Method for preparing aluminum-titanium target material by using combination of pack rolling and warm pressing of aluminum-titanium waste target material

Abstract

The invention provides a method for preparing an aluminum-titanium target by combining roll bonding and warm pressing of a waste aluminum-titanium target, and belongs to the technical field of powder metallurgy. The preparation method comprises the steps that the waste aluminum-titanium target is pretreated to obtain aluminum-titanium target semi-finished products, N pieces of aluminum-titanium target semi-finished products are taken, slurry containing aluminum powder is sprayed to the surfaces of the N pieces or N-1 pieces of aluminum-titanium target semi-finished products, and after spraying is completed, the aluminum-titanium target semi-finished products are obtained; and laminating the N aluminum-titanium target semi-finished products to obtain a composite plate, carrying out ply rolling on the composite plate to obtain a composite target material, and carrying out warm pressing on the composite target material to obtain the aluminum-titanium target material. According to the preparation method, the target materials can be fully diffused in the warm pressing process, the influence of the surface flatness on diffusion is reduced through the pre-pack rolling treatment, the aluminum powder serves as a soft middle layer, the good buffering and joint filling effects are achieved, diffusion is promoted, and the target material welding rate is gt in an optimal scheme; 95%. According to the preparation method, the utilization rate of the target material is increased, the production cost of the target material is reduced, and recycling of the target material is achieved.

Description

Technical Field

[0001] The invention relates to a method for preparing an aluminum-titanium target material by combining stacking and warm pressing of aluminum-titanium waste target materials, and belongs to the technical field of aluminum-titanium target material preparation. Background Art

[0002] Hard coating targets are mainly used in mechanical processing fields such as cutting tools and wear-resistant parts. Physical vapor deposition (PVD) can effectively improve the cutting performance of tools and extend the service life of tools. Commonly used hard coating targets include aluminum-titanium targets, aluminum-chromium targets and titanium-silicon targets. Among them, aluminum-titanium targets are used to prepare nitride coatings on the surface of workpieces through physical vapor deposition technology under nitrogen atmosphere. This hard coating has good application prospects in the mechanical processing industry due to its good wear resistance and heat resistance. At present, aluminum-titanium targets are mainly prepared by powder metallurgy.

[0003] In actual production, most of the target materials cannot be fully utilized. During the use of the target, a reverse sputtering layer will be generated on the surface around it, forming a wavy appearance. When the sputtering depth exceeds the maximum limit, if it continues to be used, it is likely to break through the target. Therefore, when the sputtering target material is consumed to a certain extent, the too thin target material is usually discarded, resulting in a large amount of waste targets generated during the production and use of the target material. Generally speaking, the part of the target material that can be effectively utilized is only 30%~40% of its original weight. The low utilization rate is undoubtedly a huge waste for the target material that is difficult to make and expensive. If the remaining discarded aluminum-titanium target material can be recycled and reused at low cost and high efficiency, it will have great economic value.

[0004] At present, the recycling methods of waste targets are mainly to wash the waste targets with alkali, pickle, wash with water, melt, cast and then process and bind them before putting them into production. However, due to the large difference in the melting points of titanium and aluminum in titanium-aluminum targets, it is difficult to prepare aluminum-titanium targets with uniform structure during melting. In addition, such methods are cumbersome, consume a lot of materials and energy, are costly, and produce a large amount of waste liquid in the process of acid and alkali washing of waste targets, causing environmental pollution. Therefore, it is very meaningful to develop a new type of efficient and environmentally friendly aluminum-titanium target recycling method without separating and melting the target materials, which is very meaningful for the target material manufacturing and cemented carbide tool cutting fields. Summary of the invention

[0005] In view of the shortcomings of the prior art, the present invention provides a method for preparing aluminum-titanium target materials by utilizing aluminum-titanium waste target materials through stacking and rolling combined with warm pressing. The present invention prepares reusable finished targets by recycling waste target materials, thereby solving the problem of low utilization rate of sputtering target materials during use. Moreover, the method of the present invention does not require the separation and smelting of the target materials, and can achieve the recovery of aluminum-titanium target materials only through stacking and rolling combined with warm pressing. The method is efficient and environmentally friendly, and the preparation process is simple.

