[0006] The technical solutions adopted to solve the above technical problems are:

[0007] A macro-micro-movement walking piezoelectric motion table, comprising: a base table and a macro-movement motion platform;

[0008] The macro-motion platform is connected to the base for forward and backward sliding movement, and the base is provided with a walking piezoelectric actuator for driving the macro-motion platform to move forward and backward relative to the base;

[0009] The macro-motion platform is provided with a micro-motion table, and the left and right sides of the micro-motion table are connected to the macro-motion platform through low-rigidity flexible hinges;

[0010] A high-rigidity flexible hinge and a piezoelectric stack actuator are provided on the rear side of the micro-motion table. The front and rear ends of the high-rigidity flexible hinge have a first end and a second end, and the first end and the second end are respectively connected to the micro-motion table and the macro-motion motion platform. The front and rear ends of the piezoelectric stack actuator are respectively abutted against the micro-motion table and the second end.

[0011] The macro-micro-motion walking piezoelectric motion table provided by the present invention has at least the following beneficial effects: the macro-motion motion table generates a high-speed and large-stroke displacement output when driven by a walking piezoelectric actuator, and the piezoelectric stack actuator drives the micro-motion table to generate a compensating displacement. The piezoelectric stack actuator is connected to the micro-motion table and the macro-motion motion platform through a high-rigidity flexible hinge, and the micro-motion table and the macro-motion motion platform are also connected through a low-rigidity flexible hinge to achieve preload provision and guiding functions. Under the joint action of the walking piezoelectric actuator and the stack actuator, a stable and high-precision displacement output in the front-to-back direction is achieved, thereby meeting the scanning motion requirements.

[0012] As a further improvement of the above technical solution, bosses are provided at both left and right ends of the base, and the left and right ends of the macro-motion platform are respectively connected to the two bosses for forward and backward sliding movement.

[0013] As a further improvement of the above technical solution, the walking piezoelectric actuator is arranged between the two bosses, and the walking piezoelectric actuator includes an actuator seat and an actuator mover. The actuator seat is fixedly connected to the base, and the actuator mover is fixedly connected to the macro-motion platform.

[0014] As a further improvement of the above technical solution, the boss has a first mounting surface and a second mounting surface extending front and back, the first mounting surface is perpendicular to the up and down directions and is installed with a linear guide rail connected to the macro motion platform, and the second mounting surface is arranged on the side of the linear guide rail and is arranged with a plurality of left and right through adjustment screw holes along the front and back.

[0015] As a further improvement of the above technical solution, two positioning blocks are symmetrically arranged on the lower side of the macro-motion motion platform, the actuator mover is arranged between the two positioning blocks, and the macro-motion motion platform is provided with a plurality of mounting screws which are respectively locked and connected to the actuator mover, the positioning blocks and the linear guide rail.

[0016] As a further improvement of the above technical solution, the macro-motion platform is in the shape of a rectangular flat plate, a micro-motion space is provided in the middle of the macro-motion platform, and the micro-motion table, low-rigidity flexible hinge and high-rigidity flexible hinge are all arranged in the micro-motion space.

[0017] As a further improvement of the above technical solution, the macro-motion platform and the micro-motion table both have detection parts, and the base is provided with a macro-motion displacement sensing component and a micro-motion displacement sensing component, which are respectively used to detect the front and rear displacements of the two detection parts.

[0018] As a further improvement of the above technical solution, the open-loop bandwidth of the piezoelectric stack actuator is at least twice the operating frequency of the walking piezoelectric actuator.

[0019] As a further improvement of the above technical solution, the sampling frequency of the macro-displacement sensing component and the micro-displacement sensing component is greater than or equal to twice the highest driving frequency of the piezoelectric stack actuator and the walking piezoelectric actuator.

[0020] The present invention also provides an installation method suitable for the above-mentioned macro-micro motion walking piezoelectric motion platform: before the installation screws are used to lock and connect the actuator mover, positioning block and linear guide rail with the macro motion platform, the linear guide rail and the positioning block are pressed against the actuator mover by means of an adjustment screw passed through the adjustment screw hole, and the linear guide rail is fine-tuned by means of the adjustment screw during the forward and backward sliding process of the macro motion platform.

