Inspection connector

Abstract

The invention provides an inspection connector which is arranged between an inspection apparatus and a device to be inspected and is used for inspecting the device to be inspected. The connector includes first and second metal housings, an elastic shield portion, a conductive portion, and an insulating portion. The first metal housing has a first through-hole, and the second metal housing has a second through-hole. The elastic shield portion is disposed between the first metal case and the second metal case to electrically connect the first metal case and the second metal case. The conductive portion is disposed in the first through-hole and the second through-hole. The insulating portion is inserted into the first through hole and the second through hole. The insulating part surrounds the conductive part in the circumferential direction of the central axis of the through hole so that the conductive part is positioned coaxially with the central axis.

Description

Technical Field

[0001] The present invention relates to an inspection connector which is arranged between an inspection device and an inspected device and is used for inspecting the inspected device. Background Art

[0002] In order to inspect a device under test such as a semiconductor device, a connector disposed between an inspection device and the device under test is used. The connector used for inspecting the device under test electrically connects the inspection device to the device under test. Such connectors are known as single-pin spring connectors (pogo pins) or conductive rubber connectors. The conductive rubber connector has a conductive portion in which a plurality of conductive particles are assembled in the up-and-down direction.

[0003] It is necessary to inspect the high-frequency RF (radio frequency) characteristics of semiconductor devices used in mobile communication equipment. Conductive rubber connectors are thin and have better RF characteristics than single-pin spring connectors, so they are used for RF inspection of semiconductor devices. As an example, Japanese Patent Publication No. 2004-335450 proposes a connector that can be used for high-frequency RF characteristics inspection.

[0004] A conventional inspection connector for high-frequency RF characteristic inspection may have a structure in which a conductive part is coaxially arranged in a through hole of a single metal block and supported in the vertical direction by the single metal block. The conventional inspection connector utilizes a structure in which the conductive part is supported by a single metal block to prevent signal interference and crosstalk between the conductive parts.

[0005] When inspecting the device under inspection, when the terminal of the device under inspection presses the conductive part, the elastic deformation of the conductive part is constrained by the metal block, and the conductive part cannot be smoothly elastically deformed and cannot restore elasticity. Therefore, in the inspection connector of the prior art, the action of the conductive part is poor. In order to make the conductive part with poor action show an appropriate resistance value sufficient for inspection, the device under inspection must press the conductive part under strong pressure. However, strong pressure may cause damage to the device under inspection and damage to the conductive part.

[0006] When inspecting the device under inspection, if the terminal of the device under inspection cannot be aligned with the center of the conductive portion, the terminal of the device under inspection may also contact the metal block in a state of being offset from the center of the conductive portion. A single metal block cannot absorb or disperse the pressure applied by the device under inspection. If the terminal of the device under inspection deviates from the center of the conductive portion, the terminal of the device under inspection may be damaged by the metal block. Summary of the invention [Technical issues]

[0007] Embodiments of the present disclosure provide an inspection connector including a conductive portion with improved mobility to reduce pressure on an inspected device. Embodiments of the present invention provide an inspection connector that can absorb and disperse pressure applied by an inspected device to prevent damage to the inspected device. [Technical means to solve the problem]

[0008] An embodiment of the present disclosure relates to an inspection connector configured between an inspection device and an inspected device for inspecting the inspected device. According to one embodiment, the connector includes a first metal shell, a second metal shell, an elastic shielding portion, a conductive portion, and an insulating portion. The first metal shell has a first through hole, which penetrates in the up-down direction and has a central axis in the up-down direction. The second metal shell has a second through hole, which penetrates in the up-down direction in a manner coaxial with the central axis. The elastic shielding portion is configured to be configured between the first metal shell and the second metal shell so that the second metal shell is spaced apart from the first metal shell toward the top. The elastic shielding portion is configured to electrically connect the first metal shell to the second metal shell. The conductive portion is configured to be configured in the first through hole and the second through hole in the up-down direction, and can conduct electricity between the inspection device and the inspected device. The insulating portion is inserted into the first through hole and the second through hole. The insulating portion is configured to surround the conductive portion in the circumferential direction of the central axis, so that the conductive portion is positioned in a manner coaxial with the central axis.

[0009] In one embodiment, an air layer is formed between the first metal shell and the second metal shell which are spaced apart from each other, a portion of the outer peripheral surface of the insulating portion is exposed to the air layer, and the elastic shielding portion is arranged in the air layer.

[0010] In one embodiment, the air layer has a thickness defined by the thickness of the elastic shielding portion, and the thickness of the air layer may increase according to the thickness of the elastic shielding portion.

[0011] In one embodiment, the elastic shielding portion may include an elastic shielding column. The elastic shielding column is spaced apart from the outer circumferential surface of the insulating portion and is formed in a column shape, and electrically connects the first metal shell and the second metal shell.

[0012] In one embodiment, a plurality of conductive parts and a plurality of insulating parts may be disposed on the first metal shell and the second metal shell. At least one elastic shielding column may be disposed between two adjacent insulating parts.

[0013] In one embodiment, the elastic shielding post may have a circular, oval or cross-shaped cross section.

[0014] In one embodiment, the first through hole, the second through hole and the insulating portion may have a circular or elliptical cross-section, the elastic shielding column may have a circular, elliptical or cross-shaped cross-section, and the elastic shielding column with an elliptical cross-section may be arranged next to the insulating portion with an elliptical cross-section.

[0015] In one embodiment, the elastic shielding portion may include an elastic shielding sheet configured to electrically connect the first metal shell to the second metal shell and having an insertion hole that is larger than the diameter of the insulating portion and penetrates in the up-down direction.

[0016] In one embodiment, the elastic shielding part may include: a plurality of conductive substances, the plurality of conductive substances are conductively assembled in the up-down direction; and an elastic substance, which holds the plurality of conductive substances in the up-down direction. The conductive substance of the elastic shielding part may be any one of metal particles, carbon nanotubes, graphene, and wires.

[0017] In one embodiment, the elastic shielding portion may include: a conductive metal member including one of a conductive metal pin and a conductive spring that can be elastically compressed in the up-down direction; and an elastic substance that holds the conductive metal member in the up-down direction.

[0018] In one embodiment, when the conductive portion is located in the first through hole in a manner coaxial with the central axis, the conductive portion, the insulating portion, and the first metal shell may be integrated to form a conductive module.

[0019] In one embodiment, when the conductive portion is located in the second through hole in a manner coaxial with the central axis, the conductive portion, the insulating portion, and the second metal shell may be integrated to form a conductive module.

[0020] In one embodiment, the conductive part may include: a plurality of conductive materials that are conductively assembled in the vertical direction; and an elastic material that holds the plurality of conductive materials in the vertical direction. The conductive material of the conductive part may be any one of metal particles, carbon nanotubes, graphene, and wires.

[0021] In one embodiment, the insulating portion may include an elastic material of the conductive portion and may be formed integrally with the conductive portion.

[0022] In one embodiment, the conductive part may include: a conductive metal pin that can be elastically compressed in the up-down direction; and an elastic substance that holds the conductive metal pin in the up-down direction.

[0023] In one embodiment, the insulating part may include any one of silicone rubber, silicone rubber including a plurality of pores, fluorosilicone rubber, and polytetrafluoroethylene resin.

