Heat treatment equipment and furnace tube loading and unloading auxiliary tool thereof

Abstract

The utility model relates to heat treatment equipment and a furnace tube assembling and disassembling auxiliary tool thereof. The heat treatment equipment comprises a main body which comprises a heating furnace and a moving device, the heating furnace is configured to contain a furnace tube, and the moving device is arranged outside a furnace opening of the heating furnace; and the furnace tube loading and unloading auxiliary tool is configured to load and unload the furnace tube. The furnace tube loading and unloading auxiliary tool comprises a base which is connected with the moving device of the main body; the at least two guide rails are arranged on the base and are arranged side by side; and a plurality of support members which are respectively arranged on the guide rails in an opposite manner. According to the heat treatment equipment and the furnace tube loading and unloading auxiliary tool thereof, the loading and unloading efficiency of the furnace tube can be improved, and the production efficiency is improved. In addition, the furnace tube loading and unloading auxiliary tool is connected with the moving device, the furnace tube does not need to be lifted manually, alignment of the furnace tube and the heating furnace can be easier and more accurate by controlling the moving device through a heat treatment equipment computer, damage to the furnace tube is avoided, and the safety of the furnace tube is improved.

Description

Technical Field

[0001] The utility model relates to the technical field of semiconductors, and more specifically to a heat treatment device and a furnace tube loading and unloading auxiliary tooling thereof. Background Art

[0002] In the preparation process of semiconductor devices, heat treatment processes such as diffusion, oxidation, and annealing are the core processes, which have a huge impact on the quality of semiconductor devices and product yield.

[0003] With the popularization of photovoltaic power generation, the demand for related photovoltaic products continues to increase. In order to meet the growing production capacity demand, the main parts and components of heat treatment process equipment require higher quality requirements and installation efficiency.

[0004] However, due to the limitations of the structure of the heat treatment process equipment in the prior art, the space for installing the heating furnace tube from the furnace mouth is very limited, and the installation method generally adopts manual alignment installation or pulley lifting, but these methods all have some problems. For example, in manual alignment installation, when multiple people lift the heating furnace tube together, the strength and direction are not easy to control, and alignment is difficult; and pulley lifting will affect the normal operation of other furnace tubes and its use is limited. No matter which method is used, the installation problem of the heat treatment furnace tube cannot be solved well. In particular, for the quartz tube used in the existing high-temperature boron diffusion equipment, it is difficult to make and the cost is high, and multiple air intake and thermocouple insertion tubes are welded at the tail. In the actual installation process, the tail welded tube often collides, the tube body breaks, etc., and needs to be repaired. The round-trip freight and maintenance costs are huge, and the installation process is very time-consuming.

[0005] Therefore, it is necessary to improve the heat treatment equipment in the prior art and develop installation auxiliary tools to solve the above-mentioned problems. Utility Model Content

[0006] The utility model aims to provide a heat treatment device and furnace tube loading and unloading auxiliary tooling thereof, so as to solve the technical problems of heat treatment equipment in the prior art in that the furnace tubes are difficult to align, easy to be damaged and time-consuming to install during installation.

[0007] According to one embodiment of the present application, the present application provides a heat treatment device, which includes: a main body, which includes a heating furnace and a moving device, the heating furnace is configured to accommodate a furnace pipe, and the moving device is arranged outside the furnace mouth of the heating furnace; and a furnace pipe loading and unloading auxiliary tooling, which is configured to load and unload the furnace pipe. The furnace pipe loading and unloading auxiliary tooling includes: a base, which is connected to the moving device of the main body; at least two guide rails, which are arranged on the base and arranged side by side; and a plurality of support members, which are respectively arranged on each guide rail in a relative manner.

[0008] According to another embodiment of the present application, the present application provides a furnace tube loading and unloading auxiliary tooling, which includes: a base; at least two guide rails, which are arranged on the base and configured side by side; and a plurality of support members, which are respectively arranged on each guide rail in a relative manner.

[0009] According to another embodiment of the present application, the present application provides a furnace pipe loading and unloading auxiliary tooling, which includes: a base; a height adjustment device, which is arranged on the base; a cantilever, which is connected to the height adjustment device; and a plurality of support members, which are arranged on the cantilever in a relative manner and spaced apart from each other.

[0010] Compared with the prior art, the utility model has at least the following beneficial effects:

[0011] The present application provides a heat treatment equipment, which can improve the loading and unloading efficiency of furnace tubes by setting furnace tube loading and unloading auxiliary tooling, and will not affect the normal operation of other furnace tubes during the loading and unloading process, thereby improving production efficiency. In addition, by connecting the furnace tube loading and unloading auxiliary tooling with a mobile device, it is no longer necessary to lift the furnace tube manually, and the computer-controlled mobile device of the heat treatment equipment can make the alignment of the furnace tube and the heating furnace easier and more accurate, thereby avoiding the occurrence of furnace tube damage and improving the safety of the furnace tube.