[0006] In order to achieve the above object, the present invention adopts the following technical scheme: The present invention provides a method for preparing an aluminum-titanium target material by combining aluminum-titanium waste target material rolling with warm pressing, wherein the aluminum-titanium waste target material is pretreated to obtain an aluminum-titanium target semi-finished product, N pieces of aluminum-titanium target semi-finished products are taken, and a slurry containing aluminum powder is sprayed on the surface of N pieces or N-1 pieces of aluminum-titanium target semi-finished products, and after the spraying is completed, the N pieces of aluminum-titanium target semi-finished products are stacked to obtain a composite plate, the composite plate is rolled to obtain a composite target material, and the composite target material is warm pressed to obtain the aluminum-titanium target material. .

[0007] The preparation method of the present invention spreads a layer of aluminum powder on the surface of the aluminum-titanium target semi-finished product, and the aluminum powder serves as a soft intermediate layer transition, playing a good buffering and filling role, and then rolling is performed at a certain temperature to cause plastic deformation of the relative contact surfaces of the aluminum-titanium target semi-finished product, which greatly increases the contact area of ​​the connected interface and expands the range of the diffusion connection zone, and finally prepares the aluminum-titanium target with a high welding rate.

[0008] In the present invention, the aluminum-titanium waste target material used is the aluminum-titanium waste target material that has become thinner and cannot be further used after coating.

[0009] In the present invention, any aluminum-titanium waste target with an aluminum-titanium ratio is applicable, and the following preferred atomic ratios are for commonly used aluminum-titanium waste targets.

[0010] According to a preferred embodiment, in the aluminum-titanium waste target material, the atomic ratio of Al:Ti is 40~70:30~60.

[0011] In a preferred embodiment, the pretreatment is to sequentially perform milling and flattening treatments on the waste aluminum-titanium target materials.

[0012] In the actual operation process, the aluminum-titanium waste target material is ultrasonically cleaned for 10 to 15 minutes, foreign matter on the surface of the waste target after coating is removed by milling, and the surface of the target material is flattened to obtain an aluminum-titanium target semi-finished product; the surface flattening treatment is to machine grind the surface of the aluminum-titanium target semi-finished product, and then ultrasonically clean it with acetone for about 15 minutes after flattening to obtain the aluminum-titanium target semi-finished product.

[0013] In a preferred embodiment, the thickness of the aluminum-titanium target semi-finished product is 3 to 4 mm. The inventors have found that by controlling the thickness of the aluminum-titanium target semi-finished product within the above range, the aluminum-titanium target material obtained finally has a high yield rate and good quality. If the thickness is too thin, the final yield rate will be reduced. If it is too thick, impurity particles in the waste target may be introduced, affecting the quality of the finished target.

[0014] In a preferred embodiment, the surface roughness of the aluminum-titanium target semi-finished product is 2.5-6.5 μm. The inventors found that the final welding rate is the highest when the surface roughness of the aluminum-titanium target semi-finished product is controlled within this range. If the roughness is too high, more gaps may be generated at the connection interface, affecting the progress of warm pressure diffusion.

[0015] Preferably, the flatness of the semi-finished aluminum-titanium target is ≤0.1 mm.

[0016] In a preferred embodiment, the particle size D of the aluminum powder is 50 The particle size of aluminum powder is controlled within this range, and the welding rate of all products is the highest. If the particle size is too small, the gap filling effect in the local area may not be obvious, which is not conducive to the subsequent temperature and pressure diffusion. If the particle size is too large, it may make stacking difficult and affect the bonding between the target semi-finished products.

[0017] Preferably, the slurry containing aluminum powder is obtained by wet ball milling the aluminum powder.

[0018] Further preferably, during the wet ball milling, zirconia balls are used, anhydrous ethanol is used as the grinding medium, the powder-ball mass ratio is 1:(2-4), the ball milling speed is 200-500 r / min, and the ball milling time is 15-100 min.

[0019] A preferred solution is to take N aluminum-titanium target semi-finished products, spray a slurry containing aluminum powder on the surfaces of N or N-1 aluminum-titanium target semi-finished products, and after spraying, stack the N aluminum-titanium target semi-finished products to obtain a composite plate, and control the N-1 interfaces formed in the composite plate to contain an aluminum powder layer with a thickness of 0.25 to 0.5 mm.

