In-situ synchrotron radiation device for testing core element of thin film capacitor

Abstract

The utility model discloses an in-situ synchrotron radiation device for testing a core element of a thin film capacitor, and belongs to in-situ synchrotron radiation testing equipment. In order to achieve in-situ synchrotron radiation testing of a core element of the thin-film capacitor, the core element is installed in a containing cavity of a shell, a temperature control mechanism is installed on the shell and adjusts the temperature of the containing cavity of the shell, and a high-voltage polarization power source is connected with the two ends of the core element to apply voltage. The pressure regulating mechanism comprises two pressure regulating plates and a pressure regulating driving assembly, the two pressure regulating plates are respectively mounted on two sides of the core element, and the pressure regulating driving assembly is connected with the two pressure regulating plates and regulates the distance between the two pressure regulating plates; the synchrotron radiation light source and the signal receiving plate are respectively arranged at two sides of the shell, two side walls of the shell are respectively provided with a light hole I, each pressure regulating plate is provided with a light hole II, the synchrotron radiation light source emits x-rays, the x-rays irradiate the core element, and then the x-rays are received by the signal receiving plate. The device is used for realizing the in-situ synchrotron radiation test of the core element.

Description

TECHNICAL FIELD

[0001] The utility model belongs to in situ synchrotron radiation testing equipment, especially relate to a kind of in situ synchrotron radiation device for testing film capacitor core element. BACKGROUND

[0002] The core element in film capacitor is obtained by polymer film dielectric through surface evaporation electrode, winding, spraying gold, heat setting and other processing, and the microstructure of polymer film can be measured by ordinary characterization means, but the polymer film is used in the form of winding on metal plate when applied to film capacitor, and there is stress between each layer of film during winding process, and the core element is under different temperature and voltage during use, and stress, temperature and voltage all affect the microstructure of polymer film in core element, so ordinary characterization means cannot accurately measure the microstructure of core element applied to film capacitor. SUMMARY

[0003] Therefore, the utility model provides a kind of in situ synchrotron radiation device for testing film capacitor core element, can simulate the use condition of core element in film capacitor, to measure the microstructure of core element.

[0004] The utility model discloses a technical scheme for solving the above technical problems is as follows:

[0005] An in situ synchrotron radiation device for testing film capacitor core element, comprising a shell, a voltage regulating mechanism, a temperature control mechanism, a high-voltage polarization power supply, a synchrotron radiation light source and a signal receiving plate; the core element is installed in the cavity of the shell, the temperature control mechanism is installed on the shell and adjusts the temperature of the cavity of the shell, and the high-voltage polarization power supply is connected to both ends of the core element to apply voltage; the voltage regulating mechanism comprises two voltage regulating plates and a voltage regulating driving assembly, the two voltage regulating plates are movably installed on both sides of the core element, and the voltage regulating driving assembly is connected to the two voltage regulating plates and adjusts the distance between the two voltage regulating plates to adjust the pressure on the core element by adjusting the distance between the two voltage regulating plates; the synchrotron radiation light source and the signal receiving plate are arranged on both sides of the shell, respectively, and the shell has a light transmission hole one on each side wall, each voltage regulating plate has a light transmission hole two, the synchrotron radiation light source emits synchrotron radiation incident x-rays, and the radiation light successively passes through the light transmission hole one on one side wall of the shell, the light transmission hole two on one of the two voltage regulating plates, the core element, the light transmission hole two on the other voltage regulating plate and the light transmission hole one on the other side wall of the shell, and then is received by the signal receiving plate.

[0006] Preferably, the voltage regulating driving assembly comprises a voltage regulating knob, a bidirectional screw rod, two screw rod nuts and two guide rods, one end of the bidirectional screw rod is transversely inserted into the accommodating cavity of the shell, the other end is outside the shell and connected with the voltage regulating knob, the two screw rod nuts are screwed on the two threaded sections of the bidirectional screw rod respectively and connected with the two voltage regulating plates respectively, and each voltage regulating plate is slidably connected with the two guide rods.

[0007] Preferably, the temperature control mechanism comprises a heating base plate and a thermocouple, the heating base plate is installed in the accommodating cavity of the shell, and the thermocouple is connected with the core element and used for measuring the temperature of the core element.

