Membrane stretching, XY moving and rotating integrated workbench

Abstract

The utility model discloses a film stretching, XY movement and rotation integrated workbench, and relates to the technical field of semiconductor packaging testing. The film stretching machine comprises a table top, an X-direction movement mechanism, a supporting plate, a Y-direction movement mechanism, a bearing table, a film stretching mechanism, a speed reducer and a film stretching table lifting power mechanism. According to the technical scheme, the workbench can achieve the functions of XY movement, film lifting and stretching and rotation, is suitable for an automatic test sorting machine, and is high in efficiency; whether the Frame is fed to an accurate position or not can be detected; after the Frame is inserted into the film tightening table, the film tightening table descends to drive the film and the matrix chip to descend, in the descending process, the film tightening strip is fixed, the film is tightened under the expansion of the film tightening strip, after the film is tightened, picking of the chips on the film is facilitated, each chip can be transferred to a fixed position where the chip needs to be sucked through XY movement, and the rotation function of the film tightening table is used for angle correction of the chip matrix.

Description

Technical Field

[0001] The utility model belongs to the technical field of semiconductor packaging and testing, and particularly relates to a film-stretching, XY-moving and rotating integrated workbench. Background Art

[0002] When a semiconductor wafer is being cleaved, it needs to be placed on a blue film stretched by a film stretching frame. The blue film has a certain tension to maintain the levelness of the semiconductor wafer, which can effectively prevent the semiconductor wafer from deforming or breaking.

[0003] As mentioned in the processing device of the wafer carrier frame disclosed in CN204271048U, traditional semiconductor wafers use a wafer stretching frame and are operated manually by workers. The blue film is manually tightened to be close to the blue film frame, and then the blue film is pressed by a roller and rolled on the stretching frame to make the blue film and the stretching frame stick firmly, and then a handheld tool is used to cut off the blue film outside the stretching frame; however, for automated semiconductor packaging test scenarios, the manual method is too inefficient, and in automated scenarios, the stretching film also needs to be moved, lifted, and rotated horizontally and vertically, and the iron ring for feeding needs to be checked for position, but the existing technical solutions do not involve structures with the above functions and requirements, and are less efficient; therefore, in view of the above problems, it is of great practical significance to provide a workbench that integrates stretching, XY movement and rotation. Utility Model Content

[0004] The utility model provides a workbench with film stretching, XY movement and rotation, which can move in the X and Y directions and can rotate, so that it can be applied to an automatic testing and sorting machine with high efficiency. In summary, the problems in the background technology are solved.

[0005] In order to solve the above technical problems, the utility model is achieved through the following technical solutions:

[0006] The utility model discloses a film-stretching, XY-moving and rotating integrated workbench, comprising a table, an X-direction motion mechanism composed of two linear strokes installed on the table, a support plate installed by slidingly matching four sliders on the X-direction motion mechanism, a Y-direction motion mechanism composed of two linear strokes installed on the support plate, a bearing platform installed by slidingly matching four sliders on the Y-direction motion mechanism, a film-stretching mechanism installed on the bearing platform, a rotating motor installed on the side of the bearing platform and a reducer matched with the output shaft vertically arranged with the rotating motor, and a film-stretching platform lifting power mechanism installed on the table for lifting and lowering the film-stretching mechanism;

[0007] The surface of the carrier platform is located at the bottom of the film stretching platform and is surrounded by a synchronous belt and a first main driving pulley, a first fixed idler pulley, a synchronous belt tensioning idler pulley, and a film stretching platform lifting pulley that cooperate with the synchronous belt tensioning transmission;

[0008] The lifting power mechanism of the stretching table includes a transverse movement structure composed of two linear strokes at the bottom, a bearing plate slidably installed on the upper part of the transverse movement mechanism by a slider, a lifting structure installed on the bearing plate, a connecting plate installed on the top of the lifting structure, a reduction motor vertically installed on the connecting plate, and a large pulley installed through a bearing, a small pulley is provided on the top of the reduction motor, the large pulley and the small pulley are connected through a first tensioning synchronous belt transmission, and a limit plug-in column corresponding to the plug-in groove at the bottom of the main shaft of the first main driving pulley is provided on the top of the large pulley;

[0009] The film stretching mechanism includes a circular tray and a cross roller bearing arranged around the bottom circumference of the circular tray for providing rotational support; a second idler wheel is installed in the circular tray, and a second main drive pulley is installed on the output shaft end of the reducer; the second main drive pulley, the second idler wheel and the cross roller bearing are connected by a second tensioning synchronous belt transmission.

