Micropore internal illumination and imaging system

Abstract

The invention relates to a micropore internal illumination and imaging system, which comprises an optical illumination part and an optical imaging part, and is characterized in that the optical illumination part comprises an electrodeless laser driving point light source, a collimating lens, a semi-transparent and semi-reflective lens and a coupling system; the electrodeless laser driving point light source is used for generating an illumination light source; the collimating lens is used for collimating the illumination light source to form a collimated light beam; the semi-transparent and semi-reflective lens is arranged on a light path of the collimated light beam and is used for reflecting the collimated light beam to form a reflected light beam; the coupling system is arranged on a light path of the reflected light beam and is used for focusing the reflected light beam to form a focused light beam coupled into the micropore; and the optical imaging part is arranged on a light path of a transmission light beam of the semi-transmitting and semi-reflecting lens and is used for carrying out optical imaging on optical information in the micropore transmitted by the coupling system and the semi-transmitting and semi-reflecting lens. According to the system, a point light source can be coupled into the interior of the micropore, the interior of the micropore is illuminated, and optical information in the micropore is comprehensively presented.

Description

Technical Field

[0001] The invention belongs to the technical field of optical illumination and optical imaging, and in particular relates to a micro-hole internal illumination and imaging system. Background Art

[0002] With the development of science and technology, people have higher and higher requirements for optical lighting and optical imaging in narrow spaces or cavities. For example, in the medical field, doctors hope to have a medical optical device that can be inserted into the human body cavity and organs for direct observation, diagnosis, and treatment; in the field of ultra-precision machining, engineers hope to have an optical detection device that can directly determine whether a micropore is penetrated and measure the micropore aperture.

[0003] Currently, there is an optical endoscope based on micro-hole internal lighting and imaging. It is composed of precision mechanical devices and high-precision test targets as its precision optical instrument part. Through the optical endoscope, medical personnel can directly observe the lesion site, collect diseased tissues, and remove lesion mutations. It has the advantages of wide field of view, convenient operation, and less trauma. Engineers can also use endoscopes to observe and detect the processing quality of ultra-precision machined small holes.

[0004] However, optical endoscopes still have great application shortcomings. One is the contact-based observation and measurement method, which can easily cause damage to the target object. The other is that the current minimum cross-sectional size of the endoscope probe is about 1mm*1mm, which is incapable of optical detection of tiny cavities or micropores (with a diameter less than 1.0mm). Summary of the invention

[0005] In order to solve the above problems existing in the prior art, the present invention provides a micro-hole internal lighting and imaging system. The technical problem to be solved by the present invention is achieved by the following technical solutions:

[0006] The embodiment of the present invention provides a micro-hole internal lighting and imaging system, including: an optical lighting part and an optical imaging part, wherein the optical lighting part includes: an electrodeless laser driven point light source, a collimating lens, a semi-transparent and semi-reflective lens and a coupling system, wherein:

[0007] The electrodeless laser driven point light source is used to generate an illumination light source;

[0008] The collimating lens is arranged on the optical path of the illumination light source, and is used to collimate the illumination light source to form a collimated light beam;

[0009] The semi-transparent and semi-reflective lens is arranged on the optical path of the collimated light beam, and is used to reflect the collimated light beam to form a reflected light beam;

[0010] The coupling system is arranged on the optical path of the reflected light beam, and is used to focus the reflected light beam to form a focused light beam coupled into the interior of the microhole, so as to realize internal illumination of the microhole;

[0011] The optical imaging part is arranged on the optical path of the transmission light beam of the semi-transparent and semi-reflective lens, and is used for optically imaging the optical information inside the micro-hole transmitted through the coupling system and the semi-transparent and semi-reflective lens.

[0012] In one embodiment of the present invention, the spot size of the focused light beam is proportional to the focal length ratio between the coupling system and the collimating lens.

[0013] In one embodiment of the present invention, the focal length ratio between the coupling system and the collimating lens is 0.1-10.

[0014] In one embodiment of the present invention, the spot diameter of the focused light beam is 0.10-1.0 mm.

[0015] In one embodiment of the present invention, the electrodeless laser-driven point light source includes a laser-driven white light source.

[0016] In one embodiment of the present invention, the cross-sectional diameter of the laser-driven white light source is less than or equal to 1 mm, the power is 1 to 2 W, and the power density is greater than or equal to 1.5×10 7 W / m 2 , the spectral width is 190~2500nm.

