Filter element purging device, vacuum deposition equipment and purging process thereof

Abstract

The invention provides a filter element purging device, vacuum deposition equipment and a purging process thereof, and relates to the technical field of semiconductor equipment. The back-blowing device is suitable for being arranged on a filter element device, the filter element device is arranged in an installation barrel body, and the back-blowing device comprises a back-blowing air source, a first pipeline air pipe connected with the back-blowing air source and a second pipeline; the first pipeline extends into the filter element device and is connected with a purging air pipe arranged in the filter element device, the purging air pipe is connected with a rotating device, and the rotating device is suitable for driving the purging air pipe to rotate in the filter element device to perform circumferential purging on the filter element device; and the second pipeline is connected to the mounting barrel body and is suitable for ventilating after the purging of the purging air pipe is finished so as to blow back powder drifting in a clearance space between the inner side of the mounting barrel body and the outer side of the filter element device into the reaction container.

Description

Technical Field

[0001] The present invention relates to the technical field of semiconductor equipment, and in particular to a filter element purging device and a purging process thereof. Background Art

[0002] The traditional method of blowing filter elements is to use pulse valve air blowing to form a certain pressure airflow in the filter element to blow away the powder on the surface of the filter element. This method is relatively effective for blowing filter bags, but not so effective for blowing metal filter elements. The reason is that metal filter elements are not like filter bags, which can be shaken to remove powder, and large-flow air blowing will directly affect the bottom pressure of the vacuum tank, which may cause equipment pressure alarms. In addition, the existing vacuum deposition equipment needs to shut down the equipment to back-purge the filter element in a vacuum environment, and back-purge first to make the powder adsorbed on the surface of the filter element fall back into the reaction tank before continuing to work, which will cause the work rhythm to be interrupted and affect work efficiency. Summary of the invention

[0003] The invention discloses a filter element purging device, aiming to improve the above-mentioned problems.

[0004] The present invention adopts the following scheme:

[0005] A filter element purging device, which is suitable for being arranged on a filter element device, wherein the filter element device is arranged in an installation barrel body, and comprises a back-blowing air source, a first pipeline air pipe connected to the back-blowing air source, and a second pipeline, wherein the first pipeline extends into the interior of the filter element device and is connected to a purge air pipe arranged in the interior of the filter element device, and the purge air pipe is connected to a rotating device, and the rotating device is suitable for driving the purge air pipe to rotate inside the filter element device to circumferentially purge the filter element device; a sealing cover is provided at the connection between the rotating device and the purge air pipe; the second pipeline is connected to the installation barrel body, and the second pipeline is suitable for ventilating after the purge air pipe is purged so as to blow the powder scattered in the gap space between the inner side of the installation barrel body and the outer side of the filter element device back into the reaction container.

[0006] Furthermore, the purge air pipe is provided with a plurality of purge air holes facing the inner wall of the filter element device to purge the filter element device.

[0007] Furthermore, the installation barrel is provided with a purge gap to connect the second pipeline, and the purge gap is arranged above the installation barrel to facilitate back-blowing of the powder from top to bottom.

[0008] Furthermore, a first valve is provided on the first pipeline, and a second valve is provided on the second pipeline, so as to control the opening and closing of the first pipeline and the second pipeline respectively.

[0009] Furthermore, the distance between the purge air pipe and the inner wall of the filter element device is 1 mm to 5 mm.

[0010] The present invention also provides a vacuum deposition device, comprising a reaction container, on which at least a first filter element device and a second filter element device are arranged, and the first filter element device and the second filter element device are both provided with a filter element purge device as described above, and the first filter element device and the second filter element device are respectively connected to the vacuum device via a first vacuum pipeline and a second vacuum pipeline.

[0011] Furthermore, the first vacuum pipeline and the second vacuum pipeline are respectively provided with a third valve and a fourth valve for controlling the opening and closing of the vacuum state in the first filter element device and the second filter element device respectively.