[0010] Furthermore, the film stretching mechanism also includes a film stretching table installed on the upper part of the circular tray; a trumpet-shaped iron ring insertion port for inserting the iron ring Frame is opened on the outer side of the film stretching table, and a film stretching strip is fixed on the four sides of the film stretching table; avoidance grooves for avoiding clamps are arranged on both sides of the upper part of the film stretching table.

[0011] Furthermore, an inverted L-shaped bracket is installed on the bearing platform, and a sensor for identifying the position of the iron ring Frame is installed on the inverted L-shaped bracket; the sensor is a photoelectric position sensor.

[0012] Furthermore, a sensor sheet for rotating the film stretching table back to the origin is installed on the circular tray.

[0013] Furthermore, the X-direction motion mechanism and the Y-direction motion mechanism are arranged vertically.

[0014] Furthermore, the lateral movement structure is kept flush with the Y-direction motion mechanism.

[0015] Compared with the prior art, the utility model has the following beneficial effects:

[0016] (1) The workbench can realize XY movement, lifting and lowering of film stretching and rotation functions, which is suitable for automatic testing and sorting machines with high efficiency;

[0017] (2) Ability to detect whether the frame is loaded to the correct position;

[0018] (3) After the frame is inserted into the film stretching table, the film stretching table descends, driving the film and matrix chips to descend. During the descent, the film stretching strips do not move. As the film stretching strips expand, the film is tightened. After the film is tightened, it is more convenient to pick up the chip on the film. The XY movement can move each chip to the fixed position where the chip needs to be picked up. The rotation function of the film stretching table is used to correct the angle of the chip matrix. Four long film stretching strips are arranged on all sides, which has a better film stretching effect than the integral annular film stretching strips.

[0019] Of course, any product implementing the present invention does not necessarily need to achieve all of the advantages described above at the same time. BRIEF DESCRIPTION OF THE DRAWINGS

[0020] In order to more clearly illustrate the technical solutions of the embodiments of the utility model, the drawings required for describing the embodiments are briefly introduced below. Obviously, the drawings described below are only some embodiments of the utility model. For ordinary technicians in this field, other drawings can be obtained based on these drawings without creative work.

[0021] Figure 1 This is a structural schematic diagram of a film stretching, XY moving and rotating workbench of the utility model;

[0022] Figure 2 for Figure 1 Schematic diagram of the structure of the middle film stretching table;

[0023] Figure 3 for Figure 1 A top view of the inner structure of the medium circular tray;

[0024] Figure 4 It is a structural schematic diagram of the lifting power mechanism of the film stretching table;

[0025] Figure 5 for Figure 4 Structural cross-sectional view of

[0026] In the accompanying drawings, the components represented by the reference numerals are listed as follows:

[0027] 1-film stretching table lifting power mechanism, 2-Y-axis motion mechanism, 3-reducer, 4-rotating motor, 5-film stretching table, 6-sensor, 7-X-axis motion mechanism, 8-horn-shaped iron ring insertion port, 9-film stretching strip, 10-avoidance groove, 11-induction plate, 12-cross roller bearing, 13-film stretching table lifting pulley, 14-synchronous belt tensioning idler, 15-first fixed idler, 16-synchronous belt, 17-first main driving pulley, 18-plug-in groove, 19-limit plug-in column, 20-large pulley, 24-lifting structure, 25-reduction motor, 26-small pulley, 28-main shaft, 31-second idler. DETAILED DESCRIPTION

[0028] The following will be combined with the drawings in the embodiments of the utility model to clearly and completely describe the technical solutions in the embodiments of the utility model. Obviously, the described embodiments are only part of the embodiments of the utility model, not all of the embodiments. Based on the embodiments of the utility model, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the utility model.