[0012] The present application provides a furnace pipe loading and unloading auxiliary tool, which can replace manual lifting by setting a support member, effectively ensuring the personal safety of loading and unloading workers. In addition, the furnace pipe loading and unloading auxiliary tool has a simple structure, is easy to manufacture and has low cost. BRIEF DESCRIPTION OF THE DRAWINGS

[0013] The following will briefly describe the drawings necessary for describing the embodiments of the utility model or the prior art to facilitate the description of the embodiments of the utility model. Obviously, the drawings described below are only some embodiments of the utility model. For those skilled in the art, without the need for creative work, drawings of other embodiments can still be obtained based on the illustrations in these drawings.

[0014] Figure 1 A schematic structural diagram of a heat treatment device provided in an embodiment of the present application.

[0015] Figure 2 A partial structural schematic diagram of a heat treatment device provided in an embodiment of the present application.

[0016] Figure 3 A schematic structural diagram of a furnace tube loading and unloading auxiliary tooling provided in an embodiment of the present application.

[0017] Figure 4 for Figure 3 Magnified view of area A.

[0018] Figure 5A schematic structural diagram of a support member provided in an embodiment of the present application.

[0019] Figure 5A A schematic structural diagram of another support member provided in an embodiment of the present application.

[0020] Figure 5B A schematic structural diagram of another support member provided in an embodiment of the present application.

[0021] Figure 6 for Figure 3 Schematic diagram of furnace tube loading and unloading using the furnace tube loading and unloading auxiliary tooling.

[0022] Figure 7 A schematic structural diagram of another furnace tube loading and unloading auxiliary tooling provided in an embodiment of the present application.

[0023] Figure 8 for Figure 7 Magnified view of area B.

[0024] Fig. 9 for Figure 7 A magnified view of area B from another viewing angle.

[0025] Fig.10 for Figure 7 Side view of the furnace tube loading and unloading auxiliary tooling.

[0026] Fig.11 for Figure 7 Schematic diagram of furnace tube loading and unloading using the furnace tube loading and unloading auxiliary tooling.

[0027] Fig.12 for Figure 8 Schematic diagram of the action of the support parts.

[0028] Fig.13 A schematic structural diagram of another furnace tube loading and unloading auxiliary tooling provided in an embodiment of the present application.

[0029] Fig.14 for Fig.13 Magnified view of area C.

[0030] Fig.15 for Fig.13 Schematic diagram of furnace tube loading and unloading using the furnace tube loading and unloading auxiliary tooling.

[0031] Explanation of symbols:

[0032] 1: heat treatment equipment; 10: main body; 11: shell; 12: heating furnace; 120: furnace mouth; 13: moving device; 14: furnace tube;

[0033] 20: Furnace tube loading and unloading auxiliary tooling; 21: Base; 22: Guide rail; 23: Support member; 23a: Support member; 23b: Support member; 24: Base; 25: Pulley; 26: Support roller; 26a: Support roller; 27: Support ball;

[0034] 30: furnace tube loading and unloading auxiliary tooling; 30a: furnace tube loading and unloading auxiliary tooling; 31: base; 32: height adjustment device; 33: cantilever; 34: support member; 34a: support member; 35: base; 36: clamping block; 37: support ball; 37a: support roller; 38: limit member;

[0035] 40: loader platform; 41: paddle mechanism assembly;

[0036] 142: pipe flange;

[0037] 223: guide groove; 241: top surface; 242: bottom surface; 243: side surface; 244: inclined surface; 245: receiving groove; 245a: receiving groove; 245b: receiving groove; 246: lower extension portion;

[0038] 320: hollow housing seat; 321: plate; 322: height adjustment member; 323: bearing; 324: guide rod; 331: first end; 332: second end; 351: upper part; 352: lower part; 354: inclined surface; 355: receiving groove; 355a: receiving groove; 356: hollow pressure plate; 362: slide groove; 391: abutment member; 392: adapter;

[0039] A: area; B: area; C: area; R1: moving direction; R 1a : moving direction; R2: moving direction; R 2a : moving direction; S: internal space; X: axial direction of the supporting roller; X a : Axial direction of the supporting roller. DETAILED DESCRIPTION

[0040] In order to better understand the spirit of the present application, it is further described below in conjunction with some preferred embodiments of the present application.

