AITZO target material, preparation method thereof and application of AITZO target material in preparation of solar cell

Abstract

The invention belongs to the technical field of target materials, and particularly discloses an AITZO target material, a preparation method thereof and application of the AITZO target material in preparation of a solar cell. The aluminum oxide, the indium oxide, the zinc oxide and the tin oxide are combined, the aluminum oxide is added on the basis of the ITZO (indium zinc tin oxide), the aluminum oxide can form nano AITZO, and the material is a transparent conductive material with good conductivity, high-temperature stability and anti-radiation performance; the preparation method comprises the following steps: uniformly mixing mixed powder, dodecylbenzene sulfonic acid and a titanate coupling agent, uniformly mixing tin fluoride, silver particles and polyvinylpyrrolidone, doping the silver particles and a fluorine element into a system, and doping the fluorine element and the silver particles can regulate the lattice constant, the electron concentration and the crystal defect of the material and improve the stability; the compactness and the uniformity of the target material are improved, so that the photoelectric property of the AITZO target material is effectively improved.

Description

Technical Field

[0001] The present invention relates to the technical field of target materials, and in particular to an AITZO target material and a preparation method thereof, and an application thereof in the preparation of solar cells. Background Art

[0002] ITO (Indium Tin Oxide) target is a key raw material for transparent conductive materials, mainly used to prepare thin films. This material has excellent transparency and conductivity and is widely used in flat panel displays, touch screens, solar cells, LED displays and other fields.

[0003] Although ITO targets have good performance, they are expensive and not suitable for flexible devices. Therefore, AITZO (aluminum indium zinc tin oxide) is developed as an alternative material that can effectively solve these problems, reduce costs while maintaining or improving the performance of solar cells, making them more suitable for use in flexible devices.

[0004] In view of this, this application is filed. Summary of the invention

[0005] The present invention provides an AITZO target material and a preparation method thereof and application in preparing a solar cell. The AITZO target material has excellent photoelectric properties.

[0006] The present invention solves the technical problem by adopting the following technical solutions: A method for preparing an AITZO target material comprises the following steps: (1) Add aluminum oxide, indium oxide, zinc oxide and tin oxide and mix them evenly to obtain a mixed powder; (2) Add the mixed powder, dodecylbenzene sulfonic acid and titanate coupling agent into water and stir evenly to obtain a mixed solution; (3) adding tin fluoride, silver particles, polyvinyl pyrrolidone and acetone into water and stirring evenly to obtain a modified solution; (4) Add the modified liquid to the mixed liquid, stir evenly, perform ultrasonic treatment, filter, and heat treatment to obtain an AITZO target.

[0007] The present invention creatively combines aluminum oxide, indium oxide, zinc oxide and tin oxide, and adds aluminum oxide to ITZO (indium zinc tin oxide). Aluminum oxide can form nano-AITZO, which is a transparent conductive material with good conductivity, high-temperature stability and radiation protection performance; the mixed powder, dodecylbenzene sulfonic acid and titanate coupling agent are evenly mixed, and then tin fluoride, silver particles and polyvinyl pyrrolidone are evenly mixed, and silver particles and fluorine element are added into the system. The addition of fluorine element and silver particles can regulate the lattice constant, electron concentration and crystal defects of the material, and improve the stability, thereby increasing the density and uniformity of the target material, thereby effectively improving the photoelectric performance of the AITZO target material.

[0008] As a preferred embodiment of the present invention, the mass ratio of aluminum oxide, indium oxide, zinc oxide and tin oxide is (1-2): (48-52): (32-38): (12-15).

[0009] As a preferred embodiment of the present invention, the mass ratio of the mixed powder, sodium dodecylbenzene sulfonate, titanate coupling agent and water is 1: (0.1-0.25): (0.05-0.1): (3-6).

[0010] As a preferred embodiment of the present invention, the titanate coupling agent is diisopropyl di(acetylacetonate)titanate.

[0011] As a preferred embodiment of the present invention, the mass ratio of tin fluoride, silver particles, polyvinyl pyrrolidone, acetone and water is 1: (0.8-1.2): (0.2-0.4): (0.5-2): (5-20).

[0012] As a preferred embodiment of the present invention, the mass ratio of the modified liquid to the mixed liquid is (0.2~0.5):1.

[0013] As a preferred embodiment of the present invention, the power of the ultrasonic treatment is 300-500W, and the ultrasonic treatment time is 30-50min.