[0024] In one embodiment, the insulating portion may include: a first portion located in the first through hole; and a second portion engaged in the second through hole and having an outer diameter larger than that of the first portion and capable of contacting a terminal of the device under inspection.

[0025] In one embodiment, the first through hole may include: an upper through hole having an inner diameter larger than an outer diameter of the insulating portion; and a lower through hole having an inner diameter smaller than the upper through hole and for the insulating portion to fit in. The upper through hole may be formed to communicate with an air layer formed between the first metal shell and the second metal shell spaced apart from each other, and the elastic shielding portion is disposed in the air layer.

[0026] In one embodiment, the first metal shell may include: a first metal shell sheet having a lower through hole extending therethrough; and a second metal shell sheet stacked on the first metal shell sheet and having an upper through hole extending therethrough.

[0027] The connector of one embodiment may further include a third metal shell and an additional elastic shielding portion. The third metal shell has a third through hole that penetrates in the vertical direction in a manner coaxial with the central axis and is arranged above the second metal shell. The additional elastic shielding portion is arranged between the second metal shell and the third metal shell so that the third metal shell is spaced apart from the second metal shell in an upward direction. The additional elastic shielding portion is configured to electrically connect the second metal shell to the third metal shell. [Effects of the Invention]

[0028] In a connector according to an embodiment, the first metal shell and the second metal shell supporting the conductive part are separated by the elastic shielding part, and the first metal shell and the second metal shell are electrically connected through the elastic shielding part. Therefore, the first metal shell and the second metal shell and the elastic shielding part can act like one shell, thereby preventing signal interference and crosstalk between the conductive parts and maintaining good signal characteristics of the connector.

[0029] In the connector according to one embodiment, the elastic shield can elastically support the second metal shell relative to the first metal shell. Therefore, the second metal shell can remain floating from the first metal shell and absorb and disperse the pressure applied by the device under inspection.

[0030] In a connector according to an embodiment, the elastic shielding portion can separate the first metal shell and the second metal shell in the vertical direction, and form an air layer between the first metal shell and the second metal shell. Therefore, the area constraining the elastic deformation of the conductive portion can be reduced. Therefore, the operability of the conductive portion can be improved, and the pressure on the device under inspection can be reduced. BRIEF DESCRIPTION OF THE DRAWINGS

[0031] Figure 1An example of using the connector according to the embodiment of the present invention is schematically shown.

[0032] Figure 2 is a cross-sectional view showing a portion of a connector according to an embodiment.

[0033] Figure 3 It is shown Figure 2 A cutaway perspective view of a portion of a connector is shown.

[0034] Figure 4 It is shown Figure 2 An exploded cross-sectional view of a portion of a connector is shown.

[0035] Figure 5 1 is a plan view showing a first example of the conductive portion, the insulating portion, and the elastic shielding portion in the connector according to the embodiment.

[0036] Figure 6 1 is a plan view showing a second example of the conductive portion, the insulating portion, and the elastic shielding portion in the connector according to the embodiment.

[0037] Figure 7 1 is a plan view showing a third example of the conductive portion, the insulating portion, and the elastic shielding portion in the connector according to the embodiment.

[0038] Figure 8 1 is a plan view showing a fourth example of the conductive portion, the insulating portion, and the elastic shielding portion in the connector according to the embodiment.

[0039] Fig. 9 1 is a plan view showing a fifth example of the conductive portion, the insulating portion, and the elastic shielding portion in the connector according to the embodiment.

[0040] Fig.10 1 is a plan view showing a sixth example of the conductive portion, the insulating portion, and the elastic shielding portion in the connector according to the embodiment.

[0041] Fig.11 1 is a plan view showing an example of an elastic shield portion formed in a sheet shape in the connector according to the embodiment.

[0042] Fig.12 It is shown that Fig.11 A cross-sectional view of a portion of a connector showing an embodiment of a resilient shield is shown.

[0043] Fig.13 is a cross-sectional view showing a portion of a connector according to still another embodiment.

[0044] Fig.14 is a cross-sectional view showing a portion of a connector according to another embodiment.

[0045] Fig.15is a cross-sectional view showing a portion of a connector according to still another embodiment. DETAILED DESCRIPTION

[0046] The embodiments of the present invention are presented for the purpose of explaining the technical concept of the present invention. The scope of rights according to the present disclosure is not limited to the embodiments presented below or the specific description of these embodiments.

[0047] Unless otherwise defined, all technical terms and scientific terms used in this disclosure have the meanings commonly understood by those of ordinary skill in the art to which this disclosure belongs. All terms used in this disclosure are selected for the purpose of more clearly describing this disclosure, and are not selected for the purpose of limiting the scope of rights according to this disclosure.

[0048] Expressions such as “including,” “having,” and “having” used in the present disclosure should be understood as open-ended terms that have the possibility of including other embodiments, unless otherwise mentioned in a sentence or article containing the corresponding expression.

[0049] Unless otherwise mentioned, singular expressions described in the present disclosure may include a plural meaning, and the same applies to singular expressions recited in the claims.

[0050] The expressions “first”, “second”, etc. used in the present disclosure are used to distinguish a plurality of components from each other, and do not limit the order or importance of these components.

[0051] In the present disclosure, when it is mentioned that a certain constituent element is "connected" or "combined" to another constituent element, it should be understood that the above-mentioned certain constituent element can be directly connected or combined to the above-mentioned other constituent element, or can be connected or combined to the above-mentioned other constituent element through a new other constituent element as a medium.

[0052] The directional designation "upper" used in the present disclosure is based on the direction in which the connector is positioned relative to the inspection device, and the directional designation "lower" refers to the opposite direction of the upper direction. The directional designation "upper and lower directions" used in the present disclosure includes the upper direction and the lower direction, but it should be understood that it does not represent a specific direction of the upper direction and the lower direction.

[0053] The embodiments are described with reference to the examples shown in the accompanying drawings. In the accompanying drawings, the same reference numerals are given to the same or corresponding components. In addition, in the description of the following embodiments, repeated descriptions of the same or corresponding components may be omitted. However, even if the description of the relevant components is omitted, it does not mean that such components are not included in a certain embodiment.

[0054] The embodiments described below and the examples shown in the accompanying drawings are about an inspection connector (hereinafter referred to as a connector) used for inspection of an inspected device. When inspecting the inspected device, the connector of the embodiment can be configured between the inspection device and the inspected device for inspection of the inspected device. As an example, in a post-process in the manufacturing process of a semiconductor device, the connector of the embodiment can be used for the final inspection of the semiconductor device. However, the example of the inspection of the connector using the embodiment is not limited to the above inspection.

[0055] Referring to a diagram showing an example of using a connector according to an embodiment of the present invention Figure 1 . Figure 1 The shapes of the connector, the component to which the connector is attached, the inspection device, and the device to be inspected are schematically shown. Figure 1 The shape shown is just one example chosen for understanding the embodiments.

