Flexure member and movable platform and photosensitive assembly thereof

Abstract

The invention discloses a flexure member, comprising a support portion including a first support end and a second support end; the connecting part is arranged between the first supporting end and the second supporting end to connect the first supporting end and the second supporting end, the length of the connecting part is larger than the width of the connecting part, and the minimum width of the connecting part is larger than the thickness of the connecting part; the connecting part comprises at least one section part extending linearly and at least two bent bending parts, and each bending part is arranged between two adjacent section parts and between the section part and the supporting part, so that the extending direction of each section part can be changed. The bending parts are arranged on the connecting part, so that the two supporting ends of the bending part can relatively move in a large range, the borne resistance is small, the local rigidity of the connecting part is further reduced by arranging the narrowing part, and the bending part is softer.

Description

Technical Field

[0001] The invention relates to the field of electronic technology, in particular to a flexure and a movable platform thereof, and a photosensitive component. Background Art

[0002] Flexures are used in systems where there is relative motion between one part of the system and another part. The flexures are used to mechanically and electrically connect the moving part of the system and the fixed part of the system. The flexures need to be designed to have a low rigidity structure to avoid hindering the expected movement and causing the driving force required to drive the moving part to be too large, which is conducive to reducing the size of the driving components in the system and further reducing the overall size of the system. At the same time, the flexure needs to have an appropriate resilience to maintain the moving part, so that the moving part can return to its original position easily after the driving force is withdrawn.

[0003] With the development of the industry, flexures are no longer limited to flexible movable substrates, lead frames, etc. At present, flexures are easily set to have a large rebound force. If the rebound force is large, a larger driving force is required to resist the rebound force. If the rebound force is small, the effect of the flexure will be weakened. At the same time, the flexure will expand the size of the system, resulting in a larger overall size of the system. Summary of the invention

[0004] An object of the present invention is to provide a flexure with a simple structure. By providing a plurality of bending portions, two supporting ends of the flexure can move relative to each other in a larger range and encounter less resistance.

[0005] Another object of the present invention is to provide a movable platform, which can reduce the resistance encountered by the first frame and the second frame of the movable platform when they move relative to each other by using the above-mentioned flexure.

[0006] Another object of the present invention is to provide a photosensitive component, which can reduce the driving force required to drive the movable component to move relative to the fixed component by applying the above-mentioned flexure, and further reduce the volume of the driving component to reduce the overall size of the photosensitive component.

[0007] In order to achieve one of the purposes of the present application, the technical solution adopted by the present invention is: a flexure, including a supporting portion, the supporting portion including a first supporting end and a second supporting end; a connecting portion, the connecting portion is arranged between the first supporting end and the second supporting end, so as to connect the first supporting end and the second supporting end, wherein the length of the connecting portion is greater than the width of the connecting portion, and the minimum width of the connecting portion is greater than the thickness of the connecting portion; the connecting portion includes at least one straight-line extending section portion and at least two curved bending portions, each of the bending portions is arranged between two adjacent section portions, and between the section portion and the supporting portion, so as to change the extension direction of each of the section portions.

[0008] In one embodiment of the present application, the connecting portion also includes at least one narrowing portion, and the narrowing portion is arranged between the two segment portions, or the narrowing portion is arranged between the segment portion and the bending portion. The width of the narrowing portion is smaller than the width of the segment portion adjacent to it, and the width of the bending portion located between the segment portion and the supporting portion is smaller than the width of the segment portion connected to it, so that the connecting portion has an uneven width.

[0009] In one embodiment of the present application, the radial width of the narrowed portion is L1, and the radial width of the segment portion is L2, wherein L1 / L2≤1 / 2.

[0010] In one embodiment of the present application, a first transition cut edge is provided between the narrowing portion and the section portion, and the first transition cut edge connects the outer contours of the narrowing portion and the section portion, so that the connecting portion gradually transitions from the wider section portion to the narrower narrowing portion.

[0011] In one embodiment of the present application, an acute angle between the first transition cutting edge and the contour line of the section portion is θ1, wherein 45°≤θ1≤60°.

[0012] In one embodiment of the present application, a second transition cut edge is provided between the bending portion and the section portion, and the second transition cut edge connects the outer contours of the bending portion and the section portion, so that the connecting portion gradually transitions from the narrower bending portion to the wider section portion.

[0013] In one embodiment of the present application, an acute angle between the second transition cutting edge and the contour line of the section portion is θ2, wherein 30°≤θ2≤45°.

[0014] In an embodiment of the present application, the material of the flexure is a stack of at least one polysilicon layer and at least one metal layer, and the metal layer is conductive.

[0015] In an embodiment of the present application, at least one of the metal layers includes a first metal layer and a second metal layer, and the flexure is formed by stacking the first metal layer, the polysilicon layer and the second metal layer in sequence.

[0016] In one embodiment of the present application, the first supporting end and the second supporting end are arranged opposite to each other, the multiple bending portions include a first bending portion, a second bending portion and a third bending portion, the multiple section portions include a first section, a second section, a third section and a fourth section, the first bending portion connects the first supporting end and the first section, so that the first supporting end and the first section are arranged at an angle, the first section and the second section are arranged collinearly, the second bending portion connects the second section and the third section, so that the second section and the third section are arranged at an angle, the third section and the fourth section are arranged collinearly, and the third bending portion connects the fourth section and the second supporting end, so that the fourth section and the second supporting end are arranged at an angle.