[0041] Various embodiments of the present application are discussed in detail below. Although specific implementations are discussed, it should be understood that these embodiments are only for illustrative purposes. Those skilled in the relevant art will recognize that other components and configurations may be used without departing from the spirit and scope of the present application.

[0042] Figure 1 A schematic structural diagram of a heat treatment device provided in an embodiment of the present application. Figure 2 A partial structural schematic diagram of a heat treatment device provided in an embodiment of the present application. Figure 3This is a schematic diagram of the structure of a furnace tube loading and unloading auxiliary tooling provided in an embodiment of the present application. Figures 1 to 3 As shown, the heat treatment equipment 1 includes a main body 10, a furnace tube loading and unloading auxiliary tool 20 and a loader platform 40. In some embodiments of the present application, the heat treatment equipment 1 may include but is not limited to a high-temperature horizontal diffusion furnace, a high-temperature horizontal oxidation furnace, and a high-temperature horizontal annealing furnace.

[0043] In some embodiments of the present application, Figure 1 and Figure 2 As shown, the main body 10 may include a shell 11, a heating furnace 12 and a moving device 13. The heating furnace 12 is disposed in the shell 11 and is configured to accommodate a furnace tube 14. In some embodiments of the present application, the heating furnace 12 may also be referred to as a "heat treatment device 12". In some embodiments of the present application, the furnace tube 14 may include but is not limited to a quartz tube. The moving device 13 is disposed outside the furnace mouth 120 of the heating furnace 12, and its purpose is to move objects, align and position. In some embodiments of the present application, the moving device 13 may include but is not limited to a manipulator.

[0044] The furnace tube loading and unloading auxiliary tool 20 is configured to load and unload the furnace tube 14. In some embodiments of the present application, such as Figure 1 and Figure 3 As shown, the furnace tube loading and unloading auxiliary tooling 20 may include a base 21, a guide rail 22 and a plurality of support members 23. The base 21 is connected to the moving device 13 (such as a manipulator) of the main body 10. In some embodiments of the present application, the base 21 may be composed of a plurality of aluminum extrusions. The guide rails 22 are disposed on the base 21 and arranged side by side. Each guide rail 22 may have a guide groove 223. The support members 23 are respectively disposed on each guide rail 22 in a relative manner. Of course, there is no limitation on the number of guide rails 22 in this embodiment. For example, at least two (such as Figure 3 The plurality of guide rails 22 are arranged on the base 21 and are supported by a plurality of support members 23 to ensure that the furnace tube 14 is concentric with the heating furnace 12 (as shown in FIG. Figure 6 shown).

[0045] Figure 4 for Figure 3 Magnified view of area A. Figure 5 A schematic diagram of the structure of a support member provided in an embodiment of the present application. In some embodiments of the present application, such as Figure 4 and Figure 5 As shown, each support member 23 may include a base 24 , a pulley 25 and a support roller 26 .

[0046] In some embodiments of the present application, Figure 5As shown, the base 24 may have a top surface 241, a bottom surface 242, a side surface 243, an inclined surface 244, a receiving groove 245 and a lower extension 246. The bottom surface 242 is opposite to the top surface 241. The inclined surface 244 extends between the top surface 241 and the side surface 243. In some embodiments of the present application, the top surface 241 may be omitted from the base 24, so the inclined surface 244 may extend between the two side surfaces 243. The receiving groove 245 is recessed from the inclined surface 244. The lower extension 246 extends downward from the bottom surface 242. In some embodiments of the present application, the pulley 25 may be connected to the lower extension 246 of the base 24, so that the base 24 may be connected to each guide rail 22 through the pulley 25. In some embodiments of the present application, the pulley 25 may be disposed in the guide groove 223 of the guide rail 22.

[0047] Figure 6 for Figure 3 Schematic diagram of furnace tube loading and unloading auxiliary tooling of furnace tube loading and unloading. In some embodiments of the present application, such as Figure 4 , Figure 5 and Figure 6 As shown, the support roller 26 is disposed on the base 24 and is configured to support the furnace tube 14. In some embodiments of the present application, the support roller 26 may be disposed (e.g., pivotally disposed) in the receiving groove 245, and a portion of the support roller 26 may protrude from the inclined surface 244 to achieve rotation. Figure 5 As shown, the axial direction X of the supporting roller 26 may be parallel to the moving direction of the supporting member 23 (including, for example, the moving direction R1 or the moving direction R2 ).

[0048] Figure 5A A schematic structural diagram of another support member provided in an embodiment of the present application. Figure 5A The support member 23a has and Figure 5 The support member 23 has a similar structure, except that: Figure 5A In some embodiments of the present application, the configuration of the support roller 26a of the support member 23a is as follows: Figure 5A As shown, the axial direction X of the supporting roller 26a a The support member 23a may be perpendicular to the moving direction (including, for example, the moving direction R 1a Or moving direction R 2a In addition, the groove direction of the receiving groove 245a of the base 24 can match the axial direction X of the supporting roller 26a. a Adjustment.

