Device and method for quickly replacing grinding drum cloth for polishing edge of 12-inch silicon wafer

Abstract

The invention belongs to the field of silicon wafer edge polishing, and particularly relates to a device and a method for quickly replacing grinding drum cloth for polishing the edge of a 12-inch silicon wafer. A device lower main body is arranged below the device upper main body, the bottom end of the device lower main body is fixedly connected with the top end of the grinding drum cloth main body, and a convenient-to-replace mechanism is arranged between the device upper main body and the device lower main body; the convenient-to-replace mechanism comprises a connecting and fixing head; through the design of a mechanism convenient to replace, the function of convenient replacement is achieved, and the problems that when an existing device is used for polishing a silicon wafer, the grinding drum cloth is in contact with the silicon wafer for polishing, the grinding drum cloth is damaged after long-term use and needs to be replaced, and the polishing efficiency is high are solved. The problems that an existing device is not provided with an assembly convenient to replace, so that the difficulty is large during follow-up replacement, and operation is inconvenient are solved, and convenience is improved.

Description

Technical Field

[0001] The present invention relates to the field of silicon wafer edge polishing, and in particular to a device and method for quickly replacing a grinding drum cloth for polishing the edge of a 12-inch silicon wafer. Background Art

[0002] Silicon wafers are the core fundamental material in semiconductor manufacturing. Made from high-purity single-crystal silicon through processes such as crystal growth, cutting, grinding, and polishing, they are circular slices typically 12 inches or larger in diameter. Their surfaces boast exceptionally flatness and nanometer-level finish. They serve as substrates for electronic components such as integrated circuits, sensors, and photovoltaic cells. Their edges are precision-polished to reduce microcracks and particle contamination, ensuring yield and reliability during chip manufacturing.

[0003] The existing 12-inch silicon wafer edge polishing grinding drum cloth quick replacement device and method can be specifically referred to the publication number CN219170403U. A silicon wafer edge polishing grinding device includes a workbench; a fixed groove is formed at the left end of the top of the workbench; and a rectangular groove is formed at the upper left end of the top of the workbench. In the utility model, the upper and lower side surfaces and the annular side wall of the silicon wafer edge can be ground and polished. When the silicon wafer edge is being ground, the position of the observation rod moving to the left and the observation rod coinciding with the scale can be accurately calculated to determine the size of the silicon wafer being ground, so that the size of the silicon wafer will not be inaccurate during grinding.

[0004] Since the existing device mainly uses a grinding drum cloth to contact and polish the silicon wafer when polishing the silicon wafer, the grinding drum cloth will be damaged after long-term use and needs to be replaced. However, the existing device is not provided with a component that can be easily replaced, so subsequent replacement is difficult and inconvenient to operate. Therefore, to address the above problems, a device and method for quickly replacing the grinding drum cloth for polishing the edge of a 12-inch silicon wafer are proposed. Summary of the Invention

[0005] In order to solve the problem that the existing device mainly uses the grinding drum cloth to contact and polish the silicon wafer during polishing, and the grinding drum cloth will be damaged after long-term use and needs to be replaced, but the existing device is not provided with a component that can be easily replaced, so the subsequent replacement is difficult and inconvenient to operate, the present invention proposes a device and method for quickly replacing the grinding drum cloth for polishing the edge of 12-inch silicon wafers.

[0006] The technical solution adopted by the present invention to solve the technical problem is as follows: the grinding drum cloth quick replacement device for polishing the edge of a 12-inch silicon wafer of the present invention comprises an upper device body; a lower device body is disposed below the upper device body, the bottom end of the lower device body is fixedly connected to the top end of the grinding drum cloth body, and a replacement mechanism is disposed between the upper device body and the lower device body;

[0007] The easy-to-replace mechanism includes a connecting and fixing head, which is arranged at the top of the lower body of the device, and the bottom end of the connecting and fixing head is fixedly connected to the top of the lower body of the device, and the left and right sides of the connecting and fixing head are also provided with sliding grooves, the interior of the sliding grooves is fixedly connected to the outer side of the second fixed sleeve block, the interior of the second fixed sleeve block is sleeved on the outer side of the moving rod, and the second fixed sleeve block is slidably connected to the moving rod, one end of the moving rod is fixedly connected to one end of the fixed limit plug, and the bottom end of the fixed limit plug abuts against the top of the fixed connecting head.