[0012] The present invention also provides a purging process for a vacuum deposition device, wherein a filter element purging device disposed on a first filter element device is defined as a first filter element purging device, and a filter element purging device disposed on a second filter element device is defined as a second filter element purging device, and the process comprises the following steps:

[0013] S1, keep the system evacuated, close the third valve, keep the fourth valve open, open the first valve of the first filter element purge device, close the second valve of the first filter element purge device, so as to rotate and purge the first filter element device;

[0014] S2, closing the first valve of the first filter element purge device, opening the second valve of the first filter element purge device, and blowing the powder between the filter element and the installation barrel in the first filter element device back into the reaction container;

[0015] S3, close the second valve and the fourth valve of the first filter element purge device, open the third valve and the first valve of the second filter element purge device, close the second valve of the second filter element purge device, and rotate the purge air pipe of the second filter element purge device to back-blow the second filter element device;

[0016] S4, closing the first valve of the second filter element purging device, opening the second valve of the second filter element purging device, blowing the powder between the filter element and the barrel in the second filter element device back into the reaction container, and completing the purging of the second filter element device;

[0017] S5. Open the fourth valve and continue the process.

[0018] Beneficial effects:

[0019] The filter element purging device provided in this scheme can adapt to backblowing in a vacuum environment. It first purges the inside of the filter element device to blow away the powder adsorbed on the outside of the filter element device, and then purges downward on the outside of the filter element device to blow the scattered dust back into the reaction container to prevent the powder from being re-adsorbed on the outside of the filter element device after the vacuum is turned on again. The purging effect and purging process can be improved by setting a rotary purging method. In a vacuum deposition device provided with a plurality of the filter element devices and filter element purging devices, the filter element purging can be performed synchronously during the process through a dynamic purging process, which can shorten the process time and improve efficiency. BRIEF DESCRIPTION OF THE DRAWINGS

[0020] Figure 1 is a schematic structural diagram of a vacuum deposition device according to an embodiment of the present invention;

[0021] Figure 2 It is a structural schematic diagram of a filter element purge device according to an embodiment of the present invention;

[0022] Icons: installation barrel 1, backblowing air source 2, filter element device 3, purge air pipe 4, cover body 5, sealing cover 6, rotating device 7, pressure switch 8, first pipeline 9, second pipeline 10, reaction container 11, vacuum device 12, first vacuum pipeline 13, second vacuum pipeline 14, first valve V1 of the first filter element purge device, second valve V2 of the first filter element purge device, third valve V3, first valve V4 of the second filter element purge device, second valve V5 of the second filter element purge device, fourth valve V6. DETAILED DESCRIPTION

[0023] Example 1

[0024] Combination Figure 1 and Figure 2As shown, this embodiment provides a vacuum deposition device, including a reaction container 11, on which at least two filter element devices 3 are arranged, which are defined as a first filter element device and a second filter element device respectively, and a filter element purge device is arranged on the first filter element device and the second filter element device, and the first filter element device and the second filter element device are connected to the vacuum device 12 through a first vacuum pipeline and a second vacuum pipeline 14 respectively. The filter element purging device is suitable for being arranged on the filter element device 3, and the filter element device 3 is arranged in the installation barrel body 1. The filter element purging device includes a back-blowing air source 2, a first pipeline 9 connected to the back-blowing air source 2, and a second pipeline 10, wherein the first pipeline 9 extends into the interior of the filter element device 3 and is connected to the purge air pipe 4 arranged in the interior of the filter element device 3, and the purge air pipe 4 is connected to a rotating device 7, and the rotating device 7 is suitable for driving the purge air pipe 4 to rotate inside the filter element device 3 to circumferentially purge the filter element device 3; the second pipeline 10 is connected to the installation barrel body 1, and the second pipeline 10 is suitable for ventilating after the purge air pipe 4 is purged to blow the powder scattered in the gap space between the inner side of the installation barrel body 1 and the outer side of the filter element device 3 back into the reaction container 11.

[0025] In this embodiment, the vacuum device 12 is connected to the first filter element device and the second filter element device respectively through the first vacuum pipeline and the second vacuum pipeline 14, so as to be connected to the reaction container 11. The filter element device 3 can be a multi-void metal filter element, whose internal cavity is connected to the vacuum device 12, and the first vacuum pipeline and the second vacuum pipeline 14 are respectively provided with a third valve V3 and a fourth valve V6 to control the opening and closing of the vacuum state in the first filter element device and the second filter element device. The filter element device 3 is installed in the installation barrel body 1, and there is a gap between the filter element device 3 and the inner wall of the installation barrel body 1 for gas to pass through. The installation barrel body 1 is provided with a cover body 5 to fix the filter element device 3. The back-blowing gas source 2 can adopt a gas storage pressure tank, which is connected to a pressure switch 8.

