Cleaning device and exposure machine

Abstract

The invention discloses a cleaning device and an exposure machine, and belongs to the technical field of exposure. The cleaning device comprises at least one cleaning assembly, and each cleaning assembly comprises a base, a bearing part, a dust sticking roller, a paper winding roller and a driving part. The bearing part is movably arranged on the base, and the dust sticking roller and the paper winding roller are rotationally arranged on the bearing part and are tangent to each other. The driving part is arranged on the base and connected with the bearing part, and the bearing part is driven to drive the dust sticking roller to make contact with the to-be-cleaned face. The dust sticking roller adsorbs dirt on the to-be-cleaned face, the paper winding roller synchronously rotates along with the dust sticking roller and transfers impurities on the surface of the dust sticking roller to the winding paper, the winding paper can be removed from the paper winding roller when adsorbing excessive dirt, and therefore it is guaranteed that the dust sticking roller is continuously in a clean state, the dirt on the to-be-cleaned face is better adsorbed, and the cleaning effect is improved.

Description

TECHNICAL FIELD

[0001] The present application relates to the field of exposure technology, in particular to a cleaning device for an exposure machine and an exposure machine with the cleaning device. BACKGROUND

[0002] In the exposure process of a board (such as a PCB (Printed Circuit Board) and an FPC (Flexible Printed Circuit)), the surface cleanliness of the board directly affects the exposure quality, so the board cleaning is a key link in the exposure process. In the prior art, there are mainly three types of solutions to meet this demand, but all have obvious defects:

[0003] Firstly, an independent PCB cleaning device is used, such as the PCB cleaning machine and its use method disclosed in CN119303883B. This type of solution increases the total floor area of the equipment and limits the layout of the production site. At the same time, the procurement and maintenance cost of the independent equipment is high, which increases the production cost of the enterprise, and the board needs to be transferred between the main production equipment and the separate cleaning machine, which easily leads to poor transfer, breaks the continuity of the production process, and reduces the overall production efficiency;

[0004] Secondly, the board surface is cleaned by using an air suction dust removal method, such as the dust suction device for automatic cleaning of an LDI device disclosed in CN216631889U. Dust particles are removed by an air suction system. However, this solution needs to arrange a large number of pipeline systems, which is difficult to adapt in the case of a compact main equipment structure. Moreover, too many pipelines will interfere with the reasonable arrangement of water pipes, gas pipes and electric wires inside the main equipment, increase the difficulty of equipment integration, and affect the overall structural design of the main equipment;

[0005] Thirdly, a manual operation dust sticking roller method is used. The operator holds a roller with sticky paper to roll on the surface of the board to stick and remove small particulate matter and debris, but manual operation needs continuous human input, which increases the labor cost of the enterprise in the long run, and the cleaning speed is slow and difficult to meet the production capacity demand of large-scale production. At the same time, the cleaning effect is greatly affected by the proficiency of the operator and has poor stability.

[0006] In summary, the existing board cleaning solutions in the prior art have different degrees of deficiencies in equipment integration, structural adaptability, cost control and production efficiency. Therefore, there is an urgent need for a board cleaning technical solution that can be integrated into the main equipment, has a compact structure, reasonable cost and high cleaning efficiency.

[0007] The information disclosed in this BACKGROUND section is only intended to increase an understanding of the general background of the application and should not be construed as a recognition of the prior art of any form. SUMMARY

[0008] The purpose of this invention is to provide a cleaning device that can be integrated into the main equipment, and has a compact structure, small footprint, and high cleaning efficiency.

[0009] The purpose of this invention is to provide an exposure machine, including a cleaning device, which can at least improve cleaning efficiency.

[0010] To achieve the above objectives, embodiments of the present invention provide a cleaning apparatus, including at least one cleaning component, each cleaning component comprising:

[0011] Base;

[0012] A support member is provided on the base and can move relative to the base toward the surface to be cleaned;

[0013] A dust roller is rotatably mounted on the carrier, the surface of the dust roller has an adhesive substance, and the dust roller is configured to pick up dirt from the surface to be cleaned by rolling.