[0008] Preferably, the outer side of the moving rod is fixedly connected to the inner wall of the first fixed plate, and a first return spring is sleeved on the outer side of the moving rod. One end of the first return spring is fixedly connected to the first fixed plate, and the other end of the first return spring is fixedly connected to the second fixed sleeve block.

[0009] Preferably, the other end of the movable rod is fixedly connected to the fixed movable plate, and the front and rear ends of the fixed movable plate are also provided with a second fixed guide rod, and the fixed movable plate is slidably connected to the second fixed guide rod, one side end of the second fixed guide rod is fixedly connected to the side end of the connecting fixed head, and the other side end of the second fixed guide rod is fixedly connected to the fixed limit block.

[0010] Preferably, the top of the fixed connecting head is fixedly connected to the bottom end of the first fixed guide rod, the top of the first fixed guide rod is fixedly connected to the bottom end of the fixed connecting seat, the top of the fixed connecting seat is fixedly connected to the bottom end of the upper body of the device, a first movable stop block is provided on the outside of the first fixed guide rod, and the first fixed guide rod is slidably connected to the first movable stop block.

[0011] Preferably, a plurality of circular grooves are also provided inside the first movable stopper, balls are sleeved inside the circular grooves, and the balls are rotatably connected to the circular grooves.

[0012] Preferably, fixed sleeve rods are also provided at the left and right ends of the top of the connecting fixing head, and the top of the connecting fixing head is fixedly connected to the bottom end of the fixed sleeve rod, the top of the fixed sleeve rod is inserted into the first fixed insertion rod, and the fixed sleeve rod is slidably connected to the first fixed insertion rod.

[0013] Preferably, a second movable block is also provided at the front and rear ends of the bottom end of the upper main body of the device, the bottom end of the second movable block abuts against the top end of the connecting fixed head, the left and right sides of the second movable block near the upper position are also sleeved on the outside of the third fixed guide rod, and the second movable block is slidably connected to the third fixed guide rod, and a second fixed plate is also provided at the front and rear ends of the third fixed guide rod, and the third fixed guide rod is fixedly connected to the second fixed plate, and the top end of the second fixed plate is fixedly connected to the bottom end of the upper main body of the device.

[0014] Preferably, a second return spring is sleeved on the outer side of the third fixed guide rod, one end of the second return spring is fixedly connected to the second movable block, and the other end of the second return spring is fixedly connected to the second fixed plate.

[0015] Preferably, the outer side of the second movable block is fixedly connected to the first fixed sleeve block, the outer side of the rotating block is sleeved inside the first fixed sleeve block, and the first fixed sleeve block is rotatably connected to the rotating block, the rotating block is fixedly connected to one end of the transmission connecting rod, the other end of the transmission connecting rod is fixedly connected to the position above the rotating pull plate, and the position below the rotating pull plate is fixedly connected to the second fixed plug rod, and fixed sockets are also provided at the front and rear ends of the upper body of the device.

[0016] Preferably, a method for quickly replacing a grinding drum cloth for polishing the edge of a 12-inch silicon wafer comprises the following steps:

[0017] S1: Pull the rotating pull plate outward, driving the second movable block to move outward along the third fixed guide rod, compressing the second return spring;

[0018] S2: Rotate the pull plate to the upper position. After releasing it, the second fixed rod is inserted into the fixed socket under the spring rebound force, locking the second movable stopper and separating it from the top of the fixed head;

[0019] S3: Apply an upward thrust to the lower body of the device to push the connection fixing head upward;

[0020] S4: The inclined surface of the fixed limit plug contacts the arc-shaped bottom end of the first movable stopper, pushing the movable rod outward and compressing the first return spring;

[0021] S5: After the fixed limit plug passes over the first movable stopper, the outer side of the first movable stopper is clamped under the rebound force of the first return spring;

[0022] S6: Pull the lower body of the device downward to drive the fixed limit plug and the first movable stopper to move downward along the first fixed guide rod;

[0023] S7: The fixed limit plug is disengaged from the fixed connector, completely separating the lower body of the device and the grinding drum cloth body. The fixed sleeve slides along the first fixed plug rod to prevent the lower body of the device from rotating.

