Baffle structure and vacuum coating equipment

Abstract

The utility model discloses a baffle structure and vacuum coating equipment, include: substrate, panel with detachable connection with the substrate, wherein, the panel has the blocking surface for blocking metal vapor, the blocking surface is the non -smooth surface of improving the adhesion strength, the utility model discloses above -mentioned structure, and the metal layer of deposition can better adhere to the blocking surface, effectively reduce the probability of metal layer peeling to evaporating boat, and the blocking surface cleaning is also more convenient.

Description

Technical Field

[0001] This utility model relates to the field of vacuum evaporation technology, and in particular to a baffle structure and vacuum coating equipment. Background Technology

[0002] In the process of preparing composite current collectors for batteries, roll-to-roll vacuum coating equipment is typically used to deposit metal materials onto a polymer base film, forming a "metal layer-base film-metal layer" sandwich structure for the composite current collector. The evaporation source system in the roll-to-roll vacuum coating equipment consists of an evaporation boat, a wire feeding mechanism, a water-cooled electrode, and a baffle. The water-cooled electrode heats the evaporation boat, and the wire feeding mechanism delivers the metal wire to the evaporation boat, where it melts the wire and continuously heats it to form metal vapor, which is then deposited onto the base film. The baffle is located above the evaporation boat and is mechanically controlled to switch between closed and open positions. In the early stages of deposition, the molten pool surface in the evaporation boat is not yet stable, resulting in significant splashing. Therefore, the baffle needs to be switched to the closed position to block the film formation path during this period. Once the surface surface stabilizes, the baffle is switched to the open position to avoid obstructing the film formation path.

[0003] Currently, the baffles are mainly made of stainless steel, with a smooth blocking surface. During the initial liquid level adjustment process in the vapor deposition stage, the metal wire melts on the high-temperature evaporation boat, and the resulting metal vapor is deposited on the blocking surface of the baffle. Some metals can form a tight bond with the blocking surface, preventing metal detachment. For example, aluminum vapor reacts chemically with stainless steel at high temperatures, damaging the stainless steel oxide film (Cr2O3) and forming intermetallic compounds (such as FeAl3 and CrAl7) with iron / chromium, forming a strong bond. However, some metals (copper) cannot bond with the blocking surface, and this part of the metal easily detaches into the evaporation boat, causing metal splashing and introducing impurities into the molten metal inside the evaporation boat.

[0004] Therefore, it is necessary to improve the existing technology to overcome the aforementioned defects. Utility Model Content

[0005] The purpose of this invention is to provide a baffle structure and a vacuum coating equipment, so that the metal deposited on the baffle structure is not easily detached.

[0006] The purpose of this utility model is achieved through the following technical solution: a baffle structure, disposed above an evaporation boat, comprising:

[0007] substrate;

[0008] The panel is detachably connected to the substrate.

[0009] The panel has a blocking surface for blocking metal vapor, and the blocking surface is a non-smooth surface that improves adhesion strength.

[0010] Furthermore, the blocking surface is provided with a textured structure to improve adhesion strength.

[0011] Furthermore, the blocking surface is enclosed by two oppositely arranged first sides and two oppositely arranged second sides, and the concave and convex point structures are arranged side by side at intervals along the first sides.

[0012] Furthermore, the concave-convex structure extends continuously along the second side, exhibiting a periodically undulating wave-like or sawtooth shape.

[0013] Furthermore, the concave-convex structure extends discontinuously along the second side and is composed of a plurality of independent protrusions spaced apart along the second side, or it is composed of a plurality of independent concave portions spaced apart along the second side.

[0014] Furthermore, the substrate and the panel are fixed together by threaded parts, snaps, or magnetic attraction.

[0015] Furthermore, the blocking surface is provided with an adsorption layer to enhance adhesion strength, and the adsorption layer has a porous structure.

[0016] Furthermore, the substrate or the panel is provided with a temperature-changing passage, which is adapted to allow the flow of a heating or cooling medium to heat or cool the blocking surface.

[0017] Furthermore, the substrate or the panel is provided with a self-cleaning structure, which includes at least one of a vibrator and a heating element to vibrate or heat the blocking surface.

[0018] In addition, this utility model also provides a vacuum coating equipment, characterized in that it includes the aforementioned baffle structure.

