Split type wafer baking device

Abstract

The utility model relates to the technical field of baking equipment, and discloses a split type wafer baking device which comprises a first split body and a second split body, the first split body comprises a base, a first heating shell and a plurality of first supporting assemblies, the first heating shell is installed on the top of the base, a first groove is formed in the top face of the first heating shell, and a plurality of second supporting assemblies are installed in the first groove; the first supporting assembly comprises a first telescopic rod and a first roller, one end of the first telescopic rod is connected with the bottom of the base, and the other end of the first telescopic rod is connected with the first roller; the second split body comprises an upper cover, a second heating shell and a plurality of second supporting assemblies, the second heating shell is installed at the bottom of the upper cover, a second groove is formed in the bottom face of the second heating shell, the second groove and the first groove are matched to form a baking cavity used for baking the quartz tube, and the second supporting assemblies are connected to the bottom of the upper cover. According to the split type wafer baking device, the lifting frequency and consumed labor hours in the quartz tube transferring process can be reduced, and therefore transferring of the quartz tubes is safer.

Description

Technical Field

[0001] The utility model relates to the technical field of baking equipment, in particular to a split type wafer baking device. Background Art

[0002] During the wafer processing, the wafer needs to be cleaned first and then dried. During this process, after the wafer is cleaned, two people usually need to lift the quartz tube containing the wafer and put it on a special transport cart, which is then transported from the wafer cleaning room to the welding pipe room. When it arrives at the baking device, two people will put the quartz tube containing the wafer on the baking device. This process has many steps, a high risk factor, and consumes a lot of man-hours. Utility Model Content

[0003] The technical problem to be solved by the utility model is that the existing wafers have many transportation procedures from cleaning to baking.

[0004] In order to solve the above technical problems, the utility model provides a split wafer baking device, comprising:

[0005] a first split body, the first split body comprising a base, a first heating shell and a plurality of first supporting components, the first heating shell being mounted on the top of the base, a first groove being provided on the top surface of the first heating shell, the first supporting component comprising a first telescopic rod and a first roller, one end of the first telescopic rod being connected to the bottom of the base, and the other end of the first telescopic rod being connected to the first roller; and,

[0006] The second split body comprises an upper cover, a second heating shell and a plurality of second supporting components. The second heating shell is installed at the bottom of the upper cover. A second groove is provided on the bottom surface of the second heating shell. The second groove and the first groove can cooperate to form a baking chamber for baking the quartz tube. The second supporting components are connected to the bottom of the upper cover.

[0007] Preferably, the first telescopic rod includes a connecting rod, a screw, a limiting column, an outer cylinder and a first motor, one end of the connecting rod is connected to the bottom of the base, the other end of the connecting rod is installed with the first motor and the limiting column, the output shaft of the first motor is arranged away from the base, the output shaft of the first motor is connected to the screw, the outer cylinder is provided with a threaded hole and a limiting hole, the limiting column is slidably arranged in the limiting hole, the screw is threadedly connected to the outer cylinder through the threaded hole, and the end of the outer cylinder away from the connecting rod is connected to the first roller.

[0008] Preferably, a first control knob is provided on the side wall of the base, a first heating electric furnace wire is provided on the inner wall of the first heating shell, and the first control knob is electrically connected to the first heating electric furnace wire.

[0009] Preferably, a second control knob is provided on the side wall of the upper cover, a second heating electric furnace wire is provided on the inner wall of the second heating shell, and the second control knob is electrically connected to the second heating electric furnace wire.

[0010] Preferably, a third control knob is provided on the side wall of the base, and the third control knob is electrically connected to each of the first motors.

[0011] Preferably, a first mounting groove is provided on the top surface of the base, the first heating shell is installed in the first mounting groove, a second mounting groove is provided on the bottom surface of the upper cover, the second heating shell is installed in the second mounting groove, and when the first groove and the second groove cooperate to form the baking chamber, the top surface of the base fits with the bottom surface of the upper cover.

[0012] Preferably, the first roller is a universal wheel, and the first roller is provided with a locking device.

[0013] Preferably, the second supporting assembly includes a second telescopic rod and a second roller, one end of the second telescopic rod is connected to the bottom of the upper cover, and the other end of the second telescopic rod is connected to the second roller.

[0014] Preferably, the second roller is a universal wheel, and the second roller is provided with a locking device.

[0015] Preferably, the number of the first supporting assemblies and the number of the second supporting assemblies are both four.

