Water beam jet flow positioning correction system for water-jet guided laser processing equipment

By using pitch and rotation micro-movement adjustment mechanisms in water-guided laser processing equipment combined with the technology of visual cameras, the angle deviation of the water beam is identified and corrected, and the problem of degradation of water beam accuracy is solved, and efficient and high-precision water beam positioning is achieved Correction improves processing efficiency and accuracy.

CN222176311UActive Publication Date: 2024-12-17NANJING ZHONGKE RAYCHAM TECH
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Patent Information

Application Number
CN202323663064.3
Authority / Receiving Office
CN · China
Patent Type
Utility models(China)
Current Assignee / Owner
Filing Date
2023-12-30
Publication Date
2024-12-17
Estimated Expiration
2033-12-30

AI Technical Summary

Technical Problem

After the existing water-conducting laser processing equipment replaces the nozzle or restarts the high-pressure water pump, the geometric position and dimensional accuracy of the water beam are prone to deviate, resulting in a decrease in processing accuracy. The existing correction methods are inefficient and costly.

Method used

The two-degree-of-freedom rotation swing mechanism combined with the pitch micro-movement adjustment mechanism and the rotation micro-movement adjustment mechanism are adopted, and the X-direction and Y-direction vision camera and visual recognition components are used to identify the angle deviation of the water jet through image processing and dynamic feedback control to achieve Spatial posture correction of water beams.

Benefits of technology

It realizes rapid and effective positioning correction of water beams, improves processing accuracy and efficiency, reduces costs, and shortens correction time to 1/3, ensuring high efficiency and high accuracy of water-conducting laser processing.

✦ Generated by Eureka AI based on patent content.

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Patent Text Reader

Abstract

The utility model provides a water beam jet flow positioning correction system for water-jet guided laser processing equipment. The system comprises a pitching micro-motion adjusting mechanism, a pitching mechanism driving motor, a rotating micro-motion adjusting mechanism, a rotating mechanism driving motor, a water guide laser machining head, a mounting flange, an X-direction visual camera, a Y-direction visual camera, a visual recognition assembly and a control system. And the pitching micro-motion adjusting mechanism and the rotating micro-motion adjusting mechanism are combined and mounted to form a two-degree-of-freedom rotating and swinging mechanism. The angle of the water guide laser processing head in the X-Y direction can be adjusted through a two-degree-of-freedom rotating and swinging mechanism; the visual identification assembly is used for identifying the angular deviation of the water jet in the X direction and / or the Y direction; the control system can control the rotation of the driving motor of the driving rotating mechanism and the rotation of the driving motor of the pitching mechanism according to the angle deviation, so that the two-degree-of-freedom rotating and swinging mechanism finely adjusts the water-guided laser processing head, and the angle deviation of the water jet in the X and / or Y direction is compensated and eliminated.
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Description

Technical Field

[0001] The utility model relates to the technical field of water-guided laser processing, in particular to a water beam jet positioning and correction system for water-guided laser processing equipment. Background Art

[0002] Water-jet guided laser (WJGL), also known as laser water jet processing, refers to the technology of coupling laser into high-pressure water beam and coupling water beam for processing. The processing method of laser and water beam coupling will produce a slit parallel to the incision section, which can not only ensure precise processing accuracy, but also ensure that the processing area is cooled and clean. At the same time, there is no need for laser focusing and distance control during the processing process. It can be applied to the processing of various thickness ranges and difficult-to-process materials, and will not produce defects such as heat-affected zones and microcracks, meeting complex and precise processing needs.

[0003] The laser water jet nozzle is a necessary condition for forming a stable and reliable "water fiber". The nozzle is generally made of sapphire (ruby) material and has very high requirements for processing accuracy. Since the nozzle is subjected to high water pressure and laser impact that does not enter the water beam, the nozzle is a conventional consumable part. Every time a new nozzle is replaced, there are processing differences between different nozzles. In addition to the processing error of the nozzle, there are also positioning errors in the nozzle installation, errors caused by high-pressure water impact, etc., which will cause deviations in the geometric position and dimensional accuracy of the processed "water jet". For example, the water beam is not perpendicular to the workpiece coordinate system; the water beam diameter presents different diameters under different water pressures, etc.