[0014] A paper roll is rotatably mounted on the support member and tangentially disposed to the dust-adhesive roller. The adhesiveness of the paper roll on the paper roll is greater than that of the adhesive substance on the dust-adhesive roller. The paper roll can rotate synchronously with the dust-adhesive roller and transfer dirt from the surface of the dust-adhesive roller to the paper roll.

[0015] A drive unit, disposed on the base and connected to the carrier, is configured to drive the sticky roller to contact the surface to be cleaned by driving the carrier.

[0016] In one or more embodiments of the present invention, the paper roll includes

[0017] A support spindle is provided on the carrier and can move relative to the carrier toward the dust-adhesive roller;

[0018] A paper roll is fitted outside the support mandrel and can rotate relative to the support mandrel. The paper roll is a cylindrical structure formed by multiple layers of paper rolls stacked and wound together.

[0019] In one or more embodiments of the present invention, the cross-section of the support mandrel is a regular octagon.

[0020] In one or more embodiments of the present invention, it also includes

[0021] The pressing assembly, mounted on the carrier and abutting against the support mandrel, is configured to drive the support mandrel to move in a direction approaching the sticky roller, so that the paper roll and the sticky roller are continuously tangent.

[0022] In one or more embodiments of the present invention, the pressing assembly includes a cylinder and a pin connected to the cylinder, the pin being located between the cylinder and a support mandrel, the cylinder being configured to drive the support mandrel to move axially toward the sticky roller via the pin, so that the paper roll and the sticky roller are continuously tangent.

[0023] In one or more embodiments of the present invention, the sticky roller includes

[0024] Roller shaft;

[0025] An antistatic rubber roller is used to cover the outside of the roller shaft.

[0026] In one or more embodiments of the present invention, the carrier is movable relative to the base via a guide assembly, the guide assembly including a guide rail and a slider slidably provided with the guide rail, wherein one of the carrier and the base is provided with the guide rail and the other is provided with the slider.

[0027] In one or more embodiments of the present invention, an elastic connector is further included. The base is provided with a first connecting portion, and the carrier is provided with a second connecting portion. The first connecting portion and the second connecting portion are distributed at intervals along the moving direction of the carrier. One end of the elastic connector is connected to the first connecting portion, and the opposite end is connected to the second connecting portion.

[0028] In one or more embodiments of the present invention, a limiting component is further included, the limiting component including a resisting component and a limiting component, the resisting component being mounted on the carrier and being able to move synchronously with the movement of the carrier, and the limiting component being mounted on the base.

[0029] In one or more embodiments of the present invention, the abutting component is a hydraulic buffer, and the limiting component is a limiting block.

[0030] In one or more embodiments of the present invention, it also includes

[0031] An oil baffle is installed on the base and located below the guide assembly.

[0032] In one or more embodiments of the present invention, the carrier includes

[0033] ontology;

[0034] A first mounting plate and a second mounting plate are spaced apart from the body along the length of the body. The first mounting plate and the second mounting plate are respectively provided with a first assembly groove and a second assembly groove. The sticky roller is detachably mounted between the first mounting plate and the second mounting plate through the first assembly groove and the second assembly groove.

[0035] In one or more embodiments of the present invention, the first mounting plate and the second mounting plate are respectively provided with a third assembly groove and a fourth assembly groove, and the paper roll is detachably mounted between the first mounting plate and the second mounting plate through the third assembly groove and the fourth assembly groove.

[0036] In one or more embodiments of the present invention, two cleaning components are included, which are arranged in a straight line.

[0037] An embodiment of the present invention provides an exposure machine, characterized in that it includes the cleaning device described in any one of the above claims.

