Windscreen structure and furnace apparatus thereof

Abstract

The utility model belongs to the technical field of furnace body equipment, especially relates to air curtain structure and its furnace body equipment. One kind of air curtain structure, include: mounting plate, its setting in the material import and export of solidification furnace, the outer cover of pumping air is set in mounting plate top, and is communicated with the air draught fan, a number of high temperature adhesive tape, its parallel even distribution is in mounting plate inner top wall, wherein, the air draught fan generates directional negative pressure airflow through the outer cover of pumping air, the extension direction of high temperature adhesive tape and solidification furnace in material conveying direction is positive intersection, to form the composite barrier screen of hot air current in solidification furnace. Through the cooperation of the outer cover of pumping air and high temperature adhesive tape, the synergistic mechanism of physical blocking and negative pressure suction is realized, and the temperature in the furnace body is avoided uneven.

Description

Technical Field

[0001] This utility model belongs to the technical field of furnace equipment, and particularly relates to the air curtain structure and its furnace equipment. Background Technology

[0002] Existing nitrogen curing furnaces need to maintain a uniform temperature inside the furnace. However, when silicon wafers enter or exit the furnace, the temperature at the material inlet and outlet of the nitrogen curing furnace is easily dispersed into the room, resulting in uneven temperature inside the furnace. Moreover, nitrogen is also prone to overflowing outward through the material inlet and outlet.

[0003] Therefore, overcoming the above-mentioned defects is a technical problem that urgently needs to be solved in this field.

[0004] It should be noted that the information disclosed in this background section is only for understanding the background technology of this application concept, and therefore, the above description is not considered to constitute information related to the technology. Utility Model Content

[0005] This disclosure provides at least one air curtain structure and its furnace body equipment.

[0006] In a first aspect, embodiments of this disclosure provide an air curtain structure, including:

[0007] Mounting plate, which is installed at the material inlet and outlet of the curing oven;

[0008] The exhaust hood is located above the mounting plate and is connected to the exhaust fan;

[0009] Several high-temperature resistant adhesive tapes are evenly distributed in parallel on the inner top wall of the mounting plate;

[0010] The exhaust fan generates directional negative pressure airflow through the exhaust cover, and the extension direction of the high-temperature resistant adhesive tape intersects the material conveying direction inside the curing oven to form a composite barrier against the hot airflow inside the curing oven.

[0011] In one optional embodiment, the adjacent spacing of the high-temperature resistant adhesive tape is 15-25 mm.

[0012] In one alternative embodiment, the dimensions of a single high-temperature resistant adhesive tape are 700-800 mm in length and 30-50 mm in width.

[0013] In one optional embodiment, the high-temperature resistant adhesive tape is made of Teflon composite material, and the distance between its bottom wall and the workpiece is 5-10 mm.

[0014] In one alternative embodiment, an air inlet is provided on the side of the exhaust hood away from the curing oven, and the air inlet forms an acute angle with the horizontal plane.

[0015] In one optional embodiment, the rectangular cross-section of the air inlet has an angle of 70°-85° with the horizontal plane.

[0016] In one optional embodiment, the air inlet has a rectangular cross-section with an opening size of 800*125mm.

[0017] In one optional embodiment, a heat insulation filling layer is also included, which is made of ceramic fiber cotton and fills the connection gap between the mounting plate and the exhaust shroud.

[0018] Secondly, this disclosure also provides a furnace body device, including a material inlet and outlet, wherein air curtain structures are respectively provided at the material inlet and outlet to form a bidirectional hot airflow barrier.

[0019] The beneficial effects of this invention are that it provides an air curtain structure, which, through the combination of the exhaust hood and high-temperature resistant adhesive tape, achieves a synergistic mechanism of physical obstruction and negative pressure suction, thus avoiding uneven temperature distribution within the furnace. Specifically, the evenly distributed high-temperature resistant adhesive tape prevents hot air from escaping from the furnace, while the exhaust fan generates directional negative pressure airflow through the exhaust hood, preventing hot air from accumulating at the material inlet and outlet of the furnace and avoiding localized temperature increases.