[0056] The connector 100 according to one embodiment is a sheet-like structure, and is arranged between the inspection device 20 and the device to be inspected 30. As an example, the connector 100 may constitute a test socket. The connector 100 is attached to the socket housing 40, and may be located on the inspection device 20 through the socket housing 40. The socket housing 40 may have a socket guide 41, and a receiving hole 42 may be formed in the socket guide 41 along the up-down direction VD. The socket housing 40 may be removably mounted on the inspection device 20 at the socket guide 41, and the connector 100 may be removably coupled to the socket guide 41. The device to be inspected 30 transported to the inspection device 20 by manual labor or a transport device is received in the receiving hole 42 of the socket housing, and the socket housing 40 aligns the device to be inspected 30 with the connector 100. When inspecting the device to be inspected 30, the connector 100 contacts the inspection device 20 and the device to be inspected 30 along the up-down direction VD, so that the inspection device 20 and the device to be inspected 30 are electrically connected to each other.

[0057] The device under inspection 30 may be a semiconductor device manufactured by encapsulating a semiconductor IC chip and a plurality of terminals into a hexahedral shape using a resin material. As an example, the device under inspection 30 may be a semiconductor device for a mobile communication device, but is not limited thereto. The device under inspection 30 may have a plurality of terminals 31 protruding from its lower surface. Figure 1 The terminal 31 of the device under inspection is shown as a ball type. The terminal 31 is not limited to the ball type, for example, it can be a land type or a pin type. In addition, the terminal 31 can include a terminal for signal transmission and a terminal for grounding.

[0058] The inspection device 20 can inspect the electrical characteristics and operation characteristics of the device under inspection 30. The inspection device 20 may have a board for performing inspection, and the board may be provided with an inspection circuit 21 for inspecting the device under inspection. In addition, the inspection circuit 21 has a plurality of terminals 22 electrically connected to the terminals of the device under inspection through the connector 100. The terminals 22 of the inspection device 20 can send test signals and can receive response signals.

[0059] When inspecting the device under inspection, the connector 100 electrically connects the terminals 31 of the device under inspection and the corresponding terminals 22 of the inspection device in the vertical direction VD, and the device under inspection 30 can be inspected by the inspection device 20 through the connector 100 .

[0060] The connector 100 may include metal shells 110, 120, a conductive part 140 and an insulating part 150. The metal shells 110, 120 are coupled to the socket guide 41 of the socket shell 40 and may be located in the horizontal direction HD. The metal shells 110, 120 may constitute a body of the connector in which the conductive part 140 is arranged along the vertical direction VD. As an example, the metal shells 110, 120 may be configured as two metal shells 110, 120 arranged vertically, and such two metal shells 110, 120 may be separated in the vertical direction VD by an elastic shielding part 130 arranged therebetween. In the connector 100, the conductive part 140 and the insulating part 150 may include elastic materials. The conductive part 140 is configured to be conductive in the vertical direction VD between the inspection device 20 and the device to be inspected 30. The conductive part 140 may contact the terminal 31 of the device to be inspected 30 at its upper end, and may contact the terminal 22 of the inspection device 20 at its lower end. The insulating portion 150 supports the conductive portion 140 in the up-down direction VD and insulates the conductive portion 140 from the metal housings 110 and 120 .

[0061] When inspecting the device 30 to be inspected, a pressure PF is applied to the device 30 to be inspected by a mechanical device or manually. Through the pressure PF, the terminal 31 of the device to be inspected and the conductive part 140 of the connector 100 can be in contact along the up-down direction VD, and the conductive part 140 of the connector 100 and the terminal 22 of the inspection device can be in contact along the up-down direction VD. As the terminal 31 of the device to be inspected, which is subjected to the pressure PF, presses the conductive part 140 downward, the conductive part 140 can be elastically deformed in a manner of being compressed downward and expanding in the horizontal direction. If the pressure PF is removed from the conductive part 140 of the connector, the conductive part 140 can restore its original shape.

[0062] The connector 100 may include a plurality of conductive parts 140 and a plurality of insulating parts 150 for insulating the conductive parts. The planar arrangement of the plurality of conductive parts 140 may vary depending on the arrangement of the terminals of the device under inspection 30. As an example, when the connector 100 is viewed from above, the plurality of conductive parts 140 may also be arranged in an array, a pair of or more arrays, or a zigzag shape.

[0063] To explain the connector according to the embodiment, refer to Figures 2 to 15 . Figures 2 to 15 The shapes of components of the connector are schematically shown. Figures 2 to 15 The shapes shown are merely examples chosen for the purpose of understanding the embodiments.

[0064] Figure 2 is a cross-sectional view showing a portion of a connector according to an embodiment of the present disclosure. Figure 3 It is shown Figure 2 A cutaway perspective view of a portion of the connector is shown, Figure 4 It is shown Figure 2 In order to explain the connector according to the embodiment, reference is made to Figures 2 to 4 .

[0065] The connector 100 according to the embodiment includes: metal shells 110 and 120, an elastic shielding portion 130 arranged between the metal shells 110 and 120, a conductive portion 140 configured to be conductive in the up-down direction VD, and an insulating portion 150 that supports the conductive portion 140 and insulates the conductive portion 140 from the metal shells 110 and 120.

[0066] The metal shells 110 and 120 are components for supporting the conductive part 140 in the vertical direction VD. The metal shells 110 and 120 may be formed in a thin flat plate shape and arranged in the horizontal direction HD orthogonal to the vertical direction VD. The metal material constituting the metal shells 110 and 120 may be aluminum or stainless steel, but is not limited thereto. In the connector 100, the metal shells 110 and 120 may include a first metal shell 110 and a second metal shell 120 spaced apart from the first metal shell 110 in an upward direction. The second metal shell 120 may have a thickness thinner than the thickness of the first metal shell 110 in the vertical direction.

[0067] The elastic shielding portion 130 is disposed between the first metal shell 110 and the second metal shell 120 so as to separate the second metal shell 120 upward from the first metal shell 110. The elastic shielding portion 130 may be in conductive contact with the upper surface of the first metal shell 110 and the lower surface of the second metal shell 120. Figure 3As shown, the elastic shielding portion 130 may be formed in a columnar shape. In the present disclosure, the elastic shielding portion formed in a columnar shape may be regarded as an elastic shielding pillar. Alternatively, as Fig.11 and Fig.12 As shown, the elastic shielding portion 130 may be formed in a sheet shape. In the present disclosure, the elastic shielding portion formed in a sheet shape may be regarded as an elastic shielding sheet.

[0068] The elastic shielding portion 130 is configured to have elasticity. Figure 1 When the second metal shell 120 is pressed toward the first metal shell 110 by the pressure PF shown in FIG. 1 , the elastic shielding portion 130 can elastically support the second metal shell 120 relative to the first metal shell 110. The second metal shell 120 can be supported by the elastic shielding portion 130 to be suspended from the first metal shell 110, and the connector 100 can absorb or disperse the above-mentioned pressure by the elastic force of the elastic shielding portion 130. For example, in a case where the terminal of the device under inspection presses the conductive portion 140 and the second metal shell 120 in a state offset from the center of the conductive portion 140, the second metal shell 120 can be elastically supported by the elastic shielding portion 130, and the above-mentioned pressure applied by the device under inspection can be absorbed or dispersed. Therefore, in a case where the center of the above-mentioned terminal of the device under inspection and the conductive portion 140 is offset, the above-mentioned terminal of the device under inspection can be prevented from being damaged by the interface between the second metal shell 120 and the conductive portion 140.

