Finishing device with pressure detection function

Abstract

The utility model discloses a trimming device with pressure detection, which comprises a trimmer driving unit arranged on a trimmer base; the dresser execution unit is connected with the dresser driving unit through an output shaft, can circumferentially rotate around the axis of the dresser execution unit under the driving of the dresser driving unit, and can generate axial downward pressure under the driving of the dresser base; a sensor; the dynamic force conduction unit is arranged between the sensor and the dresser execution unit, at least part of the dynamic force conduction unit is matched with the sensor and used for installing and positioning the sensor, and at least part of the dynamic force conduction unit makes contact with the dresser execution unit and the sensor so that the axial pressure of the dresser execution unit can be transmitted to the sensor; and the relative static state of the sensor is kept. Through the arrangement of the dynamic force conduction unit, the rotation action of the dresser execution unit and the downward pressing action of the dresser execution unit on the polishing pad are relatively independent, and it is ensured that the sensor can accurately feed back the downward pressing force.

Description

Technical Field

[0001] The utility model belongs to the technical field of semiconductor integrated circuit chip manufacturing equipment, in particular to a trimming device with pressure detection. Background Art

[0002] In a chemical mechanical planarization (CMP) device, the wafer is polished on the surface of a polishing pad. As the polishing time increases, the removal rate is lost. A pad conditioner (PC) with an activation disk is needed to activate and condition the polishing pad surface to restore the removal rate of the polishing pad.

[0003] To condition the polishing pad, the activation disk on the dresser spins while a pressure-applying device slides downward against the polishing pad via a connecting rod. The amount of downward pressure is crucial to the pad's conditioning performance and stability. Precisely controlling downward pressure ensures both surface activation and stability while extending the pad's life. However, existing dressers typically use an initial open-loop calibration for downward pressure, indirectly controlling the air pressure during operation. This lacks a real-time measurement method and prevents accurate measurement of actual downward pressure.

[0004] Chinese patent CN109623662B discloses a "dressing device with pressure detection." It incorporates a pressure sensor within the inner cavity of the dressing device body to detect the pressure of the dressing device body during the dressing process on the polishing pad, and adjusts the set pressure based on the detected pressure value. However, in practice, it was discovered that the signal output cable of the pressure sensor rotates with the dressing system, causing entanglement of the signal output cable and ultimately affecting pressure detection. Utility Model Content

[0005] In order to overcome the deficiencies of the prior art, the utility model provides a dressing device with pressure detection, which makes the rotation and pressing actions of the dresser execution unit relatively independent, thereby ensuring the feedback accuracy of the pressing force.

[0006] The technical solution adopted by the utility model to solve the technical problem is: a dressing device with pressure detection, comprising:

[0007] A dresser drive unit is provided on the dresser base;

[0008] a dresser actuator unit connected to the dresser drive unit via an output shaft, capable of circumferentially rotating around its own axis under the drive of the dresser drive unit, and capable of generating axial downward pressure under the drive of the dresser base;

[0009] sensor;

[0010] A dynamic force transmission unit is provided between the sensor and the dresser actuator unit. The dynamic force transmission unit at least partially cooperates with the sensor to install and position the sensor. The dynamic force transmission unit at least partially contacts the dresser actuator unit and the sensor respectively to transmit the axial pressure of the dresser actuator unit to the sensor and keep the sensor in a relatively static state.

[0011] Furthermore, the dresser driving unit, the output shaft and the dresser executing unit are hollow inside to form a mounting channel, and the dynamic force transmission unit is arranged in the mounting channel.

[0012] Furthermore, the mounting channel is located at the rotation center of the trimmer execution unit.

[0013] Furthermore, the dynamic force conduction unit includes a fixed bracket and a force conduction structure.

[0014] Furthermore, the sensor is covered by a fixing bracket, and a portion of the fixing bracket extends from the installation channel.

[0015] Furthermore, at least a portion of the force conducting structure is in rolling contact with the dresser execution unit and the sensor respectively.

[0016] Furthermore, the force transmission structure includes a first rotating support member provided between the fixed bracket and the sensor, and a second rotating support member provided between the sensor and the dresser execution unit.