[0019] Compared with the prior art, the present invention has the following beneficial effects: By adopting the above-mentioned structure of the blocking surface, the present invention improves the adhesion strength of the blocking surface, so that after the metal vapor is deposited on the blocking surface, the deposited metal layer can better adhere to the blocking surface, effectively reducing the probability of the metal layer falling off to the evaporation boat, and greatly avoiding metal splashing and impurities generated by the molten metal in the evaporation boat; by detachably setting the substrate and the panel, and forming the blocking surface on the panel, when it is necessary to clean the blocking surface, the panel can be removed from the substrate for cleaning separately. The panel is lighter than the baffle structure, so the cleaning process is more convenient, and there is no need to perform the above-mentioned cleaning operation on the substrate that is not in direct contact with the metal vapor, the substrate is not easily damaged, and the service life is good; and when the panel reaches the end of its service life after long-term use, replacing the panel separately can greatly reduce the cost compared to replacing the entire baffle structure. Attached Figure Description

[0020] Figure 1 This is a schematic diagram showing the position of the baffle structure of this utility model.

[0021] Figure 2 This is an exploded structural diagram of the baffle structure in this utility model.

[0022] Figure 3 This is a schematic diagram of the structure of the concave-convex point structure in this utility model when it is composed of convex parts.

[0023] Figure 4 This is a schematic diagram of the structure of the concave-convex point structure in this utility model when it is composed of concave parts.

[0024] Explanation of reference numerals in the attached figures:

[0025] 100 Evaporation boat; 200 Baffle structure; 210 Substrate; 220 Panel; 221 Blocking surface; 222 First side; 223 Second side; 230 Concave-convex structure; 231 Protrusion; 232 Concave. Detailed Implementation

[0026] To make the above-mentioned objectives, features, and advantages of this application more apparent and understandable, the specific embodiments of this application will be described in detail below with reference to the accompanying drawings. It should be understood that the specific embodiments described herein are for illustrative purposes only and are not intended to limit the scope of this application. Furthermore, it should be noted that, for ease of description, only the parts relevant to this application are shown in the accompanying drawings, not the entire structure. Based on the embodiments in this application, all other embodiments obtained by those skilled in the art without inventive effort are within the scope of protection of this application.

[0027] The terms “comprising” and “having”, and any variations thereof, used in this application are intended to cover non-exclusive inclusion. For example, a process, method, system, product, or apparatus that includes a series of steps or units is not limited to the steps or units listed, but may optionally include steps or units not listed, or may optionally include other steps or units inherent to such process, method, product, or apparatus.

[0028] In this document, the term "embodiment" means that a particular feature, structure, or characteristic described in connection with an embodiment may be included in at least one embodiment of this application. The appearance of this phrase in various places throughout the specification does not necessarily refer to the same embodiment, nor is it a separate or alternative embodiment mutually exclusive with other embodiments. It will be explicitly and implicitly understood by those skilled in the art that the embodiments described herein can be combined with other embodiments.

[0029] Please see Figure 1As shown, a baffle structure 200, corresponding to a preferred embodiment of the present invention, is disposed above the evaporation boat 100 to block the film formation path during the early stage of vapor deposition. The baffle structure 200 has a blocking surface 221 facing the evaporation boat 100, which is used to block the metal vapor rising from the evaporation boat 100. The blocking surface 221 is a non-smooth surface to improve adhesion strength.

[0030] By adopting the above-described structure for the barrier surface 221, the adhesion strength of the barrier surface 221 is improved, so that after the metal vapor is deposited on the barrier surface 221, the deposited metal layer can better adhere to the barrier surface 221, effectively reducing the probability of the metal layer falling off into the evaporation boat 100, and greatly avoiding metal splashing and impurities generated by the molten metal in the evaporation boat 100.

[0031] Furthermore, referring to Figure 2 As shown, the baffle structure 200 includes a substrate 210 and a panel 220. The substrate 210 is used to connect with a mechanical structure to enable the baffle structure 200 to switch between an open position and a closed position. The panel 220 is detachably connected to the substrate 210, and one side of the panel 220 forms a blocking surface 221.