[0017] In one embodiment of the present application, the plurality of narrowing portions include a first narrowing portion and a second narrowing portion, the first narrowing portion is located between the first segment and the second segment and is colinearly arranged with the first segment and the second segment, and the width of the first narrowing portion is smaller than the width of the first segment and the second segment, the second narrowing portion is located between the third segment and the fourth segment and is colinearly arranged with the third segment and the fourth segment, and the width of the second narrowing portion is smaller than the width of the third segment and the fourth segment.

[0018] In one embodiment of the present application, the multiple narrowing portions also include a third narrowing portion, which is located in the second bending portion, and the width of the third narrowing portion is smaller than the width of the second bending portion, and the width of the third narrowing portion is greater than the width of the first narrowing portion and the second narrowing portion.

[0019] In one embodiment of the present application, the plurality of bending portions further include a fourth bending portion and a fifth bending portion, the fourth bending portion being arranged between the first bending portion and the first section, and the fifth bending portion being arranged between the fourth section and the third bending portion.

[0020] In one embodiment of the present application, the first bending portion and the third bending portion are located on a first axis, the fourth bending portion and the fifth bending portion are located on a second axis, the second bending portion is located on a third axis, and the first axis is located between the second axis and the third axis.

[0021] In one embodiment of the present application, the first supporting end and the second supporting end are staggered, and the connecting portion includes a first bending portion, a second bending portion, a first section, and a second section. The first bending portion is arranged between the first section and the first supporting end, and the second section is connected to the first section in a colinear manner. The second bending portion is arranged between the second section and the second supporting end, so that each of the sections is long and straight connecting the first supporting end and the second supporting end.

[0022] In one embodiment of the present application, at least one narrowing portion is provided between the first section and the second section, and a width of the narrowing portion is smaller than a width of each of the section portions.

[0023] In one embodiment of the present application, at least one of the narrowing portions includes a first narrowing portion and a second narrowing portion, and the connecting portion also includes a widening portion, the widening portion is located between the first narrowing portion and the second narrowing portion, and the width of the widening portion is greater than the width of each of the section portions.

[0024] To achieve another purpose of the present application, the technical solution adopted by the present invention is: a movable platform, including a first frame; a second frame, the second frame can be movably connected to the first frame; the flexure as described above, a plurality of the flexures are arranged between the first frame and the second frame, so that the second frame can be movably connected and electrically connected to the first frame.

[0025] To achieve another object of the present application, the technical solution adopted by the present invention is: a photosensitive component, including a moving component, the moving component is used to carry a photosensitive chip; a fixed component, the fixed component is arranged on the peripheral side of the moving component, and the moving component can be movably connected to the fixed component; a driving component, the driving component is arranged on the moving component, so as to drive the moving component to move relative to the fixed component; as described above, a plurality of the flexible members are arranged between the moving component and the fixed component, so that the moving component can be movably connected and electrically connected to the fixed component.

[0026] Compared with the prior art, the present invention has the following beneficial effects:

[0027] (1) By providing a plurality of bending portions at the connection portion, the two supporting ends of the flexure can move relative to each other within a larger range with less resistance, and by providing a narrowing portion, the local stiffness of the connection portion is further reduced, making the flexure more flexible;

[0028] (2) In the movable platform, the resistance of the first frame and the second frame during relative movement is reduced by using the above-mentioned flexure, thereby further reducing the driving force required to drive the first frame and the second frame to move relative to each other;

[0029] (3) By applying the above-mentioned flexure on the photosensitive component, the resistance encountered by the moving component when it moves relative to the fixed component can be reduced, thereby reducing the driving force required to drive the moving component to move, and further reducing the volume of the driving component to reduce the overall size of the photosensitive component. BRIEF DESCRIPTION OF THE DRAWINGS

[0030] Figure 1 is a plan view of a flexure according to some embodiments of the present application;

[0031] Figure 2 is a plan view of a flexure according to some other embodiments of the present application;

[0032] Figure 3 is a planar structural diagram of a flexure according to some other embodiments of the present application;

[0033] Figure 4 is a planar structural diagram of a flexure according to some other embodiments of the present application;

[0034] Figure 5 is a schematic diagram of the internal structure of a flexure according to some embodiments of the present application;

[0035] Figure 6 is a schematic diagram of the internal structure of a flexure according to other embodiments of the present application;

[0036] Figure 7 is a planar structural diagram of a flexure according to some other embodiments of the present application;

[0037] Figure 8 is a planar structural diagram of a flexure according to some other embodiments of the present application;

[0038] Fig. 9 is a schematic diagram of a three-dimensional structure of a flexure according to some other embodiments of the present application;

[0039] Fig.10 is a planar structural diagram of a flexure according to some other embodiments of the present application;

[0040] Fig.11 is a planar structural diagram of a flexure according to some other embodiments of the present application;

[0041] Fig.12 is a planar structural diagram of a flexure according to some other embodiments of the present application;

[0042] Fig.13 It is a schematic diagram of the planar structure of the photosensitive component according to some embodiments of the present application.