[0038] Compared with the prior art, the cleaning device according to the present invention adopts a dual-roller cleaning mode. The dust-adhesive roller is used to adsorb dirt on the surface to be cleaned. The paper roll roller rotates synchronously with the dust-adhesive roller to transfer dirt on the surface of the dust-adhesive roller to the paper roll. The paper roll can be removed from the paper roll roller when it adsorbs too much dirt, thereby ensuring that the dust-adhesive roller is always in a clean state so as to better adsorb dirt on the surface to be cleaned and improve the cleaning effect.

[0039] Meanwhile, this cleaning device can be flexibly added to the main equipment as a component, making it highly adaptable and easily integrated into various compatible devices. Furthermore, this cleaning device occupies far less space than traditional ventilation and dust removal solutions, eliminating the need for lengthy ductwork and making it more suitable for compact production or equipment layouts.

[0040] The cleaning device also enhances the safety of the operation process by setting up flexible connectors and limiting components. At the same time, the convenient replacement of the toilet paper roll further simplifies the daily operation process, helping to optimize both overall work efficiency and user experience. Attached Figure Description

[0041] Figure 1 This is a perspective view of a cleaning device according to an embodiment of the present invention;

[0042] Figure 2 This is a side view of a cleaning device according to an embodiment of the present invention;

[0043] Figure 3 This is a front view of a cleaning device according to an embodiment of the present invention;

[0044] Figure 4 yes Figure 2 A cross-sectional view along the AA direction;

[0045] Figure 5 yes Figure 3 A sectional view along the BB direction;

[0046] Figure 6 yes Figure 3 A sectional view along the CC direction;

[0047] Figure 7 yes Figure 4 Enlarged schematic diagram of part P in the middle.

[0048] Explanation of key figure labels:

[0049] 10-Cleaning component, 11-Base, 111-First connecting part, 111a-First spring mounting plate, 111b-First spring support, 12-Carrier, 121-Body, 122-First mounting plate, 122a-First assembly slot, 122b-Third assembly slot, 123-Second mounting plate, 123a-Second assembly slot, 123b-Fourth assembly slot, 124-Second connecting part, 124a-Second spring mounting plate, 124b-Second spring support, 13-Dust roller, 131- Roller, 132-Drum, 14-Paper Roller, 141-Support Mandrel, 142-Paper Roller, 15-Drive Component, 16-Guide Assembly, 161-Guide Rail, 162-Slider, 17-Pressing Assembly, 171-Cylinder, 172-Ejector Pin, 18-Limit Assembly, 181-Abutting Component, 182-Limit Component, 19-Elastic Connector, 20-Oil Baffle, D1-First Guide Groove, E1-First Limit Groove, D2-Second Guide Groove, E2-Second Limit Groove, M-Bearing, N-Limit Component. Detailed Implementation

[0050] The specific embodiments of the present invention will now be described in detail with reference to the accompanying drawings, but it should be understood that the scope of protection of the present invention is not limited to the specific embodiments.

[0051] Unless otherwise expressly stated, throughout the specification and claims, the term "comprising" or its variations such as "including" or "comprises" shall be understood to include the stated elements or components without excluding other elements or other components.

[0052] like Figures 1 to 3 As shown, a cleaning device 100 according to a preferred embodiment of the present invention can be installed as a separate functional component on the required equipment, such as an exposure machine. The cleaning device 100 employs a dual-roller cleaning mode. A dust-adhesive roller 13 is used to adsorb dirt from the surface to be cleaned. A paper roll roller 14 rotates synchronously with the dust-adhesive roller 13, transferring dirt from the surface of the dust-adhesive roller 13 to the paper roll. The paper roll can be removed from the paper roll roller 14 when it has absorbed too much dirt, thereby ensuring that the dust-adhesive roller 13 remains clean to better adsorb dirt from the surface to be cleaned, improving the cleaning effect and reducing the replacement frequency of the dust-adhesive roller 13.