[0008] Preferably, the two-degree-of-freedom adjusting base is further comprised, and the shell is installed on the two-degree-of-freedom adjusting base, so that the light transmission holes on the two sides of the shell can be aligned with the light emitting points of the synchrotron radiation light source.

[0009] Preferably, the two-degree-of-freedom adjusting base comprises two screw rod nut adjusting bases, each screw rod nut adjusting base comprises a position adjusting knob, a support, a screw rod, two support guide rails, an adjusting nut and a support plate, one end of the screw rod is inserted into the support, the other end of the screw rod is connected with the position adjusting knob, the two support guide rails are arranged in the support and located at the two sides of the screw rod, the adjusting nut is screwed on the screw rod and connected with the support plate, and the support plate is connected with the support guide rails and can move along the length direction of the support guide rails; the two screw rod nut adjusting bases are vertically arranged in an upper and lower mode, the screw rod nut adjusting base at the top is installed on the support plate of the screw rod nut adjusting base at the bottom, and the shell is installed on the support plate of the screw rod nut adjusting base at the top.

[0010] Preferably, the signal receiving plate is a CCD camera.

[0011] Compared with the prior art, the utility model has the beneficial effects that:

[0012] The utility model utilizes the shell, the voltage regulating mechanism, the temperature control mechanism and the high-voltage polarization power supply to simulate the use working condition of the core element in the film capacitor, then utilizes the high-energy synchrotron radiation incident x rays emitted by the synchrotron radiation light source to irradiate the polymer film, and then the signal receiving plate measures the microstructure of the polymer film of the core element through the received synchrotron radiation incident x rays. BRIEF DESCRIPTION OF DRAWINGS

[0013] The drawings are part of the application and are used to provide further understanding of the utility model.

[0014] Figure 1 It is a structural schematic view of the in-situ synchrotron radiation device for testing the thin film capacitor core element.

[0015] Figure 2 It is a structural schematic view of the open hole metal plate.

[0016] Figure 3 It is a structural schematic view of the core element.

[0017] Figure 4 It is an assembly schematic view of the voltage regulating knob, bidirectional screw rod and two screw rod nuts in the voltage regulating driving assembly.

[0018] Figure 5 It is a structural schematic view of the screw rod nut adjusting base.

[0019] Figure 6 It is a schematic view of the temperature control mechanism installed in the cavity of the shell.

[0020] Mark explanation: 1-shell; 1-1-translucent hole one; 2-voltage regulating mechanism; 2-1-voltage regulating plate; 2-1-1-translucent hole two; 2-2-voltage regulating driving assembly; 2-2-1-voltage regulating knob; 2-2-2-bidirectional screw rod; 2-2-3-screw rod nut; 2-2-4-guide rod; 3-temperature control mechanism; 3-1-heating base plate; 3-2-temperature control power supply; 3-3-thermocouple; 4-high voltage polarization power supply; 5-synchrotron radiation light source; 6-signal receiving plate; 7-core element; 7-1-open hole metal plate; 7-2-polymer film; 8-two degree of freedom adjusting base; 8-1-adjusting knob; 8-2-support; 8-3-screw rod; 8-4-supporting guide rail; 8-5-adjusting nut; 8-6-supporting plate. DETAILED DESCRIPTION

[0021] The application will be described in detail below in combination with specific embodiments.