[0020] Other features and advantages of this invention will be set forth in the description which follows, and will be apparent in part from the description, or may be learned by practicing the invention. The objectives and other advantages of this invention are realized and obtained through the structures particularly pointed out in the description and the accompanying drawings.

[0021] To make the above-mentioned objectives, features and advantages of this utility model more apparent and understandable, preferred embodiments are described in detail below with reference to the accompanying drawings. Attached Figure Description

[0022] To more clearly illustrate the technical solutions in the specific embodiments or related technologies of this utility model, the drawings used in the description of the specific embodiments or related technologies will be briefly introduced below. Obviously, the drawings described below are some embodiments of this utility model. For those skilled in the art, other drawings can be obtained from these drawings without creative effort.

[0023] Figure 1 A perspective view of the air curtain structure provided in the embodiments of this disclosure;

[0024] Figure 2 A perspective view of the exhaust hood and curing oven provided in the embodiments of this disclosure;

[0025] Figure 3This is a schematic diagram showing the unfolded air curtain structure and exhaust cover provided in the embodiments of this disclosure.

[0026] In the picture:

[0027] 1. Mounting plate; 10. Thermal insulation filling layer; 11. Positioning frame; 2. Exhaust hood; 20. Exhaust fan; 21. Air inlet; 3. High-temperature resistant adhesive tape; 4. Curing oven; 40. Workpiece. Detailed Implementation

[0028] To make the objectives, technical solutions, and advantages of the embodiments of this utility model clearer, the technical solutions of this utility model will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of this utility model, not all embodiments. Based on the embodiments of this utility model, all other embodiments obtained by those skilled in the art without creative effort are within the protection scope of this utility model.

[0029] In this document, when it is mentioned that a first component is located on a second component, this can mean that the first component can be directly formed on the second component, or that a third component can be inserted between the first and second components. Furthermore, in the accompanying drawings, the thickness of the components may be exaggerated or reduced for the purpose of effectively describing the technical content.

[0030] In this document, exemplary embodiments of the present disclosure will be described in more detail with reference to the accompanying drawings. As used herein, expressions such as “at least one of…” modify the entire list of elements when following a list of elements, rather than individual elements in the list. For example, the expression “at least one of a, b, and c” should be understood to include only a, only b, only c, both a and b, both a and c, both b and c, or all of a, b, and c.

[0031] The terminology used herein is for the purpose of describing specific exemplary configurations only and is not intended to be limiting. As used herein, the singular articles “a,” “an,” and “the” may also be intended to include plural forms unless otherwise clearly stated herein. The terms “comprising,” “including,” and “having” are inclusive and thus specify the presence of features, steps, operations, elements, and / or components, but do not preclude the presence or addition of one or more other features, steps, operations, elements, components, and / or combinations thereof. The method steps, processes, and operations described herein should not be construed as requiring them to be performed in the specific order discussed or shown, unless specifically identified as such. Additional or alternative steps may be employed.

[0032] As used herein, the phrases “in one embodiment,” “according to one embodiment,” “in some embodiments,” etc., generally refer to the fact that a particular feature, structure, or characteristic following the phrase can be included in at least one embodiment of this disclosure. Therefore, a particular feature, structure, or characteristic can be included in more than one embodiment of this disclosure, such that these phrases do not necessarily refer to the same embodiment. As used herein, the terms “example,” “exemplary,” etc., are used to “serve as an example, instance, or illustration.” Any implementation, aspect, or design described herein as “example” or “exemplary” is not necessarily to be construed as preferred or superior to other implementations, aspects, or designs. Rather, the use of the terms “example,” “exemplary,” etc., is intended to present concepts in a specific manner.