[0016] The utility model is a split wafer baking device, which has the following beneficial effects compared with the prior art:

[0017] The wafer baking device is arranged into a first split and a second split, the first split includes a base, a first heating shell and a first supporting assembly, wherein the first supporting assembly further includes a first telescopic rod and a first roller, and the first heating shell of the first split can cooperate with the second heating shell of the second split to form a baking chamber for baking the quartz tube. Therefore, in the wafer cleaning room, two workers lift the quartz tube loaded with wafers and place it into the first groove formed by the first heating shell of the first split. After that, only one worker is required to push the first split to the welding pipe room to cooperate with the second split, connect the quartz tube mouth to the vacuum pump for vacuuming, and then lift the base by adjusting the first telescopic rod so that the first groove of the first heating shell and the second groove of the second heating shell are enclosed to form a baking chamber to bake the quartz tube. When welding the pipe subsequently, the first split is moved away from the second split. The split wafer baking device of the utility model can lift and place the quartz tube loaded with wafers to the first split body with only one worker required for operation, thus reducing the number of times the quartz tube is lifted and placed and the labor hours consumed, and thus making the transportation of the quartz tube safer. BRIEF DESCRIPTION OF THE DRAWINGS

[0018] Figure 1 is a schematic diagram of a split wafer baking device according to an embodiment of the utility model;

[0019] Figure 2 yes Figure 1 A schematic diagram of another direction of the split wafer baking device;

[0020] In the figure, 1, the first split body; 11, the base; 111, the first control knob; 112, the third control knob; 12, the first heating shell; 121, the first groove; 13, the first supporting assembly; 131, the first telescopic rod; 1311, the connecting rod; 1312, the outer cylinder; 132, the first roller; 2, the second split body; 21, the upper cover; 211, the second control knob; 212, the fourth control knob; 22, the second heating shell; 221, the second groove; 23, the second supporting assembly; 231, the second telescopic rod; 232, the second roller; 90, the quartz tube. DETAILED DESCRIPTION

[0021] In order to make the above-mentioned purposes, features and advantages of the utility model more obvious and easy to understand, the specific implementation methods of the utility model are described in detail below in conjunction with the accompanying drawings. In the following description, many specific details are set forth to facilitate a full understanding of the utility model. However, the utility model can be implemented in many other ways different from those described herein, and those skilled in the art can make similar improvements without violating the connotation of the utility model, so the utility model is not limited by the specific embodiments disclosed below.

[0022] In the description of the present invention, it is necessary to understand that the terms "upper", "lower", "top", "bottom", "inside", "outside", etc., indicating orientations or positional relationships, are based on the orientations or positional relationships shown in the accompanying drawings, and are only for the convenience of describing the present invention and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as a limitation on the present invention.

[0023] In addition, the terms "first" and "second" are used for descriptive purposes only and should not be understood as indicating or implying relative importance or implicitly indicating the number of technical features indicated. Thus, the features defined as "first" and "second" may explicitly or implicitly include at least one of the features.

[0024] like Figure 1 and Figure 2 As shown, a split wafer baking device according to a preferred embodiment of the utility model comprises:

[0025] The first split body 1 includes a base 11, a first heating shell 12 and a plurality of first supporting components 13. The first heating shell 12 is installed on the top of the base 11. The top surface of the first heating shell 12 is provided with a first groove 121. The first supporting component 13 includes a first telescopic rod 131 and a first roller 132. One end of the first telescopic rod 131 is connected to the bottom of the base 11, and the other end of the first telescopic rod 131 is connected to the first roller 132; and,

[0026] The second split body 2 includes an upper cover 21, a second heating shell 22 and a plurality of second support components 23. The second heating shell 22 is installed at the bottom of the upper cover 21. A second groove 221 is provided on the bottom surface of the second heating shell 22. The second groove 221 and the first groove 121 can cooperate to form a baking chamber for baking the quartz tube 90. The second support component 23 is connected to the bottom of the upper cover 21.