[0053] Combination Figures 1 to 3As shown, the cleaning device 100 includes at least one cleaning component 10, each of which can clean the surface to be cleaned (such as the surface of a PCB board). The number and arrangement of the cleaning components 10 can be set according to actual needs. Figure 1 As shown, the cleaning device 100 includes two cleaning components 10 arranged in a straight line. This arrangement can effectively expand the cleaning coverage and improve cleaning efficiency. For example, compared with a single cleaning component 10, two linearly arranged cleaning components 10 can cover twice the area to be cleaned in the same amount of time, significantly improving work efficiency.

[0054] like Figures 1 to 3 , Figure 6 As shown, the cleaning assembly 10 includes a base 11, a carrier 12, a dust-adhesive roller 13, a paper roll roller 14, and a drive component 15. The carrier 12 is mounted on the base 11 and can move relative to the base 11 in a preset direction (e.g., ...). Figure 2 The vertical direction shown is used to install components such as the adhesive roller 13 and the paper roll 14. The preset direction here is usually towards the surface to be cleaned. The adhesive roller 13 is mounted on the carrier 12 and can rotate relative to the carrier 12 around its own axis. Its surface has an adhesive substance 132, which can be used to pick up dirt from the surface to be cleaned. The paper roll 14 is also mounted on the carrier 12 and can rotate relative to the carrier 12 around its own axis. It is further tangentially positioned to the adhesive roller 13 and can rotate synchronously with the adhesive roller 13. The adhesiveness of the paper roll on it is greater than that of the adhesive substance 132 on the surface of the adhesive roller 13, thus transferring dirt from the surface of the adhesive roller 13 to the paper roll, keeping the adhesive roller 13 clean and enabling it to better pick up dirt. The drive unit 15 is assembled on the base 11 and connected to the carrier 12. It can be used to drive the carrier 12 to move towards the surface to be cleaned, so that the adhesive roller 13 contacts the surface to be cleaned. The drive unit 15 is preferably a cylinder.

[0055] The working principle of the cleaning device 100 will be further explained below, taking the PCB board surface as an example.

[0056] The PCB board on the exposure equipment's worktable can be moved to the exposure position along a preset direction. When cleaning of the PCB board is required, the drive unit 15 drives the carrier unit 12 to move towards the PCB board, and the carrier unit 12 further drives the adhesive roller 13 and the paper roll roller 14 to move towards the surface to be cleaned. After moving into position, the adhesive roller 13 contacts the PCB board and rolls with the movement of the PCB. During the rolling process, the adhesive roller 13 picks up particles and dust from the PCB board. At the same time, the paper roll roller 14 rolls along with the adhesive roller 13, transferring the particles on the adhesive roller 13 to the paper roll with stronger adhesive paper. When too much dirt adheres to the paper roll, the paper roll can be torn off to expose a new paper roll. By repeating the above process, dirt on the surface of the PCB board can be removed while keeping the adhesive roller 13 clean.

[0057] like Figure 1 As shown, to enable the carrier 12 to slide relative to the base 11, a guide assembly 16 is provided between the carrier 12 and the base 11. The guide assembly 16 includes a guide rail 161 extending along a preset moving direction of the carrier 12 and a slider 162 slidably disposed on the guide rail 161. One of the carrier 12 and the base 11 is provided with the guide rail 161, and the other with the slider 162. In this embodiment, it is optimal to have the guide rail 161 on the base 11 and the slider 162 on the carrier 12.

[0058] like Figure 1 As shown, the carrier 12 includes a body 121, a first mounting plate 122, and a second mounting plate 123. The first mounting plate 122 is located at one end of the body 121, and the second mounting plate 123 is located at the opposite end of the body 121. The sticky roller 13 and the paper roll 14 are both located between the first mounting plate 122 and the second mounting plate 123. Specifically, one end of the sticky roller 13 is connected to the first mounting plate 122, and the opposite end is connected to the second mounting plate 123. One end of the paper roll 14 is connected to the first mounting plate 122, and the opposite end is connected to the second mounting plate 123. In this embodiment, both ends of the sticky roller 13 are detachably connected to the first mounting plate 122 and the second mounting plate 123. Similarly, both ends of the paper roll 14 are also detachably connected to the first mounting plate 122 and the second mounting plate 123. By making the sticky roller 13 and the paper roll 14 detachably connected to the mounting plates, it is convenient to disassemble and replace the sticky roller 13 and the paper roll 14.