[0017] In one embodiment of the present invention, the geometric shape of the laser-driven white light source includes a first ellipsoid, and the diameter of the cross section where the short axis of the first ellipsoid is located is less than or equal to 1 mm;

[0018] The geometric shape of the focused light beam comprises a second ellipsoid, and the diameter of the cross section where the short axis of the second ellipsoid is located is 0.10-1.0 mm.

[0019] In one embodiment of the present invention, the optical imaging part includes: a primary imaging lens, a pinhole aperture, a secondary imaging lens, and an image acquisition device, wherein:

[0020] The primary imaging lens is arranged on the optical path of the transmitted light beam, and is used to image the optical information inside the micro-hole that is initially imaged by the coupling system and transmitted by the semi-transparent and semi-reflective lens, to obtain a primary imaging light beam;

[0021] The pinhole aperture is arranged at the imaging position of the primary imaging beam, and is used to filter out interference signals other than the micro-aperture in the primary imaging beam to obtain a filtered beam;

[0022] The secondary imaging lens is arranged on the light beam of the filtered light beam, and is used to perform secondary imaging on the filtered light beam to obtain a secondary imaging light beam;

[0023] The image acquisition device is arranged at the imaging position of the secondary imaging light beam, and is used to acquire the image formed by the secondary imaging light beam to realize the internal imaging of the micropore.

[0024] In one embodiment of the present invention, the optical imaging part further includes a polarizer, which is arranged between the pinhole aperture and the secondary imaging lens to eliminate reflections inside the microholes in the filtered light beam.

[0025] In one embodiment of the present invention, the imaging magnification of the optical imaging part is greater than or equal to 3 times.

[0026] Compared with the prior art, the present invention has the following beneficial effects:

[0027] 1. The present invention utilizes an electrodeless laser driven point light source to generate an illumination light source, and couples the illumination light source into the interior of a micropore through transmission by a collimating lens and a coupling system to realize illumination. On the one hand, the non-contact illumination method can avoid damage to the measured micropore by the instrument. On the other hand, the electrodeless laser driven point light source is a high-intensity, high-brightness point light source with very low coherence, and no diffraction or interference occurs during the illumination process. Therefore, the light can be transmitted into the interior of the micropore through the collimation of the collimating lens and the focusing of the coupling system, illuminating the interior of the micropore and fully presenting the optical information inside the micropore, thereby realizing illumination and imaging inside the micropore.

[0028] 2. The present invention can change the spot size of the focused beam by adjusting the focal length ratio of the coupling system and the collimating lens, that is, the spot size of the focused beam can be large or small, thereby realizing illumination and imaging inside microholes of different sizes;

[0029] 3. The imaging system of the present invention first uses the coupling system for preliminary imaging, then uses the primary imaging lens for primary imaging, and finally uses the secondary imaging system for secondary imaging. This structure can achieve a higher imaging magnification and improve imaging clarity.

[0030] 4. The aperture of the present invention adopts a small hole aperture, which can filter out interference signals outside the micropore, making the optical imaging clearer and with higher contrast;

[0031] 5. The present invention arranges a polarizer between the aperture and the secondary imaging lens, and the polarizer can eliminate strong reflections and improve imaging quality. BRIEF DESCRIPTION OF THE DRAWINGS

[0032] Figure 1 A schematic diagram of the structure of a micro-hole internal illumination and imaging system provided by an embodiment of the present invention;

[0033] Figure 2a-2b A schematic diagram comparing focusing conditions of different light sources provided by an embodiment of the present invention;

[0034] Figure 3 A schematic diagram of the structure of an optical imaging part provided by an embodiment of the present invention;

[0035] Figure 4a-4c A schematic diagram of the internal illumination and imaging effects of a microhole provided in an embodiment of the present invention. DETAILED DESCRIPTION

[0036] The present invention is further described in detail below with reference to specific embodiments, but the embodiments of the present invention are not limited thereto.

[0037] Embodiment 1

[0038] See also Figure 1 , Figure 1 A schematic structural diagram of a micro-hole internal illumination and imaging system provided in an embodiment of the present invention.