[0014] As a preferred embodiment of the present invention, the heat treatment temperature is 580-620° C., and the heat treatment time is 2-4 hours.

[0015] The present invention also provides an AITZO target material, which is prepared by the above-mentioned preparation method.

[0016] The present invention also provides an application of an AITZO target material in preparing a solar cell.

[0017] The beneficial effects of the present invention are as follows: the present invention combines aluminum oxide, indium oxide, zinc oxide and tin oxide, and adds aluminum oxide to ITZO (indium zinc tin oxide). Aluminum oxide can form nano AITZO, which is a transparent conductive material with good conductivity, high temperature stability and radiation protection performance; the mixed powder, dodecylbenzene sulfonic acid and titanate coupling agent are evenly mixed, and then tin fluoride, silver particles and polyvinyl pyrrolidone are evenly mixed, and silver particles and fluorine element are added into the system. The addition of fluorine element and silver particles can regulate the lattice constant, electron concentration and crystal defects of the material, and improve the stability, thereby improving the density and uniformity of the target material, thereby effectively improving the photoelectric performance of the AITZO target material. DETAILED DESCRIPTION

[0018] In order to make the purpose, technical solution and advantages of the embodiments of the present invention clearer, the technical solution in the embodiments of the present invention will be described clearly and completely below. Obviously, the described embodiments are part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the present invention.

[0019] In the present invention, the technical features described in an open manner include closed technical solutions composed of the listed features, and also include open technical solutions containing the listed features.

[0020] In the present invention, when it comes to numerical ranges, unless otherwise specified, the above numerical ranges are deemed to be continuous and include the minimum and maximum values ​​of the range, as well as each value between such minimum and maximum values. Further, when a range refers to an integer, each integer between the minimum and maximum values ​​of the range is included. In addition, when multiple ranges are provided to describe features or characteristics, the ranges can be merged. In other words, unless otherwise specified, all ranges disclosed herein should be understood to include any and all subranges included therein.

[0021] In the present invention, there is no particular limitation on the specific dispersion and stirring treatment methods.

[0022] The reagents or instruments used in the present invention without indicating the manufacturer are all conventional products that can be obtained commercially. The raw materials used in the comparative examples and the raw materials used in the parallel experiments of the embodiments are the same commercially available products unless otherwise specified.

[0023] Example 1 A method for preparing an AITZO target material comprises the following steps: (1) Aluminum oxide, indium oxide, zinc oxide, and tin oxide are added and mixed uniformly to obtain a mixed powder; the mass ratio of the aluminum oxide, indium oxide, zinc oxide, and tin oxide is 1.5:50:35.5:13.

[0024] (2) Add the mixed powder, dodecylbenzene sulfonic acid, and diisopropyl di(acetylacetonate)titanate to water, and stir evenly at a speed of 500 rpm to obtain a mixed solution; the mass ratio of the mixed powder, dodecylbenzene sulfonic acid, diisopropyl di(acetylacetonate)titanate, and water is 1:0.2:0.08:5.

[0025] (3) adding tin fluoride, silver particles, polyvinyl pyrrolidone and acetone into water, stirring at 500 rpm to obtain a modified solution; the above ratio is 1:1:0.3:1:10; (4) Adding the modified liquid to the mixed liquid, stirring evenly at a speed of 500 rpm, ultrasonically treating at 400 W for 40 min, filtering, and finally heat treating at 600 ° C for 3 h to obtain an AITZO target; the mass ratio of the modified liquid to the mixed liquid is 0.4:1.

[0026] Example 2 A method for preparing an AITZO target material comprises the following steps: (1) Aluminum oxide, indium oxide, zinc oxide, and tin oxide are added and mixed uniformly to obtain a mixed powder; the mass ratio of the aluminum oxide, indium oxide, zinc oxide, and tin oxide is 1:52:32:15.

[0027] (2) Add the mixed powder, dodecylbenzene sulfonic acid, and diisopropyl di(acetylacetonate)titanate to water, and stir evenly at a speed of 500 rpm to obtain a mixed solution; the mass ratio of the mixed powder, dodecylbenzene sulfonic acid, diisopropyl di(acetylacetonate)titanate, and water is 1:0.2:0.08:5.