[0026] The first pipeline 9 is connected to the purge air pipe 4, and the upper end of the purge air pipe 4 is connected to a rotating motor for driving the purge air pipe 4 to rotate. The purge air pipe 4 extends downward into the interior of the filter element device 3 and is close to the inner wall of the filter element device 3, so that the gas can be concentratedly blown to the inner wall of the filter element device 3, reducing the loss of air pressure, and the various positions of the inner wall of the filter element device 3 are purged by rotating the purge. The rotating motor is arranged above the cover body 5, and a sealing cover 6 is arranged at the connection between the rotating device and the purge air pipe 4, so that the connection between the first pipeline and the purge air pipe 4 is sealed to ensure that there is no air leakage during rotation. In this embodiment, the purge air pipe 4 is provided with a plurality of purge air holes facing the inner wall of the filter element device 3 to purge the filter element device 3. The purge air holes are closely arranged and have small apertures, so that the flow rate of the gas is increased when it is blown out, thereby enhancing the purge effect. In a preferred embodiment, the distance between the purge air pipe 4 and the inner wall of the filter element device 3 is 1 mm to 5 mm. Close purge can reduce the loss of purge gas.

[0027] The installation barrel 1 is provided with a purge gap to connect the second pipeline 10, and the purge gap is provided above the installation barrel 1 to facilitate back-flushing of the powder from top to bottom. Here, the first pipeline 9 is provided with a first valve, and the second pipeline 10 is provided with a second valve to control the opening and closing of the first pipeline 9 and the second pipeline 10 respectively.

[0028] When the filter element purging device is working, first open the first valve, so that the gas in the back-blowing gas source 2 flows along the first pipeline 9 to the purge air pipe 4. At this time, the rotating device 7 rotates to drive the purge air pipe 4 to rotate, and the high-pressure gas radiates along the inner side of the filter element device 3 for 1-2 circles to blow away the powder on the outer surface of the filter element device 3; then close the first valve, open the second valve, and the gas in the back-blowing gas source 2 flows along the second pipeline 10 to the purge pores in the installation barrel 1, and blows the powder that has been blown away and scattered in the area in the previous step into the tank. It should be noted that when the corresponding filter element device 3 is back-blown, the vacuum channel of the filter element device 3 needs to be closed to prevent the powder from being re-adsorbed after being blown away.

[0029] In this embodiment, by blowing in steps, the powder is first blown off the surface of the filter element device 3 and then blown back into the reaction container 11, which can avoid the situation where the powder is just blown off the surface of the filter element device 3 and then adsorbed to the surface of the filter element due to the opening of the vacuum device 12; the filter element device 3 is backblown in a rotating manner, and the vacuum extraction process is combined to effectively blow away the powder adhering to the surface of the filter element.

[0030] Example 2

[0031] Combination Figure 1As shown, the present invention also provides a purging process for a vacuum deposition device, wherein a filter element purging device disposed on a first filter element device is defined as a first filter element purging device, and a filter element purging device disposed on a second filter element device is defined as a second filter element purging device, and the process comprises the following steps:

[0032] S1, keep the system evacuated, close the third valve V3, keep the fourth valve V6 open, open the first valve V1 of the first filter element purge device, close the second valve V2 of the first filter element purge device, so as to rotate and purge the first filter element device;

[0033] S2, closing the first valve V1 of the first filter element purge device, opening the second valve V2 of the first filter element purge device, and blowing the powder between the filter element in the first filter element device and the installation barrel 1 back into the reaction container 11;

[0034] S3, close the second valve V2 and the fourth valve V6 of the first filter element purge device, open the third valve V3 and the first valve V4 of the second filter element purge device, close the second valve V5 of the second filter element purge device, and rotate the purge air pipe 4 of the second filter element purge device to back-blow the second filter element device;

[0035] S4, close the first valve V4 of the second filter element purging device, open the second valve V5 of the second filter element purging device, blow the powder between the filter element and the barrel in the second filter element device back into the reaction container 11, and complete the purging of the second filter element device;

[0036] S5. Open the fourth valve V6 and continue the process.