[0069] In addition, the elastic shielding part 130 is configured to have conductivity so as to electrically connect the first metal shell 110 and the second metal shell 120. In the connector 100, the first metal shell 110 and the second metal shell 120 can be used as a shielding area. For example, when a high-frequency signal test is performed on the device under inspection, the signal transmission in the conductive part may be disturbed by an electric field, a magnetic field, an electromagnetic wave, etc. Since the first metal shell 110 and the second metal shell 120 reflect most of the electromagnetic waves on their surfaces, the first metal shell 110 and the second metal shell 120 can be used as a shielding area in the connector. The first metal shell 110 and the second metal shell 120 are electrically connected through the elastic shielding part 130. Therefore, the first metal shell 110 and the second metal shell 120 and the elastic shielding part 130 can function as a shielding block, and can keep the signal transmission characteristics of the conductive part good.

[0070] In order to arrange the conductive part 140 in the first metal shell 110 and the second metal shell 120, the first metal shell 110 and the second metal shell 120 have a through hole penetrating in the up-down direction VD. The first metal shell 110 has a first through hole 111 penetrating in the up-down direction VD. The first through hole 111 may have a circular or elliptical cross section. A central axis CA passing through the center of the cross-sectional shape of such a first through hole and extending in the up-down direction may be defined in the first through hole 111. Therefore, the first through hole 111 has a central axis CA in the up-down direction VD. The second metal shell 120 has a second through hole 121 corresponding to the first through hole 111. The second through hole 121 penetrates the second metal shell 120 in the up-down direction in a manner coaxial with the central axis CA of the first through hole.

[0071] The conductive part 140 can not only conduct electricity in the up-down direction, but also be compressed and expanded by the pressure applied by the device under inspection. The conductive part 140 is arranged in the first through hole 111 and the second through hole 121 in the up-down direction VD in a manner coaxial with the central axis CA. The conductive part 140 is arranged in the first through hole 111 in a manner spaced apart from the inner circumference of the first through hole 111, and is arranged in the second through hole 121 in a manner spaced apart from the inner circumference of the second through hole 121. For example, the conductive part 140 is arranged so that the outer circumference of the conductive part is spaced apart from the inner circumference of the first through hole and the inner circumference of the second through hole in the outer diameter direction relative to the central axis CA. The conductive part 140 is configured to be able to conduct electricity in the up-down direction between the inspection device and the device under inspection, thereby performing signal transmission in the up-down direction VD between the inspection device and the device under inspection. The conductive part 140 may have a cylindrical shape extending in the up-down direction VD.

[0072] The conductive part 140 contacts the terminal of the device under inspection at its upper end and contacts the terminal of the inspection device at its lower end. Therefore, between the terminal of the device under inspection corresponding to one conductive part 140 and the terminal of the inspection device, a conductive path in the up-down direction is formed with the conductive part 140 as a medium. The test signal of the inspection device can be transmitted from the terminal of the inspection device to the terminal of the device under inspection through the conductive part 140, and the response signal of the device under inspection can be transmitted from the terminal of the device under inspection to the terminal of the inspection device through the conductive part 140.

[0073] The conductive portion 140 is disposed in the first through hole 111 and the second through hole 121 by the insulating portion 150. Figure 2 and Figure 3As shown in FIG. 1 , an insulating portion 150 is inserted into the first through hole 111 and the second through hole 121. The insulating portion 150 is configured to position the conductive portion 140 coaxially with the central axis CA in the first through hole 111 and the second through hole 121. In addition, the insulating portion 150 supports the conductive portion 140 in the up-down direction VD, so that the conductive portion 140 is insulated from the first metal shell 110 and the second metal shell 120.

[0074] The insulating portion 150 is disposed between the outer circumferential surface of the conductive portion 140 and the inner circumferential surface of the first through hole 111 and the inner circumferential surface of the second through hole 121. The insulating portion 150 is formed to fill the annular space formed between the inner circumferential surface of the first through hole 111 and the outer circumferential surface of the conductive portion 140 and the annular space formed between the inner circumferential surface of the second through hole 121 and the outer circumferential surface of the conductive portion 140. The insulating portion 150 may take a pipe shape corresponding to the annular space. The insulating portion 150 is formed to surround the conductive portion 140 along the circumferential direction CD relative to the central axis CA between the inner circumferential surface of the first through hole 111 and the outer circumferential surface of the conductive portion 140, and to surround the conductive portion 140 along the circumferential direction CD between the inner circumferential surface of the second through hole 121 and the outer circumferential surface of the conductive portion 140. The width of the insulating portion 150 in the outer diameter direction of the central axis CA may be constant along the circumferential direction CD. Therefore, the conductive portion 140 supported by the insulating portion 150 may be located coaxially with the central axis CA at the first through hole 111 and the second through hole 121 .

[0075] Reference Figure 2 and Figure 3 , an air layer 160 is formed between the first metal shell 110 and the second metal shell 120. The first metal shell 110 and the second metal shell 120 are spaced apart from each other in the up-down direction VD by the elastic shielding portion 130, so that the air layer 160 is formed between the first metal shell 110 and the second metal shell 120 in the horizontal direction HD. The elastic shielding portion 130 is disposed in the air layer 160. In addition, since the first metal shell 110 and the second metal shell 120 are spaced apart by the air layer 160, a portion of the outer peripheral surface of the insulating portion 150 is exposed in the air layer 160. The thickness of the air layer 160 in the up-down direction may be defined by the thickness of the elastic shielding portion 130 in the up-down direction. The connector 100 may include the elastic shielding portion 130 having various thicknesses in the up-down direction, and therefore, the spacing between the first metal shell 110 and the second metal shell 120 in the connector in the up-down direction may also be variously set. Therefore, in the embodiment of the connector, the thickness of the air layer 160 may increase according to the thickness of the elastic shielding part 130 in the up-down direction.

[0076] Since a portion of the outer peripheral surface of the insulating portion 150 is exposed in the air layer 160, the first metal shell 110 and the second metal shell 120 do not restrict the elastic expansion of the conductive portion 140 in the region where the air layer 160 is formed. When the above-mentioned pressure is applied to the conductive portion 140 through the device under inspection, at least a portion of the conductive portion 140 located in the air layer 160 can be compressed in the vertical direction and expanded in the horizontal direction without being restricted by the first metal shell 110 and the second metal shell 120. Therefore, when the device under inspection is inspected, when the conductive portion 140 is pressed by the above-mentioned pressure, the conductive portion 140 is elastically deformed smoothly, thereby having improved operability.

[0077] The dielectric constant of the area surrounding the conductive portion 140 in the circumferential direction CD along the central axis CA may affect the signal transmission performance of the conductive portion 140 and may affect the impedance matching between the inspection device and the device under inspection. The air layer 160 is filled with air, and the air may have a dielectric constant of about 1. Therefore, the area surrounding the conductive portion 140 in the circumferential direction CD has an extremely low dielectric constant due to the air layer 160, so the conductive portion 140 may have reduced signal loss and improved high-frequency characteristics, and may show better impedance matching.

[0078] For examples of materials constituting the conductive portion, the insulating portion, and the elastic shielding portion and examples of combinations of the components in the connector, refer to Figure 3 and Figure 4 . Figure 4 The components constituting the connector of the embodiment are simply shown separated.