[0033] Research has revealed that existing nitrogen curing furnaces require uniform temperature distribution within the furnace. However, when silicon wafers enter or exit the furnace, heat from the material inlet and outlet easily dissipates into the chamber, leading to uneven temperature distribution. Furthermore, nitrogen gas easily escapes through the material inlet and outlet. During the curing process, nitrogen gas needs to be continuously supplied to the furnace, forcing nitrogen and heat out of the furnace. Simply installing baffles at the material inlet and outlet to block the outflow of hot air and nitrogen results in heat accumulation at these points, causing localized temperature increases.

[0034] Therefore, overcoming the above-mentioned defects is a technical problem that urgently needs to be solved in this field.

[0035] The defects in the above solutions and the reasons for their occurrence are the results of the inventors' practice and careful research. Therefore, the discovery process of the above problems and the solutions proposed in this disclosure should be considered as the inventors' contributions to this disclosure.

[0036] It should be noted that similar labels and letters in the following figures indicate similar items. Therefore, once an item is defined in one figure, it does not need to be further defined and explained in subsequent figures.

[0037] The following detailed description, with reference to the accompanying drawings, describes some embodiments of the present invention. Unless otherwise specified, the following embodiments and features can be combined with each other.

[0038] like Figures 1 to 3 As shown, at least one embodiment provides an air curtain structure, including:

[0039] Mounting plate 1, made of 304 stainless steel, is fixed to the inlet and outlet flanges of curing oven 4. The inner top wall of mounting plate 1 is provided with positioning frames 11 spaced 15-25mm apart, with adjacent positioning frames 11 spaced 20mm apart (spaced error ±1mm), used to suspend high-temperature resistant adhesive tape 3. The heat insulation filling layer 10 filling the contact surface between mounting plate 1 and the oven body is 3mm thick ceramic fiber cotton to reduce the temperature of the outer wall of the exhaust hood. The exhaust hood 2 is connected to the exhaust fan 20 via a duct, and the exhaust hood 2 is made of 316L stainless steel. The extension direction of the high-temperature resistant adhesive tape 3 is perpendicular to the material conveying direction inside the curing oven (4). Here, the extension direction refers to the length direction of a single high-temperature resistant adhesive tape 3. (See attached document for reference.) Figure 2 The air inlet 21 is designed as an 800mm × 125mm rectangular opening, with its lower edge 115mm from the horizontal plane of the mounting plate. The angle between the rectangular cross-section of the air inlet 21 and the horizontal plane is 70°-85°. Figure 2 In the figure, 'a' represents the angle between the rectangular cross-section of the air inlet 21 and the horizontal plane. Furthermore, setting the angle between the air inlet 21 and the horizontal plane to 75° (with an error of ±2°) can improve the airflow capture rate, thereby enhancing the negative pressure suction capability for the hot air overflowing from the curing oven 4. (See attached...) Figure 2 In the diagram, F1 indicates the direction of movement of the workpiece 40 inside the curing oven; F2 indicates the direction of negative pressure airflow formed by the air inlet 21.

[0040] Reference Appendix Figure 1 The exhaust fan 20 is a centrifugal fan with a temperature resistance of 400℃, and the negative pressure intensity (0.5-2kPa) is adjusted by a frequency converter.

[0041] Reference Appendix Figure 3 The high-temperature resistant adhesive tape 3 is made of Teflon composite material (PTFE + glass fiber reinforcement layer), with a single layer thickness of 0.8mm and a Shore hardness of 70A. The dimensions of a single high-temperature resistant adhesive tape 3 are 700-800mm in length and 30-50mm in width. Further, the dimensions of the high-temperature resistant adhesive tape 3 are 750mm × 40mm, with a bottom wall distance of 8mm ± 2mm from the workpiece. The tape is suspended at 20mm intervals and fixed by silicone pressure strips on the side walls of the positioning frame, ensuring a vertical deviation ≤1° (see...). Figure 2 ).