[0022] Reference Figure 1 The in-situ synchrotron radiation device for testing the thin film capacitor core element of the embodiment includes a shell 1, a voltage regulating mechanism 2, a temperature control mechanism 3, a high voltage polarization power supply 4, a synchrotron radiation light source 5 and a signal receiving plate 6. Figure 2 And Figure 3As shown, the core element 7 of the film capacitor consists of a perforated metal plate 7-1 and a polymer film 7-2 wound around the perforated metal plate 7-1. The core element 7 is installed inside the cavity of the outer casing 1, wherein the upper end of the perforated metal plate 7-1 is installed on the top wall of the outer casing 1, the lower end of the perforated metal plate 7-1 is installed on the bottom of the outer casing 1, and the openings of the perforated metal plate 7-1 face the two side walls of the outer casing 1. The temperature control mechanism 3 is installed in the outer casing 1 and adjusts the temperature of the inner cavity of the outer casing 1 to simulate the core. The operating temperature of element 7 in the film capacitor; the high-voltage polarization power supply 4 is connected to both ends of the core element 7 to apply voltage; the voltage regulating mechanism 2 includes two voltage regulating plates 2-1 and a voltage regulating drive assembly 2-2. The two voltage regulating plates 2-1 are movably mounted on both sides of the core element 7, and the voltage regulating drive assembly 2-2 connects the two voltage regulating plates 2-1 and adjusts the distance between the two voltage regulating plates 2-1, so as to adjust the pressure on the core element 7 by adjusting the distance between the two voltage regulating plates 2-1. Since the perforated metal plate 7-1 is rigid... Therefore, the pressure applied by the two voltage regulating plates 2-1 is entirely applied to the polymer film 7-2, simulating the pressure experienced by the polymer film 7-2 in the film capacitor; while the synchrotron radiation source 5 and the signal receiving board 6 are respectively located on the left and right sides of the outer casing 1. Light-transmitting holes 1-1 are opened on the left and right side walls of the outer casing 1, and each voltage regulating plate 2-1 has a light-transmitting hole 2-1-1. Both light-transmitting holes 1-1 and 2-1-1 are on the same horizontal plane. The synchrotron radiation source 5... After high-energy synchrotron radiation incident X-rays are emitted, the radiation light passes sequentially through the light-transmitting hole 1-1 on one side wall of the outer shell 1, the light-transmitting hole 2-1-1 on one voltage regulating plate 2-1, the polymer film 7-2, the opening on the perforated metal plate 7-1, the light-transmitting hole 2-1-1 on another voltage regulating plate 2-1, and the light-transmitting hole 1-1 on the other side wall of the outer shell 1, and then irradiates the signal receiving board 6, which receives the radiation. The signal receiving board 6 can be a CCD camera.

[0023] This embodiment uses the outer casing 1, voltage regulating mechanism 2, temperature control mechanism 3, and high-voltage polarized power supply 4 to simulate the operating conditions of the core element 7 in a thin-film capacitor. Then, high-energy synchrotron radiation incident X-rays emitted by the synchrotron radiation source 5 are used to irradiate the polymer thin film 7-2. The signal receiving board 6 then measures the microstructure of the polymer thin film of the core element using the received synchrotron radiation incident X-rays. Compared with ordinary characterization techniques, the synchrotron radiation-linked characterization technique of this embodiment can provide a higher intensity light source and a wider frequency domain, enabling the characterization of multilayer polymer thin films under different stresses, temperatures, and voltages. In other words, this characterization technique can perform in-situ characterization tests on multi-scale microstructural changes in the polymer thin film of the core element, including grain boundary structure, chemical composition information, and electronic local structure.

[0024] like Figure 1 and Figure 4As shown in the figure, the voltage regulating driving assembly 2-2 of the embodiment comprises a voltage regulating knob 2-2-1, a bidirectional screw rod 2-2-2, two screw rod nuts 2-2-3 and two guide rods 2-2-4. One end of the bidirectional screw rod 2-2-2 is inserted into the cavity of the shell 1 horizontally, and the other end is outside the shell 1 and connected with the voltage regulating knob 2-2-1. The two guide rods 2-2-4 are arranged on the upper and lower sides of the bidirectional screw rod 2-2-2 respectively and connected with the left and right side walls of the shell 1. The two screw rod nuts 2-2-3 are screwed on the two threaded sections of the bidirectional screw rod 2-2-2 respectively (the screw directions of the two threaded sections are opposite) and connected with the two voltage regulating plates 2-1 respectively. Each voltage regulating plate 2-1 is in sliding connection with the two guide rods 2-2-4. When it is necessary to adjust the pressure on the polymer film 7-2, the voltage regulating knob 2-2-1 is manually screwed, the voltage regulating knob 2-2-1 drives the bidirectional screw rod 2-2-2 to rotate, and the two screw rod nuts 2-2-3 on the bidirectional screw rod 2-2-2 move towards or away from each other along the axial direction of the bidirectional screw rod 2-2-2 under the restriction of the voltage regulating plates 2-1 and the guide rods 2-2-4, thereby driving the two voltage regulating plates 2-1 to move towards or away from each other. When the two voltage regulating plates 2-1 move towards each other, the pressure applied by the two voltage regulating plates 2-1 on the polymer film 7-2 gradually increases. When the two voltage regulating plates 2-1 move away from each other, the pressure applied by the two voltage regulating plates 2-1 on the polymer film 7-2 gradually decreases. Thus, the pressure on the polymer film 7-2 can be adjusted according to the distance between the two voltage regulating plates 2-1.