[0017] Furthermore, the force transmission structure includes a first rotating support member provided between the fixed bracket and the sensor, a force transmission rod abutting against the sensor, and a second rotating support member provided between the force transmission rod and the trimmer execution unit.

[0018] Furthermore, the force transmission structure includes a first rotating support member provided between the fixed bracket and the sensor, a force transmission rod abutting against the trimmer execution unit, and a second rotating support member provided between the force transmission rod and the sensor.

[0019] Furthermore, the first rotation support member is a planar thrust bearing, and the second rotation support member is a self-aligning thrust bearing.

[0020] Furthermore, the fixing bracket is fixedly assembled with the trimmer base.

[0021] Furthermore, the sensor is a mechanical pressure sensor.

[0022] Furthermore, the dynamic force transmission unit includes a sealed transmission path and a fluid pressure transmission medium located in the sealed transmission path. One end of the sealed transmission path is sealed with the trimmer execution unit, and the two are rotationally connected. The other end extends from the installation channel and is sealed with the sensor.

[0023] Furthermore, the trimmer execution unit at least includes an activation disk, a flexible layer provided on the back of the activation disk, and a cavity formed by the flexible layer and part of the trimmer execution unit, and the fluid pressure transmission medium fills the cavity.

[0024] Furthermore, the sealed conductive path includes a pipeline sealedly connected to the cavity, and the pipeline extends from the installation channel and is sealedly connected to the sensor; the pipeline is a flexible pipeline or a rigid pipeline.

[0025] Furthermore, the fluid pressure transmission medium is incompressible water; or, the fluid pressure transmission medium is gas.

[0026] Furthermore, the sensor is a liquid pressure sensor; or, the sensor is a gas pressure sensor.

[0027] The beneficial effects of the present invention are: 1) through the setting of the dynamic force transmission unit, the two actions of the rotation of the dresser execution unit and the downward pressure of the dresser execution unit on the polishing pad are relatively independent, ensuring that the sensor can accurately feedback the downward pressure, and reduce friction, wear and heat caused by relative movement, and extend the life of the detection system; 2) the downward pressure of the dresser execution unit can be monitored in real time, the downward pressure will not be lost during the transmission process, the detection data is accurate and effective, and the rotation of the dresser execution unit is not affected; 3) the assembly structure is relatively simple, reducing the difficulty of installation; 4) the sealed conduction path and the fluid pressure transmission medium are coordinated, and the fluid flexibility of the fluid pressure transmission medium is utilized to simplify the complexity of the structure. The incompressibility of the fluid ensures the sensitivity of the downward pressure signal detection, and the setting position of the sensor is more optional, and the loss of downward pressure during the detection process is small. BRIEF DESCRIPTION OF THE DRAWINGS

[0028] Figure 1 This is a cross-sectional view of embodiment 1 of the present invention.

[0029] Figure 2 for Figure 1 A magnified view of the structure in Figure 2.

[0030] Figure 3 This is a cross-sectional view of the second embodiment of the present invention.

[0031] Figure 4 for Figure 3 A magnified view of the structure at point B in FIG.

[0032] Figure 5 This is a cross-sectional view of embodiment 3 of the present invention.

[0033] Figure 6 for Figure 5 Enlarged view of the structure at point C in .

[0034] Figure 7 This is a cross-sectional view of the fourth embodiment of the present invention.

[0035] Figure 8 This is a partial schematic diagram of the sealed conduction path in the fourth embodiment of the present invention.

[0036] Among them, 1-dresser base, 2-dresser drive unit, 3-dresser execution unit, 31-activation disk, 32-cavity, 4-output shaft, 5-sensor, 51-sensor signal output line, 6-dynamic force transmission unit, 61-fixed bracket, 62-force transmission structure, 621-first rotating support, 622-second rotating support, 623-force transmission rod, 63-fluid pressure transmission medium, 7-installation channel, 8-sealed transmission path, 81-pipeline, 82-swivel joint, 821-rotating part of the rotary joint, 822-stationary part of the rotary joint. DETAILED DESCRIPTION

[0037] In order to enable those skilled in the art to better understand the present invention, the following will provide a clear and complete description of the technical solutions in the embodiments of the present invention in conjunction with the accompanying drawings. Obviously, the embodiments described are only part of the embodiments of the present invention, not all of them. Based on the embodiments of the present invention, all other embodiments obtained by those skilled in the art without creative work should fall within the scope of protection of the present invention.