[0059] Furthermore, such as Figure 1As shown, the first mounting plate 122 has a first mounting groove 122a, and the second mounting plate 123 has a second mounting groove 123a. The first mounting groove 122a and the second mounting groove 123a can be used to achieve detachable installation of the sticky roller 13. In a specific implementation, one end of the sticky roller 13 is inserted into the first mounting groove 122a, and the opposite end is inserted into the second mounting groove 123a to achieve installation of the sticky roller 13. Figure 5 As shown, the first assembly groove 122a includes a first guide groove D1 and a first limiting groove E1 that are connected. One end of the first guide groove D1 is an open end, and the opposite end is connected to the first limiting groove E1. The first guide groove D1 can be used to guide the end of the sticky roller 13 smoothly into the first limiting groove E1. The first limiting groove E1 fixes the end of the sticky roller 13 to the mounting plate to prevent it from shifting or falling off. The structure of the second assembly groove 123a is preferably the same as that of the first assembly groove 12a. When assembling the sticky roller 13, the operator aligns the two ends of the sticky roller 13 with the open ends of the first guide groove D1 of the first assembly groove 122a on the corresponding mounting plate, and pushes it in along the direction of the first guide groove D1 until the end of the sticky roller 13 is completely inserted into the first limiting groove E1, thus completing the installation and fixing of the sticky roller 13. When replacing the sticky roller 13, the operator pushes the sticky roller 13 in the opposite direction so that the end of the sticky roller 13 disengages from the first limiting groove E1 and slides into the first guide groove D1. Then continue to pull the first guide groove D1 outward until the end is completely separated from the opening end of the first guide groove D1 on the mounting plate, and the dust roller 13 can be removed.

[0060] Furthermore, such as Figure 1 As shown, the first mounting plate 122 has a third mounting groove 122b, and the second mounting plate 123 has a fourth mounting groove 123b. The third mounting groove 122b and the fourth mounting groove 123b can be used to achieve detachable installation of the paper roll 14. In a specific implementation, one end of the paper roll 14 is inserted into the third mounting groove 122b, and the opposite end is inserted into the fourth mounting groove 123b to achieve installation of the paper roll 14. Figure 5As shown, the third assembly groove 122b includes a second guide groove D2 and a second limiting groove E2 that are connected. One end of the second guide groove D2 is open, and the opposite end is connected to the second limiting groove E2. The second guide groove D2 can be used to guide the end of the paper roll 14 smoothly into the second limiting groove E2. The second limiting groove E2 fixes the end of the paper roll 14 to the mounting plate to prevent it from shifting or falling off. The structure of the fourth assembly groove 123b is preferably the same as that of the third assembly groove 122b. When assembling the paper roll 14, the operator aligns the two ends of the paper roll 14 with the open ends of the second guide groove D2 of the second assembly groove 123a on the corresponding mounting plate, and pushes it in along the direction of the second guide groove D2 until the end of the paper roll 14 is completely inserted into the second limiting groove E2, thus completing the installation and fixing of the adhesive roller 13. When replacing the paper roll 14, the operator pushes the paper roll 14 in the opposite direction so that the end of the paper roll 14 disengages from the second limiting groove E2 and slides into the second guide groove D2. Then continue pulling outwards along the second guide groove D2 until the end is completely disengaged from the opening end of the first guide groove D1 on the mounting plate, at which point the paper roll 14 can be removed. It should be noted that both ends of the support mandrel 141 are inserted into the second limiting groove E2, but do not contact the bottom surface of the second limiting groove E2.