[0079] The conductive part 140 may include a plurality of conductive materials 141 and an elastic material 142. The plurality of conductive materials 141 are conductively assembled into a column in the up-down direction VD, and adjacent conductive materials 141 can be conductively contacted in any direction. The assembly of the plurality of conductive materials 141 conductively assembled in the up-down direction serves as a conductor for performing signal transmission between the terminal of the inspection device and the terminal of the device to be inspected.

[0080] The conductive material 141 may be any one of metal particles, carbon nanotubes, graphene, and wires. Figure 4 An example of a conductive substance 141 in the shape of metal particles is shown. The metal particles may include a highly conductive metal material. Alternatively, the metal particles may be implemented in the form of a core including an elastic resin material or a metal material coated with a highly conductive metal material. In the case where the conductive portion 140 includes carbon nanotubes, graphene, or a wire, these substances are conductively assembled in the vertical direction VD, and adjacent substances can be conductively contacted in any direction.

[0081] The elastic material 142 is in a hardened state and has elasticity. The elastic material 142 holds the conductive material 141 along the up-down direction VD so that the conductive material 141 is assembled into a column. The conductive material 141 can be filled with the elastic material 142. The elastic material 142 and the conductive material 141 are formed as a whole to form the conductive part 140. The elastic material 142 may have insulation. As an example, the elastic material 142 may be hardened silicone rubber, but is not limited thereto.

[0082] The conductive part 140 including the elastic material 142 is elastic and can be elastically deformed in the vertical direction VD and the horizontal direction HD. When inspecting the device under inspection, the terminal of the device under inspection presses the conductive part 140 downward by pressure. In the pressurized state of the conductive part, the conductive part 140 can be elastically deformed to be compressed downward. If the above-mentioned pressure is removed, the conductive part 140 can elastically restore to its original shape (i.e., non-pressurized state) from the pressurized state. The conductive part 140 can be reversibly deformed into a non-pressurized state and a pressurized state.

[0083] The insulating part 150 may include an elastic material having insulating properties. As an example, the insulating part 150 may include any one of silicone rubber, silicone rubber including a plurality of pores, fluorosilicone rubber, or polytetrafluoroethylene resin (PTFE resin), but is not limited thereto.

[0084] The insulating part 150 positions the conductive part 140 coaxially to the first through hole 111 and the second through hole 121. As an example, the liquid elastic material forming the insulating part 150 is hardened to form a cylindrical insulating part, and a through hole can be formed in the cylindrical insulating part in the up-down direction by laser. Thereafter, the conductive part 140 is embedded in the above-mentioned through hole formed in the insulating part 150 in the up-down direction, so that the insulating part 150 that positions the conductive part 140 coaxially can be formed. As another example, the conductive part 140 and the insulating part 150 can be formed as one body by a molding mold. A liquid molding material mixed with the conductive material 141 and the liquid elastic material 142 can be injected into the molding mold. Thereafter, the conductive material 141 is gathered in the up-down direction by a magnetic field, so that the conductive part 140 can be molded. Thereafter, the liquid elastic material of the unmolded conductive part 140 is hardened, so that the insulating part 150 can be molded. Therefore, when the elastic material constituting the insulating portion 150 is the same as the elastic material constituting the conductive portion 140 , the insulating portion 150 includes the elastic material of the conductive portion 140 and can be formed integrally with the conductive portion 140 by a single molding die.

[0085] In the case where the insulating portion 150 includes a silicone rubber having a plurality of pores, the insulating portion 150 may be formed of liquid silicone rubber to which a foaming agent is added. As an example, when the insulating portion 150 is formed, the foaming agent reacts chemically with the liquid silicone rubber to generate gas. The generated gas squeezes out the liquid material from the liquid silicone rubber, and thus, the generated gas partially loses the liquid resin during the molding process of the insulating portion, thereby forming a plurality of pores having various sizes in the entire insulating portion. The insulating portion 150 including a plurality of pores may have a lower dielectric constant due to the pores than the dielectric constant of the insulating portion not including the pores.

[0086] In the case where the insulating portion 150 includes fluorosilicone rubber, the fluorosilicone rubber may be silicone rubber to which fluorine is added. The insulating portion 150 including the fluorosilicone rubber may have cold resistance. The insulating portion 150 including the fluorosilicone rubber may exhibit appropriate elastic restoring force when inspected at low temperatures.

[0087] As another example, the conductive part 140 may include a conductive metal pin that can be elastically compressed along the up-down direction VD and an elastic material of the conductive part that holds the conductive metal pin along the up-down direction VD. The conductive metal pin in this example is located in the up-down direction VD, so that the upper and lower ends of the conductive metal pin can contact the terminals of the device under inspection and the terminals of the inspection device, respectively. The conductive metal pin may have a curved portion that can be elastically deformed, for example, it may have an S shape or a U shape. In addition, the conductive metal pin may be formed by MEMS (Micro ElectroMechanical System) technology.

[0088] Figure 3 and Figure 4 The elastic shielding portion 130 including an elastic shielding column formed in a column shape is shown. The elastic shielding portion 130 may have a configuration similar to that of the conductive portion 140 .

[0089] The elastic shielding part 130 may include a plurality of conductive materials 131 and an elastic material 132. The plurality of conductive materials 131 are conductively assembled in a columnar shape along the vertical direction VD, and adjacent conductive materials 131 can be conductively contacted in any direction. The plurality of conductive materials 131 conductively assembled along the vertical direction electrically connect the first metal shell 110 and the second metal shell 120.

[0090] The conductive material 131 may be any one of metal particles, carbon nanotubes, graphene, and wires. Figure 4 An example of the conductive substance 131 having a metal particle shape is shown. The metal particles, carbon nanotubes, graphene, and wires constituting the elastic shielding portion 130 may be the same as those of the conductive portion 140 .

[0091] The elastic material 132 is in a hardened state and has elasticity. The elastic material 132 holds the conductive material 131 along the up-down direction VD so that the conductive material 131 is assembled into a column. The conductive material 131 can be filled with the elastic material 132. The elastic material 132 and the conductive material 131 are formed as a whole to form the elastic shielding part 130. As an example, the elastic material 132 can be hardened silicone rubber, but is not limited thereto.

[0092] The elastic shielding portion 130 including the elastic material 132 has elasticity and can be elastically deformed in the vertical direction VD and the horizontal direction HD. For example, when the second metal shell 120 is pressed by the pressure of the device under inspection, the second metal shell 120 is elastically supported by the elastic shielding portion 130, and the pressure can be absorbed or dispersed.

[0093] As another example, the elastic shielding portion 130 may include a conductive metal member that can be elastically compressed in the up-down direction VD and the elastic substance 132 that holds the conductive metal member in the up-down direction VD. The conductive metal member in this example may include a conductive metal pin or a conductive spring. The conductive metal pin constituting the elastic shielding portion may be the same as the conductive metal pin of the conductive portion. The conductive spring constituting the elastic shielding portion may take the form of a compressed coil spring and may be held in a cylindrical form by the elastic substance 132.