[0027] Based on the split wafer baking device of the above embodiment, the wafer baking device is provided with a first split body 1 and a second split body 2, wherein the first split body 1 includes a base 11, a first heating shell 12 and a first support assembly 13, wherein the first support assembly 13 further includes a first telescopic rod 131 and a first roller 132, and the first heating shell 12 of the first split body 1 can cooperate with the second heating shell 22 of the second split body 2 to form a baking chamber for baking the quartz tube 90, therefore, in the wafer cleaning room, two staff members load the quartz tube with the wafers. 90 is lifted and placed into the first groove 121 formed by the first heating shell 12 of the first split body 1, and then only one staff member is required to push the first split body 1 to the welding pipe room to cooperate with the second split body 2. After the pipe mouth of the quartz tube 90 is connected to the vacuum pump for vacuuming, the base 11 is lifted by adjusting the first telescopic rod 131 so that the first groove 121 of the first heating shell 12 and the second groove 221 of the second heating shell 22 are enclosed to form a baking chamber to bake the quartz tube 90. When welding the pipes later, the first split body 1 can be moved away from the second split body 2. The split-type wafer baking device of the utility model can make it only take one staff member to operate after the quartz tube 90 loaded with wafers is lifted and placed in the first split body 1, which reduces the number of times the quartz tube 90 is lifted and placed and the labor hours consumed, and thus makes the transportation of the quartz tube 90 safer.

[0028] In some embodiments, the first telescopic rod 131 includes a connecting rod 1311, a screw (not shown), a limiting column (not shown), an outer cylinder 1312 and a first motor (not shown), one end of the connecting rod 1311 is connected to the bottom of the base 11, and the other end of the connecting rod 1311 is installed with the first motor and the limiting column, the output shaft of the first motor is set away from the base 11, the output shaft of the first motor is connected to the screw, the outer cylinder 1312 is provided with a threaded hole and a limiting hole, the limiting column is slidably arranged in the limiting hole, the screw is threadedly connected to the outer cylinder 1312 through the threaded hole, and the end of the outer cylinder 1312 away from the connecting rod 1311 is connected to the first roller 132. By setting up a first telescopic rod 131 composed of a connecting rod 1311, a screw, a limiting column, an outer cylinder 1312 and a first motor, since the outer cylinder 1312 is limited by the limiting column and the screw, controlling the first motor to rotate forward or reverse can make the screw rise or fall along the outer cylinder 1312, thereby adjusting the length of the first telescopic rod 131 and further adjusting the height of the first split body 1.

[0029] Preferably, a first control knob 111 is provided on the side wall of the base 11, a first heating electric furnace wire (not shown) is provided on the inner wall of the first heating shell 12, and the first control knob 111 is electrically connected to the first heating electric furnace wire. By turning the first control knob 111, the first heating electric furnace wire can start heating, adjust the heating power, or stop heating.

[0030] Preferably, a second control knob 211 is provided on the side wall of the upper cover 21, and a second heating electric furnace wire (not shown) is provided on the inner wall of the second heating shell 22, and the second control knob 211 is electrically connected to the second heating electric furnace wire. By turning the second control knob 211, the second heating electric furnace wire can start heating, adjust the heating power, or stop heating.

[0031] Preferably, the side wall of the base 11 is provided with a third control knob 112, and the third control knob 112 is electrically connected to each first motor. By turning the third control knob 112, each first motor can be simultaneously controlled to rotate forward, reverse or shut down, thereby controlling all first telescopic rods 131 to rise and fall synchronously.

[0032] Preferably, a first mounting groove is provided on the top surface of the base 11, and the first heating shell 12 is installed in the first mounting groove. A second mounting groove is provided on the bottom surface of the upper cover 21, and the second heating shell 22 is installed in the second mounting groove. When the first groove 121 and the second groove 221 cooperate to form a baking chamber, the top surface of the base 11 is in contact with the bottom surface of the upper cover 21. That is, after the first groove 121 and the second groove 221 cooperate well, the base 11 and the upper cover 21 are also wound around the outer periphery of the first heating shell 12 and the second heating shell 22, thereby ensuring the baking effect of the first heating shell 12 and the second heating shell 22 on the quartz tube 90. The length of the base 11 along the extension direction of the first groove 121 is preferably consistent with the length of the upper cover 21 along the extension direction of the second groove 221. After the first groove 121 and the second groove 221 cooperate well, the two end surfaces of the base 11 along the extension direction of the first groove 121 are flush with the two end surfaces of the upper cover 21 along the extension direction of the second groove 221, so as to further ensure the heating and heat preservation effect of the baking device.

[0033] Preferably, the first roller 132 is a universal wheel, so as to facilitate and flexibly push the first split body 1. The first roller 132 is preferably provided with a locking device (not shown), so that the first roller 132 can be locked or unlocked. When the first split body 1 cooperates with the second split body 2, the first roller 132 can be locked to prevent the first split body 1 from moving.