[0004] In the prior art, there are usually two methods to correct the geometric relationship of the water beam. The first method is to manually measure and adjust the verticality of the water beam, which has low correction accuracy and efficiency. The second method is to use the water beam to touch the sensor at different heights in the X and Y directions multiple times, determine the deviation angle through trigonometric functions, and control the micro-motion mechanism to drive the processing head to deflect, thereby performing water beam correction. Although the reliability and accuracy of the correction are relatively high, the operation is relatively cumbersome, generally requiring multiple sampling and comparison operations, and has high requirements for sensors and high costs. Utility Model Content

[0005] The utility model aims to provide a water jet positioning and correction system for water-guided laser processing equipment, which performs positioning and correction of water jets of water-guided lasers based on visual positioning, and provides fast and effective positioning and correction compensation for problems such as water jet deflection and water jet diameter change caused by factors such as "tool setting" and "tool change" of water-guided laser equipment and the impact of the high-pressure pump on the nozzle after restarting.

[0006] According to the first aspect of the purpose of the utility model, a water jet positioning correction system for water-guided laser processing equipment is proposed, including a pitch fine adjustment mechanism, a pitch mechanism drive motor, a rotation fine adjustment mechanism, a rotation mechanism drive motor, a water-guided laser processing head, a mounting flange, an X-direction visual camera, a Y-direction visual camera, a visual recognition component and a control system;

[0007] The pitch fine-motion adjustment mechanism and the rotation fine-motion adjustment mechanism are installed in combination to form a rotation and swing mechanism with two degrees of freedom. The pitch fine-motion adjustment mechanism is configured to be able to rotate around the Y axis, and the rotation fine-motion adjustment mechanism is configured to be able to rotate around the X axis.

[0008] The water-conducting laser processing head is mounted on the rotating fine adjustment mechanism through the mounting flange, and the angle of the water-conducting laser processing head in the XY direction can be adjusted through the rotating swing mechanism with two degrees of freedom;

[0009] The X-direction visual camera and the Y-direction visual camera are respectively arranged below the water-guided laser processing head in the corresponding X direction and Y direction, and the camera fields of view completely cover the water jet tight section, and are used to image and output the water jet from the X direction and the Y direction respectively;

[0010] The visual recognition component is connected to the X-direction visual camera and the Y-direction visual camera respectively, and is used to identify the angular deviation of the water jet along the X direction and / or the Y direction according to the water jet images output by the X-direction visual camera and the Y-direction visual camera;

[0011] The control system is electrically connected to the rotation mechanism drive motor and the pitch mechanism drive motor respectively, and is used to control the rotation of the rotation mechanism drive motor and the pitch mechanism drive motor according to the angle deviation, so that the corresponding rotation fine-motion adjustment mechanism and the pitch fine-motion adjustment mechanism are fine-tuned accordingly, thereby compensating and eliminating the angle deviation of the water jet in the X direction and / or the Y direction.

[0012] As an optional embodiment, the pitch fine-motion adjustment mechanism and the rotation fine-motion adjustment mechanism both have a self-locking function.

[0013] As an optional embodiment, the pitch fine-motion adjustment mechanism and the rotation fine-motion adjustment mechanism have a rotation resolution within 10″, and a rotation range of ±10°.

[0014] As an optional embodiment, the X-direction vision camera is arranged behind the water-guided laser processing head, and the camera field of view faces the X direction.

[0015] As an optional embodiment, the Y-direction visual camera is arranged on the side of the water-guided laser processing head, and the camera field of view faces the Y direction.