[0094] The elastic shielding part 130 may be integrally formed on the upper surface of the first metal shell 110 or the lower surface of the second metal shell 120. As an example, the first metal shell 110 having the first through hole 111 is prepared, and a liquid molding material formed by mixing the conductive material 131 and the liquid elastic material 132 constituting the elastic shielding part 130 may be partially applied to the upper surface of the first metal shell 110. Then, the liquid molding material is hardened, so that the elastic shielding part 130 can be formed on the upper surface of the first metal shell. As another example, the first metal shell 110 having the first through hole 111 is prepared, and a molding die having a through hole for molding the elastic shielding part may be disposed on the upper surface of the first metal shell 110. Then, the liquid molding material is injected into the through hole of the molding die and hardened, and the molding die is removed from the upper surface of the first metal shell 110, so that the elastic shielding part 130 can be formed on the upper surface of the first metal shell. When necessary for molding the elastic shielding portion 130 , a magnetic field for gathering the conductive substance 131 in the up-down direction may also be applied to the conductive substance 131 .

[0095] According to an embodiment of the connector, any one of the first metal shell 110 and the second metal shell 120, the conductive portion 140 and the insulating portion 150 may be pre-formed as one body to form a conductive module that performs a conductive function. The connector may also be manufactured by assembling or combining such a conductive module with other components of the connector.

[0096] As an example, the conductive part 140, the insulating part 150 and the first metal shell 110 may be formed into one piece in advance to form a conductive module. In this example, the conductive part 140 is located in the first through hole 111 of the first metal shell 110 in a coaxial manner with the central axis CA through the insulating part 150, and the above-mentioned conductive module of the conductive part, the insulating part and the first metal shell can be formed. For example, the first through hole 111 is formed in the first metal shell 110, and the conductive substance 141 and the liquid molding material containing the liquid elastic substance 142 can be injected into the first through hole 111. After that, a magnetic field can be applied to the conductive substance 141 to mold the conductive part 140, and the elastic substance 142 can be hardened to form the conductive part 140, the insulating part 150 and the first metal shell 110 into one piece. After the conductive module including the conductive part, the insulating part and the first metal shell is provided in advance, the conductive part 140 of the conductive module can be combined with the second through hole 121 of the second metal shell 120. The elastic shielding part 130 can also be formed in the first metal shell 110 in the conductive module or in the second metal shell 120 provided separately from the conductive module.

[0097] As another example, the conductive part 140, the insulating part 150 and the second metal shell 120 may be formed into one piece in advance to form a conductive module. In this example, the conductive part 140 is located in the second through hole 121 of the second metal shell 120 in a coaxial manner with the central axis CA through the insulating part 150, and the above-mentioned conductive module of the conductive part, the insulating part and the second metal shell can be formed. For example, the second through hole 121 is formed in the second metal shell 120, and the conductive substance 141 and the liquid molding material containing the liquid elastic substance 142 can be injected into the second through hole 121. Thereafter, a magnetic field can be applied to the conductive substance 141 to mold the conductive part 140, and the elastic substance 142 can be hardened to form the conductive part 140, the insulating part 150 and the second metal shell 120 into one piece. Alternatively, the cylindrical insulating portion 150 may be formed in the second through hole 121 by the liquid elastic material 142, the through hole may be formed in the cylindrical insulating portion 150, and the conductive portion 140 may be formed integrally with the insulating portion 150 without applying a magnetic field. After the conductive module including the conductive portion, the insulating portion, and the second metal shell is provided in advance, the conductive portion 140 of the conductive module may be combined with the first through hole 111 of the first metal shell 110. The elastic shielding portion 130 may also be formed in the second metal shell 120 in the conductive module or in the first metal shell 110 provided separately from the conductive module.

[0098] Figures 5 to 10 1 is a top view showing various examples of the conductive part, the insulating part and the elastic shielding part. Various examples of the conductive part, the insulating part and the elastic shielding part in various embodiments of the connector can be referred to Figures 5 to 10 . Figures 5 to 10 An elastic shielding column formed in a column shape is shown as an example of an elastic shielding portion. Figures 5 to 10 As shown, a plurality of conductive parts 140 and insulating parts 150 may be disposed in the first metal shell 110 and the second metal shell.

[0099] Reference Figures 5 to 7 , the conductive part 140 and the insulating part 150 may have a circular cross section, and the first through hole 111 of the first metal shell 110 and the second through hole of the second metal shell may have a circular cross section. The structures implemented by the conductive part 140 and the insulating part 150 may be arranged in an array form, and the first through hole 111 of the first metal shell 110 and the second through hole of the second metal shell may also be arranged in an array form. Alternatively, refer to Figure 6 The structures realized by the conductive part 140 and the insulating part 150 can be arranged in a zigzag shape, and the first through hole 111 of the first metal shell 110 and the second through hole of the second metal shell can also be arranged in a zigzag shape.

[0100] The elastic shielding column 133, which is an example of the elastic shielding portion 130, is formed in a pillar shape and is spaced apart from the outer peripheral surface of the insulating portion 150. Figures 5 to 7 As shown, at least one elastic shielding column 133 may be disposed between two adjacent insulating portions 150. The cross section of the elastic shielding column 133 may be circular or cross-shaped. Figure 7 As shown, when the elastic shielding column 133 has a cross-shaped cross section, the air layer (see Figure 2 and Figure 3 ) can be formed longer than the elastic shielding column having a circular cross section. Alternatively, the cross section of the elastic shielding column 133 can also have a polygonal shape such as a rectangle.

[0101] Reference Figures 8 to 10 The conductive part 140 and the insulating part 150 may have an elliptical cross section, and the first through hole 111 of the first metal shell 110 and the second through hole of the second metal shell may have an elliptical cross section. The structures including the conductive part 140 and the insulating part 150 may be arranged in an array form, and the first through hole 111 of the first metal shell 110 and the second through hole of the second metal shell may also be arranged in an array form.

[0102] Reference Fig.10 The conductive part 140 and the insulating part 150 may be arranged in a zigzag shape, and the first through hole 111 of the first metal shell 110 and the second through hole of the second metal shell may also be arranged in a zigzag shape. The conductive part 140 and the insulating part 150 having a circular cross section and the conductive part 140 and the insulating part 150 having an elliptical cross section may also be arranged at the same time. The first through hole of the first metal shell and the second through hole of the second metal shell may also have a circular shape and an elliptical shape.

[0103] In the case where the device under inspection has a pad-type terminal, the pad-type terminal may be formed in a flat and wide disk shape. In order to contact such a pad-type terminal, the conductive part 140 and the insulating part 150 may be formed to have an elliptical cross section.

[0104] The elastic shielding column 133 may have an elliptical cross section. Figure 8 The elastic shielding column 133 having an elliptical cross section may be disposed beside the conductive portion 140 and the insulating portion 150 having an elliptical cross section. Fig. 9 The elastic shielding column 133 having a cross-shaped cross section can be arranged beside the conductive portion 140 and the insulating portion 150 having an elliptical cross section. Fig.10 , with a ratio Figure 8The elastic shielding column 133 with a longer elliptical shape shown in the figure can be arranged beside the conductive part 140 and the insulating part 150 having an elliptical cross section. Fig.10 In a part of the connector where a conductive portion 140 having a circular cross-section and a conductive portion 140 having an elliptical cross-section are mixed, an elastic shielding column 133 having a circular cross-section can be arranged between a pair of conductive portions 140 having a circular cross-section, and an elastic shielding column 133 having an oblong cross-section can be arranged between a pair of conductive portions 140 having an oblong cross-section.