[0039] The micro-hole internal illumination and imaging system of this embodiment is suitable for tiny cavities or micro-holes with a diameter less than 1.0 mm, and includes: an optical illumination part and an optical imaging part. The optical illumination part includes: an electrodeless laser driven point light source 1, a collimating lens 2, a semi-transparent and semi-reflective lens 3 and a coupling system 4. Among them, the electrodeless laser driven point light source 1 is used to generate an illumination light source; the collimating lens 2 is arranged on the optical path of the illumination light source, and is used to collimate the illumination light source to form a collimated light beam; the semi-transparent and semi-reflective lens 3 is arranged on the optical path of the collimated light beam, and is used to reflect the collimated light beam to form a reflected light beam; the coupling system 4 is arranged on the optical path of the reflected light beam, and is used to focus the reflected light beam to form a focused light beam coupled into the micro-hole, so as to realize the illumination inside the micro-hole; the optical imaging part is arranged on the optical path of the transmitted light beam of the semi-transparent and semi-reflective lens 3, and is used to optically image the optical information inside the micro-hole transmitted through the coupling system 4 and the semi-transparent and semi-reflective lens 3.

[0040] Specifically, the electrodeless laser driven point light source 1 is a composite point light source generated by an electrodeless laser driving technology, having a high power density, an ultra-wide spectrum and ultra-high brightness within a wavelength range.

[0041] In a specific embodiment, the electrodeless laser-driven point light source 1 comprises a laser-driven white light source (LDLS).

[0042] Specifically, the cross-sectional diameter of the laser-driven white light source is less than or equal to 1 mm, the power is 1 to 2 W, and the power density is greater than or equal to 1.5×10 7 W / m 2 , the spectral width is 190~2500nm.

[0043] Further, the geometric shape of the laser-driven white light source includes a first ellipsoid, and the diameter of the cross section where the short axis of the first ellipsoid is located is less than or equal to 1 mm. It can be understood that the cross section where the short axis of the first ellipsoid is located is a circle, and the diameter of the circle is the cross-sectional diameter of the laser-driven white light source, and the diameter of the circle is less than 1.0 mm. Exemplarily, the cross-sectional diameter of the laser-driven white light source is 0.2 mm, and the power is 1.2 W.

[0044] See also Figure 2a-2b , Figure 2a-2b A schematic diagram comparing focusing conditions of different light sources provided by an embodiment of the present invention, wherein: Figure 2a Schematic diagram of the focusing of a laser-driven white light source. Figure 2b Schematic diagram of the focusing situation of an ordinary light source.

[0045] Common light sources include incandescent lamps, mercury lamps, halogen lamps, LED lamps, etc. These light sources emit light by exciting gas discharge through electrode pressure. They have the characteristics of too large a light-emitting surface, too wide a spectrum, and low power density. The shape and size of the focal spot formed after collimation and focusing are basically the same as the light-emitting surface. The diameter of this light spot is usually relatively large, such as Figure 2b As shown in the figure, it is difficult to focus or couple into the microhole, and only a small part of the light entering the small hole returns. The laser-driven white light source (LDLS) uses electrodeless laser driving technology to heat the xenon plasma to a sufficient temperature through an external laser light source. It is a composite point light source with wide spectrum, high brightness and low coherence characteristics. After focusing and coupling, its light spot is still a point light source, such as Figure 2a As shown, it can be coupled into a micropore with a diameter less than 1 μm, which can maximize the visual characteristics of the micropore and can operate stably for a long time.

[0046] Specifically, the collimating lens 2 is used to collimate the illumination light source generated by the electrodeless laser driven point light source 1 to ensure the lowest loss of the light source during the propagation process. In the optical illumination part, the semi-transparent and semi-reflective lens 3 is used to transmit the illumination light source to the light source coupling system 4. The coupling system 4 can use a coupling lens to focus the illumination light source and couple the light source into the microhole to realize the illumination inside the microhole.

[0047] Specifically, the spot size of the focused beam is proportional to the focal length ratio between the coupling system 4 and the collimating lens 2. That is, the larger the focal length ratio between the coupling system 4 and the collimating lens 2, the larger the spot size of the focused beam; the smaller the focal length ratio between the coupling system 4 and the collimating lens 2, the smaller the spot size of the focused beam. For example, a focused beam with a cross-sectional diameter of 0.1 mm, after being transmitted through the coupling system 4 and the collimating lens 2 with a focal length ratio of 1:1, has a spot diameter of 0.1 mm; after being transmitted through the coupling system 4 and the collimating lens 2 with a focal length ratio of 0.5:1, the spot diameter is 0.05 mm.