[0043] In the figure: 1, flexure; 10, support portion; 11, first support end; 12, second support end; 20, connection portion; 21, bending portion; 211, first bending portion; 212, second bending portion; 213, third bending portion; 214, fourth bending portion; 215, fifth bending portion; 22, section portion; 221, first section; 222, second section; 223, third section; 224, fourth section; 23, Narrowing portion; 231, first narrowing portion; 232, second narrowing portion; 233, third narrowing portion; 241, first transition cutting edge; 242, second transition cutting edge; 25, widening portion; 31, polysilicon layer; 32, metal layer; 321, first metal layer; 322, second metal layer; 40, reinforcement layer; 50, photosensitive component; 51, moving component; 52, fixed component; 53, driving component; 54, photosensitive chip. DETAILED DESCRIPTION

[0044] The present invention is further described below in conjunction with specific implementation methods. It should be noted that, under the premise of no conflict, the various embodiments or technical features described below can be arbitrarily combined to form a new embodiment.

[0045] In the description of the present invention, it should be noted that directional words, such as the terms "center", "lateral", "longitudinal", "length", "width", "thickness", "up", "down", "front", "back", "left", "right", "vertical", "horizontal", "top", "bottom", "inside", "outside", "clockwise", "counterclockwise", etc., indicating directions and positional relationships are based on the directions or positional relationships shown in the accompanying drawings, which are only for the convenience of narrating the present invention and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and cannot be understood as limiting the specific scope of protection of the present invention.

[0046] It should be noted that the terms "first", "second", etc. in the description and claims of the present application are used to distinguish similar objects, and are not necessarily used to describe a specific order or sequence.

[0047] In the description of the present invention, it is also necessary to explain that, unless otherwise clearly specified and limited, the terms "set", "install", "connect", and "connect" should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be a direct connection, a contact connection, or an indirect connection through an intermediate medium, and it can be the internal communication of two elements. For ordinary technicians in this field, the specific meanings of the above terms in the present invention can be understood according to specific circumstances.

[0048] like Figure 1As shown, a flexure 1 includes a supporting portion 10 and a connecting portion 20, wherein the supporting portion 10 includes a first supporting end 11 and a second supporting end 12, and the connecting portion 20 is arranged between the first supporting end 11 and the second supporting end 12, so as to connect the first supporting end 11 and the second supporting end 12, wherein the length of the connecting portion 20 is greater than the width of the connecting portion 20, and the minimum width of the connecting portion 20 is greater than the thickness of the connecting portion 20; the connecting portion 20 includes at least one straight-line extending section portion 22 and at least two curved bending portions 21, each of the bending portions 21 is arranged between two adjacent sections 22, and between the section portion 22 and the supporting portion 10, so as to change the extension direction of each section portion 22, increase the degree of freedom of the flexure 1, and make the flexure 1 more flexible.

[0049] In some embodiments, the width of the bending portion 21 between the segment portion 22 and the support portion 10 is smaller than the width of the segment portion 22 to which it is connected.

[0050] In some embodiments, the connecting portion 20 also includes at least one narrowing portion 23, and the narrowing portion 23 is arranged between the two segment portions 22, or the narrowing portion 23 is arranged between the segment portion 22 and the bending portion 21. The width of the narrowing portion 23 is smaller than the width of the adjacent segment portion 22, and the width of the bending portion between the segment portion 22 and the supporting portion 10 is smaller than the width of the segment portion connected thereto. The width of the narrowing portion 23 can be equal to or smaller than the width of the adjacent bending portion 21, so that the connecting portion 20 has an uneven width.

[0051] In some preferred embodiments, the narrowing portion 23 is disposed between the two segment portions 22, so that the connecting portion 20 has an uneven width. The width of the narrowing portion 23 is smaller than the widths of the two adjacent segment portions 22.

[0052] The radial width of the narrowing portion 23 is smaller than the radial width of the segment portion 22, so that the elastic coefficient of the narrowing portion 23 is smaller and softer. It can be understood that the narrowing portion 23 enables the connection portion 20 to deform and twist in multiple directions, further increasing the degree of freedom of the flexure 1, making the connection portion 20 more flexible, and at the same time allowing the flexure 1 to release stress at the narrowing portion 23. When the relative displacement of the first support end 11 and the second support end 12 is large, it is helpful to reduce the risk of the flexure 1 breaking and failing due to excessive deformation.

[0053] The radial width of the narrowing portion 23 is L1, and the radial width of the segment portion 22 is L2. In some optional embodiments, L1 / L2≤1 / 2, so that the elastic coefficient of the narrowing portion 23 is smaller than the elastic coefficient of the segment portion 22, and the ratio of the elastic coefficient of the segment portion 22 to the elastic coefficient of the narrowing portion 23 is within 2 times, so that the structure of the flexure 1 is stable and has a large deformation capacity.

[0054] In some embodiments, Figure 2 and Figure 3 As shown, a first transition cut edge 241 is provided between the narrowing portion 23 and the section portion 22, and the first transition cut edge 241 connects the outer contour edge of the narrowing portion 23 and the outer contour edge of the section portion 22, so that the connecting portion 20 gradually transitions from the wider section portion 22 to the narrower narrowing portion 23, further reducing the stress concentration points on the connecting portion 20 and reducing the risk of stress concentration failure of the flexure 1. The acute angle between the first transition edge 241 and the contour line of the section portion 22 is θ1. It can be understood that when the radial widths of the section portion 22 and the narrowing portion 23 are constant, changing θ1 can further adjust the length of the first transition edge 241. If θ1 is too small, the first transition edge 241 is too long, which further reduces the structural strength of the connection portion 20, which is not conducive to the deformation of the flexure 1. If θ1 is too large, the first transition edge 241 is too short, which further causes excessive stress at multiple points of the connection portion 20, increasing the risk of deformation and fracture of the flexure 1. In some optional embodiments, 45°≤θ1≤60°, so that the radial width of the narrowing portion 23 is small, and the length of the first transition edge is moderate, so that the structure of the flexure 1 is stable and has a large deformation capacity, and the risk of stress concentration in the connection portion 20 is reduced.