[0028] (3) adding tin fluoride, silver particles, polyvinyl pyrrolidone and acetone into water, stirring at 500 rpm to obtain a modified solution; the above ratio is 1:1:0.3:1:10; (4) Adding the modified liquid to the mixed liquid, stirring evenly at a speed of 500 rpm, ultrasonically treating at 400 W for 40 min, filtering, and finally heat treating at 600 ° C for 3 h to obtain an AITZO target; the mass ratio of the modified liquid to the mixed liquid is 0.4:1.

[0029] Example 3 A method for preparing an AITZO target material comprises the following steps: (1) Aluminum oxide, indium oxide, zinc oxide, and tin oxide are added and mixed uniformly to obtain a mixed powder; the mass ratio of the aluminum oxide, indium oxide, zinc oxide, and tin oxide is 2:48:38:12.

[0030] (2) Add the mixed powder, dodecylbenzene sulfonic acid, and diisopropyl di(acetylacetonate)titanate to water, and stir evenly at a speed of 500 rpm to obtain a mixed solution; the mass ratio of the mixed powder, dodecylbenzene sulfonic acid, diisopropyl di(acetylacetonate)titanate, and water is 1:0.2:0.08:5.

[0031] (3) adding tin fluoride, silver particles, polyvinyl pyrrolidone and acetone into water, stirring at 500 rpm to obtain a modified solution; the above ratio is 1:1:0.3:1:10; (4) Adding the modified liquid to the mixed liquid, stirring evenly at a speed of 500 rpm, ultrasonically treating at 400 W for 40 min, filtering, and finally heat treating at 600 ° C for 3 h to obtain an AITZO target; the mass ratio of the modified liquid to the mixed liquid is 0.4:1.

[0032] Example 4 A method for preparing an AITZO target material comprises the following steps: (1) Aluminum oxide, indium oxide, zinc oxide, and tin oxide are added and mixed uniformly to obtain a mixed powder; the mass ratio of the aluminum oxide, indium oxide, zinc oxide, and tin oxide is 1.5:50:35.5:13.

[0033] (2) Add the mixed powder, dodecylbenzene sulfonic acid, and di(acetylacetonato)titanate diisopropyl to water, and stir evenly at a speed of 500 rpm to obtain a mixed solution; the mass ratio of the mixed powder, dodecylbenzene sulfonic acid, di(acetylacetonato)titanate diisopropyl to water is 1:0.1:0.01:6.

[0034] (3) Add tin fluoride, silver particles, polyvinyl pyrrolidone and acetone into water, stir evenly at 500 rpm to obtain a modified solution; the above ratio is 1:0.8:0.4:0.5:20; (4) Adding the modified liquid to the mixed liquid, stirring evenly at a speed of 500 rpm, ultrasonically treating at 400 W for 40 min, filtering, and finally heat treating at 600 ° C for 3 h to obtain an AITZO target; the mass ratio of the modified liquid to the mixed liquid is 0.4:1.

[0035] Example 5 A method for preparing an AITZO target material comprises the following steps: (1) Aluminum oxide, indium oxide, zinc oxide, and tin oxide are added and mixed uniformly to obtain a mixed powder; the mass ratio of the aluminum oxide, indium oxide, zinc oxide, and tin oxide is 1.5:50:35.5:13.

[0036] (2) Add the mixed powder, dodecylbenzene sulfonic acid, and diisopropyl di(acetylacetonate)titanate to water, and stir evenly at a speed of 500 rpm to obtain a mixed solution; the mass ratio of the mixed powder, dodecylbenzene sulfonic acid, diisopropyl di(acetylacetonate)titanate, and water is 1:0.25:0.05:3.

[0037] (3) Add tin fluoride, silver particles, polyvinyl pyrrolidone and acetone into water, stir evenly at a speed of 500 rpm to obtain a modified solution; the above ratio is 1:1.2:0.2:2:5; (4) Adding the modified liquid to the mixed liquid, stirring evenly at a speed of 500 rpm, ultrasonically treating at 400 W for 40 min, filtering, and finally heat treating at 600 ° C for 3 h to obtain an AITZO target; the mass ratio of the modified liquid to the mixed liquid is 0.4:1.

[0038] Example 6 A method for preparing an AITZO target material comprises the following steps: (1) Aluminum oxide, indium oxide, zinc oxide, and tin oxide are added and mixed uniformly to obtain a mixed powder; the mass ratio of the aluminum oxide, indium oxide, zinc oxide, and tin oxide is 1.5:50:35.5:13.