[0025] As shown in the figure, Figure 1 and Figure 6 As shown in the figure, the temperature control mechanism 3 of the embodiment comprises a heating base plate 3-1, a temperature control power supply 3-2 and a thermocouple 3-3. The heating base plate 3-1 is installed in the cavity of the shell 1, preferably on the rear side wall of the shell 1, and is connected with the temperature control power supply 3-2. The thermocouple 3-3 is connected with the aperture metal plate 7-1 of the core element 7 and is used to measure the temperature of the core element 7. When the temperature control power supply 3-2 is turned on, the heating base plate 3-1 is heated, thereby heating the inner cavity of the shell 1 and the core element 7 in the inner cavity of the shell 1. The temperature of the core element 7 is measured by the thermocouple 3-3. When the temperature of the core element 7 is too high, the current flowing through the heating base plate 3-1 is reduced, thereby reducing the temperature of the heating base plate 3-1. Conversely, when the temperature of the core element 7 is too low, the current flowing through the heating base plate 3-1 is increased, thereby increasing the temperature of the heating base plate 3-1. Thus, the temperature of the core element 7 is controlled.

[0026] As shown in the figure, Figure 5As shown, the embodiment also includes a two-degree-of-freedom adjusting base 8, on which the housing 1 is mounted, so that the light transmission holes 1-1 on both sides of the housing 1 can be aligned with the light emitting point of the synchrotron radiation source 5. Specifically, the two-degree-of-freedom adjusting base 8 includes two screw-nut adjusting bases 2-2-3, one of which is used to adjust the left-right position of the housing 1, and the other of which is used to adjust the front-rear position of the housing 1.

[0027] Each screw-nut adjusting base 2-2-3 includes a position adjusting knob 8-1, a support base 8-2, a screw lever 8-3, two support rails 8-4, an adjusting nut 8-5, and a support plate 8-6, one end of the screw lever 8-3 is inserted into the support base 8-2, the other end of the screw lever 8-3 is connected to the position adjusting knob 8-1, the two support rails 8-4 are arranged in the support base 8-2 and on both sides of the screw lever 8-3, the adjusting nut 8-5 is screwed onto the screw lever 8-3 and connected to the support plate 8-6, the support plate 8-6 is connected to the support rails 8-4 and can move along the length direction of the support rails 8-4; the two screw-nut adjusting bases 2-2-3 are arranged vertically, the screw-nut adjusting base 2-2-3 at the top is mounted on the support plate 8-6 of the screw-nut adjusting base 2-2-3 at the bottom, and the housing 1 is mounted on the support plate 8-6 of the screw-nut adjusting base 2-2-3 at the top. When the position adjusting knob 8-1 is manually rotated, the screw lever 8-3 rotates with the position adjusting knob 8-1, the adjusting nut 8-5 moves along the axis direction of the screw lever 8-3 under the constraint of the support plate 8-6 and the support rails 8-4, thereby driving the support plate 8-6 to move, and the position of the housing 1 is adjusted.

[0028] Finally, it should be noted that the above embodiments are only used to illustrate the technical solutions of the present application, and are not intended to limit the protection scope of the present application. Although the present application has been described in detail with reference to the preferred embodiments, those skilled in the art should understand that the technical solutions of the present application can be modified or replaced by equivalents without departing from the spirit and scope of the technical solutions of the present application.