[0020] In the present invention, in addition to ensuring that the surfaces of the aluminum-titanium target semi-finished products on the two outer sides of the composite plate are not sprayed, the spraying method for other surfaces is not limited. It is only necessary to control that after stacking, the contact surface of any two aluminum-titanium target semi-finished products, that is, the interface of the composite plate, contains an aluminum powder layer with a thickness of 0.25-0.5 mm. The thickness of the aluminum powder layer is controlled within the range of the present invention, and the final welding rate is the highest.

[0021] In a preferred embodiment, N is 3 to 5, preferably 4.

[0022] Preferably, the number of passes of the stacking is 1 to 2 times.

[0023] Further preferably, the total reduction of the stack rolling is 3% to 6% of the total thickness of the aluminum-titanium target semi-finished product. If the reduction is controlled within the above range, the welding rate of the aluminum-titanium target material obtained finally is the highest and the quality is the best. If the reduction is too large, internal cracks may be generated.

[0024] In a preferred embodiment, the warm pressing is carried out under the protection of an argon atmosphere, the temperature of the warm pressing is 400-500°C, preferably 450-500°C, the time of the warm pressing is 2-10h, preferably 5-10h; the heating rate is 3-5°C / min, preferably 5°C / min; the loading pressure is 30-50Mpa, preferably 40-50Mpa, By controlling the temperature of the warm pressing within the scope of the present invention and fully keeping warm, sufficient diffusion can be achieved, and finally a finished target material with high welding rate and good quality can be obtained. If the temperature of the warm pressing is too low, it is not conducive to sufficient diffusion during the warm pressing. If the temperature is too high, the composite target material will produce excessive thermal expansion, and the increase in internal stress will also increase its crack tendency. If the pressure is too low, it is not conducive to the close contact of the connection interface and reduces the efficiency of diffusion. If the pressure is too high, it may cause excessive extrusion and affect the quality of the final finished target material.

[0025] The welding rate of the connecting surfaces between the aluminum-titanium target layers prepared by the above method is greater than 95% in the preferred embodiment.

[0026] Compared with the prior art, the advantages of the present invention are: (1) The recycling and reuse method of the aluminum-titanium target material of the present invention is based on a method of pre-rolling and warm pressing of the same type of target materials. Under this method, the preparation cycle of the target material is short, the recycling rate is high, and a reused target material with excellent performance can be obtained, and environmental pollution is greatly reduced; (2) A layer of aluminum powder is applied on the surface of the semi-finished aluminum-titanium target material in the present invention. The aluminum powder serves as a soft intermediate layer transition, plays a good role in buffering and filling gaps, and is beneficial to promoting the diffusion between atoms during the temperature pressing process and improving the welding rate of the target material. (3) The warm pressing process of the present invention utilizes the diffusion principle to form a technology that combines pre-rolling and warm pressing diffusion. No matter how rigorously the material surface is processed, when two interfaces are placed together, the surfaces will only exist in the form of point contact and will be randomly distributed on the connected surfaces. Therefore, affected by the surface flatness, there will always be a certain gap between the interfaces. The present invention uses a small amount of pre-rolling to cause plastic deformation of the relative contact surfaces at a certain temperature, greatly increasing the contact area of ​​the connected interfaces and expanding the range of the diffusion connection zone, which is conducive to promoting diffusion; (4) The aluminum-titanium target material of the present invention has a high welding rate, and the final welding rate obtained is >95% in the preferred embodiment. It is suitable for high-power, high-efficiency sputtering coating targets and has great prospects for actual production applications. BRIEF DESCRIPTION OF THE DRAWINGS

[0027] In order to explain the present invention more clearly, the specific implementation modes of the present invention will be further described in detail below, and specific embodiments of the present invention are given in conjunction with the accompanying drawings.

