Vacuum cavity and vacuum coating machine
By setting up multiple air outlets and negative pressure air screens on the chamber structure of the vacuum coating equipment, the complexity and cost of isolation function areas in the existing equipment are solved, and the coating effect is achieved more efficient and good quality.
Patent Information
- Application Number
- CN202421262048.5
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2024-06-04
- Publication Date
- 2025-03-07
- Estimated Expiration
- 2034-06-04
AI Technical Summary
In existing vacuum coating equipment, in order to isolate different functional areas, complex isolation devices need to be installed inside the rotary frame, resulting in high structural complexity, high cost and easy to affect the coating quality.
By distributing multiple air pumps on the chamber structure, connecting a vacuum pump, controlling the air pump rate to generate a negative pressure air screen, blocking the diffusion of particles and gas molecules, simplifying the chamber structure and reducing equipment costs.
The complexity and equipment cost of the chamber structure are reduced, while the coating quality is improved, and effective isolation of particles and gas molecules is achieved.
Smart Images
Figure CN222574777U_ABST
Abstract
Description
Technical Field
[0001] The present application relates to the field of vacuum coating technology, and in particular to a vacuum chamber and a vacuum coating machine. Background Art
[0002] In vacuum coating related equipment, multiple chambers are generally set up to achieve different functions and reduce mutual interference. If multiple functions are to be achieved in the same chamber, an isolation device is generally set up to minimize mutual interference and pollution. For example, in a vacuum coating machine with post-processing function, coating and oxidation or nitridation post-processing need to be performed in the same chamber in sequence. For vacuum chambers with two areas in the chamber structure, in some cases a transparent turntable is used as the workpiece holder. For the turntable, particles and gas molecules can penetrate the turntable and diffuse into other areas.
[0003] In order to isolate two different areas, an existing solution is to install an isolation device inside the turntable to separate the chamber structure into a coating area and a post-processing area. However, installing an isolation device inside the turntable makes the internal structure of the turntable more complicated, the equipment cost is high, and it is easy to affect the coating quality. Utility Model Content
[0004] The purpose of this application is to solve the above-mentioned technical defects and provide a vacuum chamber, a vacuum coating machine and a vacuum coating method to reduce the structural complexity of the vacuum chamber.
[0005] A vacuum chamber, characterized in that it comprises: a chamber structure, and a plurality of exhaust ports arranged on the chamber structure;
[0006] The air extraction ports are distributed around a vertical section plane on the chamber structure;
[0007] The vacuum port is connected to a vacuum pump, and the chamber structure is evacuated by the vacuum pump;
[0008] Each exhaust port is controlled to evacuate at a set exhaust rate, generating a negative pressure wind screen within a set air pressure range on the vertical section plane; wherein the negative pressure wind screen blocks particles and gas molecules from diffusing inside the chamber structure.
[0009] In one embodiment, the chamber structure is built with a rotating rack for placing the workpiece to be coated;
[0010] The chamber structure is provided with a coating area and a post-processing area;
[0011] The exhaust ports are distributed around the vertical section plane at the boundary between the coating area and the post-processing area on the chamber structure.
[0012] In one embodiment, when the particles and gas molecules generated in the post-processing area reach the negative pressure wind screen, they are blocked by the negative pressure wind screen and extracted through the exhaust port.
[0013] In one embodiment, a protrusion of a set shape is provided between each air suction port to adjust the air flow direction and flow rate.
[0014] In one embodiment, the air suction port is provided with a flap valve for adjusting the air suction rate by controlling the opening size.
[0015] In one embodiment, a guide vane array is provided at the inlet of the air extraction port to adjust the air flow direction and air extraction rate entering the air extraction port.
[0016] In one embodiment, a plurality of the suction ports are connected to one vacuum pump.
[0017] In one embodiment, a plurality of vacuum gauges are distributed along the vertical section plane inside the chamber structure to detect the air pressure parameters at the respective positions.
[0018] In one embodiment, the vacuum pump, guide plate array, flap valve and vacuum gauge are connected to an industrial computer respectively.
[0019] A vacuum coating machine, comprising the vacuum chamber, the coating device, the ion source and the vacuum pump;
[0020] Wherein, the coating device is arranged in a coating area of the vacuum chamber, the ion source is arranged in a post-processing area of the vacuum chamber, and the vacuum pump is connected to at least one exhaust port.