[0021] The installation method of the macro-micro motion walking piezoelectric motion platform provided by the present invention fine-tunes the installation of the linear guide rail, the positioning block and the actuator mover by adjusting the screw holes, so that the sliding direction of the base and the macro motion platform can be consistent with the driving direction of the walking piezoelectric actuator. BRIEF DESCRIPTION OF THE DRAWINGS

[0022] The present invention will be further described below in conjunction with the accompanying drawings and embodiments;

[0023] Figure 1 This is a three-dimensional schematic diagram of an embodiment of the macro-micro-movement walking piezoelectric motion stage provided by the present invention;

[0024] Figure 2 This is a rear view of one embodiment of the macro-micro-movement walking piezoelectric motion stage provided by the present invention;

[0025] Figure 3 This is a three-dimensional exploded schematic diagram of an embodiment of the macro-micro-movement walking piezoelectric motion stage provided by the present invention;

[0026] Figure 4 This is a three-dimensional exploded schematic diagram of an embodiment of the macro-micro-movement walking piezoelectric motion stage provided by the present invention;

[0027] Figure 5 The figure is a top cross-sectional view of one embodiment of the macro-motion platform provided by the present invention.

[0028] In the figure: 100, base; 110, boss; 111, first mounting surface; 112, second mounting surface; 113, adjustment screw hole; 120, walking piezoelectric actuator; 121, actuator seat; 122, actuator mover; 123, piezoelectric foot; 130, macro-displacement sensing component; 140, micro-displacement sensing component; 200, macro-motion motion platform; 210, micro-motion table; 211, third screw hole; 212, second detection part; 220, low-rigidity flexible hinge; 230, high-rigidity flexible hinge; 231, first end; 232, second end; 233, first screw hole; 234, second screw hole; 240, piezoelectric stack actuator; 250, first detection part; 260, positioning block; 300, linear guide rail; 310, first slide rail; 320, second slide rail. DETAILED DESCRIPTION

[0029] This section will describe in detail the specific embodiments of the present invention. The preferred embodiments of the present invention are shown in the accompanying drawings. The purpose of the accompanying drawings is to supplement the description of the text part of the specification with graphics, so that people can intuitively and vividly understand each technical feature and the overall technical solution of the present invention, but it cannot be understood as a limitation on the scope of protection of the present invention.

[0030] In the description of the present invention, it should be understood that descriptions involving orientations, such as up, down, front, back, left, right, etc., and orientations or positional relationships indicated are based on the orientations or positional relationships shown in the accompanying drawings, and are only for the convenience of describing the present invention and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore should not be understood as a limitation on the present invention.

[0031] In the description of the present invention, if there are words such as "several", it means one or more, "more" means more than two, greater than, less than, exceed, etc. are understood as not including the number, and above, below, within, etc. are understood as including the number.

[0032] In the description of the present invention, unless otherwise clearly defined, terms such as setting, installing, connecting, etc. should be understood in a broad sense, and technicians in the relevant technical field can reasonably determine the specific meanings of the above terms in the present invention based on the specific content of the technical solution.

[0033] Reference Figures 1 to 5 The macro-micro-movement walking piezoelectric motion stage of the present invention is implemented as follows:

[0034] A macro-micro motion walking type piezoelectric motion table comprises: a base table 100 and a macro motion platform 200.

[0035] The macro-motion platform 200 is slidably connected to the base 100 along the front-to-back direction. The base 100 is provided with a walking piezoelectric actuator 120. The walking piezoelectric actuator 120 is used to drive the macro-motion platform 200 to move forward and backward relative to the base 100.

[0036] The macro motion platform 200 is provided with a micro motion table 210, and low-rigidity flexible hinges 220 are provided on both sides of the micro motion table 210. The two ends of the low-rigidity flexible hinges 220 are respectively connected to the micro motion table 210 and the macro motion platform 200.

[0037] A high-rigidity flexible hinge 230 is provided at the rear side of the micro-motion table 210. The front and rear ends of the high-rigidity flexible hinge 230 have a first end 231 and a second end 232. The first end 231 is connected to the rear section of the micro-motion table 210, and the second end 232 is connected to the macro-motion platform 200. A piezoelectric stack actuator 240 is provided between the first end 231 and the second end 232. The front and rear ends of the piezoelectric stack actuator 240 are respectively in contact with the micro-motion table 210 and the second end 232.