[0029] In the description of the present invention, it should be understood that terms such as "vertical", "bottom", "surrounding", "upper", "top", "outer side" and the like indicating orientation or positional relationship are only for the convenience of describing the present invention and simplifying the description, and do not indicate or imply that the components or elements referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore should not be understood as limitations on the present invention.

[0030] See also Figure 1-5 As shown, the utility model is a film-stretching, XY moving and rotating integrated workbench, comprising a table, an X-direction motion mechanism 7 composed of two linear strokes installed on the table, a support plate installed by four sliders slidably matched on the X-direction motion mechanism 7, a Y-direction motion mechanism 2 composed of two linear strokes installed on the support plate, a bearing platform installed by four sliders slidably matched on the Y-direction motion mechanism 2, a film-stretching mechanism installed on the bearing platform, a rotating motor 4 installed on the side of the bearing platform and a reducer 3 matched with the output shaft vertically arranged with the rotating motor 4, and a film-stretching platform lifting power mechanism 1 installed on the table for lifting and lowering the film-stretching mechanism;

[0031] The surface of the carrier platform is located at the bottom of the film stretching platform 5 and is surrounded by a synchronous belt 16 and a first main driving pulley 17, a first fixed idler wheel 15, a synchronous belt tensioning idler wheel 14, and a film stretching platform lifting pulley 13.

[0032] The lifting power mechanism 1 of the film stretching table includes a lateral movement structure composed of two linear strokes at the bottom, a bearing plate slidably mounted on the upper part of the lateral movement structure by a slider, a lifting structure 24 mounted on the bearing plate, a connecting plate mounted on the top of the lifting structure 24, a reduction motor 25 vertically mounted on the connecting plate, and a large pulley 20 mounted through a bearing, a small pulley 26 is arranged on the top of the reduction motor 25, the large pulley 20 and the small pulley 26 are connected through the first tensioning synchronous belt transmission, and a limit plug-in column 19 is arranged on the top of the large pulley 20 to match the plug-in groove 18 at the bottom of the main shaft 28 of the first main driving pulley 17;

[0033] Film stretching table lifting power mechanism 1: the film stretching table 5 can be lifted and lowered to complete the film stretching, and the lifting power is provided by the film stretching table lifting power mechanism 1; the Y-axis motion mechanism 2 is driven by a servo motor, ball screw transmission and linear guide rail guidance; reducer 3, because the rotary table mechanism has a very large rotational inertia, the rotary servo motor needs to be equipped with a reducer to reduce the inertia required by the motor, and a small-sized servo motor is configured; the rotary motor 4 is a servo motor; the film stretching table 5 has an iron ring frame with a film and a matrix chip inserted into the film stretching table 5; the X-axis motion mechanism 7 is driven by a servo motor, ball screw transmission and linear guide rail guidance;

[0034] The film stretching mechanism includes a circular tray and a cross roller bearing 12 which is arranged around the bottom circumference of the circular tray and is used to provide rotational support; a second idler wheel 31 is installed in the circular tray, and a second main drive pulley is installed on the output shaft end of the reducer 3; the second main drive pulley, the second idler wheel 31 and the cross roller bearing 12 are connected by a second tensioning synchronous belt transmission.

[0035] Among them, the film stretching mechanism also includes a film stretching table 5 installed on the upper part of the circular tray; a trumpet-shaped iron ring insertion port 8 for inserting the iron ring is opened on the outer side of the film stretching table 5, and a film stretching strip 9 is fixed around the film stretching table 5; avoidance grooves 10 for avoiding clamps are arranged on both sides of the upper part of the film stretching table 5.