[0038] Example 1

[0039] A dressing device with pressure detection includes a dresser drive unit 2 mounted on a dresser base 1, a dresser actuator 3 connected to the dresser drive unit 2 via an output shaft 4, a sensor 5, and a dynamic force transmission unit 6 disposed between the sensor 5 and the dresser actuator 3. Driven by the dresser drive unit 2, the dresser actuator 3 can rotate circumferentially about its own axis. Driven by the dresser base 1, the dresser actuator 3 can generate axial downward pressure, which is used to dress the polishing pad. One end of the dresser base 1 is connected to a machine connecting rod, and part of the downward pressure of the dresser actuator 3 is generated by the machine connecting rod and the dresser base 1. The above functions can be achieved by existing technologies and will not be described in detail.

[0040] At least a portion of the dynamic force transmission unit 6 cooperates with the sensor 5 to securely mount the sensor 5. Positioning, as used herein, refers to securing the sensor 5 at the target location. At least a portion of the dynamic force transmission unit 6 contacts the dresser actuator 3 and the sensor 5, respectively, thereby transmitting the axial pressure of the dresser actuator 3 to the sensor 5 while maintaining the sensor 5 in a relatively stationary state. This relatively stationary state of the sensor 5 means that the sensor 5 does not rotate with the rotation of the dresser actuator 3.

[0041] Specifically, the dresser drive unit 2, output shaft 4, and dresser actuator 3 are arranged sequentially from top to bottom. These units are hollowed out to form a mounting channel 7, within which the dynamic force transmission unit 6 is disposed. In this embodiment, the mounting channel 7 is located at the rotation center of the dresser actuator 3. In other embodiments, the mounting channel 7 may also be offset from the rotation center of the dresser actuator 3, without limitation.

[0042] like Figure 1 、 Figure 2 As shown, the dynamic force transmission unit 6 includes a fixed bracket 61 and a force transmission structure 62. The sensor 5 is enclosed by the fixed bracket 61, which extends from the top of the mounting channel 7. The portion of the fixed bracket 61 extending beyond the mounting channel 7 is fixedly connected to the outside world. In this embodiment, the fixed bracket 61 is fixedly assembled with the dresser base 1, ensuring that the fixed bracket 61 does not rotate with the dresser actuator 3. Furthermore, the signal output line 51 of the sensor 5 can extend from the fixed bracket 61. In this embodiment, the sensor 5 is positioned at the output shaft 4 and the dresser actuator 3, respectively.

[0043] At least portions of the force transmission structure 62 are in rolling contact with the dresser actuator 3 and the sensor 5, respectively, to prevent the rotation of the dresser actuator 3 from being transmitted to the sensor 5 and causing it to rotate. Specifically, the force transmission structure 62 includes a first rotating support member 621 disposed between the inner wall of the fixed bracket 61 and the top of the sensor 5, and a second rotating support member 622 disposed between the bottom of the sensor 5 and the dresser actuator 3. The first rotating support member 621 is a planar thrust bearing, the second rotating support member 622 is a self-aligning thrust bearing, and the sensor 5 is a mechanical pressure sensor. Of course, in other embodiments, the first rotating support member 621 and the second rotating support member 622 can also be other structures, as long as they can achieve rolling contact with the sensor 5 and achieve force transmission without causing the sensor to rotate.

[0044] During operation, the power output shaft of the dresser driving unit 2 arranged in the dresser base 1 is connected to the output shaft 4, and the dresser driving unit 2 is used to drive the output shaft 4 and the dresser executive unit 3 to rotate together. The dresser base 1 will not rotate, and the fixed bracket 61 of the dynamic force transmission unit 6 will not rotate either; the dresser base 1 carries the dresser driving unit 2, the dynamic force transmission unit 6 and the dresser executive unit 3 together and presses down on the polishing pad. In order to monitor the axial downward pressure applied by the dresser base 1 to the dresser executive unit 3, the top surface of the rotating dresser executive unit 3 abuts against the second rotating support 622, and the second rotating support 622 abuts against the sensor 5, and the top surface of the sensor 5 abuts against the first rotating support 621, thereby transmitting the axial pressure of the dresser executive unit 3 to the sensor 5 without driving the sensor 5 to rotate, so as to achieve the purpose of the sensor 5 effectively detecting the axial downward pressure applied to the dresser executive unit 3.