[0016] As an optional embodiment, the control system controls the rotation mechanism driving motor to drive the rotation fine adjustment mechanism to move based on the angle deviation in the X direction, and the rotation fine adjustment mechanism drives the water-guided laser processing head to rotate in the opposite direction to eliminate the deviation and compensate for the tilt angle of the water jet in the X direction; and

[0017] Based on the angle deviation in the Y direction, the pitch mechanism driving motor is controlled to drive the pitch fine-motion adjustment mechanism to move. The pitch fine-motion adjustment mechanism drives the water-guided laser processing head to rotate in the opposite direction to eliminate the deviation and compensate for the tilt angle of the water jet in the Y direction.

[0018] As an optional embodiment, the visual recognition component is configured to recognize the angular deviation in the following manner:

[0019] Receive water jet images collected by X-axis / Y-axis visual cameras;

[0020] The key area image of the water jet is cropped and gray-scaled, and the processed water jet image is approximately fitted into a gray line segment;

[0021] By comparing the angle between the gray line segment and the reference line perpendicular to the Z axis, the deviation angle of the water jet along the X direction / Y direction is obtained.

[0022] As an optional embodiment, the visual recognition component is configured to identify and locate the actual width of the water jet based on the water jet image captured by the X-axis / Y-axis visual camera, and obtain the laser-coupled water beam line diameter and center point of the water-guided laser processing.

[0023] Compared with the prior art, the significant advantages of the utility model are:

[0024] (1) The water jet positioning correction system for water-guided laser processing equipment proposed by the utility model can automatically detect the deviation angle between the actual water jet in space and the absolute vertical reference system under conditions such as nozzle replacement and restart of the high-pressure water pump, and perform dynamic feedback control based on the deviation angle to compensate for the deviation, thereby achieving spatial posture correction of the water jet and ensuring the accuracy of water-guided laser processing;

[0025] (2) Compared with the existing contact-type sensor that measures the spatial coordinates of two points of the water beam and then calculates the deviation angle, the water beam jet positioning correction system for water-guided laser processing equipment proposed in the utility model has a simpler structure, higher efficiency and lower cost. The water beam jet positioning correction system of the utility model can shorten the spatial correction time of the water jet posture to 1 / 3, thus achieving efficient and high-precision correction.

[0026] (3) The water jet positioning and correction system of the utility model can quickly identify the water jet diameter, realize the processing width and processing center positioning of the water jet, so as to determine the starting position and processing size of the water-guided laser processing, provide an accurate reference basis for the processing tool compensation and tool coordinate system setting, and improve the efficiency and accuracy of the water-guided laser processing.

[0027] It should be understood that all combinations of the aforementioned concepts and the additional concepts described in more detail below can be considered as part of the utility model subject matter of the present disclosure as long as such concepts are not mutually contradictory. In addition, all combinations of the claimed subject matter are considered as part of the utility model subject matter of the present disclosure.

[0028] The foregoing and other aspects, embodiments and features of the present invention can be more fully understood from the following description in conjunction with the accompanying drawings. Other additional aspects of the present invention, such as the features and / or beneficial effects of the exemplary embodiments, will be apparent from the following description or learned from the practice of the specific embodiments according to the teachings of the present invention. BRIEF DESCRIPTION OF THE DRAWINGS

[0029] The accompanying drawings are not intended to be drawn to scale. In the accompanying drawings, each identical or approximately identical component shown in each figure may be represented by the same reference numeral. For clarity, not every component is labeled in each figure. Now, embodiments of various aspects of the utility model will be described by way of example and with reference to the accompanying drawings.

[0030] Figure 1 A schematic diagram of a water jet positioning correction system provided in an embodiment of the utility model.

[0031] Figure 2 A schematic diagram of the water jet deviation angle provided in an embodiment of the utility model.

[0032] Figure 3 It is a schematic diagram of the control system principle provided by the embodiment of the utility model.