[0038] In actual use, the macro-motion platform generates high-speed and large-stroke displacement output under the drive of the walking piezoelectric actuator 120, and the piezoelectric stack actuator 240 drives the micro-motion table 210 to generate compensation displacement. The piezoelectric stack actuator 240 is connected to the micro-motion table 210 and the macro-motion platform 200 through a high-rigidity flexible hinge 230, and the micro-motion table 210 and the macro-motion platform 200 are also connected through a low-rigidity flexible hinge 220 to achieve preload provision and guidance functions. Under the joint action of the walking piezoelectric actuator 120 and the stack actuator, a stable and high-precision displacement output in the front-to-back direction is achieved, thereby meeting the scanning motion requirements.

[0039] Flexible hinges transmit motion, force and energy through elastic deformation, eliminating lost motion and mechanical friction during the transmission process, and therefore have the advantages of no friction and no gap.

[0040] In this embodiment, the low-rigidity flexible hinge 220 adopts a chamfered flexible hinge. The low-rigidity flexible hinge 220 includes a main body and two connecting ends arranged at opposite ends of the main body. Symmetrical cylindrical grooves are arranged on both sides of the connecting end. The two connecting ends are respectively connected to the micro-motion table 210 and the macro-motion motion platform 200. The low-rigidity flexible hinges 220 are arranged at the front and rear ends on the left and right sides of the micro-motion table 210. The four low-rigidity flexible hinges 220 are parallel to each other and are respectively arranged at the four corners of the micro-motion table 210.

[0041] In this embodiment, the high-rigidity flexible hinge 230 is in a bilaterally symmetrical shape. The front and rear ends of the high-rigidity flexible hinge 230 have a first end 231 and a second end 232. The piezoelectric stack actuator 240 is arranged in the middle of the high-rigidity flexible hinge 230. The left and right sides of the high-rigidity flexible hinge 230 extend forward and backward in a serpentine shape, and form two first ends 231. The two first ends 231 are respectively connected to the left and right sides of the rear section of the micro-motion table 210. The front and rear ends of the piezoelectric stack actuator 240 are respectively in contact with the micro-motion table 210 and the second end 232.

[0042] The piezoelectric stack actuator 240 is a device that converts electrical energy into mechanical energy using the piezoelectric effect. The piezoelectric stack actuator 240 is mainly composed of a plurality of piezoelectric ceramic sheets stacked together. Each piezoelectric ceramic sheet is composed of two metal electrodes and a piezoelectric ceramic material, and is formed by a stacking bonding and co-firing process. This structure enables the piezoelectric stack actuator 240 to withstand greater pressure and have greater rigidity. When an electric field is applied to the piezoelectric ceramic sheet, the piezoelectric material will produce mechanical deformation, that is, expansion or contraction. Since the piezoelectric stack is composed of a plurality of piezoelectric ceramic sheets stacked together, mechanical vibration or displacement can be generated when an electric field acts on the entire stack.

[0043] In actual use, the front and rear ends of the piezoelectric stack actuator 240 produce relative displacement under the action of the electric field, so that the micro-motion table 210 overcomes the rigid pulling force of the high-rigidity flexible hinge 230, thereby producing relative motion with the macro-motion platform 200 to achieve displacement compensation. Through the high-precision and high-frequency mechanical vibration characteristics of the piezoelectric stack actuator 240, it is possible to cooperate with the high-rigidity flexible hinge 230 to achieve precise displacement control of the micro-motion table 210 relative to the macro-motion platform 200.

[0044] Reference Figure 5 In this embodiment, the second end 232 of the high-rigidity flexible hinge 230 is provided with a first screw hole 233 that passes through the front and back. The rear end of the piezoelectric stack actuator 240 is pressed forward by a tightening screw threaded through the first screw hole 233, so that the piezoelectric stack actuator 240 is installed in the high-rigidity flexible hinge 230.

[0045] The rear end of the high-rigidity flexible hinge 230 is also provided with a second screw hole 234, and the rear end of the macro-motion platform 200 is provided with a connecting screw threadedly connected to the second screw hole 234. The second end 232 is connected to the macro-motion platform 200 through the connecting screw penetrating the second screw hole 234. The connecting screw pulls the second end 232 backwards to fix the second end 232 and the macro-motion platform 200 relatively. When the piezoelectric stack actuator 240 is actuated, it can drive the micro-motion table 210 to move forward and backward relative to the second end 232 and the macro-motion platform 200.

[0046] like Figure 5 As shown, further, the front end of the macro motion platform 200 is also provided with the connecting screw, and the front end of the micro motion table 210 is provided with a third screw hole 211. In the process of installing the piezoelectric stack actuator 240, the micro motion table 210 is fixed by locking the connecting screw at the front end of the macro motion platform 200 with the third screw hole 211, which is convenient for installation.