[0032] Since the thick metal layer deposited on the blocking surface 221 requires cleaning to ensure the proper functioning of subsequent blocking operations, cleaning methods include strong acid immersion and ultrasonic cleaning. By detachably configuring the substrate 210 and the panel 220, and forming the blocking surface 221 on the panel 220, the panel 220 can be removed from the substrate 210 for separate cleaning when the blocking surface 221 needs to be cleaned. The panel 220 is lighter than the baffle structure 200, making the cleaning process more convenient. Furthermore, the aforementioned cleaning operation is unnecessary on the substrate 210, which is not in direct contact with metal vapor, thus minimizing damage to the substrate 210 and extending its service life. When the panel 220 reaches the end of its service life after prolonged use, replacing the panel 220 separately, compared to replacing the entire baffle structure 200, can significantly reduce costs.

[0033] Furthermore, the substrate 210 and the panel 220 are made of stainless steel, and their contours are compatible. The side of the panel 220 facing away from the blocking surface 221 is in contact with one side of the substrate 210. The panel 220 is a thin sheet material, and its thickness is less than that of the substrate 210. The substrate 210 and the panel 220 can be detachably fixed together by means of threads, snaps, or magnets.

[0034] For example, when using threaded components, at least one connection hole can be formed on the substrate 210 and the panel 220 respectively. The connection holes on the substrate 210 and the panel 220 correspond one-to-one, and bolts, screws, or other threaded components can be connected between the corresponding connection holes to achieve fastening. When using a snap-fit ​​method, one of the substrate 210 and the panel 220 is provided with a snap-fit ​​seat, and the other is provided with a snap-fit ​​component. After the substrate 210 and the panel 220 are pressed together, the snap-fit ​​component and the snap-fit ​​seat are adapted to snap together to achieve fastening, or to separate to achieve disassembly. When using a magnetic attraction method, an electromagnet can be provided on the side of the substrate 210 that is in contact with the panel 220. Since the panel 220 is made of stainless steel, when the electromagnet is energized, the panel 220 can be tightly attracted to the substrate 210, and when the electromagnet is de-energized, the panel 220 and the substrate 210 can be released from attraction. Admittedly, in other embodiments, other methods can also be used to achieve the detachable connection of the substrate 210 and the panel 220, and this utility model is not limited thereto.

[0035] Furthermore, a positioning structure can be provided between the substrate 210 and the panel 220 to position the panel 220, enabling rapid installation of the substrate 210 and the panel 220. For example, a positioning groove can be provided on the side of the substrate 210 that is used to attach to the panel 220, with the inner contour of the positioning groove matching the outer contour of the panel 220. Alternatively, a positioning block can be provided on the side of the substrate 210 that is used to attach to the panel 220, etc., but this invention is not limited thereto.

[0036] Furthermore, the blocking surface 221 can be an arc surface or a plane, and in this embodiment, it is preferably a concave arc surface. When it covers the evaporation boat 100, its blocking effect is better than that of a plane. The blocking surface 221 is formed by two oppositely arranged first side edges 222 and two oppositely arranged second side edges 223. The blocking surface 221 is provided with a bump structure 230, which is used to improve the adhesion strength of the metal layer. Multiple bump structures 230 are arranged side by side at intervals along the first side edges 222.

[0037] Preferably, the protrusions and concave structures 230 are arranged at equal intervals, and the protrusions and concave structures 230 on both sides are adjacent to different second side edges 223, thereby improving the adhesion strength of the protrusions and concave structures 230. Preferably, the first side edge 222 is the short side edge of the blocking surface 221, and the second side edge 223 is the long side edge of the blocking surface 221, that is, the protrusions and concave structures 230 are arranged at intervals along the width direction of the blocking surface 221, which makes the arrangement of the protrusions and concave structures 230 more convenient. Admittedly, in other embodiments, the first side edge 222 can also be the long side edge, and the second side edge 223 can be the short side edge.

[0038] Furthermore, the concave-convex structure 230 is an elongated structure, which can be integrally formed with the blocking surface 221 or assembled together after being formed separately. The two ends of the concave-convex structure 230 extend along the second side 223 to different first sides 222, with one end of the concave-convex structure 230 being adjacent to one of the first sides 222 and the other end being adjacent to the other first side 222.