[0055] In some embodiments, Figure 4As shown, a second transition cut edge 242 is provided between the bending portion 21 and the section portion 22, and the second transition cut edge 242 connects the outer contour edge of the bending portion 21 and the outer contour edge of the section portion 22, so that the connecting portion 20 gradually transitions from the narrower bending portion 21 to the wider section portion 22, avoiding sudden shape changes and further reducing stress concentration points, so as to reduce the risk of stress concentration failure of the flexure 1. The acute angle between the second transition edge 242 and the contour line of the section portion 22 is θ2. It can be understood that when the radial widths of the section portion 22 and the bending portion 21 are constant, changing θ2 can further adjust the length of the second transition edge 242. If θ2 is too small, the second transition edge 242 is too long, which further reduces the structural strength of the connection portion 20, which is not conducive to the deformation of the flexure 1. If θ2 is too large, the second transition edge 242 is too short, which further causes excessive stress at multiple points of the connection portion 20, increasing the risk of deformation and fracture of the flexure 1. In some optional embodiments, 30°≤θ2≤45°, so that the radial width of the bending portion 21 is small, and the length of the second transition edge is moderate, so that the structure of the flexure 1 is stable and has a large deformation capacity, and at the same time reduces the risk of stress concentration in the connection portion 20.

[0056] In some embodiments, Figure 5 As shown, the material of the flexure 1 is at least one polysilicon layer 31 and at least one metal layer 32 superimposed, and the metal layer 32 is conductive. In some optional embodiments, the metal layer 32 is patterned on the polysilicon layer 31 so that the flexure 1 has both the flexibility of polysilicon and the ductility and conductivity of metal, so that the flexure 1 is both soft and resilient. In other embodiments, the flexure 1 can also be manufactured by machining, three-dimensional printing, stamping and other processes. In addition, those skilled in the art can understand that changing the length and radial width of the metal layer 32 of the flexure 1 can adjust the physical properties of the flexure 1, such as stiffness, resistance, etc.

[0057] In some optional embodiments, such as Figure 6As shown, at least one of the metal layers 32 includes a first metal layer 321 and a second metal layer 322, and the flexure 1 is composed of the first metal layer 321, the polysilicon layer 31 and the second metal layer 322 stacked in sequence, so as to enhance the structural strength of the flexure 1 and further improve the restoring force of the flexure 1. It is worth mentioning that the first metal layer 321 and the second metal layer 322 can form a differential circuit to reduce signal interference. Specifically, the differential circuit requires the same length and impedance of the circuit so that the effective input of the signal interference signal is zero. The first metal layer 321 and the second metal layer 322 are located on the same flexure 1, which is conducive to making the first metal layer 321 and the second metal layer 322 equal in length and impedance. Adjusting the width of the flexure 1 can change the resistance of the flexure 1, and further adjust the signal impedance of the line to improve the accuracy of the signal.

[0058] In some embodiments, Figure 7 As shown, the flexure 1 further includes a reinforcing layer 40, and the reinforcing layer 40 is arranged on the outside of the metal layer 32. As described above, the flexure is relatively soft, and the first support end 11 and / or the second support end 12 may fall off from other components during the process of deformation under force. At the same time, the flexure 1 is too soft, so that the deformation direction of the connecting part 20 is out of control. It can be understood that the stiffness of the reinforcing layer 40 is much greater than the stiffness of the metal layer 32. In an optional embodiment, the stiffness of the reinforcing layer 40 is greater than 200N / m, so that the flexure 1 can bear greater stress, further improve the connection reliability between the first support end 11 and the second support end 12 and other components, which is beneficial to improve the installation reliability of the flexure 1, and at the same time, the flexure 1 can deform in a controllable direction. In some optional embodiments, the reinforcing layer 40 can be a high-rigidity glue such as epoxy resin glue, or silicon oxide, titanium copper, etc. In some optional embodiments, the flexure 1 does not require an additional reinforcement layer 40, the metal layer 32 completely covers the flexure 1, and the polysilicon layer 31 partially covers the flexure 1. The ductility of the metal layer 32 can avoid insufficient strength of the flexure 1, reduce the risk of fracture of the flexure 1, and improve the reliability of the flexure 1.

[0059] In some embodiments, Figure 8As shown, the first supporting end 11 and the second supporting end 12 are arranged opposite to each other, the multiple bending portions 21 include a first bending portion 211, a second bending portion 212 and a third bending portion 213, and the multiple section portions 22 include a first section 221, a second section 222, a third section 223, and a fourth section 224. The first bending portion 211 connects the first supporting end 11 and the first section 221, so that the first supporting end 11 and the first section 221 are arranged at an angle, the first section 221 and the second section 222 are arranged collinearly, the second bending portion 212 connects the second section 222 and the third section 223, so that the second section 222 and the third section 223 are arranged at an angle, the third section 223 and the fourth section 224 are arranged collinearly, and the third bending portion 213 connects the fourth section 224 and the second supporting end 12, so that the fourth section 224 and the second supporting end 12 are arranged at an angle.