[0028] Figure 1 It is a structural schematic diagram of the temperature pressing equipment of the present invention; wherein, 1-furnace body, 2-heating element, 3-workpiece, 4-induction coil; Figure 2 The process flow chart of preparing aluminum-titanium target material of the present invention; Figure 3 This is a 100x optical microscope image of the diffusion joint interface of the aluminum-titanium target of Example 1; Figure 4 The surface SEM of the sample after target coating in Example 1; Figure 5 This is a physical picture of a single waste target of aluminum and titanium; Figure 6 This is a photo of the finished product of the aluminum-titanium target prepared in Example 1. DETAILED DESCRIPTION

[0029] The following will further illustrate the research content of the present invention in conjunction with embodiments, and clearly and completely describe the technical solution of the present invention. However, the described embodiments are only part of the embodiments of the present invention, rather than all of the embodiments. The purpose of providing the embodiments is to make the content disclosed by the present invention more comprehensive.

[0030] See also Figure 1 The present invention provides a temperature pressing device, including a furnace body 1, an induction coil 4 and a heating element 2 are arranged inside the furnace body, wherein the heating element is arranged on the inner wall of the furnace body, an argon gas inlet valve and an argon gas outlet valve are arranged above the furnace body, the gas inlet is connected to the argon gas bottle, and the gas outlet is connected to water to prevent air backflow. The workpiece 3 is located between the upper and lower pressure heads and is surrounded by the induction coil.

[0031] Embodiment 1: The embodiment of the present invention discloses a method for recycling aluminum-titanium target materials, which specifically comprises the following steps: (1) Prepare 4 pieces of Al after coating 0.7 Ti 0.3 The waste targets were milled to 3-4 mm each to obtain aluminum-titanium target semi-finished products. The weights of the semi-finished products were 247.5 g, 251.6 g, 248.2 g, and 241.1 g, respectively, with a total weight of 988.4 g. The aluminum-titanium target semi-finished products were ultrasonically cleaned in an acetone solution for 15 min, and both sides were mechanically polished to make the surface roughness Ra = 2.5 μm, the flatness less than or equal to 0.1 mm, and then ultrasonically cleaned again for 15 min; (2) Prepare a particle size of D 50 = 10 μm aluminum powder, the aluminum powder is evenly distributed on the surface of the aluminum-titanium target semi-finished product in the form of spraying powder slurry; (3) stacking four semi-finished products covered with aluminum powder in sequence, controlling the N-1 interfaces formed by the composite to contain an aluminum powder layer of 0.25-0.5 mm thick, and pre-rolling in a two-wheel rolling mill. The total reduction during the rolling is about 5% of the total thickness of the aluminum-titanium target semi-finished product; (4) Place the semi-finished product after pre-stack rolling into the warm pressing equipment and use a vacuum pump to evacuate the furnace so that the relative vacuum degree in the furnace is less than or equal to 1×10 -2 pa, then argon was introduced into the furnace for 10 min, and the vacuum and ventilation treatment was repeated three times; (5) After the gas washing is completed, maintain the argon atmosphere, and use the heating element to raise the furnace temperature to 500℃ at a heating rate of 5℃ / min for 10 hours. At the same time, the loading pressure of the upper and lower pressure heads is maintained at 50Mpa during the insulation stage. After the insulation and pressure maintenance is completed, stop heating and cool the furnace to room temperature; (6) After the diffusion is completed, the target material is taken out and the surface welding rate is measured by ultrasonic flaw detection (UT) to be 97.5%. After two-side milling and ultrasonic cleaning, the reusable aluminum-titanium recycled target material is obtained. The mass of the finished target is measured to be 864.2g, and the yield rate is 87.4%; The target material bonding interface after diffusion in this embodiment is as follows Figure 3 As shown in Figure 2, an intermediate diffusion layer is formed at the connection interface, and there is no obvious gap in the joint, indicating that the connection is good.

[0032] The prepared target was coated on the cemented carbide WC substrate by cathode arc evaporation (CAE). The SEM image of the coating surface was as follows: Figure 4 As shown, the coating in the figure has no obvious defects except for a small amount of droplets and pits after cathode arc evaporation deposition, indicating that the finished target material prepared by this invention is of good quality.