[0061] like Figure 6 As shown, the sticky roller 13 includes a roller shaft 131 and a drum 132 that covers the outside of the roller shaft 131 and is rotatable relative to the roller shaft 131. The outer surface of the drum 132 has an adhesive substance. In a specific implementation, the drum 132 is preferably an antistatic rubber roller, which is sleeved on the outside of the roller shaft 131. When installing the sticky roller 13, both ends of the roller shaft 131 can be respectively embedded into the corresponding first mounting grooves 122a and located at the bottom of the first mounting grooves 122a to achieve the assembly of the sticky roller 13.

[0062] Furthermore, such as Figure 6 and Figure 7 As shown, the paper roll 14 includes a support mandrel 141 and a paper roll 142 sleeved outside the support mandrel 141 and rotatable relative to the support mandrel 141. The paper roll 142 can rotate relative to the support mandrel 141 via a bearing M. In a specific implementation, as... Figure 7 As shown, a limiting member N can also be provided between the bearing M and the paper roll 142 to restrict the lateral movement of the paper roll 142. Figure 7 As shown, the limiting member N is sleeved on the outside of the bearing M and contacts the inner wall of the paper roll 142. The cross-section of the limiting member N gradually increases from the inside to the outside of the paper roll 142. This structure of the limiting member N can better restrict the lateral movement of the paper roll 142 and improve stability.

[0063] The toilet paper roll 142 is a cylindrical structure formed by multiple layers of rolled paper stacked and wound together. That is, the toilet paper roll 142 is not a single sheet of paper, but rather composed of multiple sheets of rolled paper wound layer upon layer. Each sheet of paper can be torn off independently, allowing for the reuse of the toilet paper roll 14. When the surface of the toilet paper is contaminated to the point of affecting cleaning effectiveness, the operator can tear off the contaminated surface layer of paper around the circumference of the toilet paper roll 142, exposing the clean, new roll underneath for use, thus achieving rapid toilet paper replacement. It should be noted that, in one embodiment, the roller shaft 131 of the adhesive roller 13 and the support core shaft 141 of the toilet paper roll 14 are substantially located in the same vertical plane.

[0064] Combination Figure 1 , Figure 2 , Figure 3 , Figure 5 As shown, to ensure that the paper roll 14 and the adhesive roller 13 always remain tangent, a pressing assembly 17 is provided on the support member 12. The second limiting groove E2 in the third assembly groove 122b and the fourth assembly groove 123b is elongated and extends along the moving direction of the support member 12. The purpose is to enable the paper roll 14 to move towards the adhesive roller 13 to ensure that the two are always tangent. The pressing assembly 17 can drive the support spindle 141 of the paper roll 14 to move along the second limiting groove E2 towards the adhesive roller 13, thereby ensuring that the paper roll 14 and the adhesive roller 13 maintain continuous tangential contact.

[0065] In this embodiment, as Figure 7 As shown, the pressing assembly 17 includes a cylinder 171 and a pin 172 connected to the cylinder 171. The pin 172 is located between the cylinder 171 and the support spindle 141. The cylinder 171 drives the pin 172 to abut against the support spindle 141, thereby driving the support spindle 141 to move towards the adhesive roller 13, ensuring that the paper roll 14 and the adhesive roller 13 are in continuous tangential contact.

[0066] like Figure 5 As shown, the cross-section of the end of the support spindle 141 is designed as a regular octagon. This design avoids the defects of other shapes: if a circle is used, the cylinder 171 cannot effectively abut against the end of the support spindle 141; if a square is used, its long diagonal will make it difficult to assemble and disassemble on the mounting plate. The design of the cross-section of the end of the support spindle 141 as a regular octagon allows the support spindle 141 to be well abutted by the ejector pin 172, making the support spindle 141 less prone to rotation.