[0024] S8: Align the lower body of the device with the new grinding drum cloth with the lower body of the device, push the lower body upward, and repeat the steps of S3-S5 to clamp the fixed limit plug to the first movable stopper;

[0025] S9: Reverse operation to rotate the pull plate to release the fixed socket lock, and the second return spring pushes the second movable block to return to its original position, pressing against the top of the connecting fixed head to prevent accidental separation;

[0026] S10: Rotate the pull plate to the horizontal position, ensure that the second fixed rod is out of the fixed socket, start the equipment no-load test, and confirm that there is no abnormal vibration or deviation of the grinding drum cloth.

[0027] The present invention is beneficial in that:

[0028] 1. The present invention achieves a convenient replacement function through the structural design of the replacement mechanism. This solves the problem that existing devices, which mainly use the grinding drum cloth to contact the silicon wafer and polish it, will become damaged after long-term use and need to be replaced. However, existing devices are not equipped with a component for convenient replacement, making subsequent replacement difficult and inconvenient. This improves convenience.

[0029] 2. The present invention achieves a function of preventing accidental detachment through the structural design of the easy-to-replace mechanism. This solves the problem that, in the absence of a protective clamping component, accidental detachment of the device during daily use due to accidental application of force to the lower body is very likely to occur, as disassembly only requires applying a push to the lower body during removal. This improves the protective effect.

[0030] 3. The present invention reduces friction with the guide member through a structural design that facilitates the replacement of the mechanism, solves the problem that when the movable block is moving, friction with the guide assembly may occur, and the problem that jamming may easily occur during the movement, thereby improving smoothness and fluidity. BRIEF DESCRIPTION OF THE DRAWINGS

[0031] In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the following briefly introduces the drawings required for use in the embodiments or the description of the prior art. Obviously, the drawings described below are only some embodiments of the present invention. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying any creative work.

[0032] Figure 1 It is a schematic diagram of the first three-dimensional structure of the present invention;

[0033] Figure 2 is a schematic diagram of a second three-dimensional structure of the present invention;

[0034] Figure 3 It is a schematic diagram of the partial cross-sectional structure of the present invention;

[0035] Figure 4 This is a schematic diagram of the first structure for facilitating replacement of the present invention;

[0036] Figure 5 This is a schematic diagram of a second structure for facilitating replacement of the present invention;

[0037] Figure 6 This is a schematic diagram of the third structure for facilitating replacement of the present invention;

[0038] Figure 7 For the present invention Figure 2 A in the middle is an enlarged structural diagram;

[0039] Figure 8 For the present invention Figure 3 The enlarged structural diagram at B in the middle;

[0040] Figure 9 For the present invention Figure 3 The enlarged structural diagram at C in the middle;

[0041] Figure 10 Flow chart of the method of the present invention.

[0042] In the figure: 1. upper body of the device; 2. lower body of the device; 3. grinding drum cloth body; 10. connecting fixed head; 11. moving rod; 13. first return spring; 14. first fixed plate; 15. fixed limit plug; 16. fixed connecting seat; 17. first fixed guide rod; 18. fixed connecting head; 19. first moving block; 20. circular groove; 21. ball; 22. fixed moving plate; 23. second fixed guide rod; 24. fixed limit block; 25. fixed sleeve rod; 26. first fixed plug rod; 27. second moving block; 28. third fixed guide rod; 29. second fixed plate; 30. second return spring; 31. first fixed sleeve block; 32. transmission connecting rod; 33. rotating pull plate; 34. second fixed plug rod; 35. fixed socket; 36. rotating block; 37. slide groove; 38. second fixed sleeve block. DETAILED DESCRIPTION

[0043] The following will clearly and completely describe the technical solutions in the embodiments of the present invention in conjunction with the accompanying drawings. Obviously, the described embodiments are only part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without making creative efforts are within the scope of protection of the present invention.