[0049] Figure 5B A schematic structural diagram of another support member provided in an embodiment of the present application. Figure 5B The support member 23b has and Figure 5 The support member 23 has a similar structure, except that: Figure 5B The support member 23b is replaced by a support ball 27 Figure 5 The supporting roller 26 of the supporting member 23. In some embodiments of the present application, Figure 5B As shown, the support ball 27 is disposed on the base 24 and is configured to support the furnace tube 14 ( Figure 6 In some embodiments of the present application, the support ball 27 may be disposed in the receiving groove 245b, and a portion of the support ball 27 may protrude from the inclined surface 244 to achieve rotation.

[0050] In some embodiments of the present application, Figure 1 and Figure 2 As shown, the loader platform 40 is connected to the main body 10, and the loader platform 40 may include a paddle mechanism assembly 41. In some embodiments of the present application, the paddle mechanism assembly 41 may be disposed in front of the furnace opening 120 of the heating furnace 12.

[0051] Regarding the operation of loading the furnace tube 14 (such as a quartz tube) into the heating furnace 12, refer to Figure 1 , Figure 4 and Figure 6 , the description is as follows:

[0052] Step 1: placing a furnace tube 14 (such as a quartz tube) on a supporting member 23 (such as a supporting roller 26) of a furnace tube loading and unloading auxiliary tooling 20;

[0053] Step 2: Move the furnace tube loading and unloading auxiliary tooling 20 by means of a moving device 13 (e.g., a manipulator) so that the furnace tube 14 (e.g., a quartz tube) on the support 23 (e.g., a support roller 26) is aligned with the furnace opening 120 of the heating furnace 12. In some embodiments of the present application, the alignment may include the furnace tube 14 (e.g., a quartz tube) being concentric with the heating furnace 12. In one embodiment of the present application, the angle of the furnace tube 14 (e.g., a quartz tube) may be manually rotated to avoid collision between the furnace tube 14 (e.g., a quartz tube) and the heating furnace 12; and

[0054] Step 3: Push the furnace tube 14 (e.g., quartz tube) into the heating furnace 12. During the pushing process, the support member 23 (including, for example, the base 24, the pulley 25, and the supporting roller 26) will move along with the furnace tube 14 (e.g., quartz tube) toward the furnace opening 120 of the heating furnace 12. When the pulley 25 of the support member 23 is separated from the guide groove 223 from the edge of the guide rail 22, the support member 23 that originally supported the furnace tube 14 (e.g., quartz tube) will automatically fall off until the furnace tube 14 (e.g., quartz tube) is completely entered into the heating furnace 12.

[0055] Regarding the operation of removing the furnace tube 14 (such as a quartz tube) from the heating furnace 12, please refer to Figure 1 , Figure 4 and Figure 6 , the description is as follows:

[0056] Step 1: Pull out a short section of the furnace tube 14 (e.g., a quartz tube);

[0057] Step 2: Install the support member 23 (including, for example, the base 24, the pulley 25 and the supporting roller 26) back onto the guide rail 22 in a relative manner. The pulley 25 of the support member 23 slides into the guide groove 223 of the guide rail 22, and the supporting roller 26 of the support member 23 abuts against the pulled out furnace tube 14 (for example, a quartz tube); and

[0058] Step 3: Repeat steps 1 to 2 until the furnace tube 14 (eg, quartz tube) is completely pulled out.

[0059] In some embodiments of the present application, the number of the supporting members 23 in the furnace tube loading and unloading auxiliary tooling 20 can be adjusted according to the on-site operation conditions.

[0060] exist Figures 1 to 6 In the embodiment shown, the heat treatment equipment 1 can improve the loading and unloading efficiency of the furnace tube 14 (such as a quartz tube) by providing a furnace tube loading and unloading auxiliary tooling 20 (including, for example, a base 21, a guide rail 22 and a support member 23), and the loading and unloading process will not affect the normal operation of other furnace tubes (such as a quartz tube) of the same machine heat treatment equipment, thereby greatly improving the production efficiency. In addition, by connecting the furnace tube loading and unloading auxiliary tooling 20 (including, for example, a base 21, a guide rail 22 and a support member 23) with the moving device 13 (such as a manipulator), it is no longer necessary to lift the furnace tube 14 (such as a quartz tube) manually, effectively ensuring the personal safety of the loading and unloading workers. And the computer-controlled moving device 13 (such as a manipulator) of the heat treatment equipment can make the alignment of the furnace tube 14 (such as a quartz tube) and the heating furnace 12 easier and more accurate, thereby avoiding the damage of the furnace tube 14 (such as a quartz tube), and greatly improving the safety of the furnace tube 14 (such as a quartz tube). On the other hand, the furnace tube loading and unloading auxiliary tooling 20 (including, for example, a base 21, a guide rail 22 and a support member 23) provided in the embodiment of the present application has a simple structure, and is therefore easy to manufacture and has low cost.