[0048] According to the cross-sectional diameter of the laser-driven white light source being less than 1 mm, and the point light source generated by the laser-driven white light source needs to be coupled into a micro-hole with a diameter less than or equal to 1 mm, the focal length ratio between the coupling system 4 and the collimating lens 2 can be set to 0.1 to 10. At this time, the spot diameter of the focused light beam is 0.10 to 1.0 mm.

[0049] The present invention can change the spot size of the focused light beam by adjusting the focal length ratio of the coupling system and the collimating lens, that is, the spot size of the focused light beam can be large or small, thereby realizing illumination and imaging inside microholes of different sizes.

[0050] Furthermore, the illumination light source is a point light source, and the focused light beam after collimation and focusing is also a point light source. It can be understood that the geometric shape of the point light source generated by the laser-driven white light source (LDLS) is a first ellipsoid, and after collimation and focusing, the geometric shape of the focused light beam includes a second ellipsoid, and the diameter of the cross section where the short axis of the second ellipsoid is located is 0.10 to 1.0 mm. It can be understood that the shape of the cross section where the short axis of the second ellipsoid is located is circular, and the spot diameter is the diameter of the circle, and the circular diameter is 0.10 to 1.0 mm; that is, the micro-hole internal illumination and imaging system of this embodiment can focus the spot diameter of the high-intensity point light source to a range of 0.10 mm to 1.0 mm.

[0051] In a specific embodiment, the optical imaging part includes: a primary imaging lens 5, a pinhole diaphragm 6, a secondary imaging lens 7, and an image acquisition device 8, wherein the primary imaging lens 5 is arranged on the optical path of the transmitted light beam, and is used to image the optical information inside the micropore that is initially imaged by the coupling system 4 and transmitted by the semi-transparent and semi-reflective lens 3, so as to obtain a primary imaging beam; the pinhole diaphragm 6 is arranged at the imaging position of the primary imaging beam, and is used to filter out interference signals other than the micropore in the primary imaging beam, so as to obtain a filtered beam; the secondary imaging lens 7 is arranged on the light beam of the filtered beam, and is used to perform secondary imaging on the filtered beam, so as to obtain a secondary imaging beam; the image acquisition device 8 is arranged at the imaging position of the secondary imaging beam, and is used to acquire the image formed by the secondary imaging beam, so as to realize imaging inside the micropore.

[0052] See also Figure 3 , Figure 3 A schematic structural diagram of the optical imaging part provided in an embodiment of the present invention.

[0053] Specifically, after the focused light beam illuminates the inside of the microhole, the coupling system 4 is also used to preliminarily image the optical information inside the microhole, and the semi-transparent and semi-reflective lens 3 is also used to transmit the preliminarily imaged optical information to the subsequent imaging part. It can be understood that the coupling system 4 and the semi-transparent and semi-reflective lens 3 are used for both the optical illumination part and the optical imaging part.

[0054] The primary imaging lens 5 images the optical information transmitted by the semi-transparent and semi-reflective lens 3 to the aperture position a of the pinhole diaphragm 6, and can also lock the internal information of the micropore at the aperture position a of the pinhole diaphragm 6; the primary imaging lens 5 can adopt a single lens or a cemented lens; through the setting of the primary imaging lens 5, problems such as astigmatism, distortion and chromatic aberration can be optimized. The pinhole diaphragm 6 can filter out the interference information outside the micropore. The secondary imaging lens 7 can image the optical information at the aperture position a of the pinhole diaphragm 6 on the image acquisition device 8. The image acquisition device 8 can adopt a color array camera with a resolution of 2448*2048pixel, which is conducive to observing and detecting the quality of ultra-precision machined micropores.

[0055] In a specific embodiment, the optical imaging part further includes a polarizer 9, which is disposed between the pinhole aperture 6 and the secondary imaging lens 7 to eliminate reflections inside the micro-apertures in the filtered light beam.

[0056] This embodiment uses a primary imaging lens, which can lock the image of the observation area at the aperture position a of the pinhole diaphragm. Even if the imaging position is not fixed (the imaging position differs from the aperture position of the pinhole diaphragm by 1 to 2 mm), after passing through the primary imaging lens, the image of the target area will be locked within a certain range. A high-magnification secondary imaging lens is used later, and its depth of field is also ≧1mm, which can well perform optical imaging of the inside of the micro-hole. Further, by setting the focal length of the coupling system 4, the focal length of the primary imaging lens 5, and the magnification of the secondary imaging lens 7, the optical imaging resolution of the entire system can be controlled, and the imaging magnification of the optical imaging part of the entire system is greater than or equal to 3 times, that is, β≧3.