[0044] Example 1

[0045] See also Figures 1-10 As shown, a quick-replacement device for polishing the edge of a 12-inch silicon wafer with a grinding drum cloth comprises an upper body 1; a lower body 2 is provided below the upper body 1, the bottom end of the lower body 2 is fixedly connected to the top end of the grinding drum cloth body 3, and a replacement mechanism is provided between the upper body 1 and the lower body 2.

[0046] The mechanism for facilitating replacement includes a connecting and fixing head 10, which is arranged at the top of the lower body 2 of the device, and the bottom end of the connecting and fixing head 10 is fixedly connected to the top of the lower body 2 of the device, and a slide groove 37 is also provided on the left and right sides of the connecting and fixing head 10, and the interior of the slide groove 37 is fixedly connected to the outside of the second fixed sleeve 38, and the interior of the second fixed sleeve 38 is sleeved on the outside of the moving rod 11, and the second fixed sleeve 38 is slidably connected to the moving rod 11, and one end of the moving rod 11 is fixedly connected to one end of the fixed limit plug 15, and the bottom end of the fixed limit plug 15 abuts against the top of the fixed connecting head 18, the top of the fixed limit plug 15 is a bevel design, and the bottom end of the fixed connecting head 18 is an arc design;

[0047] Furthermore, the outer side of the moving rod 11 is fixedly connected to the inner wall of the first fixed plate 14. The outer side of the moving rod 11 is sleeved with a first return spring 13. One end of the first return spring 13 is fixedly connected to the first fixed plate 14, and the other end of the first return spring 13 is fixedly connected to the second fixed sleeve 38. The second fixed sleeve 38 is a circular design.

[0048] Furthermore, the other end of the movable rod 11 is fixedly connected to the fixed movable plate 22, and the front and rear ends of the fixed movable plate 22 are also sleeved with a second fixed guide rod 23, and the fixed movable plate 22 is slidably connected to the second fixed guide rod 23, one side end of the second fixed guide rod 23 is fixedly connected to the side end of the connecting fixed head 10, and the other side end of the second fixed guide rod 23 is fixedly connected to the fixed limit block 24, and the second fixed guide rod 23 is a round rod design;

[0049] Furthermore, the top of the fixed connector 18 is fixedly connected to the bottom end of the first fixed guide rod 17, the top of the first fixed guide rod 17 is fixedly connected to the bottom end of the fixed connection seat 16, the top of the fixed connection seat 16 is fixedly connected to the bottom end of the upper body 1 of the device, and a first movable stopper 19 is sleeved on the outer side of the first fixed guide rod 17, and the first fixed guide rod 17 is slidably connected to the first movable stopper 19, and the bottom end of the first movable stopper 19 is designed to be arc-shaped;

[0050] Furthermore, the first movable stopper 19 also has a plurality of circular grooves 20 formed therein, wherein balls 21 are sleeved inside the circular grooves 20 and the circular grooves 20 are rotatably connected to the balls 21, which are spherical in shape.

[0051] Furthermore, the left and right ends of the top of the connecting fixing head 10 are also provided with fixed sleeve rods 25, and the top of the connecting fixing head 10 is fixedly connected to the bottom end of the fixed sleeve rod 25. The top end of the fixed sleeve rod 25 is inserted into the inside of the first fixed insertion rod 26, and the fixed sleeve rod 25 is slidably connected to the first fixed insertion rod 26. The fixed sleeve rod 25 is designed as a round rod.