[0061] In some embodiments of the present application, Figure 1 As shown, due to the limitation of the downward movement space of the moving device 13 (such as a manipulator), the furnace tube loading and unloading auxiliary tooling 20 (including, for example, a base 21, a guide rail 22 and a support member 23) cannot load and unload the furnace tubes of the lowest heating furnace 12. Therefore, in some embodiments of the present application, the furnace tube loading and unloading auxiliary tooling 20 (including, for example, a base 21, a guide rail 22 and a support member 23) can be applied to the loading and unloading of high-position furnace tubes.

[0062] Figure 7 A schematic structural diagram of another furnace tube loading and unloading auxiliary tooling provided in an embodiment of the present application. Figure 8 for Figure 7 Magnified view of area B. Fig. 9 for Figure 7 A magnified view of area B from another viewing angle. Figures 7 to 9 As shown, the furnace tube loading and unloading auxiliary tool 30 includes a base 31, a height adjustment device 32, a cantilever 33, a support member 34, a limit member 38, a top member 391 and a transition member 392. In some embodiments of the present application, the furnace tube loading and unloading auxiliary tool 30 can be applied to the loading and unloading of low-position furnace tubes. In other embodiments of the present application, the furnace tube loading and unloading auxiliary tool 30 can be applied to the loading and unloading of high-position furnace tubes, for example, Figure 2 Of course, there is no limitation on the number of the supporting members 34 in this embodiment. For example, at least two (eg Figure 8 The plurality of support members 34 are arranged on the cantilever 33, and the furnace tube 14 can be ensured to be concentric with the heating furnace 12 by adjusting the support by the plurality of support members 34 (as shown in FIG. Fig.11 shown).

[0063] In some embodiments of the present application, Figure 7 As shown, the base 31 may be composed of a plurality of rods and / or plates. Figure 7 , Figure 8 and Fig. 9 As shown, the height adjustment device 32 is disposed on the base 31 . The cantilever 33 is connected to the height adjustment device 32 .

[0064] Fig.10 for Figure 7 In some embodiments of the present application, for example, Figure 8 , Fig. 9 and Fig.10 As shown, the height adjustment device 32 may include a hollow housing 320, a height adjustment member 322, a bearing 323 and a guide rod 324. The cantilever 33 has a first end 331 and a second end 332 opposite to the first end 331.

[0065] The hollow housing 320 is connected to the base 31. In some embodiments of the present application, the hollow housing 320 may be composed of a plurality of plates 321, and the plates 321 may collectively define an internal space S. The hollow housing 320 may be configured to accommodate the first end 331 of the cantilever 33. For example, the hollow housing 320 may accommodate the first end 331 of the cantilever 33 through the internal space S.

[0066] The height adjustment member 322 may penetrate a portion of the hollow housing 320 (including, for example, the upper and lower plates 321) and the first end 331 of the cantilever 33. The height adjustment member 322 may be configured to adjust the height of the cantilever 33. In some embodiments of the present application, the height adjustment member 322 may be engaged with the hollow housing 320 (for example, the plate 321) through a thread. In some embodiments of the present application, the height adjustment member 322 may be engaged with the first end 331 of the cantilever 33 through a thread, so that by rotating the height adjustment member 322 clockwise or counterclockwise, the height of the cantilever 33 may be increased or decreased. In some embodiments of the present application, the height adjustment member 322 may include, but is not limited to, a screw, a bolt, or a screw.

[0067] The bearing 323 is disposed on one side of the height adjustment member 322 and passes through the first end 331 of the cantilever 33. The guide rod 324 passes through the bearing 323 and is configured to guide the lifting and lowering of the first end 331 of the cantilever 33. Fig.10 As shown, the height adjustment device 32 may include two bearings 323 and two guide rods 324. The two bearings 323 may be respectively disposed on both sides of the height adjustment member 322. The two guide rods 324 may respectively penetrate each bearing 323. Through the configuration of the height adjustment member 322 and the two guide rods 324, three fulcrums may be provided for the lifting and lowering of the first end portion 331 of the cantilever 33, so as to maintain the balance and stability of the first end portion 331 of the cantilever 33 during the lifting and lowering process.