[0033] The definitions of the various reference numerals are as follows:

[0034] 1 is a pitch fine-motion adjustment mechanism, 101 is a pitch mechanism driving motor, 2 is a rotation fine-motion adjustment mechanism, 201 is a rotation mechanism driving motor, 3 is a mounting flange, 4 is a water-guided laser processing head, 5 is an X-axis visual camera, 6 is a Y-axis visual camera, 7 is an actual water jet, 7 is a visual recognition component, and 8 is a control system. DETAILED DESCRIPTION

[0035] In order to better understand the technical content of the present invention, specific embodiments are described below in conjunction with the accompanying drawings.

[0036] Various aspects of the utility model are described in the present disclosure with reference to the accompanying drawings, in which many illustrative embodiments are shown. The embodiments of the present disclosure are not necessarily intended to include all aspects of the utility model. It should be understood that the various concepts and embodiments introduced above, as well as those described in more detail below, can be implemented in any of many ways, because the concepts and embodiments disclosed by the utility model are not limited to any implementation. In addition, some aspects disclosed by the utility model can be used alone, or in any appropriate combination with other aspects disclosed by the utility model.

[0037] Combination Figure 1 , 2 In the example shown, a water jet positioning correction system for a water-guided laser processing device according to an embodiment of the utility model includes a pitch fine adjustment mechanism 1, a pitch mechanism driving motor 101, a rotation fine adjustment mechanism 2, a rotation mechanism driving motor 201, a mounting flange 3, a water-guided laser processing head 4, an X-axis visual camera 5, a Y-axis visual camera 6, a visual recognition component 7, and a control system 8;

[0038] The pitch fine-motion adjustment mechanism 1 and the rotation fine-motion adjustment mechanism 2 are installed in combination to form a rotation and swing mechanism with two degrees of freedom. Figure 1 As shown, the pitch fine motion adjustment mechanism 1 is configured to be rotatable around the Y-axis, and the rotation fine motion adjustment mechanism 2 is configured to be rotatable around the X-axis.

[0039] As an optional example, the pitch fine-motion adjustment mechanism 1 and the rotation fine-motion adjustment mechanism 2 can adopt the existing design of fine-motion adjustment mechanism with self-locking function, with rotation scale lines for visual representation, and both have a rotation resolution accuracy within 10″, and a rotation range of ±10°, that is, the front and rear pitch range around the Y axis is ±10°, and the left and right pitch range around the X axis is ±10°.

[0040] Combination Figure 1 The water-conducting laser processing head 4 is mounted on the rotary fine-motion adjustment mechanism through the mounting flange 4, and the angle of the water-conducting laser processing head in the XY direction can be adjusted through a two-degree-of-freedom rotary swing mechanism.

[0041] The X-direction visual camera 5 and the Y-direction visual camera 6 are arranged below the water-guided laser processing head in the corresponding X and Y directions, and the camera fields of view completely cover the tight section of the water jet, and are used to image and output the water jet from the X and Y directions respectively.

[0042] The visual recognition component 7 is connected to the X-direction visual camera 5 and the Y-direction visual camera 6 respectively, and is used to identify the angle deviation of the water jet along the X direction and / or the Y direction according to the water jet image output by the X-direction visual camera and the Y-direction visual camera.

[0043] As an optional embodiment, the X-axis visual camera 5 and the Y-axis visual camera 6 both adopt industrial-grade high-precision, high-definition CCD cameras with a waterproof rating of IP67, so as to realize the image of the tight section of the water jet.

[0044] The control system 8 is electrically connected to the rotation mechanism drive motor 201 and the pitch mechanism drive motor 101 respectively, and is used to control the rotation of the rotation mechanism drive motor and the pitch mechanism drive motor according to the angle deviation, so that the corresponding rotation fine-motion adjustment mechanism and the pitch fine-motion adjustment mechanism are fine-tuned accordingly, thereby compensating and eliminating the angle deviation of the water jet in the X direction and / or Y direction.