[0033] Embodiment 2: The embodiment of the present invention discloses a method for recycling aluminum-titanium target materials, which specifically comprises the following steps: (1) Prepare 4 pieces of Al after coating 0.5 Ti 0.5 The waste targets were milled to 3-4 mm each to obtain aluminum-titanium target semi-finished products, the weight of the semi-finished products were 253.4 g, 248.9 g, 255.6 g, 251.3 g, and the total weight was 1009.2 g. The aluminum-titanium target semi-finished products were ultrasonically cleaned in acetone solution for 15 min, and both sides were mechanically polished to make the surface roughness Ra = 4 μm, the flatness less than or equal to 0.1 mm, and then ultrasonically cleaned again for 15 min; (2) Prepare particle size D 50 = 10 μm aluminum powder, the aluminum powder is evenly distributed on the surface of the aluminum-titanium target semi-finished product in the form of spraying powder slurry; (3) Four semi-finished products covered with aluminum powder are stacked together in sequence, and the three interfaces formed by the composite are controlled to contain an aluminum powder layer of 0.25-0.5 mm thick. Pre-stack rolling is performed in a two-wheel rolling mill, and the total reduction during stack rolling is about 5% of the total thickness of the aluminum-titanium target semi-finished product; (4) Place the semi-finished product after pre-stack rolling into the warm pressing equipment and use a vacuum pump to evacuate the furnace so that the relative vacuum degree in the furnace is less than or equal to 1×10 -2 pa, then argon was introduced into the furnace for 10 min, and the vacuum and ventilation treatment was repeated three times; (5) After the gas washing is completed, maintain the argon atmosphere, and use the heating element to raise the furnace temperature to 500℃ at a heating rate of 5℃ / min for 10 hours. At the same time, the loading pressure of the upper and lower pressure heads is maintained at 50Mpa during the insulation stage. After the insulation and pressure maintenance is completed, stop heating and cool the furnace to room temperature; (6) After the diffusion is completed, the target material is taken out and the surface welding rate is measured by ultrasonic flaw detection (UT) to be 96.3%. After milling on both sides and ultrasonic cleaning, a reusable aluminum-titanium recycled target material is obtained. The mass of the finished target is measured to be 874.2 g, and the yield rate is 86.6%.

[0034] Embodiment 3: The embodiment of the present invention discloses a method for recovering an aluminum-titanium target, which specifically comprises the following steps: (1) Prepare 4 pieces of Al after coating 0.4 Ti 0.6 The waste targets were milled to 3-4 mm each to obtain aluminum-titanium target semi-finished products, the weight of the semi-finished products were 258.6 g, 257.1 g, 263.5 g, 262.8 g, and the total weight was 1042 g. The aluminum-titanium target semi-finished products were ultrasonically cleaned in acetone solution for 15 min, and both sides were mechanically polished to make the surface roughness Ra = 5.5 μm, the flatness was less than or equal to 0.1 mm, and then ultrasonically cleaned again for 15 min; (2) Prepare particle size D 50 = 10 μm aluminum powder, and evenly distributing the aluminum powder on the surface of the aluminum-titanium target semi-finished product in the form of spraying powder slurry; (3) stacking four semi-finished products covered with aluminum powder in sequence, controlling the three interfaces formed by the composite to contain an aluminum powder layer of 0.25-0.5 mm thick, and pre-rolling them in a two-wheel rolling mill. The total reduction during the rolling process is 5% of the total thickness of the aluminum-titanium target semi-finished product; (4) Place the semi-finished product after pre-stack rolling into the warm pressing equipment and use a vacuum pump to evacuate the furnace so that the relative vacuum degree in the furnace is less than or equal to 1×10 -2 pa, then argon was introduced into the furnace for 10 min, and the vacuum and ventilation treatment was repeated three times; (5) After the gas washing is completed, maintain the argon atmosphere, and use the heating element to raise the furnace temperature to 500℃ at a heating rate of 5℃ / min for 10 hours. At the same time, the loading pressure of the upper and lower pressure heads is maintained at 50Mpa during the insulation stage. After the insulation and pressure maintenance is completed, stop heating and cool the furnace to room temperature; (6) After the diffusion is completed, the target material is taken out and the surface welding rate is measured by ultrasonic flaw detection (UT) to be 95.2%. After milling on both sides and ultrasonic cleaning, a reusable aluminum-titanium recycled target material is obtained. The mass of the finished target is measured to be 881.6 g, and the yield rate is 84.6%.