Claims

1. An in-situ synchrotron radiation device for testing thin film capacitor cell elements, characterized by, The utility model relates to a two -dimensional pressure -adjusting synchronous radiation x -ray source, including shell (1), pressure regulating mechanism (2), temperature control mechanism (3), high -voltage polarization power supply (4), synchronous radiation light source (5) and signal receiving board (6), the core element (7) is installed in the cavity of shell (1), temperature control mechanism (3) is installed in shell (1) and adjusts the temperature of the cavity of shell (1), and high -voltage polarization power supply (4) connects the both ends of core element (7) to exert voltage, pressure regulating mechanism (2) includes two pressure regulating plates (2-1) and pressure regulating drive assembly (2-2), and two pressure regulating plates (2-1) are respectively installed in the both sides of core element (7), and pressure regulating drive assembly (2-2) is connected two pressure regulating plates (2-1) and adjusts the distance of two pressure regulating plates (2-1), to adjust the pressure that core element (7) suffers by adjusting the distance of two pressure regulating plates (2-1), and synchronous radiation light source (5) and signal receiving board (6) are arranged at the both sides of shell (1) respectively, and the both sides wall of shell (1) is opened with light transmission hole one (1-1) respectively, and each pressure regulating plate (2-1) is opened with light transmission hole two (2-1-1), and synchronous radiation light source (5) emits synchronous radiation incident x -ray, and the radiation light successively passes through the light transmission hole one (1-1) on the both sides wall of shell (1), the light transmission hole two (2-1-1) on one of two pressure regulating plates (2-1), core element (7), the light transmission hole two (2-1-1) on the other pressure regulating plate (2-1) and the light transmission hole one (1-1) on the other side wall of shell (1), and then is received by signal receiving board (6).

2. An in-situ synchrotron radiation device for testing thin film capacitor cell elements according to claim 1, wherein, The pressure regulating drive assembly (2-2) includes a pressure regulating knob (2-2-1), a bidirectional screw rod (2-2-2), two screw nuts (2-2-3), and two guide rods (2-2-4). One end of the bidirectional screw rod (2-2-2) is inserted into the cavity of the shell (1) horizontally, and the other end is outside the shell (1) and connected with the pressure regulating knob (2-2-1). The two screw nuts (2-2-3) are screwed on the two threaded sections of the bidirectional screw rod (2-2-2) respectively and connected with the two pressure regulating plates (2-1) respectively. Each pressure regulating plate (2-1) is slidingly connected with the two guide rods (2-2-4).

3. An in-situ synchrotron radiation device for testing thin film capacitor cell elements according to claim 1, wherein, The temperature control mechanism (3) includes a heating base plate (3-1) and a thermocouple (3-3). The heating base plate (3-1) is installed in the cavity of the shell (1), and the thermocouple (3-3) is connected with the core element (7) and used for measuring the temperature of the core element (7).

4. An in-situ synchrotron radiation device for testing thin film capacitor cell elements according to claim 1, wherein, It also includes a two-degree-of-freedom adjusting base (8). The shell (1) is installed on the two-degree-of-freedom adjusting base (8) so that the light transmission holes (1-1) on both sides of the shell (1) can be aligned with the light emitting points of the synchronous radiation light source (5).

5. An in-situ synchrotron radiation apparatus for testing thin film capacitor cell elements according to claim 4, wherein, The two-degree-of-freedom adjusting base (8) comprises two screw-nut adjusting bases (2-2-3), each of which comprises a position adjusting knob (8-1), a support (8-2), a screw lever (8-3), two support rails (8-4), an adjusting nut (8-5) and a support plate (8-6), one end of the screw lever (8-3) is inserted into the support (8-2), the other end of the screw lever (8-3) is connected with the position adjusting knob (8-1), the two support rails (8-4) are arranged in the support (8-2) and on both sides of the screw lever (8-3), the adjusting nut (8-5) is screwed on the screw lever (8-3) and connected with the support plate (8-6), the support plate (8-6) is connected with the support rails (8-4) and can move along the length direction of the support rails (8-4); the two screw-nut adjusting bases (2-2-3) are arranged vertically, the screw-nut adjusting base (2-2-3) at the top is installed on the support plate (8-6) of the screw-nut adjusting base (2-2-3) at the bottom, and the shell (1) is installed on the support plate (8-6) of the screw-nut adjusting base (2-2-3) at the top.

6. An in-situ synchrotron radiation device for testing thin film capacitor cell elements according to claim 1, wherein, The signal receiving plate (6) is a CCD camera.

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