[0105] like Figures 5 to 10 As shown, in the embodiment of the connector, the number and shape of the elastic shielding columns can be variously determined. The number and shape of the elastic shielding columns can be variously determined by considering factors such as the size of the pressure applied to the device being inspected, the degree of compression of the connector due to the pressure, and the shielding performance of the conductive part. For example, in the case where a low level of shielding performance is required, the connector can use an elastic shielding column with a circular cross-section. In the case where a higher level of shielding performance than the above low level is required, the connector can use an elastic shielding column with an elliptical, oblong or cross-shaped cross-section. In addition, depending on the size of the pressure of the device being inspected and the degree of compression of the connector, the connector can use an appropriate number of elastic shielding columns between adjacent conductive parts.

[0106] Fig.11 is a plan view showing an example of an elastic shielding portion formed in a sheet shape, Fig.12 It is shown that Fig.11 1 is a cross-sectional view of a portion of a connector of an embodiment of an elastic shielding portion shown in FIG. As described above, the elastic shielding portion may include an elastic shielding sheet formed as a sheet. In this regard, reference is made to Fig.11 and Fig.12 .

[0107] The elastic shielding portion 130 includes an elastic shielding sheet 134 configured to electrically connect the first metal shell 110 and the second metal shell 120. The elastic shielding sheet 134 separates the second metal shell 120 from the first metal shell 110 upward and elastically supports the second metal shell 120 relative to the first metal shell 110. The elastic shielding sheet 134 formed as a sheet has a larger cross-sectional area than the cross-sectional area of ​​the elastic shielding column. Therefore, in the case where a high level of shielding performance is required for the connector, the elastic shielding sheet 134 can be used as the elastic shielding portion.

[0108] The elastic shield 130 has an insertion hole 135 penetrating in the vertical direction VD for inserting the insulating portion 150 and the conductive portion 140. The insertion hole 135 is larger than the diameter of the insulating portion 150. Therefore, an air layer 160 is formed between the insertion hole 135 and the outer peripheral surface of the insulating portion 150.

[0109] The elastic shielding sheet 134 may include a reference Figure 4 The conductive material 131 and the elastic material 132 described above. For example, a conductive elastic sheet is formed by a liquid molding material mixed with the conductive material 131 and the liquid elastic material 132, and an insertion hole 135 is formed in the conductive elastic sheet by laser, thereby forming the elastic shielding sheet 134. When the conductive elastic sheet is molded, a magnetic field may be applied if necessary to uniformly distribute the conductive material 131. The elastic shielding sheet 134 may be bonded to the upper surface of the first metal shell 110 or the lower surface of the second metal shell 120.

[0110] Fig.13 is a cross-sectional view showing a portion of a connector according to yet another embodiment. Fig.13 In the connector 100 shown, the elastic shielding portion 130 has a Figure 2 The thickness of the elastic shielding portion shown in FIG. 1 is thicker in the vertical direction. Figure 2 The thickness of the air layer shown is thicker in the vertical direction, and the distance between the first metal shell 110 and the second metal shell 120 is greater than Figure 2 The distances shown. Fig.13 The connector shown is more conducive to the pressure distribution of the device under inspection and the expansion of the conductive part in the horizontal direction due to the larger air layer 160.

[0111] Figure 2 The connector shown includes two metal shells spaced apart in the up-down direction and an elastic shielding portion disposed therebetween. An additional metal shell may be disposed above the metal shell located on the upper side, and an additional elastic shielding portion may also be disposed between the additional metal shell and the metal shell located on the upper side. Fig.14 .

[0112] Fig.14The connector 100 shown further includes a third metal shell 170 disposed above the second metal shell 120. The third metal shell 170 has a third through hole 171 that penetrates in the up-down direction VD in a manner coaxial with the center axis CA. The insulating portion 150 that positions the conductive portion 140 in a manner coaxial with the center axis CA is inserted into the third through hole 171. In addition, the connector 100 includes an additional elastic shielding portion 180, and the additional elastic shielding portion 180 is configured to electrically connect the second metal shell 120 and the third metal shell 170. The elastic shielding portion 180 is disposed between the second metal shell 120 and the third metal shell 170 so that the third metal shell 170 is spaced apart from the second metal shell 120 in an upward direction. In addition, the elastic shielding portion 180 elastically supports the third metal shell 170 relative to the second metal shell 120. The elastic shielding portion 180 can be configured in the same manner as the elastic shielding portion 130. As Fig.14 As shown, the connector 100 may include a plurality of metal shells, and an elastic shielding portion may be disposed between upper and lower adjacent metal shells among the plurality of metal shells.

[0113] The insulating portion may be formed into a shape other than a cylinder, the first through hole of the first metal shell may be formed to have a diameter larger than the diameter of the insulating portion, and the first metal shell may be formed into a laminated structure. Fig.15 .

[0114] Reference Fig.15 , the first metal shell 110 and the second metal shell 120 are separated from each other by the elastic shielding part 130. An air layer 160 is formed between the first metal shell 110 and the second metal shell 120 separated from each other, and the elastic shielding part 130 is arranged in the air layer 160. The conductive part 140 contacts the terminal of the device under inspection and the terminal of the inspection device to perform signal transmission. The connector 100 may include a device under inspection, a connector, and a conductive part 190 for grounding the inspection device. Fig.15 The sizes and arrangement forms of the conductive portion 140 for signal transmission and the conductive portion 190 for grounding shown are merely one example and may be changed according to the arrangement forms of the terminals of the device under inspection.

[0115] The insulating portion 150 may include a plurality of portions having different diameters. For example, the insulating portion may include a first portion 151 located in the first through hole 111 of the first metal shell 110 and a second portion 152 engaged in the second through hole 121 of the second metal shell 120. The second portion 152 has an outer diameter larger than that of the first portion 151. The second portion 152 may be formed in a flange-like shape on the insulating portion 150. When inspecting the device under inspection, the terminal of the device under inspection cannot contact the center of the conductive portion 140, so the terminal of the device under inspection may touch the second metal shell 120. The insulating portion 150 includes an elastic material and the second portion 152 has a larger outer diameter. Therefore, in a state where the terminal of the device under inspection cannot be aligned with the conductive portion 140, the terminal of the device under inspection may contact the second portion 152, so the second portion 152 of the insulating portion may prevent the terminal of the device under inspection from being damaged by the second metal shell 120. The first portion 151 of the insulating portion may be separated from the first through hole 111 of the first metal shell in the circumferential direction. The insulating portion 150 may include a third portion 153 formed at the lower end side of the insulating portion and having an outer diameter larger than that of the first portion 151. The third portion 153 of the insulating portion may be fitted into the first through hole 111 of the first metal shell.

[0116] The first through hole 111 of the first metal shell 110 may be formed to enhance the elastic deformation degree of the conductive part 140. Fig.15 As shown, the first through hole 111 may include an upper through hole 112 and a lower through hole 113 forming one through hole. The upper through hole 112 has an inner diameter larger than the outer diameter of the insulating portion 150 (or, an inner diameter larger than the first portion 151 of the insulating portion). The insulating portion 150 (or, the third portion 153 of the insulating portion) is fitted into the lower through hole 113. The lower through hole 113 has an inner diameter smaller than the upper through hole 112. The first metal shell 110 and the second metal shell 120 are spaced apart, and an air layer 160 is formed therebetween, so the upper through hole 112 is formed to communicate with the air layer 160. Since the upper through hole having a larger diameter than the insulating portion is formed on the periphery of the insulating portion 150 (or the first portion 151 of the insulating portion), the expansion of the conductive portion 140 in the horizontal direction is restrained, and elastic deformation can be achieved, and the elastic restoring force of the conductive portion 140 can be improved.