[0039] (2) Add the mixed powder, dodecylbenzene sulfonic acid, and diisopropyl di(acetylacetonate)titanate to water, and stir evenly at a speed of 500 rpm to obtain a mixed solution; the mass ratio of the mixed powder, dodecylbenzene sulfonic acid, diisopropyl di(acetylacetonate)titanate, and water is 1:0.2:0.08:5.

[0040] (3) adding tin fluoride, silver particles, polyvinyl pyrrolidone and acetone into water, stirring at 500 rpm to obtain a modified solution; the above ratio is 1:1:0.3:1:10; (4) Adding the modified liquid to the mixed liquid, stirring evenly at a speed of 500 rpm, ultrasonically treating at 400 W for 40 min, filtering, and finally heat treating at 600 ° C for 3 h to obtain an AITZO target; the mass ratio of the modified liquid to the mixed liquid is 0.2:1.

[0041] Example 7 A method for preparing an AITZO target material comprises the following steps: (1) Aluminum oxide, indium oxide, zinc oxide, and tin oxide are added and mixed uniformly to obtain a mixed powder; the mass ratio of the aluminum oxide, indium oxide, zinc oxide, and tin oxide is 1.5:50:35.5:13.

[0042] (2) Add the mixed powder, dodecylbenzene sulfonic acid, and diisopropyl di(acetylacetonate)titanate to water, and stir evenly at a speed of 500 rpm to obtain a mixed solution; the mass ratio of the mixed powder, dodecylbenzene sulfonic acid, diisopropyl di(acetylacetonate)titanate, and water is 1:0.2:0.08:5.

[0043] (3) adding tin fluoride, silver particles, polyvinyl pyrrolidone and acetone into water, stirring at 500 rpm to obtain a modified solution; the above ratio is 1:1:0.3:1:10; (4) Adding the modified liquid to the mixed liquid, stirring evenly at a speed of 500 rpm, ultrasonically treating at 400 W for 40 min, filtering, and finally heat treating at 600 ° C for 3 h to obtain an AITZO target; the mass ratio of the modified liquid to the mixed liquid is 0.5:1.

[0044] Comparative Example 1 A method for preparing an AITZO target material comprises the following steps: (1) Aluminum oxide, indium oxide, zinc oxide, and tin oxide are added and mixed uniformly to obtain a mixed powder; the mass ratio of the aluminum oxide, indium oxide, zinc oxide, and tin oxide is 1.5:50:35.5:13.

[0045] (2) The mixed powder was heat treated at 600°C for 3 h to obtain an AITZO target.

[0046] Comparative Example 2 A method for preparing an AITZO target material comprises the following steps: (1) Aluminum oxide, indium oxide, zinc oxide, and tin oxide are added and mixed uniformly to obtain a mixed powder; the mass ratio of the aluminum oxide, indium oxide, zinc oxide, and tin oxide is 1.5:50:35.5:13.

[0047] (2) Add the mixed powder, dodecylbenzene sulfonic acid, and diisopropyl di(acetylacetonate)titanate to water, and stir evenly at a speed of 500 rpm to obtain a mixed solution; the mass ratio of the mixed powder, dodecylbenzene sulfonic acid, diisopropyl di(acetylacetonate)titanate, and water is 1:0.2:0.08:5.

[0048] (3) The mixed solution was filtered and finally heat treated at 600°C for 3 h to obtain the AITZO target.

[0049] Comparative Example 3 A method for preparing an AITZO target material comprises the following steps: (1) Aluminum oxide, indium oxide, zinc oxide, and tin oxide are added and mixed uniformly to obtain a mixed powder; the mass ratio of the aluminum oxide, indium oxide, zinc oxide, and tin oxide is 1.5:50:35.5:13.

[0050] (2) Add the mixed powder, dodecylbenzene sulfonic acid, and diisopropyl di(acetylacetonate)titanate to water, and stir evenly at a speed of 500 rpm to obtain a mixed solution; the mass ratio of the mixed powder, dodecylbenzene sulfonic acid, diisopropyl di(acetylacetonate)titanate, and water is 1:0.2:0.08:5.