[0057] The imaging system of this embodiment first uses the coupling system for preliminary imaging, then uses the primary imaging lens for primary imaging, and finally uses the secondary imaging system for secondary imaging. This structure can achieve a higher imaging magnification and improve imaging clarity.

[0058] The pinhole diaphragm introduced in this embodiment can filter out interference information outside the micropore. In the process of coupling the white light source into the micropore, due to the different depths of the micropores, not 100% of the white light can be coupled into the micropore. 0-40% of the white light will shine on the micropore mouth and the sample surface and scatter. These scattered lights will be presented in the camera image through the optical imaging system, causing blurred imaging and reduced contrast. The primary imaging lens will lock the optical information in the light path near the aperture position a of the pinhole diaphragm. The pinhole diaphragm can cleverly filter out interference signals outside the micropore, making the optical imaging clearer and with higher contrast. Specifically, the pinhole diaphragm 6 is continuously adjustable from 0.3mm to 3mm.

[0059] The working principle of the micro-hole internal illumination and imaging system of this embodiment is as follows: the laser drives the white light source LDLS to generate an ultra-wide spectrum illumination light source, which is a point light source with a divergence angle of 360°. The light emitted by the point light source is transmitted to the semi-transparent and semi-reflective mirror through the collimating lens, and then enters the coupling lens, and finally coupled into the micro-hole. The optical information inside the micro-hole first enters the primary imaging lens through the coupling lens and the semi-transparent and semi-reflective mirror, is locked and imaged at position a, and then is imaged onto the color array camera through the pinhole aperture, polarizer, and secondary imaging lens.

[0060] When ultra-precision machined micro-holes are not cleaned, there are often a large number of residual particles inside, which will cause strong reflections. In this embodiment, a polarizer is added behind the pinhole aperture. The polarizer can eliminate the strong reflections inside the micro-hole. The combination of the pinhole aperture and the polarizer optimizes the imaging quality, making the optical imaging clearer, with higher contrast and eliminating strong reflections.

[0061] Furthermore, in this embodiment, the focal length of the collimating lens 2 is 100 mm, the focal length of the coupling system 4 is 50 mm, the semi-transparent and semi-reflective lens 3 has a transmittance of 50% and a reflectance of 50%, the focal length of the primary imaging lens 5 is 100 mm, the polarizer 9 is a visible light polarizer, and the magnification of the secondary imaging lens 7 is 1.5 times. For example, the illumination and imaging test is performed on a micro-hole with a diameter of 0.3 mm and an aspect ratio of ≧10:1. The test results are shown in FIG. Figure 4a-4c , Figure 4a-4c A schematic diagram of the micropore internal illumination and imaging effect provided by an embodiment of the present invention, wherein: Figure 4a and Figure 4b This is the image of the bottom of the microwell. Figure 4c Take an image of the bottom portion being penetrated.

[0062] Depend on Figure 4a and Figure 4b It can be seen that Figure 4a The bottom diameter of the micropores is larger. Figure 4b The bottom diameter of the micropores is small. Figure 4cThe bottom of the micropore is half penetrated and half not penetrated. After illumination and imaging by the micropore internal illumination and imaging system of this embodiment, image information of the micropore can be seen, and it can be clearly judged whether the micropore is penetrated. Further, by combining the parameters of each component in the system and the size of the imaged image, the image can be calibrated, so as to measure the diameter of the micropore.

[0063] This embodiment uses an electrodeless laser to drive a point light source to generate an illumination light source, and couples the illumination light source into the interior of the micropore to achieve illumination through transmission through a collimating lens and a coupling system. On the one hand, the use of a non-contact illumination method can prevent the instrument from causing damage to the micropore being measured. On the other hand, the electrodeless laser driven point light source is a high-intensity, high-brightness point light source with a wide emission wavelength range from vacuum ultraviolet to visible light and near infrared (190nm to 2500nm), which is composite light with very low coherence and high power without damaging the interior of the micropore. No diffraction or interference occurs during the illumination process, so that it can be transmitted into the interior of the micropore after being collimated by the collimating lens and focused by the coupling system, illuminating the interior of the micropore and fully presenting the optical information inside the micropore, thereby achieving illumination and imaging inside the micropore.