[0034] Preferably, the second support assembly 23 includes a second telescopic rod 231 and a second roller 232, one end of the second telescopic rod 231 is connected to the bottom of the upper cover 21, and the other end of the second telescopic rod 231 is connected to the second roller 232, so that the second split body 2 can also be moved and lifted, which is convenient for cooperation with the first split body 1. The structure of the second telescopic rod 231 is preferably consistent with the first telescopic rod 131, and the side wall of the upper cover 21 is preferably further provided with a fourth control knob 212, which is used to control the extension and retraction of the second telescopic rod 231.

[0035] Preferably, the second roller 232 is a universal wheel, and the second roller 232 is provided with a locking device.

[0036] Preferably, the number of the first supporting components 13 and the number of the second supporting components 23 are both four, which can ensure the stability of the base 11 and the upper cover 21 and facilitate the matching of the base 11 and the upper cover 21.

[0037] In summary, the embodiment of the utility model provides a split-type wafer baking device, wherein the first split body can be first pushed to the wafer cleaning room to load the quartz tube, and then the first split body can be pushed to the welding tube room to adjust and cooperate with the second split body to form a baking chamber, so as to bake the quartz tube containing the wafer. The staff does not need to lift and place the quartz tube many times, which reduces the labor time consumed and makes the transportation of the quartz tube safer.

[0038] The above is only a preferred embodiment of the present invention. It should be pointed out that for ordinary technicians in this technical field, several improvements and substitutions can be made without departing from the technical principle of the present invention. These improvements and substitutions should also be regarded as the protection scope of the present invention.

Claims

1. A split wafer baking device, characterized in that: include: A first split body, the first split body comprising a base, a first heating shell and a plurality of first supporting components, the first heating shell being mounted on the top of the base, a first groove being provided on the top surface of the first heating shell, the first supporting component comprising a first telescopic rod and a first roller, one end of the first telescopic rod being connected to the bottom of the base, and the other end of the first telescopic rod being connected to the first roller; as well as, The second split body comprises an upper cover, a second heating shell and a plurality of second supporting components. The second heating shell is installed at the bottom of the upper cover. A second groove is provided on the bottom surface of the second heating shell. The second groove and the first groove can cooperate to form a baking chamber for baking the quartz tube. The second supporting components are connected to the bottom of the upper cover.

2. The split wafer baking device according to claim 1, characterized in that: The first telescopic rod includes a connecting rod, a screw, a limiting column, an outer cylinder and a first motor. One end of the connecting rod is connected to the bottom of the base, and the other end of the connecting rod is installed with the first motor and the limiting column. The output shaft of the first motor is arranged away from the base, and the output shaft of the first motor is connected to the screw. The outer cylinder is provided with a threaded hole and a limiting hole, and the limiting column is slidably arranged in the limiting hole. The screw is threadedly connected to the outer cylinder through the threaded hole, and the end of the outer cylinder away from the connecting rod is connected to the first roller.

3. The split wafer baking device according to claim 1, characterized in that: A first control knob is disposed on the side wall of the base, a first heating electric furnace wire is disposed on the inner wall of the first heating shell, and the first control knob is electrically connected to the first heating electric furnace wire.

4. The split wafer baking device according to claim 1, characterized in that: A second control knob is disposed on the side wall of the upper cover, a second heating electric furnace wire is disposed on the inner wall of the second heating shell, and the second control knob is electrically connected to the second heating electric furnace wire.

5. The split wafer baking device according to claim 2, characterized in that: A third control knob is disposed on the side wall of the base, and the third control knob is electrically connected to each of the first motors.

6. The split type wafer baking device according to claim 1, characterized in that: A first mounting groove is provided on the top surface of the base, the first heating shell is installed in the first mounting groove, a second mounting groove is provided on the bottom surface of the upper cover, the second heating shell is installed in the second mounting groove, and when the first groove cooperates with the second groove to form the baking chamber, the top surface of the base fits with the bottom surface of the upper cover.

7. The split-type wafer baking device according to claim 1, characterized in that: The first roller is a universal wheel and is provided with a locking device.

8. The split type wafer baking device according to claim 1, characterized in that: The second supporting assembly includes a second telescopic rod and a second roller, one end of the second telescopic rod is connected to the bottom of the upper cover, and the other end of the second telescopic rod is connected to the second roller.

9. The split wafer baking device according to claim 8, characterized in that: The second roller is a universal wheel and is provided with a locking device.

10. The split type wafer baking device according to claim 1, characterized in that: The number of the first supporting components and the number of the second supporting components are both four.

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