[0068] In some embodiments of the present application, Figure 8 , Fig. 9 and Fig.10 As shown, the support members 34 can be disposed on the cantilever 33 in an opposite manner and spaced apart from each other. In some embodiments of the present application, each support member 34 can include a base 35 , a clamping block 36 and a support ball 37 .

[0069] In some embodiments of the present application, the base 35 may include an upper portion 351 and a lower portion 352. In addition, the base 35 may have an inclined surface 354 and a receiving groove 355. The inclined surface 354 is located at the upper portion 351 of the base 35. The receiving groove 355 is recessed from the inclined surface 354. In some embodiments of the present application, the clamping block 36 may be disposed on both sides of the lower portion 352 of the base 35, so that the base 35 may be connected to the cantilever 33 through the clamping block 36. In some embodiments of the present application, the clamping block 36 may slide along the length direction of the cantilever 33.

[0070] In some embodiments of the present application, the support ball 37 may be disposed on the base 35 and configured to support the furnace tube 14 ( Fig.11In some embodiments of the present application, the support ball 37 may be located at the upper portion 351 of the base 35. The support ball 37 may be disposed in the receiving groove 355, and a portion of the support ball 37 may protrude from the inclined surface 354 to achieve rotation. In some embodiments of the present application, the support ball 37 may be limited in the receiving groove 355 by a hollow pressure plate 356.

[0071] The limiting member 38 may pass through the clamp block 36 and be configured to fix the clamp block 36 on the cantilever 33 so as to limit the clamp block 36 to a specific position of the cantilever 33. In some embodiments of the present application, the clamp block 36 may have a slide groove 362, and the limiting member 38 may pass through the slide groove 362. Through the above configuration, the clamp block 36 can slide with the limiting member 38 as a fulcrum. In some embodiments of the present application, the distance between the support members 34 can be adjusted by sliding the clamp block 36. In some embodiments of the present application, the limiting member 38 may include but is not limited to a bolt or a latch.

[0072] The top abutment 391 may be connected (including, for example, directly or indirectly) to the second end 332 of the cantilever 33. In some embodiments of the present application, the top abutment 391 may be connected to the second end 332 of the cantilever 33 via an adapter 392. In some embodiments of the present application, the top abutment 391 may penetrate the adapter 392, and one end of the top abutment 391 may abut the base 31 to prevent the second end 332 of the cantilever 33 from being suspended in the air while the support member 34 on the cantilever 33 supports the furnace tube 14 ( Fig.11 ), the cantilever 33 is tilted. In some embodiments of the present application, the abutment 391 can be engaged with the adapter 392 through a thread. Therefore, in the process of rotating the height adjustment member 322 to increase or decrease the height of the cantilever 33, the abutment 391 can also be rotated to increase or decrease its own height to ensure that one end of the abutment 391 can maintain contact with the base 31.

[0073] Fig.11 for Figure 7 Schematic diagram of furnace tube loading and unloading using the furnace tube loading and unloading auxiliary tooling. Fig.12 for Figure 8 Regarding the operation of loading the furnace tube 14 (such as a quartz tube) into the heating furnace 12, please refer to Fig.11 and Fig.12 , the description is as follows:

[0074] Step 1: placing the furnace tube 14 (such as a quartz tube) on the supporting member 34 (such as a supporting ball 37) of the furnace tube loading and unloading auxiliary tooling 30;

[0075] Step 2: Adjust the height of the cantilever 33 by the height adjustment device 32 (e.g., rotating the height adjustment member 322) so that the furnace tube 14 (e.g., quartz tube) on the support member 34 (e.g., support ball 37) is aligned with the furnace opening 120 of the heating furnace 12. In some embodiments of the present application, the alignment may include the furnace tube 14 (e.g., quartz tube) being concentric with the heating furnace 12. In one embodiment of the present application, the angle of the furnace tube 14 (e.g., quartz tube) may be manually rotated to avoid collision between the furnace tube 14 (e.g., quartz tube) and the heating furnace 12;

[0076] Step 3: Push the furnace tube 14 (eg, a quartz tube) toward the heating furnace 12 until the tube mouth flange 142 of the furnace tube 14 (eg, a quartz tube) is adjacent to the support member 34;

[0077] Step 4: Loosen or remove the stopper 38 and slide the support member 34 (such as Fig.12 As shown), so that the distance between the support members 34 can allow the nozzle flange 142 of the furnace tube 14 (such as a quartz tube) to pass through; and

[0078] Step 5: Repeat steps 3 to 4 until all furnace tubes 14 (eg, quartz tubes) enter the heating furnace 12 .