[0035] Embodiment 4: 4 pieces of Al after milling 0.7 Ti 0.3 The semi-finished target, each of which has a thickness of 3-4 mm, is ultrasonically cleaned, polished, and surface-pasted with aluminum powder according to the method of Example 1, and then pre-stacked in a two-wheel rolling mill. After the stacking is completed, it is placed in a warm pressing device, and the furnace temperature is raised to 400°C at a heating rate of 5°C / min by a heating element and kept warm for 10 hours. At the same time, the loading pressure of the upper and lower pressure heads is maintained at 50 MPa during the insulation stage. After the insulation and pressure maintenance, it is cooled to room temperature with the furnace, and the welding rate of the connection interface is measured by ultrasonic flaw detection (UT) to be 89.4%.

[0036] Embodiment 5: 4 pieces of Al after milling 0.5 Ti 0.5 The semi-finished target, each of which has a thickness of 3-4 mm, is ultrasonically cleaned, polished, and surface-pasted with aluminum powder according to the method of Example 2, and then pre-stacked in a two-round rolling mill. After the stacking is completed, it is placed in a warm pressing device, and the furnace temperature is raised to 500° C. at a heating rate of 5° C. / min by a heating element and kept warm for 10 hours. At the same time, the loading pressure of the upper and lower pressure heads is maintained at 30 MPa during the insulation stage. After the insulation and pressure are completed, it is cooled to room temperature with the furnace, and the welding rate of the connection interface is measured by ultrasonic flaw detection (UT) to be 87.7%.

[0037] Embodiment 6: 4 pieces of Al after milling 0.4 Ti 0.6 The semi-finished target, each of which has a thickness of 3-4 mm, is ultrasonically cleaned, polished, and surface-pasted with aluminum powder according to the method of Example 3, and then pre-stacked in a two-wheel rolling mill. After the stacking is completed, it is placed in a warm pressing device, and the furnace temperature is raised to 500° C. at a heating rate of 5° C. / min by a heating element and kept warm for 2 hours. At the same time, the loading pressure of the upper and lower pressure heads is maintained at 50 MPa during the insulation stage. After the insulation and pressure maintenance, it is cooled to room temperature with the furnace, and the welding rate of the connection interface is measured by ultrasonic flaw detection (UT) to be 85.6%.

[0038] Comparative Example 1: 4 pieces of Al after milling 0.7 Ti 0.3 The semi-finished target, each of which has a thickness of 3-4 mm, is ultrasonically cleaned and polished according to the method of Example 1, and the surface is paved with titanium powder of the same particle size, and pre-stacked in a two-round rolling mill. After the stacking is completed, it is placed in a warm pressing device, and the furnace temperature is raised to 500°C at a heating rate of 5°C / min by a heating element and kept warm for 10 hours. At the same time, the loading pressure of the upper and lower pressure heads is maintained at 50 MPa during the insulation stage. After the insulation and pressure are completed, it is cooled to room temperature with the furnace, and the welding rate of the connection interface is measured by ultrasonic flaw detection (UT) to be 63.3%.

[0039] Comparative Example 2: 4 pieces of Al after milling 0.7 Ti 0.3 The semi-finished target, each of which has a thickness of 3-4 mm, is ultrasonically cleaned and polished according to the method of Example 1, and the surface is no longer powdered. It is pre-stacked in a two-round rolling mill. After the stacking is completed, it is placed in a warm pressing device. The furnace temperature is raised to 500° C. at a heating rate of 5° C. / min and kept warm for 10 hours by a heating element. At the same time, the loading pressure of the upper and lower pressure heads is maintained at 50 MPa during the insulation stage. After the insulation and pressure are completed, it is cooled to room temperature with the furnace. The welding rate of the connection interface is measured by ultrasonic flaw detection (UT) to be 56.8%.

[0040] For comparison of experimental results, the processes and results of Examples 1 to 6 and Comparative Examples 1 to 2 are shown in the table below, wherein the target welding rate is measured by ultrasonic flaw detection (UT).