[0051] (3) Add tin fluoride, polyvinyl pyrrolidone and acetone to water, stir evenly at 500 rpm to obtain a modified solution; the above ratio is 1:0.3:1:10; (4) Adding the modified liquid to the mixed liquid, stirring evenly at a speed of 500 rpm, ultrasonically treating at 400 W for 40 min, filtering, and finally heat treating at 600 ° C for 3 h to obtain an AITZO target; the mass ratio of the modified liquid to the mixed liquid is 0.4:1.

[0052] Comparative Example 4 A method for preparing an AITZO target material comprises the following steps: (1) Aluminum oxide, indium oxide, zinc oxide, and tin oxide are added and mixed uniformly to obtain a mixed powder; the mass ratio of the aluminum oxide, indium oxide, zinc oxide, and tin oxide is 1.5:50:35.5:13.

[0053] (2) Add the mixed powder, dodecylbenzene sulfonic acid, and diisopropyl di(acetylacetonate)titanate to water, and stir evenly at a speed of 500 rpm to obtain a mixed solution; the mass ratio of the mixed powder, dodecylbenzene sulfonic acid, diisopropyl di(acetylacetonate)titanate, and water is 1:0.2:0.08:5.

[0054] (3) Add silver particles, polyvinyl pyrrolidone and acetone to water, stir evenly at a speed of 500 rpm to obtain a modified solution; the above ratio is 1:0.3:1:10; (4) Adding the modified liquid to the mixed liquid, stirring evenly at a speed of 500 rpm, ultrasonically treating at 400 W for 40 min, filtering, and finally heat treating at 600 ° C for 3 h to obtain an AITZO target; the mass ratio of the modified liquid to the mixed liquid is 0.4:1.

[0055] Test Case The AITZO target was coated into a 50nm thick film using a fully automatic magnetron sputtering PVD coating apparatus.

[0056] The resistivity was tested using a four-probe resistivity tester.

[0057] The carrier mobility was tested using a Hall instrument.

[0058] Table 1

[0059] It can be seen from Table 1 that the AITZO target prepared by the present invention has excellent photoelectric properties.

[0060] Finally, it should be noted that the above embodiments are intended to illustrate the technical solution of the present invention rather than to limit the scope of protection of the present invention. Although the present invention has been described in detail with reference to the preferred embodiments, those skilled in the art should understand that the technical solution of the present invention may be modified or replaced by equivalents without departing from the essence and scope of the technical solution of the present invention.

Claims

1. A method for preparing an AITZO target, characterized in that: The following steps are involved: (1) Add aluminum oxide, indium oxide, zinc oxide and tin oxide and mix them evenly to obtain a mixed powder; (2) Add the mixed powder, dodecylbenzene sulfonic acid and titanate coupling agent into water and stir evenly to obtain a mixed solution; (3) adding tin fluoride, silver particles, polyvinyl pyrrolidone and acetone into water and stirring evenly to obtain a modified solution; (4) Add the modified liquid to the mixed liquid, stir evenly, perform ultrasonic treatment, filter, and heat treatment to obtain an AITZO target.

2. The method for preparing the AITZO target according to claim 1, characterized in that: The mass ratio of aluminum oxide, indium oxide, zinc oxide and tin oxide is (1-2): (48-52): (32-38): (12-15).

3. The method for preparing the AITZO target according to claim 1, characterized in that: The mass ratio of the mixed powder, sodium dodecylbenzene sulfonate, titanate coupling agent and water is 1: (0.1-0.25): (0.05-0.1): (3-6).

4. The method for preparing the AITZO target according to claim 3, characterized in that: The titanate coupling agent is di(acetylacetonato) diisopropyl titanate.

5. The method for preparing the AITZO target according to claim 1, characterized in that: The mass ratio of the tin fluoride, silver particles, polyvinyl pyrrolidone, acetone and water is 1: (0.8-1.2): (0.2-0.4): (0.5-2): (5-20).

6. The method for preparing the AITZO target according to claim 1, characterized in that: The mass ratio of the modified liquid to the mixed liquid is (0.2~0.5):

1.

7. The method for preparing the AITZO target according to claim 1, characterized in that: The power of the ultrasonic treatment is 300-500W, and the ultrasonic treatment time is 30-50min.

8. The method for preparing the AITZO target according to claim 1, characterized in that: The heat treatment temperature is 580-620° C., and the heat treatment time is 2-4 hours.

9. An AITZO target material, characterized in that: The method is prepared by any one of claims 1 to 8.

10. Use of the AITZO target material according to claim 9 in the preparation of solar cells.

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