[0052] During operation, an upward thrust is applied to the lower body 2 of the device at the top of the grinding drum cloth body 3. When the lower body 2 of the device is affected by the thrust, the connecting fixed head 10 is driven to move toward the position of the upper body 1 of the device. When the connecting fixed head 10 moves upward, the fixed limit plug 15 inside the slide groove 37 is driven to move upward at the same time. The top of the fixed limit plug 15 is designed with an inclined surface, so that the fixed limit plug 15 will first resist the first moving stopper 19 during the upward movement. Since the bottom end of the first moving stopper 19 is also designed with an arc shape, when the fixed limit plug 15 contacts the first moving stopper 19 and continues to apply an upward thrust to the lower body 2 of the device, the fixed limit plug 15 will continue to move along the outside of the first moving stopper 19 When the movable rod 11 moves outward, it will drive the first fixed plate 14 to move synchronously, and the first fixed plate 14 will squeeze the first return spring 13 on the outside of the fixed limit plug 15 to shrink during the movement. At the same time, the movable rod 11 will move along the inside of the second fixed sleeve 38 during the movement. At the same time, the movement of the movable rod 11 drives the fixed movable plate 22 to move outward. When the fixed movable plate 22 moves outward, it will move along the outside of the second fixed guide rod 23, and the fixed limit block 24 can prevent the fixed movable plate 22 from moving outward. The fixed movable plate 22 disengages from the outside of the second fixed guide rod 23 during the movement, and the second fixed guide rods 23 at the front and rear ends can effectively prevent the movable rod 11 from rotating until the fixed limit plug 15 is completely moved to the outside of the first movable block 19 and is clamped on the outside of the first movable block 19 under the rebound force of the first return spring 13. Then the lower body 2 of the device is pulled downward, and at this time, the fixed limit plugs 15 on the left and right sides of the first movable block 19 are clamped on the outside of the first movable block 19 at the same time. Therefore, when the lower body 2 of the device is pulled downward, the fixed limit plugs 15 on the left and right sides of the connecting fixed head 10 are simultaneously driven to move downward, and the fixed limit plugs 15 will drive the first movable block 19 along the bottom end of the fixed connecting seat 16 When the outer side of the first fixed guide rod 17 moves downward, and the fixed connecting seat 16 moves downward, the ball 21 inside the circular groove 20 will be driven to move downward in contact with the outer side of the first fixed guide rod 17, and the arrangement of the circular groove 20 and the ball 21 can effectively reduce the friction during the downward movement, thereby improving the flow rate. When the fixed limit plug 15 drives the first moving stopper 19 to move downward until it moves to the top of the fixed connecting head 18 and rests against the fixed connecting head 18, the lower body 2 of the device continues to be pulled downward, so that the fixed limit plug 15 will move downward along the outer side of the first moving stopper 19 under the influence of the pulling force until it moves to the outer side of the fixed connecting head 18, and continue to pull downward.Thus, the fixed limit plug 15 also moves downward along the outside of the fixed connector 18 until it is completely separated from the outside of the fixed connector 18 to complete the removal. At the same time, when pushing and pulling forces are applied to the lower body 2 of the device, the fixed sleeve 25 is driven to move along the inside of the first fixed plug 26. The design between the fixed sleeve 25 and the first fixed plug 26 can effectively prevent the lower body 2 of the device from rotating, and can effectively perform the position positioning processing of the lower body 2 of the device.

[0053] Example 2

[0054] See also Figure 1 、 Figure 2 and Figure 7 As shown, comparative example 1 is another embodiment of the present invention, the front and rear ends of the bottom end of the upper main body 1 of the device are also provided with second movable blocks 27, the bottom end of the second movable block 27 abuts against the top of the connecting fixed head 10, and the left and right sides of the second movable block 27 near the upper position are also sleeved on the outside of the third fixed guide rod 28, and the second movable block 27 is slidably connected to the third fixed guide rod 28, the third fixed guide rod 28 is a round rod design, and the front and rear ends of the third fixed guide rod 28 are also provided with second fixing plates 29, and the third fixed guide rod 28 is fixedly connected to the second fixing plate 29, and the top of the second fixing plate 29 is fixedly connected to the bottom end of the upper main body 1 of the device;

[0055] Furthermore, a second return spring 30 is sleeved on the outer side of the third fixed guide rod 28, one end of the second return spring 30 is fixedly connected to the second movable block 27, and the other end of the second return spring 30 is fixedly connected to the second fixed plate 29;