[0042] Working principle:

[0043] The high-temperature resistant adhesive tape, suspended vertically, forms a physical barrier, and the 20mm spacing reduces the amount of nitrogen escaping. The low surface energy of the Teflon material reduces coking on the tape surface.

[0044] The exhaust fan 20 generates directional negative pressure, and the 75° tilt angle of the air inlet 21 guides the external heat dissipation airflow from the material inlet and outlet into the exhaust cover 2.

[0045] At least one embodiment provides a furnace body device, with reference to the appendix. Figure 1 The air curtain structures described in the above embodiment are symmetrically installed at both ends of the furnace equipment to form a two-way barrier.

[0046] In the description of the embodiments of this utility model, unless otherwise explicitly specified and limited, the terms "installation," "connection," and "linking" should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral connection; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium; and they can refer to the internal connection of two components. Those skilled in the art can understand the specific meaning of the above terms in this utility model based on the specific circumstances.

[0047] In the description of this utility model, it should be noted that the terms "center," "upper," "lower," "left," "right," "vertical," "horizontal," "inner," and "outer," etc., indicating orientation or positional relationships, are based on the orientation or positional relationships shown in the accompanying drawings and are only for the convenience of describing this utility model and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation, and therefore should not be construed as a limitation of this utility model. Furthermore, terms such as "first," "second," and other numerical terms used herein do not imply order or sequence unless expressly indicated herein. Therefore, without departing from the teachings of the exemplary embodiments, the first element, component, region, layer, or segment discussed above may be referred to as the second element, component, region, layer, or segment.

[0048] Based on the above-described preferred embodiments of this utility model, and through the foregoing description, those skilled in the art can make various changes and modifications without departing from the technical concept of this utility model. The technical scope of this utility model is not limited to the contents of the specification, but must be determined according to the scope of the claims.

Claims

1. A wind screen structure, characterized by, include: Mounting plate (1) is installed at the material inlet and outlet of the curing oven (4); The exhaust cover (2) is located above the mounting plate (1) and is connected to the exhaust fan (20); Several high-temperature resistant adhesive tapes (3) are evenly distributed in parallel on the inner top wall of the mounting plate (1); The exhaust fan (20) generates directional negative pressure airflow through the exhaust cover (2), and the extension direction of the high temperature resistant adhesive tape (3) is perpendicular to the material conveying direction in the curing oven (4) to form a composite barrier against the hot airflow in the curing oven (4).

2. The air curtain structure as described in claim 1, characterized in that, The adjacent spacing of the high-temperature resistant adhesive tape (3) is 15-25mm.

3. The air curtain structure as described in claim 1, characterized in that, The dimensions of a single high-temperature resistant adhesive tape (3) are 700-800mm in length and 30-50mm in width.

4. The air curtain structure as described in claim 1, characterized in that, The high-temperature resistant adhesive tape (3) is made of Teflon composite material, and the distance between its bottom wall and the workpiece (40) is 5-10 mm.

5. The air curtain structure as described in claim 1, characterized in that, An air inlet (21) is provided on the side wall of the exhaust hood (2) away from the curing oven (4), and the rectangular cross section of the air inlet (21) forms an acute angle with the horizontal plane.

6. The air curtain structure as described in claim 5, characterized in that, The rectangular cross-section of the air inlet (21) has an angle of 70°-85° with the horizontal plane.

7. The air curtain structure as described in claim 6, characterized in that, The rectangular cross-section of the air inlet (21) has an opening size of 800mm*125mm.

8. The air curtain structure as described in claim 1, characterized in that, It also includes a heat insulation filling layer (10), which is made of ceramic fiber cotton and is filled in the connection gap between the mounting plate (1) and the exhaust cover (2).

9. A furnace body device, comprising a material inlet and outlet, characterized in that, The material inlet and outlet are respectively provided with the air curtain structure as described in any one of claims 1-8 to form a two-way thermal airflow barrier.

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