[0047] In this embodiment, the macro-motion platform 200 is in the shape of a rectangular flat plate. A micro-motion space is provided in the middle of the macro-motion platform 200. The micro-motion table 210, the low-rigidity flexible hinge 220, the high-rigidity flexible hinge 230 and the piezoelectric stack actuator 240 are all provided in the micro-motion space.

[0048] It is worth noting that the micro-motion table 210, the low-rigidity flexible hinge 220, the high-rigidity flexible hinge 230 and the macro-motion platform 200 are integrally formed. During the production process, the micro-motion table 210, the low-rigidity flexible hinge 220, and the high-rigidity flexible hinge 230 are processed according to their shapes, so that the micro-motion table 210, the low-rigidity flexible hinge 220, and the high-rigidity flexible hinge 230 are formed in the micro-motion space. Furthermore, in order to avoid friction affecting the displacement accuracy, the thickness of the micro-motion table 210, the low-rigidity flexible hinge 220, and the high-rigidity flexible hinge 230 in the up and down directions is smaller than the thickness of the macro-motion platform 200. There is a height difference between the lower end surface of the micro-motion table 210, the low-rigidity flexible hinge 220, and the high-rigidity flexible hinge 230 and the lower end surface of the macro-motion platform 200.

[0049] The macro-motion platform 200 and the micro-motion platform 210 are respectively provided with a first detection part 250 and a second detection part 212. The base 100 is provided with a macro-motion displacement sensing component 130 and a micro-motion displacement sensing component 140. The macro-motion displacement sensing component 130 is used to detect the front-to-back displacement of the first detection part 250 relative to the base 100, and the micro-motion displacement sensing component 140 is used to detect the front-to-back relative displacement between the second detection part 212 and the base 100.

[0050] In this embodiment, the macro displacement sensing component 130 and the micro displacement sensing component 140 use grating scale displacement sensors, and the macro displacement sensing component 130 and the micro displacement sensing component 140 both include a grating scale tape and a grating reader. The grating scale tape is installed on the first detection part 250 or the second detection part 212. The grating reader is fixedly installed on the base 100.

[0051] In this embodiment, the macro motion platform 200 and the base 100 are arranged up and down, and the macro motion platform 200 is arranged on the upper side of the base 100. The left and right ends of the base 100 are provided with bosses 110. The left and right ends of the macro motion platform 200 are respectively connected to the two bosses 110 for forward and backward sliding.

[0052] The upper ends of the two bosses 110 are higher than the middle of the base 100. The base 100 and the macro-motion platform 200 form a driving space between the two bosses 110. The macro-motion displacement sensing component 130, the micro-motion displacement sensing component 140 and the walking piezoelectric actuator 120 are all arranged in the driving space. The walking piezoelectric actuator 120 is arranged in the middle of the driving space, and the macro-motion displacement sensing component 130 and the micro-motion displacement sensing component 140 are respectively arranged on the left and right sides of the walking piezoelectric actuator 120.

[0053] In order for the piezoelectric stack actuator 240 to effectively compensate for the stepping impact generated by the continuous driving of the walking piezoelectric actuator 120 , the open-loop bandwidth of the piezoelectric stack actuator 240 is at least twice the operating frequency of the walking piezoelectric actuator 120 .

[0054] In this embodiment, the walking piezoelectric actuator 120 and the piezoelectric stack actuator 240 are controlled separately. When the walking piezoelectric actuator 120 is powered off, the macro-motion platform 200 will not generate displacement output, and the micro-motion table 210 can output displacement independently by being driven by the piezoelectric stack actuator 240. When the piezoelectric stack actuator 240 is powered off, the micro-motion table 210 does not generate displacement output relative to the macro-motion platform 200, and the macro-motion platform 200 can output displacement under the drive of the walking piezoelectric actuator 120.

[0055] To avoid information loss and aliasing, in this embodiment, the sampling frequency of the macro displacement sensing member 130 and the micro displacement sensing member 140 is greater than or equal to twice the highest driving frequency of the piezoelectric stack actuator 240 and the walking piezoelectric actuator 120. The sampled analog signals of the macro displacement sensing member 130 and the micro displacement sensing member 140 will not lose information or generate aliasing when converted into digital signals.