[0056] Furthermore, the outer side of the second movable block 27 is fixedly connected to the first fixed sleeve block 31, the outer side of the rotating block 36 is sleeved inside the first fixed sleeve block 31, and the first fixed sleeve block 31 is rotatably connected to the rotating block 36, and the rotating block 36 is circular in design. The rotating block 36 is fixedly connected to one end of the transmission connecting rod 32, and the other end of the transmission connecting rod 32 is fixedly connected to the position above the rotating pull plate 33, and the position below the rotating pull plate 33 is fixedly connected to the second fixed plug rod 34. Fixed sockets 35 are also provided at the front and rear ends of the upper main body 1 of the device, and the fixed sockets 35 are circular in design.

[0057] Furthermore, a method for quickly replacing a grinding drum cloth for polishing the edge of a 12-inch silicon wafer is provided, the method comprising the following steps:

[0058] S1: Pull the rotating pull plate 33 outward, driving the second movable block 27 to move outward along the third fixed guide rod 28, compressing the second return spring 30;

[0059] S2: Rotate the pull plate 33 to the upper position. After releasing it, the second fixed rod 34 is inserted into the fixed hole 35 under the spring rebound force, locking the second movable stopper 27 and separating it from the top of the fixed head 10.

[0060] S3: Applying an upward thrust to the lower body 2 of the device to push the connecting fixing head 10 upward;

[0061] S4: The inclined surface of the fixed limiting plug 15 contacts the arc-shaped bottom end of the first moving block 19, pushing the moving rod 11 outward and compressing the first return spring 13;

[0062] S5: After the fixed limit plug 15 passes over the first movable stopper 19, the outer side of the first return spring 13 is clamped under its rebound force;

[0063] S6: Pull the lower body 2 of the device downward, driving the fixed limit plug 15 and the first movable stopper 19 to move downward along the first fixed guide rod 17;

[0064] S7: The fixed limit plug 15 is disengaged from the fixed connector 18, completely separating the lower body 2 of the device and the grinding drum cloth body 3, and the fixed sleeve 25 slides along the first fixed plug 26 to prevent the lower body 2 of the device from rotating;

[0065] S8: Align the lower body 2 of the device with the new grinding drum cloth with the lower body 1 of the device, push the lower body 2 upward, and repeat the steps S3-S5 to make the fixed limit plug 15 clamp the first movable stopper 19;

[0066] S9: Reverse operation to rotate the pull plate 33 to release the lock of the fixed socket 35. The second return spring 30 pushes the second movable block 27 to return to its original position and presses against the top of the connecting fixing head 10 to prevent accidental separation.

[0067] S10: Rotate the pull plate 33 to a horizontal position to ensure that the second fixing rod 34 is disengaged from the fixing socket 35, start the equipment no-load test, and confirm that the grinding drum cloth has no abnormal vibration or deviation.

[0068] When working, before applying a thrust to the lower body 2 of the device, the rotating pull plate 33 is first pulled outward. When the rotating pull plate 33 is pulled outward, the second movable block 27 will be driven to move outward at the same time, and in the process of the second movable block 27 moving outward, it will move along the outside of the third fixed guide rod 28 inside the second fixed plate 29. At the same time, the movement of the second movable block 27 will squeeze the second return spring 30 outside the third fixed guide rod 28 to shrink until the rotating pull plate 33 moves to the outside. Then the rotating pull plate 33 is rotated. When the rotating pull plate 33 rotates, the transmission connecting rod 32 and the rotating block 36 are driven to rotate synchronously, and the rotating block 36 will move along the first The fixed sleeve 31 rotates inside until the rotating pull plate 33 rotates to the upper position, and then slowly releases the rotating pull plate 33, so that under the rebound force of the second return spring 30, the second fixed insertion rod 34 is slowly inserted into the fixed insertion hole 35 opened at the side end of the upper main body 1 of the device, thereby fixing the position of the rotating pull plate 33. When the position of the rotating pull plate 33 is fixed, the position of the second movable block 27 will be fixed, so that when a thrust is applied to the lower main body 2 of the device, the connecting fixed head 10 can move upward, and when the second movable block 27 blocks the top of the connecting fixed head 10, the connecting fixed head 10 cannot move upward, thereby starting to prevent accidental disengagement.