[0064] The above contents are further detailed descriptions of the present invention in combination with specific preferred embodiments, and it cannot be determined that the specific implementation of the present invention is limited to these descriptions. For ordinary technicians in the technical field to which the present invention belongs, several simple deductions or substitutions can be made without departing from the concept of the present invention, which should be regarded as falling within the protection scope of the present invention.

Claims

1. A micro-hole internal illumination and imaging system, characterized in that: include: An optical illumination part and an optical imaging part, wherein the optical illumination part comprises: an electrodeless laser driven point light source (1), a collimating lens (2), a semi-transparent and semi-reflective lens (3) and a coupling system (4), wherein: The electrodeless laser driven point light source (1) is used to generate an illumination light source; The collimating lens (2) is arranged on the optical path of the illumination light source and is used to collimate the illumination light source to form a collimated light beam; The semi-transparent and semi-reflective lens (3) is arranged on the optical path of the collimated light beam and is used to reflect the collimated light beam to form a reflected light beam; The coupling system (4) is arranged on the optical path of the reflected light beam and is used to focus the reflected light beam to form a focused light beam that is coupled into the interior of the microhole, thereby realizing internal illumination of the microhole; The optical imaging part is arranged on the optical path of the transmission light beam of the semi-transparent and semi-reflective lens (3) and is used to perform optical imaging on the optical information inside the micro-hole transmitted through the coupling system (4) and the semi-transparent and semi-reflective lens (3).

2. The micro-hole internal illumination and imaging system according to claim 1, characterized in that: The spot size of the focused light beam is proportional to the focal length ratio between the coupling system (4) and the collimating lens (2).

3. The micro-hole internal illumination and imaging system according to claim 1, characterized in that: The focal length ratio between the coupling system (4) and the collimating lens (2) is 0.1-10.

4. The micro-hole internal illumination and imaging system according to claim 1, characterized in that: The spot diameter of the focused light beam is 0.10-1.0 mm.

5. The micro-hole internal illumination and imaging system according to claim 1, characterized in that: The electrodeless laser-driven point light source (1) comprises a laser-driven white light source.

6. The micro-hole internal illumination and imaging system according to claim 5, characterized in that: The cross-sectional diameter of the laser-driven white light source is less than or equal to 1 mm, the power is 1 to 2 W, and the power density is greater than or equal to 1.5×10 7 W / m 2 , the spectral width is 190~2500nm.

7. The micro-hole internal illumination and imaging system according to claim 5, characterized in that: The geometric shape of the laser-driven white light source includes a first ellipsoid, and the diameter of the cross section where the short axis of the first ellipsoid is located is less than or equal to 1 mm; The geometric shape of the focused light beam comprises a second ellipsoid, and the diameter of the cross section where the short axis of the second ellipsoid is located is 0.10-1.0 mm.

8. The micro-hole internal illumination and imaging system according to claim 1, characterized in that: The optical imaging part comprises: a primary imaging lens (5), a pinhole aperture (6), a secondary imaging lens (7), and an image acquisition device (8), wherein: The primary imaging lens (5) is arranged on the optical path of the transmitted light beam and is used to image the optical information inside the micro-hole that is initially imaged by the coupling system (4) and transmitted by the semi-transparent and semi-reflective lens (3), thereby obtaining a primary imaging light beam; The pinhole aperture (6) is arranged at the imaging position of the primary imaging light beam and is used to filter out interference signals other than the pinhole in the primary imaging light beam to obtain a filtered light beam; The secondary imaging lens (7) is arranged on the light beam of the filtered light beam and is used to perform secondary imaging on the filtered light beam to obtain a secondary imaging light beam; The image acquisition device (8) is arranged at the imaging position of the secondary imaging light beam and is used to acquire the image formed by the secondary imaging light beam to achieve imaging inside the micropore.

9. The micro-hole internal illumination and imaging system according to claim 8, characterized in that: The optical imaging part also includes a polarizing plate (9), which is arranged between the pinhole diaphragm (6) and the secondary imaging lens (7) and is used to eliminate the reflection inside the micro-hole in the filtered light beam.

10. The micro-hole internal illumination and imaging system according to claim 8, characterized in that: The imaging magnification of the optical imaging part is greater than or equal to 3 times.

Images