[0045] As an optional embodiment, the X-direction vision camera 5 is arranged behind the water-guided laser processing head, and the camera field of view faces the X direction; the Y-direction vision camera 6 is arranged on the side of the water-guided laser processing head, and the camera field of view faces the Y direction, and the camera field of view completely covers the tight section of the water jet.

[0046] As an optional embodiment, the control system 8 controls the rotation mechanism driving motor to drive the rotation fine adjustment mechanism to move based on the angle deviation in the X direction, and the rotation fine adjustment mechanism drives the water-guided laser processing head to rotate in the opposite direction to eliminate the deviation and compensate for the tilt angle of the water jet in the X direction; and

[0047] Based on the angle deviation in the Y direction, the pitch mechanism driving motor is controlled to drive the pitch fine-motion adjustment mechanism to move. The pitch fine-motion adjustment mechanism drives the water-guided laser processing head to rotate in the opposite direction to eliminate the deviation and compensate for the tilt angle of the water jet in the Y direction.

[0048] As an optional embodiment, the visual recognition component is configured to communicate data with the control system 8 in the form of an image recognition processor or an image recognition chip. The visual recognition component can be particularly configured to be integrated with the control system into an integrated design.

[0049] Combination Figure 2 , 3 In the example shown, the visual recognition component is configured to recognize angular deviations in the following manner:

[0050] Receive water jet images collected by X-axis / Y-axis visual cameras;

[0051] The key area images of the water jet are cropped and grayscale processed, such as Figure 2 As shown, the processed water beam image is approximately fitted into a gray line segment;

[0052] Compare the angle between the gray line segment and the reference line vertical to the Z axis to obtain the deviation angle of the water jet along the X / Y direction.

[0053] The aforementioned cropping and grayscale algorithms may be implemented based on image processing algorithms in the prior art. For example, the present invention uses an image processing algorithm based on OpenCV to realize the recognition and processing of key area images (ie, tight segment images) of water jets.

[0054] Combination Figure 2 The X-axis visual camera and the Y-axis visual camera take photos synchronously, extract the water jet angle information in the X and Y directions synchronously, confirm the verticality of the water jet in space for the second time, and perform closed-loop feedback control based on the deviation between the angle error α, the angle error β and the preset deviation threshold φ0. The control system dynamically adjusts until the water jet posture is parallel to the ideal reference Z axis.

[0055] For example, when the detected corrected angular error α in the X direction is greater than the preset deviation threshold φ0, or the angular error β in the Y direction is greater than the preset deviation threshold φ0, the control system performs dynamic correction compensation based on the angular deviation, and controls the rotation mechanism drive motor 201 and the pitch mechanism drive motor 101 to drive the rotation fine-motion adjustment mechanism 2 and the pitch fine-motion adjustment mechanism 1 to perform dynamic adjustments respectively, until the angular error α and the angular error β are both less than the preset deviation threshold φ0, and reach a parallel state with the reference line vertical to the Z axis.

[0056] As an optional embodiment, in the system design of the utility model, the positions of the X-axis visual camera and the Y-axis visual camera are relatively fixed relative to the water-guided laser processing head, and are calibrated by pixel position. Assuming that the actual diameter of the calibrated water jet is a, and the water beam line width identified in the image obtained by the visual camera is b, a / b represents the actual width of each pixel in the image collected by the visual camera, and the calibration is completed.

[0057] Combination Figure 2 As shown, after replacing the new nozzle, the pixel width after the visual camera recognizes is c, and the actual water jet width is (a / b)×c. Therefore, the positioning and correction system of the embodiment of the utility model can directly obtain the line diameter of the water jet, identify and locate the actual width of the water jet, obtain the laser-coupled water beam line diameter and center point of the water-guided laser processing, realize the processing width of the water jet and the positioning of the processing center, so as to determine the starting position and processing size of the water-guided laser processing, provide an accurate reference basis for the processing tool compensation and tool coordinate system setting, and improve the efficiency and accuracy of the water-guided laser processing.