[0039] In one embodiment, the bump structure 230 extends continuously along the second side 223, exhibiting a periodically undulating wave-like or sawtooth structure. However, using this structure, the manufacturing of the bump structure 230 is relatively cumbersome. (Refer to...) Figure 3 and Figure 4 As shown, in this embodiment, the concave-convex structure 230 extends discontinuously along the second side 223, and is composed of a plurality of independent protrusions 231 arranged at intervals along the second side 223, or it is composed of a plurality of independent concave portions 232 arranged at intervals along the second side 223, preferably arranged at equal intervals.

[0040] When the concave-convex structure 230 is composed of multiple protrusions 231, each protrusion 231 can be formed individually, and the protrusion 231 and the blocking surface 221 can be fixed together by welding. Preferably, the protrusion 231 is a rod-shaped structure with external threads, and a nut can also be threaded onto it. Since the protrusion 231 serves as an anchor point to improve the adhesion strength of the metal layer, the outer circumferential dimensions of the protrusion 231 can be adjusted by replacing nuts of different sizes on the protrusion 231, so that the protrusion 231 can be flexibly adjusted to the optimal anchoring size as needed.

[0041] When the concave-convex structure 230 is composed of multiple recesses 232, the recesses 232 are pits, which can be directly formed by processing equipment from the blocking surface 221 inward. The processing technology is simple and effectively reduces costs. The inner contour shape of the pit is not limited, but a circular pit is preferred to reduce the generation of dead corners and facilitate subsequent cleaning.

[0042] Furthermore, as a preferred embodiment, the blocking surface 221 of panel 220 is prepared with an adsorption layer (not shown). The adsorption layer has a porous structure and can enhance the adsorption strength. The open and interconnected pore structure of the adsorption layer can physically capture more vapor particles, providing a larger adsorption area, and allowing the cleaning medium to effectively penetrate the pores and flush out the captured metal particles during subsequent cleaning (such as high-pressure water jet or ultrasonic cleaning). The adsorption layer can specifically be a porous metal, ceramic coating, metal felt, etc. In this embodiment, a nano-alumina ceramic coating is preferred.

[0043] Furthermore, the substrate 210 or panel 220 is provided with a variable temperature passage (not shown), which is suitable for the flow of a heating or cooling medium to heat or cool the blocking surface 221, thereby achieving auxiliary cleaning of the metal layer. The variable temperature passage has a medium inlet and a medium outlet that are connected to the outside. A medium circulation device is connected to the medium inlet and the medium outlet through pipelines to allow the heating or cooling medium to circulate in the variable temperature passage.

[0044] When the temperature-changing passage is formed on the panel 220, the reduced thickness of the panel 220 makes it difficult to form the passage, and the pipes at the medium inlet and outlet need to be disassembled during cleaning of the panel 220, which is very inconvenient. Therefore, in this embodiment, the temperature-changing passage is preferably formed within the substrate 210, which facilitates its formation, and the disassembly and assembly of the panel 220 are not restricted by the pipes. The temperature-changing passage is adjacent to the side of the panel 220 that is in contact with the substrate 210. Due to the smaller thickness of the panel 220, the temperature-changing effect of the blocking surface 221 is excellent. The temperature-changing passage can be arranged in a continuous S-shape to maximize coverage of all areas of the blocking surface 221.

[0045] When the variable temperature passage is used to circulate a heat medium, the blocking surface 221 is heated, which reduces the adhesion strength of the metal layer on the blocking surface 221, making the metal layer on the panel 220 easier to clean. When the variable temperature passage is used to circulate a cold medium, the blocking surface 221 is cooled during the coating process, causing the metal attached to it to quickly become dense metal particles, reducing adhesion and facilitating subsequent cleaning.

[0046] Furthermore, a self-cleaning structure (not shown) is provided on the substrate 210 or the panel 220. In this embodiment, the self-cleaning structure is preferably provided on the substrate 210 to facilitate the disassembly and cleaning of the panel 220. The self-cleaning structure includes at least one of a vibrator or a heating element to vibrate or heat the blocking surface 221.