[0117] The first metal shell 110 may be formed as a laminate of two metal sheets. For example, the first metal shell 110 may include a first metal shell sheet 114 located at the lower side and a second metal shell sheet 115 laminated on the first metal shell sheet 114. A lower through hole 113 as a part of the first through hole is penetrated in the first metal shell sheet 114, and an upper through hole 112 as a part of the first through hole is penetrated in the second metal shell sheet 115. Since the first metal shell 110 is formed as a laminate of two metal sheets, the first metal shell 110 having the first through holes 111 with different diameters can be easily manufactured. A support film 116 that may include a polyimide resin may also be attached to the lower surface of the first metal shell (for example, the lower surface of the first metal shell sheet 114). The support film 116 may support the lower protrusions of the conductive portion 140 and the conductive portion 190, and may prevent a short circuit between the conductive portion 140 and the conductive portion 190.

[0118] The technical concept of the present disclosure is described above in conjunction with various embodiments and the examples shown in the accompanying drawings, but it should be understood that various substitutions, changes and modifications can be implemented without departing from the technical concept and scope of the present disclosure that can be understood by ordinary technicians in the technical field to which the present disclosure belongs. In addition, it should be understood that such substitutions, changes and modifications can all be included in the scope of the attached claims.

Claims

1. A connector, the connector being an inspection connector disposed between an inspection device and an inspected device, the connector comprising: a first metal shell, the first metal shell having a first through hole, the first through hole penetrating in the up-down direction and having a central axis in the up-down direction; a second metal shell, the second metal shell having a second through hole, the second through hole penetrating in the up-down direction in a manner coaxial with the central axis; an elastic shielding portion, the elastic shielding portion being arranged between the first metal shell and the second metal shell so as to separate the second metal shell upward from the first metal shell, and the elastic shielding portion being configured to electrically connect the first metal shell and the second metal shell; a conductive portion configured to be disposed in the first through hole and the second through hole along the up-down direction and capable of conducting electricity between the inspection device and the device under inspection; as well as An insulating portion is inserted into the first through hole and the second through hole, and is configured to surround the conductive portion in a circumferential direction of the central axis and position the conductive portion coaxially with the central axis.

2. The connector according to claim 1, wherein an air layer is formed between the first metal shell and the second metal shell which are spaced apart from each other, a portion of the outer peripheral surface of the insulating portion is exposed to the air layer, and the elastic shielding portion is arranged in the air layer. 3 . The connector according to claim 2 , wherein the air layer has a thickness defined by a thickness of the elastic shielding portion, and the thickness of the air layer can be increased according to the thickness of the elastic shielding portion.

4. The connector according to claim 1, wherein the elastic shielding portion comprises an elastic shielding column which is spaced apart from an outer peripheral surface of the insulating portion and is formed in a columnar shape and electrically connects the first metal shell and the second metal shell.

5. The connector according to claim 4, wherein a plurality of the conductive parts and a plurality of the insulating parts are arranged on the first metal shell and the second metal shell, and At least one of the elastic shielding columns is disposed between two adjacent insulating portions.

6. The connector according to claim 4, wherein the elastic shielding column has a circular, elliptical or cross-shaped cross section.

7. The connector according to claim 4, wherein the first through hole, the second through hole and the insulating portion have a circular or elliptical cross section, The elastic shielding column has a circular, elliptical or cross-shaped cross section, and The elastic shielding column having an elliptical cross section is arranged beside the insulating portion having an elliptical cross section.

8. The connector as claimed in claim 1, wherein the elastic shielding portion includes an elastic shielding sheet having an insertion hole having a diameter larger than that of the insulating portion and penetrating along the up-down direction, and the elastic shielding sheet is constructed to electrically connect the first metal shell with the second metal shell.

9. The connector according to claim 1, wherein the elastic shielding portion comprises: A plurality of conductive materials, wherein the plurality of conductive materials are conductively assembled along the up-down direction; and an elastic material that holds the plurality of conductive materials along the up-down direction. 10 . The connector according to claim 9 , wherein the conductive substance is any one of metal particles, carbon nanotubes, graphene, and wires.

11. The connector according to claim 1, wherein the elastic shielding portion comprises: A conductive metal member, the conductive metal member comprising one of a conductive metal pin and a conductive spring that can be elastically compressed in the up-down direction; and an elastic substance that holds the conductive metal member in the up-down direction.

12. The connector according to claim 1, wherein in a state where the conductive portion is located in the first through hole in a manner coaxial with the central axis, the conductive portion, the insulating portion, and the first metal shell are integrated to constitute a conductive module.

13. The connector according to claim 1, wherein in a state where the conductive portion is located in the second through hole in a manner coaxial with the central axis, the conductive portion, the insulating portion, and the second metal shell are integrally formed to constitute a conductive module.

14. The connector according to claim 1, wherein the conductive portion comprises: A plurality of conductive materials, wherein the plurality of conductive materials are conductively assembled along the up-down direction; and an elastic material that holds the plurality of conductive materials along the up-down direction. 15 . The connector according to claim 14 , wherein the conductive substance is any one of metal particles, carbon nanotubes, graphene, and wires.

16. The connector according to claim 14, wherein the insulating portion contains the elastic substance of the conductive portion and is formed integrally with the conductive portion.

17. The connector according to claim 1, wherein the conductive portion comprises: A conductive metal pin, wherein the conductive metal pin can be elastically compressed along the up-down direction; and an elastic material, the elastic material holding the conductive metal pin along the up-down direction.

18. The connector according to claim 1, wherein the insulating portion comprises any one of silicone rubber, silicone rubber including a plurality of pores, fluorosilicone rubber, and polytetrafluoroethylene resin.

19. The connector of claim 1, wherein the insulating portion comprises: a first portion, the first portion being located in the first through hole; and a second portion that fits into the second through hole and has an outer diameter larger than that of the first portion and is capable of contacting a terminal of the device under inspection.

20. The connector according to claim 1, wherein the first through hole comprises: an upper through hole having an inner diameter greater than an outer diameter of the insulating portion; and a lower through hole having a smaller inner diameter than the upper through hole and in which the insulating portion is fitted, The upper through hole is formed to communicate with an air layer formed between the first metal shell and the second metal shell that are spaced apart from each other and the elastic shielding portion is arranged in the air layer.

21. The connector according to claim 20, wherein the first metal shell comprises: a first metal shell sheet through which the lower through hole penetrates; and a second metal shell sheet stacked on the first metal shell sheet and through which the upper through hole penetrates.

22. The connector of claim 1, further comprising: a third metal shell having a third through hole penetrating in the up-down direction in a manner coaxial with the central axis, and arranged above the second metal shell; and an additional elastic shielding portion, the additional elastic shielding portion being disposed between the second metal shell and the third metal shell so as to separate the third metal shell upward from the second metal shell, and the additional elastic shielding portion being configured to electrically connect the second metal shell to the third metal shell; The insulating portion is inserted into the third through hole.

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