[0045] Example 2

[0046] like Figure 3 、 Figure 4 As shown, the difference between this embodiment and the first embodiment is that the force conduction structure 62 includes a first rotating support member 621 arranged between the fixed bracket 61 and the sensor 5, a force transmission rod 623 abutting the sensor 5, and a second rotating support member 622 arranged between the force transmission rod 623 and the trimmer execution unit 3.

[0047] The fixing bracket 61 is fixedly assembled and connected to the top of the dresser base 1 , and the sensor 5 is correspondingly arranged at the top position of the dresser driving unit 2 .

[0048] During operation, the dresser base 1 is pressed down on the polishing pad together with the dresser driving unit 2, the dynamic force transmission unit 6 and the dresser executive unit 3. In order to monitor the axial downward pressure applied by the dresser base 1 to the dresser executive unit 3, the top surface of the rotating dresser executive unit 3 abuts against the second rotating support 622, and the second rotating support 622 abuts against the force transmission rod 623. The top surface of the force transmission rod 623 abuts against the bottom surface of the sensor 5, and the top surface of the sensor 5 abuts against the first rotating support 621, thereby transmitting the axial pressure of the dresser executive unit 3 to the sensor 5 without driving the sensor 5 to rotate, so as to achieve the purpose of the sensor 5 effectively detecting the axial downward pressure applied to the dresser executive unit 3.

[0049] The other structures are the same as those in the first embodiment and will not be described in detail.

[0050] Example 3

[0051] like Figure 5 、 Figure 6As shown, the difference between this embodiment and the first embodiment is that the force conduction structure 62 includes a first rotating support member 621 arranged between the fixed bracket 61 and the sensor 5, a force transmission rod 623 that is against the trimmer execution unit 3, and a second rotating support member 622 arranged between the force transmission rod 623 and the sensor 5.

[0052] The fixing bracket 61 is fixedly assembled and connected to the top of the dresser base 1 , and the sensor 5 is correspondingly arranged at the top position of the dresser driving unit 2 .

[0053] During operation, the dresser base 1 is pressed down on the polishing pad together with the dresser driving unit 2, the dynamic force transmission unit 6 and the dresser execution unit 3. In order to monitor the axial downward pressure applied by the dresser base 1 to the dresser execution unit 3, the top surface of the rotating dresser execution unit 3 abuts against the force transmission rod 623, and the top surface of the force transmission rod 623 abuts against the second rotating support 622, and the second rotating support 622 abuts against the bottom surface of the sensor 5. Even if the force transmission rod 623 is rotated together with the dresser execution unit 3, it will not cause the sensor 5 to rotate. The top surface of the sensor 5 abuts against the first rotating support 621, and the first rotating support 621 abuts against the fixed bracket 61, thereby transmitting the axial pressure of the dresser execution unit 3 to the sensor 5 without driving the sensor 5 to rotate, so as to achieve the purpose of the sensor 5 effectively detecting the axial downward pressure applied to the dresser execution unit 3.

[0054] The other structures are the same as those in the first embodiment and will not be described in detail.

[0055] Example 4

[0056] like Figure 7 As shown, in this embodiment, the dynamic force transmission unit 6 includes a sealed transmission path 8 and a fluid pressure transmission medium 63 located within the sealed transmission path 8. One end of the sealed transmission path 8 is sealedly engaged with the dresser actuator 3, and the two are rotationally connected. Specifically, when the dresser actuator 3 rotates, at least a portion of the sealed transmission path 8 does not rotate with the dresser actuator 3. The other end of the dresser actuator 3 extends from the mounting channel 7 and is sealedly connected to the sensor 5.

[0057] During operation, the dresser base 1, along with the dresser drive unit 2, dynamic force transmission unit 6, and dresser actuator 3, presses downward onto the polishing pad. To monitor the axial downward pressure exerted by the dresser base 1 on the dresser actuator 3, the downward pressure is sensed and transmitted via the deformation of the fluid pressure transmission medium 63 within the sealed conductive path 8. Simultaneously, a rotary joint 82 is connected in series between the dresser actuator 3 and the dynamic force transmission unit 6. This prevents the rotation of the dresser actuator 3 from being transmitted through the sealed conductive path 8, effectively preventing the sensor 5 from rotating. This allows the sensor 5 to effectively detect the axial downward pressure exerted on the dresser actuator 3.