[0079] Regarding the operation of removing the furnace tube 14 (such as a quartz tube) from the heating furnace 12, please refer to Fig.11 and Fig.12 , the description is as follows:

[0080] Step 1: Pull out the furnace tube 14 (for example, a quartz tube) until the tube mouth flange 142 of the furnace tube 14 (for example, a quartz tube) passes between the support members 34;

[0081] Step 2: Slide the support member 34 so that the support member 34 (eg, support ball 37 ) abuts against the pulled-out furnace tube 14 (eg, quartz tube);

[0082] Step 3: Lock or re-insert the stopper 38; and

[0083] Step 4: Repeat steps 1 to 3 until the furnace tube 14 (eg, quartz tube) is completely pulled out.

[0084] In some embodiments of the present application, the number of combinations of the height adjustment device 32, the cantilever 33, the support member 34, the limit member 38, the abutment member 391 and the adapter member 392 in the furnace tube loading and unloading auxiliary tooling 30 can be adjusted according to the on-site operation conditions.

[0085] exist Figures 7 to 12In the illustrated embodiment, the furnace tube loading and unloading auxiliary tooling 30 can improve the loading and unloading efficiency of the furnace tube 14 (e.g., quartz tube), and does not require manpower to lift the furnace tube 14 (e.g., quartz tube), effectively ensuring the personal safety of the loading and unloading workers. And by adjusting the height of the cantilever 33 via the height adjustment device 32, the alignment of the furnace tube 14 (e.g., quartz tube) and the heating furnace 12 can be made easier and more accurate, thereby avoiding the damage of the furnace tube 14 (e.g., quartz tube), greatly improving the safety of the furnace tube 14 (e.g., quartz tube). On the other hand, the furnace tube loading and unloading auxiliary tooling 30 provided in the embodiment of the present application has a simple structure, and therefore, is easy to manufacture and has low cost.

[0086] Fig.13 A schematic structural diagram of another furnace tube loading and unloading auxiliary tooling provided in an embodiment of the present application. Fig.14 for Fig.13 Magnified view of area C. Fig.13 and Fig.14 The furnace tube loading and unloading auxiliary tool 30a has and Figure 7 and Figure 8 The furnace tube loading and unloading auxiliary tooling 30 has a similar structure, but the difference is: Fig.13 and Fig.14 The support member 34a is replaced by the support roller 37a Figure 7 and Figure 8 The supporting ball 37 of the supporting member 34. In some embodiments of the present application, as Fig.14 As shown, the support roller 37a can be disposed on the base 35 and configured to support the furnace tube 14 ( Fig.15 In some embodiments of the present application, the support roller 37a may be located at the upper portion 351 of the base 35. The support roller 37a may be disposed (eg, pivoted) in the receiving groove 355a, and a portion of the support roller 37a may protrude from the inclined surface 354 to achieve rotation.

[0087] Fig.15 for Fig.13 Schematic diagram of furnace tube loading and unloading using the furnace tube loading and unloading auxiliary tooling. Fig.15 The operation steps and Fig.11 The operation steps of the furnace tube loading and unloading auxiliary tooling 30 can be substantially the same.

[0088] It should be noted that references to "an embodiment of the present application" or similar terms throughout this specification mean that a particular feature, structure, or characteristic described together with other embodiments is included in at least one embodiment and may not necessarily be present in all embodiments. Therefore, the corresponding appearances of the phrase "an embodiment of the present application" or similar terms throughout this specification do not necessarily refer to the same embodiment. In addition, the particular features, structures, or characteristics of any particular embodiment may be combined with one or more other embodiments in any suitable manner.

[0089] The technical content and technical features of the utility model have been disclosed as above, but those skilled in the art may still make various substitutions and modifications based on the teachings and disclosures of the utility model without departing from the spirit of the utility model. Therefore, the protection scope of the utility model should not be limited to the content disclosed in the embodiments, but should include various substitutions and modifications that do not depart from the utility model and are covered by the claims of this patent application.

Claims

1. A heat treatment device, characterized in that: include: A main body, comprising a heating furnace and a moving device, wherein the heating furnace is configured to accommodate a furnace tube, and the moving device is arranged outside a furnace opening of the heating furnace; as well as A furnace tube loading and unloading auxiliary tooling is configured to load and unload the furnace tube, and the furnace tube loading and unloading auxiliary tooling includes: a base, which is connected to the moving device of the main body; at least two guide rails disposed on the base and arranged side by side; and A plurality of support members are respectively arranged on each of the guide rails in a relative manner.

2. The heat treatment equipment according to claim 1, characterized in that Each of the supporting members comprises: A base connected to each of the guide rails via a pulley; and A supporting roller or a supporting ball is disposed on the base and configured to support the furnace tube.