[0060] Specifically, the first bending portion 211 is connected to the first supporting end 11, and bends and extends upward in a direction away from the first supporting end 11, so that the extension direction of the connecting portion 20 is changed, thereby increasing the degree of freedom of the flexure 1. The first section 221 is tangentially connected to the first bending portion 211, and extends obliquely upward in a direction away from the first bending portion 211. The second section 222 is colinearly connected to the first section 221, and extends obliquely upward in a direction away from the first section 221, thereby increasing the length of the connecting portion 20, thereby further increasing the deformable range of the flexure 1. The second bending portion 212 is tangentially connected to the second section 222, and bends downward in a direction away from the second section 222, thereby further changing the extension direction of the connecting portion 20, thereby increasing the degree of freedom and resilience of the flexure 1. The third section 223 is tangentially connected to the second bending portion 212 and extends obliquely downward in a direction away from the second bending portion 212. The fourth section 224 is colinearly connected to the third section 223 and extends obliquely downward in a direction away from the third section 223, thereby increasing the length of the connecting portion 20 and further increasing the deformable range of the flexure 1. The third bending portion 213 is connected to the second supporting end 12, bends and extends upward in a direction away from the second supporting end 12, and is tangentially connected to the fourth section 224.

[0061] In some embodiments, the plurality of narrowing portions 23 include a first narrowing portion 231 and a second narrowing portion 232, wherein the first narrowing portion 231 is located between the first section 221 and the second section 222 and is colinearly arranged with the first section 221 and the second section 222, and the width of the first narrowing portion 231 is smaller than the width of the first section 221 and the second section 222, so that the stiffness of the first narrowing portion 231 is smaller than the stiffness of the first section 221 and the second section 222, and the second narrowing portion 232 is located between the third section 223 and the fourth section 224 and is colinearly arranged with the third section 223 and the fourth section 224, and the width of the second narrowing portion 232 is smaller than the width of the third section 223 and the fourth section 224, so that the stiffness of the second narrowing portion 232 is smaller than the stiffness of the third section 223 and the fourth section 224. It can be understood that when the flexure 1 is subjected to an external force causing the first support end 11 and the second support end 12 to move relative to each other, the narrowed portion 23 is more likely to deform than the section portion 22, thereby releasing stress and further reducing stress concentration at the second bending portion 212, thereby helping to avoid stress concentration in the second bending portion 212 and excessive deformation that would cause the flexure 1 to fail.

[0062] In some optional embodiments, a first transition cutting edge 241 is provided between the first section 221 and the first narrowing portion 231, and between the second section 222 and the first narrowing portion 231, so as to avoid a sudden change in width between the first section 221, the second section 222 and the first narrowing portion 231, so that the connecting portion 20 gradually transitions from the wider first section 221 to the narrower first narrowing portion 231, and then gradually transitions from the narrower first narrowing portion 231 to the wider second section 222. A first transition cut edge 241 is also provided between the third section 223 and the second narrowing portion 232, and between the fourth section 224 and the second narrowing portion 232, so as to avoid a sudden change in width between the third section 223, the fourth section 224 and the second narrowing portion 232, so that the connecting portion 20 gradually transitions from the wider third section 223 to the narrower second narrowing portion 232, and then gradually transitions from the narrower second narrowing portion 232 to the wider fourth section 224. It can be understood that the angles between the first transition cut edge 241, the second transition cut edge 242 and the outer contour edge of the section portion 22, and the angles between the first transition cut edge 241, the second transition cut edge 242 and the outer contour edge of the narrowing portion 23 are all obtuse angles, so as to reduce the stress concentration point at the connection between the section portion 22 and the narrowing portion 23, reduce the risk of stress concentration in the connecting portion 20, and improve the reliability of the flexure 1.

[0063] In some embodiments, the plurality of bending portions 21 further include a third narrowing portion 233, the third narrowing portion 233 is located at the second bending portion 212, the width of the third narrowing portion 233 is smaller than the width of the second bending portion 212, so that the stiffness of the third narrowing portion 233 is smaller than the width of the second bending portion 212, so that the third narrowing portion 233 is easier to deform than the second bending portion 212, further making the flexure 1 softer and reducing the resistance encountered when the first support end 11 and the second support end 12 move relative to each other. It is worth mentioning that, Fig. 9 As shown, when the first support end 11 and the second support end 12 move relative to each other, the first bending portion 211 and the third bending portion 213 are the parts with larger deformation in the flexure 1, so as to provide the flexure 1 with degrees of freedom in the X direction and the Y direction. It can be understood that, as described above, the radial widths of the first bending portion 211 and the third bending portion 213 are smaller than the radial widths of the respective segment portions 22, so as to reduce the elastic coefficients of the first bending portion 211 and the third bending portion 213, so that the first bending portion 211 and the third bending portion 213 are relatively soft and easier to deform. In some embodiments, the width of the third narrowing portion 233 is greater than the width of the first narrowing portion 231 and the second narrowing portion 232, so that the elastic coefficient of the third narrowing portion 233 is greater than the elastic coefficient of the first narrowing portion 231 and the second narrowing portion 232, so as to resist the stress generated by the deformation of the second bending portion 212 and avoid excessive deformation of the second bending portion 212, which is beneficial to maintaining the support of the flexure 1 and providing rebound force at the same time.