[0041]

[0042] It can be seen that in the aluminum-titanium target material preparation method provided by the present invention, by cleaning the surface of the waste target and pre-stacking treatment before warm pressing and diffusion, a reusable finished target material with high welding rate and excellent quality is efficiently prepared. It can be seen from the performance result test of the embodiment that the increase in the warm pressing temperature significantly makes the welding rate of the connection joint higher and the combination tighter. From the comparison of the embodiment and the comparative example, it can be seen that laying a diffusion intermediate layer on the surface of the aluminum-titanium semi-finished target material is also beneficial to improving the effect of warm pressing. When titanium powder is added, due to its hard and brittle nature, the target material is difficult to fit during the pre-stacking process and the deformation is large. When powder is not added, the gap at the connection interface is large, and it is difficult to produce interatomic diffusion during warm pressing. In summary, the effect of aluminum powder as a diffusion layer is significant.

[0043] The above description is only a specific implementation mode of the present invention, and does not limit it. Those skilled in the art should understand that any modification, equivalent replacement or improvement of the technical solutions recorded in the aforementioned embodiments should be included in the protection scope of the present invention.

Claims

1. A method for preparing an aluminum-titanium target by stacking and warm pressing of aluminum-titanium waste targets, characterized in that: The aluminum-titanium waste target materials are pretreated to obtain aluminum-titanium target semi-finished products, N pieces of aluminum-titanium target semi-finished products are taken, and a slurry containing aluminum powder is sprayed on the surfaces of N or N-1 pieces of aluminum-titanium target semi-finished products. After the spraying is completed, the N pieces of aluminum-titanium target semi-finished products are stacked to obtain a composite plate, the composite plates are rolled to obtain a composite target material, and the composite target material is then warm-pressed to obtain the aluminum-titanium target material.

2. The method for preparing aluminum-titanium targets by combining rolling and warm pressing of aluminum-titanium waste targets according to claim 1, characterized in that: In the aluminum-titanium waste target material, the atomic ratio is Al:Ti = 40~70:30~60.

3. The method for preparing aluminum-titanium targets by combining rolling and warm pressing of aluminum-titanium waste targets according to claim 1, characterized in that: The pretreatment is to perform milling and flattening treatment on the aluminum-titanium waste target materials in sequence.

4. The method for preparing aluminum-titanium targets by combining rolling and warm pressing of aluminum-titanium waste targets according to claim 1, characterized in that: The thickness of the aluminum-titanium target semi-finished product is 3-4 mm; The surface roughness of the aluminum-titanium target semi-finished product is 2.5-6.5 μm; The flatness of the aluminum-titanium target semi-finished product is ≤0.1 mm.

5. The method for preparing aluminum-titanium targets by combining rolling and warm pressing of aluminum-titanium waste targets according to claim 1 or 4, characterized in that: The particle size D of the aluminum powder 50 5~50μm.

6. The method for preparing aluminum-titanium targets by combining rolling and warm pressing of aluminum-titanium waste targets according to claim 1, characterized in that: The aluminum powder-containing slurry is obtained by wet ball milling the aluminum powder.

7. The method for preparing aluminum-titanium targets by combining rolling and warm pressing of aluminum-titanium waste targets according to claim 6, characterized in that: During the wet ball milling, zirconium oxide balls are used, anhydrous ethanol is used as the grinding medium, the powder-ball mass ratio is 1:2-4, the ball milling speed is 200-500 r / min, and the ball milling time is 15-100 min.

8. The method for preparing aluminum-titanium targets by combining rolling and warm pressing of aluminum-titanium waste targets according to claim 1, characterized in that: Take N aluminum-titanium target semi-finished products, spray slurry containing aluminum powder on the surface of N or N-1 aluminum-titanium target semi-finished products, and after spraying, stack the N aluminum-titanium target semi-finished products to obtain a composite plate, and control the N-1 interfaces formed in the composite plate to contain an aluminum powder layer with a thickness of 0.25-0.5 mm; The N is 3~5.

9. The method for preparing aluminum-titanium targets by combining rolling and warm pressing of aluminum-titanium waste targets according to claim 1, characterized in that: The number of passes of the stacking is 1 to 2 times; The total reduction of the stack rolling is 3% to 6% of the total thickness of the aluminum-titanium target semi-finished product.

10. The method for preparing aluminum-titanium targets by combining rolling and warm pressing of aluminum-titanium waste targets according to claim 1, characterized in that: The warm pressing is carried out under the protection of an argon atmosphere, the temperature of the warm pressing is 400-500° C., the time of the warm pressing is 2-10 hours, the heating rate is 3-5° C. / min, and the loading pressure is 30-50 MPa.

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