[0021] The technical solution of the above embodiment is based on the distribution of multiple exhaust ports around a vertical section plane on the chamber structure, and vacuuming is performed at a set exhaust rate under control to generate a negative pressure wind screen on the vertical section plane to block particles and gas molecules from diffusing inside the chamber structure. This technical solution reduces the complexity of the chamber structure, reduces equipment costs, and also improves the coating quality.
[0022] Additional aspects and advantages of the present application will be partially given in the following description, which will become apparent from the following description, or will be understood through the practice of the present application. BRIEF DESCRIPTION OF THE DRAWINGS
[0023] The above and / or additional aspects and advantages of the present application will become apparent and easily understood from the following description of the embodiments in conjunction with the accompanying drawings, in which:
[0024] Figure 1 is a schematic structural diagram of a vacuum chamber of an embodiment;
[0025] Figure 2is a schematic diagram of the distribution of air extraction ports in an embodiment;
[0026] Figure 3 is a schematic diagram of the structure of a vacuum chamber with a coating area and a post-processing area;
[0027] Figure 4 is a schematic diagram of a protrusion of an example;
[0028] Figure 5 is a schematic diagram of an example of an air extraction port structure;
[0029] Figure 6 is a schematic diagram of a structure of an example vacuum pump connected to an exhaust port;
[0030] Figure 7 This is an example of the electrical structure diagram of a vacuum coating machine. DETAILED DESCRIPTION
[0031] The embodiments of the present application are described in detail below, and examples of the embodiments are shown in the accompanying drawings, wherein the same or similar reference numerals throughout represent the same or similar elements or elements having the same or similar functions. The embodiments described below with reference to the accompanying drawings are exemplary and are only used to explain the present application, and cannot be interpreted as limiting the present application.
[0032] Those skilled in the art will appreciate that, unless otherwise stated, the singular forms "a", "an", "said" and "the" used herein may also include plural forms. It should be further understood that the term "comprising" used in the specification of the present application refers to the presence of the features, integers, steps, operations, but does not exclude the presence or addition of one or more other features, integers, steps, operations.
[0033] It will be understood by those skilled in the art that, unless otherwise defined, all terms (including technical and scientific terms) used herein have the same meaning as those generally understood by those skilled in the art to which this application belongs. It should also be understood that terms such as those defined in general dictionaries should be understood to have meanings consistent with those in the context of the prior art, and will not be interpreted with idealized or overly formal meanings unless specifically defined as here.
[0034] Refer to the following combination Figures 1 to 7 The embodiments of the vacuum chamber and the vacuum coating machine of the present application are described in detail.
[0035] like Figure 1 As shown, Figure 1The figure is a schematic diagram of the structure of a vacuum chamber of an embodiment, which is a cross-sectional view of the vacuum chamber 01 from a top view angle. The vacuum chamber 01 provided in the present application is used in a vacuum coating machine 100, and its structure mainly includes a chamber structure 10 and a plurality of exhaust ports 11 arranged on the chamber structure 10; wherein the exhaust ports 11 are distributed around a vertical section plane on the chamber structure 10; the exhaust ports 11 are connected to a vacuum pump 02, and the chamber structure 10 is evacuated by the vacuum pump 02; each exhaust port 11 is evacuated at a set exhaust rate under control, and a negative pressure wind screen 12 with a set air pressure range is generated on the vertical section plane, as shown in the shaded area in the figure, the negative pressure wind screen 12 can form a barrier effect, thereby preventing particles and gas molecules from diffusing inside the chamber structure 10; as shown in the shaded area in the figure, Figure 1 In the figure, the dotted arrows indicate the movement paths of particles and gas molecules, and the negative pressure wind screen 12 blocks the diffusion movement of particles and gas molecules in the chamber structure 10.
[0036] refer to Figure 2 As shown, Figure 2 It is a schematic diagram of the distribution of exhaust ports in an embodiment, which is a cross-sectional view of the vacuum chamber 01 at a front view angle, as shown in the figure, exhaust ports 1 to k; as shown in the figure, on the vertical section plane, a plurality of k exhaust ports 11 are distributed along the outside of the chamber structure 10, distributed on both sides of the chamber structure 10 in the vertical direction and at the top and bottom positions.