[0058] Combination Figure 1 , 3 As shown, according to the water jet positioning correction system of the embodiment of the utility model, the process of using the water jet positioning correction system to perform water jet positioning correction of water-guided laser processing equipment includes the following steps:

[0059] Step 1: The water-guided laser processing head starts to spray a stable high-pressure water jet;

[0060] Step 2, the X-direction visual camera captures the image of the tight section of the high-pressure water jet and determines the angle error α of the water jet along the X direction;

[0061] Step 3: Based on the angle error α, the control system controls the rotating mechanism driving motor to drive the rotating micro-adjustment mechanism to rotate, thereby driving the water-guided laser processing head to rotate in the opposite direction to eliminate the deviation and compensate for the tilt angle of the water jet in the X direction;

[0062] Step 4, the Y-direction visual camera captures the image of the tight section of the high-pressure water jet and determines the angle error β of the water jet along the Y direction;

[0063] Step 5: Based on the angle error β, the control system controls the pitch mechanism driving motor to drive the pitch fine adjustment mechanism to pitch forward and backward, driving the water-guided laser processing head to rotate in the opposite direction to eliminate the deviation and compensate for the tilt angle of the water jet in the Y direction;

[0064] Step 6: The X-axis visual camera and the Y-axis visual camera synchronously photograph and synchronously extract the water jet angle information in the X and Y directions, reconfirm the verticality of the water jet in space, and perform closed-loop feedback control based on the deviation Δφ between the angle error α, the angle error β and the preset deviation threshold φ0. The control system dynamically adjusts until the water jet posture is parallel to the ideal reference Z axis.

[0065] As an optional example, the aforementioned angle error α and angle error β are set to be obtained in the following manner:

[0066] Water jet images collected based on X / Y visual cameras;

[0067] The key area image of the water jet is cropped and gray-scaled, and the processed water jet image is approximately fitted into a gray line segment;

[0068] By comparing the angle between the gray line segment and the reference line perpendicular to the Z axis, the deviation angle of the water jet along the X direction / Y direction is obtained.

[0069] As an optional embodiment, when the detected corrected angular error α in the X direction is greater than the preset deviation threshold φ0, or the angular error β in the Y direction is greater than the preset deviation threshold φ0, the control system performs dynamic correction compensation based on the angular deviation, and controls the rotation mechanism drive motor 201 and the pitch mechanism drive motor 101 to drive the rotation fine-motion adjustment mechanism 2 and the pitch fine-motion adjustment mechanism 1 to perform dynamic adjustments respectively, until the angular error α and the angular error β are both less than the preset deviation threshold φ0, and reach a parallel state with the reference line vertical to the Z axis.

[0070] As an optional embodiment, through the water jet positioning and correction system of the utility model, based on the water jet image collected by the X-axis / Y-axis visual camera, the actual width of the water jet is identified and positioned, and the laser-coupled water beam line diameter and center point of the water-guided laser processing are obtained, thereby realizing the processing width and processing center positioning of the water jet, so as to determine the starting position and processing size of the water-guided laser processing, provide an accurate reference basis for the processing tool compensation and tool coordinate system setting, and improve the efficiency and accuracy of the water-guided laser processing.

[0071] Although the present invention has been disclosed as above with preferred embodiments, it is not intended to limit the present invention. A person with ordinary knowledge in the technical field to which the present invention belongs may make various changes and modifications without departing from the spirit and scope of the present invention. Therefore, the protection scope of the present invention shall be determined by the definition of the claims.