[0056] The walking piezoelectric actuator 120 includes an actuator seat 121 and an actuator mover 122. The actuator seat 121 is fixedly connected to the base 100, and the actuator mover 122 is fixedly connected to the macro-motion platform 200.

[0057] See attached Figures 2 to 4 , the actuator mover 122 is in the shape of a long strip and extends in the front-to-back direction. The actuator seat 121 has two piezoelectric feet 123 arranged in left-right directions. The actuator mover 122 is arranged between the two piezoelectric feet 123, and the two piezoelectric feet 123 are respectively in contact with the left and right sides of the actuator mover 122. In actual use, the two piezoelectric feet 123 alternately drive the actuator mover 122 to realize the sliding drive of the macro motion platform 200 in the front-to-back direction.

[0058] A linear guide 300 is provided between the macro-motion platform 200 and the boss 110. The linear guide 300 includes a first slide rail 310 and a second slide rail 320, which are arranged left and right and connected to each other by sliding along the front-back direction. The macro-motion platform 200 and the boss 110 are fixedly connected to the first slide rail 310 and the second slide rail 320 respectively. In this embodiment, the linear guide 300 adopts a cross roller guide, which has the remarkable characteristics of small friction coefficient, smooth movement, high rigidity, high repeatability and positioning accuracy. The first slide rail 310 and the second slide rail 320 achieve high-precision and smooth movement through a plurality of rollers that are precisely machined and cross-arranged.

[0059] In this embodiment, the upper end of the boss 110 has a first mounting surface 111 and a second mounting surface 112. The first mounting surface 111 and the second mounting surface 112 both extend in the front-to-back direction.

[0060] The first mounting surface 111 is perpendicular to the up-down direction. The first slide rail 310 is fixedly mounted on the upper side of the first mounting surface 111, and the second slide rail 320 is fixedly connected to the lower side of the macro motion platform 200. In this embodiment, the mounting screws of the macro motion platform 200 pass through the macro motion platform 200 from top to bottom and are locked and connected to the second slide rail 320. The base 100 is provided with fastening screws extending up and down, and the fastening screws pass through the base 100 from bottom to top and are locked and connected to the first slide rail 310 on the first mounting surface 111.

[0061] The second mounting surface 112 is disposed beside the first slide rail 310. The second mounting surface 112 is provided with a plurality of adjustment screw holes 113 extending therethrough. The plurality of adjustment screw holes 113 are arranged in an interval arrangement along the front-to-back direction. In this embodiment, the second mounting surface 112 is perpendicular to the left-to-right direction, and the second mounting surfaces 112 of the two bosses 110 are disposed facing each other. The linear guide rail 300 is disposed on the side where the two second mounting surfaces 112 face each other.

[0062] When assembling the macro-micro motion walking piezoelectric motion platform, the linear guide rail 300 can be adjusted by means of screws inserted into the adjustment screw holes 113 to ensure that the sliding direction of the macro-motion motion platform 200 can be set forward and backward.

[0063] In a further embodiment, two positioning blocks 260 are symmetrically arranged on the lower side of the macro-motion platform 200. The actuator mover 122 is arranged between the two positioning blocks 260. The two positioning blocks 260 are respectively in contact with the left and right sides of the actuator mover 122 on the opposite sides. The actuator mover 122, the positioning blocks 260 and the linear guide rail 300 are respectively locked and connected to the macro-motion platform 200 by mounting screws.

[0064] The present invention also provides a method for installing the above-mentioned macro-micro-movement walking piezoelectric motion stage, comprising the following steps:

[0065] First, the actuator mover 122, the positioning block 260 and the linear guide 300 are arranged on the lower side of the macro motion platform 200, and the actuator mover 122, the positioning block 260 and the linear guide 300 are connected to the macro motion platform 200 by installing screws but not locked.

[0066] Then, the adjusting screws are threaded into the adjusting screw holes 113 of the two bosses 110, and the two linear guide rails 300 are pressed against each other in the left and right directions through the adjusting screws, so that the linear guide rails 300 and the positioning blocks 260 on the left and right sides can be pressed against each other on the left and right sides of the actuator mover 122.

[0067] Next, the macro motion platform 200 is slid forward and backward, and the orientations of the two linear guide rails 300 are fine-tuned by rotating the adjustment screws.

[0068] Finally, the mounting screws connecting the actuator mover 122, the positioning block 260 and the linear guide rail 300 are tightened and fixed in sequence.