[0037] Exemplarily, each of the air extraction ports 11 can be connected to a vacuum pump 02, and each of the vacuum pumps 02 evacuates the chamber structure 10 at different air extraction rates through the air extraction ports 11 under the control of the industrial computer 03, thereby forming a negative pressure zone on the vertical section plane, thereby forming a negative pressure wind screen 12 on the vertical section plane within a certain range on both sides of the dividing line. In actual situations, the negative pressure wind screen 12 has the characteristic of decreasing air pressure, that is, the air pressure on the dividing line is the lowest, and the air pressure gradually increases in the direction of both sides. By changing the air extraction rate to control the air pressure, the negative pressure zone is formed. The negative pressure wind screen 12 is a low-pressure area composed of a pressure gradient decreasing from both sides to the middle, which can form a physical barrier effect on particles and gas molecules. Usually, the negative pressure wind screen 12 is distributed from the center of the chamber structure 10 to the surrounding exhaust ports 11. The air pressure is highest at the center, and the closer to the exhaust port 11, the greater the air pressure. By controlling the exhaust rate of each exhaust port 11, the negative pressure at the center is controlled to reach the set air pressure range, so that the air pressure at the center can block the passage of particles and gas molecules.
[0038] like Figure 3 As shown, Figure 3The figure is a schematic diagram of the structure of a vacuum chamber with a coating area and a post-processing area. The chamber structure 10 shown in the figure is provided with a coating area and a post-processing area, and the dotted line in the figure is the dividing line. In order to achieve a physical barrier effect between the coating area and the post-processing area, the technical solution of this embodiment is provided with a plurality of exhaust ports 11 distributed around the vertical cross-sectional planes of the coating area and the post-processing area of the chamber structure 10, forming a negative pressure wind screen 12 as shown in the shaded area in the figure. During coating, particles and gas molecules penetrate the rotating frame 16 from the post-processing area and diffuse into the coating area, wherein the particles and gas molecules generated in the post-processing area move from the post-processing area toward the coating area and reach the position of the negative pressure wind screen 12. Under the action of negative pressure, the particles and gas molecules are extracted from the exhaust port 11 before passing through the negative pressure wind screen 12. Since the negative pressure needs to be within the set air pressure range, if the exhaust rate of the exhaust port 11 is too high and the negative pressure is too low, it may affect the normal gas molecule content in the coating area and the post-processing area, and affect the processing function of the coating area and the post-processing area. Accordingly, by accurately controlling the exhaust rate of the exhaust port 11, the state of blocking particles and gas molecules from passing through the negative pressure wind screen 12 but not affecting the normal operation of the coating area and the post-processing area is achieved.
[0039] Since the purpose of blocking particles and gas molecules from diffusing to the coating area is to control the particles and gas molecules passing through the negative pressure wind screen 12 to be lower than a certain proportion value to prevent the particles and gas molecules from affecting the coating area, the exhaust rate of each exhaust port 11 can be accurately controlled, thereby achieving the purpose of controlling the proportion of particles and gas molecules generated in the post-processing area diffusing to the coating area. In the structural design of the exhaust port 11, in this embodiment, the exhaust port 11 is configured to extend toward the rotating frame 16, and in addition to reserving a certain space, it is closely attached to the outside of the rotating frame 16 to enhance the barrier effect of the negative pressure wind screen 12.
[0040] For example, the vacuum chamber 01 in the above example reduces the structural complexity of the chamber structure 10 and the equipment cost while achieving the processing effect of coating and oxidizing (nitriding) at the same time.
[0041] In one embodiment, Figure 4 As shown, Figure 4 It is a schematic diagram of an example of a protrusion. In order to form a stable negative pressure wind screen 12, the vacuum chamber 01 is further provided with a protrusion 13 between each exhaust port 11. The protrusion 13 is designed to be in a peak-shaped shape, and its bottom is connected to the top of the horizontal baffle of two adjacent exhaust ports 11. The top of the protrusion 13 is flush with the top of the vertical baffle of the exhaust port 11 and is close to the outside of the rotating frame 16. The function of the protrusion 13 is to control the airflow direction and flow rate between the two adjacent exhaust ports 11, so that the exhaust rate of the exhaust port 11 can be more accurately controlled, so that the negative pressure wind screen 12 remains stable.