Claims

1. A water jet positioning and correction system for water-guided laser processing equipment, characterized in that: It includes a pitch fine-motion adjustment mechanism, a pitch mechanism driving motor, a rotation fine-motion adjustment mechanism, a rotation mechanism driving motor, a water-guided laser processing head, a mounting flange, an X-axis visual camera, a Y-axis visual camera, a visual recognition component and a control system; The pitch fine-motion adjustment mechanism and the rotation fine-motion adjustment mechanism are installed in combination to form a rotation and swing mechanism with two degrees of freedom. The pitch fine-motion adjustment mechanism is configured to be able to rotate around the Y axis, and the rotation fine-motion adjustment mechanism is configured to be able to rotate around the X axis. The water-conducting laser processing head is mounted on the rotating fine adjustment mechanism through the mounting flange, and the angle of the water-conducting laser processing head in the XY direction can be adjusted through the rotating swing mechanism with two degrees of freedom; The X-direction visual camera and the Y-direction visual camera are respectively arranged below the water-guided laser processing head in the corresponding X direction and Y direction, and the camera fields of view completely cover the water jet tight section, and are used to image and output the water jet from the X direction and the Y direction respectively; The visual recognition component is connected to the X-direction visual camera and the Y-direction visual camera respectively, and is used to identify the angular deviation of the water jet along the X direction and / or the Y direction according to the water jet images output by the X-direction visual camera and the Y-direction visual camera; The control system is electrically connected to the rotation mechanism drive motor and the pitch mechanism drive motor respectively, and is used to control the rotation of the rotation mechanism drive motor and the pitch mechanism drive motor according to the angle deviation, so that the corresponding rotation fine-motion adjustment mechanism and the pitch fine-motion adjustment mechanism are fine-tuned accordingly, thereby compensating and eliminating the angle deviation of the water jet in the X direction and / or the Y direction.

2. The water jet positioning correction system for water-guided laser processing equipment according to claim 1, characterized in that: The pitch fine-motion adjustment mechanism and the rotation fine-motion adjustment mechanism both have a self-locking function.

3. The water jet positioning correction system for water-guided laser processing equipment according to claim 1, characterized in that: The pitch fine adjustment mechanism and the rotation fine adjustment mechanism have a rotation resolution within 10″ and a rotation range of ±10°, that is: The forward and backward pitch range around the Y axis is ±10°; The left and right pitch range around the X-axis is ±10°.

4. The water jet positioning correction system for water-guided laser processing equipment according to claim 1, characterized in that: The X-direction visual camera is arranged behind the water-guided laser processing head, and the camera field of view faces the X direction.

5. The water jet positioning correction system for water-guided laser processing equipment according to claim 1, characterized in that: The Y-direction visual camera is arranged on the side of the water-guided laser processing head, and the camera field of view faces the Y direction.

6. The water jet positioning correction system for water-guided laser processing equipment according to claim 1, characterized in that: The control system controls the rotation mechanism to drive the motor to drive the rotation fine adjustment mechanism to move based on the angle deviation in the X direction. The rotation fine adjustment mechanism drives the water-guided laser processing head to rotate in the opposite direction to eliminate the deviation and compensate for the tilt angle of the water jet in the X direction.

7. The water jet positioning correction system for water-guided laser processing equipment according to claim 1, characterized in that: The control system controls the pitch mechanism driving motor to drive the pitch fine-motion adjustment mechanism to move based on the angle deviation in the Y direction. The pitch fine-motion adjustment mechanism drives the water-guided laser processing head to rotate in the opposite direction to eliminate the deviation and compensate for the tilt angle of the water jet in the Y direction.

8. The water jet positioning correction system for water-guided laser processing equipment according to claim 1, characterized in that: The visual recognition component is integrated with the control system.

9. The water jet positioning correction system for water-guided laser processing equipment according to claim 1, characterized in that: The positions of the X-axis visual camera and the Y-axis visual camera are relatively fixed relative to the water-guided laser processing head and are calibrated by pixel positions: Assuming that the actual diameter of the calibrated water jet is a, and the water beam line width identified in the images obtained by the X-axis visual camera and the Y-axis visual camera is b, a / b represents the actual width of each pixel in the image collected by the visual camera as the calibration value.

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