[0036] like Figure 2 As shown, it is a film stretching platform, a trumpet-shaped iron ring frame insertion port 8: the iron ring frame is inserted into the film stretching platform through the trumpet-shaped iron ring insertion port 8; film stretching strips 9: a film stretching strip is fixed on each side, and when the film stretching platform 5 is lowered, the film stretching strips 9 are fixed, so that the loose film on the iron ring frame can be tightened; an avoidance groove 10: the iron ring frame enters the film stretching platform 5 when the clamp is pulled down, and this avoidance groove 10 is used to avoid the clamp; the induction plate 11 is also called a signal flag: it is used as an induction plate for the film stretching platform 5 to rotate back to the origin; the cross roller bearing 12 is used as a rotation support for the entire film stretching platform 5

[0037] Among them, an inverted L-shaped bracket is installed on the supporting platform, and a sensor 6 for identifying the position of the iron ring Frame is installed on the inverted L-shaped bracket; the sensor 6 is a photoelectric position sensor, which is a reflective sensor, used to identify whether the iron ring Frame is transported to the correct position.

[0038] The circular tray is provided with a sensor sheet 11 for rotating the film stretching platform 5 back to the origin.

[0039] The X-axis motion mechanism 7 and the Y-axis motion mechanism 2 are arranged vertically.

[0040] The lateral movement structure is kept flush with the Y-axis motion mechanism 2 .

[0041] like Figure 3 , which is a transmission structure diagram of the lifting of the film stretching platform, the lifting pulley 13 of the film stretching platform: the center of the pulley is fixed with a trapezoidal lead screw nut, and the rotation of the nut drives the screw to lift and lower, thereby driving the film stretching platform to lift and lower; the synchronous belt tensioning idler 14 is used for the tensioning pulley; the first fixed idler 15 is used to guide the synchronous belt to the bypass position, creating more blank space in the central area; synchronous belt 16: in this specific embodiment, the synchronous belt drives all the pulleys to move synchronously, drives the six lifting pulleys of the film stretching platform to move synchronously, and finally drives the film stretching platform to move up and down; the main driving pulley 17: the movement power of all the pulleys is transmitted by the pulley; the plug-in slot 18: the part is provided with a hexagonal wrench hole, and the rotation of the part is driven to drive the entire pulley group to rotate;

[0042] As attached Figure 4 The figure shows the lifting power mechanism of the film stretching table, the limit plug-in column 19: the limit plug-in column 19 is inserted into the wrench hole of the plug-in slot 18, and the plug-in slot 18 is rotated to control the lifting of the film stretching table 5; the large pulley 20: the large pulley 20 is rotated to drive the limit plug-in column 19; the small pulley 26 is installed at the output end of the motor;

[0043] As attached Figure 5 The diagram shows the connection between the film stretching platform 5 and the film stretching platform lifting power mechanism 1. When the film stretching platform 5 needs to be lifted or lowered, the film stretching platform 5 lifting power mechanism is pushed by the Y-axis motion mechanism 2 to extend the plug-in slot 18, and then the film stretching platform driving parts move to just above the limit plug-in column 19, and then the limit plug-in column 19 rises, and the hexagonal wrench is pushed into the hexagonal inner hole of the plug-in slot 18. The motor drives the limit plug-in column 19 to rotate to realize the lifting and lowering movement of the film stretching platform. Nuts and bolts are used to fix the limit plug-in column 19 and the plug-in slot 18 together; the first main drive pulley 17 is fixed on the outside of the main shaft 28.

[0044] Technical advantages include:

[0045] (1) The workbench can realize XY movement, lifting and lowering of film stretching and rotation functions;

[0046] (2) It can detect whether the frame is loaded to the correct position;

[0047] (3) Four long film strips are arranged around the periphery, which has a better film stretching effect than the integral annular film strips.

[0048] The working process is as follows:

[0049] After the frame is inserted into the film stretching table, the film stretching table descends, driving the film and matrix chips to descend. During the descent, the film stretching strip does not move. As the film stretching strip expands, the film is tightened. After the film is tightened, it is more conducive to picking up the chip on the film. The XY movement can move each chip to the fixed position where the chip needs to be picked up. The rotation function of the film stretching table is used to correct the angle of the chip matrix.