[0047] The vibrator can be a miniature vibrator, which is disposed inside the substrate 210 and in close contact with the side of the panel 220 that is attached to the substrate 210. The heating element can be an electrothermal structure such as a heating wire, which is disposed inside the substrate 210 and in close contact with the side of the panel 220 that is attached to the substrate 210. When the coating is completed and the baffle structure 200 is in the open position, in a non-vacuum environment, the vibrator and / or the heating element are activated. The mechanical vibration generated by the vibrator and / or the thermal expansion stress generated by the heating element can cause the metal layer attached to the baffle surface 221 to crack, loosen, and fall off.

[0048] Furthermore, this utility model also provides a vacuum coating apparatus, including the aforementioned baffle structure 200, evaporation boat 100, and wire feeding mechanism (not shown). Multiple evaporation boats 100 are arranged side-by-side, and the baffle structures 200 are correspondingly positioned above each evaporation boat 100. Each evaporation boat 100 is equipped with a wire feeding mechanism, which are arranged alternately on the evaporation boat 100. The wire feeding mechanism is adapted to deliver metal wire to the evaporation boat 100, which can heat and melt the metal wire, forming metal vapor flowing towards the baffle structure 200 under continuous heating.

[0049] The working process of this vacuum coating equipment is as follows: The baffle structure 200 is switched to the closed position, blocking the evaporation boat 100 and the base film to be coated. Then, the evaporation boat 100 is heated to melt the metal wire fed by the wire feeding mechanism. The blocking structure blocks the molten metal and metal vapor splashing in the molten pool of the evaporation boat 100. After the molten pool of the evaporation boat 100 stabilizes, the baffle structure 200 is opened, allowing the metal vapor to deposit the base film. After the deposition is complete, heating of the evaporation boat 100 is stopped, and the baffle structure 200 is switched to the open position. Next, a collection structure is placed below the baffle structure 200, and the temperature-changing passage and self-cleaning structure are activated to loosen or remove the metal layer attached to the blocking surface 221. The removed portion is collected in the collection structure. Then, the panel 220 is removed from the substrate 210 and transferred to a dedicated cleaning area for cleaning. After cleaning and drying, the panel 220 is reinstalled onto the substrate 210.

[0050] The above description is merely an embodiment of this application and does not limit the patent scope of this application. Any equivalent structural or procedural transformations made using the content of this application's specification and drawings, or direct or indirect applications in other related technical fields, are similarly included within the patent protection scope of this application.

Claims

1. A baffle structure disposed above an evaporation boat (100), characterized in that, include: substrate(210); The panel (220) is detachably connected to the substrate (210); The panel (220) has a blocking surface (221) for blocking metal vapor, and the blocking surface (221) is a non-smooth surface to improve adhesion strength.

2. The baffle structure as described in claim 1, characterized in that, The blocking surface (221) is provided with a bump structure (230) to improve the adhesion strength.

3. The baffle structure as described in claim 2, characterized in that, The blocking surface (221) is enclosed by two oppositely arranged first side edges (222) and two oppositely arranged second side edges (223), and the concave and convex point structures (230) are arranged in a row at intervals along the first side edges (222).

4. The baffle structure as described in claim 3, characterized in that, The concave-convex structure (230) extends continuously along the second side (223) and is in a periodically undulating wave-like or sawtooth shape.

5. The baffle structure as described in claim 3, characterized in that, The concave-convex structure (230) extends discontinuously along the second side (223) and is composed of a plurality of independent protrusions (231) spaced apart along the second side (223), or it is composed of a plurality of independent concave portions (232) spaced apart along the second side (223).

6. The baffle structure as described in claim 1, characterized in that, The substrate (210) and the panel (220) are fixed together by threaded parts, snaps or magnetic attraction.

7. The baffle structure as described in claim 1, characterized in that, The blocking surface (221) is provided with an adsorption layer that enhances the adhesion strength, and the adsorption layer has a porous structure.

8. The baffle structure as described in claim 1, characterized in that, The substrate (210) or the panel (220) is provided with a temperature-changing passage, which is suitable for supplying a heating medium or a cooling medium to heat or cool the blocking surface (221).

9. The baffle structure as described in claim 1, characterized in that, The substrate (210) or the panel (220) is provided with a self-cleaning structure, which includes at least one of a vibrator and a heating element to vibrate or heat the blocking surface (221).

10. A vacuum coating apparatus, characterized in that, Includes the baffle structure (200) as described in any one of claims 1 to 9.

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