[0042] As in the scheme of the above-mentioned embodiment, the gas flow rate and the exhaust rate entering the two adjacent exhaust ports 11 can be adjusted through the protrusion 13 of a specific shape. The dotted arrow in the figure is the airflow direction, thereby adjusting the air pressure distribution of the negative pressure wind screen 12 in the vertical section plane direction, so that the negative pressure wind screen 12 can maintain a stable air pressure distribution state, avoid the formation of turbulence in adjacent parts, and guide the airflow in front of it to the exhaust ports 11 on both sides, thereby stabilizing the air pressure distribution of the negative pressure wind screen 12. At the same time, the particles and gas molecules generated in the post-processing area can also more smoothly enter the interior of the exhaust port 11 for extraction.
[0043] In one embodiment, Figure 5 As shown, Figure 5 It is a schematic diagram of the structure of the air suction port 11, which is a cross-sectional view from a top view. Each air suction port 11 also has a built-in flap valve 15, which is driven by a first drive motor. The valve opening of the flap valve 15 is controlled by the first drive motor to adjust the air suction flow of the air suction port 11, thereby controlling the air suction rate of the air suction port 11. Exemplarily, the first drive motor can be controlled by the industrial computer 03 to control the valve opening to adjust the air suction rate, thereby accurately controlling the air suction rate of the air suction port 11, adjusting the state of the negative pressure wind screen 12 and maintaining stability.
[0044] In one embodiment, in order to dynamically control the air extraction of each air extraction port 11, the air pressure on both sides of the negative pressure wind screen 12 is adjusted to form a stable air pressure distribution, such as Figure 5 As shown, a plurality of guide vanes 14 can be further provided at the entrance of the vacuum chamber 01 at the air outlet 11, and the guide vanes 14 are used to control the direction of the air flow entering the air outlet 11, and the guide vanes 14 can be driven by a second drive motor to adjust the deflection angle, thereby controlling the air flow direction and the air extraction rate; specifically, a plurality of guide vanes 14 are provided at the entrance of the air outlet 11, and each guide vane 14 can be driven by an independent second drive motor. For example, each second drive motor can be controlled by the industrial computer 03 so that the air flow entering the air outlet 11 from both sides can be precisely controlled, thereby controlling the negative pressure wind screen 12 to form a relatively stable air pressure gradient from both sides to the center, thereby keeping the negative pressure wind screen 12 in a continuous stable state.
[0045] Based on the technical solution of the above embodiment, Figure 6 As shown, Figure 6It is a schematic diagram of the structure of an example vacuum pump connected to an exhaust port. A technical solution of connecting multiple exhaust ports 11 to a vacuum pump 02 can be adopted; the three exhaust ports 11 on both sides can be connected to a vacuum pump 02 respectively, and the two upper and lower exhaust ports 11 can be connected to a vacuum pump 02 respectively; at this time, the exhaust rate can be finely controlled by controlling the angle of the guide plate 14 in the exhaust port 11 and the opening size of the flap valve 15.
[0046] Exemplarily, when controlling the exhaust rate, the technical solution of the present application can roughly adjust the overall exhaust rate by controlling the power of the vacuum pump 02, which can be defined as a first-level adjustment control as a basic control, and then fine-tune the exhaust rate of the exhaust port 11 by adjusting the opening size of the flap valve 15, which can be defined as a second-level adjustment control. The exhaust rate of the exhaust port 11 is finely adjusted in combination with the deflection angle of the guide plate 14, which can be defined as a third-level adjustment control. This can achieve precise control of the negative pressure wind screen 12 to ensure that stability can be maintained.
[0047] In one embodiment, in order to achieve precise control of the negative pressure wind screen 12, as Figure 6 As shown, a plurality of vacuum gauges 17 are distributed along the vertical section plane inside the chamber structure 10, and n vacuum gauges 17 are shown in the figure, where n≥2. Each vacuum gauge 17 detects the air pressure parameters at its location, thereby calculating the exhaust power of the vacuum pump 02 based on the air pressure parameters for precise control; illustratively, the air pressure parameters detected by each vacuum gauge 17 are sent to the industrial computer 03, and the industrial computer 03 calculates the exhaust power of the vacuum pump 02 based on the air pressure parameters and precisely controls each vacuum pump 02.