[0069] In the description of this specification, the description with reference to the terms "one embodiment", "some embodiments", "illustrative embodiments", "examples", "specific examples", or "some examples" means that the specific features, structures, materials or characteristics described in conjunction with the embodiment or example are included in at least one embodiment or example of the present invention. In this specification, the schematic representation of the above terms does not necessarily refer to the same embodiment or example. Moreover, the specific features, structures, materials or characteristics described may be combined in any one or more embodiments or examples in a suitable manner.

[0070] Although the embodiments of the present invention have been shown and described, a person skilled in the art may make various changes, modifications, substitutions and variations to these embodiments without departing from the principles and spirit of the present invention. These changes, modifications, equivalent variations or substitutions are all included in the scope defined by the claims of this application. The scope of the present invention is defined by the claims and their equivalents.

Claims

1. A macro-micro-movement walking piezoelectric motion stage, characterized in that: include: Abutments and macro motion platforms; The macro-motion platform is connected to the base for forward and backward sliding movement, and the base is provided with a walking piezoelectric actuator for driving the macro-motion platform to move forward and backward relative to the base; The macro-motion platform is provided with a micro-motion table, and the left and right sides of the micro-motion table are connected to the macro-motion platform through low-rigidity flexible hinges; A high-rigidity flexible hinge and a piezoelectric stack actuator are provided on the rear side of the micro-motion table. The front and rear ends of the high-rigidity flexible hinge have a first end and a second end, and the first end and the second end are respectively connected to the micro-motion table and the macro-motion motion platform. The front and rear ends of the piezoelectric stack actuator are respectively abutted against the micro-motion table and the second end.

2. The macro-micro motion walking piezoelectric motion stage according to claim 1, characterized in that: The left and right ends of the base are both provided with bosses, and the left and right ends of the macro-motion platform are respectively connected to the two bosses for forward and backward sliding movement.

3. The macro-micro motion piezoelectric motion stage according to claim 2 is characterized in that: The walking piezoelectric actuator is arranged between the two bosses, and comprises an actuator seat and an actuator mover. The actuator seat is fixedly connected to the base, and the actuator mover is fixedly connected to the macro-motion platform.

4. The macro-micro motion walking piezoelectric motion stage according to claim 3 is characterized in that: The boss has a first mounting surface and a second mounting surface extending front to back, the first mounting surface is perpendicular to the up and down directions and is installed with a linear guide rail connected to the macro motion platform, the second mounting surface is arranged on the side of the linear guide rail and is arranged with a plurality of left and right through adjustment screw holes along the front to back.

5. The macro-micro motion walking piezoelectric motion stage according to claim 4, characterized in that: The lower side of the macro-motion platform is symmetrically provided with two positioning blocks, the actuator mover is arranged between the two positioning blocks, and the macro-motion platform is provided with a plurality of mounting screws which are respectively locked and connected with the actuator mover, the positioning blocks and the linear guide rail.

6. The macro-micro motion piezoelectric motion stage according to claim 1, characterized in that: The macro-motion platform is in the shape of a rectangular flat plate, a micro-motion space is provided in the middle of the macro-motion platform, and the micro-motion table, the low-rigidity flexible hinge and the high-rigidity flexible hinge are all arranged in the micro-motion space.

7. The macro-micro motion walking piezoelectric motion stage according to claim 1, characterized in that: The macro-motion platform and the micro-motion table both have detection parts, and the base is provided with a macro-motion displacement sensing component and a micro-motion displacement sensing component, which are respectively used to detect the front-rear displacement of the two detection parts.

8. The macro-micro motion walking piezoelectric motion stage according to claim 7, characterized in that: The open-loop bandwidth of the piezoelectric stack actuator is at least twice the operating frequency of the walking piezoelectric actuator.

9. The macro-micro motion walking piezoelectric motion stage according to claim 7, characterized in that: The sampling frequency of the macro-displacement sensing member and the micro-displacement sensing member is greater than or equal to twice the highest driving frequency of the piezoelectric stack actuator and the walking piezoelectric actuator.

10. A method for installing the macro-micro motion walking piezoelectric motion stage as claimed in claim 5, characterized in that: Before installing the screws to lock the actuator mover, the positioning block and the linear guide rail to the macro-motion platform, the linear guide rail and the positioning block can be pressed against the actuator mover by means of the adjustment screws passed through the adjustment screw holes, and the linear guide rail can be fine-tuned by means of the adjustment screws during the forward and backward sliding of the macro-motion platform.

Images