[0064] In some embodiments, the reinforcement layer 40 is arranged on the first bending portion 211 in an area close to the first support end 11, and on the third bending portion 213 in an area close to the second support end 12, so that the connection between the first bending portion 211 and the first support end 11, and the connection between the third bending portion 213 and the second support end 12 can bear greater stress, further improving the connection reliability between the first support end 11 and the second support end 12 and other components, which is beneficial to improving the installation reliability of the flexure 1, and at the same time allows the flexure 1 to deform in a controllable direction.

[0065] In some embodiments, Fig.10As shown, the plurality of bending portions 21 further include a fourth bending portion 214 and a fifth bending portion 215, wherein the fourth bending portion 214 is disposed between the first bending portion 211 and the first section 221, and the fifth bending portion 215 is disposed between the fourth section 224 and the third bending portion 213, so as to increase the deformation amount of the connecting portion 20 and further increase the relative motion range of the first supporting end 11 and the second supporting end 12. In an optional embodiment, the first bending portion 211 and the third bending portion 213 are located on the first axis a, the fourth bending portion 214 and the fifth bending portion 215 are located on the second axis b, the second bending portion 212 is located on the third axis c, and the first axis a is located between the second axis b and the third axis c, so as to reduce the size of the flexure 1 in the Y direction.

[0066] Specifically, the first support end 11 and the first bending portion 211 are located on the first axis a, and the first bending portion 211 bends and extends downward in a direction away from the first support end 11, so that the extension direction of the connecting portion 20 is changed, thereby increasing the degree of freedom of the flexure 1. The fourth bending portion 214 is located on the second axis b and is tangent to the first bending portion 211. The fourth bending portion 214 rotates and extends upward in a direction away from the first bending portion 211, thereby further changing the extension direction of the connecting portion 20, thereby increasing the degree of freedom and resilience of the flexure 1. The first section 221 is connected to the fourth bending portion 214 and is tangent to it. The first section 221 extends obliquely upward in a direction away from the fourth bending portion 214, and the second section 222 is colinearly connected to the first section 221 and extends obliquely upward in a direction away from the first section 221, thereby increasing the length of the connecting portion 20, thereby further increasing the deformable range of the flexure 1. The second bending portion 212 is located on the third axis c and is tangentially connected to the second section 222. The second bending portion 212 is bent downwardly in a rotational manner in a direction away from the second section 222, so as to further change the extension direction of the connecting portion 20 and increase the degree of freedom and resilience of the flexure 1. The third section 223 is connected to the second bending portion 212 and is tangentially arranged. The third section 223 extends obliquely downward in a direction away from the second bending portion 212. The fourth section 224 is colinearly connected to the third section 223 and extends obliquely downward in a direction away from the third section 223, so as to increase the length of the connecting portion 20 and further increase the deformable range of the flexure 1. The fifth bending portion 215 is located on the second axis b and is tangentially connected to the fourth section 224. The fifth bending portion 215 is rotatably bent upward in a direction away from the fourth section 224, so as to further change the extension direction of the connecting portion 20, thereby increasing the degree of freedom and resilience of the flexure 1. The third bending portion 213 and the second supporting end 12 are located on the first axis a. The third bending portion 213 is bent and extends downward in a direction away from the second supporting end 12, and is tangentially connected to the fifth bending portion 215. It can be understood that, when the overall size of the flexure 1 is the same, increasing the number of the bending portions 21 can increase the stroke of the supporting end of the flexure 1, which helps to provide a larger range of movement for the photosensitive chip 54 in a compact space.

[0067] In some embodiments, the angle between the fourth bending portion 214 and the tangent line of the first bending portion 211 and the extension line of the first section 221 is δ1, the angle between the extension line of the second section 222 and the extension line of the third section 223 is δ2, and the angle between the fifth bending portion 215 and the tangent line of the third bending portion 213 and the extension line of the fourth section 224 is δ3, wherein the δ1, the δ2 ​​and the δ3 are all greater than 90°, so as to increase the deformation range of the connecting portion 20. It is worth mentioning that when the flexure 1 is deformed by force, that is, when the first support end 11 and the second support end 12 are close to or away from each other, the fourth bending portion 214 and the fifth bending portion 215 mainly cause the flexure 1 to be greatly deformed, and at the same time, the first bending portion 211 and the second bending portion 212 are mainly able to resist the stress generated by the relative movement of the first support end 11 and the second support end 12. In an optional embodiment, δ2>δ1=δ3, so that the flexure 1 is greatly deformed near the fourth bending portion 214 and the fifth bending portion 215, and the force distribution of the connecting portion 20 is more uniform, reducing stress concentration, which is beneficial to improving the reliability of the flexure 1 and extending the service life of the flexure 1. The δ1, δ2 and δ3 can also be any angle adapted to the moving range of the photosensitive chip 54, and the present application does not limit this.

[0068] In other embodiments, Fig.11 and Fig.12 As shown, the first support end 11 and the second support end 12 are staggered, and the connecting portion 20 includes a first bending portion 211, a second bending portion 212, a first section 221, and a second section 222. The first bending portion 211 is arranged between the first section 211 and the first support end 11, the second section 222 is connected to the first section 221 in a colinear manner, and the second bending portion 212 is arranged between the second section 222 and the second support end 12, so that each of the sections 22 is long and straight to connect the first support end 11 and the second support end 12. That is, when the first support end 11 and the second support end 12 move relative to each other, the first bending portion 211 and the second bending portion 212 are the parts with a larger deformation amount in the flexure 1, so as to provide the flexure 1 with degrees of freedom in the X direction and the Y direction. It is worth mentioning that the width of the first bending portion 211 and the second bending portion 212 is smaller than the width of each of the section portions 22, so that the stiffness of the first bending portion 211 and the second bending portion 212 is smaller than the stiffness of each of the section portions 22, and further makes the first bending portion 211 and the second bending portion 212 softer and easier to deform.