[0058] In order to accurately and sensitively sense the axial downward pressure of the trimmer actuator unit 3, a flexible layer can be provided on the back of the activation disk 31 of the trimmer actuator unit 3. This flexible layer is more easily deformed, and the flexible layer and part of the trimmer actuator unit 3 are arranged to form a cavity 32. The above-mentioned fluid pressure transmission medium 63 is filled in the cavity 32. In this embodiment, the sealed conductive path 8 includes a pipe 81 that is sealed with the cavity 32. The pipe 81 extends from the installation channel 7 and is sealed with the sensor 5. The pipe 81 can be a flexible pipe or a rigid pipe, and there is no specific limitation. The formation of a completely enclosed space between the cavity 32, the pipe 81 and the sensor 5 can be achieved by existing technology and will not be repeated here.

[0059] like Figure 8 As shown, in one embodiment, the rotary joint 82 is used to isolate the rotational movement of the trimmer actuator 3. The sealing scheme of the rotary joint 82 is mainly reflected in two aspects: static sealing between the lower part of the rotary joint 82 and the trimmer actuator 3, and between the upper part of the rotary joint 82 and the pipeline 81; and dynamic sealing inside the rotary joint 82.

[0060] The rotary joint 82 includes a rotating part 821 and a stationary part 822. The inner wall of the rotating part 821 and the stationary part 822 are sealed together by a dynamic seal, and the outer wall of the rotating part 821 and the trimmer actuator 3 are sealed together by a static seal. The inner wall of the stationary part 822 is sealed together with the pipeline 81 by a static seal. Since the seals are relatively static, the static seal is preferably an O-ring with a large compression amount. The form of the dynamic seal can be selected according to the actual fluid pressure. Here, the pressure is relatively low and the relative speed is relatively low, and an O-ring is also preferably sufficient. For detection with a faster speed or higher pressure, the dynamic seal can preferably be a V-ring, a Gly ring, a hard seal, etc., but is not limited to the above methods.

[0061] When the dresser actuator 3 applies downward pressure to the polishing pad, the upper portion of the dresser actuator 3 deforms flexibly, increasing the pressure of the fluid pressure transmission medium 63 within the sealed conductive path 8. This pressure change is sensed and collected by the sensor 5. The dresser actuator 3 serves two functions: 1) the upper thin flexible layer provides space for deformation to accommodate the volume changes in the sealed conductive path 8; and 2) the upper structure simultaneously transmits the torque of the output shaft 4 downward to the activation disk 31.

[0062] During the movement, the presence of the fluid pressure transmission medium 63 in the sealed conduction path 8 does not limit the freedom of the activation disk 31; when the down pressure acts on the trimmer execution unit 3, the flexibility of the flexible layer will generate a certain pressure on the fluid pressure transmission medium 63 in the sealed conduction path 8. Due to the incompressibility of the fluid pressure transmission medium 63, the liquid or gas pressure will be instantly transmitted to the sensor 5 through the dynamic force conduction unit 6, thereby realizing the collection of the down pressure signal.

[0063] Fluid pressure transmission medium 63 can be incompressible water, in which case sensor 5 is a liquid pressure sensor and pipeline 8 is a hydraulic pipe. Fluid pressure transmission medium 63 can also be gas, in which case sensor 5 is a gas pressure sensor. Pipeline 81 preferably uses a flexible air pipe with a smaller diameter to minimize pressure loss during the detection process and ensure accurate pressure detection.

[0064] The above specific implementation methods are used to illustrate the present invention rather than to limit the present invention. Any modifications and changes made to the present invention within the spirit of the present invention and the protection scope of the claims shall fall within the protection scope of the present invention.