[0069] The basic principles, main features, and advantages of the present invention are shown and described above. Those skilled in the art should understand that the present invention is not limited to the above embodiments. The above embodiments and descriptions are merely illustrative of the principles of the present invention. Various changes and modifications may be made to the present invention without departing from the spirit and scope of the present invention, and such changes and modifications fall within the scope of the invention as claimed.

Claims

1. A device for quickly replacing a grinding drum cloth for polishing the edge of a 12-inch silicon wafer, comprising an upper body (1) of the device; characterized in that: A device lower body (2) is provided below the device upper body (1); the bottom end of the device lower body (2) is fixedly connected to the top end of the grinding drum cloth body (3); and a mechanism for facilitating replacement is provided between the device upper body (1) and the device lower body (2); The easy-to-replace mechanism includes a connecting and fixing head (10), the connecting and fixing head (10) is arranged at the top of the lower body (2) of the device, and the bottom end of the connecting and fixing head (10) is fixedly connected to the top of the lower body (2) of the device, and the left and right sides of the connecting and fixing head (10) are also provided with sliding grooves (37), the inside of the sliding groove (37) is fixedly connected to the outside of the second fixed sleeve (38), the inside of the second fixed sleeve (38) is sleeved on the outside of the moving rod (11), and the second fixed sleeve (38) is slidably connected to the moving rod (11), one end of the moving rod (11) is fixedly connected to one end of the fixed limit plug (15), and the bottom end of the fixed limit plug (15) is in contact with the top of the fixed connecting head (18).

2. The grinding drum cloth quick replacement device for polishing the edge of a 12-inch silicon wafer according to claim 1 is characterized in that: The outer side of the moving rod (11) is fixedly connected to the inner wall of the first fixed plate (14), and a first return spring (13) is sleeved on the outer side of the moving rod (11). One end of the first return spring (13) is fixedly connected to the first fixed plate (14), and the other end of the first return spring (13) is fixedly connected to the second fixed sleeve block (38).

3. The grinding drum cloth quick replacement device for polishing the edge of a 12-inch silicon wafer according to claim 2 is characterized in that: The other end of the movable rod (11) is fixedly connected to the fixed movable plate (22), and the front and rear ends of the fixed movable plate (22) are also sleeved with a second fixed guide rod (23), and the fixed movable plate (22) is slidably connected to the second fixed guide rod (23), one side end of the second fixed guide rod (23) is fixedly connected to the side end of the connecting fixed head (10), and the other side end of the second fixed guide rod (23) is fixedly connected to the fixed limit block (24).

4. The grinding drum cloth quick replacement device for polishing the edge of a 12-inch silicon wafer according to claim 3 is characterized in that: The top of the fixed connecting head (18) is fixedly connected to the bottom of the first fixed guide rod (17), the top of the first fixed guide rod (17) is fixedly connected to the bottom of the fixed connecting seat (16), the top of the fixed connecting seat (16) is fixedly connected to the bottom of the upper body (1) of the device, the first fixed guide rod (17) is sleeved with a first movable stopper (19) on the outside, and the first fixed guide rod (17) is slidably connected to the first movable stopper (19).

5. The grinding drum cloth quick replacement device for polishing the edge of a 12-inch silicon wafer according to claim 4 is characterized in that: The first movable stopper (19) is also provided with a plurality of circular grooves (20), the circular grooves (20) are sleeved with balls (21), and the circular grooves (20) are rotatably connected to the balls (21).

6. The grinding drum cloth quick replacement device for polishing the edge of a 12-inch silicon wafer according to claim 5, characterized in that: The left and right ends of the top of the connecting and fixing head (10) are also provided with fixed sleeve rods (25), and the top of the connecting and fixing head (10) is fixedly connected to the bottom of the fixed sleeve rod (25), the top of the fixed sleeve rod (25) is inserted into the first fixed insertion rod (26), and the fixed sleeve rod (25) is slidably connected to the first fixed insertion rod (26).