[0067] like Figure 6As shown, when the paper roll on the paper roll 142 is exhausted, the drive member 15 no longer needs to drive the adhesive roller 13 to contact the surface to be cleaned via the drive support member 12. Therefore, the cleaning assembly 10 also includes a limiting assembly 18 to limit the travel range of the support member 12, ensuring that the drive member 15 cannot drive the adhesive roller 13 to contact the surface to be cleaned when the paper roll on the paper roll 142 is exhausted. The limiting assembly 18 includes a stop member 181 and a limiting member 182. The stop member 181 is mounted on the support member 12 and can move synchronously with the movement of the support member 12. The limiting member 182 is mounted on the base 11. In a specific implementation, the drive member 15 drives the support member 12 to move towards the surface to be cleaned, and the stop member 181 moves with the support member 12 and approaches the limiting member 182. After moving a certain distance, the abutting component 181 and the limiting component 182 come into contact. With the cooperation of the two, the carrier 12 cannot continue to move towards the surface to be cleaned, thereby limiting the range of movement of the carrier 12.

[0068] In this embodiment, the abutting component 181 is preferably a hydraulic buffer to prevent damage to the component caused by hard impact. The limiting component 182 is preferably a limiting block.

[0069] like Figure 1 As shown, to prevent the entire support member 12 from detaching from the base 11 when the drive member 15 suddenly stops working, an elastic connector 19 is provided between the base 11 and the support member 12. One end of the elastic connector 19 is connected to the base 11, and the opposite end is connected to the support member 12. When the drive member 15 stops working, the elastic connector 19 can use its own elasticity to keep the support member 12 and the base 11 in a stable connection state, effectively preventing them from detaching.

[0070] In this embodiment, combined with Figure 1 and Figure 6As shown, the base 11 is provided with a first connecting portion 111, and the support member 12 is provided with a second connecting portion 124. The first connecting portion 111 and the second connecting portion 124 are distributed at intervals along the moving direction of the support member 12, as shown in the figure. The first connecting portion 111 is located at the top of the base 11, and the second connecting portion 124 is located at the bottom of the support member 12. One end of the elastic connecting member 19 is connected to the first connecting portion 111, and the opposite end is connected to the second connecting portion 124. When the driving member 15 stops working, the elastic connecting member 19 can keep the support member 12 and the base 11 in a stable connection state, effectively preventing them from separating. Here, the elastic connecting member 19 is preferably a spring. The first connecting portion 111 includes a first spring mounting plate 111a and a first spring support column 111b provided on the first spring mounting plate 111a. The first spring support column 111b is provided with a hanging hole. The second connecting part 124 includes a second spring mounting plate 124a and a second spring support 124b disposed on the second spring mounting plate 124a. The second spring support 124b is also provided with a hanging hole. Through the hanging hole on the first spring support 111b and the hanging hole on the second spring support 124b, one end of the spring can be connected to the first connecting part 111, and the opposite end can be connected to the second connecting part 124.

[0071] Furthermore, as described above, the guide rail 161 in the guide assembly 16 is arranged vertically, and the slider 162 is slidably disposed on the guide rail. Lubricating oil is usually provided between the slider 162 and the guide rail 161. To prevent lubricating oil from dripping and contaminating the surface to be cleaned, an oil baffle 20 is provided on the base 11 and below the guide assembly 16 to catch any dripping lubricating oil.

[0072] This invention also discloses an exposure machine including the cleaning device described above, capable of pre-cleaning the surface of the substrate to be exposed, thereby ensuring exposure quality.

[0073] The foregoing description of specific exemplary embodiments of the invention is for illustrative and explanatory purposes. These descriptions are not intended to limit the invention to the precise forms disclosed, and it will be apparent that many changes and variations can be made in accordance with the foregoing teachings. The exemplary embodiments were chosen and described in order to explain the specific principles of the invention and its practical application, thereby enabling those skilled in the art to implement and utilize various different exemplary embodiments of the invention, as well as various different choices and variations. The scope of the invention is intended to be defined by the claims and their equivalents.