[0048] An embodiment of the vacuum coating machine is described below.
[0049] The structure of the vacuum coating machine 100 of this embodiment can be referred to Figures 1 to 6 As shown, it includes a vacuum chamber 01, a coating device 04, an ion source 05 and a vacuum pump 02, etc.; wherein the coating device 04 is arranged in the coating area of the vacuum chamber 01, the ion source 05 is arranged in the post-processing area of the vacuum chamber 01, and the vacuum pump 02 is connected to at least one exhaust port 11; in combination with the technical solutions of the previous embodiments, reference Figure 7 As shown, Figure 7 This is an example of the electrical structure diagram of a vacuum coating machine. Each vacuum pump 02, ion source 05, turntable 16, guide plate 14 and flap valve 15 installed in the exhaust port 11, vacuum gauge 17, etc. are connected to the industrial computer 03. The exhaust rate of each exhaust port 11 is controlled by the industrial computer 03, so as to accurately maintain the stable state of the negative pressure wind screen 12 and ensure the barrier effect on particles and gas molecules.
[0050] The vacuum coating machine 100 of the above embodiment can utilize two independent working areas formed in a single cavity without improving the internal structure of the turntable 16. On the basis of achieving the processing effect of coating and oxidation (nitriding), it reduces the structural complexity, reduces the cost of the entire equipment, and also improves the coating efficiency and coating effect.
[0051] The above are only some implementation methods of the present application. It should be pointed out that for ordinary technicians in this technical field, several improvements and modifications can be made without departing from the principles of the present application. These improvements and modifications should also be regarded as the scope of protection of the present application.
Claims
1. A vacuum chamber (01), characterized in that: include: A chamber structure (10), and a plurality of air extraction ports (11) disposed on the chamber structure (10); The air extraction ports (11) are distributed around a vertical section plane on the chamber structure (10); The vacuum port (11) is connected to a vacuum pump (02), and the chamber structure (10) is evacuated by the vacuum pump (02); Each suction port (11) is controlled to evacuate at a set suction rate, thereby generating a negative pressure wind screen (12) within a set air pressure range on the vertical section plane; wherein the negative pressure wind screen (12) blocks particles and gas molecules from diffusing inside the chamber structure (10).
2. The vacuum chamber (01) according to claim 1, characterized in that: The chamber structure (10) is internally provided with a rotating rack (16) for placing a workpiece to be coated; The chamber structure (10) is provided with a coating area and a post-processing area; The gas extraction ports (11) are distributed around the vertical section plane at the boundary between the coating area and the post-processing area on the chamber structure (10).
3. The vacuum chamber (01) according to claim 2, characterized in that: When the particles and gas molecules generated in the post-processing area reach the negative pressure wind screen (12), they are blocked by the negative pressure wind screen (12) and extracted through the exhaust port (11).
4. The vacuum chamber (01) according to claim 3, characterized in that: A protrusion (13) of a set shape is also provided between each air suction port (11) for adjusting the air flow direction and flow speed.
5. The vacuum chamber (01) according to claim 4, characterized in that: The air suction port (11) is internally provided with a flap valve (15) for adjusting the air suction rate by controlling the opening size.
6. The vacuum chamber (01) according to claim 5, characterized in that: An array of guide plates (14) is provided at the entrance of the air suction port (11) for adjusting the direction of air flow entering the air suction port (11) and the air suction rate.
7. The vacuum chamber (01) according to claim 6, characterized in that: The plurality of suction ports (11) are connected to a vacuum pump (02).
8. The vacuum chamber (01) according to claim 7, characterized in that: A plurality of vacuum gauges (17) are distributed along a vertical section plane inside the chamber structure (10) and are used to detect air pressure parameters at the location.
9. The vacuum chamber (01) according to claim 8, characterized in that: The vacuum pump (02), the guide plate (14) array, the flap valve (15) and the vacuum gauge (17) are respectively connected to the industrial computer (03).
10. A vacuum coating machine (100), characterized in that: Comprising the vacuum chamber (01) according to any one of claims 1 to 9, a coating device (04), an ion source (05) and a vacuum pump (02); The coating device (04) is arranged in a coating area of the vacuum chamber (01), the ion source (05) is arranged in a post-processing area of the vacuum chamber (01), and the vacuum pump (02) is connected to at least one exhaust port (11).