7. The grinding drum cloth quick replacement device for polishing the edge of a 12-inch silicon wafer according to claim 6, characterized in that: The front and rear ends of the bottom end of the upper main body (1) of the device are also provided with second movable blocks (27), the bottom end of the second movable block (27) is in contact with the top end of the connecting fixed head (10), the left and right sides of the second movable block (27) near the upper position are also sleeved on the outside of the third fixed guide rod (28), and the second movable block (27) is slidably connected to the third fixed guide rod (28), the front and rear ends of the third fixed guide rod (28) are also provided with second fixed plates (29), and the third fixed guide rod (28) is fixedly connected to the second fixed plate (29), and the top end of the second fixed plate (29) is fixedly connected to the bottom end of the upper main body (1) of the device.

8. The grinding drum cloth quick replacement device for polishing the edge of a 12-inch silicon wafer according to claim 7, characterized in that: A second return spring (30) is sleeved on the outside of the third fixed guide rod (28), one end of the second return spring (30) is fixedly connected to the second moving block (27), and the other end of the second return spring (30) is fixedly connected to the second fixed plate (29).

9. The grinding drum cloth quick replacement device for polishing the edge of a 12-inch silicon wafer according to claim 8, characterized in that: The outer side of the second movable block (27) is fixedly connected to the first fixed sleeve block (31); the outer side of the rotating block (36) is sleeved inside the first fixed sleeve block (31); and the first fixed sleeve block (31) is rotatably connected to the rotating block (36); the rotating block (36) is fixedly connected to one end of the transmission connecting rod (32); the other end of the transmission connecting rod (32) is fixedly connected to the upper position of the rotating pull plate (33); and the lower position of the rotating pull plate (33) is fixedly connected to the second fixed plug rod (34); and the front and rear ends of the upper body (1) of the device are also provided with fixed plug holes (35).

10. A method for quickly replacing a grinding drum cloth for polishing the edge of a 12-inch silicon wafer, applicable to the device for quickly replacing a grinding drum cloth for polishing the edge of a 12-inch silicon wafer according to any one of claims 1 to 9, characterized in that: The method comprises the following steps: S1: Pull the rotating pull plate (33) outward, driving the second movable block (27) to move outward along the third fixed guide rod (28), compressing the second return spring (30); S2: Rotate the pull plate (33) to the upper position, and after releasing it, the second fixed plug rod (34) is inserted into the fixed socket (35) under the spring rebound force, locking the second movable stopper (27) so that it is separated from the top of the connection fixing head (10); S3: applying an upward thrust to the lower body (2) of the device to push the connecting fixed head (10) upward; S4: The inclined surface of the fixed limit plug (15) contacts the arc-shaped bottom end of the first moving block (19), pushing the moving rod (11) outward and compressing the first return spring (13); S5: After the fixed limit plug (15) passes over the first movable stopper (19), the outer side thereof is clamped under the rebound force of the first return spring (13); S6: Pull the lower body (2) of the device downward, driving the fixed limit plug (15) and the first movable stopper (19) to move downward along the first fixed guide rod (17); S7: The fixed limit plug (15) is separated from the fixed connector (18), and the lower body (2) and the grinding drum cloth body (3) are completely separated. The fixed sleeve rod (25) slides along the first fixed plug rod (26) to prevent the lower body (2) of the device from rotating; S8: Align the lower body (2) of the device with the new grinding drum cloth with the lower part of the upper body (1) of the device, push the lower body (2) upward, and repeat the actions of S3-S5 to make the fixed limit plug (15) clamp the first moving block (19); S9: Reverse operation to rotate the pull plate (33) to release the lock of the fixed socket (35), and the second return spring (30) pushes the second movable block (27) to return to its original position, pressing against the top of the connecting fixed head (10) to prevent accidental separation; S10: Rotate the pull plate (33) to a horizontal position to ensure that the second fixed plug rod (34) is disengaged from the fixed plug hole (35), start the equipment no-load test, and confirm that the grinding drum cloth has no abnormal vibration or deviation.

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