Claims

1. A cleaning device, characterized in that, Includes at least one cleaning component, each cleaning component comprising: Base; A support member is provided on the base and can move relative to the base toward the surface to be cleaned; A dust roller is rotatably mounted on the carrier, the surface of the dust roller has an adhesive substance, and the dust roller is configured to pick up dirt from the surface to be cleaned by rolling. A paper roll is rotatably mounted on the support member and tangentially disposed to the dust-adhesive roller. The adhesiveness of the paper roll on the paper roll is greater than that of the adhesive substance on the dust-adhesive roller. The paper roll can rotate synchronously with the dust-adhesive roller and transfer dirt from the surface of the dust-adhesive roller to the paper roll. A drive unit, disposed on the base and connected to the carrier, is configured to drive the sticky roller to contact the surface to be cleaned by driving the carrier.

2. The cleaning device as claimed in claim 1, characterized in that, The paper roll includes A support spindle is provided on the carrier and can move relative to the carrier toward the dust-adhesive roller; A paper roll is fitted outside the support mandrel and can rotate relative to the support mandrel. The paper roll is a cylindrical structure formed by multiple layers of paper rolls stacked and wound together.

3. The cleaning device as described in claim 2, characterized in that, The cross-section of the support mandrel is a regular octagon.

4. The cleaning device as described in claim 2, characterized in that, Also includes The pressing assembly, mounted on the carrier and abutting against the support mandrel, is configured to drive the support mandrel to move in a direction approaching the sticky roller, so that the paper roll and the sticky roller are continuously tangent.

5. The cleaning device as described in claim 4, characterized in that, The pressing assembly includes a cylinder and a pin connected to the cylinder. The pin is located between the cylinder and the support mandrel. The cylinder is configured to drive the support mandrel to move in a direction approaching the dust roller via the pin, so that the paper roll and the dust roller are continuously tangent.

6. The cleaning device as claimed in claim 1, characterized in that, The adhesive roller includes Roller shaft; An antistatic rubber roller is used to cover the outside of the roller shaft.

7. The cleaning device as claimed in claim 1, characterized in that, The carrier is movable relative to the base via a guide assembly, the guide assembly including a guide rail and a slider slidably provided with the guide rail, wherein one of the carrier and the base is provided with the guide rail and the other is provided with the slider.

8. The cleaning device as claimed in claim 1, characterized in that, It also includes an elastic connector. The base is provided with a first connecting part, and the carrier is provided with a second connecting part. The first connecting part and the second connecting part are distributed at intervals along the moving direction of the carrier. One end of the elastic connector is connected to the first connecting part, and the opposite end is connected to the second connecting part.

9. The cleaning device as claimed in claim 1, characterized in that, It also includes a limiting component, which includes a stop component and a limiting component. The stop component is mounted on the carrier and can move synchronously with the movement of the carrier. The limiting component is mounted on the base.

10. The cleaning device as claimed in claim 9, characterized in that, The abutting component is a hydraulic buffer, and the limiting component is a limiting block.

11. The cleaning device as claimed in claim 7, characterized in that, Also includes An oil baffle is installed on the base and located below the guide assembly.

12. The cleaning device as claimed in claim 1, characterized in that, The carrier includes ontology; A first mounting plate and a second mounting plate are spaced apart on the body along the length of the body. The first mounting plate and the second mounting plate are respectively provided with a first assembly groove and a second assembly groove. The sticky roller is detachably mounted between the first mounting plate and the second mounting plate through the first assembly groove and the second assembly groove.

13. The cleaning device as claimed in claim 12, characterized in that, The first mounting plate and the second mounting plate are respectively provided with a third assembly groove and a fourth assembly groove, and the paper roll is detachably mounted between the first mounting plate and the second mounting plate through the third assembly groove and the fourth assembly groove.

14. The cleaning device as claimed in claim 1, characterized in that, It includes two cleaning components, which are arranged in a straight line.

15. An exposure machine, characterized in that, Includes the cleaning device as described in any one of claims 1 to 14.

Images