[0069] In some embodiments, at least one narrowing portion 23 is provided between the first section 221 and the second section 222, and the width of the narrowing portion 23 is smaller than the width of each of the section portions 22, so that the stiffness of the narrowing portion 23 is smaller than the stiffness of each of the section portions 22, thereby reducing the overall stiffness of the connecting portion 20 and making the flexure 1 softer.

[0070] In some optional embodiments, at least one of the narrowing portions 23 includes a first narrowing portion 231 and a second narrowing portion 232, and the connecting portion 20 further includes a widening portion 25, the widening portion 25 is located between the first narrowing portion 231 and the second narrowing portion 232, and the width of the widening portion 25 is greater than the width of each of the segment portions 22. That is, the first narrowing portion 231 is located between the first segment 221 and the widening portion 25, the second narrowing portion 232 is located between the second segment 222 and the widening portion 25, and the first narrowing portion 231, the second narrowing portion 232 and the widening portion 25 are arranged in a colinear manner with the first segment 221 and the second segment 222. The width of each of the narrowing portions 23 is smaller than the width of each of the segment portions 22, so that the stiffness of each of the narrowing portions 23 is smaller than the stiffness of each of the segment portions 22, so as to reduce the overall elastic coefficient of the flexure 1, and make the flexure 1 softer. The width of the widened portion 25 is greater than the width of each of the segmented portions 22, so that the stiffness of the widened portion 25 is greater than the stiffness of each of the segmented portions 22, thereby increasing the resilience of the connecting portion 20. It is understandable that the widened portion 25 is located in the middle portion of the connecting portion 20, which is beneficial to increase the support of the connecting portion 20 and avoid uncontrollable deformation of the flexure 1. It is worth mentioning that changing the radial width of the widened portion 25 can change the resistance of the flexure 1. For example, in a differential circuit, when the lengths of the two flexures 1 are different, the width of the widened portion 25 can be changed so that the resistances of the two flexures 1 are the same, which is beneficial to improving the signal accuracy of the differential circuit.

[0071] According to the second aspect of the present application, a movable platform comprises a first frame, a second frame and at least one of the above-mentioned flexures 1, wherein the second frame is movably connected to the first frame, and a plurality of the flexures 1 are arranged between the first frame and the second frame, so that the second frame is movably connected and electrically connected to the first frame. It is worth mentioning that in some embodiments, the first support end 11 and the second support end 12 of the flexure 1 are staggered, and the height of the flexure 1 is less than 200 μm, which is conducive to reducing the height of the movable platform and making it easier for other components in the movable platform to avoid the flexure 1.

[0072] According to the third aspect of this application, Fig.13As shown, a photosensitive component 50 includes a moving component 51, a fixed component 52, a driving component 53 and at least one of the above-mentioned flexible components 1, wherein the moving component 51 is used to carry a photosensitive chip 54, the fixed component 52 is arranged on the peripheral side of the moving component 51, the moving component 51 can be movably connected to the fixed component 52, the driving component 53 is arranged on the moving component 51, and can drive the moving component 51 to move relative to the fixed component 52, and a plurality of the flexible components 1 are arranged between the moving component 51 and the fixed component 52, so that the moving component 51 can be movably connected and electrically connected to the fixed component 52. Specifically, the flexure 1 is deformably connected to opposite sides of the fixed component 52 and the movable component 51, the first supporting end 11 of the flexure 1 is fixed to one of the fixed component 52 or the movable component 51, the second supporting end 12 of the flexure 1 is fixed to the other of the fixed component 52 or the movable component 51, and the connecting portion 20 is horizontally placed in the gap between the fixed component 52 and the movable component 51, so as to be movably connected and electrically connected to the fixed component 52 and the movable component 51. In an optional embodiment, the stiffness of the flexure 1 in the X direction is less than 50mN / mm, the stiffness in the Y direction is less than 60mN / mm, and the stiffness in the Z direction is less than 100mN / mm, so that the flexure 1 is easier to bend when subjected to force, further reducing the resistance to relative movement of the first support end 11 and the second support end 12, that is, reducing the resistance to movement of the mobile component 51 relative to the fixed component 52, helping to reduce the driving force required by the driving component 53 to drive the mobile component 51, thereby reducing the size of the driving component 53, which is beneficial to reducing the overall size of the photosensitive component 50.

[0073] The above describes the basic principles, main features and advantages of the present invention. Those skilled in the art should understand that the present invention is not limited to the above embodiments. The above embodiments and descriptions only describe the principles of the present invention. The present invention may be subject to various changes and improvements without departing from the spirit and scope of the present invention. These changes and improvements fall within the scope of the present invention to be protected. The scope of protection claimed by the present invention is defined by the attached claims and their equivalents.

Claims

1. A flexure, characterized in that: include: A support portion, the support portion comprising a first support end and a second support end; A connecting portion, the connecting portion is disposed between the first supporting end and the second supporting end to connect the first supporting end and the second supporting end, wherein the length of the connecting portion is greater than the width of the connecting portion, and the minimum width of the connecting portion is greater than the thickness of the connecting portion; The connecting portion includes at least one straight-line extending section and at least two curved bending portions, each of which is disposed between two adjacent section portions and between the section portion and the supporting portion, so as to change the extending direction of each of the section portions.