[0050] The preferred embodiments of the utility model disclosed above are only used to help explain the utility model. The preferred embodiments do not describe all the details in detail, nor do they limit the utility model to the specific implementation methods described. Obviously, many modifications and changes can be made according to the content of this specification. This specification selects and specifically describes these embodiments in order to better explain the principles and practical applications of the utility model, so that technicians in the relevant technical field can well understand and use the utility model. The utility model is limited only by the claims and their full scope and equivalents.

Claims

1. A workbench with film stretching, XY movement and rotation, characterized in that: The invention comprises a table, an X-direction motion mechanism (7) composed of two linear strokes installed on the table, a support plate installed by four sliders slidably matched with the X-direction motion mechanism (7), a Y-direction motion mechanism (2) composed of two linear strokes installed on the support plate, a bearing platform installed by four sliders slidably matched with the Y-direction motion mechanism (2), a film stretching mechanism installed on the bearing platform, a rotating motor (4) installed on the side of the bearing platform and a reducer (3) matched with the output shaft vertically arranged on the rotating motor (4), and a film stretching platform lifting power mechanism (1) installed on the table for lifting and lowering the film stretching mechanism; The surface of the carrier platform is located at the bottom of the film stretching platform (5), and is surrounded by a synchronous belt (16) and a first main driving pulley (17) that cooperates with the synchronous belt (16) for tensioning transmission, a first fixed idler wheel (15), a synchronous belt tensioning idler wheel (14), and a film stretching platform lifting pulley (13); The lifting power mechanism (1) of the film stretching table comprises a transverse movement structure with two linear strokes at the bottom, a bearing plate slidably mounted on the upper part of the transverse movement structure by a slider, a lifting structure (24) mounted on the bearing plate, a connecting plate mounted on the top of the lifting structure (24), a reduction motor (25) vertically mounted on the connecting plate, and a large pulley (20) mounted through a bearing, a small pulley (26) is provided on the top of the reduction motor (25), the large pulley (20) and the small pulley (26) are connected to each other through a first tensioning synchronous belt transmission, and a limit plug-in column (19) is provided on the top of the large pulley (20) to correspond to the plug-in groove (18) at the bottom of the main rotating shaft (28) of the first main driving pulley (17); The film stretching mechanism includes a circular tray and a cross roller bearing (12) arranged around the bottom circumference of the circular tray for providing rotation support; a second idler wheel (31) is installed in the circular tray, and a second main drive pulley is installed on the output shaft end of the reducer (3); the second main drive pulley, the second idler wheel (31) and the cross roller bearing (12) are connected by a second tensioning synchronous belt transmission.

2. The workbench with film stretching, XY movement and rotation as claimed in claim 1, characterized in that: The film stretching mechanism also includes a film stretching platform (5) installed on the upper part of the circular tray; a trumpet-shaped iron ring insertion port (8) for inserting an iron ring is provided on the outer side of the film stretching platform (5); a film stretching strip (9) is fixed around the film stretching platform (5); and avoidance grooves (10) for avoiding clamps are provided on both sides of the upper part of the film stretching platform (5).

3. The workbench with film stretching, XY movement and rotation as claimed in claim 1, characterized in that: An inverted L-shaped bracket is installed on the bearing platform, and a sensor (6) for identifying the position of the iron ring is installed on the inverted L-shaped bracket.

4. The workbench with film stretching, XY movement and rotation as claimed in claim 1, characterized in that: The circular tray is provided with a sensor sheet (11) for rotating the film stretching platform (5) back to the origin.

5. The workbench with film stretching, XY movement and rotation as claimed in claim 1, characterized in that: The X-direction motion mechanism (7) and the Y-direction motion mechanism (2) are arranged vertically.

6. The film-stretching, XY-moving and rotating workbench according to claim 1, characterized in that: The lateral movement structure is kept flush with the Y-direction movement mechanism (2).

Images