[0037] In this embodiment, when the first filter element device is purged, since the second filter element device remains in a vacuum-opened state, a downward suction force is also generated on the area between the first filter element device and the mounting barrel 1, which helps the powder to fall into the reaction vessel 11 in time, and vice versa. In this embodiment, the process can be continued without stopping the process, which can shorten the process time and improve efficiency. It should be noted that in other embodiments, the filter element device 3 can be provided with more, and the vacuum pressure of the filter element device 3 can be turned off in turn to perform back-purging one by one.

[0038] Compared with the traditional purging method, this solution adopts internal dynamic purging and outer wall purging of the filter element, and combines the process design of purging multiple filter elements in turn to achieve effective filter element backflushing with better effect.

[0039] It should be understood that the above are only preferred implementations of the present invention, and the protection scope of the present invention is not limited to the above embodiments. All technical solutions under the concept of the present invention belong to the protection scope of the present invention.

[0040] The above description of the drawings used in the implementation manner only illustrates certain embodiments of the present invention and should not be regarded as limiting the scope. For ordinary technicians in this field, other related drawings can be obtained based on these drawings without paying creative work.

Claims

1. A filter element purge device, which is suitable for being arranged on a filter element device, wherein the filter element device is arranged in a mounting barrel, characterized in that: It comprises a back-blowing air source, a first pipeline connected to the back-blowing air source, and a second pipeline, wherein the first pipeline extends into the interior of the filter element device and is connected to a purge air pipe arranged inside the filter element device, and the purge air pipe is connected to a rotating device, and the rotating device is suitable for driving the purge air pipe to rotate inside the filter element device to purge the filter element device circumferentially; a sealing cover is arranged at the connection between the rotating device and the purge air pipe; The second pipeline is connected to the installation barrel, and the second pipeline is suitable for ventilation after the purge air pipe is purged to blow the powder floating in the gap space between the inner side of the installation barrel and the outer side of the filter element device back into the reaction container.

2. The filter element purging device according to claim 1, characterized in that: The purge air pipe is provided with a plurality of purge air holes facing the inner wall of the filter element device for purging the filter element device.

3. The filter element purging device according to claim 1, characterized in that: The installation barrel is provided with a purge gap to connect the second pipeline, and the purge gap is arranged above the installation barrel to facilitate back-blowing of powder from top to bottom.

4. The filter element purging device according to claim 1, characterized in that: The first pipeline is provided with a first valve, and the second pipeline is provided with a second valve, so as to control the opening and closing of the first pipeline and the second pipeline respectively.

5. The filter element purging device according to claim 1, characterized in that: The distance between the purge air pipe and the inner wall of the filter element device is 1 mm to 5 mm.

6. A vacuum deposition apparatus, comprising a reaction vessel, characterized in that: At least a first filter element device and a second filter element device are arranged on the reaction container, and the first filter element device and the second filter element device are both provided with the filter element purging device described in claim 4, and the first filter element device and the second filter element device are connected to the vacuum device through the first vacuum pipeline and the second vacuum pipeline respectively.

7. The vacuum deposition apparatus according to claim 6, characterized in that The first vacuum pipeline and the second vacuum pipeline are respectively provided with a third valve and a fourth valve for controlling the opening and closing of the vacuum state in the first filter element device and the second filter element device respectively.

8. A purging process for the vacuum deposition equipment according to claim 7, characterized in that: The filter element purge device disposed on the first filter element device is defined as the first filter element purge device, and the filter element purge device disposed on the second filter element device is defined as the second filter element purge device, and the following steps are included: S1, keep the system evacuated, close the third valve, keep the fourth valve open, open the first valve of the first filter element purge device, close the second valve of the first filter element purge device, so as to rotate and purge the first filter element device; S2, closing the first valve of the first filter element purge device, opening the second valve of the first filter element purge device, and blowing the powder between the filter element and the installation barrel in the first filter element device back into the reaction container; S3, close the second valve and the fourth valve of the first filter element purge device, open the third valve and the first valve of the second filter element purge device, close the second valve of the second filter element purge device, and rotate the purge air pipe of the second filter element purge device to back-blow the second filter element device; S4, closing the first valve of the second filter element purging device, opening the second valve of the second filter element purging device, blowing the powder between the filter element and the barrel in the second filter element device back into the reaction container, and completing the purging of the second filter element device; S5. Open the fourth valve and continue the process.

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