2. The flexure according to claim 1, characterized in that The connecting portion also includes at least one narrowing portion, which is arranged between the two segment portions, or between the segment portion and the bending portion. The width of the narrowing portion is smaller than the width of the segment portion adjacent to it, and the width of the bending portion located between the segment portion and the supporting portion is smaller than the width of the segment portion connected to it, so that the connecting portion has an uneven width.

3. The flexure according to claim 2, characterized in that The radial width of the narrowed portion is L1, and the radial width of the segment portion is L2, wherein L1 / L2≤1 / 2.

4. The flexure according to claim 2, characterized in that A first transition cut edge is provided between the narrowing portion and the section portion, and the first transition cut edge connects the outer contours of the narrowing portion and the section portion, so that the connecting portion gradually transitions from the wider section portion to the narrower narrowing portion.

5. The flexure according to claim 4, characterized in that The acute angle between the first transition cutting edge and the contour line of the section portion is θ1, wherein 45°≤θ1≤60°.

6. The flexure according to claim 2, characterized in that A second transition cut edge is provided between the bending portion and the section portion, and the second transition cut edge connects the outer contours of the bending portion and the section portion, so that the connecting portion gradually transitions from the narrower bending portion to the wider section portion.

7. The flexure according to claim 6, characterized in that The acute angle between the second transition cutting edge and the contour line of the section portion is θ2, wherein 30°≤θ2≤45°.

8. The flexure according to claim 2, characterized in that The material of the flexure is at least one polysilicon layer and at least one metal layer stacked together, and the metal layer is conductive.

9. The flexure according to claim 8, characterized in that At least one of the metal layers includes a first metal layer and a second metal layer, and the flexure is formed by stacking the first metal layer, the polysilicon layer and the second metal layer in sequence.

10. The flexure according to any one of claims 2 to 9, characterized in that: The first supporting end and the second supporting end are arranged opposite to each other, the multiple bending portions include a first bending portion, a second bending portion and a third bending portion, the multiple section portions include a first section, a second section, a third section and a fourth section, the first bending portion connects the first supporting end and the first section, so that the first supporting end and the first section are arranged at an angle, the first section and the second section are arranged collinearly, the second bending portion connects the second section and the third section, so that the second section and the third section are arranged at an angle, the third section and the fourth section are arranged collinearly, and the third bending portion connects the fourth section and the second supporting end, so that the fourth section and the second supporting end are arranged at an angle.

11. The flexure according to claim 10, characterized in that The multiple narrowing portions include a first narrowing portion and a second narrowing portion, the first narrowing portion is located between the first segment and the second segment and is arranged collinearly with the first segment and the second segment, and the width of the first narrowing portion is smaller than the width of the first segment and the second segment, the second narrowing portion is located between the third segment and the fourth segment and is arranged collinearly with the third segment and the fourth segment, and the width of the second narrowing portion is smaller than the width of the third segment and the fourth segment.

12. The flexure according to claim 11, characterized in that The plurality of narrowing portions further include a third narrowing portion, which is located at the second bending portion, has a width smaller than that of the second bending portion, and has a width larger than that of the first narrowing portion and the second narrowing portion.

13. The flexure according to claim 10, characterized in that The plurality of bending portions further include a fourth bending portion and a fifth bending portion, wherein the fourth bending portion is disposed between the first bending portion and the first section, and the fifth bending portion is disposed between the fourth section and the third bending portion.

14. The flexure according to claim 13, characterized in that The first bending portion and the third bending portion are located on a first axis, the fourth bending portion and the fifth bending portion are located on a second axis, the second bending portion is located on a third axis, and the first axis is located between the second axis and the third axis.

15. The flexure according to any one of claims 2 to 9, characterized in that: The first supporting end and the second supporting end are staggered, and the connecting portion includes a first bending portion, a second bending portion, a first section, and a second section. The first bending portion is arranged between the first section and the first supporting end, the second section is connected to the first section in a colinear manner, and the second bending portion is arranged between the second section and the second supporting end, so that each of the sections is long and straight connecting the first supporting end and the second supporting end.

16. The flexure according to claim 15, characterized in that At least one narrowing portion is disposed between the first section and the second section, and a width of the narrowing portion is smaller than a width of each of the section portions.

17. The flexure according to claim 16, characterized in that At least one of the narrowing portions includes a first narrowing portion and a second narrowing portion, and the connecting portion further includes a widening portion, the widening portion is located between the first narrowing portion and the second narrowing portion, and the width of the widening portion is greater than the width of each of the section portions.

18. A movable platform, characterized in that: include: First frame; a second frame, the second frame being movably connected to the first frame; The flexure as described in any one of claims 1 to 17, wherein a plurality of the flexures are disposed between the first frame and the second frame, so that the second frame is movably and electrically connected to the first frame.

19. A photosensitive component, characterized in that: include: A mobile component, wherein the mobile component is used to carry a photosensitive chip; A fixed component, the fixed component is arranged on the peripheral side of the movable component, and the movable component is movably connected to the fixed component; A driving component, wherein the driving component is disposed on the moving component and is capable of driving the moving component to move relative to the fixed component; According to any one of claims 1 to 17, a plurality of the flexures are disposed between the moving component and the fixed component, so that the moving component is movably and electrically connected to the fixed component.

Images