Claims

1. A dressing device with pressure detection, characterized in that: include: A dresser driving unit (2) is arranged on the dresser base (1); A dresser actuator unit (3) is connected to the dresser drive unit (2) via an output shaft (4), and can rotate circumferentially around its own axis under the drive of the dresser drive unit (2), and the dresser actuator unit (3) can generate axial downward pressure under the drive of the dresser base (1); Sensor (5); A dynamic force transmission unit (6) is arranged between the sensor (5) and the dresser actuator unit (3), and at least partially cooperates with the sensor (5) to install and position the sensor (5), and at least partially contacts the dresser actuator unit (3) and the sensor (5) respectively, so as to transmit the axial pressure of the dresser actuator unit (3) to the sensor (5) and keep the sensor (5) in a relatively static state.

2. The trimming device with pressure detection according to claim 1, characterized in that: The trimmer drive unit (2), the output shaft (4) and the trimmer execution unit (3) are hollow inside to form a mounting channel (7), and the dynamic force transmission unit (6) is arranged in the mounting channel (7).

3. The trimming device with pressure detection according to claim 2, characterized in that: The mounting channel (7) is located at the rotation center of the trimmer execution unit (3).

4. The trimming device with pressure detection according to claim 1 or 2, characterized in that: The dynamic force transmission unit (6) comprises a fixed bracket (61) and a force transmission structure (62).

5. The trimming device with pressure detection according to claim 4, characterized in that: The sensor (5) is covered by a fixing bracket (61), and a portion of the fixing bracket (61) extends out from the installation channel (7).

6. The trimming device with pressure detection according to claim 4, characterized in that: At least part of the force transmission structure (62) is in rolling contact with the trimmer actuator (3) and the sensor (5), respectively.

7. The trimming device with pressure detection according to claim 6, characterized in that: The force transmission structure (62) comprises a first rotating support member (621) arranged between the fixed support (61) and the sensor (5), and a second rotating support member (622) arranged between the sensor (5) and the trimmer execution unit (3).

8. The trimming device with pressure detection according to claim 6, characterized in that: The force transmission structure (62) comprises a first rotating support member (621) arranged between a fixed bracket (61) and a sensor (5), a force transmission rod (623) abutting against the sensor (5), and a second rotating support member (622) arranged between the force transmission rod (623) and a trimmer execution unit (3).

9. The trimming device with pressure detection according to claim 6, characterized in that: The force transmission structure (62) comprises a first rotating support member (621) arranged between a fixed bracket (61) and a sensor (5), a force transmission rod (623) abutting against a trimmer execution unit (3), and a second rotating support member (622) arranged between the force transmission rod (623) and the sensor (5).

10. The trimming device with pressure detection according to claim 7, 8 or 9, characterized in that: The first rotating support member (621) is a plane thrust bearing, and the second rotating support member (622) is a self-aligning thrust bearing.

11. The trimming device with pressure detection according to claim 4, characterized in that: The fixed bracket (61) is fixedly assembled with the trimmer base (1).

12. The trimming device with pressure detection according to claim 4, characterized in that: The sensor (5) is a mechanical pressure sensor.

13. The trimming device with pressure detection according to claim 1 or 2, characterized in that: The dynamic force transmission unit (6) comprises a sealed transmission path (8) and a fluid pressure transmission medium (63) located in the sealed transmission path (8); one end of the sealed transmission path (8) is sealedly matched with the trimmer actuator unit (3) and the two are rotationally connected; the other end of the sealed transmission path (8) extends from the mounting channel (7) and is sealedly connected to the sensor (5).

14. The trimming device with pressure detection according to claim 13, characterized in that: The trimmer actuator unit (3) comprises at least an activation disk (31), a flexible layer arranged on the back of the activation disk (31), and a cavity (32) formed by the flexible layer and a portion of the trimmer actuator unit (3), wherein the fluid pressure transmission medium (63) fills the cavity (32).

15. The trimming device with pressure detection according to claim 14, characterized in that: The sealed conductive path (8) comprises a pipeline (81) sealedly connected to the cavity (32); the pipeline (81) extends from the installation channel (7) and is sealedly connected to the sensor (5); the pipeline (81) is a flexible pipeline or a rigid pipeline.

16. The trimming device with pressure detection according to claim 13, characterized in that: The fluid pressure transmission medium (63) is incompressible water; or, the fluid pressure transmission medium (63) is gas.

17. The trimming device with pressure detection according to claim 13, characterized in that: The sensor (5) is a liquid pressure sensor; or, the sensor (5) is a gas pressure sensor.

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