3. The heat treatment equipment according to claim 2, characterized in that The base has an inclined surface and a receiving groove recessed from the inclined surface, the inclined surface is located at the upper part of the base, the supporting roller or the supporting ball is arranged in the receiving groove, and a part of the supporting roller or a part of the supporting ball protrudes from the inclined surface.

4. The heat treatment equipment according to claim 2, characterized in that The base has a top surface, a bottom surface and a lower extension portion, the bottom surface is opposite to the top surface, the lower extension portion extends downward from the bottom surface, the pulley is connected to the lower extension portion, each guide rail has a guide groove, and the pulley is arranged in the guide groove.

5. The heat treatment equipment according to claim 2, characterized in that: The axial direction of the supporting roller is parallel or perpendicular to the moving direction of the supporting member.

6. A furnace tube loading and unloading auxiliary tooling, characterized in that: include: Base; At least two guide rails are disposed on the base and arranged side by side; and A plurality of support members are respectively arranged on each of the guide rails in a relative manner.

7. The furnace tube loading and unloading auxiliary tooling according to claim 6, characterized in that: Each of the supporting members comprises: A base connected to each of the guide rails via a pulley; and A supporting roller or supporting ball is disposed on the base and configured to support the furnace tube.

8. The furnace tube loading and unloading auxiliary tooling according to claim 7, characterized in that: The base has an inclined surface and a receiving groove recessed from the inclined surface, the inclined surface is located at the upper part of the base, the supporting roller or the supporting ball is arranged in the receiving groove, and a part of the supporting roller or a part of the supporting ball protrudes from the inclined surface.

9. The furnace tube loading and unloading auxiliary tooling according to claim 7, characterized in that: The base has a top surface, a bottom surface and a lower extension portion, the bottom surface is opposite to the top surface, the lower extension portion extends downward from the bottom surface, the pulley is connected to the lower extension portion, each guide rail has a guide groove, and the pulley is arranged in the guide groove.

10. The furnace tube loading and unloading auxiliary tooling according to claim 7, characterized in that: The axial direction of the supporting roller is parallel or perpendicular to the moving direction of the supporting member.

11. A furnace tube loading and unloading auxiliary tooling, characterized in that: include: Base; A height adjustment device, which is arranged on the base; a cantilever connected to the height adjustment device; and A plurality of support members are disposed on the cantilever in an opposite manner and are spaced apart from each other.

12. The furnace tube loading and unloading auxiliary tooling according to claim 11, characterized in that: The height adjustment device comprises: a hollow housing connected to the base and configured to accommodate the first end of the cantilever; and A height adjustment member passes through a portion of the hollow housing and the first end of the cantilever and is configured to adjust the height of the cantilever.

13. The furnace tube loading and unloading auxiliary tooling according to claim 12, characterized in that: The height adjusting member is meshed with the hollow housing seat and the first end of the cantilever through threads, and the height adjusting member includes a threaded rod, a bolt or a screw.

14. The furnace tube loading and unloading auxiliary tooling according to claim 12, characterized in that: The height adjustment device further comprises: a bearing, which is disposed on one side of the height adjusting member and passes through the first end portion of the cantilever; and A guide rod passes through the bearing and is configured to guide the lifting and lowering of the first end portion of the cantilever.

15. The furnace tube loading and unloading auxiliary tooling according to claim 12, characterized in that: Further including: A push-button member is connected to the second end of the cantilever, and one end of the push-button member abuts against the base.

16. The furnace tube loading and unloading auxiliary tooling according to claim 15, characterized in that: The abutting member is connected to the second end of the cantilever through an adapter, the abutting member passes through the adapter, and the abutting member is meshed with the adapter through threads.

17. The furnace tube loading and unloading auxiliary tooling according to claim 11, characterized in that: Each of the supporting members comprises: a base connected to the cantilever via a clamp; and Support balls or support rollers, the support balls or the support rollers are arranged on the base and configured to support the furnace tube.

18. The furnace tube loading and unloading auxiliary tooling according to claim 17, characterized in that: The base includes an upper part and a lower part, the support ball or the support roller is located in the upper part, the clamping block is arranged on both sides of the lower part, the base has an inclined surface and a receiving groove recessed from the inclined surface, the support ball or the support roller is arranged in the receiving groove, and a part of the support ball or a part of the support roller protrudes from the inclined surface.

19. The furnace tube loading and unloading auxiliary tooling according to claim 17, characterized in that: Further including: a limiting member, which passes through the clamping block and is configured to fix the clamping block to the cantilever; The clamping block has a sliding groove, and the limiting member passes through the sliding groove.

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